TW528799B - Cleaning agent, method and equipment - Google Patents

Abstract

A cleaning agent which can substitute for chlorofluorocarbon or chlorinated solvents, a method of cleaning therewith, and equipment therefor. In particular, a method of cleaning electronics parts such as printed boards or mounted parts or metallic parts which makes it possible to remove various contaminants from the parts and dry the same to the extent comparative to that of the method of cleaning with chlorofluorocarbon or chlorinated solvents, and a cleaning agent and equipment therefor. Examples of the cleaning agent include polar cleaning agents with a solubility parameter of 9 or above or a permittivity of 4 or above, mixtures thereof with other cleaning agents with a solubility parameter of less that 9 and a permittivity of less than 4, and cleaning agents containing as the active ingredient an azeotropic or pseudo-azeotropic composition containing a low-molecular-weight siloxane compound. The cleansing method is characterized by comprising at least one step selected from the groups consisting of the step of cleaning the object with a polar cleaning agent having a solubility parameter of 9 or above or a permittivity of 4 or above, the step of rinsing the object with a mixture of the above polar cleaning agent with another cleaning agent having a solubility parameter of less than 9 and a permittivity of less than 4, and the drying step.

Description

528799 Printed by the Central Laboratories of the Ministry of Economic Affairs and Consumer Cooperatives A7 B7 V. Description of the Invention (1) The present invention relates to cleaning agents, cleaning methods and cleaning devices that can replace Freon-based solvents or chlorine-based solvents. 'IC' modules, electronic components such as assembly substrates, metal thin films such as wire strips for transistors, bearings or precision micro-parts, etc. In the manufacturing process, there are often photoresist, flux, solder paste, cutting Oil, barbecue oil 'calendar oil, squeeze oil, punching oil, drawing oil, combination oil, line drawing oil and other water-based or solvent-based working oil, gray ash and other dirt attached to it. For example, in the process of manufacturing circuit substrates, it can usually be divided into the process of manufacturing the substrate itself (bare board) and the process of assembling IC or electronic parts on this substrate. However, printing is attached during the process of manufacturing bare boards. It is acid, alkali, etc. During the assembly process, it will adhere to the welding, flux and other dirt used in the assembly of welding parts. In particular, the dirt substances that must be removed are the active agents in the flux, and organic acid salts such as C u C {2 and (RCOO) 2Cu generated by the reaction with the oxide film of the base material. These are polar materials, which can cause leakage and displacement due to moisture absorption when left, reduce insulation resistance, and corrode tips or wiring. In addition, in the manufacturing of semiconductor engineering, the mixing of ionic substances also becomes a serious problem. For example, it is called "sodium panic." In addition, problems such as corrosion and discoloration may occur in metal-processed parts due to the residual dirt components as described above. It can be seen that the above-mentioned dirt substances must be removed during the subsequent process or manufacturing. Conventionally, a cleaning agent for the above-mentioned dirt is a Freon-based solvent represented by Freon 113, and organic solvents such as trichloroethane, trichloroethylene, tetrachloroethylene, and carbon tetrachloride are widely used. However, recently, the release of Freon will damage the ozone layer and have a great impact on the human body or organisms. Therefore, the paper size with a high ozone factor is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm). 4-(Please read the note on the back first (Fill in this page again)

528799 A7 B7 Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs V. Invention Description (2) Freon 12 or Freon 1 1 3 etc. have gradually been abandoned and not used on a global scale. In addition, chlorine-based organic solvents such as trichloroethane and tetrachloroethylene also cause environmental problems such as contamination of soil and groundwater, etc., and their use scope has been gradually regulated. Under the above circumstances, the development of an alternative cleaning agent that can reduce the use of chlorine-based organic solvents as described above, and further can completely dispose of non-chlorine-based organic solvents, has become the most urgent need at present. This alternative cleaning agent is usually required to improve degreasing power and drying properties, or flame retardancy or non-combustibility. Various types of mixtures such as Freon 113 and isopropanol or methyl ethyl ketone have been reviewed, or Freon 2 As for the azeotropic composition of 4 with aliphatic lower alcohols such as ethanol, the use of alcohols such as isopropanol alone, and ketones or ethers such as acetone are reviewed. The above-mentioned mixture of chlorine-based organic solvents and other organic solvents or azeotropic composition systems can be used in combination with organic solvents other than chlorine-based solvents to reduce the amount of chlorine-based organic solvents used, but they cannot be completely eliminated. For example, the use of Freon 2 3 4 which is lower than Freon 1 1 3 can not completely eliminate the damage to the ozone layer. On the other hand, organic solvents other than chlorine-based solvents such as alcohol-based, ketone-based, and ether-based solvents deteriorate the objects to be cleaned, such as plastics, and therefore have practical problems. In addition, these are flammable, which are dangerous for storage and use, and also have strong toxic compounds to the human body. Therefore, it may cause harm to the work. For this reason, many industrial products have been tried to wash with water, alkali, and solvent. For example, cleaning of printed circuit boards, etc., the currently proposed replacement method is a water-based cleaning method that removes water-soluble flux with pure water (please read the precautions on the back before filling this page)

--11 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -5-528799 A7 B7 V. Description of the invention (3), a quasi-aqueous cleaning method using solvent to remove the flux and rinse with water, A solvent-based cleaning method using an organic solvent such as a hydrocarbon-based solvent. As for the above-mentioned water-based cleaning method or quasi-water-based cleaning method, although the removal of polar substances is expected, these methods often have problems such as lowering the surface insulation resistance due to the glass epoxy substrate or paper phenol substrate, etc., which absorb or penetrate into the water. In addition, these precision cleanings also have problems in drying properties, etc., often due to rust, discoloration, drying marks, etc., which cause damage to the appearance after drying and reduce characteristics. When considering electrical characteristics and drying characteristics after cleaning, it is advisable to clean them with a non-polar solvent such as a hydrocarbon solvent. This non-polar substance such as a hydrocarbon-based solvent cannot be expected to be cleanable against ionic substances or polar substances, and also against strong dirt. That is, the characteristics required for cleaning and the characteristics required for drying are contrary to each other. Therefore, when cleaning many industrial products, although water cleaning and alkaline cleaning agents are used, solvent cleaning is used instead, but today electronic components or precision components are selected. Substituting cleaning is extremely difficult. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling in this page) As mentioned above, the water-based cleaning or quasi-water-based cleaning used in the past to replace Freon cleaning can be expected to have high performance in removing polar substances However, it still has the problems of reducing electrical characteristics, or damaging appearance and reducing characteristics after drying. In addition, cleaning with a non-polar solvent such as a hydrocarbon-based solvent has problems such that it cannot be expected to have excellent detergency to ionic or alkaline substances, or even difficult to clean dirt. Therefore, it is highly desirable to develop a cleaning method that can exhibit a high degree of detergency to various dirt components such as ionic substances and polar substances, and at the same time can maintain the appearance or characteristics of the object to be washed after drying. In view of this, the paper size of polysiloxane represented by low-molecular-weight polyorganosiloxane is applicable to China National Standard (CNS) A4 (210 X 297 mm) -6-528799 A7 B7 V. Description of the invention (4 ) Solvents are non-aqueous solvents with excellent drying properties and high safety to the environment and human body. They can also be cleaned with precision. Therefore, they are subject to orders as alternative solvents. Various characteristics of the polysiloxane-based solvent are shown in Table 1. As shown in Table 1, halogenated hydrocarbon-based solvent substitutes other than the low-molecular-weight silica compound may cause problems such as staining when the object to be cleaned is dried. In addition, technical issues such as how to treat waste water at a low cost by using water-based cleaning systems to treat wastewater, prevent rust from being washed, and maintain electrical quality are not fully resolved. In contrast, low-molecular-weight siloxane compounds represented by low-molecular-weight polyorganosiloxanes have excellent drying properties, high safety to the environment or the human body, and can be used for precision cleaning in various washing fields. feature. However, because of the ignition point, it is necessary to think of its safety measures. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. On the other hand, when using a chlorine-based organic solvent as a cleaning agent for industrial use, the drying in the final step of cleaning must be fully considered. The drying performance is better when using the solvent steam. The steam drying system has fast drying speed, and the final treatment effect of the washed object is good, and it can be precisely cleaned. Ideal cleaning agents are Freon 1 13 or trichloroethane, which can be cleaned to dryness with one solution. However, Freon 1 1 3 or trichloroethane can damage the environment as mentioned above, so nowadays All are researched on industrial cleaning agents made of non-combustible solvents and combustible solvents that do not damage the environment and have excellent drying properties. As mentioned above, although non-flammable solvents such as perfluorinated hydrocarbons or perfluorinated ethers have low toxicity to the human body and do not contain chlorine, they do not cause damage to the ozone layer, but they do not have cleaning properties for dirt such as oils and greases. Organic solvents are mixed, and their mutual solubility is also not good, so they cannot be mentioned alone or mixed with other organic solvents. 7-(Please read the precautions on the back before filling this page) This paper size applies to Chinese National Standard (CNS) A4 specifications (210 X 297 mm) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 528799 A7 B7 V. Description of the invention (5) High cleaning power. In addition, not only the price is high, but the dryness is better because the vapor pressure is high, and a large amount of liquid is lost due to evaporation, which has a problem of high cost. As the cleaning composition system as described above, an azeotropic or pseudo-azeotropic composition is particularly preferred. Since the azeotrope composition does not undergo fractional distillation during boiling, the ignitability of the flammable solvent may disappear. In addition, the steam cleaning device can be used to regenerate the cleaning agent mixed with the dirty components without causing composition changes. The above-mentioned composition is described in, for example, Japanese Patent Application Laid-Open No. 6-7 1 2 3 8, which is a homogeneous mixed composition solution of miscible perfluorinated hydrocarbons or perfluorinated ethers and hexamethyldisilazane. However, if the mixed composition liquid is required to have a high degree of detergency, its degreasing power is insufficient. If it is to be washed with one liquid to dryness, it must be improved. On the other hand, as an azeotropic or azeotropic composition, for example, Japanese Patent Publication No. 6-509836 describes 2-trifluoromethyl-1,1,1,2,2-tetrafluorobutane, methanol, and ethanol. Or quasi-azeotropic mixed composition made of isopropyl alcohol or hexamethyldisilazane, as disclosed in JP-A No. 5-3 3 9 2 7 5 and JP-A No. 6-8 8 0 9 An azeotropic or azeotropic composition with methanol, 2-propanol or ethanol. However, the above azeotropic or pseudo-azeotropic compositions all use polar solvents with high hydrophilicity such as methanol, ethanol, and isopropanol. Therefore, if a high degree of detergency is required, the detergency of oily dirt is still insufficient. At the same time, when continuous cleaning is continued, the moisture content is extremely easy to use as a cleaning agent, which causes stains on the object to be cleaned. When the object to be cleaned is metal, it has the problem of rust. In addition, the azeotropic or azeotropic composition is also desired to further improve non-combustibility or drying properties. This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) 8-batch of clothing ------- 1T ----- (Please read the precautions on the back before filling this page) 528799 A7 B7 V. Description of the invention (6) As mentioned above, conventional cleaning agents made of azeotropic or quasi-azeotropic compositions that can replace chlorine-based organic solvents cannot be obtained from cleaning agents that can satisfy both degreasing and drying properties. The incombustibility of the agent is not enough even if it is not combustible. For this reason, it is extremely necessary to develop a kind that does not cause damage to the ozone layer or plastic deterioration. It can be smoothly implemented in one liquid from cleaning to drying, like Freon 113 or 1, 1, 1, 2 dichloride, etc., and it can greatly suppress the composition in use. The change can make it a non-combustible or non-combustible azeotropic or pseudo-azeotropic composition, and a cleaning agent with these as effective ingredients. One method of using a halogenated hydrocarbon solvent in the past is "drip dry" which is used to perform a drying operation without stains after a plating process or using an aqueous cleaning agent. Alcohols, such as I PA (isopropanol), are currently used for this type of application, but the heat of evaporation is large, and it is easy to produce stains after drying, and it will make the stains more pronounced when absorbing moisture from the air. problem. In addition, alcohols such as IPA can be azeotroped with water and cannot be separated and regenerated by distillation. They have to be discarded after use. Not only is this because of the low vapour density and large volatility loss, but also because of the slow drying rate, so after steam drying, sometimes There is a problem that hot air drying is necessary. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs To solve the problems mentioned above, some people have proposed to use a mixed system of perfluorinated hexane and trifluoroethanol to dry clean. However, the mixed system contains non-hydrophilic compounds. Fluorinated hexane, so there is still the problem of poor drip-drying. In the liquid state, perfluorinated hexane and trifluorinated ethanol cannot be mutually soluble, so it is difficult to manage the liquid. At the same time, the surface of the drying object often leaks condensate unevenly, and the problem of dry stains is still easy to occur. In addition, some people try to use trifluoroethanol as a degreasing cleaning agent, but often -9-(Please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 size (210X297 mm) 528799 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (7) Because of the trifluoro-based electronic attraction effect, it has a very strong polarity, and has a poor solubility for oils or turpentine, which is not suitable for this purpose Purpose. The present invention is to solve the above-mentioned problems, and is to provide a cleaning method that is not inferior to the use of a fluorine-based solvent or a chlorine-based solvent when providing cleaning of electronic parts such as printed substrates, assembly parts, or metal parts. The cleaning method to remove the nature and dryness of various dirt components, and the cleaning agent and cleaning device are the first purpose. A second object is to provide a cleaning method and a cleaning device that can safely and effectively use a low-molecular-weight silicone compound having ignition properties. Provides no damage to the ozone layer or the deterioration of plastics, has high cleaning performance for various dirt, excellent cleaning quality, and excellent drying speed. It can minimize the composition change during use, and it can be made flame-resistant or non-combustible. In addition, a cleaning agent capable of suppressing the mixing of water with an azeotropic or pseudo-azeotropic composition as an effective ingredient is the third object. It is the fourth object of the present invention to provide a drying method and a drying device capable of obtaining a drying speed that is not inferior to that of using a fluorine-based or chlorine-based solvent for drying and drying, or drying without leaving stains and other dry qualities or drying properties. The first cleaning method of the present invention is characterized by including a step of cleaning an object to be cleaned with a polar cleaning agent having a solubility parameter of 9 or more or a dielectric constant of 4 or more, and a method of using a solubility parameter of 9 or more or a dielectric constant of 4 or more. At least one of the steps of rinsing and drying the mixture of a polar cleaning agent and a cleaning agent having a solubility parameter of 9 or less and a dielectric constant of 4 or less is selected. The dirt used as the object of cleaning in the present invention is the working oil, grease, and wax paper. The size of the paper is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) ~ Packing-(Please read the precautions on the back before filling This page) Order -10-printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 528799 · A7 B7 V. Description of the invention (8), all dirt that must be cleaned, such as flux, to adhere to such dirt or have at least one A part of the material in contact with the dirt is used as a cleaning target of the present invention. The material of the object to be cleaned is not particularly limited, and may be metal, semi-metal, ceramic, plastic, etc. For example, metals or semi-metals include iron, aluminum, silicon, copper, stainless steel, etc .; ceramics include silicon nitride, silicon carbide, alumina, glass, magnets, etc .; plastics include polyamide, polyimide, epoxy, and polyolefin. , Polyester, acrylic resin, etc. Also for this kind of composite materials. Specifically, it can be electronic parts such as printed circuit boards or assembly parts, electrical parts, semiconductor parts, liquid crystal parts, metal parts, surface treatment parts, precision machine parts, optical parts, glass parts, ceramic parts, plastic parts, etc. The term "cleaning" as used in the description of the present case means that the concentration of dirt attached to the object to be cleaned can be minimized or removed. In addition, rinsing means minimizing or removing the concentration of the cleaning agent to which the object to be cleaned adheres. In addition, drying refers to evaporation or removal of a cleaning agent or a rinsing agent from an object to be cleaned. The drying method may be natural drying, vacuum drying, hot air drying, steam drying, or a method of replacing with a solvent having a high vapor pressure. The cleaning agent used in the first cleaning method is described below. The polar cleaning agent used in the first cleaning method refers to a cleaning agent made of polar molecules. The polarity-related factors have solubility parameters (hereinafter referred to as 5), dielectric constant, dipole moment, molecular polarizability, Dissociation constant, molecular refractive index, etc. In the present invention, as long as (5 values of 9 or greater or a dielectric constant of 4 or more polar cleaning agents can be used. Also the dipole moment is preferably in the range of 1 ~ 5 D. Also, the boundary of 1 ~ 1. 5D range Field. This paper size applies to Chinese National Standard (CNS) A4 specification (210X 297 mm) (Please read the precautions on the back before filling this page)

# 528799 Printed by the Consumer Cooperative of the Central Procurement Bureau of the Ministry of Economic Affairs A7 ___B7 V. Explanation of the invention (9) The solubility parameter in the present invention (5 is defined by the following formula (1) (5 2 (△ E / V) I , 2 ......... (1) where ΔΕ represents molecular cohesive energy (cae / mc) j2), γ is the Mohr volume. That is, 6 is equivalent to the square root of the cohesive energy density. If the volume does not change from mixing, the heat of dissolution when mixing Dissolved Ingredients 1 and 2 is ΔΗ !!! It can be expressed by the following formula (2) according to JH Hildebrand: AHm = Vm (δ τ — δ 2) 2 * Φ ι 9 Φ 2 ......... (2) where V m is the total volume of the mixture (mj?), (^ is the volume fraction, the number attached to it, and 1, 2 are respectively Ingredients 1 and 2. From the formula (2), it can be known that the smaller the difference between 5: l and (5 2), the smaller the heat of solution △ H m is, the better the solubility is. For example, the cleaning of the present invention In the agent and cleaning method, when the difference between the dirt component and the detergent component is 6 or less, the dirt component can be fully dissolved and removed. The above-mentioned solubility parameter 5 can be used as the latent heat of evaporation method and the molecular constant of gravity method. It can be obtained by any method. The measurement method of 5 is not particularly limited, as long as the 6 value obtained by any method can satisfy the conditions of the present invention. Generally, the substance that can measure the boiling point is obtained by the latent heat of evaporation method. Value 'Unable to measure' The paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) j Pack-(Please read the precautions on the back before filling this page) Order -12-528799 A7 B7 V. Description of the invention (10) A substance with a fixed boiling point 'or a substance that is difficult to measure, and a substance with a known chemical structural formula is obtained using the molecular gravitational constant injection method. The latent heat of evaporation method is determined by the following formula (3): ΛΗ, according to this value, (4) Find ΛE, and use the formula (5) derived from formula (1) to find (5. This method is the most direct and correct calculation of 5. △ H25 = 23.7Tb + 〇.〇2〇 Tb2 —2950 …… (3) AE = AH-RT …… ⑷ 5 = (ΔΕ / Υ) 1/2 = {(d / M) ΔΕ} 1/2 …… (5) Here Tb represents the boiling point (κ ) ,: R represents the gas constant (1986 c al / moj?), T is the absolute temperature (K), d is the density (g / mi?), And 1 ^ is the molecular weight (g / moj?).

For example, in the case of mobile paraffin, which is a base oil for working oil, C10H22 is the main component, M 2 142. 29, Tb 2 200 ° C (= 4 7 8 K), and d = 0.8 8 6 (g / m ^) Therefore, it can be printed for the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page) ΔΗ25 = 23.7χ 473+ 0.020 × 4732 -2950 = 12192.5 △ E = 12192. 5 — 1.986X 298 = 11600.7 5 = {(0.896 / 142. 29) x 11600.7} 1/2 = 8.55 When it is the solubility parameter (5 c) of the hydrogen-containing compound, 'the above-mentioned 5 values can be added with the following correction value, that is, alcohol Class: 5 c = 5 + 1.4, esters: (5c = 5 + 0.6, ketones account for c = 5 + 0.5 can be obtained. In addition, no need to modify the boiling point of 3 7 3 K or more. This paper scale is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) -13-528799 A7 __ B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (11) Molecular gravity constant method self-constituting compound molecules The characteristic value of each functional group (atom or atomic group), which is obtained from the total of the molecular gravity (G) and the molar volume (the method of 5 It is extremely useful for resins and solvents that are difficult to evaporate, unlike solvents. The δ of the molecular gravitational constant method can be obtained by formula (6). (5 = IG / V = d · IG / M …… (6 ) Here G is equivalent to the product of molecular cohesive energy and Mohr's volume (Mohr's cohesive energy). This G value is published by Sma 1 1 etc. For example, it is used as an extreme pressure additive for working oil. The sulfur content of vulcanized oil is 32_〇7, 〇1 = 2.07 (2/111 again), according to the G value of 31118 11 method, so ^ -2. 07x225 / 32. 07 = 14. 5. Also, the mixture The weighted average of the 5 mole fraction of each component is usually obtained according to the formula (7). DXit …… ⑺ Here the i symbol represents the i component. For example, the base oil contains 0 · 43 mole fluid paraffin, containing 1 Molar sulfur sulfurized oil (Please read the precautions on the back before filling this page)

Binding · Order # This paper size is in accordance with China National Standard (CNS) A4 (210X 297mm) ”-14 — 528799 A7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the Invention (I2) In the present invention, Preferred polar cleaning agent (5 value is in the range of 9 ~ 14 or the dielectric constant is in the range of 4 ~ 45. Here the dielectric constant is the value of 25 ° C. Especially used to remove the active ingredient of flux, As long as the δ value is in the range of 9 to 14 or the dielectric constant is in the range of 4 to 4 or more, the 6 value is in the range of 1 to 1 or the dielectric constant is 1 0 ~ 3 0 range. As long as it is a polar cleaning agent with a value of 9 or more or a dielectric constant of 4 or more, the flux or processing oil can be removed at the same time, and the ionic and non-ionic oily substances in the oil can be cut. As long as the value of 5 is 14 or less or the dielectric constant is 4 5 or less, the cleaning agent that can be mixed with the cleaning agent used as a rinsing agent or steam cleaning agent has a δ value of 9 or less and a dielectric constant of 4 or less The ingredients have excellent mutual solubility, which can make full use of the rinsing step or The effect of removing the polar cleaning agent in the steam drying step. The polar cleaning agent having a δ value of 9 to 14 or a dielectric constant in the range of 4 to 4 5 contains, for example, at least one selected from alcohols, glycols, phenols, Ketones, fatty acids and anhydrides, esters, amines, ammonium amines, quaternary ammonium salts, nitriles, morpholine, yasuo, sultone, phosphoric acid, and their derivatives Class, N-methyl-2-pyrrolidone, etc. Specifically, the alcohols include, for example, methanol, ethanol, propanol, n-hexanol, 3 '5' 5-trimethylhexanol, 2-ethylhexanol , N-octanol, n-butanol, cyclohexanol, benzyl alcohol, diols include propylene glycol monoethyl ether, propylene glycol monobutyl ether 'ethylene glycol monobutyl ether or derivatives thereof, and the phenols can be o-phenol, m-phenol' For phenol or its derivatives, ketones include acetophenone, acetone, methyl ethyl ketone 'methyl isobutyl ketone, diisobutyl ketone, cyclohexanone or its derivatives, and fatty acids (please read the notes on the back first) (Fill in this page again)

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The paper size of the 1T sheet is applicable to the Chinese National Standard (CNS) A4 specification (210 × 297 mm) -15-528799 A7 B7 Printed by the staff consumer cooperative of the Central Standards Bureau of the Ministry of Economic Affairs

5. Description of the invention (13) and the anhydrides may be acetic acid, acetic acid or a derivative thereof, and the esters may be ethyl acetate, butyl acetate, ethyl lactate, methyl lactate, or a derivative thereof, and the amine may be ethyl Amine, N, N-dimethylnitroamine or its derivatives, amines include N, N-dimethylacetamide, N-methylformamide, N, N-diethyl derivatives, fourth order Ammonium salts include tetranitrile, propionate, acetonitrile or their derivatives-acetamidine morpholine, N-fluorene has dimethylsulfinium or its compounds, and phosphates can be used alone or in combination. The cleaning agent is best, and the first constant It is an oxane of 4 or less, a derivative of hydrocarbons as mentioned above, and triethyl phosphate. However, if the cleaning agent used in the cleaning method is separately used, the fluorinated carbon isomers of methyl formamidine methyl ammonium, molybdenum sultone and phosphoric acid acetic anhydride are used together. Solvents are used as examples of amines, N or its derivatives, phosphine, or triglyceride amines, etc. The resolution is at least-ethyl, there are ethyls in its derivations, or its derivatives. It is a kind of methyl acetate, diethyl oxalate, N-dimethylacetamidine, or its eye class including isobutylmorpholine, N-type compound, sulfenyl ester or its derivative. The polarities of these reactions are below and the dielectrics are from low molecular sand, ethers and acetals. Can be at least one selected from the following formula (please read the precautions on the back before filling out this page) / RS 卜 〇ι / 1 .⑴ (where R is the same or different substituted or unsubstituted monovalent organic group, i ? Represents an integer from 0 to 5) The linear polyorganosiloxane and its derivatives shown below, and the following formula (this paper is also applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) -16-528799 A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs V. Invention Description (14)

(Where R represents the same or different substituted or unsubstituted monovalent organic group, 111 is an integer of 7 ^ 3 to 7) The cyclic polyorganic radical and its derivatives are shown. In the formulae (i) and (ii), the R group is a substituted or unsubstituted monovalent organic group, and may be, for example, methyl'ethyl, two groups, alkyl such as butyl, or monovalent such as phenyl. Monovalent substituted hydrocarbon groups such as unsubstituted hydrocarbon groups, methyl trifluoride, 3,3,3-trifluoropropyl, and the terminal R group in the above formula (i) may be an amine group and amidamine The methyl group, the acrylate group, the hydrogen thio group, and the like are most suitable for maintaining stability and volatility in the system. Specific examples of the low-molecular-weight siloxanes include hexamethyldisilazane, octamethyltrisiloxane, octamethylcyclotetrasiloxane, and decamethylcyclopentasiloxane. The hydrocarbon may be an aliphatic hydrocarbon compound such as a normal or iso-paraffin, an olefin, or an alicyclic hydrocarbon compound such as a cycloparaffin or a cycloolefin. Examples of the fluorocarbons include perfluorocarbons, hydrofluorocarbons, hydrochlorofluorocarbons, iodofluorocarbons, hydrofluoroethers, and fluorinated alcohols. Especially, it is most suitable if it is flame-resistant or non-combustible. In addition, the hydrochlorofluorocarbons are preferably those having a very small ozone depletion coefficient. The above-mentioned perfluorocarbons have, for example, the general formula C n F 2 η + 2 The paper size is applicable to the Chinese National Standard (CNS) A4 specification (21〇 > < 297 public directors) --- I ----- install- ------ Order ------ (Please read the notes on the back before filling out this page) -17 528799 A7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs η is an integer from 4 to 1 2), or

CF3-(-OCFCFz + ^-C-OCFg + ^ O CF3 (r and s represent arbitrary integers), etc. Perfluoropolyethers, etc. or (C4F9) 3N, (C5Fn) 3N, (C2F5) 3N, (c2f5) (c3f8 ) nf, (CF3) 2NC2F5, (CF3) 2NC2F4Br, (CF3) 2NCF = CF2, (CF 3) 2n CF 2C F 2h, (CF3) 2NCF2CF3, C5Fi〇NC2F5, 〇C4F8N C F2B r, etc. can generate fluorine radicals Perfluoroamine, perfluoromorpholine, etc. In addition, perfluoroether compounds represented by the following formulas can also be used. — * General formula · (CXF 2X + 1) 2〇 (X is an integer of 1 to 7) More specifically (CF3— CF2) 2 0. HFCs can be compounds represented by the following formula. The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm). One 18-one pack-(Please read the back first Please note this page before filling in this page) Order _ L # 528799 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Invention Description (16)

