TW512391B - Real-time monitoring device for the position of extraction electrode of NH-20SR - Google Patents

Abstract

A real-time monitoring device for the position of extraction electrode of NH-20SR ion implanter is disclosed, which at least comprises: a motor having an output axis; an extraction electrode fixed to the end of the screw rod; a first transmission device connected to the output axis of motor to move the extraction electrode along the axis of the screw rod; a device to convert the movement of extraction electrode into electronic signal, which comprises an encoder having an input rotational axle; a second transmission device connected to the output axis of motor and the input axis of encoder, the encoder encodes according to the rotational angle of the input axis.

Description

512391 V. Description of the invention (1) Field of the invention: The present invention discloses an ion implantation machine, in particular, an NH-2 0SR ion implantation machine uses an encoder and part of the circuit design to reach the extraction electrode (e X tracti ο ne 1 ectr 〇) position real-time monitoring device. Background of the invention:

Ion implantation implants conductive impurities into wafers under controlled conditions. Generally speaking, the ion hafnium is generated by the following steps. First, the ion source gas is passed into the ion source (s0 u r * c h e a d), for example, the arc chamber uses a heated filament to generate electrons, and then generates a magnetic field with a magnetic field current. The magnetic field provides electrons in a convoluted path to increase the chance of collision with the gas. Until the arc reaction, a large amount of plasma is generated in the chamber, and then the ion plutonium is condensed into a thin slit by an extraction electrode and then injected into an ion analysis magnetic field (analyzer magnet). The analysis of the magnetic field will produce different deflection angles due to different atomic weights to screen out the ions to be implanted. Finally, the plate is calibrated in the horizontal and vertical positions, and the faraday cup is used to accurately measure the implanted ions. dose. The position of the extraction electrode needs to be precisely controlled so as to guide the ions out of the narrow slit and inject them into the ion analysis magnetic field. Depending on the ion mass of different masses, the position of the extraction electrode will vary. Taking the NH-20SR ion implanter 512391 V. Description of the invention (2) as an example, the movement mechanism of the extraction electrode can be explained by the schematic diagram shown in Figure 1. Contains motor 10, output shaft 1, 5, first screw 17, 7, driving gear 20, chain 2 5, first driven gear 3 0, second screw 3 5, extraction electrode 4 0, second driven gear 5 0, shaft 5 5 and left and right limit switches 6 5 A and 65B ° wherein the chain 2 5 meshes with the first driven gear 3 0 a and the driving gear 20. In order to convert the circular motion into a linear motion, the first driven gear 30a is provided with an internal thread in the center, and the teeth are engaged with the second screw 35. The first driven gear 3 0 a utilizes a shaft 3 0 c connected with a bearing (or ball bearing) and a fixed shaft sleeve 3 0 b to perform a circular motion relative to the fixed shaft sleeve 3 0 b, and the second screw 3 5 can therefore move in a straight line. The end of the second screw 35 is fixedly connected to the extraction electrode 40. In addition, the output shaft 15 is provided at the end of the motor 10 'and the output shaft 15 is connected to the first screw 17 and the first screw 17 is meshed with the second driven gear 50. The center of the second driven gear 50 is coupled to the shaft 55. The turntable 60 with the protruding block 6 1 is fixed to the rotation shaft 5 5, and the left and right limit switches 6 5 A and 6 5 B are fixed to the left and right sides of the turntable 60.

Therefore, when the motor rotates, the driving gear 20 rotates with the rotation of the output shaft 15 and drives the chain 25 to rotate. Therefore, the first driven gear 30 also rotates with the second screw 3 5 An internal thread of a driven gear 30 is moved in the axial direction under the engagement of the internal thread, so that the extraction electrode 40 can move left and right. On the other hand, the first screw 17 on the end of the output shaft 15 will drive the second driven gear 50 in a meshing relationship. Then, the turntable 60 with the protruding block 61 is rotated. At any time, as long as the protruding block 6 1 touches the left limit switch 6 5 A or the right limit switch 6 5 B

