川8438 五、發明說明（,/ 【本發明之領域】 裝冒 匕系關於一種顯微式非破壞性超音波產生與檢測 、广，、指—種適用於可偵測微米級物體表面或内部缺陷 微式雷射超音波產生與檢測之裝置與方法。 【本發明之背景】 低成下前當：?技”，在提高產品品質與降 ,, ，、製秸中所需的檢測技術乃扮演不可 要角色：在檢測技術中，非破壞與非接觸的方式 顧：二用者所接文，例如在微電子工業中，掃瞄式聲學 -Μ m 1¾ ( S c a η n i η ρ δ r 〇 n c t; at· croscopy，SAM)已廣 訂 :應用=構裝的檢測。主要原因是超音波能夠穿透元 牛外。P的構裝，而達到非破壞的檢測目的。 生化產業即將成為明曰之星，其所需的檢測 技術將更為稷雜且多功能。由於其產品或材料的尺寸都在 微米等級，如㈣取掃瞒式聲學顯微鏡的優點，來達 接觸、非破壞的目的，同時又能滿足微米等級的檢測需 求，是本發明的動機。 經濟部智慧財產局員工消費合作社印製 發明人爰因於此，本於積極發明之精神，圣 以解決上述問題之「利用顯微式非破壞性超音❹測物體 缺陷的万法及裝置」，幾經研究實驗終至 人之發明。 /、裔心世 【本發明之概述】Chuan 8438 V. Description of the invention (// The field of the invention) The pretend dagger is about a kind of microscopic non-destructive ultrasonic generation and detection. It is suitable for detecting the surface or inside of micron-level objects. Device and method for generation and detection of defect micro-laser ultrasound. [Background of the present invention] Low-rise predecessor: "Technology", the detection technology required to improve product quality and reduce the production of straw is Play an indispensable role: in the detection technology, non-destructive and non-contact methods Gu: the text received by the second user, for example, in the microelectronics industry, scanning acoustics-Μ m 1¾ (S ca η ni η ρ δ r 〇nct; at · croscopy (SAM) has been widely ordered: Application = detection of the structure. The main reason is that ultrasound can penetrate the outer space of the cow. P's structure achieves the purpose of non-destructive detection. The biochemical industry is about to become Said Star, the required detection technology will be more complicated and versatile. Because the size of its products or materials are in the micron level, such as the advantages of grabbing and sweeping acoustic microscopes, for contact and non-destructive purposes , While meeting the micron level The need for detection is the motivation of the present invention. The inventor of the Intellectual Property Bureau employee consumer cooperative printed the inventor because of this. In the spirit of positive invention, the "use of microscopic non-destructive ultrasound" solves the above problems. "Methods and devices for measuring object defects", after several research and experiments, it has been invented by people. /, The world of mind [Overview of the invention]
本紙張尺度適用中國國家標準（CNS)A4規格(210 X 297公i 508438 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（>) 本發明之主要目的係在提供一種利用顯微式非破壞性 超音波檢測物體缺陷的方法，俾能以不破壞元件的方式， 檢測微米級物體表面或是内部的缺陷。 本發明之另一目的係在提供一種利用顯微式非破壞性 超音波檢測物體缺陷的裝置，俾能以不破壞元件的方式， 在微米級物體表面或是内部產生超音波並偵測缺陷的位 置0 為達成上述之目的，本發明一種利用顯微式非破壞性 超音波檢測物體缺陷的裝置及方法，用以觀察微米級區域 内之物體缺陷，其裝置包括：一超音波產生模組，包括·· 一脈衝光源，用以在該物體之表面或内部產生一超音波； 一超音波偵測模組，包括··一連續光源；一第一分光鏡， 係將該連續光源分為一參考光與一測試光；一光折變材 料，用以記錄琢參考光與經過該待測物體反射的測試光的 干涉訊息，並形成一相位光柵；一光偵測器，用以接收直 逕相位光柵之測試光與繞射相位光柵之參考光的干涉訊 號，並轉換為一電壓訊號；以及一微處理單元，接收由該 光偵測器所傳來之電壓訊號並計算出該物體缺陷之位置； 以及一顯微鏡模組，用以將該脈衝光源與該測試光聚焦於 該待測物體。 其方法之步驟包括： (A)經過一顯微鏡模組入射一脈衝光源於一待測物 體以產生一超音波； 5 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ^------.— ^----- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 508438 A7 五、發明說明（》） (B )提供一連續光源，並由一分光鏡將該連續光源 分為一參考光與一測試光，該測試光經過一顯 微鏡模組入射於該，並由該待測物體所反射； 以及 (C )記錄由該待測物體所反射之測試光，與該參考 光互相干涉所形成的一相位光柵於一光折變材 料中’並由一光偵測器接收直逕該相位光柵之 測試光與繞射該相位光柵之參考光的干涉訊號 後，轉為電壓訊號並送入一微處理單元； (D )當超音波受待測物體缺陷反射而在表面產生振 動時’測試光將有都卜勒頻移的引入，使光偵 測器送出一突波之電壓訊號。