CpHqF2] P + 2_q »CpHaF2p-q, CPHqF2p-2-q (P is 1 ~ 10, Q is 1 ~ 20 integer) More specifically, it can be c 5 Η! F!!» C 5 Η 2 F! 〇 »C 5 Η 3 F 9» C4H3F7, C6H2F12, etc. The iodofluorocarbons can be, for example, cf3CF2CF2I, CH2F I 'cf3cf2cf2cf2i, cf2i2, c F 3 (C F 2) 4I, and the like. The hydrofluoroethers may be a compound represented by the following formula. (C-tH2t + l-uFu—)-〇-(— CvH2v + 1-wFw) (t, U, ¥, and | are arbitrary integers, preferably u = 2t + l, w = 0) More specifically, Is c3f7och3, c4f9och3, c5f1] Loch3, c3f70c2h5, c4f90c2h5, C5F iioc2H5, and so on. In addition, when used as a mixed cleaning agent mixed with a polar cleaning agent, the hydrofluoroethers also have a high degree of freedom in solubility with the polar cleaning agent and are easy to prepare a mixed cleaning agent. Further, the ethers of the cleaning agent having a solubility parameter of 9 or less and a dielectric constant of 4 or less may be, for example, di-n-propyl ether or a derivative thereof, and the acetals may be, for example, methylal or a derivative thereof. The solubility parameter is 9 in this paper, and this paper is also applicable to China National Standard (CNS) A4 specifications (210X 297 mm) Ten packs-(Please read the precautions on the back before filling this page) -Order-♦ 19- 528799 Printed by A7 __B7 of the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. 5. Description of the cleaning agent under (17) and a dielectric constant of 4 or lower. Low molecular siloxanes and hydrocarbon fluorocarbons are still preferred. The above low-molecular-weight siloxanes, hydrocarbons, fluorocarbons, ethers, and acetals can be used alone or in combination as cleaning agents with a solubility parameter of 9 or less and a dielectric constant of 4 or less. Table 2 shows examples of polar cleaning agents with a solubility parameter of 9 or more and a dielectric constant of 4 or more. Table 3 shows examples of cleaning agents with a solubility parameter of 9 or less or a dielectric constant of 4 or less. These 5 The values, dielectric constant and dipole moment are shown together. In addition, the dielectric constant is a value of 2 5 t except for the substances shown in the lower columns of Tables 2 and 3. In the first cleaning method, the cleaning step of the cleaning object uses a polar cleaning agent as described above. Therefore, it is possible to sufficiently remove various dirt containing ionic substances or polar substances, and it is also possible to remove various dirt containing non-ionic oily substances. In the first cleaning method, after the above cleaning step, the polar cleaning agent as described above and the solubility are used. The cleaning agent with a parameter of 9 or less and a dielectric constant of 4 or less, that is, a mixed cleaning agent made of a non-polar or low-polarity cleaning agent (hereinafter referred to as a non-polar cleaning agent) performs at least one rinsing step and drying process on the cleaning object. In addition, the rinsing step and the drying step may be performed continuously after the step of washing with a polar cleaning agent, or any of the rinsing step or the drying step may be omitted. The mixed cleaning agent used in the rinsing step and / or the drying step is non-flammable. Or flame retardant characteristics. The non-combustibility or non-combustibility is defined as follows based on the evaluation of the ignitability. Good P, according to JIS — K — 2 2 6 5. The paper size is measured with Tiger Closed Flash Point. The paper is applicable to China National Standard (CNS) A4 (210X29? Mm) ~ '" -20-(Please read first (Notes on the back then fill out this page)

Equipment-、 * ιτ # 528799 A7 V. Description of the invention (18) The fixture and the Cleveland open flash point tester are used to measure the flash point to evaluate the fire resistance of each mixed cleaning agent. Results Both the Tiger Closed and Cleveland Open types were unable to measure the flash point as non-combustible, and the Tiger Closed and Cleveland Open types were unable to measure the flash point as non-combustible. By using a mixed cleaning agent of a polar cleaning agent and a non-polar cleaning agent as described above as a rinsing agent or a steam drying agent, the polar cleaning agent infiltrated in the cleaning step can be replaced by a rinsing agent or a steam cleaning agent liquid, and In addition to the drying effect, it also has the property of dissolving the dirt components in the polar cleaning agent at the same time, so it can be implemented to meet the drying characteristics and precision cleaning. 0. The polar cleaning agent used in this rinsing step or drying step does not have to be necessarily For the same composition as the polar cleaning agent used in the cleaning step, it is preferable to use a polar cleaning agent having a relatively higher vapor pressure than the polar cleaning agent used in the cleaning step in the rinsing step or the drying step. Those below the boiling point are preferred. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). Also, in the mixture of non-polar cleaning agents and polar cleaning agents, it is best that the polar cleaning agents are miscible with non-polar cleaning agents. It is suitable, for example, non-polar cleaning agents are not compatible with fluorocarbons and polar cleaning agents, and the low-molecular-weight polyorganosiloxanes of the same non-polar cleaning agents are almost miscible with polar cleaning agents. On the other hand, fluorocarbons and low-molecular-weight polyorganosiloxanes can be miscible with each other at an added ratio. Therefore, an appropriate amount of a polar cleaning agent can be added to the two-component non-polar cleaning agent. Phase separation of uniformly mixed cleaning agents. Also 'The above-mentioned mixed cleaning agent is preferably an azeotropic composition or a pseudo-azeotropic group. The paper size is applicable to the Chinese national standard (CNS G4 specification (210X297 mm).' -21-528799 A7 _B7_ V. Description of the invention (19) The azeotropic composition can be made by properly selecting the type and mixing ratio of the polar cleaning agent. The azeotropic composition referred to here refers to the composition of the liquid phase and the gas phase, which can be distilled without changing the composition. As for the mixture, although it does not form an azeotropic composition system, as the boiling point diagram represented by the temperature-composition diagram, the boiling curve and the condensation curve are close, the volatility of each component is similar, and the boiling point of each component is similar. Those who are close, the composition of the liquid phase and the composition of the gas phase have similar phenomena are called pseudo-azeotrope, and the mixture that can form this pseudo-copolymerization is called pseudo-azeotropic composition. Mixed cleaning agent used in the first cleaning method 1 ~ Although the blending amount of the polar cleaning agent is different because it is used in the rinsing step or the drying step, it is usually sufficient to not affect the degree of drying, and the total amount of the cleaning agent is preferably 0.1 to 1 3 0 The range of the amount% is suitable. The blending amount of the polar cleaning agent is in the range of 0.1 to 30% by weight, that is, the dirt component in the polar cleaning agent brought in from the cleaning step can be smoothly removed without affecting the drying property. Especially 1 ~ 2 A range of 0% by weight is preferred. The mixed cleaning agent used in the rinsing step or the drying step, especially the mixed cleaning agent used in the drying step is preferably non-combustible or non-combustible. (Please read the precautions on the back first (Fill in this page)

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、 1T Printed by the Central Consumers Bureau of the Ministry of Economic Affairs of the Consumer Cooperative Co-operative, the content is low, the nature of the agent, the fire is washed, the clear is mixed, and it is mixed to make sex ’carbon out of fluorine. Inflammability is difficult or not. It is not used to burn with cocoability. It is difficult or difficult to dry. With rapid quality, the washing step can be used to make it bleachable, and it can be burned or not. It can be occasionally, etc., and it is difficult to combust aerobic and aerobic mixed with a silicon-based agent-based washing machine. Fluorine is used in cocoa. The legal system should not be dry or dry and dry or dry in the air. The dry side of the dry side is clear and hot. This code I centimeter 528799 A7 __B7 V. Description of the invention (20) The method can be freely selected or combined according to the shape of the parts. In particular, when precise cleaning is required, it is better to use steam drying with better final processability, and to use the above-mentioned mixed cleaning agent when steam drying. The non-polar cleaning agent in the mixed cleaning agent used as the steam desiccant is mainly composed of fluorocarbons, which is suitable for precision cleaning. In addition, when used in combination with fluorocarbons and low-molecular-weight polyorganosiloxanes, it has a better drying effect due to its good solubility with polar cleaning agents. As mentioned above, the mixing ratio of the combination of fluorocarbons and low-molecular-weight polyorganosiloxanes is based on 100 parts by weight of low-molecular-weight polyorganosiloxanes, and 10-10 parts by weight of fluorine is blended. Carbon is preferred. Blending more than 10 parts by weight of fluorocarbons in low-molecular-weight siloxane can make it flame-retardant or non-combustible. In addition, the fluorocarbons can be 1 part by weight or less, more preferably 20 to In the range of 500 parts by weight, phase separation of fluorocarbons and polar cleaning agents can be prevented. Economic, printed by Deng Central Standards Bureau's Consumer Cooperative (please read the precautions on the back before filling out this page). The first cleaning method mentioned above is first cleaned with a polar cleaning agent. The low-polarity cleaning agent (non-polarity cleaning agent) is used as the main component of the mixed cleaning agent to perform the rinsing step or the drying step, so that it can have both the cleaning performance (removal of dirt, etc.) during general cleaning mainly based on precision cleaning of electronic parts. ) And dryness. The number of cleaning tanks or rinsing tanks when using the first cleaning method can be arbitrarily set in accordance with the amount or type of dirt attached to the cleaning target, and is not particularly limited. In addition, the rinsing step or the drying step may be arranged as required, and various types of cleaning devices can be used. In the cleaning device used in the first cleaning method, in the cleaning step, the size of the paper is rinsed according to the Chinese National Standard (CNS) A4 (210 X 297 mm) -23-528799 A7 B7 V. Description of the invention (21) Step, drying The cleaning agent used in the step is preferably distilled for regeneration and reuse. In particular, when multiple cleaning tanks or rinsing tanks are formed, they are usually connected in series (overflow), so the dirty liquid is regenerated with a distillation device and sent back to the final cleaning tank or rinsing tank to extend the life of the liquid. This can significantly reduce operating costs. In addition, when the cleaning ingredients are a mixture of plural components, the boiling points of the components should be as close as possible. From the stability of the composition ratio, the boiling point of the cleaning agent components used in the cleaning step is 3 7 3 K or less. Better. The first cleaning method of the present invention includes at least one step selected from the group consisting of a polar cleaning agent having a solubility parameter of 9 or more and a dielectric constant of 4 or more, and the following formula C u0 C νΗ 2ν + ι (where t, U, V are arbitrary numerical values) Characterized by the steps of rinsing and drying the cleaning agent with the hydrofluorinated ether as an active ingredient. Printed by the Consumer Standards Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). The rinse step and / or drying step should use a mixed cleaning agent as shown in the first cleaning method, but instead of the mixing The cleaning agent can also be a cleaning agent containing hydrofluorinated ether as an active ingredient. Hydrofluorinated ethers are extremely suitable for combination with the polar cleaning agent used in the cleaning step of the previous step to obtain excellent cleaning performance. Specifically, the hydrofluorinated ether may be C 3 F 3 0 c Η 3, C4F9〇CH3, C5Hh〇CH3, c3f7〇c2h5, C4F9C2H5, C5Fii0C2H5, etc., among which C5F 11〇c H3, C5F uO C2H5 is preferable . At this time, the Chinese paper standard (CNS) A4 (210X 297 mm) is applied to the paper size alone. -24-528799 A7 B7 V. Description of the invention (22) Hydrofluorinated ethers, or mixed hydrofluorinated ethers and hydrocarbons Or low-molecular-weight polyorganosiloxanes are used, and it is preferable to use hydrofluorinated ethers in a range of 10 to 100% by weight, and preferably in a range of 50 to 100% by weight. As the polar cleaning agent, those shown in the first cleaning method can be used. The third cleaning method of the present invention uses a cleaning agent made of a low-molecular-weight siloxane, a fluorocarbon, and at least one polar cleaning agent selected from a solubility parameter of 9 or more and a dielectric constant of 4 or more. One is selected from the group consisting of a rinsing step and a washing step. In addition, the fourth cleaning method of the present invention uses a cleaning agent made of a low-molecular-weight siloxane compound and a fluorocarbon and a polar cleaning agent having a solubility parameter of 9 or more or a dielectric constant of 4 or more. The rinsing step and the drying step are characterized. The definitions of the dirty objects, cleaning objects, washing or rinsing or drying as well as the preferred polar cleaning agents, low molecular weight siloxane compounds and fluorocarbons, etc. as mentioned in the third and fourth cleaning methods A cleaning method is described. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page) The components of the cleaning agents used in the third and fourth cleaning methods, namely fluorocarbons, low-molecular-weight siloxane compounds and Polar cleaning agents with a solubility parameter of 9 or more and a dielectric constant of 4 or more have the following uses. That is, fluorocarbons are generally non-combustible liquids and have low latent heat of evaporation, so they are especially used for evaporation cleaning when drying. The agent is more suitable for use, but it does not have solubility for dirt components, such as processing oil or flux. On the other hand, polar cleaning agents with solubility parameters of 9 or more and a dielectric constant of 4 or more are opposite to those of fluorocarbons. The nature, that is, the solubility of dirt components is good, but the paper size of the car is suitable for the Chinese National Standard (CNS) A4 specification (210X297 mm) -25-528799 A7 ______B7 V. Description of the invention (23) It is easy to stay when dry Stains or residual liquid. In contrast, low-molecular-weight siloxane compounds are compatible with fluorocarbons and polar cleaning agents, and have good drying properties. So mixed low-molecular-weight siloxanes Compounds in fluorocarbons and polar cleaning agents can be obtained without phase separation, and each can exert its strengths to obtain a cleaning agent that satisfies both decontamination and drying properties. From this, it can be seen that the present invention The cleaning agent can have both decontamination and drying properties, so it can be used in any of the cleaning step, rinsing step and drying step. The third and fourth cleaning methods have a solubility parameter of 9 or more or a dielectric constant in the cleaning agent. The blending amount of a polar cleaning agent of 4 or more depends on whether it is used in any of the cleaning step, the rinsing step, or the drying step. The total amount of the cleaning agent ranges from 0.1 to 30% by weight. It is particularly suitable to use an amount that does not affect the dryness during the rinsing step or the drying step, and as long as it is in the range of 01 to 30% by weight, the dirt component brought in the cleaning step can be smoothly removed without affecting the dryness. The optimal range is from 1 to 20% by weight. Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). It is different depending on whether it is used in the washing step, the rinsing step, or the drying step, but it is preferably in the range of 100 to 100 parts by weight for 1,000 parts by weight of the low molecular weight siloxane compound. 0 parts by weight of low-molecular-weight siloxane compounds are blended with 1,000 parts by weight or less of fluorocarbons, preferably 5000 parts by weight or less, to prevent phase separation between fluorocarbons and polar cleaning agents. When 100 parts by weight of low-molecular-weight siloxane compound is blended with 10 parts by weight or more of fluorocarbons, sufficient drying properties can be obtained. In addition, if flammable or non-combustible materials are used as fluorocarbons, Use of low-molecular-weight siloxane compounds can also make, for example, the paper size applicable to the Chinese National Standard (CNS) A4 specifications (210 × 297 mm) " 528799 A7 B7 5. Description of the invention (24) used in the rinsing step or drying The cleaning agent in the step has the property of being nonflammable or nonflammable. In particular, in order to make it non-combustible, it is preferable to mix 400 parts by weight or more of fluorocarbons with 1000 parts by weight of low-molecular-weight siloxane. (Please read the precautions on the back before filling this page} Also, the cleaning agent of the present invention is preferably an azeotropic composition or a pseudo-azeotropic composition. The type and mixing ratio of the polar cleaning agent can be appropriately selected. The third cleaning method is one in which the above-mentioned cleaning agent is used to perform the cleaning step, and at least one of the rinsing step and the drying step. In addition, the rinsing step and the drying step after the cleaning step may be continuously performed, and The rinsing step or the drying step can be omitted. In particular, the cleaning agent of the present invention such as the fourth cleaning method can be used to perform a series of steps of rinsing and drying for more effective cleaning. Moreover, the ratio of each component in the cleaning agent can also be different at this time. In addition, the drying steps in the third and fourth cleaning methods are not particularly limited. They can be hot air drying, natural drying, vacuum drying or steam drying, and can be used or combined according to the shape of the parts. In particular, precision cleaning is required. When using it, it is best to use steam drying with better final processability. The cleaning agent of the present invention is also very suitable for such steam drying. The third and fourth cleaning methods printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs use a cleaning agent that can satisfy both dryness and decontamination performance, and implement a cleaning step, at least one selected from the rinsing step and the drying step. Or all steps, so in addition to precision cleaning of electronic parts, the cleaning and drying properties can also be taken into account during normal cleaning. When the third and fourth cleaning methods are used, the cleaning that can be used in the first cleaning method can be used. The same cleaning device as the device. The fifth cleaning method of the present invention is to apply the low-molecular-weight siloxane compound and fluorine to the Chinese paper standard (CNS) A4 specification (210X297 mm) '~ -27-528799 A7 _________ B7 5 2. Description of the invention (25) A carbon-based mixture is used as a main component, and a non-combustible or non-combustible mixed cleaning agent is filled in an airtight container. 'Since then, the airtight container sprays the mixed cleaning agent on the object to be cleaned. Low Molecular sand oxygen compound compounds are highly soluble in fluorocarbons, and some of them can also dissolve each other, and low molecular siloxane Although the compound itself is flammable, the inventors have found that when mixed with chemically inert fluorocarbons, that is, nonflammable or nonflammable fluorocarbons, this mixture can become nonflammable or nonflammable. The mixture of low-molecular-weight siloxane compounds and fluorocarbons may not necessarily be azeotropic or quasi-azeotropic due to their combination. For example, when used in an open state, one component consumes more than the other. Consuming more 'changes its composition ratio, which will affect its non-combustibility or flame retardancy, and may even reduce the detergency. In view of this problem, the present invention is a mixture of a low-molecular-weight siloxane compound and a fluorocarbon. Used in, for example, a sprayer, and found that the composition ratio can be prevented from changing. The fifth cleaning method was completed based on this finding. Specific examples of low-molecular-weight siloxane compounds and fluorocarbons printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs It is the same as that described in the first cleaning method. In addition, some of the fluorocarbons have no environmental and health problems. They do not burn and can effectively isolate the oxygen in the atmosphere. For this reason, in the cleaning method of the present invention, fluorocarbons that can dissolve low-molecular-weight siloxane compounds and have nonflammability or flame retardancy are selected, and a mixture with the low-molecular-weight siloxane compounds is used as a main component. detergent. Such mixed cleaning agents can be used as non-combustible or non-combustible cleaning agents. The mixing ratio of fluorocarbons in the above-mentioned mixed cleaning agents varies depending on the use. For 100 parts by weight of low-molecular-weight siloxane compounds, it is 10 to 28.-(Please read the precautions on the back before filling in this Page) This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 528799 A7 _____B7____ 5. Description of the invention (26) The range of 1 0 0 0 0 parts by weight is appropriate. When 100 parts by weight of fluorocarbons are blended with 100 parts by weight of a low-molecular-weight siloxane compound, the mixed detergent can be made to have a non-flammable or non-flammable property. The mixing ratio of fluorocarbons is most preferably in the range of 20 to 500 parts by weight for 100 parts by weight of low molecular weight siloxane. Also, the mixed cleaning agent used in the present invention is only required to be a mixture of the above-mentioned low-molecular-weight siloxane compound and fluorocarbon as the main component, and is not limited to the cleaning agent of the above-mentioned mixture alone, and may be a mixed polar solvent. A hydrocarbon-based solvent, an ether-based solvent, a solvent such as an acetal or other solvents, or a mixture of various additives such as a surfactant or a hydrophilic solvent. The fifth cleaning method is to store and use the mixed cleaning agent as described above in a closed container such as a spray tank. When cleaning, the mixed cleaning agent is sprayed from the closed container to the object to be cleaned. Fill the mixed cleaning agent as described above in a closed container such as a spray tank and use it. This can prevent the composition ratio of the low-molecular-weight siloxane compound and fluorocarbons in the mixed cleaning agent from changing, so that the mixing can be maintained for a long time. Non-combustible or non-combustible properties or cleaning performance of cleaning agents. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page) The sixth cleaning method of the present invention uses water that is miscible with water, does not have azeotropy with water, and evaporates heat It is characterized in that the object to be dried is a liquid 'under 1000 cal / g'. The inventors have found that the evaporation heat of trifluoroethanol is extremely low at 8 4 cal / g 'and that although trifluoroethanol is miscible with water, it does not form an azeotrope with water' This type of trifluoroethanol can play a great role The effect of drip-drying is not limited to difluoroethanol. Liquids with the same properties can also give full play to the size of the paper. The standard of China National Standards (CNS) A4 (210X297 mm) is applicable. 528799 Employees of the Central Standards Bureau of the Ministry of Economic Affairs Consumption cooperatives crack A7 B7 V. Invention description (27). The sixth cleaning method is based on the findings. In the present invention, the liquid system used as the drip-drying liquid has the property of being mutually soluble in water and not azeotropic with water. By having these properties, an extremely effective water-replacing effect can be obtained, and then it can be easily separated from water and regenerated by, for example, a distillation operation. Therefore, dry stains and the like due to water can be prevented, while the liquid life can be extended, and the running cost can be significantly reduced. In addition, the sixth cleaning method uses a liquid system having a heat of evaporation of less than 100 calories per gram used as a drying liquid for drying. Because of the heat of evaporation, it will not absorb moisture from the air when it is volatilized after replacing water. , Does not cause dry stains, etc., can get an excellent dry surface, that is, drip-drying quality. A liquid that can satisfy the above-mentioned properties. Specifically, it can be, for example, trifluoroethanol, trifluoroethanol (CF3CH2OH; boiling point = 347K, flash point = 3 0 3 KK), as mentioned above, can be completely miscible with water, and not with water at the same time. Azeotropic, and the heat of evaporation is very small 8 4 cal / gram, and because of the small surface tension, we can evenly wet the surface of the object with dripping water, can obtain excellent drying speed and drying quality. feature. In addition, the use of trifluoroethanol alone as a dry-dried liquid can save troublesome liquid management. In particular, trifluoroethanol-based lenses or glasses that are difficult to clean can be effectively dried and dried. The sixth cleaning method is to use a dry and dry solution of trifluoroethanol alone as described above, but in order to make it non-combustible or non-combustible, it is also effective to add fluorocarbons in a soluble range. The fluorocarbons that can be dissolved in trifluoroethanol are as follows: C5 H 2 F 10 ^ CF3 ~ N (^) °, CF3 CF2 Nv ^ ° This paper size applies to China National Standard (CNS) A4 (210X297) (%) One pack-(Please read the precautions on the back before filling out this page) Order -30-528799 A7 B7 V. Description of the invention (28) and other perfluorocarbons or hydrofluorocarbons or the first cleaning method The hydrofluoroether used impregnates the object or exposes it to dryness. The steam-dried fluoroethanol solution can be dissolved or used. It can also make the first dry and dry the water. Hydrogen or drip-drying type, hydrogen dissolved in silicon oxide in six cleaning liquids, or dry liquid (instead of using hot air drying liquid, fluorocarbon-based drying liquid, fluorocarbon-based trifluoroethane, etc.) This method can be used to spray drops of steam in water ), Drying or can be used, hydrofluoro is alone, the whole of hydrofluoroalcohol is referred to as dry drying in steam, and then dripped to vacuum to dry trifluoroether and other fluorocarbons such as trifluoroether and steam. Dry drops of dry liquid to make dry less dry Alcohol or liquid ethanol can be mixed to form a mixed or hydrofluoric dry liquid. The preferred low-dryness refers to the object. Liquid instead of natural dry can be used in combination with third-class drops or liquids. The object contained in the surface can also wait. This perfluorocarbon itself. The above-used low-molecular-weight siloxanes of perfluorocarbon can be the following formula --------- Xinbiaoyi ------ -、 Order ------ (Please read the notes on the back before filling out this page) R-Si-O- -Si-〇ι Printed by the Staff Consumer Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs

/ P (P = l, 2) or the following formula OH-8) This paper size is applicable to China National Standard (CNS) A4 (210X 297 mm) -31-Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 528799 A7 __ B7 V. Polyorganosiloxane shown in the description of the invention (29). Here R represents the same or different substituted or unsubstituted monovalent organic group. More specifically, it can be hexamethyl bis: oxadiazine (Μ Μ), octamethyltrisiloxane (MDM), decamethyltetraoxacin (MD 2 Μ), dodecamethylpentasiloxane (MD3M), octamethylcyclotetrasiloxane (D4), decamethylcyclopentasiloxane (D5), dodecylcyclohexasiloxane (D6), etc. The drip-drying method according to the sixth cleaning method not only replaces water (immersion, shaking, stirring, ultrasound, spraying), but also includes drying operations (hot air drying, spin drying, steam drying, pull-up drying, etc.). Vacuum drying, etc.) can be used effectively to dry the liquid. The cleaning agent of the present invention is characterized by containing a low molecular weight siloxane compound fluorocarbon and at least two polar solvents selected from a solubility parameter of 9 or more or a dielectric constant of 4 or more. Here, the low-molecular-weight siloxane compounds, fluorocarbons, and polar solvents may be those described in the first to fifth cleaning methods, respectively. Among the cleaning agents of the present invention, an azeotropic composition and an quasi-azeotropic composition having particularly high cleaning properties and excellent drying characteristics will be described below as effective components. The first azeotropic composition and quasi-azeotropic composition are used as cleaning agents for the active ingredients, which are characterized by containing hexamethyldisilazane, third butanol and perfluorohexane (C 6 F i 4). It shows that the azeotropic composition or pseudo-azeotropic composition formed by perfluorocarbon is an effective component. The second azeotropic composition and quasi-azeotropic composition are used as effective cleaning agents, which are characterized by containing hexamethyldisilazane'isopropyl acetate and perfluorocarbon hexane (C 6 F i 4 ) As shown in the azeotropic and boiling group of perfluorocarbons shown in this paper, the Chinese paper standard (CNS) A4 (210X297 mm) is applicable. --------- ^ 办 衣 ------- 1T- ----- (Please read the notes on the back before filling out this page) -32-528799 A7 _____B7 V. Description of the invention (30) The product or pseudo-azeotrope composition is the effective ingredient. The composition ratio of each component in the azeotropic composition and the quasi-azeotropic composition of the effective ingredients of the first cleaning agent (hereinafter referred to as the first azeotropic composition and the quasi-azeotropic composition) is 2 to 20% by weight. The range of hexamethyldisaroxane, 2 to 20% by weight of third butanol and 60 to 96% by weight of C6F14 is preferred. At these composition ratios, an azeotropic composition or a pseudo-azeotropic composition having an azeotropic temperature of 3 2 1 to 326K (7 60 mmHg) can be obtained. The specific composition ratio of the azeotropic composition can be changed depending on the conditions. In addition, the pseudo-azeotropic composition is a composition that contains one or two or more constituents to the azeotropic composition within a range that does not affect the azeotropic composition. The composition has approximately the same characteristics as the azeotropic composition. Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). The azeotropic mixture has a lower boiling point than the intrinsic boiling point of each component, or a characteristic that is displayed when it is higher. Therefore, it is often impossible to obtain the azeotropic composition by simply mixing the components. When the boiling point of the mixture is lower than the intrinsic boiling point of each component, the liquid mixed at an arbitrary ratio can be distilled, and the distillation fraction can be returned or the distillation can be performed in stages. The azeotropic composition (mixture) obtained in this way is repeatedly distilled under a certain pressure, and the substantial composition of the distillate will not change as its characteristic. Also, a pseudo-azeotropic composition can be obtained in the same manner. In the first azeotropic composition and pseudo-azeotropic composition, the third butanol is highly polar and highly soluble in oils and fats, but because the surface tension is 20. 7 dyn / cm (293K), it is relatively It is large, so it cannot get excellent permeability when used alone. In addition, for example, due to the difference in the type of plastic being cleaned or the conditions of use, solvent damage may occur (the paper size is subject to the Chinese National Standard (CNS) A4 specification (210X297 mm) 528799 A7 _ B7 due to contact with the solvent) (31) The risk of cracks or cracks in plastic). Hexamethyldisilanes have a smaller surface tension of 15.9dyη / cm (2 9 3 Κ), which has good permeability, but has a small kauributanol value (KB value). 15, so the cleaning power is weak, but there is little risk of damaging the objects such as plastic. The hexamethyldisilanes are compatible with any of the third butanol and perfluorocarbons represented by C 6F 14. On the other hand, tertiary butanol and CeFi 4 are almost incompatible with each other, but when hexamethyldisilazane is added, the three components are mutually soluble, making it a homogeneous composition. That is, hexamethyldisilazane can act as a mutual solubilizing agent for the other two components. The effect of hexamethyldisilazane as a solubilizing agent is greatly different due to the type of polar solvent. The third butanol of the present invention can be lower than methanol or ethanol by adding hexamethylsiloxane Alcohols significantly improve the solubility of perfluorocarbons. Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page) The perfluorocarbons shown in C 6 F i 4 are not cleaning, although they are not suitable for cleaning alone Agent, but the latent heat of evaporation is about 21 Cal / g compared with the third butanol (about 131 Cal / g) or hexamethylsiloxane (about 50 Cal / g), so it has excellent drying characteristics. feature. In addition, perfluorocarbon is a non-combustible liquid. Therefore, when mixed with tertiary butanol and hexamethyldisilazane, the flash point can be increased and the flame retardant can be made more difficult than these single substances or mixtures. Can sometimes become non-combustible. The first azeotropic composition and pseudo-azeotropic composition make the above-mentioned hexamethyldisilazane, third butanol, and perfluorocarbon shown by C 6 F i 4 into an azeotropic composition and pseudo-azeotropic composition. Each of these components can make its own characteristics. That is, this azeotropic composition and quasi-azeotropic composition can apply the Chinese National Standard (CNS) A4 specification (210X297 mm) to the paper size by using third butanol. Printed 528799 A7 ___B7__ 5. Description of the invention (32) Oils and fats have high dissolving power, have excellent permeability through hexamethyldisilazane, and have perfluorocarbon as shown in C 6 F i 4 For the drying characteristics, the best composition is a cleaning agent that can be washed to dry with one liquid. That is, as a cleaning agent that is washed and dried with one solution, it is most important to have degreasing and drying properties. At the same time, there is little substantial change in the composition of the solution during use, and it can be regenerated by distillation or the like. Requirements. This cleaning agent is azeotropic at 7 2 OmmH g at a temperature of 3 2 1 to 3 2 6 K, so the composition of the intermediate liquid will not change substantially, and it can also be regenerated by distillation. Therefore, a cleaning agent can be obtained which can be washed and dried in one liquid. The azeotropic composition and the quasi-azeotropic composition of the effective ingredients of the second cleaning agent (hereinafter referred to as the second azeotropic composition and the quasi-azeotropic composition) constitute a ratio of 2 to 2 0. The perfluorocarbon range shown by weight percent hexamethyldisilazane, 2 to 20 weight percent isopropyl acetate, and 60 to 90 weight percent WC6F14 is suitable. An azeotropic composition or pseudo-azeotropic composition having an azeotropic temperature of 323 to 328 K (760 mmHg) can be obtained at this composition ratio. The specific composition ratio of the azeotropic composition varies depending on the conditions. The second azeotropic composition and pseudo-azeotropic composition can also be obtained in the same manner as the first azeotropic composition and pseudo-azeotropic composition. In the second azeotropic composition and quasi-azeotropic composition, isopropyl acetate is highly polar and has high dissolving power for oils and fats, etc., but the surface tension is 22_ldyn / cm (295K), so it is used alone Good permeability cannot be obtained. Depending on the type of plastic being washed or the conditions under which it is used, solvent damage may occur. The scale indicated by C6F14 is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) ~ j equipment-(Please read the precautions on the back before filling this page) Order 528799 A7 ____B7 V. Description of the invention ( 33) Perfluorocarbons have a latent heat of evaporation of 21 calories per gram as described above, which is smaller than isopropyl acetate (about 77 calories per gram) or hexamethyldisilazane (about 50 calories per gram). Therefore, it has the characteristics of excellent drying properties. In addition, mixing isopropyl acetate and hexamethyldisilaxane, which is a perfluorocarbon represented by C 6 F i 4 in a flammable liquid, can increase the ignition point and make it more difficult than these individual materials or mixtures. Inflammable or even non-combustible. In addition, the hexamethyldisilanes have the above-mentioned characteristics, and are compatible with any of isopropyl acetate and perfluorocarbons such as C6F14. On the other hand, isopropyl acetate and the perfluorocarbon system shown by C6F14 are hardly mutually soluble, but by adding hexamethyldisilazane, the three components can be dissolved with each other to obtain a uniform composition. That is, the hexamethyldisilazane system can act as a mutual dissolving agent for the other two components. The effect of hexamethyldisilazane as a mutual solubilizing agent varies depending on the type of polar solvent. The isopropyl acetate of the present invention is compared with methanol or ethanol by adding hexamethyldisilazane , And significantly improve the solubility of C6F14 perfluorocarbon. Printed by the Consumer Standards Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page) The cleaning composition of the present invention can be obtained by using the above-mentioned hexamethyldisilazane and isopropyl acetate and C The perfluorocarbon shown in 6F i 4 becomes an azeotropic composition and a pseudo-azeotropic composition, and each of these components can exert its characteristics. That is, the cleaning composition based on this azeotropic composition and quasi-azeotropic composition as active ingredients can have high solubility in oils and fats by isopropyl acetate, and has both hexamethyldioxine and oxygen compounds. Those who have excellent permeability and have drying characteristics with peroxy carbon as shown in c 14 are the most suitable composition for cleaning agents that can be washed to dry with one liquid. As mentioned above, the cleaning agent of the present invention has both decontamination and drying properties. The paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm) 528799 A7 _ B7 V. Description of the invention (34) So It can be used as a cleaning agent in which one liquid is used for cleaning to drying. At the same time, any one of the cleaning step, the rinsing step and the drying step can be used alone. In addition, the cleaning agent of the present invention does not contain a chlorine-based organic solvent as a basic component, so it does not damage the ozone layer. Furthermore, as described in detail when describing azeotropic and quasi-azeotropic compositions, the composition can be strongly suppressed during use. Change, at the same time can be flame retardant or even non-combustible. The cleaning agent which uses the third azeotropic composition and pseudo-azeotropic composition as effective ingredients contains hexamethyldisilazane, isopropyl acetate and perfluorinated pentane (C 7 F i 6). An azeotropic or pseudo-azeotropic composition formed by fluorocarbon is an effective component. The cleaning agent containing the fourth azeotropic composition and pseudo-azeotropic composition as effective ingredients contains hexamethyldisilazane, third butanol and perfluorinated pentane (C 7 F i 6). An azeotropic or pseudo-azeotropic composition formed by fluorocarbon is an effective component. The constituent ratio of the azeotropic composition and the quasi-azeotropic composition of the effective ingredients of the third cleaning agent (hereinafter referred to as the first azeotropic composition and the quasi-azeotropic composition) is 5 to 25% by weight. Methyldisilazane, 5 ~ Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page) 25% by weight of tert-butanol and 60% ~ 96% by weight of C6F14 The range of fluorocarbons is suitable. At these composition ratios, an azeotropic composition or a pseudo-azeotropic composition having an azeotropic temperature of 3 3 7 to 344 K (7 60 mmHg) can be obtained. The specific composition ratio of the azeotropic composition can be changed depending on the conditions. In addition, the quasi-azeotropic composition is a composition that contains one or two or more constituents of the azeotropic composition within a range that does not affect the azeotropic composition. It has approximately the same characteristics as the azeotropic composition. This paper size applies Chinese National Standard (CNS) A4 specification (210X 297 mm) -37-528799 A7 __B7 V. Description of the invention (35) The third azeotropic composition and pseudo-azeotropic composition are the same as the first and the first The second azeotropic composition can be prepared by the multi-stage fine-bright method just like the pseudo-azeotropic composition. In the third azeotropic composition and quasi-azeotropic composition, the hexamethyldisoxaxane system is freely miscible with the third butanol at room temperature, and can be arbitrarily mixed with C7F 16 as shown above at 3 0 8 K. Fluorocarbons are miscible. On the other hand, the third butanol system cannot be miscible with c 7 F i 6, but the three components can be miscible during heating by adding hexamethyldisilazane to obtain a uniform composition. In other words, the hexamethyl disoxane department can act as a mutual dissolving agent for the other two components. The effect of hexamethyldisilazane as a solubilizing agent is greatly different due to the type of polar solvent. The third butanol of the present invention can be lower than methanol or ethanol by adding hexamethylsiloxane Alcohol significantly improves the solubility of perfluorocarbons. Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). Perfluorocarbons shown by c 7 F i 6 For those without cleaning power, although it is not suitable as a cleaning agent alone, the latent heat of evaporation is about 21 Cal / g compared with tertiary butanol (about 13 1 Cal / g) or hexamethylsiloxane (about 50 Cal / g) is smaller, so it has the characteristics of excellent drying characteristics. In addition, perfluorocarbon is a non-combustible liquid, so when mixed with tertiary butanol and hexamethyldisilaxane, which are organic liquids, the flash point can be increased to make it less flame-resistant than these single substances or mixtures. Can sometimes become non-combustible. The third azeotropic composition and pseudo-azeotropic composition are such that the above-mentioned hexamethyldisilazane, third butanol and C 7 F i 6 are azeotropic compositions and pseudo-azeotropic compositions. Each of these components can make its own characteristics. That is, this azeotropic composition and pseudo-azeotropic composition can have high solubility in oils and fats through the use of tertiary butanol, and have excellent hexamethyldisilazane. This paper is applicable to China. Standard (CNS) A4 specification (210X297 mm) 528799 A7 B7 V. Description of the invention (36) Permeability, with perfluorocarbon shown in c 7 F i 6 and drying characteristics, can be washed to one liquid The cleaning agent until dry is the best composition. The azeotropic composition and the quasi-azeotropic composition of the effective ingredients of the fourth cleaning agent (hereinafter referred to as the second azeotropic composition and the quasi-azeotropic composition) constitute a ratio of 5 to 2 5 The weight percent of hexamethyldisilazane, 5 to 25 weight percent isopropyl acetate and 50 to 90 weight percent perfluorocarbons are suitable. An azeotropic composition or pseudo-azeotropic composition having an azeotropic temperature of 337 to 345 K (760 mmHg) can be obtained at this composition ratio. The specific composition ratio of the azeotropic composition varies depending on the conditions. The fourth azeotropic composition and pseudo-azeotropic composition can also be obtained in the same manner as the third azeotropic composition and pseudo-azeotropic composition. The fourth azeotropic composition and the quasi-azeotropic composition are mixed with isopropyl acetate and hexamethyldisilazane, which are represented by C 16 perfluorocarbon in a flammable liquid. The mixture further increases the ignition point, making it flame retardant, or even non-combustible. Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page). Hexamethyldisilanes have the characteristics described above, and are compatible with isopropyl acetate at room temperature. It can be miscible with C7F16K fluorocarbon above 3 0 8 K. On the other hand, isopropyl acetate and C7F i 6 are almost incompatible with each other, but by adding hexamethyldisilazane, the three components can be dissolved with each other to obtain a uniform composition. That is, the hexamethyldisilaxane system can function as a mutual dissolving agent for the other two components. The effect of hexamethyldisilazane as a mutual solubilizing agent varies depending on the type of polar solvent. The isopropyl acetate of the present invention is compared with methanol or ethanol by adding hexamethyldisilazane , And significantly improve the solubility to C 6F 14 perfluorocarbons. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) — 528799 A7 B7 V. Description of the invention (37) The cleaning composition of the present invention can be made by isolating the above-mentioned hexamethyldisiloxane with acetic acid. The propyl ester and the perfluorocarbon shown in c 14 become an azeotropic composition and a pseudo-azeotropic composition, and each of these components can exert its characteristics. That is, the fourth azeotropic composition and the quasi-azeotropic composition can have high solubility in oils and fats by isopropyl acetate, and have excellent permeability through hexamethyldisilazane. The perfluorocarbons shown in 7 F and 6 with drying characteristics are the best composition for the cleaning agent that can be washed to dry with one liquid. As mentioned above, the cleaning agent of the present invention has both decontamination and drying properties, so it can be used as a cleaning agent in which one liquid is used to perform cleaning to dryness. At the same time, in any one of the cleaning step, the rinsing step and the drying step Can also be used alone. In addition, the cleaning agent of the present invention does not contain a chlorine-based organic solvent as a basic component, so it does not damage the ozone layer. Furthermore, as described in detail when describing azeotropic and quasi-azeotropic compositions, the composition can be strongly suppressed during use. Change, at the same time can be flame retardant or even non-combustible. Printed by the Consumers' Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs (please read the precautions on the back before filling this page). Fifth, non-combustible cleaning agents that use azeotrope and pseudo-azeotrope as effective ingredients are An azeotropic composition and a pseudo-azeotropic composition formed by perfluorocarbons such as hexamethyldisilazane, tertiary butanol and perfluoromorpholine are characterized as effective ingredients. · Sixth, non-combustible cleaning agents that use azeotrope and pseudo-azeotrope as active ingredients are perfluorocarbons containing hexamethyldisilazane, isopropyl acetate and perfluoromorpholine. The resulting azeotropic composition and pseudo-azeotropic composition are characterized as effective ingredients. The azeotropic composition and quasi-azeotropic composition of the fifth and sixth effective ingredients (hereinafter referred to as the azeotropic composition and quasi-azeotropic composition of the fifth and sixth) The paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) -40-528799 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 ___B7 V. The perfluoromorpholine used in the description of the invention (38) is perfluoro-N-alkylmorpholine as should. More preferably, the perfluoro-N-methylmorpholine shown by the chemical formula C 5 F ii N 0 is ideal. In the fifth azeotropic composition and pseudo-azeotropic composition, the composition ratio of each component is 1 to 20 weight. The range of% hexamethyldisilazane, 1 to 20% by weight of third butanol and 60 to 98% by weight of perfluoromorpholine is suitable. At these composition ratios, an azeotropic composition or a pseudo-azeotropic composition having an azeotropic temperature of 3 1 3 to 3 2 2K (760 mm H g) can be obtained. The specific composition ratio of the azeotropic composition can be changed depending on the conditions. In addition, the pseudo-azeotropic composition is a composition that contains one or two or more constituent components to the azeotropic composition within a range that does not affect the azeotropic composition, and has approximately the same characteristics as the azeotropic composition. The fifth azeotropic composition and the quasi-azeotropic composition are the same as the first azeotropic composition and the quasi-azeotropic composition, and can be obtained by a multi-stage distillation method. In the fifth azeotropic composition and quasi-azeotropic composition, perfluoromorpholine is not suitable as a cleaning agent, but the latent heat of evaporation is about 21 calories per gram of third butanol ( About 131 calories / gram) or hexamethylsiloxane (about 50 calories / gram) is smaller, so it has the characteristics of excellent drying characteristics. Furthermore, since perfluoromorpholine is a non-combustible liquid, the flash point can be increased to make it non-combustible when it is mixed with a non-liquid. In addition, hexamethyldisilanes are mutually miscible with tertiary butanol and perfluoromorpholine (CsFuNO). On the other hand, tertiary butanol is almost incompatible with the perfluoromorpholine system. Therefore, it can be adapted to the Chinese National Standard (CNS) A4 specification (210X297 mm) by matching the paper size of hexamethyldisiloxane. &Quot; " -41-| 装 — (Please read the precautions on the back before filling this page )-Order 528799 A7 B7 V. Description of the invention (39) Alkane makes the three components mutually soluble and becomes a homogeneous composition, that is, hexamethyldisilazane can act as the other two-component miscibility agent. The effect of hexamethyldisilazane as a solubilizing agent is greatly different due to the type of polar solvent. The third butanol of the present invention can be lower than methanol or ethanol by adding hexamethylsiloxane Alcohols significantly increase the solubility of perfluoromorpholine. The fifth azeotropic composition and quasi-azeotropic composition can be combined with hexamethyldisilazane, tertiary butanol, and perfluoromorpholine to make each of these components exert its advantages. In the sixth azeotropic composition and the pseudo-azeotropic composition, the composition ratio of each component is 1 to 20% by weight of hexamethyldisilazane, 1 to 20% by weight of isopropyl acetate, and 60 to 98% by weight. The range of% perfluoromorpholine is suitable. At these composition ratios, an azeotropic composition or a pseudo-azeotropic composition having an azeotropic temperature of 315 to 322K (760m m H g) can be obtained. The specific composition ratio of the azeotropic composition can be changed depending on the conditions. In addition, the pseudo-azeotropic composition is a composition that contains one or two or more constituents to the azeotropic composition within a range that does not affect the azeotropic composition, and has approximately the same characteristics as the azeotropic composition. Printed by the Consumers' Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs. The sixth azeotropic composition and quasi-azeotropic composition are the same as the first azeotropic composition and quasi-azeotropic composition. The sixth azeotropic composition and pseudo-azeotropic composition can be blended with non-flammable liquid perfluoromorpholine, which can increase its flash point and make it non-combustible than when only flammable liquid is used. . In addition, hexamethyldisilanes are mutually miscible with isopropyl acetate and perfluoromorpholine (CsF 0). On the other hand, 'isopropyl acetate is hardly miscible with the perfluoromorpholine system. Therefore, it can be compatible with the Chinese National Standard (CNS) A4 specification (2! 0 × 297 mm) -42-528799 A7 —__ B7 by matching the hexamethyldisilagen paper size. V. Description of the invention (40) Oxane makes the three components mutually soluble and Become a homogeneous composition, that is, hexamethyldisilaxane can act as a mutual solubilizing agent for the other two components. The effect of hexamethyl disoxazine as a mutual solubilizing agent is greatly different due to the type of polar solvent. The invention of isopropyl acetate can be more effective than lower alcohols such as methanol or ethanol by adding hexamethylsiloxane. Significantly improves the solubility of perfluoromorpholine. The fifth azeotropic composition and quasi-azeotropic composition can be combined with hexamethyldisilazane, isopropyl acetate, and perfluoromorpholine to make each of these components exert its advantages. The cleaning agents of the sixth to sixth aspects of the present invention are only required to contain the azeotropic composition or the quasi-azeotropic composition of the present invention as an effective ingredient, and are not limited to the azeotropic composition or the quasi-azeotropic composition of the present invention alone. As long as the cleaning agent of the composition does not affect the cleaning property or the drying property, for example, other cleaning agent components or an azeotropic stabilizer may be mixed and used. For example, other perfluorocarbons can be combined, such as C 6 F i 4, C 7 F i 6,

