505604 經濟部智慧財產局員工消費合作社印製 第90107546號專利申請案 kn · 中文說明書修正頁 民國91年8月22曰呈 B7五、發明説明（彳） 本發明係關於一種光學件用容器，可以用於由合成石 英玻璃所製成的各種光學件之運送、運輸及儲存’例如透 鏡、窗、標準具、光罩、薄膜與薄膜框等。 在製造半導體裝置的曝光處理中，已經使用具有短波 長的光來符合設計規定中之微製造（microfabrication)需求 。近年來，已經提出並使用一種應用波長範圍沒有大於 220nm的光作爲光源之技術。可用於此波長範圍中的光學 材質，已知有合成石英玻璃、氟石、氟塑膠聚合體膜等等 。合成石英玻璃是大致上僅由矽土製成的玻璃，例如是藉 由在氣相中將矽土與氧反應以生成所謂煙灰（soot)的多孔 構件，接著再予以燒結。 由於這些光學元件所製成的光學件很容易受到外界衝 撃與擦傷的傷害，且在運輸或儲存期間因爲震動所導致的 塵土而會有不利的影響。目前已知有一些光學件用容器， 主要是由與金屬比起來相當具有彈性的合成樹脂所模製而 成，例如聚丙烯酸酯、聚苯乙烯、聚丙烯、聚乙烯、聚碳 酸酯及ABS樹脂。這些材料可以藉由射出成型、衝壓成 型或擠壓成型或而以低成本大量製造。然而，已知一種情 形，其中使用波長範圍未大於220nm波長的光學件，即 使此光學件已經被充分淸潔，但是光學件的光透射比已經 減少，且有些情形下在使用之前還需要再次淸潔。再次淸 潔對於成本而言則會產生嚴重的負荷。所以本發明的目的 是要解此項問題。 本發明已經發現爲什麼光學件的透射比會減少，是因 本紙張尺玉「適用中國國家標準（CNS ) A4規格（210X297公釐) " 4 裝 . 訂 線 (請先閲讀背面之注意事項再填寫本頁) 505604 A7 B7 五、發明説明-) (請先閱讀背面之注意事項再填寫本頁) 爲從光學件用容器所釋放出來的有機氣體（源自塑化劑的氣 體、未反應的單體等等）會黏著在容器中的光學件上，而且 當光學件被拿出容器外面時，光透射比會減少大約3-5%。 當此現象發生在光罩基底時，藉由容器所釋放出來的 氣體而降低光透射比的現象會發生在個別步驟裡，例如（1) 運輸、運送或儲存，直到在拋光與淸潔基底之後形成一膜 ，例如鉻膜，（2)運輸、運送或儲存，直到使基底產生圖案 而在上面形成膜，·（3)運輸、運送或儲存，直到使用已產生 圖案的基底在步進器中曝光，及（4)儲存以便在下一次使用 曝光用的基底·。上述現象會產生一種問題，就是曝光的程 度會隨部位而異，以至於無法曝光一致。 雖然有提出一項方法，就是在光學件容器使用之前藉 由熱處理或真空熱處理而減少釋放出來的氣體量，但是對 於合成樹脂來說，仍然無法獲得充分的效果。 經濟部智慧財產局員工消費合作社印製 爲了解決這些問題，所以本發明提供一種甩於容納由 合成石英玻璃所製成的容器，此容器包含合成樹脂作爲基 底材質，及一塗敷膜，該塗敷膜是設置在其內表面的整個 面積上，且大致上是無法使氣體從作爲容器基本材質的合 成樹脂而透過。本發明亦提供一種用於容納由合成石英玻 璃所製成的容器，此容器包含合成樹脂作爲基底材質，其 中容納在容器中的光學件在光透射比上可以在剛放入時與 放入後100小時之間有所差異，而相對於157.6nm波長被限 制在1 %以下。 最好屬於無機塗敷膜的塗敷膜是由金屬、其氧化物或 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -5- 505604 A7 B7 五、發明説明f ) 氧氮化物而製成，且塗敷膜是以不小於10Onm的厚度形成 在至少內表面的整個區域上，且偶合劑是被放入在上面形 成塗敷膜的區域與塗敷膜之間。 圖示簡易說明 圖1是一立體圖，顯示具有單一結構的光學件用容器 圖2是一立體圖，顯示具有多層結構的光學件甩容器 ;及 圖3是一圖形，顯示關於根據一範例與一比較例（波長 15 7.6nm)所備製的合成石英基底，其光透射比隨時間改變的 情形。 (請先閱讀背面之注意事項再填寫本頁) •裝· -訂 經濟部智慧財產局員工消費合作社印製 主要元件對照表 1 光學件 2 上半部 2a 嚙合表面 3 下半部 3 a 嚙合表面 4a 固持部 4b 固持部 5 凹處 6 隆起 7 鉸鍊 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） p -6 505604 A7 B7 發明説明（ 4 ) 8 內 容 器 8a 突 起 9 外 上 半 部 10 外 下 半 部 10a 配 合 表 面 11 凹 處 經濟部智慧財產局員工消費合作社印製 較佳實施例之詳細說明 以下將參考附圖詳細說明本發明。 根據本發明容器的形狀或結構並無任何限制，只要它 能夠谷納光學件即可。但疋：’此谷器最好是具有能夠以氣 密方式容納光學件的結構’如此以控制灰塵。容器可以具 有容納單一光學件的結構或是具有容納多個光學件的結構 ，以配合欲被容納的光學件數目。 例如，在圖1中顯示一光學件用容器，其具有單一結 構’且關閉上半部2及下半部3以容納一*光學件1。上半 部2與下半部3其上面分別具有固持部4a，4b，以便從內 壁凸出而在容納期間限制光學件1的移動。上半部2具有 一嚙合表面2a，在其整個周圍設有一^隆起6，且下半部3 具有一嚙合表面3a，在其整個周圍設有一凹處5。當上半 部2與下半部3閉合時，便會產生氣密結構。上半部2與 下半部3藉由鉸鍊7而連接以便可以開啓與關閉。 在圖2中，顯示一光學件用容器，其具有多層結構，且 在一內容器8中容納一光學件1，且將此內容器8封入一外 (請先閱讀背面之注意事項再填寫本頁) 丁 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 7 505604 A7 B7 五、發明説明f ) (請先閲讀背面之注意事項再填寫本頁) 上半部9與外下半部10以容納光學件1。內容器8具有一 內壁設有多個突起8a以將光學件1夾持與固定在相鄰的突 起之間。外上半部9具有一嚙合表面（未顯示），在整個周圍 設有隆起（未顯示），且外下半部1 〇具有一配合表面丨〇a， 在整個周圍設有一凹處11。當外上半部9與外下半部10閉 合時，會產生氣密結構。 上述兩種容器皆可以由例如聚丙烯酸酯、聚苯乙烯、 聚丙烯、聚乙烯、·聚碳酸酯及ABS樹脂的合成樹脂所製成 ，如同習知的容器一樣，以便使容器不僅能夠提供足夠的 強度以保護其中的光學件.1抵擋外界衝擊或震動，而且提 供足夠的彈性以防止光學件1的表面或支撐位置受到刮傷 〇 經濟部智慧財產局員工消費合作社印製 在根據本發明的容器中，由於考慮到氣體產生的問題 ，所以在容器的至少內表面上形成一塗敷膜，此膜大致上 無法使從作爲容器基本材質的合成樹脂所釋放出來的氣體 透過。藉此配置，容納在每個容器中的光學件在光透射比 上可以在剛放入時與放入後1 0 Q小時之間有所差異，而相 對於1 5 7 · 6 n m波長被限制在1 %以下。就不透氣性方面而言 ，最好塗敷膜是一無機的塗敷膜，特別是由金屬、其氧化 物或氮氧化物所製成的塗敷膜，且此塗敷膜具有不小於 lOOnm的厚度。塗敷膜是形成在每個容器的至少內表面上。 例如，在圖1所示的容器中，塗敷膜是形成在內表面（含有 固部4a)與上半部2的嚙合表面2a(含有隆起6)上，以及形成 在內表面(含有固持部4b)與下半部3的嚙合表面3a(含有凹 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -8 - 505604 A7 _^_ B7 _ 五、發明説明P ) 處5)。另一方面，在圖所示的容器中，塗敷膜是形成在內 容器8的整個表面、內表面及外上半部9的嚙合表面（含有 隆起）上，以及形成在內表面與外下半部10的嚙合表面10a( 含有凹處11)上。塗敷膜可以被形成在每個容器的整個表面 上。 作爲塗敷膜材質，最好是使用鉻氧化物CrOx.