Page 5 512391 V. Description of the invention (3) The motor will stop. With the above operation, the operator only knows whether the current extraction electrode 40 has reached the end (when the protruding block 6 1 touches the left limit switch 6 5 A or the right limit switch 6 5 B. The operator cannot know the current extraction electrode 40 instant position. In view of this, the present invention will propose a device to improve the above problems. Purpose and summary of the invention: m The purpose of the present invention is to provide an instant monitoring device for the position of the extraction electrode, which can be conveniently displayed by the operator by a light signal The present invention discloses an extraction electrode position real-time monitoring device applied to an NH-20SR ion implanter. The extraction electrode position real-time monitoring device includes at least: an extraction electrode driving device including a motor, and the motor is provided with an output shaft. The output shaft is combined with a driving gear center, and the end of the output shaft is provided with a first screw. The transmission device for extracting electrode movement includes a chain, a second screw, and a first driven gear. There is an internal thread to engage the second screw, the end of the second screw is fixed to the extraction electrode, and the chain is engaged to The first driven gear and the driving gear are used to control the movement of the second screw;

Page 6 512391 V. Description of the invention (4) The extraction electrode moves into an electronic signal device, which includes an encoder, a second driven gear, a third driven gear, and a fourth driven gear, wherein the second driven gear And the center of the third driven gear is fixed to a first rotating shaft, and the second driven gear is engaged with the first screw, the third driven gear is engaged with the fourth driven gear, and the fourth The center of the driven gear is fixed to the input shaft of the encoder, and the encoder is coded according to the rotation angle of the input shaft; and two limit switches limit the extraction electrode by touching the protruding piece of the turntable at the end of the first shaft. According to the relationship between the limit switch and the protruding block on the turntable, the encoder sets the corresponding position of the extraction electrode after the input shaft rotation angle is encoded, and then uses the LED light on the panel to display the 9-position of the extraction electrode. Detailed description of the invention:

In view of the background of the invention, the position change of the extraction electrode (e X t r a c t e 1 e c ΐ r 〇 d e) of the conventional N Η 2 0 S R ion implantation machine is based on experience and cooperation with limit switches to prevent excessive movement. The instant monitoring device for the extraction electrode position of the NH-20 SR ion implanter according to the present invention, please refer to FIG. 3, which mainly includes: a motor 100, the motor 100 is provided with an output shaft 101, and an extraction electrode 1 1 0, by a screw 1 1 1 end