將脈衝雷射產生 超音波到光债測器送出突波電壓訊號的時間 差，乘以超音波的速度，即可檢測出該待測物 體缺陷的位置。 由於本發明構造新穎’能提供產業上利用，且確有增 進功效，故依法申請發明專利。 曰 【圖式簡單説明】 第1圖係本發明裝置之示意圖。 第2圖係本發明偵測物體缺陷之示意圖。 【圖號説明】 6 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） · I------^---- (請先閱讀背面之注意事項再填寫本頁)This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public i 508438 printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention) The main purpose of the present invention is to provide a utilization display The method of micro-non-destructive ultrasonic detection of object defects can not detect defects on the surface or inside of micro-level objects without damaging the components. Another object of the present invention is to provide a non-destructive method using micro-types. The device for ultrasonic detection of object defects can not generate damage to the surface of the micron-level object or detect the position of the defect in a manner that does not damage the component. To achieve the above purpose, the present invention uses a microscopic non-destructive method. Device and method for detecting defects in objects by means of ultrasonic waves, for observing defects in objects in the micrometer range. The device includes: an ultrasonic generating module, including a pulse light source for generating on or inside the object. An ultrasonic wave; an ultrasonic wave detection module, including a continuous light source; a first beam splitter, which divides the continuous light source into a reference light A test light; a photorefractive material for recording interference information between the reference light and the test light reflected by the object to be measured, and forming a phase grating; a light detector for receiving a diameter phase grating test The interference signal of the light and the reference light of the diffractive phase grating is converted into a voltage signal; and a micro-processing unit receives the voltage signal transmitted by the light detector and calculates the position of the object defect; and A microscope module is used to focus the pulsed light source and the test light on the object to be measured. The method steps include: (A) incident a pulsed light source on a object to be measured through a microscope module to generate an ultrasonic wave; 5 This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) ^ ------.-- ^ ----- (Please read the notes on the back before filling this page) Ministry of Economy Printed by the Intellectual Property Bureau employee consumer cooperative 508438 A7 V. Description of invention (") (B) Provide a continuous light source, and divide the continuous light source into a reference light and a test light by a beam splitter, the test light passes through a microscope Module Incident on it and reflected by the object under test; and (C) recording a phase grating formed by the test light reflected by the object under test and interfering with the reference light in a photorefractive material 'and by A photodetector receives the interference signal of the test light with a diameter of the phase grating and the reference light diffracting the phase grating, and converts it into a voltage signal and sends it to a micro processing unit; (D) When the ultrasonic wave is the object to be measured When the defect reflects and vibrates on the surface, the test light