、鉻氮氧 化物Cr〇xNy等等，由於這些材質在抗腐蝕性與氣體阻礙性 上比較高。其他金屬、金屬合金及其氧化物或氮氧化物也 是可以接受的。即使塗敷膜是Si由Si〇2或製成的，塗敷膜 也可以確保有足夠的氣體·阻礙性。在光學件的一些應用中 ，可以使用IT0材質以確保容器的透明性。最好塗敷膜的 厚度不要小於100nm。假如塗敷膜較薄的話，則塗敷膜可 以會因爲機械淸潔而剝落，例如使用刷子的硏磨淸潔，或 者在形成塗敷膜之後藉由超音波淸潔的處理，如此均會產 生在持久性方面的問題。最好是塗敷膜的厚度不要小於 200nm ° 爲了形成塗敷膜，可以根據合成樹脂的種類或塗敷膜 材質的種類而選擇現有的已知技術’例如濺射、氣相沉澱 、離子電鍍及CVD法等。爲了增強塗敷膜的黏著性，塗敷 膜可以在例如矽烷偶合劑的偶合劑塗敷到塗敷膜形成表面（ 合成樹脂的表面）上之後，塗敷膜可以用任何一種已知技術 而形成。或者，塗敷膜可以具有多層結構’致使由上述金 屬或其氧化物與氮氧化物所製成的塗敷膜，能夠在塗敷膜 形成表面上已經形成一層具有較高黏著性的膜之後才形成 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐) ' _ 9 _ 丨-----‘--「裝-- (請先閲讀背面之注意事項再填寫本頁) 、訂505604 Intellectual Property Bureau, Ministry of Economic Affairs, Employee Consumer Cooperative Co., Ltd. Printed Patent Application No. 90107546 kn · Revised Page of Chinese Manual, August 22, 1991, B7 V. Description of Invention (彳) The present invention relates to a container for optical parts. For the transportation, transportation and storage of various optical parts made of synthetic quartz glass, such as lenses, windows, etalons, photomasks, films and film frames, etc. In an exposure process for manufacturing a semiconductor device, light having a short wavelength has been used to meet microfabrication requirements in design regulations. In recent years, a technology has been proposed and used that uses light having a wavelength range not greater than 220 nm as a light source. Optical materials that can be used in this wavelength range include synthetic quartz glass, fluorspar, fluoroplastic polymer films, etc. Synthetic quartz glass is a glass made of substantially only silica, for example, by reacting silica with oxygen in the gas phase to form a so-called porous member, which is then sintered. Because the optical components made of these optical elements are easily damaged by external shocks and abrasions, and are adversely affected by dust caused by vibration during transportation or storage. At present, there are some known optical containers, which are mainly molded from synthetic resins that are relatively elastic compared to metals, such as polyacrylate, polystyrene, polypropylene, polyethylene, polycarbonate, and ABS resins. . These materials can be manufactured in large quantities at low cost by injection molding, stamping, or extrusion. However, a situation is known in which an optical element with a wavelength range not greater than 220 nm is used. Even though the optical element has been sufficiently cleaned, the optical transmittance of the optical element has been reduced, and in some cases it needs to be re-used before use. clean. Once again, cleaning can create a severe load on costs. The object of the invention is therefore to solve this problem. The present invention has discovered why the transmittance of optical parts is reduced because the paper ruler “applies to Chinese National Standard (CNS) A4 specification (210X297 mm) " 4 Pack. Thread (please read the precautions on the back before Fill out this page) 505604 A7 B7 V. Description of the invention-) (Please read the precautions on the back before filling out this page) Organic gases (plasticizer-derived gases, unreacted Monomer, etc.) will adhere to the optical parts in the container, and when the optical parts are taken out of the container, the light transmittance will decrease by about 3-5%. When this phenomenon occurs on the substrate of