TW499399B - Ferrite with high-permittivity and high dielectric coefficient and method for producing the same - Google Patents

Ferrite with high-permittivity and high dielectric coefficient and method for producing the same Download PDF

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TW499399B
TW499399B TW89128287A TW89128287A TW499399B TW 499399 B TW499399 B TW 499399B TW 89128287 A TW89128287 A TW 89128287A TW 89128287 A TW89128287 A TW 89128287A TW 499399 B TW499399 B TW 499399B
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ferrite
magnetic permeability
scope
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TW89128287A
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Mean-Jue Tung
Yu-Ting Huang
Yen-Ping Wang
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Ind Tech Res Inst
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Abstract

A ferrite with a high-permittivity and a high dielectric coefficient is produced by preparing and sintering a powder containing, for example, TiO2, Fe2O3, and one or more oxides of Mn, Ni, Cu or Zn according to a composition of Tix(MFe2O4+2x/y)y, in which x+y=1, 0 < x < 1, and M is one of Mn, Ni, Cu or Zn or a mixture thereof, and the ratio of x and y can be adjusted according to actual need, thereby obtaining various binary ferrite compositions with different permittivities and dielectric constants; the composition can be used as a magnetic conductive material and a dielectric material simultaneously in the production of an electronic component, thereby avoiding the defects from co-sintering two different materials.

Description

499399 五、發明說明(l) 【發明之應用領域】 本务明係關於一種兼具高導磁率與高介電係數的陶曼 材料’特別是關於一種兼具高導磁率與高介電係數的鐵氧 體及其製造方法。 :發明背景】 一般而§介電材料與鐵氧體(F e r r i t e)材料係為兩 種性質不同,且功能各異的材料。鐵氧體係為一種鐵磁性 材料(ferromagnetic material),根據文獻所記載其介 電常數(dielectirc constant) —般多在2 0以下。而介 電材料,例如用於電容器的介電材料,則都不具有磁性 :::其t磁率為卜因此在製作積層元件時,若該積 :::ϋ =傷高介電係數與高導磁性材料,例如,製 作電感電容型積層元件,^ &gt; Ll .. 亦即LC複合型元件時,必須使 用導磁材料與介電材料楚 '兩種以上不同材料共燒而得。但 疋不同材料之共燒所衍味 疋之問題很多,例如,材料之匹配 性、相容性的問題,以及 ^ 久燒成之成品崩裂的問題。為了克 服因不同材料(導磁材粗 ~ #與介電材料)共燒所產生的問 種能同時具有高介電係數 前技術中,例如,美國專利公告 LC composite ceramic component”、 日本專利么止一 。匕丨,ττ ·, 寸 4 ;告第 6 2 1 4 7 7 0 3號 n High permittivity oxide mArv · . i „ a§netic material 、日本專利第 129140 61nHigh-perraiti~..i , . , · i Q n H Ltivity magnetic material and manufacture thereof、及美國專利第 5 8 5 6 77 〇號&quot;FUter i,一種解決的方法乃是尋來一 與而導磁率之材料。在先^ 第 5029043號&quot;Chip tyPe499399 V. Description of the invention (l) [Application field of the invention] This matter is about a Taumman material with high permeability and high permittivity, especially a kind of high permeability and high permittivity. Ferrite and its manufacturing method. : BACKGROUND OF THE INVENTION Generally, § dielectric materials and ferrite materials are two materials with different properties and different functions. The ferrite system is a ferromagnetic material, and its dielectric constant (dielectirc constant) is generally less than 20 according to the literature. Dielectric materials, such as those used in capacitors, are not magnetic ::: t has a magnetic permeability. Therefore, when manufacturing a multilayer component, if the product ::: ϋ = high dielectric constant and high conductivity Magnetic materials, for example, for the production of inductance and capacitance type multilayer components, ^ &gt; Ll .. That is, LC composite type components must be co-fired with two or more different materials, magnetically conductive material and dielectric material. However, there are many problems associated with the co-firing of different materials. For example, the problem of material compatibility and compatibility, and the problem of cracking of long-term fired products. In order to overcome the problems caused by co-firing of different materials (magnetically permeable material ~ # and dielectric materials), which can have a high dielectric constant at the same time, for example, the US patent announcement LC composite ceramic component, Japanese patent 1. Dagger, ττ ·, inch 4; Report No. 6 2 1 4 7 7 0 3 n High permittivity oxide mArv ·. I „a§netic material, Japanese Patent No. 129140 61n High-perraiti ~ ..i,., · I Q n H Ltivity magnetic material and manufacture thereof, and U.S. Patent No. 5 8 5 6 77 0 &quot; FUter i, a solution is to find a material with uniform magnetic permeability. Previous ^ No. 5029043 &quot; Chip tyPe