will have a Doppler frequency shift, which will cause the photodetector to send a surge voltage signal. The pulse laser will generate an ultrasonic wave to the optical debt detector to send a surge voltage. The time difference of the signal is multiplied by the speed of the ultrasonic wave to detect the position of the defect of the object to be tested. Since the novel structure of the present invention can provide industrial use and indeed enhances the efficacy, it applies for an invention patent according to law. [Brief description of the drawings] Figure 1 is a schematic diagram of the device of the present invention. FIG. 2 is a schematic diagram of detecting an object defect according to the present invention. [Illustration of drawing number] 6 This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) · I ------ ^ ---- (Please read the precautions on the back before filling this page )
H ϋ ϋ n I # 五、發明說明（々） 1 0 超晋波產生模1 1 脈衝雷射 12耦合透鏡 組 !3光纖 21 連續波雷射 2 4 個人電腦 2 7光纖 30 顯微鏡模組 3 3 目鏡 36 分光鏡 4 〇 待測物體 5〇 示波器 14準直透鏡 2 0超音波偵測模 22 25 28 3 1 34 37 41 光偵測器 分光鏡 準直透鏡 物鏡 攝影機 管鏡 缺陷 23 光折變材料 2 6 耦合透鏡 2 9 反射鏡 32 雙色分光鏡 3 5 螢幕 42 突波 經濟部智慧財產局員工消費合作社印製 【較佳具體實施例之詳細説明】 請參考第1圖所示，第1圖係為本發明裝置之示意圖， 本裝置主要可分為二大部分，超音波產生模組、超音立 偵測模組20以及顯微鏡模組30。超音波產生模組1〇以一 脈衝雷射1 1發射出脈衝光源，並經由搞合透鏡1 2的♦禺 合’光纖1 3的傳輸及準直透鏡1 4的準直後入射於待測物 體4 0以在其表面或内部產生超音波；而超音波偵測模組 2〇以連續波雷射2 1發射出連續光源，並經由耦合透鏡26 的耦合’光纖2 7的傳輸及準直透鏡2 8的準直後，經由一 分光鏡25將連續光源分為一測.試光與一參考光，測試光貝! 入射於待測物體40，參考光則經由一反射鏡29反射後， 本紙張尺度過用中國國家標準（CNS)A4規格（210 X 297公釐） ------1—丨 --------訂--------1 (請先閱讀背面之注意事項再填寫本頁) 508438 A7 部 智 慧 員 費 五、發明說明（（） 與經由待測物體40反射之測試光相干涉後，在光折變材料 2 3上產生相位光柵。此相位光栅會將緊接著而來的參考光 繞射，使其行進方向及波前形狀與經待測物體反射之測試 光一樣。而經待測物體反射之測試光則直接通過此相位光 栅，並與繞射之參考光互相重疊而再次產生干涉現象。由 光偵測器22接收干涉訊號並轉換為電訊號，傳入個人電腦 24做資料處理。當脈衝雷射丨丨所產生之超音波受待測物 體缺陷4 1反射而在表面產生振動時，測試光將有都卜勒頻 移的引入，使光偵測器22送出一突波42之電壓訊號。利 用超音波產生到光偵測器送出突波電壓訊號的時間差，與 超骨波波速，即可計算出缺陷位置；顯微鏡模組3〇係分別 以一分光鏡3 6與一雙色分光鏡3 2將測試光與脈衝光源導 入待測物體4 0，在測試光與脈衝光源入射於待測物體4 〇 珂經過一物鏡31聚焦，另外分光鏡3 6更將經由待測物體 所反射之測試光導向管鏡3 7與目鏡33，使得攝影機34得 以拍攝待測物體40的放大影像，並將其結果由螢幕35顯 示。其中该攝影機3 4無限制，較佳為電荷耦合元件 (CCD ) 請參考第2圖所示，第2圖係本發明偵測物體缺陷之示 意圖。脈衝光源經過物鏡3丨聚焦後入射於待測物體4〇， 待測物體40會因為脈衝光源的熱彈性作用、剝離作用及表 面束縛作用等而產生超音波訊號。而又連續波雷射產生之 連續光源之測試光經由物鏡3丨聚焦後，入射於待測物體 4 〇，經由待測物體4 〇反射後，測試光沿著原來的光路回 1 本紙張尺度賴+關家鮮（CNS)A4驗（2ϋ7公爱 訂 #H ϋ ϋ n I # V. Description of the invention (々) 1 0 Ultrasonic wave generation mode 1 1 Pulse laser 12 coupling lens group! 3 Optical fiber 21 Continuous wave laser 2 4 Personal computer 2 7 Optical fiber 30 Microscope module 3 3 Eyepiece 36 Beamsplitter 4 4 Object to be measured 5 Oscilloscope 14 Collimation lens 2 Ultrasonic detection mode 22 25 28 3 1 34 37 41 Light detector beamsplitter Collimation lens Objective lens Tube lens defect 23 Photorefractive material 2 6 Coupling lens 2 9 Reflector 32 Two-color beam splitter 3 5 Screen 42 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs [Detailed description of the preferred embodiment] Please refer to Figure 1, which is shown in Figure 1. Schematic diagram of the device of the present invention. The device can be mainly divided into two parts, an ultrasonic generation module, an ultrasonic detection module 20 and a microscope module 30. The ultrasonic generating module 10 emits a pulsed light source with a pulse laser 11 and transmits it through the coupling of the optical fiber 13 of the lens 12 and the collimation of the collimating lens 14 into the object to be measured. 