the mask, the container The released gas reduces the light transmittance in individual steps, such as (1) transportation, transportation or storage until a film is formed after polishing and cleaning the substrate, such as a chromium film, (2) transportation, Transported or stored until a pattern is formed on the substrate to form a film thereon, (3) Transported, transported or stored until the patterned substrate is exposed in a stepper, and (4) stored for next use Substrate for light · The above phenomenon will cause a problem, that is, the degree of exposure varies depending on the part, so that the exposure cannot be consistent. Although there is a method proposed, by using heat treatment or vacuum heat treatment before the optical container is used, The amount of released gas is reduced, but the effect is still not sufficient for the synthetic resin. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs To solve these problems, the present invention provides a method for accommodating synthetic quartz glass. This container contains a synthetic resin as a base material, and a coating film provided on the entire area of the inner surface thereof, and is substantially incapable of making gas from the synthetic resin as the basic material of the container. The present invention also provides a container for accommodating a synthetic quartz glass. The container includes a synthetic resin as a base material, and the optical component contained in the container can transmit and transmit light immediately after being put in the container. There is a difference between 100 hours after entry, and the wavelength is limited to 1% to 157.6nm. The coating film, which is preferably an inorganic coating film, is made of metal, its oxides, or the size of this paper. It applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -5- 505604 A7 B7 V. Description of the invention f) Oxygen It is made of nitride, and the coating film is formed on the entire area of at least the inner surface with a thickness of not less than 100 nm, and a coupling agent is placed between the area where the coating film is formed and the coating film. 1 is a perspective view showing a container for an optical member having a single structure. FIG. 2 is a perspective view showing a container for an optical member having a multi-layer structure. And FIG. 3 is a diagram showing an example according to an example and a comparative example. (Wavelength 15 7.6nm) The light transmittance of the prepared synthetic quartz substrate changes with time. (Please read the precautions on the back before filling out this page) • Assembly · -Order the comparison table of the main components printed by the Intellectual Property Bureau of the Ministry of Economic Affairs's Consumer Cooperatives 1 Optics 2 Upper half 2a Engaging surface 3 Lower half 3a Engaging surface 4a Holding part 4b Holding part 5 Depression 6 Swell 7 Hinge This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) p -6 505604 A7 B7 Description of the invention (4) 8 Inner container 8a Protrusion 9 Upper outer half The lower and outer half 10a of the part 10 cooperates with the surface 11. The recessed part of the Intellectual Property Bureau of the Ministry of Economic Affairs prints a detailed description of the preferred embodiment of the printing of consumer