TW530419B - Level shift circuit without junction breakdown of transistors - Google Patents
Level shift circuit without junction breakdown of transistors Download PDFInfo
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- TW530419B TW530419B TW91106235A TW91106235A TW530419B TW 530419 B TW530419 B TW 530419B TW 91106235 A TW91106235 A TW 91106235A TW 91106235 A TW91106235 A TW 91106235A TW 530419 B TW530419 B TW 530419B
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530419 五、發明說明α) 發明之領域 本發明係提供一種電位轉換電路,尤指一種無閘極氧 化層崩潰以及無汲極接面崩潰的電位轉換電路。 背景說明 金屬乳化半導體電晶體(metal oxide semiconductor transistor, MOS)元件中,閘極(gate) 氧化層(ox i de)的品質良窳會影響整個電晶體元件的操 作特性,例如氧化層中電荷的分佈不但會影響該電晶體元 件的臨界電壓(threshold voltage, Vt),更會由於電荷 的存在而使該氧化層的崩潰電壓(breakdown voltage) 降低。請參閱圖一,圖一為習知金屬氧化半導體電晶體1 〇 之氧化層電荷分佈的示意圖。金屬氧化半導體電晶體丨0包 含一金屬層1 1 (作為閘極),一氧化層1 2,以及一基底 (substrate) 13,一般而言,氧化層中電荷的種類主要 可區分為介面陷捕電荷(interface trapped charge, Qit)14,固定氧化層電荷(fixed oxide charge, Qf)16, 氧化層陷捕電荷(oxide trapped charge, Qot)18,以及 可移動電荷(mobile charge, Qm)20,其中介面陷捕電荷 1 4主要形成於氧化層1 2與基底1 3交接處,主要是基底1 3中 的石夕(silicon,Si)原子與氧化層11中的二氧化矽 (Si 〇2)分子因為於氧化層12與基底13交接處的晶格530419 V. Description of the invention α) Field of the invention The present invention provides a potential conversion circuit, especially a potential conversion circuit without gate oxide layer collapse and without drain junction collapse. Background: In metal oxide semiconductor transistor (MOS) devices, the quality of the gate oxide layer (ox i de) will affect the operating characteristics of the entire transistor device, such as the charge in the oxide layer. The distribution not only affects the threshold voltage (Vt) of the transistor element, but also reduces the breakdown voltage of the oxide layer due to the presence of charge. Please refer to FIG. 1. FIG. 1 is a schematic diagram of the charge distribution of an oxide layer of a conventional metal oxide semiconductor transistor 10. Metal oxide semiconductor transistors 丨 0 includes a metal layer 1 1 (as a gate electrode), an oxide layer 12 and a substrate 13. Generally speaking, the types of charges in the oxide layer can be mainly divided into interface traps. Interface trapped charge (Qit) 14, fixed oxide charge (Qf) 16, oxide trapped charge (Qot) 18, and mobile charge (Qm) 20, of which The interface trapped charge 1 4 is mainly formed at the junction of the oxide layer 12 and the substrate 13, mainly the silicon (Si) atoms in the substrate 13 and the silicon dioxide (Si 〇2) molecules in the oxide layer 11 Because the lattice at the junction of the oxide layer 12 and the substrate 13
第5頁 530419 五、發明說明(2) (lattice)不連績而產生缺陷(defect),進一步造成 矽-石夕之間的鍵結與矽-氧之間的鍵結斷離而產生介面陷捕 電荷1 4,固定氧化層電荷1 6主要分佈於氧化層1 1與基底1 3 交接處附近’固定氧化層電荷1 6係為正電荷,且固定氧化 層電荷1 6並無法經由充放電而消失,主要由於氧化的過程 中,當氧化突然終止時,氧化 的過量石夕離子會因為來不及與 於氧化層1 2中,氧化層陷捕電 中’主要由於氧化層1 2本身結 成’且於電子或電洞引入該缺 荷2 0主要是於製程中所引入的 子’鉀離子等,且可以在氧化 層1 2與基底1 3交接處所存在 氧分子進行氧化反應而存留 荷1 8則分佈於整個氧化層i 2 構的缺陷(defect)所造 陷時才會帶電,而可移動電 金屬離子等雜質,例如鈉離 層1 2中自由移動。 體圖圖:Ϊ圖一:示之金屬氧化半導體電晶 金屬氧化丰邕:^ 、屬氧化半導體電晶體1 〇包含一 η型 體(PMOS)電e俨^〇S)】電晶體22及—ρ型金屬氧化半導 ινιυ〜冤晶體24,η型金屬《各伞、皆 ,其係為金屬,一源極28屬/係化1體22包含-間極 :導體24包含-閑㈣,其係為金屬層31 ’ ”型金屬氧化 二摻雜區,:沒極36,其係為雜:源極34丄,係為 n型金屬氡化半導體2 2及p型金屬^ °°,以及一氧化層 導:型产底(p,bstrate) 38上、,半導體作 4另包含~ η型井(N-well) 4 0相1 P型金屬氧化半 - 〇相鄰於P型基底38,而Page 5 530419 V. Description of the invention (2) (lattice) Defects caused by non-continuous succession, further causing the bond between the silicon-shixi and the silicon-oxygen bond to break off, resulting in interface depression The trapped charge 1 4 and the fixed oxide layer charge 16 are mainly distributed near the junction of the oxide layer 1 1 and the substrate 1 3. The 'fixed oxide layer charge 16 is a positive charge, and the fixed oxide layer charge 16 cannot be charged and discharged. The disappearance is mainly due to the oxidation process. When the oxidation