CeF 18 'is used as an all-gas-formin' or a combination of fluorocarbons such as chlorocarbon or chlorochlorocarbon. Furthermore, other alcohols, ketones, ethers, amines, and hydrocarbon compounds can be used in combination with tertiary butanol or isopropyl acetate. Printed by the Consumers' Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs (please read the precautions on the back before filling this page). In addition, the first to sixth cleaning agents of the present invention are added to prevent the decomposition of cleaning agent components caused by ultraviolet rays. The stabilizing agent may be, for example, glycidyl, cyclohexene oxide and the like, ethers such as 1,4-dioxolane, 1,3,5-trioxane and the like, 1-pentene, and 1-hexene. Unsaturated hydrocarbons, acrylates such as methyl acrylate, ethyl acrylate, etc. These stabilizers add 0 to the total weight of the cleaning agent.  A ratio of about 1 to 5% by weight is preferable. Moreover, the said stabilizer can be added individually or in combination of 2 or more types. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) ~ " 528799 A7 B7 V. Description of the invention (41) The cleaning agent of the present invention can be applied to various objects to be cleaned, and the materials of the objects to be cleaned are not It is particularly limited and can be metal, semi-metal, ceramic, plastic material, etc. For example, metal, semi-metallic iron, aluminum, silicon, copper, stainless steel, etc. Ceramics can be silicon nitride 'silicon carbide, alumina, glass, magnets, etc. Plastic can be polyamide, polyimide, epoxy Polyolefins, polyesters, acrylate resins, etc. can also be used for such composite materials. Specifically, it can clean electronic parts such as printed circuit boards or assembly parts, electrical parts, semiconductor parts, metal parts, surface treatment parts, precision machine parts, optical parts, glass parts, ceramic parts, plastic parts, etc. Seventh, the cleaning agent using azeotropic composition and pseudo-azeotropic composition as effective ingredients contains azeotropic composition or quasi-azeotropic composition formed by hexamethyl disoxazine and third butanol. As a feature. Eighth, an azeotropic composition and a pseudo-azeotropic composition are used as effective ingredients. The cleaning agent contains an azeotropic composition or a pseudo-azeotropic composition formed by hexamethyldisilazane and isopropyl acetate. feature. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page) Azeotropic composition and pseudo-azeotropic composition of the active ingredients of the seventh cleaning agent (hereinafter referred to as the seventh The composition ratio of each component in the boiling composition and the quasi-azeotropic composition is preferably in the range of 44 to 50% by weight of hexamethyldisilaxane and 50 to 56% by weight of third butanol. At these composition ratios, an azeotropic composition or a pseudo-azeotropic composition having an azeotropic temperature of 350 to 355 K (760 mmHg) can be obtained. In addition, the specific composition ratio of the azeotropic composition can be changed depending on the conditions. The seventh azeotropic composition and quasi-azeotropic composition are the first azeotropic composition and quasi-azeotropic composition. The same can be obtained by multi-stage distillation. This paper size is applicable to China National Standard for Scrubbing (CNS) A4 (210X297 mm) -44-528799 A7 B7 V. Description of the invention (42) Seventh azeotrope and pseudo-azeotrope composition Siloxane is miscible with tertiary butanol at room temperature, so it can be made into a homogeneous composition. The seventh azeotropic composition and pseudo-azeotropic composition are those in which hexamethyldisilanes and tertiary butanol are azeotropic compositions or pseudo-azeotropic compositions, each of which exerts the characteristics of each component. That is, the seventh azeotropic composition and pseudo-azeotropic composition are due to the high solubility of tertiary butanol for oils and fats, and because of the good permeability and good drying speed of hexamethyldisilazane, not only With these characteristics, it is also an excellent composition for cleaning agents because it does not cause plastic degradation due to less water incorporation. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page) and the azeotropic composition and pseudo-azeotropic composition of the effective ingredients of the eighth cleaning agent (hereinafter referred to as the eighth The composition ratio of each component in the azeotropic composition and the pseudo-azeotropic composition is preferably in the range of 40 to 46% by weight of hexamethyldisilaxane and 54 to 60% by weight of isopropyl acetate. At these composition ratios, an azeotropic composition or a pseudo-azeotropic composition having an azeotropic temperature of 355 to 358 K (760 mmHg) can be obtained. In addition, the specific composition ratio of the azeotropic composition can be changed depending on the conditions. The seventh azeotropic composition and the quasi-azeotropic composition are related to the eighth azeotropic composition and the quasi-azeotropic composition. Made the same thing. In the eighth azeotropic composition and quasi-azeotropic composition, the hexamethyldisilanes can be arbitrarily miscible with isopropyl acetate at room temperature, so it can be made into a homogeneous composition. The above-mentioned hexamethyldisilazane and isopropyl acetate are made into an azeotropic composition or a pseudo-azeotropic composition, so that the characteristics of their respective components are exerted respectively. That is, this paper size applies Chinese National Standard (CNS) A4 specification (2! 0X297 mm) 4 528799 A7 B7 V. Description of the invention The eighth azeotrope has high solubility and good penetration, so it will not be used for this purpose. That is, it can be cleaned, and you can also obtain the seventh and or pseudo-azeotrope group azeotrope composition washing or drying parts or hydrocarbon compounds in isopropyl acid isopropyl ester, etc., the first to the first to the first Sixth cleansing Ninth lotion is based on containing 4 or more as effective ingredients 9 5 ~ 9 0, 9 4 ~ 8 (43) composition and pseudo-azeotrope decomposing force, and because of the drying speed of Rokko, not only plastics Degradation, for azeotrope composition such as clear or intended to get the substance in use, drying speed, and from cleaning to drying, the eighth cleaning agent is only the active ingredient or the nature of the quasi-azeotropic composition. Within the scope, other alcohols may be used in combination with stabilizers and the like. The cleaning agent of the seventh and eighth cleaning agents described in the sixth is characterized in that each of the cleaning pairs is characterized by azeotropic composition and pseudo fluorocarbons, and dissolves with polar cleaning agents. The best total weight% C 4F 90 ° C 9 weight% C4F90 base group ~ ^ Shi Xi has these lotions and the azeotrope group will not have the ability to use a solution to be contained, but it should be remixed . For example, ketones, because of the characteristics of acetic acid and oxygen, θ is an excellent composition for liquid composition. The above is not limited to lotions. For example, it can be used in ethers, isopropyl esters, and water. Variations of cleaning. Cleaning agent. The azeotropy of the cleaning agent is only a mixture of penetrating oils and fats, as long as the other tertiary butyl esters are not cleared. Effective ingredients, degreasing, and other composition. The present invention affects detergents into alcohols or ethylamines. Please read the note below. The stabilizers that can be added to the printing of the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs can be used as agents. In addition, it can also be applied to the first azeotropic composition whose effective parameter is 9 or more or the dielectric constant boiling composition or pseudo-azeotropic composition is used as the boiling composition or pseudo-azeotropic composition system H3 and 5 ~ 1 0% by weight of methanol C Η 3 and 6 ~ 1 1% by weight of A paper size applicable to Chinese National Standards (CNS) A4 specifications (210 × 29? Mm) -46-528799 A7 —__ B7 V. Description of the invention (44) Alcohol or I PA, 87 to 8 1% by weight C4F9oCH3 and 1 3 to 19% by weight methyl ethyl ketone, 71 to 64% by weight C4F9OCH3 and 2 9 to 3 6% by weight ethyl formate. (Please read the precautions on the back before filling out this page} Also, the stabilizers that can be added to the ninth cleaning agent can be the stabilizers described in the first to the sixth. In addition, it can also be applied to the first to the sixth. The sixth cleaning agent can be used for each cleaning object. The above description is for the first to ninth cleaning agents using azeotropic composition and quasi-azeotropic composition as effective ingredients, but these azeotropic compositions and quasi-azeotropic composition It can be used in applications other than cleaning agents such as coating solvents, reagents, various solvents, etc., as an azeotropic composition or quasi-azeotropic composition itself. Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs, The weight ratios used in the first and ninth cleaning agents described above are compounding ratios quantified from the peak value of the components obtained by analyzing the composition by gas chromatography. The measurement of gas chromatography is performed under the conditions shown below. Device : Shimadzu Corporation's GD-14A (detector TC-D), column: SUS 2mx30, GL Siencechnomoso 1ve company WAWDMCS mesh: 6 0/8 0, filler: Silicon SE-30 1 0%, injected Temperature: 2 5 0 ° C, TC — D Temperature: 2 50 0 ° C, initial temperature: 50 ° C 'Initial holding time: 0 min, heating rate: 1 0 ° C / mi η, final temperature: 2 5 0 ° C, last holding time: 0 mi η, CURRENT: 100 m A, carrier gas and flow rate: He, 49 m 1 / min, ATTENUATION: 64. Next, the cleaning device of the present invention will be described. The first cleaning device is equipped with a paper size containing low-molecular-weight siloxane compounds that are suitable for China National Standard (CNS) A4 (210x297 mm) _ Λ7 _ 'One 528799 A7 B7 V. Description of the invention (45 ) In the cleaning agent mixed with non-combustible or flame-resistant fluorocarbons, at least one of the steps of washing, rinsing and steam drying is performed on the cleaning device body of the object to be cleaned, and the control of the above-mentioned mixed cleaning agent is performed. The composition control mechanism of the composition ratio of the above-mentioned low-molecular-weight siloxane compound and fluorocarbons becomes a feature. The low-molecular sand oxygen compounds and fluorocarbons used in the first cleaning device can be used as described in the first cleaning method. Low-molecular-weight siloxane It is the same as the fluorocarbons. In addition, the system containing the low-molecular-weight siloxane compound used in the present invention is not limited to the above-mentioned low-molecular-weight siloxane compound alone, but may be a mixture of a low-molecular-weight siloxane compound and a polar solvent. , Hydrocarbon solvents, ether solvents, acetal solvents and other solvents, or cleaning agents made of various additives such as surfactants or hydrophilic solvents. For example, the above-mentioned low-molecular-weight siloxane compounds have flash points When using cleaning agents containing these low-molecular-weight siloxane compounds, consideration must be given to safety measures such as preventing fires or suppressing or extinguishing fires. Table 4 shows the flash points and boiling points of representative low-molecular-weight siloxane compounds. (Please read the notes on the back before filling out this page) The paper size printed by the Employees' Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs applies to the Chinese National Standard (CNS) A4 (210X297 mm) -48-528799 Printed by employee consumer cooperative A7 _ B7 V. Description of invention (46) Table 4 Solvent name Flash point (K) Boiling point (K) Octamethylcyclotetrasiloxane 328 449 Octamethyltrisiloxane 308 426 Hexamethyl Disiloxane 273 373 must be equipped with combustibles (combustible) 'oxygen (oxidant), heat source (ignition energy), which are called the three essential elements of combustion. These three elements must be present at the same time when burning, and the lack of one will not ignite and continue to burn. When a flammable liquid begins to burn, there will be ignition and ignition by fire. Ignition is a phenomenon in which a small mother fire is heated by a flammable liquid on its surface, and the flame is started by its heat source to start burning. This system generates flammable gas (steam) from the liquid surface due to heating. It occurs when the mixed composition of oxygen and oxygen reaches the lower limit of the combustion range. The lowest temperature that will cause ignition is called the ignition temperature or flash point. Ignition system, even if there is no heat source, will start to burn due to oxidation heat. The lowest temperature is called ignition temperature or ignition point. Therefore, to use a pyrophoric solvent safely, at least one of the following three conditions must be met. ^ The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) I " " I Binding (Please read the precautions on the back before filling this page) 528799 A7 B7 V. Description of the invention (47) (1) When using, keep the vapor concentration of the solvent below the lower limit of the combustion range, and do not heat it to a temperature above the flash point. (2) Prevent heat sources (such as sparks, friction, etc.). (3) Isolate oxygen. In addition, it is better to have ④ fire-fighting facilities. As mentioned above, preventing or extinguishing the combustion of flammable solvents is extremely important for the safe use of flammable solvents. However, in the present invention, the cleaning agent containing low-molecular-weight siloxane compounds is mixed with nonflammable or flame-retardant fluorocarbons to make cleaning Agents (mixed cleaning agents) become non-combustible or non-combustible, allowing safe use of low-molecular-weight siloxane compounds with pyrophoric properties. In other words, fluorocarbons have no environmental or health problems, they do not burn themselves, and they can isolate oxygen from the atmosphere. For this purpose, when using low-molecular-weight siloxane compounds, select fluorocarbons that are soluble in low-molecular-weight siloxane compounds and have nonflammability or flame resistance. Mix them with a cleaning agent containing low-molecular-weight siloxane compounds. Use for mixed cleaning agents. These mixed cleaning agents are suitable for users of non-combustible or non-combustible cleaners. Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling this page) The mixing ratio of the non-combustible or non-combustible fluorocarbons in the above mixed cleaning agent is because it is used for cleaning Rinse or steam drying varies, but it is usually in the range of 10 to 100 parts by weight for 100 parts by weight of the low molecular weight siloxane compound. Mixing 10 parts by weight or more of fluorocarbons with 100 parts by weight of low-molecular-weight silicone compounds can make the mixed cleaning agent non-combustible or non-flammable. The mixing ratio of fluorocarbons is preferably in the range of 20 to 500 parts by weight for 100 parts by weight of the low-molecular-weight siloxane compound. Fluorocarbons have various boiling points due to their different molecular structures. This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm) " ~ 528799 A7 ___B7_ V. Description of the invention (48) In the present invention The fluorocarbons used are basically those having a boiling point below the operating temperature of the cleaning agent containing a low-molecular-weight siloxane compound. However, considering the consumption caused by the volatilization of fluorocarbons, it is only necessary to have a boiling point equivalent to the operating temperature of the low-molecular-weight siloxane compound. For example, the mixture of the above-mentioned low-molecular-weight siloxane compounds and fluorocarbons often varies in composition ratio due to differences in the conditions of use, etc., and affects its nonflammability. Sexual or flame retardant. Therefore, the cleaning device of the present invention is provided with a composition control mechanism capable of controlling the composition ratio of the low-molecular-weight siloxane compound and the fluorocarbons in the mixed cleaning agent. To control the composition ratio of low-molecular-weight siloxane compounds to fluorocarbons, the composition ratio between low-molecular-weight siloxane compounds and fluorocarbons in the mixed cleaning agent must be measured continuously or continuously. When the composition ratio deviates from the predetermined range, the insufficient supply can be added to continuously maintain its noncombustibility or flame retardancy. Here, the specific gravity, refractive index, boiling point or freezing point of the mixture of low-molecular-weight siloxane compounds and fluorocarbons are changed depending on their composition ratios. Therefore, it is extremely easy to measure low-molecular-weight siloxane compounds and fluorocarbons. Composition ratio. In addition, it is printed by the Consumer Cooperatives of the Central Bureau of Standards, Ministry of Economic Affairs, which becomes the chemical structural skeleton of low-molecular-weight siloxane compounds. (Please read the precautions on the back before filling this page.) S i 0 bond is a unique infrared absorption with extreme absorbance 1 1 00cm-1. Therefore, by measuring the degree of infrared absorption of the Si — 0 bond in the steam of the mixed cleaning agent, the vapor concentration of the low-molecular-weight siloxane compound can be measured, and the low-molecular-weight siloxane compound and fluorocarbons can be obtained. Composition ratio. In addition, the concentration of siloxane is easily measured by using a dispersive or non-dispersive infrared spectrophotometer by an internal standard method or a calibration curve method. As a result, it is easy to provide feedback by a cleaning agent supply means. This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) I-51-528799 A7 _B7__ V. Description of the invention (49) (Please read the precautions on the back before filling this page) That is, the first cleaning device The composition control mechanism may be a means for measuring the composition ratio of the low-molecular-weight siloxane compound and the fluorocarbons in the mixed cleaning agent, and supplying the low-molecular-weight siloxane compound or the fluorocarbons according to the measurement result of the composition ratio measurement means. Constituted by means of mixing in cleaning agents. In addition to the infrared spectrophotometer, the measurement method of the composition ratio may be selected from at least one method for measuring the specific gravity, refractive index, boiling point, and freezing point of the mixed cleaning agent. The specific gravity, refractive index, and boiling point of hexamethyldisarsin oxygen compound, which is an example of a low-molecular-weight oxygen compound, are shown in Table 1. The specific gravity, refractive index, and boiling point of perfluorocarbon c 6 F i 4 as an example of fluorocarbons are shown in table 5. Fig. 9 shows changes in the boiling point and the freezing point of the low-molecular-weight siloxane compound and the fluorocarbon-based mixture due to the difference in the mixing ratios. The situation in which the specific gravity of the above-mentioned mixture changes depending on the composition ratio is shown in FIG. 10. In addition, the refractive index of the above-mentioned mixture may be changed due to a change in the composition ratio, as shown in Fig. 1 1. Table 5 Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs Specific gravity (-) Refractive index (1) Boiling point (K) Hexamethyldisilazane 0.  76 1. 373 ------ 373 Perfluorocarbon C6F 14 1. 68 1. 251 329 This paper size is in accordance with Chinese National Standard (CNS) A4 specification (210 × 297 mm) 528799 A7 ___B7 V. Description of the invention (50) As can be seen from Figure 9, Figure 10, and Figure 11, it can be determined by measuring low molecular silicon The specific gravity, refractive index, boiling point or freezing point of the mixture of oxane compounds and fluorocarbons makes it extremely easy to grasp the composition ratio. As mentioned above, when a low-molecular-weight siloxane compound with a flash point is used as a cleaning agent to construct a cleaning device, a mixture of non-flammable or flame-resistant fluorocarbons is used, which can make the cleaning agent itself have Non-combustible or non-combustible properties can ensure its safety. In addition, by setting up a mechanism to control the composition ratio of the low-molecular-weight siloxane compound to the fluorocarbon, it is possible to improve and secure its safety, and at the same time, it is possible to effectively use the low-molecular-weight siloxane compound. The cleaning device of the present invention can be used in accordance with the conditions (1) to (4) described above and combined with safety measures such as general prevention, suppression of fire, or firefighting measures, to further improve its safety. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page) The second cleaning device is a cleaning device using a cleaning agent containing a low-molecular-weight siloxane compound to provide It is characterized by the infrared absorption of the Si-0 bond in the oxane compound, and the method for measuring the steam concentration of the low-molecular-weight siloxane compound produced from the cleaning agent is further characterized by the means for adjusting the temperature of the cleaning agent. . The third cleaning device is a cleaning device using a cleaning agent containing a low-molecular-weight siloxane compound, and is filled in at least one selected from the inside of the cleaning device 'surrounding the cleaning device, the inside of the device constituting the cleaning device, and the periphery of the constituting device. Or equipped with non-flammable or non-flammable fluorocarbon-based gas or liquid. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) ^ -DO-528799 A7 B7 V. Description of the invention (51) The fourth cleaning device uses a cleaning agent containing a low molecular weight siloxane compound. The device is characterized by having a means for injecting at least a part of a cleaning device with a fire retardant made of a non-combustible or flame-resistant fluorocarbon-based gas or liquid. It also has at least one kind of flame detection means which can drive the above-mentioned fire extinguisher injection means, and its temperature detection means and pressure detection means are its features. The second to fourth cleaning devices are cleaning devices using a cleaning agent containing a low-molecular-weight siloxane compound. The cleaning agent referred to here includes those used when removing or minimizing the concentration of dirt components adhering to the object to be cleaned. Cleaning agents include rinsing and cleaning agents used to remove or minimize the concentration of the cleaning agent adhering to the object to be cleaned, and steam cleaning agents used to evaporate from the object to be cleaned or remove the cleaning agent or the cleaning agent. The low-molecular-weight siloxane compound used in the second to fourth cleaning devices is the same as the low-molecular-weight siloxane compound described in the first cleaning method. Printed by the Consumer Cooperatives of the Central Bureau of Standards, Ministry of Economic Affairs (please read the precautions on the back before filling this page). Moreover, the cleaning agent used in the present invention is not limited to a single low-molecular-weight siloxane compound. It can also be Low-molecular-weight siloxane compound mixed with polar solvents such as hydrocarbon solvents, ether solvents, acetal solvents, and other solvents, such as “elixirs” or mixed with various surfactants such as surfactants and hydrophilic solvents. Agent, the present invention is particularly effective using a low-molecular-weight siloxane compound as a cleaning agent. As mentioned above, the low-molecular-weight siloxane compounds are those having a flash point as shown in Table 4. When using a cleaning agent containing such low-molecular-weight siloxane compounds, four safety measures must be taken including fire prevention, suppression, or fire suppression. First, if you want to use the solvent below its flash point according to the first condition, it is best to use the Chinese national standard (CNS) A4 size (210X 297 mm) for this paper size -54-528799 A7 B7 V. Description of the invention (52) System management The temperature of the solvent. However, it is still insufficient to manage the temperature of the low-molecular-weight siloxane compounds. It is necessary to manage the vapor concentration of the low-molecular-weight siloxane compounds outside the combustion range. The Si-0 bond, which is the structure of the low-molecular-weight siloxane compound structure, has a unique infrared absorption at 1 1 0 0 c m-1. Therefore, by measuring the infrared absorption of this si-0, the vapor concentration of the low-molecular-weight siloxane compound can be determined. The second cleaning device is to measure the low-molecular-weight silicon oxygen by setting the means for measuring the vapor concentration of the low-molecular-weight silicon oxide compound by using the infrared absorption degree of the above-mentioned Si-0 bond wave number 1 1 0 0 cm -1. The method for the vapor concentration of alkane compounds is extremely sensitive, so it is possible to manage the vapor concentration of low-molecular-weight siloxane compounds outside the combustion range with great accuracy. In addition, it is also possible to use the method of measuring the oxygen concentration together with the method of measuring the low-molecular-weight siloxane compound vapor concentration with the high detection sensitivity, and it is safer to use the flammable low-molecular-weight sand oxygen compound cleaning in the combustion range. Agent. In addition, low-molecular-weight siloxane compounds have a lower specific heat, so they can be easily cleaned below the flash point of low-molecular-weight siloxane compounds by using, for example, flash control. Read the precautions on the back before filling this page.) Second, for the second condition to prevent the occurrence of heat sources, it is usually prohibited to use cleaning agents in the workplace. All pyrotechnics are present, or electrical equipment without contact relays is placed on the cleaning device, or Motors and other means are pressure-proof and explosion-proof specifications, but the use of these methods may not completely prevent the occurrence of heat sources. In addition, as for the third condition, the measures for isolating oxygen are generally known to those who use inert gas such as nitrogen or argon. The inert gas can also be helium, neon, ammonia, xenon, krypton, etc. However, these previous inert gas systems have low gas densities and can easily expand and leak. The paper size is in accordance with Chinese National Standard (CNS) A4 specifications (210X297 cm-55-528799 A7 B7. V. Description of the invention (53) It is not economical, and at the same time, the interior of the cleaning device that is already airtight must be maintained in a pressurized state, that is, the inert gas must be continuously supplied. The inventors have found that the low molecular weight siloxane compounds are Perfluorocarbons, hydrofluorocarbons, hydrochlorofluorocarbons, fluoroiodocarbons, fluoroalcohols, hydrofluoroethers and other fluorocarbons have a very high solubility, and some of them also dissolve each other. And the above fluorocarbons Liquid-like and gas-based systems are generally non-combustible or non-combustible, so you can fill or configure non-combustible or non-combustible fluorocarbon-based gas or liquid in or around the cleaning device, or inside the device that constitutes the cleaning device Or around, the cleaning agent or its vapor can be isolated from heat sources or oxygen. Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling this page) Third cleaning If the installation is completed based on the findings above, choose at least one of the inside of the cleaning device, the surroundings of the cleaning device, the inside of the device constituting the cleaning device, and the surrounding of the device to be filled or arranged with non-combustible or flame-resistant fluorocarbon gas Or the liquid. Here, the cleaning device includes various peripheral devices. Therefore, the cleaning device is not only a main device such as a cleaning tank or a drying device, but also an electrical device such as a liquid regeneration device or a control device or a driving device. Peripheral devices such as devices. The devices described below include cleaning devices and their constituent devices. As mentioned above, non-combustible or non-combustible fluorocarbons such as gas are filled in heat generating devices such as electrical appliances. In order to prevent the occurrence of heat sources, and to fill the inside or around of the cleaning device, or the inside or around the components of the cleaning device with non-combustible or non-flammable fluorocarbons, such as gas, you can block the intrusion of oxygen into the device. It can make the vapor concentration of low-molecular-weight siloxane compounds in the device thinner or out of the combustion limit. Fluorine The vapor pressure of the system is high, and the paper size of this paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm) '~ 528799 A7 _____B7 __ V. Description of the invention (54) Those who are easy to vaporize, so when they are arranged inside or around the device The above-mentioned effects can be obtained, and at the same time, the low-molecular-weight siloxane compounds leaked from the cleaning tank or piping can be absorbed into the fluorocarbon-based liquid to become non-flammable or flame-resistant, and the cleaning device can be used more safely. When the inside of the device is pressurized, because of the high density of fluorocarbon vapors, it is difficult to diffuse, so it will not leak, and is rarely consumed. It is extremely economical, and it will improve the airtightness inside the device. The effect of oxygen is excellent. The above description is mainly directed to the use of fluorocarbon-based gas, but for example, filling non-combustible or flame-resistant fluorocarbon-based liquids around various constituent devices including cleaning tanks, that is, the constituent devices The state of being immersed in a non-combustible or non-combustible fluorocarbon liquid can also isolate low-molecular-weight siloxane compounds from heat or oxygen. The third cleaning device also includes such a form. In addition, a conventionally used inert gas may be used in combination. As the non-combustible or non-combustible fluorocarbon used in the third cleaning device, the same fluorocarbon as described in the first cleaning method can be used. Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page). The fire extinguishing methods related to the fourth condition are usually known as cooling fire extinguishing, suffocating fire extinguishing, removing fire extinguishing, and diluting fire extinguishing Law, etc. For example, the suffocation fire-fighting method is a fire-fighting method that covers the surface of the combustion material with an inert gas such as carbon dioxide that has a higher vapor density than oxygen, and isolates the oxygen supply. Solubility, so fluorocarbon liquid or gas system is very suitable as a fire extinguisher. The fourth cleaning device is set to inject at least a part of the cleaning device with a fire retardant made of the above-mentioned non-combustible or non-combustible fluorocarbon-based gas or liquid. The paper size is applicable to Chinese National Standard (CNS) A4 specifications (210X297). Mm) ~ '-57-528799 Α7 Β7 V. Those who invented the means of (55). Low-molecular-weight siloxane compounds and fluorocarbons are highly soluble, so by using non-combustible or non-flammable fluorocarbon-based gases or liquids, they can prevent the chain reaction of combustion, which is extremely easy. Dilute the flammable low-molecular-weight siloxane compound to the outside of the combustion limit, and cut off the oxygen to extinguish the fire. In addition, it has a higher vapor density than conventional inert gases such as carbon dioxide, so it can effectively block oxygen. In addition, because low molecular weight siloxane compounds and fluorocarbons are highly soluble, the use of fluorocarbon liquids as fire retardants can increase the effectiveness of fire extinguishing methods. As the non-combustible or flame-resistant fluorocarbons used as a fire extinguishing agent, the same fluorocarbons as those exemplified in the third cleaning device can be used, and especially the fluorocarbons which can generate trifluoro radicals with high fire-extinguishing effect are most suitable. The fifth cleaning device is a drip-drying device that is very suitable for the sixth cleaning method, so that it has a liquid that has mutual solubility with water and does not have azeotropy with water, and its evaporation heat is less than 100 calories per gram. It is characterized by drip-drying. Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling this page) This drip-drying device is a drip-drying device that uses drip-drying solutions such as trifluoroethanol. It also has a means of removing the mixed water or dirt components from the drip-drying liquid frequently or continuously, for example, it is suitable to have a distillation means. This distillation means may be provided with a pressure reducing means such as an aspirator. By attaching a means for removing water, the most effective drip-drying can be performed without any dry stains. According to the drip-drying method and the drip-drying device according to the present invention, a drop-drying solution made of trifluoroethanol and the like can be effectively used in a water-replacement operation (dipping, shaking, 'stirring' ultrasound, spraying), and can also effectively perform drying Operation (This paper size is in accordance with China Standard (CNS) A4 specification (210X297mm) '528799 A7 ____B7__ V. Description of the invention (56) Hot air drying, spin drying, steam drying, pull-up drying, vacuum drying) 〇 Drawing Brief description: FIG. 1 is a schematic diagram showing a drip-drying device according to an embodiment of the present invention. Fig. 2 is a schematic diagram showing a drip-drying apparatus according to another embodiment of the present invention. Fig. 3 shows an example of a calibration line used when quantifying the mixing ratio of an azeotropic composition. Fig. 4 is an infrared chart of a low-molecular-weight siloxane compound. Fig. 5 is a schematic diagram showing a configuration cleaning device according to an embodiment of the present invention. Fig. 6 is a schematic diagram showing a configuration cleaning device according to another embodiment of the present invention. FIG. 7 is a diagram showing a modification example of a cleaning tank and the like in the cleaning device of FIG. 6. Fig. 8 is a diagram showing another modification of the washing tank and the like in the washing device of Fig. 6. It is printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). Fig. 9 is a diagram showing a state in which the boiling point and the freezing point of a low-molecular-weight siloxane compound and a fluorocarbon-based mixture change due to a difference in composition ratio. Fig. 10 is a diagram showing a state in which the specific gravity of the low-molecular-weight siloxane compound and the fluorocarbon-based mixture varies depending on the composition ratio. Fig. 11 is a diagram showing a state in which the refractive index of a mixture of a low-molecular-weight siloxane compound and a fluorocarbon compound changes depending on the composition ratio. This paper size applies to China National Standards (CNS) A4 (210X297 mm) 528799 A7 —____ B7 V. Description of the invention (57) The invention will be described in more detail by the following examples. Examples 1 to 3 4 First, specific examples of the mixed cleaning agent used in the rinsing step or the drying step in the first cleaning method and the results of evaluating the characteristics thereof will be described. Prepare fluorocarbon type perfluorocarbon (c6f14), and hexamethyldisilaxane with low-molecular-weight siloxane compound, according to the mixing ratio (weight ratio) shown in Table 7 and Table 8 8 5/1 5 ~ 3 Mix in the 0/7 0 range, and mix with the polar cleaning agents shown in Table 7 and Table 8 to prepare mixed cleaning agents. The solubility and ignitability of the mixed cleaning agents obtained above to the dirt components were evaluated as follows. First, prepare the paraffin wax (viscosity: 30 c S (2 98 K)) of the base oil of the dirt material, the isostearic acid of the oily agent, and the chlorinated paraffin of the extreme pressure agent (manufactured by Ajinomoto). Flux SR-210 (low residue type) (made by Senju Metal Co., Ltd.), a flux, was added at a concentration of 5% by weight to 200 g of a mixed cleaning agent, and the state was visually observed to investigate its solubility. The evaluation solubility is defined, and the evaluation results are described in Table 7 and Table 8, respectively. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling in this page) [Solubility to dirt] ◎: Completely dissolves within 30 seconds after addition 0: 30 to 60 after addition Completely dissolve in seconds △: Dissolve more than 60 seconds after adding X: Do not dissolve dirt, and according to J IS — K — 2265, apply the Chinese National Sample Standard (CNS) A4 specification to Tag ’s dense paper size ( 210X297 mm) -60-528799 A7 B7 V. Description of the Invention (58) The closed flash point tester and Cleveland open flash point tester are used to evaluate the ignitability of each mixed cleaning agent. Define the non-combustibility or non-combustibility according to the results of the evaluation of ignition, and the evaluation results are shown in Table 7, Table 8 〇 [Flash Point Measurement] Non-combustible: Can not be measured by Tiger closed and Cleveland open tests Flasher. Flammable: One of them is unable to detect the flash point with Tiger Closed and Cleveland Open Test. Example 3 5 to 39 and Comparative Examples 1 to 3 Next, specific examples of the first cleaning method and the evaluation results thereof will be described. Printed on a comb-type substrate (JIS-Z-3197 2) printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). Flux CRV-5V (Flux CRV-5V) RA type; trade name, developed by Tamura Chemical), remove the solvent at a preheating temperature of 3 7 3 ~ 3 9 3 K, and grill at 50 3 ~ 5 3 3K for 30 seconds. This comb-type substrate was used as the evaluation sample. The cleaning agents, rinse agents and steam cleaning agents shown in Table 9 were used. The cleaning temperature was 313K, the ultrasonic output was 400W / 28KHZ, and the cleaning time was 5 minutes. The substrate was cleaned with a flux, followed by rinsing in a two-minute bath for 5 minutes, followed by steam drying (only Comparative Example 1 was hot air drying). After the above cleaning, the ion residue, insulation resistance, white residue and drying time were measured to evaluate the cleaning and drying properties. In addition, each steam cleaning agent is in accordance with the Chinese national standard (CNS) A4 specification (210X297 mm)-61 — 528799 A7 _ B7 for the paper size. V. Flammability is evaluated in the same way as in Example 1. The evaluation results are shown in Table 10. As can be seen from Table 10, when cleaning with the cleaning agent of the present invention, compared with the cleaning of the comparative example, the amount of ionic residue is small, the insulation resistance value is high, there is no white residue, and the drying time is fast, and excellent cleaning performance and Dryness. Example 4 0 to 4 6 and Comparative Examples 4 to 6 3 g of 90 spindle oil was coated on a steel plate having a size of 3 Ommx 3 Ommx 1mm t, and grilled in a heating furnace of 4 2 3 K for 4 8 hours to prepare test pieces. . Use the cleaning agents, rinsing agents and steam cleaning agents shown in Table 11 to clean the grease (ultrasonic cleaning) attached to the test piece and the subsequent rinsing, or dry according to the drying conditions shown in Table 11. Measure the residual oil content and drying time of the test piece after cleaning. Residual oil is immersed in a 150 m carbon tetrachloride after washing the test piece, and subjected to ultrasonic extraction of the residual oil. The amount of residual oil in the extract was measured with an oil concentration meter (0 C Μ Α-2 2 0 manufactured by Horiba, Ltd.). In addition, each steam cleaning agent (a rinsing agent for drying other than steam drying) was evaluated in the same manner as in Example 1. The evaluation results are shown in Table 12. Printed by the Employees' Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs (please read the precautions on the back before filling this page). Examples 47 to 50 describe the evaluation results of the second cleaning method and the cleaning agent of the present invention. The test piece used in Example 40 was used for evaluation. The cleaning agents, rinse agents, and steam desiccants shown in Table 11 were used, and the same conditions and methods as in Example 40 were used for cleaning and rinsing. The cleaning performance was evaluated by steam drying. The results are shown in Table 12. This scale applies the Chinese National Standard (CNS) A4 specification (210X297 mm) '528799 A7 B7 V. Description of the invention (60) As explained above, according to the cleaning agent of the present invention, the first and second cleaning methods can be obtained No less effective than Freon-based solvents or chlorine-based solvents in removing various dirt components, and at the same time, it can obtain excellent drying properties. Therefore, instead of using a cleaning method using a Freon-based solvent or a chlorine-based solvent, electronic parts such as printed boards, assembly parts, and metal parts can be cleaned very smoothly. Example 5 1 to 8 4 Next, the third and fourth cleaning methods will be described together with the cleaning agent of the present invention. Prepare the fluorocarbon type perfluorocarbon (C 6 F i 4), and the low molecular weight siloxane compound hexamethyldisilaxane, according to the mixing ratio (weight ratio) shown in Table 1 3 and Table 14 85 / Mix in the range of 15 ~ 30/70, and mix with the polar cleaning agents shown in Tables 13 and 14 to prepare mixed cleaning agents. The conditions and the same conditions as in Example 1 were used to evaluate the solubility and pyrogenicity of each of the cleaning agents obtained above to the dirt components. The evaluation results are shown in Tables 1 3 and 14 respectively. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page) Example 8 5-9 1 and Comparative Examples 7-12 1 Prepare the comb-type substrate used in Example 3 5 for evaluation Using the samples, the cleaning agents of Examples 8-5 to 9 shown in Table 15 and the cleaning agents of Comparative Examples 7 to 12 shown in Table 16 were used, and the same conditions and methods as in Example 3 5 were used for cleaning. , Rinse, and dry under the conditions shown in Table 15 and Table 16. In the case of steam drying, the cleaning step and the rinsing step use a cleaning agent composed of the same paper size as the Chinese national standard (CNS) A4 specification (210X297 mm) 528799 A7 B7 5. The cleaning agent of the invention (61) It is a steam cleaner. In Comparative Examples 11 and 12, the cleaning agents, rinsing agents, and steam cleaning agents shown in Table 16 were used, and they were similarly washed to dryness. After the cleaning, the ion residue, insulation resistance value and white residue were measured to evaluate the cleanability. The ignitability of each cleaning agent was evaluated in the same manner as in Example 1. The results are shown in Table 17. It can be seen from Table 17 that when using the cleaning agent of the present invention, compared with the cleaning of the comparative example, the amount of ionic residue is small, the insulation resistance value is high, there is no white residue, and the drying time is fast, and excellent cleaning performance and Dryness. Example 9 2 to 1 06 and Comparative Example 1 3 to 1 6 Coated 3 g of ingot oil on a steel plate with a size of 3 Ommx 3 Ommx 1mm t, and grilled it in a 4 2 3 K heating furnace for 4 8 hours to prepare test pieces. . Use the cleaning agents of Examples 92 to 106 shown in Table 18 and printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page) 1 Comparative Examples 7 to 10 shown in 6 — Sample cleaning agent (Comparative Examples 1 to 16), and the residual oil content of the test piece after washing was measured. Residual oil was immersed in 150 m P carbon tetrachloride after washing, and subjected to ultrasonic extraction for residual oil. The amount of residual oil in the extract was measured with an oil concentration meter (0 C Μ A-2 2 0 manufactured by Horiba, Ltd.). Each cleaning agent was evaluated for ignitability in the same manner as in Example 51, and the evaluation results are shown in Table 19. As described above, according to the cleaning agent of the present invention, in the third and fourth cleaning methods, the effect of removing various dirt components is not inferior to that of Freon-based solvents or chlorine-based solvents, and at the same time, excellent drying properties can be obtained. Therefore, we can provide cleaning agents that can be used for a wide range of applications from washing or rinsing to drying. Applicable to China National Standard (CNS) A4 specifications (210X297 mm) '~ -64-528799 A7 B7 Central Bureau of Standards, Ministry of Economic Affairs Printed by Employee Consumer Cooperatives V. Invention Description (62). It can also provide cleaning methods instead of using Freon-based solvents or chlorine-based solvents to clean printed circuit boards, electronic parts such as assembled parts, metal parts, and so on. Example 10 Next, a fifth example of the cleaning method will be described together with the cleaning agent of the present invention. First prepare hexamethyldisilaxane, a low-molecular-weight siloxane compound, and fluorocarbon-based perfluorohexane. 30 parts by weight of the above hexamethyldisilaxane and 70 parts by weight of perfluorohexane were mixed to prepare a mixed cleaning agent. The flash point of this mixed cleaning agent was evaluated in accordance with JIS-K 2 2 6 5 using a Tiger Closed Flash Point Tester and a Cleveland Open Flash Point Tester, and the results were confirmed to be nonflammable (ie the above Neither tester can measure the flash point). Next, while preventing the composition ratio of the mixed cleaning agent from being changed, carbon dioxide was filled in a spray tank as a spray. On the other hand, a stainless steel test piece prepared by coating with a silicone-based extrusion oil YF 3 3 (trade name, manufactured by Toshiba Silicone Co., Ltd.) was used as a cleaning object, and a cleaning agent was sprayed and mixed on the stainless steel test piece from the above spray tank to clean. Then, before and after the cleaning described above, an oil meter (0 C M A 2 2 0 manufactured by Horiba, Ltd.) was used to quantify the oil content (residual oil content after cleaning), and the cleaning ability was evaluated by visual observation. The quantitative results and appearance observation results of these oils are shown in Table 20. (Please read the precautions on the back before filling in this page) Clothing and I # This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -65-528799 A7 ____B7 V. Description of the invention (63) Table 2 0 Oil content (// 1 / piece) Appearance before cleaning 200 X After cleaning 0.  2 ◎ (Please read the precautions on the back before filling in this page) From Table 20, you can see that spraying a low-molecular-weight siloxane compound and a fluorocarbon-based cleaning agent from the spray tank can be washed very smoothly. In addition, after the spray tank of the mixed cleaning agent was stored for a long period of time, the cleaning ability of the mixed cleaning agent was evaluated. As a result, it was confirmed that the cleaning property and the flammability (non-combustibility) did not change. Example 108 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. First, prepare low-molecular-weight siloxane compounds, octamethyltrisiloxane, CsFuNO of fluorocarbons, and isopropyl alcohol of other ingredients, and mix by 1 〇. Parts of the above octamethyltrisiloxane and 80 parts by weight of C5F1] LN0 and 10 parts by weight of isopropanol were prepared as a mixed cleaning agent. The flash point of this mixed cleaning agent was evaluated in accordance with JIS-K 2 2 6 5 using Tiger's closed flash point tester and Cleveland open flash point tester, and the results were confirmed to be non-combustible (ie the above Neither tester can measure the flash point). This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 1 ~ " a bb-528799 A7 ____B7 V. Description of the invention (64) Next, prevent the composition ratio of the above mixed cleaning agent from changing, and fill nitrogen with Spray in a spray can. On the other hand, a copper test board with different stearic acid coated with an oil-based agent was prepared as a cleaning object, and the cleaning agent was sprayed and mixed on the stainless steel test piece from the above spray tank to be cleaned. Then, before and after the above cleaning, an oil meter (OCMA A 2 2 0 manufactured by Horiba, Ltd.) was used to quantify the oil content (remaining oil content after cleaning), and the cleaning ability was evaluated by visual observation. The quantitative results and appearance observation results of these oils are shown in Table 21. Table 2 1 Oil content (# 1 / piece) Appearance before cleaning 300 X after cleaning 0.  1 ◎ Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). From Table 2 1 we can see that spraying low-molecular-weight siloxane compounds and fluorocarbon mixed cleaning agents from the spray tank, That is, it can be washed very smoothly. In addition, after the spray tank of the mixed cleaning agent was stored for a long period of time, the cleaning ability of the mixed cleaning agent was evaluated. As a result, it was confirmed that the cleaning property and the flammability (non-combustibility) did not change. As mentioned above, according to the fifth cleaning method, the Chinese National Standard (CNS) A4 specification (210X297 mm) applies to the paper size of the mixed low-molecular paper for filling and filling. Er? -0 I-528799 Α7 Β7 V. Description of the invention (65) Siloxane compounds and fluorocarbons make it a non-combustible or non-combustible mixed cleaning agent for storage and use in closed containers, so it will not affect the non-combustible or non-combustible properties or cleaning ability of the mixed cleaning agent, which can be safe It is effective to use a mixed cleaning agent containing a low molecular weight silicone compound for a long period of time. Example 109 and Comparative Example 1, 18 Next, a sixth cleaning method will be described with the cleaning agent of the present invention. The glass lens washed with polishing water was immersed in trifluoroethanol to remove the attached pure water. Then pull on the lens at a pulling speed of 5mm / min, and let it dry. After drip-drying and drying, the water removal rate was determined by the following method, and the state after drying (surface state or presence of dry stains) was visually observed, and the appearance after drying was checked with a scanning electron microscope. The results are shown in Table 2-2. The moisture removal rate is firstly the trifluoroethanol drip-dried lens is moved to dehydrated ethanol to dissolve its residual moisture, and the Karl Fischer method is used to quantify (Ag). On the other hand, trifluoroethanol Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page) The lenses that are not allowed to dry and dry are also quantified (B g) moisture, and then calculated according to the following formula. Moisture removal rate (%) = {(B — Α) / Β} χ100。 As a comparative example of the present invention, CF C is used to dry the object to be dried (glass lens) as in Example 1. 1 1 3 / Dried deer of surfactant type (non-ionic surfactant 0_ 5 parts by weight) is suitable for China National Standards (CNS) A4 specification (210 × 297 mm) ~ 68-528799 at this paper size