cooperatives in the following. The present invention will be described in detail below with reference to the drawings. The shape or structure of the container according to the present invention is not limited insofar as it is capable of absorbing optical elements. But 疋: ‘This trough device preferably has a structure capable of accommodating optical parts in an airtight manner’ so as to control dust. The container may have a structure for accommodating a single optical element or a structure for accommodating a plurality of optical elements to match the number of optical elements to be accommodated. For example, in Fig. 1, a container for an optical member is shown which has a single structure 'and the upper half 2 and the lower half 3 are closed to accommodate an * optical member 1. The upper half 2 and the lower half 3 have retaining portions 4a, 4b on their upper surfaces, respectively, so as to protrude from the inner wall to restrict the movement of the optical member 1 during the accommodation. The upper half 2 has an engaging surface 2a provided with a ridge 6 over its entire periphery, and the lower half 3 has an engaging surface 3a provided with a recess 5 throughout its entire periphery. When the upper half 2 and the lower half 3 are closed, an airtight structure is created. The upper half 2 and the lower half 3 are connected by a hinge 7 so that they can be opened and closed. In FIG. 2, a container for optical components is shown, which has a multi-layer structure, and contains an optical component 1 in an inner container 8, and the inner container 8 is enclosed outside (please read the precautions on the back before filling in this Page) The size of this paper is in accordance with Chinese National Standards (CNS) A4 (210X 297 mm) 7 505604 A7 B7 V. Description of the invention f) (Please read the precautions on the back before filling this page) Upper part 9 and outside The lower half 10 is configured to receive the optical member 1. The inner container 8 has an inner wall provided with a plurality of protrusions 8a to hold and fix the optical member 1 between adjacent protrusions. The upper outer half 9 has an engaging surface (not shown), a ridge (not shown) is provided around the entire periphery, and the lower outer half 10 has a mating surface 丨 0a, and a recess 11 is provided around the entire periphery. When the outer upper half 9 and the outer lower half 10 are closed, an airtight structure is produced. Both of the above containers can be made of synthetic resins such as polyacrylate, polystyrene, polypropylene, polyethylene, polycarbonate, and ABS resin, just like conventional containers, so that the container can not only provide sufficient Strength to protect the optics therein.1 Resist external shocks or vibrations, and provide sufficient flexibility to prevent scratches on the surface or support position of the optics1. The Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economy printed on the In the container, since a problem of gas generation is taken into consideration, a coating film is formed on at least the inner surface of the container, and the film substantially cannot permeate the gas released from the synthetic resin which is the basic material of the container. With this configuration, the optical transmittance of the optical components