suddenly stops, the excessive oxidized ions will be too late to be in the oxide layer 12. The oxide layer traps electricity 'mainly due to the formation of the oxide layer 2 itself' and in The electron or hole introduces this lack of charge 2 0 mainly into the daughter 'potassium ions' introduced in the process, and can carry out the oxidation reaction of the oxygen molecules existing at the interface between the oxide layer 12 and the substrate 13 and the retained charge 18 is distributed. Only when the entire structure of the oxide layer i 2 is caused by a defect (defect) is charged, and impurities such as mobile electric metal ions, such as sodium, can move freely in the layer 12. Volume diagram: Figure 1: Metal oxide semiconductor transistor shown in the figure: metal oxide semiconductor metal oxide: ^, belongs to the oxide semiconductor transistor 1 〇 contains an η-type body (PMOS) e e ^^ S)] transistor 22 and- ρ-type metal oxide semiconducting ινιυ ~ inferior crystal 24, η-type metal "all umbrellas, all of which are metal, a source of 28 genus / system 1 body 22 contains-interpole: conductor 24 contains-leisure, It is a metal layer 31 '”type metal oxide doped region: Infinite 36, which is a hetero: source 34 丄, which is an n-type metal halide semiconductor 2 2 and a p-type metal ^ °°, and a Oxide layer conduction: p-bstrate 38, semi-conductor 4 ~ n-well 4 0 phase 1 P-type metal oxide half-0 adjacent to P-type substrate 38, and
530419 五、發明說明(3) 源極3 4及沒極3 6係經由η型井4 0與p塑基底3 8隔離並且透過 η型井40來提供ρ型金屬氧化半導體24導通電流時所需的通 道(channel)。對η型金屬氧化半導體22而言,當閘極26 與汲極3 0之間的電壓差大於一額定值時,半導體材料内的 共價鍵將遭受外加電場的破壞,且由於氧化層3 1本身即包 含複數個電荷,因此受該外加電場影響,造成氧化層3 1中 產生電子擾動而使氧化層3 1的電子數急遽增加,使得η型 金屬氧化半導體2 2的特性因為氧化層3 1崩潰被破壞而失 效。同樣地,對ρ型金屬氧化半導體2 4而言,當閘極3 2與 沒極3 6之間的電壓差大於一額定值時,半導體材料内的共 價鍵將遭受外加電場的破壞,且由於氧化層3 7本身即包含 複數個電荷,因此受該外加電場影響,造成氧化層3丨中產 生電子擾動而使氧化層3 1的電子數急遽增加,使得ρ型金 屬氧化半導體2 4的特性因為氧化層3 7被破壞而失效。 請參閱圖三,圖三為習知電位轉換(level shift) 電路5 0的示意圖。電位轉換電路5 〇包含有複數個電晶體 52、54、56、58,其中電晶體52、56為ρ型金屬氧化半導 體電晶體,而電晶體5 4、5 8為n型金屬氧化半導體電晶 體。電晶體5 4的閘極係連接於一電壓ν d d,電晶體5 2、5 6 的源極係連接於一電壓Vn,而輸入電壓Vin之高準位電壓 值為Vdd,而低準位電壓值為接地電壓(〇伏特)。舉例來 乂 ’若Vn及Vdd分別等於1 〇伏特及3· 3伏特,以及電晶體 5 2、5 4、5 6、5 8的崩潰電壓為丨0伏特時,則當輸入電壓530419 V. Description of the invention (3) Source 3 4 and non-pole 3 6 are required when isolating the p-type substrate 38 from the n-type well 40 and passing the n-type well 40 to provide the on-state current of the p-type metal oxide semiconductor 24 Channel. For the n-type metal oxide semiconductor 22, when the voltage difference between the gate electrode 26 and the drain electrode 30 is greater than a rated value, covalent bonds in the semiconductor material will be damaged by an external electric field, and due to the oxide layer 3 1 itself contains a plurality of charges. Therefore, due to the influence of the applied electric field, an electronic disturbance in the oxide layer 3 1 is caused, and the number of electrons in the oxide layer 31 is increased sharply, so that the characteristics of the n-type metal oxide semiconductor 2 2 are due to the oxide layer 3 1 The crash was destroyed and failed. Similarly, for the p-type metal oxide semiconductor 24, when the voltage difference between the gate 32 and the non-electrode 36 is greater than a rated value, the covalent bonds in the semiconductor material will be damaged by an external electric field. And because the oxide layer 3 7 itself contains a plurality of charges, it is affected by the external electric field, which causes an electronic disturbance in the oxide layer 3 丨 and the number of electrons in the oxide layer 31 increases sharply, which makes the ρ-type metal oxide semiconductor 2 4 The characteristics are lost because the oxide layer 37 is destroyed. Please refer to FIG. 3, which is a schematic diagram of a conventional level shift circuit 50. The