A. V. Description of the invention (66) CFC113 is pulled up and dried (Comparative Example 17), and dried by IPA dripping (Comparative Example 18). The water removal rate and the appearance inspection after drying were calculated in the same manner as in Example 10-9. The results are shown in Table 2-2. Table 2 2 Example 109 Comparative Example 17 Comparative Example 18 Trifluoroethanol CFC1 13 / surfactant-based IPA drip-drying solution Water removal rate 100% 10 0% 100% Appearance visual observation SEM observation. △ (Surface active agent residue) 〇 (Please read the precautions on the back before filling in this page)

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Printed by 1T Consumers' Cooperative of Central Standards Bureau, Ministry of Economic Affairs Example 110 and Comparative Examples 19, 20 The sixth cleaning method will be described with the fifth cleaning device. First, as the drip-drying device according to the embodiment of the present invention, a device having the structure shown in FIG. 1 is prepared. The drip-drying device shown in FIG. 1 is provided with a two-tank water washing tank 1 〇1 ′ 1 0 1 water washing step A, and drip-drying formed by containing trifluoroethanol. X 297 mm) A 69 _ 528799 A7 ________ B7 V. Description of the invention (67) Drying liquid 102, the heater 103 is used to vaporize 102 liters of trifluoroethanol to generate the steam of trifluoroethanol 1 0 2 1 2 The drip-drying drying tank 104 of a a drip-drying drying step B. The drip-drying tank 1 0 2 of the drip-drying liquid is sent to the distiller 105 every 1 hour. Here, the water is regenerated by removing the water by distillation and sent to the drip-drying tank. Within 4 is used as steam 1 0 2 a. In the drip-drying device shown in FIG. 1, the water is replaced and dried by using the steam of the drip-drying liquid 1 made of trifluoroethanol. The drip-drying device shown in FIG. 1 is used above. _ _ Stomach_ stomach The chromate-treated glass filter (丨) of the stomach dry object 106 was given 100 times of water washing A and drip-drying B. The dried product at the 1,000th time was dried and the sample of Example 10 was used to calculate the moisture removal rate m dry and after the external inspection, the results are shown in Table 23 together. Binding (Please read the notes on the back before filling this page) # Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economics This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 528799

B. V. Description of the invention (68) Table 2 3 Example 110 Comparative Example 19 Comparative Example 20 Dried dry liquid trifluoroethanol perfluorohexane + trifluoroethanol IPA Water removal rate 10 0% 9 6% 10 0% Appearance Visual inspection ○ SEM observation 〇 △ (Dry stain) (Please read the precautions on the back before filling in this page)

Printed and printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. From Table 23, it can be seen that Example 1 10 uses trifluoroethanol as the drip-drying liquid, and the moisture removal rate and The drying quality is excellent. In comparison, Comparative Example 1 using a mixed solution of perfluorohexane and trifluoroethanol not only reduces the drying quality, but also reduces the water removal rate. In addition, Comparative Example 20 using IPA The occurrence of dry stains reduces the drying quality. This is because water cannot be removed from I PA, water may be stored in I PA, and the evaporation heat of IPA is high. Example 1 1 1 to 1 14 and Comparative Examples 21 and 22 The paper size is applicable to the Chinese National Standard (CNS) A4 (210X297 mm) 528799 A7 B7 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (69 ) As a drip-drying device according to another embodiment of the present invention, a device having the structure shown in FIG. 2 was prepared. The drip-drying device shown in FIG. 2 is provided with two water-washing tanks 201 and 201 in water-washing step A, and two immersion drip-drying tanks 2 0 2 made of trifluoroethanol which can hold the drip-drying liquid 2 0 7, 2 0 Then, the dipped and dried object 206 is immersed in the dried drying liquid 202, and the dried drying (water-replaced) drip-drying step C is carried out with the dried dried liquid 203 containing trifluoroethanol. The trifluoroethanol 202 can be heated and gasified with the heater 203 to generate steam 202a of the trifluoroethanol 202, and steam drying step D of the steam drying tank 208. Both the immersion drip-drying tank 2 07 and the steam-drying tank 2 0 8 of the drip-drying liquid 2 0 2 are continuously sent to the distiller 2 0 5, where the water is removed by distillation to regenerate, and then sent Into the steam drying tank 208, it is used as the steam 208a. Using the above-mentioned drip-drying device shown in FIG. 2, the polygon mirror (30 ratio / basket) after the rubbing was continuously subjected to 300 times of washing A, dripping C and steam drying D. The steam drying time was 5 minutes. For the 300th drip-dried dried product and Example 109, the water removal rate and appearance inspection after drying were calculated. In FIG. 2, trifluoroethanol was used to dry C and steam was used to dry D, and hydrofluoroether was used to dry D (Example 1 12). To dry C, a mixture of trifluoroethanol and hydrofluoroether was used to dry it. In D, hydrofluoroether (Example 1 1 3), in D, C was trifluoroethanol, and in steam drying, D was in hexamethyldisilazane (E. 114). Dry. The evaluation results are shown in Table 24. In addition, as a comparative example with the present invention, CFC113 / surfactant system (0.5 parts by weight of non-ionic surfactant) was used to make the paper size applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) ) C Please read the notes on the back before filling in this page j

Binding · -72-528799 A7 B7 V. Description of the invention (70) Except for CFC 1 1 3 as the steam drying liquid, the rest are the same as in Example 1 1 1 and the drip-drying device shown in Figure 2 is used. Example 11 The same polygonal mirror was subjected to 300 times of water washing, drip-drying and steam-drying. Repeatedly drip dry (Comparative Example 21). In addition, except that IPA was used as a drip-drying solution, the polygon mirrors subjected to the rubbing were washed, washed, and dried 300 times in a continuous manner (Comparative Example 22). Similarly, for these 300th dry-dried products, the water removal rate and the appearance inspection after drying were calculated in the same manner as in Example 109. The evaluation results are shown in Table 2 4 together. Table 2 4 (Please read the notes on the back before filling this page)

Printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs Example 111 Comparative Example 21 Comparative Example 22 Dried dry liquid TFEA CFC113 / Interactive agent IPA Moisture removal rate 10 0 ° / 〇10 0% 10 0% Appearance Visual 〇〇〇SEM observation △ (Residue of surfactant) △ (Dry stains This paper applies Chinese National Standard (CNS) A4 specifications (210X297 mm) Revision-73-528799 A7 B7 V. Description of the invention () Implementation Example 112 Example 113 Example 114 Dried dry liquid TFEA — TFEA / HFE — TFEA — HFE HFE MM Moisture removal rate 10% 100% 100% 10% Appearance visual inspection SEM observation 〇〇〇 (Please first Read the notes on the back and fill in this page) TFEA: Trifluoroethanol. HFE: Hydrofluoroether, MM: Hexamethyldisilazane. Printed in Table 2 4 Example 1 with fluoroethanol as the drip-drying liquid and the drying liquid 1 1 1 series of 300 dry-drying drying and excellent water removal rate and drying quality, compared with Comparative Example 2 using IPA 2 2 series for visual inspection Can also confirm the occurrence of dry dirt When the hexamethyldisilazane is used to dry the steam D, as in Example 1, 14, the hexamethyldisilazane has a two-phase phase with trifluoroethanol near the boiling point and has a temperature above this temperature. It can be completely miscible with each other. Because it will separate at room temperature, so the drop of dry liquid 2 in the steam drying tank 2 0 2 can be used in 卞 I-{Calendar 74 528799 A7 B7 Employees of the Central Standards Bureau of the Ministry of Economic Affairs Printed by a consumer cooperative V. Description of the invention (72) The trifluoroethanol was separated from the specific gravity of the hexamethyldioxane in the cooling tank, and the trifluoroethanol was recovered. If necessary, the water was removed by a distiller 205 for regeneration. In addition, the hexamethyldisilanes that are separated at the same time can be used directly or purified by a distiller if necessary. The separation system of trifluoroethanol and hexamethyldisilanes can be used in addition to specific gravity separation. Filters, of course, are most suitable for separation by distillation. As mentioned above, the drip-drying liquid (trifluoroethanol) in the immersion drip-drying tank 2 0 7 is regenerated for use by removing moisture from the steam-saturator 2 5, and steam-drying tank 2 0 Dripping dry liquid within 8 (hexamethyldisilazane) Trifluoroethanol is separated and reused by specific gravity in this tank or in another tank. The separated trifluoroethanol can also be sent to the immersion drip-drying tank 207 or the distiller 005 as described above. In the six cleaning methods, the method of drip-drying and the drip-drying device not only can obtain excellent drip-drying properties, but also can easily separate water by, for example, distillation operation, so a good drip-drying without drying stains can be obtained at the same time. Quality and the effect of reducing the cost of drip-drying. Therefore, it can provide drying speed, and the drying quality is no less than or even better than the drip-drying when using Freon-based or chlorine-based solvents. Example 115, Comparative Examples 23 to 27 The cleaning agent using the azeotropic composition or quasi-azeotropic composition as an effective ingredient of the present invention and its detergency will be described below. First of all, a commercially available hexamethyldisiloxane TSF45 — 0.65 (trade name, manufactured by Toshiba Silicone Co., Ltd. (purity: 99% or more)), a third butanol and < : Perfluorocarbon shown in 6-14?卩 — (Please read the notes on the back before filling this page)

Binding · Order # This paper size is applicable to Chinese National Standard (CNS) A4 (210X297 mm) -75-528799 Printed by A7 B7, Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (73) 5060 (Product name, Sumitomo 3M Co., Ltd.) was placed in a distillation flask, and distillation was performed under a vapor pressure using a rectification column with 30 theoretical layers. By this distillation, azeotrope was obtained at 3 2 1 to 3 2 6 K. The composition formed from the azeotropic fraction was used as a cleaning agent. The above azeotrope was analyzed by gas chromatography, and the obtained peak area ratio was quantitatively determined by the actual addition and blending. As a result, the hexamethyldisilaxane was 5.7 wt%, and the third butanol was 5.0 wt% C6Fi4. 38.9% by weight. The gas chromatography was performed under the following conditions. (Gas chromatography conditions) Device: Shimadzu Corporation GD-14A (TC-D), column: SUS 2mx3mm 'GL Siencer omoso 1 ve company WAWDMCS mesh: 6 0/8 0, filler: Silicon SE -3010%, injection temperature: 523K, TC-D temperature: 523K, initial temperature · 3 2 3 K, initial holding time: 0 mi η, heating rate: 10K / mi η, final temperature: 523K, final holding time: 0 mi η, CURRENT: 100mA, FR CRH e, 40 m 1, ATTENUAT I ON: 64. The method for measuring the blending ratio from the peak area of gas chromatography is explained in detail below. When the above composition is an azeotropic mixture of three components of hexamethyldisilazane, third butanol, and perfluorocarbon shown by CF, as the gas chromatography analysis system, n-hexane is selected as the standard substance, and the gas is Chromatographic analysis 10.333g of the three-component mixed solution and 2.7044g of n-hexane The paper size of this paper applies Chinese National Standard (CNS) A4 specification (210X 297 mm) ~ '-76-(Please read the precautions on the back before filling (This page)

Packing, 11 528799 Α7 Β7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (74) Mixed liquid. After analysis, the peak area ratio of each component is hexamethyldisilaxane: 7. 6 35% tert-butanol: 7.795% perfluorocarbon: 49.848% n-hexane: 34.322% corrected by a total of 100% At the peak area, gastric hexamethyldisilazane: 7.67% tertiary butanol: 7.83% perfluorocarbon: 50.04% n-hexane: 34.46% Secondly, change the components of the three-component mixed solution with the standard substance n-hexane. Gas chromatography analysis of the two component blending ratios was conducted to investigate the correlation between the blending ratio (% by weight) and the peak area (%) of the GC (calibration line). Figure 3 shows the calibration lines for each component. The calibration line of isopropyl acetate is based on Example 1-16. When hexamethyldisilaxane and n-hexane, the peak area (%) is hexamethyldisilaxane: n-hexane = 7.67: 34.46, so the peak area (%) of n-hexane in these two components (34. 46 / (34. 46 ten 7.67)) χΐ〇〇-81. 4 8% When this value is introduced into the calibration line of hexamethyldisilazane shown in Figure 3, the actual (please first (Read the notes on the back and fill out this page)

Packing _-Order-This paper size applies to Chinese National Standard (CNS) A4 (210 × 297 mm) -77 528799 A7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economy 0% by weight, so the amount of hexamethyldisilaxane X (g) is 2. 0 7 0 4 / (2. 0704 + X) x 100 = 78.0 so X 2 0.58393, and hexamethyldisilaxane The compounding ratio (% by weight) of alkane is (0.5 8 3 9/1 0.3 3 3) x 1 0 0 = 5. 7 weight% In the same way, the compounding ratio of the third butanol is 5. 0% by weight, and the mixing ratio of perfluorocarbon is 8 9_3% by weight. In addition, the composition in this case is a gas chromatographic analysis mixed composition under the above conditions, and the ratio of the peak area of the obtained component is quantitatively formulated. Using the cleaning agent thus obtained, the metal parts 20 P (encapsulated parts) made of copper were immersed in working oil G-6040 (trade name, manufactured by Japan Working Oil Co., Ltd.) as the object to be cleaned, and the state after cleaning was evaluated. In addition, the cleaning is carried out according to the following method. That is, in the first cleaning tank containing the lotion, while washing the object to be cleaned at about 303 K while irradiating the ultrasonic wave, the second lot containing the same composition lotion is stored. The cleaning tank 'was cleaned and rinsed again while irradiating with ultrasonic waves at room temperature. Finally, the third cleaning tank was heated to boil the lotion of the same composition to expose the object to be cleaned. (Please read the precautions on the back before (Fill in this page)

Order # This paper size applies to China National Standard (CNS) A4 (210X 297 mm) -78-528799 A7 B7 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs

V. Description of the invention (76) Dry in steam. In the above steps, visually and microscopically observe the completion status after washing, and at the same time randomly select two washed samples, extract the remaining oil content with 300 mj? Carbon tetrachloride, and use Horiba oil concentration meter 0 CMA- 2 2 0 quantitation. In addition, a clean metal part was immersed in a lotion of 3 1 3 K, and it was naturally dried after being taken out, and the time until the part was completely dried was measured. In addition, the flash point of the lotion was measured with Cleveland open, and the results are shown in Table 25 together with the ozone destruction coefficient. In addition, as a comparative example of the present invention, a lotion for the third butanol alone (Comparative Example 22) and a lotion for the hexamethyldisilazane TSF451-0 65 are listed separately (Comparative Example 2 4). Perfluorocarbon PF-5 0 6 0 lotion (Comparative Example 2 5), 1, 1, 1, 1-Trichloroethane Institute lotion (Comparative Example 2 6), wash the same as the above example, evaluate the cleaning The same time, measure the drying time and flash point. In addition, the residual oil content was measured when it was not cleaned (Comparative Example 27). The results are shown together in Table 25. From the results shown in Table 25, it can be seen that the cleaning agent of the above-mentioned Example 15 is excellent in detergency (degreasing property) and has excellent drying properties equivalent to or more than 1, 1, 1, 1-trichloroethane. In addition, in terms of flammability, the flash point is higher than that of tertiary butanol or hexamethyldisilazane, and it is confirmed that it may be flame resistant. Example 1 1 6 and Comparative Example 2 8 First, a commercially available hexamethyldisilaxane TSF45 — 0.65 (trade name, manufactured by Toshiba Silicone Co., Ltd. (purity: 9 9% or more) was used at a volume ratio of 1: 1: 1. )), Isopropyl acetate and perfluorocarbon PF shown in C6F14 (Please read the precautions on the back before filling this page)

The paper size of the bound and bound paper is in accordance with the Chinese National Standard (CNS) 8-4 specifications (210X297 mm) 79-528799 A7 B7 V. Description of the invention (77) 5060 (trade name, manufactured by Sumitomo 3M) is placed in a distillation flask. A distillation column of 30 theoretical layers was used for distillation under steam pressure. An azeotrope was obtained by distillation at 3 2 3 to 3 2 8K. The composition formed from the azeotropic fraction was used as a cleaning agent. The above-mentioned azeotropic fraction was analyzed by gas chromatography, and the obtained peak area ratio was quantified based on the actual addition and blending. As a result, the hexamethyldisilanes was 4-9% by weight, and the isopropyl acetate was 5.3% by weight (: 6-14 is 89 · 8% by weight. The conditions and quantitative methods of gas chromatography are as described above. The cleaning agent thus obtained is used to impregnate copper metal parts 20 P (encapsulated parts) in working oil G-6 0 4 0 (Brand name, manufactured by Japan Working Oil Co., Ltd. was used as the object to be cleaned, and the condition after cleaning was evaluated. The cleaning was carried out under the same conditions as in Example 1 1 5-visual inspection and microscope observation after cleaning The completeness was measured at the same time as in Example 1 15—the remaining oil content after washing was measured. In addition, the drying time was measured in the same manner as in Example 1 15—and the flash of the lotion was measured with Cleveland Open. This result is shown in Table 2 together with the ozone destruction coefficient. Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). As a comparative example, separate acetic acid is used. Cleaning agent for propyl ester (Comparative Example 2 8) It was cleaned in the same manner as the above example, and the cleaning performance was evaluated, and the drying time and flash point were measured. The results are shown in Table 26. In addition, in Table 26, Comparative Example 2 is shown together for comparison purposes. 4 to 2 7 From the results shown in Table 26, it can be seen that the cleaning agent of the above-mentioned Example 1 16 is excellent in detergency (degreasing property), and at the same time has excellent drying performance equivalent to or more than 1, 1, 1, 1-trichloroethane. In addition, the flammability is higher than the flash point of isopropyl acetate or hexamethyldisilazane, which is confirmed to be flame-resistant. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) ) 528799 A7 B7 Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs 5. Description of the invention (78) As mentioned above, the azeotropic composition and pseudo-azeotropic composition of the present invention will not damage the ozone layer. It shows excellent cleaning and drying properties. Example 1 1 7 Except the use of perfluorocarbon as C7F 16 perfluorocarbon PF-5 0 7 0 (trade name, manufactured by Sumitomo 3M), the use and examples丄 1 5 The same cooperation, with the same conditions as in Example 1 1 5 Distillation was performed to obtain an azeotropic fraction at 3 3 7 to 3 4 4 K. The composition formed by this azeotropic fraction was used as a cleaning agent. The same conditions and methods as in Example 1 15 were used to quantify the azeotropic saturation. The actual blending ratio. Results of hexamethyldisilazane was 10.6% by weight, tertiary butanol was 11.8% by weight, and C7F16 was 77.6% by weight. The following details explain the determination of the peak area from gas chromatography The method of mixing ratio. When the above composition is an azeotropic mixture of three components of hexamethyldisilazane, tertiary butanol and perfluorocarbon shown by C 7 F ie, it is selected as the gas chromatography analysis system. N-hexane was used as a standard material, and 10.084g three-component mixed liquid and 2.074g n-hexane mixed liquid were analyzed by gas chromatography. After analysis, the peak area ratio of each component is hexamethyldisilaxane: 12.408% tert-butanol: 15.795% perfluorocarbon: 41.628% (please read the precautions on the back before filling this page)

The size of the bound and bound paper is in accordance with the Chinese National Standard (CNS) A4 specification (210X 297 mm) -81-528799 Printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7_V. Description of the invention (79) Hexane: 30.101% When the peak area is corrected by a total of 100%, it is hexamethyldisilazane: 12.4% tertiary butanol: 15.81% perfluorocarbon: 41.66% n-hexane: 30.12% Secondly, as shown in FIG. 3 The calibration lines were quantified in the same manner as in Example 1 15 to obtain the above results. Using the lotion thus obtained, washing, rinsing, drying and evaluation were performed under the same conditions as in Example 115. The results are shown in Table 2 7 together with the ozone layer destruction factor. The comparative examples obtained in Example 1 15 are also shown in Table 27. From the results shown in Table 27, it can be seen that the cleaning agent of the above-mentioned Examples 1 to 15 is excellent in detergency (degreasing property), and at the same time has excellent drying properties equivalent to or more than 1, 1, 1, 1-trichloroethane. In addition, in terms of flammability, the flash point is higher than that of tertiary butanol or hexamethyldisilazane, and it is confirmed that it may be flame resistant. Example 1 1 8 First, a commercially available hexamethyldisiloxane TSF45 — 0.65 (trade name, manufactured by Toshiba Silicone Co., Ltd. (purity: 99% or more)) was used at a volume ratio of 1: 1: 1. Propyl ester and perfluorocarbon shown in ^ 16? 1? 5070 (trade name, manufactured by Sumitomo 3M Co., Ltd.) were placed in a distillation flask. 'A distillation column with 30 theoretical layers was used for distillation under steam pressure. This paper size applies to China National Standard (CNS) A4 (210X 297 mm) (Please read the precautions on the back before filling this page)

Packing and order # 528799 Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs A7 ______ B7 _V. Description of the invention (8G) Distillation at 3 3 7 ~ 3 4 5 K yields azeotropic fractions. The composition formed from the azeotropic fraction was used as a cleaning agent. The above azeotropic fractions were analyzed by gas chromatography. From the obtained peak area ratio K, the actual addition and blending 'results. The hexamethyldisoxa oxygen department was 10.5% by weight, and the isopropyl acetate was 10.7% by weight. % (: 7-16 is 78-8 wt%. In addition, the conditions of gas chromatography are as described above. The cleaning agent thus obtained is used to impregnate copper metal parts 20 P (encapsulated parts) in working oil G — 6 0 A 40 (trade name, manufactured by Japan Oil Company) was used as the object to be cleaned, and the condition after the cleaning was evaluated. The cleaning was performed under the same conditions as in Example 1 15-visual inspection and microscope observation after cleaning The completeness was measured at the same time as in Example 1 15—the remaining oil content after washing was measured. In addition, the drying time was measured in the same manner as in Example 1 15—and the flash of the lotion was measured with Cleveland Open. The results are shown in Table 2 together with the ozone destruction coefficient. Comparative examples of the present invention are also shown in Table 2 8. From the results shown in Table 28, it can be seen that the cleaning agent of Example 1 1 8 described above. The system has excellent detergency (degreasing property), and has the same as 1, 1, 1 It has excellent drying properties equal to or higher than alkane. In addition, the flammability is also higher than the flash point of isopropyl acetate or hexamethyldisilaxane, and it is confirmed that it can be flame-resistant. As described above, the present invention The azeotrope composition and pseudo-azeotrope composition system will not damage the ozone layer, and show excellent cleaning and drying properties for various dirt components. Example 1 1 9 and Comparative Example 2 9 ~ 3 3 This paper size applies to Chinese national standards (CNS) A4 specification (210 father 297 mm 1 ~ ~ ~ (Please read the precautions on the back before filling this page)

装 · ， 11 # 528799 A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (81) Except for changing perfluorocarbon to perfluoromorpholine (brand name p F — 5 0 5 2, Sumitomo 3M Except for the company), distillation was performed under the same conditions as in Example 1 15 and the same method as in Example 1 15 and was used to obtain an azeotropic fraction at 3 1 3 to 3 2 2 K. The composition made from this azeotrope was used as a cleaning agent. Using the same conditions and methods as in Example 115, the actual blending ratio of the azeotropic fraction was quantified. Results hexamethyldisilazane was 5.4% by weight, third butanol was 5.2% by weight, and perfluoromorpholine was 89.4% by weight. Apply the spindle oil on the iron plate, and grill it in a heating oven at 150 ° C for 48 hours, then make a test piece as the object to be cleaned. The above-mentioned cleaning agent was used to clean the grease attached to the test piece (ultrasonic cleaning), and the condition after cleaning was evaluated. The cleaning is performed in the following manner. That is, in the first cleaning tank containing the lotion, while washing the object to be cleaned at about 303 K while irradiating the ultrasound, the second cleaning tank containing the same composition lotion was irradiated at room temperature While washing and rinsing again, Sonic finally heated and boiled a lotion of the same composition in the third cleaning tank to expose the object to be cleaned to the generated steam and dry it. The completion of the washing was observed with a microscope, and the residual oil content was also measured. Residual oil content: For the test after washing, the residual oil content was extracted with 30 Omj? Carbon tetrachloride for 15 minutes, and then quantified using a market oil concentration meter of 0 C Μ A-220. As a comparative example, the components of the cleaning agent alone were cleaned, dried, and evaluated in the same manner. The flash point of each lotion was measured with Cleveland open, and the results are shown in Table 29 together with the ozone destruction coefficient. This paper size applies to China National Standard (CNS) A4 specification (210X297 public attack) ~ " ~ -84-(Please read the precautions on the back before filling this page)

Binding and ordering 528799 Printed by A7 _B7 of the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (82) As can be seen from Table 2 9, the cleaning agent of the above-mentioned Example 1 19 has no residue after cleaning, and has excellent drying properties , Very little residual oil, non-flammable, and a cleaning agent that does not damage the ozone layer. Example 1 2 0, Comparative Example 3 4 Except that the third butanol was changed to isopropyl acetate, the conditions were the same as in Example 1 19, and the distillation was performed in the same manner as in 3 1 5 to 322 K to obtain an azeotrope. Fractions. The composition made from this azeotropic fraction was used as a cleaning agent. Using the same conditions and methods as in Example 115, the actual blending ratio of the azeotropic fraction was quantified. As a result, hexamethyldisilazane was 3.7 wt%, isopropyl acetate was 4.8 wt%, and perfluoromorpholine was 91.5 wt%. 0 The obtained cleaning agent was used, as in Example 1 1 9 The same conditions were used to evaluate the cleaning performance. The results are shown in Table 30. It can be known from Table 30 that the cleaning agent of the above Example 120 has no residue after cleaning, and has excellent dryness, very little residual oil content, nonflammability, and is a cleaning agent that does not damage the ozone layer. The cleaning agent formed by the azeotropic composition of the present invention does not damage the ozone layer, is non-flammable and has excellent cleaning power, and rarely changes its composition due to evaporation during use. The drying speed is fast, and it can exert excellent performance when used as a cleaning agent. effect. 5% 的 三 丁 But Example 121, Comparative Examples 35 ~ 38 First, the chromatographic purity 99.5% hexamethyldisilazane and 99.5% of the third butadiene were mixed at a weight ratio of 1: 1. This paper size applies to China National Standard (CNS) A4 (210X297 mm) (Please read the precautions on the back before filling this page)