contained in each container can be different between the time of insertion and the time of 10 Q hours after insertion, and the wavelength is limited relative to 1 5 7 · 6 nm Below 1%. In terms of airtightness, the coating film is preferably an inorganic coating film, especially a coating film made of metal, its oxide or nitrogen oxide, and the coating film has a size of not less than 100 nm thickness of. The coating film is formed on at least the inner surface of each container. For example, in the container shown in FIG. 1, the coating film is formed on the inner surface (containing the solid portion 4a) and the engaging surface 2a (containing the bulge 6) of the upper half 2 and the inner surface (containing the holding portion) 4b) Engagement surface 3a with lower half 3 (contains concave paper size applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) -8-505604 A7 _ ^ _ B7 _ V. Description of invention P) 5) . On the other hand, in the container shown in the figure, the coating film is formed on the entire surface of the inner container 8, the inner surface, and the engaging surface (including the bulge) of the upper outer half 9, and the inner surface and the outer surface The engaging surface 10a of the half 10 (containing the recess 11). A coating film may be formed on the entire surface of each container. As the coating film material, chromium oxide CrOx., Chromium nitride oxide CrOxNy, etc. are preferably used, because these materials are relatively high in corrosion resistance and gas barrier property. Other metals, metal alloys, and their oxides or oxynitrides are also acceptable. Even if the coating film is made of Si02 or Si, the coating film can ensure sufficient gas and barrier properties. In some applications of optics, the IT0 material can be used to ensure the transparency of the container. It is preferable that the thickness of the coating film is not less than 100 nm. If the coating film is thin, the coating film may be peeled off due to mechanical cleaning, such as honing with a brush, or ultrasonic cleaning after forming the coating film. Problems in terms of persistence. It is best that the thickness of the coating film is not less than 200nm. In order to form the coating film, the existing known techniques can be selected according to the type of synthetic resin or the type of coating film material, such as sputtering, vapor deposition, ion plating, and CVD method. In order to enhance the adhesion of the coating film, the coating film can be formed by any known technique after a coupling agent such as a silane coupling agent is applied to the coating film forming surface (the surface of a synthetic resin). . Alternatively, the coating film may have a multilayer structure, so that the coating film made of the above metal or its oxides and nitrogen oxides can be formed only after a film with high adhesion has been formed on the coating film formation surface. Form this paper standard applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) '_ 9 _ 丨 -----'-"install-(Please read the precautions on the back before filling this page), order