potential conversion circuit 50 includes a plurality of transistors 52, 54, 56, and 58. The transistors 52, 56 are p-type metal oxide semiconductor transistors, and the transistors 5 4, 58 are n-type metal oxide semiconductor transistors. . The gate of transistor 54 is connected to a voltage ν dd, the source of transistors 5 2 and 5 6 is connected to a voltage Vn, and the high level voltage value of the input voltage Vin is Vdd, and the low level voltage is Value is ground voltage (0 volts). For example, 乂 ’If Vn and Vdd are equal to 10 volts and 3.3 volts, respectively, and the breakdown voltage of transistor 5 2, 5 4, 5 6, 5 8 is 丨 0 volts, then when the input voltage
530419 五、發明說明(4) 5 4係 晶體52導通 晶體5 6係為 V i η為高準位(3 · 3伏特)時,電晶體5 8係為導通而電晶體 為非導通,所以端點Β的電壓會趨近接地電壓而使電 c; 〇播^,同時使端點Α的電壓趨近1 〇伏特,而此時電 奍導通,因此輸出電壓Vout趨近接地電壓,斜 電晶體5 2、5 8而言’雖然其係為導通狀態,但是由於汲極 與閘極之間的逆向偏壓趨近1 0伏特,如上所述,由於逆向 偏壓大於電晶體5 2、5 8的崩潰電壓,因此會造成閘極氧化 層的崩潰而產生大量崩潰電流而破壞電位轉換電路5 0的特 性。同樣地,當輸入電壓V i η為低準位(〇伏特)時,電晶 體5 8係為非導通’而電晶體5 4會導通而使端點Α的電壓趨 近0伏特,同時導通電晶體5 6而使端點B的電壓趨近1 〇伏 …,此時電晶體52係為非導通,因此,輸出電壓Vout會趨 近1 0伏特,對電晶體5 4、5 6而言,雖然其係為導通狀態, 但是由於汲極與閘極之間的偏壓趨近1 〇伏特,如上所述, 由於偏壓大於電晶體54、5 6的崩潰電壓,_因此會造成相對 應氧化層的崩潰而產生大量崩潰電流,同時破壞電位轉換 電路50的特性。若電位轉換電路5〇為了避免電晶體 、 54、56、58的氧化層於高電壓差的情況下崩潰,因此, 位轉換電路50必須控制電壓Vn的準位(例如5伏特)以 电 晶體52、54、56、58正常運作。如上所述,若電晶 54、56、58係採用一般金屬氧化半導體電晶體的製 會由於閘極氧化層本身因為電荷摻雜而具有較低 ^ 壓,進-步地使電位轉換電路5〇於高電壓(Vn)操作^貝^ 到電晶體52、54、56、58的低崩潰電壓影響而不穩定,所530419 V. Description of the invention (4) 5 4 series crystal 52 conductive crystal 5 6 series is V i η is high level (3.3 volts), transistor 5 8 series is conductive and transistor is non-conductive, so the terminal The voltage at the point B will approach the ground voltage and cause electricity c; ○ broadcast ^, and at the same time the voltage at the terminal A will approach 10 volts, and at this time the electric conduction is turned on, so the output voltage Vout approaches the ground voltage, the oblique transistor 5 2, 5 8 'Although it is in the on state, the reverse bias between the drain and gate approaches 10 volts. As mentioned above, the reverse bias is greater than the transistor 5 2, 5 8 The breakdown voltage will cause the breakdown of the gate oxide layer and generate a large amount of breakdown current, which will destroy the characteristics of the potential conversion circuit 50. Similarly, when the input voltage V i η is at a low level (0 volts), the transistor 58 is non-conducting and the transistor 54 will be turned on, so that the voltage at the terminal A will approach 0 volts and turn on. The crystal 5 6 makes the voltage at the terminal B approach 10 volts ... At this time, the transistor 52 is non-conducting, so the output voltage Vout will approach 10 volts. For the transistors 5 4 and 5 6, Although it is in the on state, the bias voltage between the drain and the gate approaches 10 volts. As mentioned above, because the bias voltage is greater than the breakdown voltage of the transistors 54 and 56, it will cause corresponding oxidation. The collapse of the layer generates a large amount of collapse current, and simultaneously destroys the characteristics of the potential conversion circuit 50. If the potential conversion circuit 50 is to prevent the oxide layers of the transistors 54, 56, and 58 from collapsing under high voltage differences, the bit conversion circuit 50 must control the level of the voltage Vn (for example, 5 volts) to the transistor 52. , 54, 56, 58 are operating normally. As mentioned above, if the transistors 54, 56, 58 are made of general metal oxide semiconductor transistors, the gate oxide layer itself will have a lower voltage due to charge doping, and the potential conversion circuit will be further advanced. Due to the high voltage (Vn) operation, the low breakdown voltage of transistors 52, 54, 56, and 58 is not stable.