装 · 定 # Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 528799 A7 __B7 V. Description of the invention (83) Alcohol, put 200 g of this mixture into a distillation flask, and use a rectification column with a theoretical number of 30 layers in Distill under normal pressure. By this distillation, the azeotrope fraction was obtained under 3 50 ~ 35 5 K. A composition formed from the azeotropic fraction was used as a cleaning agent. The above azeotropic fraction was analyzed by gas chromatography. From the obtained peak area ratio, the actual addition and mixing were quantitatively determined. As a result, the hexamethyldisilazane system was 47% by weight and the third butanol was 53% by weight. The conditions of gas chromatography were the same as those in Example 1-15. Table 31 shows the surface tension (298K) and KB values of the hexamethyldisilazane and the third butanol as the starting ingredients of the cleaning agent of the above-mentioned Example 121. Table 3 1 Surface tension (dyn / cm) KB value Example 1 2 1 Cleaning agent 18. 5 62 Hexamethyldisilaxane 15.9 30 Third butanol 20.7 140 Also prepared as a comparative example of the present invention Cleaning agent using trichloroethane (Comparative Example 3 5), cleaning agent using isopropyl alcohol (Comparative Example 3 6) This paper size applies Chinese National Standard (CNS) A4 specification (210X 297 mm) 0e (please first (Read the notes on the back and fill out this page)

Packing and ordering # 528799 A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (84)), using methanol cleaning agent (Comparative Example 3 7 _), using ethanol cleaning agent (Comparative Example 38) . Using each of the cleaning agents of Examples 1 21 and Comparative Examples 3 5 to 38, the cleaning and drying properties were evaluated under the following conditions. [Cleaning Evaluation 1] Prepare glass lens, polycarbonate (PC) and aluminum as the object to be cleaned, apply glass core and polycarbonate with core removal mold oil, and aluminum with cutting oil for this purpose. Dirt should be cleaned as follows. First, the first cleaning tank containing the cleaning agent of Example 1 21 was degreased while irradiating the ultrasonic wave, and then the second cleaning tank containing the cleaning agent of the same composition was degreased again while the ultrasonic wave was stored, and then the same composition The third washing tank of the lotion was rinsed with ultrasonic waves, and then dried with 3 2 3 K hot air. The cleaning agents of Comparative Examples 35 and 36 were also cleaned in the same manner. To evaluate the state of completion after cleaning, observe and test the contact angle before and after applying dirt and cleaning. The results are shown in Table 32-2. As can be seen from Table 3, the cleaning agent of Example 1 21 can obtain a better cleaning effect than those using conventional trichloroethane (Comparative Example 3 5) or isopropyl alcohol (Comparative Example 36). [Cleaning Evaluation 2] An ingot oil was coated on an iron plate, and grilled in a 4 2 3 K heating furnace for 4 8 hours, and then a test piece was prepared as the object to be cleaned. Clean the test piece as follows. First in the first cleaning tank containing the cleaning agent of Example 1 21, one (Please read the precautions on the back before filling this page)

The size of this paper is in accordance with the Chinese National Standard (CNS) A4 (210X297 mm) -87-528799 A7 B7 V. Description of the invention (85) After cleaning the objects to be cleaned while taking ultrasound, the same composition will be contained in the container. The second cleaning tank of the lotion was rinsed at room temperature while irradiating ultrasonic waves at room temperature. Finally, the third cleaning tank was heated to boil a lotion of the same composition to expose the object to be cleaned to the generated steam. dry. The cleaning agents of Comparative Examples 37 and 38 were also cleaned in the same manner. In order to evaluate the finished state after cleaning, observe the appearance and determine the residual oil content. Residual oil content is extracted with 300 mj? Carbon tetrachloride after cleaning. The residual oil content is 0 C Μ A-2 2 0 quantitative table 3 3 (Please read the precautions on the back first) (Fill in this page again)

Printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs Example 121 Comparative Example 37 Comparative Example 38 Reference (Uncleaned) Appearance ◎ Δ Δ-Residual oil content (mg / cm2) 0.12 0.56 0.41 3.22? Τ * ◎ = No Residual dirt △ = Residual dirt [Washing Evaluation 3] Put 10 pieces of 70x70xlmm glass pieces in a net basket, and use 5% by weight sodium laurate, 5% by weight polyethylene oxide octyl phenyl ether and 90 pieces. Paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) -88-528799 Α7 Β7 V. Description of the invention (86) After washing with a cleaning agent made of water by weight, rinse with upper flush and then rinse with pure water . The cleaning agents of Example 1 21, Comparative Example 37 and the cleaning agent of Comparative Example were respectively used for each 1 000 m β. After the above-mentioned rinsed glass plates were drip-dried and cleaned, they were pulled up from each cleaning agent. Dry in hot air. When 100 pieces of the above-mentioned glass plates are respectively dry-cleaned, observe each cleaning agent, measure the amount of water dissolved in each cleaning agent, and observe the cleaning quality (appearance) of the glass plate. The water content was measured by a Karl Fischer moisture meter. The results are shown in Table 34. Table 3 4 (Please read the notes on the back before filling this page)

Equipment · Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs Example 1 2 1 Comparative Example 3 7 Comparative Example 3 8 State of the cleaning agent No change in water separation and sedimentation No change in water content (%) 0.35 2. 4 2. 7 Glass Good appearance. Side ends. There are stains and stains on the ends. As can be seen from Table 34, the cleaning agent in Example 1 21 has a small amount of water mixed in, thereby preventing stains from occurring. Example 1 2 2 Firstly, the gas chromatography purity of 9: 1 was mixed at a weight ratio of 1: 1. 9 This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm)-89-528799 A7 B7 V. Invention Note (87)% of hexamethyldisilazane and gas chromatography with a purity of 99.5% of isopropyl acetate, put 200 g of this mixture into a distillation flask, using 30 layers of theoretical fines The distillation column is distilled under normal pressure. By this distillation, an azeotrope fraction was obtained below 3 5 3 to 3 5 8 K. A composition formed from the azeotropic fraction was used as a cleaning agent. The above azeotropic fraction was analyzed by gas chromatography. From the obtained peak area ratio, the actual addition and quantification were quantified. As a result, hexamethyldisilazane was 43% by weight, and isopropyl acetate was 57% by weight. The conditions of gas chromatography are as described above. Table 3 5 shows the surface tension (298K) and KB values of the hexamethyldisilazane and isopropyl acetate as the starting ingredients of the cleaning agent of Example 1 2 2 described above. Table 3 5 (Please read the notes on the back before filling this page)

-· Order-Printed Surface Tension (dyn / cm) of the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs Printed Surface tension (dyn / cm) KB value Example 1 2 1 Cleaning agent 18.5 72 Hexamethyldisilazane 15.9 30 Isopropyl acetate 20.7 187 # Use the cleaning agent of the above Example 1 2 2 and Example 1 2 1 — This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -90-528799 A7 B7 Preparation 5. Description of the invention (88) Samples to evaluate cleaning or drying properties. [Cleaning Evaluation 1] The same conditions as in Example 1 2 1 Cleaning Evaluation 1 The glass lens, polycarbonate (PC) and aluminum were cleaned using the cleaning agent of Example 2 2 and the cleaning effect was evaluated. The results are shown in Table 3 6 The results of the external appearance observation and the measurement of the contact angle before and after the application of the dirt are shown. In addition, Table 36 shows the results of the cleaning agents of Comparative Examples 3 and 36 as references. As can be seen from Table 32, the cleaning agent of Example 121 can obtain a better cleaning effect than those using conventional trichloroethane (Comparative Example 35) or isopropyl alcohol (Comparative Example 36) to give a cleaner. [Cleaning Evaluation 2] Same as Cleaning Evaluation 2 of Example 1 21-Sample Conditions The test piece (steel plate coated with ingot oil and grill) was cleaned using the cleaning agent of Example 1 2 2 to evaluate its cleaning effect. Table 37 shows the appearance observation results and the measurement results of the residual oil content. In addition, Table 37 also lists the results of the cleaning agents of Comparative Examples 37 'to 38 as a reference. (Please read the notes on the back before filling this page)

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、 1T This paper size is in accordance with Chinese National Standard (CNS) A4 specification (210 × 297 mm) 1 μ _ 528799 A7 B7 V. Description of the invention (89) Table 3 7 Example 122 Comparative Example 37 Comparative Example 38 Reference (Uncleaned) ） Appearance ◎ △ △ A residual oil content (fflg / cm2) 0. 01 0.56 0. 41 3. 22 * ◎ = No residual dirt △ = Residual dirt (please read the precautions on the back before filling this page)

Printed and printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs [Cleaning Assessment 3] The same conditions as in the Cleaning Assessment 3 of Example 1 21 were used to dry clean the glass plate using the cleaning agent of Example 12 2 Table 3 9 shows the subsequent cleaning agent states, the measurement results of the water content in each cleaning agent, and the observation results of the cleaning quality (appearance) of the glass plate. In addition, Tables 3 to 8 also show the results of the cleaning agents of Comparative Examples 37 and 38 as a reference. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -92-528799 A7 __________B7 V. Description of the invention (90) Table 3 8 Example 1 2 2 Comparative Example 3 7 Comparative Example 38 The state of water will separate and settle. No change No change in water content (%) 0. 03 2. 4 2.7 The appearance of glass is good. Side ends are stained with stains (please read the precautions on the back before filling this page)

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, 1T It can be known from Table 3 8 that the amount of water mixed in the cleaning agent of Example 1 2 2 is small, thereby preventing stains from occurring. Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs As mentioned above, the azeotropic composition and quasi-azeotropic composition of the present invention will not damage the ozone layer or cause deterioration of plastics, and has high cleaning performance and excellent cleaning quality for various dirt. At the same time, the drying speed is excellent, which can greatly suppress the composition change during use or regeneration, and can also inhibit the mixing of water. Therefore, the cleaning agent of the present invention using these azeotropic or pseudo-azeotropic compositions will not damage the ozone layer or degrade the plastic, and will not produce stains in various cleanings such as degreasing, drip-drying, and steam cleaning. Or it can be rusted, and it can be fully implemented, and it can be implemented in one liquid from washing to drying. It can also minimize the composition change, which is extremely easy to manage and easier to recycle and reuse. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) _⑽ 528799 A7 B7 V. Description of the invention (91) Embodiment 1 2 3 The following describes an embodiment of the first cleaning device of the present invention with reference to the drawings. 5 is a diagram showing a configuration of a cleaning device according to an embodiment of the present invention. As shown in the figure, it is generally composed of main parts (device body) of the washing step A, the rinsing step B, and the drying step C. In addition to this, a steaming / regeneration mechanism D is attached to form a control mechanism E. Preventive safety agency F and fire suppression agency G. In addition, the steps using the flammable solvent, that is, the washing step A, the rinsing step B, and the drying step C are in addition to taking out and putting a part of the cleaning object 501 into a structure covered with a basket 502, and A closed door 503 is provided at a portion where the cleaning object 501 is taken out, whereby the cleaning step A, the rinsing step B, and the drying step C can be arranged in the closed portion. The cleaning tank 5 1 1 in the cleaning step A is filled with a cleaning agent 5 1 2 filled with a predetermined amount of a hydrocarbon-based solvent. The cleaning target 5 0 1 is immersed in the hydrocarbon-based cleaning agent 5 1 2 to remove the cleaning target 5 0 1 Contaminated ingredients are printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). The number of cleaning tanks 5 1 1 in this cleaning step A is set in accordance with the type or amount of dirt, and the cleaning time or cleaning quality. It can be a single tank or multiple tanks. The cleaning device of this embodiment has two cleaning tanks 5 1 1 '5 1 1, and the hydrocarbon-based cleaning agent 5 1 2 is Naphthezol M (trade name, manufactured by Nippon Petrochemical Co., Ltd.). An ultrasonic generator 5 1 3 is provided at the bottom of the cleaning tank 5 1 1 as needed. The rinsing tank 5 2 1 of the rinsing step B is filled with a certain amount. For example, PF5060 (boiling point = 329 K; trade name) is mixed with inert fluorocarbon perfluoro in a low molecular weight siloxane compound. , Sumitomo's paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -94-Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 528799 A7 B7 V. Description of the invention (92) Hybrid cleaning made by 3 M company In this example, 30% by weight of hexamethyldisilazane having a flash point was mixed with a perfluorocarbon PF 5 0 60 at a ratio of 70 parts by weight to form a mixed cleaning agent for rinsing 5 2 2 As the mixed cleaning agent 5 2 2, perfluorocarbon is used, and its incombustibility or flame resistance can be confirmed. The cleaning target 5 0 1 is immersed in the mixed cleaning agent for rinsing as described above 5 2 2 The cleaning agent component attached to the cleaning object 501 is removed. The number of the rinsing tank 5 2 1 in the rinsing step B is the same as the cleaning step A, and it is set according to the cleaning time or cleaning quality. There are two tanks. The cleaning device of this embodiment has two Washing tanks 5 2 1, 5 2 1, these rinsing tanks 5 2 1, 5 2 1 are connected by overflow pipe 5 2 4. If necessary, an ultrasonic generator 5 2 3 is installed at the bottom of the rinsing tank 5 2 1 The steam cleaning tank 5 3 1 of the drying step C is filled with the steam cleaning mixed cleaning agent 5 3 2 having the same composition as the above-mentioned rinsing mixed cleaning agent, and the heater 5 3 3 is used to make the steam cleaning mixed cleaning agent 5 3 2 The "heating and gasification" structure is such that the steam 5 3 2 a can be generated. Then, the washing object 5 0 1 after rinsing is exposed to the steam 5 3 2 a of the steam cleaning mixed cleaning agent 5 3 2 for a predetermined time, in The surface of the cleaning object 5 0 1 condenses into steam droplets of the steam cleaning agent 5 3 2 and the steam 5 3 2 a condenses into water droplets to remove the mixed cleaning agent 5 2 2 for rinsing. At the same time, the cleaning object 5 is heated and heated by the latent heat of solidification. 0 1, on the way up from the steam cleaning tank 5 3 1 'in the cooling area formed by the cooling pipe 5 3 4 installed to prevent the steam 5 3 2 a from evaporating, the cooling area is temporarily stopped, and the object of cleaning is completely removed at the same time after cooling Paper size applies to China National Standard (CNS) A4 (210X 297 mm) Equipment-(Please read the precautions on the back before filling this page), 1T -95 — 528799 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Invention Description (93) 5 0 1 Liquid remaining on the surface and In addition, a liquid level meter (not shown in the figure) is installed in the steam cleaning tank 5 3 1 to monitor the amount of the steam cleaning mixed cleaning agent 5 3 2 which is reduced by evaporation. When the mixed cleaning agent 5 3 2 for steam cleaning becomes a certain amount or less, for example, an alarm can be issued. The rinsing tank 5 2 1 and the steam cleaning tank 5 3 1 are respectively provided with the cooling pipes 534 and 534 as described above, so that the mixed cleaning agent 5 2 2 and the cleaning cleaning agent 5 3 2 are steamed. The cooling is liquefied, and it can be a structure that prevents waiting steam from escaping to the rinsing tank 5 2 1 and the steam cleaning tank 5 3 1, or even outside the cleaning device. As the steam dries, the steam cleaning mixed cleaning agent 5 3 2 in the steam cleaning tank 5 3 1 will be brought into the dirt component attached to the object 5 0 1 through the mixed cleaning cleaning agent 5 2 2 for rinsing or Hydrocarbon-based cleaning agent 5 1 2. These will accumulate in the steam cleaning tank 5 31, which will adversely affect the generation of steam 532a. Therefore, it is sent to the distillation regeneration mechanism D together with the overflow cleaning pipe 541 and the steam cleaning mixed cleaning agent 5 3 2. In addition, the hydrocarbon-based cleaning agent 5 1 2 attached to the object to be cleaned 5 1 2 is taken into the rinsing tank 5 2 1, and the mixed cleaning agent 5 2 2 for rinsing is accumulated. For this purpose, the mixed cleaning agent 5 2 2 for rinsing in the rinsing tank 5 2 1 is also sent to the distillation regeneration mechanism D through the overflow pipe 5 4 2. The distillation regeneration mechanism D is a self-rinsing tank 5 2 1 and a steam cleaning tank 5 3 1, and recovers the polluted mixed cleaning agent 5 2 2 and the mixed cleaning agent for steam cleaning, which are polluted by dirt components or hydrocarbon-based cleaning agents 5 1 2. 5 3 2 (these are mixed cleaning agents of the same composition), which are regenerated by distillation with a still 5 4 3. The vaporized liquid system is piped through the distiller 5 4 3. The paper size applies the Chinese National Standard (CNS) A4 (210X297 mm) nc -yb _ (Please read the precautions on the back before filling this page)

Binding and ordering 528799 A7 B7 V. Description of the invention (94) 544 is sent to the steam cleaning tank 531, which is used as the steam 532a. The residue produced by the distillation is discharged out of the system through the pipe 5 4 5 and the cooling pipe 5 3 4 installed in the upper inner wall surface of the steam cleaning tank 5 3 1 is cooled and solidified by steam cleaning and mixing. The cleaning agent 5 3 2 is configured to flow back into the rinsing tank 5 2 1 on the downstream side through a pipe 5 3 5. The steam-cleaning combined cleaning agent 5 3 2 having the same composition as the rinsing mixed cleaning agent 5 2 2 that has been cooled and solidified as described above is introduced into the rinsing tank 5 2 1, and the rinsing mixed cleaning agent in the rinsing tank 5 2 1 is introduced. The dirt concentration of 5 2 2! Is kept below a certain level. In addition, as described above, the contaminated rinsing mixed cleaning agent 5 2 2 is sent to the distillation regeneration mechanism through the overflow pipe 5 4 2. Therefore, the material inside the rinsing tank 5 2 1 is kept at a fixed income. The composition control mechanism E is to maintain the composition of the mixed cleaning agent 5 2 2 for rinsing and the mixed cleaning agent 5 3 2 for steam cleaning to be constant, and is composed of a composition change monitoring unit, a component adjustment unit, and a control unit. If necessary, the control unit adopts the flash control method. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page). The composition change monitoring unit as a means for measuring the composition ratio has a boiling point of 5 3 2 which can measure the mixed cleaning agent for steam cleaning or Freezing point temperature detectors 551, 552, 553, 554. The boiling point is measured by a temperature sensor 5 5 1 provided in a steam cleaning mixed cleaning agent 5 3 2 in a steam cleaning tank 5 3 1 or a temperature sensor 5 2 2 provided in a still 5 4 3. In addition, the freezing point is the temperature sensor 5 5 3 or the still installed in the steam cleaning tank 5 3 2 a in the steam 5 3 2 a. The paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm). ) -97-Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs 528799 A7 B7 V. Description of the invention (95) 5 4 3 The temperature detector 5 5 4 is set for measurement. The cleaning device of this embodiment measures all of the above four points, and when any one of them is detected to be abnormal, it sends a signal to add an insufficient component. The composition adjusting section is provided with a tank 555 for storing fluorocarbons (perfluorocarbon PF5060 in this embodiment), and a tank for storing low-molecular-weight siloxane compounds (hexamethyldisiloxane in this embodiment) 5 5 6. Set the automatic switching valves 5 5 7 and 5 5 8 respectively. Then, the insufficient component is supplied to the rinsing tank 5 2 1 according to the signal from the composition change monitoring section, and the control section instructs the automatic on-off valves 557 and 558 of the component adjusting section based on the signal from the composition change monitoring section. The cleaning device of this embodiment has the composition control mechanism E as described above, so that the composition ratio of the mixed cleaning agents 5 2 2 and 5 3 2 having non-combustibility or flame resistance can be kept constant. This can prevent, for example, one of the components from being consumed in large quantities and changing the composition ratio so as to affect the properties of nonflammability or flame retardancy. Therefore, a low-molecular-weight siloxane compound having a pyrophoric property can be safely and permanently used. In the above embodiment, the temperature detectors 551, 552, 5 5 3, and 5 5 4 which are capable of measuring the boiling point or the freezing point of the mixed cleaning agent 532 for steam cleaning are configured as a composition change monitoring section for measuring the composition ratio. The detector of the specific gravity or refractive index of the mixed cleaning agent can also be detected by the Si-0 bond infrared absorption of the low-molecular-weight siloxane compound.器 等 Composition. The sensor for measuring the specific gravity or refractive index of the mixed cleaning agent is set in, for example, a self-steam cleaning tank 5 3 1 to send the mixed cleaning agent to this paper. The Chinese national standard (CNS) A4 specification (210X297 mm) is applicable. ¾-- (Please Read the precautions on the back before filling this page) Order% -98-528799 A7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (96) Rinsing tank 5 2 1 in the piping 5 3 5 The infrared absorption sensor based on the Si-0 key is provided in the steam cleaning tank 5 31, for example. By doing so, the same effect as that of the composition change monitoring section for measuring the boiling point or the freezing point can be obtained. The preventive safety mechanism F is a steam concentration detection sensor 5 6 1 having a low molecular weight siloxane compound, and an oxygen concentration detection sensor 5 6 2, for example, based on the detection of these sensors 5 6 1, 5 6 2 As a result, the inert gas flushing mechanism 5 6 3 and the leak detection alarm generating mechanism 5 6 4 are used. From the inert gas flushing mechanism 5 6 3, inert nitrogen or fluorocarbon gas will be introduced into the cleaning device, and the vapor concentration of the low-molecular-weight siloxane compound will be diluted and maintained at a vapor concentration outside its combustion range. When the inert gas flushing mechanism 5 6 3 is often driven, the atmosphere in each of the tanks including the cleaning tank 511, the rinsing tank 521, and the steam cleaning tank 531 and the upper atmosphere thereof can be driven under an inert gas pressure. Cleaning device. In addition to the above-mentioned machines, the preventive safety mechanism F has a liquid temperature adjustment mechanism or an overheating automatic stop mechanism not shown in the drawing. The electrical machinery used is a contactless relay, and those with a contact are given. Contact blowing, motors, etc. are pressure-proof and explosion-proof. In addition, even if the low-molecular-weight siloxane compound is drawn from each of the self-cleaning tank 5 1 1, the rinsing tank 5 2 1, and the steam cleaning tank 5 3 1, the oil pan 5 6 5 is provided to prevent the liquid from expanding The bottom surface was simultaneously cured by the oil coagulant 5 6 6. The fire-fighting mechanism G has, for example, a C02 automatic fire extinguisher 5 7 1, and a flame inspection device that can drive this C02 fire extinguisher 5 7 1 is installed in the cleaning device (please read the precautions on the back before filling this page)