40 to generate an ultrasonic wave on its surface or inside; and the ultrasonic detection module 20 emits a continuous light source with a continuous wave laser 21, and transmits through the coupling lens 26's coupling 'fiber 27' and the collimating lens After the collimation of 28, the continuous light source is divided into one measurement through a beam splitter 25. The test light and a reference light, the test light! Enter the object to be measured 40, the reference light is reflected by a reflector 29, the paper size Used Chinese National Standard (CNS) A4 specification (210 X 297 mm) ------ 1— 丨 -------- Order -------- 1 (Please read the Note: Please fill in this page again.) 508438 A7 wisdom fee 5. Description of the invention (() Interfering with the test light reflected by the object 40 to be measured, a phase grating is generated on the photorefractive material 2 3. This phase grating will The following reference light is diffracted so that its travel direction and wavefront shape are the same as the test light reflected by the object to be measured. The test light reflected by the object to be measured passes directly through this phase grating, and overlaps with the diffracted reference light to cause interference again. The interference signal is received by the light detector 22 and converted into an electrical signal, which is transmitted to the personal computer 24 for data processing. When the supersonic wave generated by the pulsed laser is reflected by the defect of the object to be measured, the test light will have a Doppler frequency shift, causing the light detector 22 to send out The voltage signal of a surge 42. The time difference between the generation of the ultrasonic wave and the surge voltage signal sent by the photodetector and the speed of the super bone wave can be used to calculate the defect position; the microscope module 30 uses a beam splitter 3 6 and a two-color beam splitter 3 2 The test light and the pulsed light source are introduced into the object to be measured 40, and the test light and the pulsed light source are incident on the object to be measured 4 0 Ke is focused by an objective lens 31, and the beam splitter 3 6 is further passed through the object to be measured. The test light reflected by the measurement object is guided to the tube lens 37 and the eyepiece 33, so that the camera 34 can take an enlarged image of the object 40 to be measured and display the result on the screen 35. The camera 3 4 is unlimited. It is a charge-coupled device (CCD). Please refer to FIG. 2. FIG. 2 is a schematic diagram of detecting an object defect according to the present invention. After the pulse light source is focused by the objective lens 3 丨 and incident on the object to be measured 40, the object 40 to be measured will be The pulsed light source's thermoelastic effect, peeling effect, and surface restraint effect produce ultrasonic signals. The continuous light source's test light generated by continuous wave laser is focused by the objective lens 3 丨 and incident on the object to be measured 40. After the object 4 is reflected, the test light returns to the original light path along the original optical path. The paper size is Lai + Guan Jiaxian (CNS) A4 inspection (2ϋ7 公 爱 定 #