530419 五、發明說明(5) 以電位轉換電路5 0無法將一低電位的輸入訊號轉換為一電 壓差過大的高電位輸出訊號。 發明概述 本發明的主要目的在於提供一種包含高崩潰電壓電晶 體的電位轉換電路,以解決上述問題。 本發明之申請專利範圍提供一種電位轉換電路,用來 將一輸入電壓轉換成一輸出電壓,該電位轉換電路包含至 少一互補金屬氧化半導體電晶體(complementary metal oxide semiconductor transistor),設於一 p 型基底 (p-substrate)上,其包含一 p型金屬氧化半導體電晶體 及一 η型金屬氧化半導體電晶體。該η型金屬氧化半導體 電晶體包含一閘極,一汲極,以及一源極。該汲極包含一 η型井(n-well),形成於該ρ型基底上,以及一第一 Ν+摻 雜區域,設於該η型井中,而該源極,其包含一第二N +摻 雜區域,形成於該ρ型基底上。 發明之詳細說明 請參閱圖四,圖四為本發明η型金屬氧化半導體電晶 體6 0的結構示意圖。η型金屬氧化半導體電晶體6 0包含有 一閘極6 2,其係為金屬或複晶矽,一源極6 4,其係為η型530419 V. Description of the invention (5) The potential conversion circuit 50 cannot convert an input signal with a low potential to a high potential output signal with an excessive voltage difference. SUMMARY OF THE INVENTION The main object of the present invention is to provide a potential conversion circuit including a high breakdown voltage electric crystal to solve the above problems. The patent application scope of the present invention provides a potential conversion circuit for converting an input voltage into an output voltage. The potential conversion circuit includes at least a complementary metal oxide semiconductor transistor and is disposed on a p-type substrate. (p-substrate), which includes a p-type metal oxide semiconductor transistor and an n-type metal oxide semiconductor transistor. The n-type metal oxide semiconductor transistor includes a gate, a drain, and a source. The drain electrode includes an n-well formed on the p-type substrate, and a first N + doped region is provided in the n-well, and the source electrode includes a second N-well. A + doped region is formed on the p-type substrate. Detailed description of the invention Please refer to FIG. 4. FIG. 4 is a schematic structural diagram of an n-type metal oxide semiconductor electric crystal 60 according to the present invention. The n-type metal oxide semiconductor transistor 60 includes a gate electrode 62, which is a metal or a polycrystalline silicon, and a source electrode 64, which is an η-type.
第9頁 530419Page 9 530419
摻雜區,以及一汲極6 6,其係為n型摻雜區,一 p型基底 68,一氧化層67,以及一 n型井7〇,而n型井7〇形成於汲極 66與ρ型基底68之間以隔離汲極66與ρ型基底68,避免汲極 6 6與ρ型基底68直接接觸而形成ΡΝ接面,經由η型井7〇來提 南基底6 8與沒極6 6之間的崩潰電壓,避免沒極6 6與基底6 8 的接面發生崩潰效應。 請參閱圖五,圖五為本發明第一種電位轉換電路8 〇的 電路示意圖。電位轉換電路80包含有複數個電晶體82、 84、86、88、90、92、94,其中電晶體 86、88、90、9 2係 為Ρ型金屬氧化半導體電晶體,電晶體82、84、94係為η型 金屬氧化半導體電晶體,請注意,電晶體84、94係為使用 圖四所示之η型金屬氧化半導體電晶體6 0,而電晶體8 2係 為習知η型金屬氧化半導體電晶體結構。電晶體88、90的 源極連接於電壓源Vn,而電晶體8 8、9 0係以交錯耦合 (cros s-coup led)的方式連接,電晶體86、92的閘極連 接於一參考電壓Vk,而電晶體84、94的閘極係連接於一電 壓源Vdd。輸入電壓Vi η的高準位電壓值為Vdd,而低準位 電壓值為接地電壓(〇伏特)。電位轉換電路8 0的操作詳 述如下,若輸入電壓Vi η的高準位電壓值Vdd為3· 3伏特, 參考電壓Vk為3· 3伏特,電壓源Vn為1 〇伏特,以及崩潰電 壓為1 0伏特,當輸入電壓V i η為高準位(3 · 3伏特)時,電 晶體9 4非導通,而電晶體8 2、8 4係為導通而使端點Β的電 壓趨近接地電壓(〇伏特),由於電晶體8 6、9 2的閘極連Doped region, and a drain 66, which is an n-type doped region, a p-type substrate 68, an oxide layer 67, and an n-type well 70, and the n-type well 70 is formed at the drain 66 The drain electrode 66 and the p-type substrate 68 are separated from the p-type substrate 68 to avoid direct contact between the drain electrode 66 and the p-type substrate 68 to form a PN interface. The n-type well 70 is used to raise the south substrate 68 and the substrate. The collapse voltage between the poles 6 and 6 avoids the collapse effect of the interface between the poles 6 and the substrate 6 8. Please refer to FIG. 5. FIG. 5 is a schematic circuit diagram of a first potential conversion circuit 80 of the present invention. The potential conversion circuit 80 includes a plurality of transistors 82, 84, 86, 88, 90, 92, and 94. Among them, the transistors 86, 88, 90, and 9 are P-type metal oxide semiconductor transistors, and the transistors 82, 84 Series 94 and 94 are n-type metal oxide semiconductor transistors. Please note that transistors 84 and 94 are η-type metal oxide semiconductor transistors 60 shown in Figure 4, and transistor 8 2 is a conventional η-type metal. Oxidized semiconductor transistor structure. The sources of the transistors 88 and 90 are connected to the voltage source Vn, while the transistors 88 and 90 are connected in a cros s-coup led manner. The