Page 7 512391 V. Description of the invention (5) _ fixed extraction electrode 11 〇, ~ the first drive liver output shaft 1 0 1 is connected to the screw 丨 丨 丨 the second transmission set 1 2 0 will the motor i 〇〇 The input movement is converted into an electronic signal device 14o, a 14 device 130, and an extraction electrode 11015b. The two limit switches 150a and the stroke electrode 1 10 move to t 1 14 0. The encoder 丄 4 〇 is provided with the _input runner ^ number, including a code including at least one sprocket set, the sprocket set, including the 41st transmission device 1 2 0 wheel 122, a _ driven gear 123, active | Chain bismuth I21, a driving tooth output shaft 101, the center of the first driven gear 123 N wheel I22 is combined with the screw 111, and it is connected to the screw 111 by a lin ((inside, b, = 124, osmotic 疋 shaft sleeve 123b) The shaft 123c is relative to the fixed shaft sleeve u3b. ^ And 120 are attracted to the first driven gear 123 and the driving gear i22. Therefore, the circular motion of the driven gear 1 23 a is converted into a linear motion. Axial movement. The second transmission device 130, which is made of snail screw, includes a scroll rod 13, a second driven gear 132, a second driven gear 133, and a fourth driven gear. The center of the driven gear 1 3 2 and the third driven gear 1 3 3 is fixed to the first rotating shaft 1 3 5. The scroll rod 1 3 1 is coupled to the end of the output shaft 1 〇 丨, the fourth driven gear 1 The center of 3 4 is fixed to the input shaft 1 4 丨 of the knitting device 1 4〇, and the third driven gear 1 3 2 is engaged with the scroll 1 3 丨, and the third driven gear 1 3 3 is meshed with the fourth Move the gear 1 3 4. The encoder 1 4 0 is coded according to the rotation angle of the input shaft 1 4 丨. 512391 V. Description of the invention (6) In addition, to avoid the extraction electrode 1 1 0 moving along the axial direction of the screw 11 1 is too large , Two limit switches (1 imitswitch) 1 5 0 a and 1 5 0 b are used to limit the movement of the extraction electrode 1 1 0. The first rotating shaft 1 3 5 shown in FIG. Turntable 1 5 0. Take N Η-2 0 SR ion implantation machine as an example, the protruding block on the turntable 1 50 can move in the range of 2 70 °. In other words, when the motor starts, the output shaft 1 0 1 Drive the first transmission device 1 2 0 to transfer the rotation to the extraction electrode 1 1 0 When the axis moves along the screw 11 1 axis, the second transmission device 1 3 0 stops the motor except for the control of the limit switches 1 5 0 a and 1 5 0 b In addition to running, the rotation angle is also output to the encoder 1 4 0. The encoder 1 4 0 is set according to the relationship between the limit switches 1 5 0 a and 1 5 0 b and the protruding block 1 5 2 on the dial 1 5 0. The corresponding position of the extraction electrode after the input rotation 'axis rotation angle is encoded. In order to facilitate the operation, the present invention encodes the encoder 1 4 The signal output of 0 is displayed by the LED signal group (not shown), and the corresponding position of the extraction electrode 1 1 0 can be more clearly extracted by the signal display of the control panel. Ψ The above is only a preferred embodiment of the present invention, It is not intended to limit the scope of patent application of the present invention; all other equivalent changes or modifications made without departing from the spirit disclosed by the present invention shall be included in the scope of patent application described below. For example, the above-mentioned first transmission device uses a sprocket set, and of course, it can also be replaced with a pulley set. In other words, the above-mentioned driving gear and the first driven gear can also be replaced with a driving pulley and a first driven pulley.

Page 512 391 Simple illustrations Simple illustrations The preferred embodiments of the present invention will be explained in more detail in the following explanatory text with the following figures: Figure 1 shows the traditional NH-20SR ion implantation machine The relationship between the extraction electrode and the drive mechanism such as a motor is not intended. Fig. 2 is a schematic diagram showing the relationship between the driving mechanism such as the extraction electrode, the motor and the encoder designed according to the device of the present invention. The drawing numbers are shown in the table; Motor 10, 100 Output shaft 15> 101 First screw 17 Driving gear 20 ^ 122 Chain 25 > 121 First driven gear 3 0a, 123a Second screw 35 Extraction electrode 40, 110 Second slave Moving gear 50 Rotating shaft 55 Turntable 60 Protruding block 6 152 Left limit switch 6 5a, 1 5 0 a Right limit switch 65b, 150b Screw 111 First-transmission 120 Internal thread of the first driven gear 12 4 Second transmission 130 / 1¾ lever 131 second driven gear 133 fourth driven gear 134 stone horse 140 m into shaft 141 shaft sleeve 30b, 123b shaft 30c, 123c

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Claims (1)