I 508438 A7 五、發明說明（b ) 到超音波偵測模組2 0。當由脈衝光源引起的超音波遇到待 測物體缺陷4 1而反射時，將使表面產生高頻的振動，此時 測試光將會載有與超音波振動有關的都卜勒頻移，再與參 考光相干涉後，便可以在超音波偵測模組中2 〇將都卜勒頻 移以光強度的方式解調出來，而在第丨圖中的光偵測器22 將其轉為電壓訊號，以脈衝雷射送出脈衝光源的時間點為 觸發，在示波器50觀察光偵測器22的輸出訊號，或是以 個人電腦2 4處理。當超音波遇到缺陷4丨時，在示波器5 〇 上便會出現突波42，因此便可以以脈衝雷射送出一脈波的 時刻為時間計算的起始點，而以光偵測器22送出電壓訊號 的時刻為時間計算的終點，由量測出的時間差△ t與超音 波的速度Vu，計算出待測物體4〇缺陷41的位置1，其算式 可以下式表示： # 21 = At*Vu 〇 因此，本發明利用顯微式非破壞性超音波檢測物體缺 陷的方法，包括下列步驟·· 閱I 508438 A7 V. Description of the invention (b) To the ultrasonic detection module 20. When the ultrasonic wave caused by the pulse light source meets the object to be measured and reflects 41, it will cause high-frequency vibration on the surface. At this time, the test light will carry the Doppler frequency shift related to the ultrasonic vibration. After interfering with the reference light, the Doppler frequency shift can be demodulated as a light intensity in the ultrasonic detection module 20, and the light detector 22 in the figure 丨 converts it to The voltage signal is triggered by the time point when the pulse laser sends out the pulse light source, and the output signal of the light detector 22 is observed on the oscilloscope 50, or processed by the personal computer 24. When the ultrasonic wave encounters defect 4 丨, a surge 42 will appear on the oscilloscope 50. Therefore, the time at which the pulse laser sends a pulse is used as the starting point of time calculation, and the light detector 22 The moment when the voltage signal is sent is the end of the time calculation. From the measured time difference Δt and the speed of the ultrasonic wave Vu, the position 1 of the defect 40 of the object under test 40 is calculated. The formula can be expressed as: # 21 = At * Vu 〇 Therefore, the method of the present invention for detecting object defects using a microscopic non-destructive ultrasonic wave includes the following steps.
AA
B 智 員 C. 以一脈衝雷射產生一脈衝光源，經過一顯微 鏡模組入射於一待測物體以產生一超音波； 以一連續波雷射產生一連續光源，並經由分 光鏡產生一參考光與一測試光，該測試光經 過一顯微鏡模組入射於一待測物體，並由該 待測物體反射回原光路； 將由待測物體反射回原光路之測試光與原參 考光互相干涉所形成的一相位光柵於一光折 4 本紙張尺度適用中國國豕標準（CNS)A4規格（210 X 297公釐 508438B. Smartman C. A pulsed light source is generated by a pulsed laser, which is incident on an object to be measured through a microscope module to generate an ultrasonic wave; a continuous light source is generated by a continuous wave laser, and a reference is generated by a spectroscope Light and a test light, the test light is incident on a test object through a microscope module, and the test object reflects back to the original optical path; the test light reflected by the test object back to the original optical path interferes with the original reference light A phase grating formed in a light refraction 4 paper size applicable to China National Standard (CNS) A4 (210 X 297 mm 508438)