gates of the transistors 86 and 92 are connected to a reference voltage. Vk, and the gates of the transistors 84 and 94 are connected to a voltage source Vdd. The high-level voltage value of the input voltage Vi η is Vdd, and the low-level voltage value is the ground voltage (0 volts). The operation of the potential conversion circuit 80 is detailed as follows. If the high-level voltage value Vdd of the input voltage Vi η is 3.3V, the reference voltage Vk is 3.3V, the voltage source Vn is 10V, and the breakdown voltage is 10 volts. When the input voltage V i η is at a high level (3.3 volts), transistor 9 4 is non-conducting, while transistors 8 2 and 8 4 are conducting and the voltage at terminal B approaches the ground. Voltage (0 volts) due to the gate connection of transistors 8 6, 9 2
530419 五、發明說明(7) 接於參考電壓Vk ( 3 · 3伏特),所以電晶體8 6係為非導 通,所以端點B的電壓(〇伏特)不會傳輸至端點C,而當 電晶體8 6的源極(端點C)電壓挺*幵至大於其閘極電壓 (3 · 3伏特)與其臨界電壓V t之總和時,電晶體8 6會被開 啟直到電晶體8 6的源極電壓逐漸調整至小於其閘極電壓與 其臨界電壓之總和為止。因此電晶體9 0導通而使端點d的 電壓趨近1 0伏特,對電晶體9 0而吕’閘極與沒極之間的逆 向電壓趨近6 · 6伏特,因此不會產生崩潰效應,同理,電 晶體8 8的閘極與汲極之間的逆向電壓趨近6 · 6伏特,因此 亦不會產生崩潰效應,最後,由於端點D的電壓趨近1 〇伏 特,因此電晶體9 2導通而使端點Α的電壓趨近1 〇伏特,如 上所述’本實施例避免端點B的0伏特傳輸至端點(;而造成 電晶體8 8、9 0發生崩潰現象。當輸入電壓v i 低準位(〇 伏特)時,電晶體8 2非導通,而電晶體9 4係為導通而使端 點A的電屢趨近接地電壓(〇伏特),由於電晶體8 6、9 2的 閘極連接於參考電壓V k ( 3 · 3伏特),所以端點a的電麼 (0伏特)不會傳輸至端點D,而當電晶體9 2的源極(端點 D)電壓提昇至大於其閘極電壓(3· 3伏特)與其臨界電壓 V t之總和時’電晶體9 2會被開啟直到電晶體9 2的源極電壓 逐漸調整至小於其閘極電壓與其臨界電壓之總和為止。因 此電土體88導通而使端點C的電壓趨近1〇伏特,對電晶體 8 8而a ,閘極與汲極之間的逆向電壓趨近6 · 6伏特,因此 不會產生崩潰效應,同理,電晶體90的閘極與汲極之間的 逆向電壓趨近6· 6伏特,因此亦不會產生崩潰效應,最530419 V. Description of the invention (7) Connected to the reference voltage Vk (3.3 volts), so transistor 8 6 is non-conducting, so the voltage at terminal B (0 volts) will not be transmitted to terminal C, and when When the source (terminal C) voltage of transistor 86 is high enough to exceed the sum of its gate voltage (3.3 volts) and its threshold voltage Vt, transistor 86 will be turned on until transistor 8 6's The source voltage is gradually adjusted to be less than the sum of its gate voltage and its threshold voltage. Therefore, the transistor 90 is turned on and the voltage at the terminal d approaches 10 volts. For the transistor 90, the reverse voltage between the gate and the pole of the transistor 90 approaches 6 · 6 volts, so no collapse effect will occur. In the same way, the reverse voltage between the gate and the drain of the transistor 8 8 approaches 6. 6 volts, so there will be no collapse effect. Finally, because the voltage at the terminal D approaches 10 volts, The crystal 92 is turned on so that the voltage of the terminal A approaches 10 volts. As described above, 'this embodiment avoids the transmission of 0 volts from the terminal B to the terminal (; and causes the transistors 8.8 and 90 to collapse. When the input voltage vi is at a low level (0 volts), transistor 8 2 is non-conducting, while transistor 9 4 is conducting, and the electricity at terminal A repeatedly approaches the ground voltage (0 volts). The gates of 9 and 2 are connected to the reference voltage V k (3.3 volts), so the electricity at terminal a (0 volts) will not be transmitted to terminal D, and when the source of transistor 9 2 (terminal D) When the voltage rises above the sum of its gate voltage (3.3 volts) and its critical voltage Vt, the transistor 9 2 will be turned on until the voltage The source voltage of the body 92 is gradually adjusted to be less than the sum of its gate voltage and its critical voltage. Therefore, the electric soil body 88 is turned on and the voltage at the terminal C approaches 10 volts. For the transistor 88 and a, the gate The reverse voltage between the pole and the drain approaches 6. 6 volts, so there is no collapse effect. Similarly, the reverse voltage between the gate and the drain of transistor 90 approaches 6.6 volts, so it does not Will have a crash effect, most