装 _ ， 11 # This paper size applies to China National Standard (CNS) A4 specification (210X297 mm)-99-528799 A7 B7 V. Description of the invention (97) Sensor 572 and temperature sensor 573. When a fire is detected by the flame sensor 572 and the temperature sensor 5 7 3, it is configured to spray C02 fire extinguishing agent from each of the fire extinguishing nozzles 5 7 1 a of the automatic fire extinguisher 5 7 1. In addition, with the operation of the automatic fire extinguisher 5 71, the exhaust passage 5 0 4 stops, and the baffle 5 74 and the closed door 5 0 3 in the passage 5 04 are automatically closed to isolate the outside atmosphere and prevent oxygen from entering the device. . With the preventive safety mechanism F or fire-extinguishing mechanism G mentioned above, the fire of low-molecular-weight siloxane compounds can be prevented, and in the event of a fire, the fire can be automatically extinguished, and the low-molecular-weight siloxane compounds can be used more safely. The cleaning device of the above embodiment is an example of using a low-molecular-weight siloxane compound in the rinsing step B and the drying step C, but the present invention is not limited to this. In any of the cleaning step A, the rinsing step B, and the drying step C The present invention can also exert its effect when a low-molecular-weight siloxane compound is used. Furthermore, the present invention can also be applied to a single cleaning device, which is only a rinsing step and a drying step, and a single cleaning device for rinsing or drying when the cleaning step is omitted in the case of light dirt. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs-(Please read the precautions on the back before filling out this page)% As stated above, when cleaning the device according to the present invention, Adding fluorocarbons to alkane compounds makes them non-combustible or non-combustible. At the same time, the composition ratio can be controlled without affecting its non-combustibility or non-combustibility, so it is safe and effective to use low-molecular-weight siloxane compounds Cleaning agent. Example 1 2 4 The following describes the implementation of the second to fourth cleaning devices of the present invention with reference to the drawings. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) " 528799 A7 _______B7___ V. Description of the invention (98) example. FIG. 6 is a diagram showing a configuration of a cleaning device according to an embodiment of the present invention. As shown in the figure, the cleaning step A, the rinsing step B, and the drying step C are generally used as the main parts. In addition, it is also equipped with preventive safety mechanism D, fire suppression mechanism E and distillation regeneration mechanism F. In addition, the steps of using a flammable low-molecular-weight siloxane compound, that is, the cleaning step A, the rinsing step B, and the drying step C, are carried out in addition to a portion of the cleaning object 6 0 2 to be a basket 6 0 1 The closed structure of the cover, while taking out a part of the cleaning object 602, is provided with double doors 603, 604, thereby using a step of using a low-molecular-weight siloxane compound to form an air-tight structure. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page) Cleaning tank A in cleaning step A 6 1 1 is filled with one of the quantified compounds such as octamethylcyclotetrasiloxane The polysiloxane-based cleaning agent 6 1 2 as the main component is immersed in the polysiloxane-based cleaning agent 6 12 to remove the dirt components attached to the cleaning target 6 02. The number of cleaning tanks 6 1 1 in this cleaning step A is set according to the type or amount of dirt, and the cleaning time or cleaning quality. It can be a single tank or multiple tanks. And according to its needs, a ultrasonic generator 6 13 1 is set at the bottom of the washing tank 6 13 ° The rinsing tank 5 2 1 of step B is filled with a certain amount of low-molecular-weight siloxane compounds such as octamethylcyclotetrasiloxane The polysiloxane washing and cleaning agent 6 2 2 alone is immersed in the washing target object 6 〇 2 in the polysiloxane washing agent 6 2 2 to remove the detergent component attached to the washing target 6 〇 2 . The number of rinsing tanks 6 2 1 in rinsing step B is the same as that of washing step A. The paper size is applicable to the Chinese national standard (0can) 8 4 specifications (210 father 297 mm) _ — 528799 Printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs System A7 B7 V. Invention description (99) Same, depending on the cleaning time or cleaning quality, it can be a single tank or multiple tanks. According to its needs, an ultrasonic generator 6 2 1 is installed at the bottom of the rinsing tank 6 2 1. The cleaning tank 6 1 1 and the rinsing tank 6 2 1 are respectively set as the liquid temperature as a part of the preventive safety mechanism D. The sensor 6 4 1 is in a silicone cleaning agent 6 1 2 and a silicone cleaning agent 6 2 2. Then, according to the measurement results of these liquid temperature detectors 6 4 1 ', the polysiloxane cleaning agent 6 1 2 and the polysiloxane cleaning agent 6 2 2 are often used by a liquid temperature adjusting mechanism not shown in the figure. It is kept below the flash point. The silicone cleaning agent 6 1 2 and the silicone cleaning agent 6 2 2 are respectively circulated through filters 614 and 624 by motors 615 and 625. The steam cleaning tank 5 3 in the drying step C is a steam cleaning agent 6 3 2 filled with a low-molecular-weight siloxane compound such as hexamethyldisiloxane. The heater 6 3 3 is used to make a mixed cleaning agent 6 for steam cleaning. 3.2 Heated and gasified, it has a structure capable of generating steam 6 3 2 a. Then, the cleaning object 6 0 1 after rinsing is exposed to the steam 6 3 2 a of the steam cleaning mixed cleaning agent 6 3 2 for a predetermined time, and the steam of the steam cleaning agent 6 3 2 is steamed on the surface of the cleaning object 6 0 1. 6 3 2 a is coagulated into water droplets to remove the mixed cleaning agent 6 2 2 for rinsing, and at the same time, the cleaning object 6 0 1 which has been heated and raised by the latent heat of solidification is dried. There are cooling pipes 616, 626, and 63 4 on the inner wall of the upper part of the cleaning tank 6 1 1, the rinsing tank 6 2 1 and the steam cleaning tank 6 3 1 to liquefy the steam cooling of the low-molecular-weight siloxane compound, and can This structure prevents the steam from escaping to the outside of the cleaning device. This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm), _ -102 a pack-(Please read the precautions on the back before filling this page) Order 528799 A7 __B7 V. Description of the invention (100) Preventive safety mechanism D is steam with low-molecular-weight siloxane compounds (please read the precautions on the back before filling this page) Concentration detection sensor 6 4 3 and Oxygen concentration detection sensor 6 4 4 It is connected to the control unit 6 4 5 of the inert gas flushing mechanism 6 4 2. The control unit 6 4 5 will send an alarm when the steam concentration and oxygen concentration of the low-molecular-weight siloxane compound are out of the management range, and it will increase the flushing amount from the inert gas flushing mechanism structure 6 4 2 to make the low-molecular-weight siloxane The steam remains outside the combustion limits. With these devices, the vapor concentration of the low-molecular-weight siloxane compound can be maintained outside the combustion range. With the preventive safety mechanism D as described above, the silicone cleaning agent 6 1 2, the silicone cleaning agent 6 6 2, and the silicone steam cleaning agent 6 3 2 can be safely used. In addition, the low-molecular-weight siloxane compound vapor concentration sensor 6 4 3 is a sensor that can be measured based on the infrared absorption of the Si-0 bond in the low-molecular-weight siloxane compound, so it can detect low sensitivity with high sensitivity. The vapor concentration of molecular siloxane compounds ensures its safety. In addition to the above-mentioned machines, the preventive safety mechanism D printed by the Employees' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs also has an over-temperature automatic stop mechanism and a leak detection alarm generation mechanism 6 4 6 etc. For point relays, those who have contacts will be blown by the contacts. Also, motors and other systems adopt pressure-proof and explosion-proof specifications. In addition, even if the low-molecular-weight siloxane compounds are leaked from each of the self-cleaning tank 6 1 1, the rinsing tank 6 2 1, and the steam cleaning tank 6 3 1, the liquid pan 6 4 7 is also provided to prevent the liquid from expanding. The bottom surface is simultaneously cured by the oil coagulant 6 4 8. In addition, instead of the oil coagulant 6 4 8, a non-flammable or flame-resistant fluorocarbon can be used as the absorbent of the low-molecular-weight siloxane compound. In addition, instead of the above inert gas flushing machine in the preventive safety agency D, the paper size of this paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -103-Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 528799 A7 ______B7__ Description of the invention (iO1) Structure 6 4 2 or combined with inert gas flushing mechanism 6 4 2 can also make each of the cleaning tank 6 1 1, the rinsing tank 6 2 1 and the steam cleaning tank 6 3 1 a sealable tank. 6 4 9, at the same time, the lifting mechanism of the closed tank 6 4 9 is used, except when the cleaning object 6 0 2 is placed, the closed tank 6 4 9 is immersed in a non-combustible or non-combustible fluorocarbon, such as hydrofluorocarbon. Carbon C2H2F10 structure in liquid 6 50. By adopting these structures, it is possible to safely use the polysiloxane cleaning agent 6 1 2, the polysiloxane cleaning agent 6 2 2 and the polysiloxane steam cleaning agent 6 3 2 at the same time in case of liquid leakage, low The molecular siloxane compounds will also be absorbed by the fluorocarbon liquid 650 to ensure safety. Further, the upper portion of the fluorocarbon liquid 650 is structured in a closed structure, so that the safety can be further improved. In addition, for example, as shown in FIG. 8, each of the cleaning tank 6 1 1, the rinsing tank 6 2 1 and the steam cleaning tank 6 3 1 may have a double-layer structure, and at the same time, the outer tank 6 5 1 and each tank 6 1 1, Structure of 6 2 1 and 6 3 1 filled with non-combustible or non-combustible fluorocarbon filler 6 5 2. Therefore, even if the liquid leaks, the low-molecular-weight siloxane compound will be absorbed by the fluorocarbon-based filler 6 5 2 to ensure safety. The fire extinguishing mechanism E is an automatic fire extinguisher 661 having a non-combustible or flame-resistant fluorocarbon, for example, fluoroiodocarbon CF2F2 as a fire extinguishing agent. In order to drive the automatic fire extinguisher 661, a flame sensor 662, a temperature sensor 6 6 3 and a pressure sensor 6 64 are arranged in the device. The flame detector 662, the temperature detector 663, and the pressure detector 664 can detect fire disasters, and each of the fire extinguishing nozzles 66 1 a of the automatic fire extinguisher 66 1 can inject a fire extinguisher made of fluoroiodocarbon C F 2 I 2. The fire retardant can be used, for example, fluorine. This paper is sized for the Chinese National Standard (CNS) A4 (210X297 mm) (please read the precautions on the back before filling this page). Binding-104-528799 A7 _ _ B7 V. DESCRIPTION OF THE INVENTION (102) Iodocarbon CF2I2 liquid itself. In addition, with the operation of the automatic fire extinguisher 661, both sides of the double doors 603, 604 will be closed to isolate the outside air and prevent oxygen from entering the device, thereby improving the fire extinguishing effect of the fire. Therefore, with the above-mentioned fire-extinguishing mechanism E, even if a fire is caused by a low-molecular-weight siloxane compound, the fire can be effectively extinguished, and a polysiloxane cleaning agent 6 1 2 and a polysiloxane cleaning agent 6 2 can be used more safely. 2 and polysiloxane-based steam cleaning agent 6 3 2. As for the steam cleaning tank 6 3 1, the polysiloxane-based rinsing agent 6 2 2 attached to the object 6 0 2 to be cleaned is brought into the steam cleaning tank 6 3 2 and the steam cleaning agent 6 3 2 is contaminated and accumulated. For this purpose, the polysiloxane-based steam cleaner 6 3 2 used in the steam cleaning tank 6 3 1 is sent to the distillation unit 672 of the distillation regeneration mechanism F through a pipe 6 7 1, and is purified and purified. The polysiloxane-based steam cleaner 6 3 2 thus regenerated is returned to the steam cleaning tank 6 3 1 through the pipe 6 7 3. Distillation removes the dirt or cleaning agent attached to the object to be cleaned and removes it through the pipe 6 7 4. For each device of the distillation regeneration mechanism F, non-combustible or flame-resistant fluorocarbons can be filled to ensure safety. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page). Also, the cleaning device of the above embodiment is used in the steps of washing step A, rinsing step B and drying step c. Examples of the siloxane compound 'However, the present invention is not limited to this. Even if any of the cleaning step A, the rinsing step B, and the drying step C uses a low molecular sand oxygen compound, the effect of the present invention can be exerted. The invention can also be applied in a single cleaning device for washing, rinsing or drying, not only cleaning operations (shaking, stirring, ultrasonic, spray, etc.) 'can also include drying operations (hot air drying, spin drying, steam, etc.) This paper is applicable to China National Standard (CNS) A4 specification (210 '乂 297 mm) 105-528799 A7 ____B7 V. Description of the invention (103) Drying, pull-up drying, vacuum drying, etc.) It is safe and effective to use low molecular oxygen compounds . As described above, the cleaning apparatus according to the present invention can safely and easily use a low molecular weight siloxane compound having a flash point. For example, when the second cleaning device is used, the vapor concentration of the low-molecular-weight siloxane compound can be out of the combustion range with high accuracy, and safety can be ensured. Furthermore, according to the third cleaning device, heat sources such as electric sparks can be prevented, and the low-molecular-weight siloxane compound can be shielded from oxygen, and the cleaning operation can be performed safely. In addition, when the device is cleaned according to the fourth aspect, in the event of a fire, the fire can be effectively extinguished, which can further improve its safety. The industrial applicability is as described above. The cleaning agent, cleaning method and cleaning device related to the present invention can replace Freon-based solvents or chlorine-based solvents as cleaning agents, cleaning methods and cleaning devices that do not damage the environment. Many industrial products such as electronic parts or precision parts are extremely useful. (Please read the precautions on the back before filling out this page.) "Binding and binding The paper size printed by the Employees' Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs applies the Chinese National Standard (CNS) A4 specification (210X297 mm)-Iϋο-528799 A7 B7 V. Description of the invention (104) Table 1

CFC113 Water IPA Dichloromethane low molecular weight siloxane toxicity to human body 〇〇Δ X 〇0DP X 〇〇X 〇GWP X 〇X Δ 〇V0C limit X 〇XX 〇 Dryness (stains after drying) XX Δ 〇 pair Impact of plastic elasticity 〇〇XX 〇 Impact on metal 〇 × 〇Δ 〇 Cycle · Reuse 〇X 氺 2 x13 〇〇 Ignition 〇〇X 〇X (Please read the precautions on the back before filling this page) • Binding · Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs This paper is printed in accordance with Chinese National Standards (CNS) A4 (210 X 297 mm) 107-1 1: Solvent Erosion · Impact on Swelling The equipment for activated carbon, reverse osmosis membrane, ion exchange, etc. is huge and difficult to handle. * 3: Distillation is difficult due to azeotropy with water. 〇: No toxicity or limitation, no various effects, and good properties. △: Characteristics between 〇 and X. X: There are toxic regulations, various effects, and various characteristics are poor. 528799 A7 B7 V. Description of the invention (105) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. 2 Substance name 5 Value Dielectric Constant Dipole Moment 3, 5, 5-trimethylhexanol 10-11 3-methoxy 3-methyl-1-butanol 9. 3 n-hexanol 10. 77 13. 3 2-methylcyclohexanol 13. 3 wood 1 1. 95 isoamyl alcohol 10. 0: 14. 7 1. 82 Extreme ethanol 12. 78 23. 8 1. 68 Ethylene glycol-methyl ether 11.4 16.93 2. 04 Sexual o-phenol 10. 2 11. 5 1. 41 Acetophenone 10. 6 17. 39 2. 96 Acetic anhydride 10 3 20.7 * 2 2. 82 ethyl acetate 9. 1 6.02 wood 1 1. 88 net isopropanol 11. 44 18. 3 1. 68 ethylamine 10. 0 8. 7 * 4 1.09 agent Ν, Ν- 二Methylnitroamine 13. 1 Ν, Ν-dimethylacetamide 10. 8 37. 78 3. 72 Ν-ethylacetamide 12. 3 Ν, Ν-diethylformamide 12. 1 Morpholine 10. 8 7. 42 1. 50 Acetylmorpholine 11.6 Formamylmorpholine 13. 0 Isobutene 9. 8 20.4 * 3 3. 61 Acetonitrile 10. 8 Acetonitrile 11. 9 ( (Please read the notes on the back before filling out this page)

、 1T This paper size is applicable to Chinese national standard (milk) 8 4 size (210, / 297 mm) _1108 528799 A7 B7 V. Description of the invention (106) Table 2 (continued) Dimethylformamide 12. 0 48. 9 4. 3 N-2-pyrrolidone 11.3 ethyl lactate 10. 0 13.1 * 1 butyl lactate 9.4 propane sultone 4. 70 phosphorus triethyl ester 3. 07 (Please read the notes on the back before filling (This page)

* 1: Value at 20 ° C * 2: Value at 19 ° C * 3: Value at 24 ° C * 4: Value at 0 ° C Paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 109-528799, Α7 Β7 V. Description of invention (107)

Substance name (5 value dielectric constant dipole moment octamethylcyclotetraoxane 6.0 2. 39 1.09 IP Solvent 7.3 2 Wash Shallzol D40 7.6 2.1 0 Octamethyltrisiloxane 6.0 2,30 0.99 Net Naphtezol L 8.0 2 Hexamethyldisilaxane 6.2 2.17 0. 79 Agent dodecane 6. 6 2.016 * 1 Full gas carbon 5. 5-6. 0 1.7-1 · 9 Hydrochlorofluorocarbon 6-7 Di-n-propyl ether 7.8 3.3 Methylal 2.7 0-0.45 HFC 5-7 Wood 1: 20 ° C Value of dipole moment Unit: D (Please read the precautions on the back before filling this page) Installation and reference The paper size applies to China Standard (CNS) A4 size (210X297 mm), 1Λ

— 丄 1U 528799 A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (108) Table 7 MM / PFC * Pyrophoric substance after mixing with polar cleaning agent Oil flux Mi) (wt%) 25 ° C base oil oily agent surface agent 1 15/85 acetone 5 9. 62 20.70 2. 69 ◎ XX XX non-combustible ['sheng 2 15/85 methyl ethyl ketone 15 9 45 18.51 2.76 ◎ 〇XX Non-combustible 3 30/70 Tetrahydropyran 15-7.58 1.70 ◎ ◎ Δ X Value 4 40/60 Third amyl alcohol 13-5.82 1.7 ◎ ◎ Δ 〇ϋΜ 生 实 5 40 / 60 Tetrahydropyran 15-5. 44 1.87 ◎ ◎ Δ ◎ Look at 6 40/60 1,2 Dimethoxyethane 15-5.50 1.79 ◎ ◎ Δ 雠 Nature 7 40/60 Acetic acid 14-6.15 1.68 ◎ ◎ Δ ◎ Normal application 8 40/60 isobutyl formate 13-6.41 1.88 ◎ ◎ △ Flame retardant 9 40/60 butyl acetate 15 8.43 5.01 1.84 ◎ ◎ ◎ ◎ IW Health 10 40/60 ethyl propionate 15 8. 77 5.65 1.74 ◎ ◎ 〇 ◎ Nature 11 11 40/60 Ethyl acetate 15-6. 02 1.88 ◎ ◎ ○ ◎ Nature 12 40/60 propyl acetate 13 8.80 6.002 1.78 ◎ ◎ 〇〇 flame retardancy 13 40/60 diethylsulfide 14-5.72 1.61 ◎ ◎ 〇〇 雠 性 14 40/60 六 _ 比 口 定 14-5.8 1.13 ◎ ◎ 〇〇 look at 15 50/50 Fushi ^ 16-7.42 1.5 ◎ ◎ 〇〇 Seeing 16 50/50 trifluoroacetic acid 13-8.55 2.28 ◎ ◎ ◎ 〇 17 17 60/40 2-propanol 12 11.94 20.3 1.68 ◎ ◎ △ Δ mm \ ±

Hexamethyldisilazane PFC = Perfluorocarbon (C6F14) Dipole unit: D (Please read the precautions on the back before filling this page) Binding and binding The paper size applies the Chinese National Standard (CNS) A4 specification ( 210X 297mm) 111 528799 A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (109) Table 8 MM / PFC * Pyrophoric substance after adding the lotion (mixing ratio / _ amount of continuous dielectric) Constant Coupling®S Oil Co-solvent Si) (wt ° / o) 25. . Base oil level pole _ [18 60/40 3-pentanone 12-19. 77 2.70 ◎ ◎ ◎ △ Look 19 60/40 2-hexanone 14 8.71 16.43 2. 66 ◎ ◎ ◎ ◎ Health 20 60/40 Isopropylacetone 14-15.6 2. 84 ◎ ◎ ◎ ◎ Natural 21 60/40 2-Methanol 11-16.93 2.04 ◎ ◎ ◎ Δ Δ Seek 22 60/40 Ethylenediamine 16-12.6 1.90 ◎ ◎ ◎ ◎ Romance 23 70/30 Propanol 20 12.18 22.2 1.657 ◎ ◎ ◎ ◎ 344K 24 70/30 2-pentanone 20 8.76 21.96 2. 70 ◎ ◎ ◎ 333K Shi 25 70/30 Ding 20-20.3 3. 57 ◎ ◎ ◎ ◎ 346K 26 70/30 isobutyl 20-20.4 3.61 ◎ ◎ ◎ 346K 27 70/30 nitrohexane 18-28.06 3.70 ◎ ◎ ◎ 349K Example 28 70/30 propionitrile 15 10.73 29.7 3.57 ◎ ◎ ◎ ◎ 338K 29 70/30 Nitromethane 10 12.7 35. 87 3. 46 ◎ ◎ △ 351K 30 70/30 Acetate 8 12.71 37.5 3.44 ◎ ◎ △ 328K 31 15/85 Ethyl acetate 5-6 02 1.88 ◎ ◎ 〇X non-combustible ft 32 30/70 ethanol 14 12.78 23.8 1.68 ◎ ◎ Δ Δ 33 33/70 butylamine 14 8. 66 4.88 1.20 ◎ ◎ ◎ 〇 34 30/70 _ 15-27. 05 0.52 ◎ ◎ 〇 Δ

*: MM = Hexamethyldisilaxane PFC = Perfluorocarbon (C6F14) Unit of Lion: D (Please read the precautions on the back before filling this page) The size of the paper used for the binding is bound to the Chinese National Standard (CNS ) A4 size (210X297 mm) 112 528799 A7 B7 V. Description of invention (11G) Table 9 Printed cleaning agent rinsing agent steam cleaning agent printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 35 Diethylene glycol-butyl ether hexamethyldi Siloxane (95) Acetone (5) Perfluorocarbon [C6F14] (77) Hexamethyldisilaxane (19) Acetone (4) Solid 36 Butyl lactate — Perfluorocarbon [C6Fl4] (74) Hexamethyl Base disiloxane (18) acetic acid (8), 37 diethylene glycol-butyl ether (60), propylene glycol-methyl ether (40), octamethylcyclotetrasiloxane (90), acetone (10), full gas carbon [ CsFi8] (90) Hexamethyldioxane (9) Acetone (1) Example 38 Ethyl acetate hydrogen carbon [C5H2Fi〇] (95) IPA (5) < — 39 3, 5, 5-trimethyl Hexanol Perfluoromorpholine (40) Hydrofluorocarbon [C5HiFh] (40) Hexamethyldisilaxane (15) Ethanol (5) Comparative Example 1 Isopropanol water (hot air drying) 2 Isoparaffin ( 90) Octamethylcyclotetrasiloxane (5) Diethylene glycol-butyl ether (5) Octamethylcyclotetrasiloxane Alkoxy full gas carbon [CeFie] 3 Propylene glycol - diethylether isoparaffin hexamethyldisilazane cut siloxane * values within :() represent parts by weight. ―The same content is in the left column of the table. The same applies to the tables below Table 10. (Please read the notes on the back before filling this page)

Ay This paper size is applicable to China National Standard (CNS) A4 (210X297 mm) 113-528799 A7 B7 V. Description of invention (1U) Table 10 Ion residues printed by employees' cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs (// g NaCl / in2) Insulation resistance value (× 1013Ω) Drying time of white residue (seconds) Ignition coefficient of ignited by steam cleaning agent 35 3.2 1.0 0/20 30 Flame resistance 0 * Application 36 4.0 3.0 0/20 60 Flame resistance 0 37 2.1 5.3 0/20 26 Non-combustibility 0 Example 38 3.3 2.1 0/20 23 Non-combustibility 0 39 2.4 1.9 0/20 25 Non-combustibility 0 ratio 1 4.1 0.05 9/20 > 2000-1 0 to 2 13.9 0.15 15 / 20 25 Non-combustibility 0 Example 3 9.8 0.9 7/20 41 273Ρ 0 *: Measured in the form of Tiger's closed type (please read the precautions on the back before filling this page) -pack-

、 1T This paper size applies Chinese National Standard (CNS) A4 specification (210 × 297 mm) 114-528799 A7 _ B7 V. Description of the invention (112) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. Table 11 Cleaning agent rinse agent steam cleaning Agent 40 n-hexanol HFC * 1 (90) octamethyltrioxane (5) IPA (5) (hot air drying) 41 propylene glycol-ether hexamethyldioxane (95) IPA (5) ( Natural drying) 42 3-methoxy-3-methyl-1-butanol (50) ethyl lactate (50) perfluorocarbon * 2 (28) hexamethyldioxane (67) butyl acetate ⑸ (vacuum drying) Example 43 2-methylcyclohexanol perfluorocarbon * 2 (40) hexamethyldisilaxane (40) IPAC20) 44 acetone (30) ethanol (70) perfluorocarbon * 2 (78 ) Isoparaffins (19), acetone, ethanol (2) (hot air drying) 45 isoamyl alcohol hexamethyldisilaxane (95) methanol (5) fluoroiodocarbon [C4F9I] (57) hexamethyldisila Oxane (40) Acetone (3) 46 Ethyl lactate C4F9〇CH3 (50) Acetone (50) <-47 Ethyl lactate-C4F90OCH3 (90) Hexamethyldisilaxane (5) Ethyl acetate (5) 48 Diethylene glycol-butyl ether C4F9〇CH3 (100) (natural drying) 49 two Glycol-methyl ether C4F9〇C2H5 (100) < —— 50 Dipropylene glycol-methyl ether C3FtOC2H5 (90) Hexamethyldisilazane (10) (naturally dry) ratio 4 Isoparaffin (90) Isomerization Paraffin (90) Propanol (10) Perfluorocarbon [C8F18] Comparative Example 5 CFC113 (96) Ethanol (4) 6 (Unwashed) *: Values in () indicate parts by weight. Wood 1: C5H2F1〇 ^ CeFi4 (Please read the notes on the back before filling in this page)-The size of the paper is bound to the Chinese National Standard (CNS) A4 (210X 297 mm) -115-528799 Central Standard of the Ministry of Economic Affairs Printed by the Consumer Cooperative of the Bureau A7 B7 V. Description of the invention (113) Table 12 Residual oil content (mg / g) Drying time (seconds) Ozone destruction coefficient Pyrophorism 40 0. 010 41 0 Non-combustibility * 1 Real 41 0. 006 73 0 275K * 1 Application 42 0. 031 35 0 Flame resistance * 1 Example 43 0. 026 22 0 Flame resistance * 2 44 0. 001 39 0 Flame resistance * 1 45 0. 018 27 0 Flame resistance * 2 46 0. 015 35 0 293K * 2 47 0. 028 28 0 Flame resistance * 2 48 0. 009 25 0 Flame resistance * 1 49 0. 024 36 0 Flame resistance * 2 50 0. 017 42 0 Flame resistance * 1 than 4 0. 153 21 0 non-combustibility * 2 less than 5 0. 025 32 0.8 non-combustibility * 2 Example 6 0. 686-0-* 1: ignitability of rinse agent (flash point is tested by Tiger closed test ) * 2: Pyrophoric properties of steam cleaners (please read the precautions on the back before filling this page). · 11 This paper size is applicable to China National Standard (CNS) A4 (21〇χ 幻 528799 A7 B7 Ministry of Economic Affairs) central Printed by the Consumer Bureau of the Standards Bureau 5. Description of the invention (114) Table 13 MM / PFC * Pyrolytic lotion material flammability (mixing ratio / face value 5 dielectric constant coupler g oil solvent solvent) (wt %) 25〇C base oil, oil base, face powder 51 15/85 acetone 5 9. 62 20. 70 2.69 ◎ XX non-combustible ['sheng 52 15/85 methyl ethyl ketone 15 9. 45 18.51 2.76 ◎ 〇XX Non-combustible ['Health 53 30/70 Tetrahydrofuran 15-7.58 1.70 ◎ ◎ Δ X Alkaline 54 40/60 Third amyl alcohol 13-5. 82 1.7 ◎ ◎ △ See real 55 55/60 Tetrahydrofuran 15- 5.44 1.87 ◎ ◎ Δ ◎ Fibrous 56 40/60 1,2 Dimethoxyethane 15-5. 50 1.79 ◎ ◎ Δ ◎ Superb 57 40/60 Acetic acid 14-6.15 1.68 ◎ ◎ Δ ◎ Naturally applied 58 40 / 60 Isobutyl formate 13-6.41 1.88 ◎ ◎ Δ 〇 59 59/60 butyl acetate 15 8. 43 5.01 1.84 ◎ ◎ 〇 ◎ ethyl 60 propionate 15 8. 77 5 65 1.74 ◎ ◎ 〇 ◎ Noodles 61 40/60 Ethyl acetate 15-5.2 1.74 ◎ ◎ ◎ ◎ 62 62/60 propyl acetate 13 8. 80 6.002 1.78 ◎ ◎ 〇〇 63 40/60 Diethylsulfide 14-5. 72 1.61 ◎ ◎ 〇〇 Seeability 64 40/60 Hexahydrogen Identifier 14-5.8 1.13 ◎ ◎ 〇〇 雠 性 65 50/50 Morpholine 16-7. 42 1.5 ◎ ◎ 〇〇mm raw 66 50/50 trifluoroacetic acid 13-8. 55 2. 28 ◎ ◎ ◎ ◎ 〇 Ｍ 生 67 60/40 2-propanol 12 11.94 20.3 1.68 ◎ ◎ Δ Vision *: MM = Hexamethyldisilaxane PFC = Perfluorocarbon (C6F14) The unit of even lion ...! (Please read the precautions on the back before filling out this page) Binding and binding The paper size applies to the Chinese National Standard (CNS) A4 specifications (210X297 mm) -117-528799 A7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of invention (ns) Table 14 Electric constant coupler (g oil content MM) (wt%) 25. . Base oil, oil-based agent, surface agent 68 60/40 3-pentanone 12-19. 77 2. 70 ◎ ◎ ◎ Δ Seeability 69 60/40 2-hexanone 14 8 · 71 16.43 2. 66 ◎ ◎ ◎ 雠70 60/40 Mesopropylacetone 14-15.6 2. 84 ◎ ◎ ◎ ◎ Appearance 71 60/40 2-methoxyethanol 11-16.93 2. 04 ◎ ◎ ◎ Δ i »f Shengshi 72 60/40 Ethylene Amine 16-12.6 1.90 ◎ ◎ ◎ ◎ Alkaline 73 70/30 1-propanol 20 12.18 22.2 1.657 ◎ ◎ ◎ ◎ 344K 74 70/30 2-pentanone 20 8.76 21.96 2. 70 ◎ ◎ ◎ ◎ 333K 75 75 70 / 30 Nitrile 20-20.3 3.57 ◎ ◎ ◎ ◎ 346K 76 70/30 Isocyanine 20-20.4 3.61 ◎ ◎ ◎ ◎ 346K 77 70/30 Nitrohexane 18-28.06 3. 70 ◎ ◎ ◎ 349K Example 78 70/30 Acetate 15 10.73 29.7 3. 57 ◎ ◎ ◎ 338K 79 70/30 Nitromethane 10 12.7 35.87 3.46 ◎ ◎ 〇 △ 351K 80 70/30 Acetate 8 12.71 37.5 3.44 ◎ ◎ △ 328K 81 15 / 85 Ethyl acetate 5-6.02 1.88 ◎ ◎ 〇X non-combustible ['Health 82 30/70 Ethanol 14 12.78 23.8 1.68 ◎ ◎ ◎ Δ Δ 83 83/70 Butylamine 14 8.66 4.88 1.20 ◎ ◎ ◎ 〇 Basicity 84 30/70 _ 15-27.05 0.52 ◎ ◎ 〇 △