P濟部智慧財產局員工消費合作社印M A7 -----------—_________ 五、發明說明（7) 變材料中，並由一光偵測器接收直逕該相位 光柵之測試光與繞射該相位光柵之參考光的 干涉訊號後，轉為電壓訊號並送入一電腦處 理，若發現有缺陷產生時，經由缺陷反射的 超音波將使表面產生振動，並使光偵測器送 出突波電壓訊號； D · 以脈衝雷射送出一脈波的時刻為時間計算的 起始點，而以光偵測器2 2送出突波電壓訊號 的時刻為時間計算的終點，由量測出的時間 差△ t與超骨波的速度v u，計算出待測物體 40缺陷4 1的位置1，其算式可以下式表示： 21 = At*Vu 〇 因此，本發明一種利用顯微式非破壞性超音波檢測物 體缺陷的方法及裝置，利用一脈衝光源在待測物體形成超 音波，並由一連續光源提供一測試光及參考光，讓經由待 測物體反射後的測试光與參考光相互干涉後，以光彳貞測器 接收並送出一電壓訊號於一個人電腦解讀訊息的方式，提 供微機電及生化產業等微米級材料或元件以非接觸、非破 壞的方式進行檢測微米級物體表面或是内部的缺陷。 絲上所陳，本發明無論就目的、手段及功效，在在均 顯示其迴共於習知技術之特徵，為r 一種利用顯微式非破 壞性超音波檢測物體缺陷的方法及裝置」之一大突破，·懇 請貴審查委員明察，早日賜准專利，俾嘉惠社會，實感 德便。惟應注意的是，上述諸多實施例僅係為了便於説明 10 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） ----—1 -----------裝 -----—丨訂--------- (請先閱讀背面之注意事項再填寫本頁) 508438 A7 __B7___ 五、發明說明（各） 而舉例而已，本發明所主張之權利範圍自應以申請專利範 圍所述為準，而非僅限於上述實施例。 (請先閱讀背面之注意事項再填寫本頁) 裝 訂---1 # 經濟部智慧財產局員工消費合作社印製 1X 11 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）P Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs of the People's Republic of China M A7 ---------------_________ V. Description of the Invention (7) In the variable material, a photodetector receives the diameter of the phase grating. The interference signal between the test light and the reference light diffracting the phase grating is converted into a voltage signal and sent to a computer for processing. If a defect is found, the ultrasonic wave reflected by the defect will cause the surface to vibrate and make light detection The detector sends a surge voltage signal; D · The time at which the pulse laser sends a pulse is the starting point of time calculation, and the time at which the photodetector 2 2 sends the surge voltage signal is the end point of time calculation. The measured time difference Δt and the velocity vu of the super bone wave are used to calculate the position 1 of the defect 40 1 of the object 40 to be measured. The formula can be expressed as follows: 21 = At * Vu 〇 Therefore, the present invention uses a microscopic formula Method and device for non-destructive ultrasonic detection of object defects, using a pulsed light source to form an ultrasonic wave on the object under test, and a continuous light source to provide a test light and reference light, so that the test light reflected by the object under test and the After the reference lights interfere with each other By using a photometric sensor to receive and send a voltage signal to a person's computer to interpret the message, micron-level materials or components such as micro-electromechanical and biochemical industries can be detected in a non-contact and non-destructive manner on the surface or inside of micron-level objects. defect. It is said on the silk that the present invention, regardless of its purpose, means and efficacy, shows its characteristics shared by conventional technology. It is a method and device for detecting object defects using microscopic non-destructive ultrasound. " A major breakthrough, I urge your reviewing committee to make a clear observation, grant a quasi-patent at an early date, and benefit the society. It should be noted that many of the above-mentioned embodiments are only for the convenience of explanation. 10 paper sizes are applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 public love). ----- 1 --------- --Installation ------- 丨 Order --------- (Please read the notes on the back before filling out this page) 508438 A7 __B7___ V. Description of the Invention (Each) It is just an example. The scope of the claimed rights should be based on the scope of the patent application, rather than being limited to the above embodiments. (Please read the notes on the back before filling out this page) Binding --- 1 # Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 1X 11 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)