第11頁 530419 、發明說明(8) 2,由於端點c的電壓趨近丨〇伏特, ”點B的電壓趨近10伏特,如上所;此體;;導通* ,八的。伏特傳輸至端點D而造成電晶本:::避免端 f,此外,由於電晶體84、94於運曰作體二中9:發,崩潰現 極端點電…。伏特)係、大於其餘;乍;;; =受的汲 本實姑ί办丨丨tb 而 、接面朋〉貝電壓’因此 化半導體電:】==94:、利用圖四所示之η型金屬氧 導體電曰曰體60的結構而擁有較高的崩潰電壓特性。 的電:為本發明第二種電位轉換電路1 00 n l位轉換電路100包含有複數個電晶體 84、 86、 88、 90、 92、 94、 1〇2以及一反向器 (mverter) 1〇4,其中電晶體86、⑽、9〇、92係為 = ,電晶體以、“、“、104係為n型金 屬乳化+導體電晶冑’請注意,電晶體84、94係為使用圖 四所不之η型金屬氧化半導體電晶體6〇,而電晶體82、1〇2 係為習知η型金屬氧化半導體電晶體結構。電晶體88、9〇 的源極連接於電壓源Vn,而電晶體88、9〇係以交錯耦合的 方式連接,電晶體86、92的閘極連接於一參考電壓Vk,而 電晶體84、94的閘極係連接於一電壓源Vdd。輸入電壓vin 的咼準位電壓值為Vdd,而低準位電壓值為接地電壓(〇伏 特),而反向器104連接與電晶體82、1〇2的閘極。電位轉 換電路1〇〇的操作詳述如下,若輸入電壓Vin的高準位電壓 值¥(1(1為3.3伏特,參考電壓^為33伏特,電壓源“為1〇 伏特,以及氧化層崩潰電壓及接面崩潰電壓皆為丨〇伏特,Page 11 530419, description of the invention (8) 2. As the voltage at terminal c approaches 丨 0 volts, the voltage at point B approaches 10 volts, as described above; this body ;; conduction *, eight. The volts are transmitted to The terminal D causes the transistor: :: to avoid terminal f. In addition, because the transistors 84 and 94 are at 9: 9, they will collapse to the extreme point .... Volts), greater than the rest; ;; = 的 本本 公 本 办 丨 tb Then, the contact voltage> Beijing voltage 'so the semiconductor power:] == 94 :, using the n-type metal oxygen conductor shown in Figure 4 Structure has high breakdown voltage characteristics. Electricity: The 100 nl bit conversion circuit 100 of the second potential conversion circuit of the present invention includes a plurality of transistors 84, 86, 88, 90, 92, 94, 1〇 2 and a reverser (mverter) 104, where the transistor 86, ⑽, 90, 92 series = =, the transistor ",", 104 series is n-type metal emulsion + conductor transistor 胄 'Please Note that the transistors 84 and 94 are η-type metal oxide semiconductor transistors 60 and the transistors 82 and 10 2 are conventional η-type metal oxides. Transistor transistor structure. Sources of transistors 88 and 90 are connected to voltage source Vn, while transistors 88 and 90 are connected in a staggered coupling manner. Gates of transistors 86 and 92 are connected to a reference voltage Vk. The gates of the transistors 84 and 94 are connected to a voltage source Vdd. The 咼 level voltage value of the input voltage vin is Vdd, and the low level voltage value is the ground voltage (0 volts), and the inverter 104 is connected. And the gate of transistor 82, 102. The operation of the potential conversion circuit 100 is detailed as follows. If the high-level voltage value of the input voltage Vin is ¥ (1 (1 is 3.3 volts, and the reference voltage ^ is 33 volts, The voltage source "is 10 volts, and the breakdown voltage of the oxide layer and the breakdown voltage of the interface are 丨 0 volts.
530419 五、發明說明(9) 當輸入電壓V i η為低準位(0伏特)時’電晶體9 4、1 〇 2非 導通,而電晶體82、84係為導通而使端點Β的電壓趨近接 地電壓(0伏特),由於電晶體8 6、9 2的閘極連接於參考 電壓Vk ( 3· 3伏特),所以端點Β的電壓(0伏特)不會傳 輸至端點C,而當電晶體86的源極(端點C)電壓提昇至大 於其閘極電壓(3 _ 3伏特)與其臨界電壓V t之總和時,電 晶體8 6會被開啟直到電晶體8 6的源極電壓逐漸調整至小於 其閘極電壓與其臨界電壓之總和為止。因此電晶體9 0導通 而使端點D的電壓趨近1 0伏特,對電晶體9 0而言,閘極與 汲極之間的逆向電壓趨近6. 6伏特,因此不會產生崩潰效 應,同理,電晶體8 8的閘極與汲極之間的逆向電壓趨近6. 6伏特,因此亦不會產生崩潰效應,最後,由於端點D的電 壓趨近1 0伏特,因此電晶體9 2導通而使端點A的電壓趨近 1 0伏特,如上所述,本實施例避免端點B的〇伏特傳輸至端 點C而造成電晶體88、90發生崩潰現象。耆輸入電壓yin為 高準位(3· 3伏特)時,電晶體82非導通,而電晶體94、 1 0 2係為導通而使端點A的電壓趨近接地電壓(〇伏特), 由於電晶體86、92的閘極連接於參考電壓vk ( 3. 3伏特 )’所以端點A的電壓(〇伏特)不會傳輸至端點ρ,而當 電晶體9 2的源極(端點D)電壓提昇至大於其閘極電壓 (3· 3伏特)與其臨界電壓Vt之總和時,電晶體92會被開 啟直到電晶體9 2的源極電壓逐漸調整至小於其閘極電壓與 其臨界電壓之總和為止。因此電晶體88導通而使端點C的 電壓趨近1 〇伏特’對電晶體8 8而言,閘極與汲極之間的逆530419 V. Description of the invention (9) When the input voltage V i η is at a low level (0 volts), the transistor 9 is not conductive, while the transistors 82 and 84 are conductive and the terminal B is The voltage approaches the ground voltage (0 volts). Since the gates of the transistors 8 6, 9 2 are connected to the reference voltage Vk (3.3 volts), the voltage at the terminal B (0 volts) will not be transmitted to the terminal C When the source (terminal C) voltage of transistor 86 rises above the sum of its gate voltage (3_3 volts) and its threshold voltage V t, transistor 86 will be turned on until transistor 8 6's The source voltage is gradually adjusted to be less than the sum of its gate voltage and its threshold voltage. Therefore, the transistor 90 is turned on so that the voltage at the terminal D approaches 10 volts. For the transistor 90, the reverse voltage between the gate and the drain approaches 6.6 volts, so there is no collapse effect. In the same way, the reverse voltage between the gate and the drain of the transistor 8 8 approaches 6.6 volts, so there will be no collapse effect. Finally, because the voltage at the terminal D approaches 10 volts, The crystal 92 is turned on so that the voltage at the terminal A approaches 10 volts. As described above, this embodiment prevents the 0 volts at the terminal B from being transmitted to the terminal C and cause the transistors 88 and 90 to collapse.