*: Let = hexamethyldisilaxane PFC = perfluorocarbon (C6F14) Unit of dipole moment: D (Please read the precautions on the back before filling this page) • Packing-This paper size applies to Chinese national standards ( CNS) Iron grid (chest · xian) 528799 A7 B7 V. Description of the invention (116) Table 15 Composition of cleaning agent (parts by weight) Dry fluorocarbon low molecular weight siloxane polar solvent Method Type Amount Type 1 Amount Type Amount MM 40 IPA 10 Steam solid 86 C5H1F11 95 MDM 5 Ethanol 10 Hot air 87 CbF 14 40 MM 20 Acetone 10 Natural application C5H2F10 40 88 C6Fl4 30 MM 70 Methanol 10 Vacuum example 89 C4F9〇CH3 84-MEK 16 Steam 90 c4f9〇ch3 50- -Acetone 50 steam 91-— MM 50 Acetone 50 steam (Please read the notes on the back before filling this page) This paper size applies to China National Standard (CNS) A4 (21 × 297 mm) Employees of the Central Standards Bureau of the Ministry of Economic Affairs Printed by the Consumer Cooperative 1: MM = Hexamethyldisilaxane MDM: Octamethyltrisiloxane 528799 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (117) Table 16 Detergent, steam cleaner, comparative example 7 hexamethyldisilazane / steam drying 8 IPA / steam drying 9 perfluorocarbon [C8F18] / steam drying 10 CFC113 (96) + ethanol (4) / steam drying 11 Heterogeneous chain Alkanes (90) Octamethylcyclotetrasiloxane (5) Diethylene glycol-butyl ether (5) Octamethylcyclotetrasiloxane (100) Perfluorocarbon [C8F18] (100) 12 Propanediol-ether ( 100) Heteroparaffin (100) Hexamethyldisilazane (100) () The internal unit means parts by weight. (Please read the precautions on the back before filling this page) -Packing, 1T This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) _ 12β 528799 A7 B7 V. Description of the invention (118) Table 17 Ion Residue amount C // g NaCl / in2) Insulation resistance value (× 1013Ω) White residue pyrogenic ozone destruction coefficient is true 85 3.2 5.8 0/20 Flame retardant 0 Application 86 1.9 9.1 0/20 Noncombustibility 0 87 4.2 3.0 0/20 Incombustibility 0 Example 88 4.0 1.5 0/20 Incombustibility 0 89 1.6 7.2 0/20 Incombustibility 0 90 1.5 8.8 0/20 293KK 0 91 3.5 2.0 0/20 277K * 1 0 ratio 7 13.0 0.08 15/20 273Κ * 1 0 Compared with 8 4.0 0.05 10/20 284.7K ^ 1 0 Example 9 19.0 0.01 20/20 Non-combustibility 0 10 9.8 1.0 5/20 Non-combustibility 0.8 11 13.9 13.9 15/20 Non-combustibility * 2 0 12 9.8 9.8 1 7/20 273Κ * 2 0 (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs * 1: Pyrophoric properties of steam cleaners measured by Tiger's closed type ( (The flash point is measured in accordance with Tiger's closed measurement.) This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 528799. A7 B7 V. Description of the invention (119) Table 18 Composition of printed cleaning agent (parts by weight) of the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Dry fluorocarbon low molecular weight siloxane polar solvent 20 acetone 4 steam 93 C4F9I 80 MM 20 ethyl acetate 5 steam 94 C5H2F1O 80 MM MDM 15 5 butyl acetate acetone 2 2 steam 95 CF3CF2CHCI2 10 MM 90 IPA 5 steam example 96 CeFl4 90 MM 5 third butanol 5 steam 97 CeFl4 90 MM 5 isopropyl acetate 5 steam 98 CtFi6 85 MM 11 third butanol 12 steam 99 CtFi6 89 MM 11 isopropyl acetate 11 steam 100 CsFllNO 90 MM 5 third butanol 5 steam 101 C5F11NO 90 MM 5 acetic acid Isopropyl ester 5 steam 102 C4F9〇CH3 93--methanol 7 steam 103 c'f9〇ch3 91 \--ethanol 9 steam 104 C4F90CH3 92--IPA 8 steam 105 C4F90CH3 86--trifluoroethanol 14 steam 106 CeFie 80 MM 20 — Steam *: MM = Hexamethyldisilaxane MDM: Octamethyltrisiloxane ”Pack-(Please read the precautions on the back before filling this page) Use Chinese National Standard (CNS) A4 specification (210X 297 mm) 122-528799 A7 B7 V. Description of invention (120) Table 19 The amount of residual oil (mg / g) printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs Destructive factor 92 0. 005 Flame retardant 0 solid 93 0. 010 Flame retardant 0 94 0. 007 Flame retardant 0 95 0. 009 Flame retardant 0. 025 96 0. 011 Non-combustible 0 Application 97 0. 009 Non-combustible 0 98 0. 004 298K 0 99 0. 006 296K 0 100 0. 014 Non-flammability 0 Example 101 0. 012 Non-flammability 0 102 0. 008 Non-flammability 0 103 0. 006 Non-flammability 0 104 0. 006 Difficult Flammability 0 105 0. 009 Non-combustibility 0 106 0. 098 Flame-retardant 0 Comparative Example 13 0. 051 273K Wood 1 0 14 0. 018 284 · 7K * 1 0 15 0. 698 Non-combustibility 0 16 0. 007 Non-combustibility 0.8 * 1: Measured in the form of Tiger's closed type (Please read the precautions on the back before filling this page)

This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 528799 A7 B7 V. Description of the invention (121) Table 25 Liquid composition evaluation project example 115 Comparative example 23 24 25 26 27 Disodium perfluorocarbon, third butanol, hexamethyldisilafluoroperfluorocarbon 1,1,1-trichloroethane, unwashed and cleaned appearance 1 〇Δ △ X 〇- residual oil content (mg / g) 0.006 0.007 0.010 0.687 0.004 0.989 Drying time (sec) 20 313 30 10 25-Flash point 0012 287. 99 281.9 273 > fnrr Μ Μ j \\\-Ozone destruction factor 0 0 0 0 0.1-(Please first Read the notes on the reverse side and fill in this page), binding and binding_ This paper size applies to China National Standard (CNS) A4 (210X 297 mm) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs -124-1 1: Evaluation Standard 〇 = No residue in visual inspection and microscope △ Residue in microscopic observation X = Residue in visual inspection and microscopic observation 柁: Cleveland open measurement 528799 A7 B7 V. Description of the invention (I22) Table 26 Central Standards of the Ministry of Economic Affairs Bureau employee consumer cooperative printing group Evaluation item example 116 Isopropyl acetate hexamethyldisilazane perfluorocarbon Comparative Example 28 24 25 26 27 Isopropyl acetate hexamethyldisilazane perfluorocarbon 1,1,1-trichloroethane Appearance without cleaning * 1 〇〇Δ X 〇- Residual oil content (mg / g) 0.004 0.002 0.010 0.687 0. 004 0.989 Drying time (sec) 14 207 30 10 25-Flash point 00 * 2 301 289 273 Μ dfnrr. Μ-Ozone Destruction Coefficient 0 0 0 0 0.1-(Please read the precautions on the back before filling this page). _ The size of the paper is applicable to China National Standard (CNS) A4 (210X297 mm) 125-528799 A7 B7 V. Description of the invention (! 23) Table 27 Example of liquid composition evaluation item 117 Comparative example 23 24 25 26 27 Di-J alcohol hexamethyldisilazane perfluorocarbon Third butanol hexamethyldisilazane Alkane perfluorocarbon 1,1,1-trichloroethane Unwashed appearance 11 〇〇Δ X 〇- Residual oil content (mg / g) 0.006 0.007 0.010 0.687 0.004 0.989 Drying time (sec) 22 313 30 10 25-Flash point (K) 12 291.9 281.9 273 / fjTp m None-ozone destruction factor 0 0 0 0 0.1-(Please read first Note on the back, please fill in this page again.) The size of the paper used for this edition applies to Chinese National Standard (CNS) A4 (210X297 mm). Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economy. No residue △ Two residues during microscopic observation X = residues both visually and microscopically * 2: Cleveland open measurement 528799 A7 B7 V. Description of the invention (124) Table 28 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Liquid composition evaluation item example 118 isopropyl acetate hexamethyldisilafane perfluorocarbon comparative example 28 24 25 26 27 isopropyl acetate hexamethyldisilafane perfluorocarbon 1,1,1-tri Ethyl chloride unwashed appearance * 1 〇〇Δ X 〇- Residual oil content (mg / g) 0.004 0.002 0.010 0.687 0.004 0.989 Drying time (sec) 21 207 30 10 25-Flash point 00 * 2 292.7 289 273 te None-Ozone Destruction Coefficient 0 0 0 0 0.1--Pack-(Please read the precautions on the back before filling this page) The size of the paper is applicable to China National Standard (CNS) A4 (210X297 mm) 127 -528799 A7 B7 V. Description (125) Table 29 Liquid composition evaluation item example 119th_butanol hexamethyldisilazane perfluoromona Comparative example 29 30 31 32 33 Is hexamethyldisilazane third butanol perfluoro / Weigh the appearance of 1,1,1-trichloroethane without washing 11 〇Δ Δ X 〇—dryness 12 〇X 〇〇- residual oil content (mg / cm2) 0.10 1.38 0.05 3.02 0.41 3.41 flash point 0013 None 273 281.9 Μ Μ-Ozone Destruction Coefficient 0 0 0 0 0.1 — (Please read the precautions on the back before filling out this page) The size of the binding and binding papers is in accordance with China National Standard (CNS) A4 (210 X 297 mm) ) • Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 128 — 1 1: Evaluation criteria 〇 = No residue in visual inspection and microscope △ = Residue in microscopic observation X = Residue in visual and microscope observation * 2: Evaluation criterion 〇 = After pulling up the test piece from the steam cleaning tank, the time required to completely dry is less than 1 minute. x = After the test piece is pulled up from the steam cleaning tank, it takes more than 2 minutes to dry completely. * 3: Cleveland open measurement 528799 A7 B7 V. Description of the invention (126) Table 30 Liquid composition evaluation item example 120 Isopropyl acetate hexamethyldisilazane perfluoromorpholine comparative example 29 30 31 32 33 Hexafluorenyl disiloxane isopropyl acetate perfluoro? / 1,1,1-trichloroethane Unwashed appearance after washing 11 〇X 〇X 〇- Dryness 12 〇X 〇〇 -Residual oil content (mg / cm2) 0.05 1.38 0.03 3.02 0.41 3.41 Flash point (K) 13 Μ >,, 273 289 > frrf. View M-ozone destruction coefficient 0 0 0 0 0.1-(Please read the back first Please pay attention to this page, please fill in this page)-Packing _, 11 This paper size applies Chinese National Standard (CNS) A4 specification (210X 297 mm) Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs -129-1 1: Evaluation criteria. = No residue in visual inspection and microscope △ Residue in microscope observation X = Residue in visual inspection and microscope observation * 2: Evaluation criteria 0 = After drawing the test piece from the steam cleaning tank, it takes less than 1 minute to completely dry . X = After the test piece is pulled up from the steam cleaning tank, it takes more than 2 minutes to dry completely. * 3: Cleveland open measurement 528799 A7 B7 V. Description of the invention (127) Table 32 Printing example of the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Example 121 Comparative Example 35 Comparative Example 36 (Before cleaning) Liquid composition 6 Methyldisoxaxane trichloroethane isopropanol tert-butanol Characteristics of the object to be cleaned Appearance Contact angle Appearance Contact angle Appearance Contact angle Contact angle Glass lens 08. 〇 9. X 9. 11. PC 〇 85. Crack 83 ° C Crack 85. 85. Aluminum 〇 65. 〇68〇C 〇69〇C 75. * 〇: Good cleaning performance X: There are stains after drying (please read the precautions on the back before filling this page) Packing _ The size of the paper is applicable to China National Standard (CNS) A4 (210 X 297 mm) 528799 A7 B7 V. Explanation of the invention (128) Table 36 Printing example of the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economics Example 122 Comparative Example 35 Comparative Example 36 (Before cleaning) Liquid composition hexamethyldisiloxane Propanol isopropyl acetate characteristics of the object to be cleaned appearance contact angle appearance contact angle appearance contact angle contact angle glass lens 07. 〇 9. X 9. 11. PC 〇 79. Crack 83 ° C Crack 85. 85. Aluminum 〇64. 〇68〇C 〇69〇C 75. * 〇 = Good cleaning performance X = Stains after drying (Please read the precautions on the back before filling this page) (CNS) (210X297 ^) _ i3i _

Claims (1)

528799 t. The scope of application for patents is one-to-one. 1. A cleaning method uses solubility parameters combined with a cleaning agent. The cleaning agent is at least selected from polar cleaning hydrocarbons, fluorocarbons, and ethers with a concentration of 0.1 to 30. , The aforementioned cleaning object step. 8 4 1 1 1 3 3 No. 7 Patent Application Text Application Patent Range Amendment April, 1991 Amendment method, which is characterized by 9 ~ 14 or the process of washing objects with a dielectric constant of 4 ~ 4 5 The above-mentioned polar cleaning agent having a solubility parameter of 9 to 14 or a dielectric constant of 4 and at least one cleaning agent selected from the group consisting of low-molecular-weight siloxanes, aldehydes, and aldehydes, and the content of which is in the range of% At least one of the rinsing step and drying step of the mixed cleaning product (please read the precautions on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 2. For the cleaning method of the first scope of the patent application, The mixed cleaning agent is non-combustible or non-combustible. 3. The cleaning method according to item 1 of the scope of patent application, wherein the drying step is a step of steam-drying with the above-mentioned mixed cleaning agent. 4. The cleaning method according to item 1 of the patent application range, wherein the hydrocarbon is at least one selected from aliphatic hydrocarbons and alicyclic hydrocarbons. 5. The cleaning method according to item 1 of the scope of the patent application, wherein the fluorocarbon is a cleaning agent containing hydrofluoroether represented by the formula Ct 〇C Η 2ν + ι (where t is an arbitrary number). Paper size Applicable to China National Standard (CNS) A4 specification (210X297 mm) 528799 A8 B8 C8 D8 6. Application for patent scope 0. A kind of cleaning method, which is characterized by: (Please read the precautions on the back before filling this page ) After the step of cleaning the object to be cleaned with a mixed cleaning agent having a solubility parameter of 9 to 14 or a dielectric constant of 4 to 4 5, hydrofluoride is represented by the formula (where t, u, and v are arbitrary integers) Ether is a cleaning agent with an effective component, and at least one of a rinsing step and a drying step is performed on the object to be cleaned; 7. A cleaning method characterized by using a polar cleaning agent containing a low-molecular-weight siloxane compound and a fluorocarbon with a solubility parameter of 9 to 14 or a dielectric constant of 4 to 4 5 and containing The aforementioned polar cleaning agent in the range of 1 to 30% by weight is a series of steps including a washing step, a rinsing step, and a drying step with a liquid. 8. The cleaning method according to item 7 of the patent application scope, wherein the drying step is performed by hot air drying, natural drying, vacuum drying or steam drying. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 9. A method of drip-drying, characterized by using a mixture of trifluoroethanol and at least one member selected from the group consisting of hydrofluorocarbons and hydrofluoroethers, to perform subject-drip I-drying. 10. The drip-drying method according to item 9 of the scope of patent application, wherein the liquid is trifluoroethanol. 1 1. The drip-drying method according to item 9 of the scope of patent application, wherein the liquid is a mixed solvent of trifluoroethanol and hydrofluoroether. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -2-528799 ABCD Soluble, the liquid is only hydrofluoride 1 as the three 1 as the low 1 and the cleaning method is as follows (patent application scope 2. —Species The drip-drying method is characterized in that it has a phase with water and has no azeotropy with water, and the heat of evaporation is 100 kcal / g or less, or the mixed solvent of the aforementioned liquid and hydrofluoroether is dried and dried The ether is steam-dried. 3 · If the drip-drying method of item 12 in the scope of the patent application, the azeotropic composition of fluoroethanol and hydrofluoroether is steam-dried. Dry drying method, the molecular siloxane compound is steam-dried. 5. According to the method of claim 1, 7 or 14 of the scope of patent application, wherein the low-molecular-weight siloxane compound is at least one kind selected from ... bni-1— ..... IIII ϋ (Please read the notes on the back and fill in this page first), 1T i -〇ι • Si-O--R Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs ... .. (i) (where R is the same or different substitution or not The monovalent organic group '1 represents an integer of 0 to 5) and a linear polyorganosiloxane and its derivative represented by the following formula (ii) -Si-Οι ... (...) (ϋ) ( In the formula, R is the same or different substituted or unsubstituted monovalent organic group, and m is an integer of 3 to 7) The low molecular weight of the cyclic polysiloxane and its derivative shown in the paper is in accordance with the Chinese National Standard (CNS) A4 specifications (210X297 mm) ~ 3 528799 A8 B8 C8 D8 _____ 々, those who apply for a patent range of polyorganosiloxanes. 1 6 · If the scope of application for the scope of the patent application item 1 or item 7, cleaning method 'which The fluorocarbons are at least one selected from the group consisting of perfluorocarbons, hydrofluorocarbons, hydrochlorofluorocarbons, fluoroiodocarbons and fluoroalcohols. 17. If the scope of patent application is the first, the sixth or the The cleaning method according to item 7, wherein the polar cleaning agent contains at least one selected from the group consisting of alcohols, glycols, phenols, ketones, fatty acids and anhydrides, esters, amines, ammonium amines, and fourth-grade ammonium. Salt, eye class, morpholine class, sub-class' sultone, phosphoric acid and derivatives thereof, N —methyl — 2 — A component of pyrrolidone. 1.. A cleaning agent, which is characterized by containing low molecular weight siloxane compounds, fluorocarbons and at least two selected from solubility parameters 9 to 14 or dielectric constants 4 to 4 5 A cleaning agent composed of a substance in a polar cleaning agent and containing the foregoing polar cleaning agent in the range of 0.1 to 30% by weight, is washed with a liquid to a drying step. 1 9. A cleaning agent, characterized in that it contains low Composition of molecular siloxanes, printed by employees of the Intellectual Property Bureau of the Ministry of Economic Affairs, consumer cooperatives, fluorocarbons and at least one selected from polar cleaning agents with a solubility parameter of 9 to 14 or a dielectric constant of 4 to 4 5 And a cleaning agent containing the aforementioned polar cleaning agent in the range of 0.1 to 30% by weight, washing with a liquid to a drying step. 20. For example, the cleaning agent of item 18 or item 19 of the scope of patent application ′ is a cleaner containing low molecular weight siloxane compounds, fluorocarbons, and the above-mentioned polar cleaning agents. 21. If any one of the 18th or 19th in the scope of the patent application is applied, the paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 cm)-4-528799 A8 B8 C8 D8 The above is the least one of the azeotropic range and the fluoroalcohol range has at least 18 low-molecular or upper-class items or a total of 18 items selected from the class, hydrogen 18 items, a cleaning agent with a patent scope, It contains 2 and 2 of the above-mentioned polar cleaning agent. If a patent is applied, the cleaning agent containing the above-mentioned fluorocarbon-based polar cleaning agent is 2 3. If a patent is applied, wherein the above-mentioned fluorocarbons are hydrochlorofluorocarbons, The fluoroiodocarbons 2 4. If a patent is applied, the low-molecular-weight siloxane is described as a low-molecular-weight siloxane which is non-flammable or non-flammable. Or the cleaning agent of item 19, the silicone compound and the above boiling composition. Or the cleaning agent of item 19: fluorocarbons, hydrofluorocarbons, fluoroethers. Or the cleaning agent for item 19 From the following formula (i) (Please read the precautions on the back before filling this page) R-S Bu 0 -Si-0- -Si-R I Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (I) (where R is the same or different substituted or unsubstituted monovalent organic group, and 1 is an integer of 0 to 5), and the linear polyorganosiloxane and its derivative shown below, and Low molecular weights of τκ cyclic polycaproxane and its derivatives in formula (ii), ⑼ (where R is the same or different substituted or unsubstituted monovalent organic group, and m is an integer of 3 to 7) ^ Paper scale逋 Use Chinese national standard (0 milk) person 4 specifications (210 fathers 297 public holidays) -5-528799 A8 B8 C8 D8 6. Scope of patent application _ — Polyorganosiloxanes. (Please read the precautions on the back before filling out this page) 2 5 · If you apply for a cleaning agent under item 18 or item 19 of the patent scope, where the above polar cleaning agent contains at least one selected from alcohols, Alcohols, phenols, ketones, fatty acids and anhydrides, esters, amines, ammoniums, quaternary ammonium salts, eyes, morpholine, asus, sultone, phosphoric acid and Those derivatives such as' N -methyl-2-batch of fluorenone components 〇 2 6 · If the patent application scope of the cleaning agent No. 18 or No. 19, where the above-mentioned fluorocarbons are 1 The above-mentioned low-molecular-weight siloxane compound is blended in a range of 10 to 100 parts by weight. 27. If the cleaning agent under item 18 or item 19 of the patent application scope, wherein the fluorocarbon is at least one selected from the group consisting of perfluorohexane, perfluoroheptane and perfluoromorpholine, the low The molecular siloxane compound is hexamethyldisilaxane, and the polar cleaning agent is at least one polar cleaning agent selected from the group consisting of tertiary butanol and isopropyl acetate. Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 28. For example, the cleaning agent for scope 27 of the patent application, where the cleaning agent contains the above-mentioned perfluorocarbon, the above-mentioned hexamethyldisilazane, and the above-mentioned polar cleaning The azeotropic composition or pseudo-azeotropic composition formed by the agent is used as the effective ingredient. 29. The cleaning agent according to item 27 of the scope of the patent application, wherein the cleaning agent is an azeotropic composition or a pseudo-azeotropic composition containing the above-mentioned hexamethyldisilazane and the above-mentioned polar cleaning agent. Ingredients. 30. The cleaning agent according to item 27 of the scope of the patent application, wherein the cleaning agent contains 60 to 96% by weight of at least one selected from the above-mentioned perfluorohexane. The paper size is applicable to the Chinese National Standard (CNS) A4 specifications ( 210X297 males) " one 6 one 528799 A8 B8 C8 D8 VI. Patent application scope and perfluoromorpholine, 2 ~ 20% by weight of the above hexamethyldisilazane, 2 ~ 20% by weight of the above polar cleaning The composition of the agent is used as the active ingredient. (Please read the precautions on the back before filling in this page.) 3 1. If the cleaning agent in the scope of patent application No. 27, perfluoromorpholine is a perfluoroalkyl group Morpholine. 32. The cleaning agent according to item 27 of the scope of patent application, wherein the above-mentioned perfluoroalkylmorpholine is perfluoro-N-methylmorpholine. 3 3. The cleaning agent according to item 27 of the scope of patent application, which contains 50 to 90% by weight of perfluoroheptane, 5 to 25% by weight of hexamethyldisilazane, and 5 to 25 of polar cleaning The composition formed by the agent is used as an effective ingredient. 34. The cleaning agent according to item 27 of the scope of application for a patent, wherein the cleaning agent is composed of 4 4-50% by weight of hexamethyldisilazane and 50-50% by weight of third butanol. As effective ingredients. 35. The cleaning agent according to item 27 of the scope of patent application, wherein the cleaning agent is composed of 40 to 46% by weight of hexamethyldisilazane and 5 4 to 60% by weight of isopropyl acetate. As effective ingredients. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 36. For example, the cleaning agent in the scope of patent application No. 18 or No. 19, where the cleaning agent contains the above-mentioned fluorocarbons, and the solubility parameter is 9 ~ 1 4 Or an azeotropic composition or a pseudo-azeotropic composition formed by a polar cleaning agent having a dielectric constant of 4 to 4 5 as an active ingredient. 37. The cleaning agent according to item 18 or item 19 of the patent application scope, wherein the cleaning agent is an azeotropic composition or a pseudo-azeotropic composition containing the above-mentioned fluorocarbons and the above-mentioned low-molecular-weight siloxane compound. As an active ingredient. 38. If you apply for the cleaning agent of item 37 in the scope of patent application, the above ^ paper size is applicable to the Chinese National Standard (CNS) 8.4 specification (21 × X: 297 mm) -7 528799 A8 B8 C8 D8 VI. Application Scope of patent (please read the notes on the back before filling in this page) Fluorocarbons are at least one kind selected from perfluorocarbons, hydrofluorocarbons, hydrochlorofluorocarbons, fluoroiodocarbons and fluoroalcohols, hydrofluorocarbons Ether-based fluorocarbons, the above-mentioned low-molecular-weight silicone compounds are at least one low-molecular-weight silicone compound selected from the group consisting of hexamethyldisiloxane, octamethyltrisiloxane, and octamethylcyclotetrasiloxane . 3 9. A cleaning agent, characterized in that at least one perfluorocarbon selected from the group consisting of perfluorohexane 'perfluoroheptane and perfluoromorpholine, and hexamethyldisilazane' and third butane An azeotropic composition or pseudo-azeotropic composition formed by an alcohol or isopropyl acetate is washed with a liquid-like liquid to a drying step. 4 0 · ~ cleaning agents, characterized by azeotropic composition or pseudo-azeotropic composition formed from hexamethyldisilazane, and tertiary butanol or isopropyl acetate, and a kind of liquid Wash to dry step. 4 1 · A cleaning agent, which is characterized by an azeotropic composition or a pseudo-azeotropic composition formed by fluoroether and a polar cleaning agent having a solubility parameter of 9 ~ 1 4 or a dielectric constant of 4 ~ 4 5 A liquid-like solution is washed to a drying step. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 4 2. A cleaning device, which is characterized by a cleaning device using a cleaning agent containing a low-molecular-weight silicone compound, which can be based on S i- Infrared absorption of the 0 bond is a means for measuring the vapor concentration of a low-molecular-weight siloxane compound produced by the cleaning agent. 4 3. The cleaning device according to item 42 of the scope of patent application, which further includes a means for adjusting the temperature of the cleaning agent. 44. The cleaning device according to item 42 of the application, wherein the at least one low molecular weight siloxane compound is selected from the formula (i), and the low molecular weight siloxane compound is selected from the following formula (i) _ 8 One paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) 528799 A8 B8 C8 D8 Patent application scope ... (i) (where R is the same or different substituted or unsubstituted monovalent organic group , 1 is an integer of 0 to 5) linear polyorganosiloxane and its derivative, and the following formula (ii) -Si-〇 , (Ii) where R is the same or different substituted or unsubstituted integer of 7) cyclic polysiloxane and (please read the notes on the back before filling this page) Consumer Cooperatives of Intellectual Property Bureau of the Ministry of Economic Affairs The printing system 3 ~ polyorganic 4 has the mutual solubility in the following 4, the liquid 4 is disposed, the water 4 compound thereof and the monosiloxane group are monovalent organic groups, and the low molecular weight 5 of the derivative thereof. The drip-drying device is characterized in that it has the characteristics of using water and not having azeotropy with water, and the evaporation heat is 100 cal / g liquid for drip-drying. 6. The drip-drying device according to item 45 of the patent application, the system is trifluoroethanol. 7. If the scope of patent application No. 45 or 4 has the means of timing or intermittently. 8. A cleaning method, characterized in that the paper with a solubility parameter of 9 to 14 or a dielectric constant of 6 is dried and loaded in the liquid to remove the mixed ultra-low-molecular-weight siloxane alkylation paper with a number of 4 to 4 5 Standards are applicable to Chinese National Standard (CNS) A4 specifications (210X297 mm) -9 ~ 528799 A8 B8 C8 D8 VI. Azeotropic mixture of patent-pending cleaning agents, and use a liquid to clean to the drying step (please read first Note on the back page, please fill in this page again) 4 9 · If the cleaning method of the patent application No. 4 8 is used, it contains a low molecular weight siloxane compound and a solubility parameter of 9. ~ 1 4 or a dielectric constant of 4 ~ The mixture of 4 and 5 polar cleaning agents is subjected to a step of drip-drying. 50. The cleaning method according to item 49 of the scope of patent application, wherein the aforementioned mixture is an azeotropic composition or a pseudo-azeotropic composition. 5 1. A cleaning method, characterized in that a mixture of a low-molecular-weight siloxane compound and at least one member selected from the group consisting of hydrofluoroether and hydrofluorocarbon is used, and the liquid is washed to a drying step. 5 2. A cleaning method, which is characterized by using a low-molecular-weight siloxane compound and a flammable or non-flammable mixture of the above-mentioned fluorocarbons, and washing with a liquid to a drying step. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5 3. A cleaning method characterized by the use of a polar cleaning agent with a solubility parameter of 9 to 14 or a dielectric constant of 4 to 4 5 and at least one selected from hydrofluoroether And a mixture of hydrofluorocarbons and containing the foregoing polar cleaning agent in the range of 0.1 to 30% by weight, and washing with a liquid to a drying step. 54. The cleaning method according to item 53 of the scope of patent application, wherein the aforementioned mixture is an azeotropic or quasi-azeotropic mixture, and the aforementioned azeotropic or quasi-azeotropic mixture is used to wash to a drying step with a liquid. 55. The cleaning method according to item 53 of the scope of patent application, wherein the aforementioned mixture is used for the step of drip-drying. 10-This paper size is in accordance with Chinese National Standard (CNS) A4 specification (210X297 mm) 528799 A8 B8 C8 D8 ^, application for patent scope 56. If the cleaning method of the patent scope No. 53 is used, azeotropic or The pseudo-azeotropic mixture is subjected to a drip-drying step. 5 7 · If the method of cleaning according to item 53 of the scope of patent application, the aforementioned mixture is non-combustible or non-combustible. 58. The cleaning method according to item 48, item 51, item 52 or item 53 of the scope of the applied patent, wherein the drying step is performed by hot air drying, natural drying ′ vacuum drying or steam drying. 59. If the cleaning method of the 48th, 51st, or 52th scope of the application for a patent is applied, wherein the low molecular sand oxygen compound is at least one selected from the following formula (i) L ^ w .-- (Please read the back first (Notes for filling in this page) .⑴ Ordered by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (where R is the same or different substituted or unsubstituted monovalent organic group, and 1 is an integer ranging from 0 to 5) Siloxane and its derivatives, and the following formula (ii) -Si-Οι_ (ii) (where R is the same or different substituted or unsubstituted monovalent organic group, m is an integer of 3 to 7) Low-molecular-weight polyorganosiloxanes with cyclic polysand oxygen compounds and their derivatives. This paper size applies to Chinese National Standard (CNS) A4 specifications (210X: 297 mm) -11-528799 A8 B8 C8 D8 VI. Application for patent scope 60. If the cleaning method for the scope of patent application No. 52, the fluorocarbon type It is at least one selected from the group consisting of perfluorocarbons, hydrofluorocarbons, hydrochlorofluorocarbons, fluoroiodocarbons and fluoroalcohols. 6 1 · The cleaning method according to item 48 or item 53 of the scope of patent application, wherein the above-mentioned polar cleaning agent contains at least one selected from the group consisting of alcohols, glycols, phenols, ketones, fatty acids and anhydrides, Esters, amines, ammoniums, quaternary ammonium salts, nitriles, morpholines, sulfoniums, sultones, phosphoric acids and their derivatives, N-methyl-2- Ingredients of pyrrolidone. (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm)-12-