經濟部智慧財產局員工消費合作社印製 505604 A7 B7 五、發明説明『） 〇 (請先閱讀背面之注意事項再填寫本頁) 在如此構成的本發明容器中，塗敷膜可以防止氣體從 作爲基本材質的合成樹脂進入容器內。容納在每個容器中 的光學件可以在光透射比上可以在剛放入時與放入後1 00 小時之間有所差異，而相對於157.6nm波長被限制在1%以 下，如同上述的範例。 以下，將顯示一範例與一比較例來詳細說明本發明， 但是本發明並不被侷限於此範例。 ‘ 節例與比較例· . 經濟部智慧財產局員工消費合作社印製 將藉由已知技術製成的合成樹脂錠以一切割器切割成 片，具有 153.0mm X 153.0mm X 6.55mm(厚）的尺寸，此 切割器在其內圍上具有一線剪，然後切割好的樹脂片受到 去角、摺疊與拋光。之後，這些樹脂片被浸入一槽中2分 鐘，此槽中含有95 wt%的硫酸與體積比50:50的過氧化氫。 在浸泡之後，這些樹脂片被以淸水沖洗，然後在含有異丙 醇的潮濕空氣槽中乾燥，以獲得作爲光罩的多個合成石英 基底，各具有大小爲152.0mm X 152.0mm X 6.45mm(厚度 )。當些藉由真空紫外線分光光度計而測量基底相對於波長 157.6nm的光透射比時，顯示平均相對於該波長的光透射比 是 80.3%。 另一方面.，備製有兩種光學件用容器，亦即，一是光 學件用容器A(比較例）’其具有圖2所示的結構，且包含由 聚丙烯所製成的內容器8 ’以及由ABS樹脂所製成的外上 本紙張尺度適用中國國家標準（CNS ) A4規格（210'〆297公釐） -10- 505604 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明f ) 半部‘9與外下半部1 〇 ;另一是光學件用容器B(範例），其中 內容器8的內表面，外上半部8的內表面與配合表面，及以 如容器A相同方式所構成的容器之外下半部1 0的內表面與 配合表面，其上藉由濺射而形成200nm厚的Cr。容器A與 B受到使用洗潔劑和刷子的硏磨淸潔。如此淸潔的容器之後 被以超純水進行超音波沖洗，沖洗過的容器停放在淸潔室 中乾燥24小時。 合成石英基底被容納在個別购容器A與B中。合成石 英基底每48小時被取出一次，且如同上述，藉由真空紫外 線分光光度計測量相對於·波長1 5 7.6 n m的合成石英基底之光 透射比。如圖3所示，測量結果顯示合成石英基底的光透 射比即使在容器B中容納480小時也不會下降，但是在容器 A中容納144小時，合成石英基底的光透射比卻下降至 7 6.0% ° 如上所述，本發明的容器可以完全避免氣體從作爲基 本材質的合成樹脂中產生，且限制由各種光學件所產生的 光透射比之下降，特別是在運送、輸送與儲存期間合成石 英玻璃的光透射比下降。當例如抗反射性塗敷的膜被塗到 透鏡等光學件上以增加被使用波長的光之光透射比時，在 形成膜之前，如果淸潔不夠充分將會產生一項問題，就是 上述氣體會停留在膜下面以減少光透射比。所幸，本發明 的容器幾乎不會受到此問題的影響。 由於在作爲基本材質的合成樹脂上並沒有任何限制， 所以目前大部分現有的光學件容器僅需皆由塗敷膜形成處 (請先閲讀背面之注意事項再填寫本頁) 裝· 訂Printed on 505604 A7 B7 by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention 『〇 (Please read the precautions on the back before filling out this page) In the container of the present invention thus constructed, the coating film can prevent gas from acting as The synthetic resin of basic material enters the container. The optical transmittance contained in each container can have a difference in light transmittance between the time when it is placed and the time after it is placed, and the wavelength is limited to less than 1% relative to the 157.6nm wavelength, as described above. example. Hereinafter, an example and a comparative example will be shown to explain the present invention in detail, but the present invention is not limited to this example. '' Examples and Comparative Examples.. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. The synthetic resin ingots made by known technology are cut into pieces by a cutter, with 153.0mm X 153.0mm X 6.55mm (thickness). Size, this cutter has a wire cutter on its inner circumference, and then the cut resin sheet is chamfered, folded and polished. Afterwards, these resin pieces were immersed in a tank for 2 minutes, and the tank contained 95 wt% sulfuric acid and 50:50 hydrogen peroxide by volume. After immersion, these resin pieces were rinsed with dew water and then dried in a humid air bath containing isopropanol to obtain a plurality of synthetic quartz substrates as photomasks, each having a size of 152.0mm X 152.0mm X 6.45mm (thickness). When the light transmittance of the substrate with a wavelength of 157.6 nm was measured by a vacuum ultraviolet spectrophotometer, the average light transmittance with respect to the wavelength was 80.3%. On the other hand, two types of optical container are prepared, that is, one is an optical container A (comparative example), which has a structure shown in FIG. 2 and includes an inner container made of polypropylene. 