时 When the input voltage yin is at a high level (3.3 volts), the transistor 82 is non-conducting, and the transistors 94 and 102 are turned on so that the voltage at the terminal A approaches the ground voltage (0 volts). The gates of the transistors 86 and 92 are connected to the reference voltage vk (3.3 volts) ', so the voltage (0 volts) at the terminal A will not be transmitted to the terminal ρ, and when the source of the transistor 9 2 (terminal D) When the voltage rises above the sum of its gate voltage (3.3V) and its critical voltage Vt, transistor 92 will be turned on until the source voltage of transistor 92 is gradually adjusted to be less than its gate voltage and its critical voltage So far. Therefore, the transistor 88 is turned on and the voltage at the terminal C approaches 10 volts. 'For the transistor 88, the inverse between the gate and the drain
530419 五、發明說明(ίο) 向電壓趨近6 · 6伏特,因此不會產生崩潰效應,同理,電 晶體9 0的閘極與汲極之間的逆向電壓趨近6 6伏特,因此 亦不會產生崩潰效應,最後,由於端點C的電壓趨近1 〇伏 特,因此電晶體8 6導通而使端點B的電壓趨近1 〇伏特,如 上所述’本實施例避免端點A的〇伏特傳輸至端點j)而造成 電a曰體8 8、9 0發生崩潰現象。此外’由於電晶體8 4、9 4於 運作過程中必須承受的汲極端點電壓(丨〇伏特)係大於盆 接面崩潰電壓,因此本實施例中,電晶體84、94係利用圖 四所不之η型金屬氧化半導體電晶體6〇的結構而擁有較 的崩潰電壓特性。 請參閱 5 0會因為崩 一高電位( 電路,而電 電路,亦即 路8 0或電位 舉例來說, 伏特,而低 以輸出電壓 壓差係小於 Vout作為下 入電壓Vin, 級電路的低 圖二,圖五,及圖六,由於習知電位轉換電路 潰效應而無法將一低電位(Vdd)順利轉換為 Vn),然而,可將電位轉換電路5 〇作為第一級 位轉換電路80或電位轉換電路1〇〇作為第二級 將電位轉換電路50的輸出電壓作為電位換 轉換電路100的輸入電壓以執行進一步 、, : = 之輸入電壓Vln的高準位為3·3 ^位為接地電壓,以及電壓源Vn為5伏特,所 out即為5伏特或〇伏特,且閘極盥汲、 崩潰電壓,然後將電位轉換電路_ = 一/進電^ 並進仃電位轉換的工作,請注意,此 電位(Vdd)則$ 5伏特,而使電位轉換電路80或 530419 五、發明說明(11) ^---- 電位轉換電路1〇〇的輸出電 低準位為接地電壓(〇伏特 〇Ut之南準位為1 〇伏特,而 目的,以及減小電晶體之門^,亦可達到所需電位轉換的 之範疇。 極對汲極的跨壓,均屬本發明 較於習知技術 電壓Vk來控制 由電晶體8 6、 的崩潰效應, 程中,於汲極 轉換電路8 0、 電位轉換電路 壓差而產生崩 不需額外特殊 體的製程來完 的崩潰電壓, -參考 電壓經 氧化層 製程過 高電位 免其於 底的電 的程序 體電晶 電晶體 ’本發明電位轉換電路80、i 00利用 電晶體8 6、9 2是否導通,以避免接地 9 2傳輸之電晶體8 8、9 0的閘極而造成 並且於一般金屬氧化半導體電晶體的 端與基底之間打入一 η型井結構來提 100中電晶體84、94的崩潰電壓以避 80、100中,因為承受較大汲極對基 潰效應,此外,該植入一 η型井結構 的製程,而可利用一般金屬氧化半導 成,不但可大幅改善金屬氧化半導體 而且成本低廉。 以上所述僅為本發明之較佳實施例,凡依本發明申請 專利範圍所做之均等變化與修飾,皆應屬本發明專利之涵 蓋範圍。530419 V. Description of the Invention (ίο) Directional voltage approaches 6. 6 volts, so no collapse effect will occur. Similarly, the reverse voltage between the gate and drain of transistor 90 will approach 66 volts, so There will be no collapse effect. Finally, because the voltage at the terminal C approaches 10 volts, the transistor 86 is turned on and the voltage at the terminal B approaches 10 volts, as described above. 'This embodiment avoids the terminal A The transmission of 0 volts to the terminal j) caused the collapse of the electric body 8.8,90. In addition, because the drain voltages of the transistors 8 4 and 9 4 that must be withstood during operation are greater than the breakdown voltage of the basin junction, in this embodiment, the transistors 84 and 94 are used in FIG. Depending on the structure of the n-type metal oxide semiconductor transistor 60, it has a relatively breakdown voltage characteristic. Please refer to 5 0 because the circuit will collapse to a high potential (circuit, and the electrical circuit, that is, circuit 80 or potential, for example, volts, and low, the output voltage drop is less than Vout as the input voltage Vin, the low level of the circuit Figures 2, 5, and 6 show that a low potential (Vdd) cannot be smoothly converted to Vn due to the known collapse effect of the potential conversion circuit. However, the potential conversion circuit 50 can be used as the first-stage bit conversion circuit 80. Or the potential conversion circuit 100 is used as the second stage, and