512391 VI. Application for patent scope 1. An extraction electrode (extraction e 1 ectr ode) position real-time monitoring device applied to an ion implanter, at least comprising: a motor, the motor is provided with an output shaft; The end of the screw is fixed to the extraction electrode; a first transmission device, the output shaft of the motor is connected to the extraction electrode driving device for moving the extraction electrode along the axial direction of the screw; the extraction electrode moves into an electronic signal device, Containing an encoder, the encoder is provided with an input shaft; and a second transmission device connected to the output shaft of the motor and the input shaft of the encoder, the encoder is coded according to the rotation angle of the input shaft . 2. The extraction electrode position real-time monitoring device according to item 1 of the patent application scope, wherein the first transmission device includes at least one sprocket set. 3. If the extraction electrode position real-time monitoring device of item 2 of the patent application scope, wherein the above-mentioned sprocket set includes at least a key bar, a driving gear, a conversion unit that rotates linearly in a circle, and the driving gear center combines the output The shaft, the circular-to-linear conversion unit uses the internal thread of the center of the first driven gear to mesh with the screw, and the chain meshes with the first driven gear and the driving gear to control the movement of the screw. 4. The real-time monitoring device of the extraction electrode position as described in the first patent application range, wherein the first transmission device includes at least one pulley set. Page 11 512391 VI. Application for patent scope 5. If the extraction electrode position real-time monitoring device of item 4 of the patent application scope, the above-mentioned pulley set includes a belt, a driving pulley, a first driven pulley, the driving pulley Combined with the output shaft at the center, the first driven pulley is provided with an internal thread at the center to engage the screw, and the chain is engaged with the first driven pulley and the driving pulley to control the movement of the screw, the first driven The belt wheel train uses a shaft connected by Perlin and the fixed shaft sleeve to make a circular and linear motion relative to the fixed shaft sleeve. 6. The device for real-time monitoring of the extraction electrode position according to item 1 of the patent application, wherein the second transmission device includes a vortex rod, a second driven gear, a third driven gear, and a fourth driven device. A gear, wherein the centers of the second driven gear and the third driven gear are fixed to a first rotating shaft, the scroll is coupled to an end of the output shaft, and the center of the fourth driven gear is fixed to the The input shaft of the encoder is engaged with the scroll lever by the second driven gear, the third driven gear is meshed with the fourth driven gear, and the encoder is encoded according to the rotation angle of the input shaft . Page 12 512391 6. Application for patent scope 8. If the extraction electrode position real-time monitoring device for item 7 of the patent scope is applied, the above-mentioned limitation of the rotation angle of the first rotation shaft is the protruding block on the turntable at the end of the first rotation shaft, Touch the two limit switches to turn off the output of the motor. 9. The device for real-time monitoring of the position of the extraction electrode, such as the item 1 of the patent application scope, further comprises an LED light group for displaying the corresponding position of the extraction electrode as a light. The real-time monitoring of the position of the stroke electrode includes at least: A motor is provided. The motor is provided with an end of the output shaft and is provided with 1. The monitoring device extracts the output shaft of the electrode driving device, the output shaft is combined with a driving gear center with a first extraction rod to engage the pole, the second fixed shaft and the second extraction driven tooth screw; the transmission device for taking the electrode movement includes a The first driven gear of the chain, the first driven tooth is on the second screw, the chain σ tooth is engaged with the movement of the first screw, the first set of connected shafts are driven relative to the fixed shaft sleeve and the second screw end is driven An internal thread is provided in the center of the gear and a driven belt and a second screw wheel, which is fixedly connected to the extraction circuit. The driving gear is used to control the wheel train to use a circular motion with a circular motion; The gear, the third driven gear, and the third driven tooth sub-signal device include an encoder, a first wheel, and a fourth driven gear, wherein the center of the second wheel is fixed to a first rotating shaft, and Page 13 512391 6. The scope of the patent application uses the second driven gear to mesh with the first screw, the third driven gear meshes with the fourth driven gear, and the center of the fourth driven gear is fixed to the code. The input shaft of the encoder is encoded according to the rotation angle of the input shaft. 11. If the extraction electrode position real-time monitoring device of item 10 of the patent application scope, further includes an LED light group for displaying the corresponding position of the extraction electrode with a light number. Fan Li specially asked Shen Ru 2 to set up the item for the extraction of the electric power when installing a test monitor. Off the 1X angle of rotation of the opening angle. Turn the first rotation to close the extraction limit. The pole code is based on the axis converted by the protractor's moving code, and it is turned into the fan input and the moving setting. The setting up of the electric enclosure should be based on the restrictions of the control system and the electric power. Please apply for it. 5 3 T-4 Set up the electric grid to obtain the first item when you install the monitor 2 The 1st— | Hai = ° JUJ. Higen JJI In the above description, the rotation of the first rotation of the rotation axis of the rotation angle of the rotation angle of the rotation angle of the rotation angle of the rotation angle is ai). Turn on the disk. Out of the end lose the last axis Page 14