8 'and the size of the upper and lower paper made of ABS resin are applicable to the Chinese National Standard (CNS) A4 specifications (210'〆297 mm) -10- 505604 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Description of the invention f) Half '9 and outer lower half 10; the other is a container B for optical components (example), wherein the inner surface of the inner container 8, the inner surface of the outer upper half 8 and the mating surface, and The inner surface and the mating surface of the lower half 10 of the container formed in the same manner as the container A were formed with 200 nm thick Cr by sputtering thereon. Containers A and B were abraded and cleaned with detergent and brush. The cleaned container was then ultrasonically washed with ultrapure water, and the washed container was left to dry in a clean room for 24 hours. Synthetic quartz substrates are housed in individual containers A and B. The synthetic quartz substrate was taken out every 48 hours, and as described above, the light transmittance of the synthetic quartz substrate with a wavelength of 1 5 7.6 n m was measured with a vacuum ultraviolet spectrophotometer. As shown in Figure 3, the measurement results show that the light transmittance of the synthetic quartz substrate does not decrease even if it is stored in container B for 480 hours, but when it is stored in container A for 144 hours, the light transmittance of synthetic quartz substrate is reduced to 7 6.0 % ° As described above, the container of the present invention can completely avoid the generation of gas from the synthetic resin as a basic material, and limit the decrease of the light transmittance generated by various optical parts, especially the synthetic quartz during transportation, transportation and storage The light transmittance of glass decreases. When an anti-reflection coated film is applied to an optical element such as a lens to increase the light transmittance of light at the wavelength used, if the cleaning is not sufficient before forming the film, a problem will occur, which is the above gas. It stays under the film to reduce light transmittance. Fortunately, the container of the present invention is hardly affected by this problem. Since there is no restriction on the synthetic resin as the basic material, most of the existing optical containers only need to be formed by the coating film (please read the precautions on the back before filling this page).
本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -11 - 505604 A7 B7 五、發明説明f ) 理就可以獲得本發明之效果，如此意味著本發明具有相當 大的多功能性。此外，本發明可以消除每次使用所需的熱 處理，如此在維護保養上是很有利的。 2000年4月26日所申請的曰本專利案JP2000- 1 25996 ，其整份說明書（包含申請專利範圍、圖形及槪述）在此被倂 入作爲參考。 (請先閱讀背面之注意事項再填寫本頁) 裝· 訂 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210'〆297公釐） 12·This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -11-505604 A7 B7 V. Description of the invention f) The effect of the invention can be obtained, which means that the invention has considerable versatility . In addition, the present invention can eliminate the heat treatment required for each use, which is very advantageous in terms of maintenance. The entire specification (including the scope of patent application, graphics and description) of the Japanese patent application JP2000-1 25996 filed on April 26, 2000 is incorporated herein by reference. (Please read the precautions on the back before filling out this page) Binding and printing Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper applies the Chinese National Standard (CNS) A4 specification (210'〆297 mm) 12 ·