the output voltage of the potential conversion circuit 50 is used as the input voltage of the potential conversion circuit 100 to perform further. The high level of the input voltage Vln of == is 3 · 3 ^ is The ground voltage, and the voltage source Vn is 5 volts, so out is 5 volts or 0 volts, and the gate sinks and collapses the voltage, and then the potential conversion circuit _ = one / power ^ and the potential conversion work, please Note that this potential (Vdd) is $ 5 volts, so that the potential conversion circuit 80 or 530419 V. Description of the invention (11) ^ ---- The output low level of the potential conversion circuit 100 is the ground voltage (0 volts) 〇 South level of Ut is 1 〇 The purpose and the reduction of the gate of the transistor ^ can also achieve the scope of the required potential conversion. The voltage across the pole to the drain is controlled by the transistor compared to the voltage Vk of the conventional technology. 6. The collapse effect, in the process, in the drain conversion circuit 8 0, the voltage difference between the potential conversion circuit and the collapse voltage that does not require an extra special process to complete the collapse-the reference voltage is too high to avoid the potential through the oxide layer process Based on the electric program transistor of the bottom, the electric potential conversion circuit 80, i 00 of the present invention uses the transistor 8 6, 9 2 to be on or off, so as to avoid grounding the gate of the transistor 8 8, 9 0 which is transmitted. Cause and insert an n-type well structure between the end of the general metal oxide semiconductor transistor and the substrate to raise the breakdown voltage of the 100 transistors 84 and 94 to avoid the 80 and 100 because of the large drain-to-base collapse In addition, the process of implanting an n-well structure can be formed by using general metal oxide semiconductors, which not only can greatly improve metal oxide semiconductors but also has low cost. The above description is only a preferred embodiment of the present invention. according to Patent disclosure range of modifications and alterations made, Han also belong to the present invention cover the scope of the patent.
第15頁 530419 圖式簡單說明 圖式之簡單說明 圖一為習知金屬氧化半導體電晶體之氧化層電荷分佈 的示意圖。 圖二為圖一所示之金屬氧化半導體電晶體的結構示意 圖。 圖三為習知電位轉換電路的示意圖。 圖四為本發明η型金屬氧化半導體電晶體的結構示意 圖。 圖五為本發明第一種電位轉換電路的電路示意圖。 圖六為本發明第二種電位轉換電路的電路示意圖。 圖式之符號說明 10' 52、54、56、58、82、84> 86、· 88、90、92、 9 4、1 0 2 金屬氧化半導體電晶體 11 金屬層 1 2、3卜3 7、6 7 氧化層 13、38、68 基底 14 介面陷捕電荷 16 固定氧化層電荷 18 氧化層陷捕電荷 20 可移動電荷 2 2、6 0 η型金屬氧化半導體電晶體Page 15 530419 Brief description of the drawings Brief description of the drawings Figure 1 is a schematic diagram of the charge distribution of the oxide layer of a conventional metal oxide semiconductor transistor. Fig. 2 is a schematic diagram showing the structure of the metal oxide semiconductor transistor shown in Fig. 1. FIG. 3 is a schematic diagram of a conventional potential conversion circuit. FIG. 4 is a schematic structural view of an n-type metal oxide semiconductor transistor according to the present invention. FIG. 5 is a schematic circuit diagram of a first potential conversion circuit according to the present invention. FIG. 6 is a circuit diagram of a second potential conversion circuit according to the present invention. Explanation of symbols in the drawings 10 '52, 54, 56, 58, 82, 84 > 86, 88, 90, 92, 9 4, 1 0 2 Metal oxide semiconductor transistor 11 Metal layer 1 2, 3 3 37, 6 7 Oxide layer 13, 38, 68 Substrate 14 Interface trapped charge 16 Fixed oxide layer charge 18 Oxide layer trapped charge 20 Movable charge 2 2, 6 0 η-type metal oxide semiconductor transistor
第16頁 530419 圖式簡單說明 24 26' 32' 62 28、3[ 64 30^ 36^ 66 40、70 50' 80 > 100 104 P型金屬氧化半導體電晶體 閘極 源極 汲極 η型井 電位轉換電路 反向器Page 16 530419 Brief description of drawings 24 26 '32' 62 28, 3 [64 30 ^ 36 ^ 66 40, 70 50 '80 > 100 104 P-type metal oxide semiconductor transistor gate source drain n-type well Inverter for potential conversion circuit
第17頁Page 17
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