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499399 五、發明說明(2) with ferroelectric一ferromagnetic composite m a t e r i a 1 s π,所提到的關於獲得兼具高介電係數與高導磁 率之材料的方法,皆須在製程中先製備磁性材料粉末以及 介電材料粉末。其中的磁性材料粉末,例如為鐵氧體 (f e r r i t e)係磁性體經煆燒、粉碎而得;而該介電材料 粉末’例如為B a / S r - T i 0 3糸介電材料瑕燒或燒結後’粉 碎而得,然後將這兩種不同材料之粉末混合、造粒、成 形、燒結,而獲得兼具磁性與介電性之複合材料。然而使 用上述兩種粉末燒結時,Ba/Sr-Ti03中的Ba〇及SrO會與 鐵氧體形成鋇鐵氧體及锶鐵氧體,這兩種鐵氧體都是硬磁 材料,其導磁率接近1,因而使所得到的複合材料之導磁 率大幅下降。 綜上所述,仍有需要發展一種能兼具高導磁率與高電 係數的新材料及其製造方法,以解決上述問題。 【發明之目的及概述】 據此,本發明的目的在提供一種兼具高導磁率與高介 電係數之鐵氧體,除了可在一電子元件中,例如,LC複合 型之元件中,作為導磁材料,並可同時作為介電材料。 本發明之兼具高導磁率與高介電係數之鐵氧體,其組 成為T i x( MF e 2〇4+2x/y) y,其中x + y二1,0&lt;x&lt; 1,而Μ為選自於 Μη、Ni、Cu、Zη戶斤組成之族群中的任何一種或多種金屬。 以此組成可形成導磁率(permeability) 2至2 2 6 0,介電 常數(dielectric constant) 17至2 7 7 5之具導磁性與介 電性二元性質之鐵氧體材料。由於本發明之具導磁性與介499399 V. Description of the invention (2) with ferroelectric-ferromagnetic composite materia 1 s π, the methods mentioned above for obtaining materials with both high dielectric constant and high magnetic permeability must first prepare magnetic material powder and Dielectric material powder. The magnetic material powder is, for example, obtained by sintering and pulverizing a ferrite-based magnetic body; and the dielectric material powder is, for example, B a / S r-T i 0 3 糸Or after sintering, it is obtained by crushing, and then the powders of these two different materials are mixed, granulated, shaped, and sintered to obtain a composite material with both magnetic and dielectric properties. However, when sintering with the above two powders, BaO and SrO in Ba / Sr-Ti03 will form barium ferrite and strontium ferrite with ferrite. These two ferrites are hard magnetic materials. The magnetic permeability is close to 1, and the magnetic permeability of the obtained composite material is greatly reduced. In summary, there is still a need to develop a new material capable of combining both high magnetic permeability and high electrical conductivity and a manufacturing method thereof to solve the above problems. [Objective and Summary of the Invention] Accordingly, the object of the present invention is to provide a ferrite having both high magnetic permeability and high permittivity, in addition to being used in an electronic component, such as an LC composite type component, as Magnetically permeable material and can also be used as a dielectric material. The ferrite of the present invention, which has both high magnetic permeability and high dielectric constant, has a composition of T ix (MF e 204 + 2x / y) y, where x + y is 1, 1, 0 &lt; x &lt; 1 and M is any metal or metals selected from the group consisting of Mn, Ni, Cu, and Zn. With this composition, it is possible to form a ferrite material having a magnetic permeability and a dielectric binary property with a permeability of 2 to 2 2 0, a dielectric constant of 17 to 2 7 7 5. Because of the magnetic permeability

499399 五、發明說明(3) 電性之鐵氧體材料,係由原料粉末,例如,T i 0 2、F e 2〇3 以及Μ η、N i、C u或Ζ η其中一種或多種金屬之氧化物,以配 當比例調配並均勻混合後,燒結而成之單一材料系統,不 會有像鋇鐵氧體或锶鐵氧體等硬磁相產生,故能得到高導 磁率與高介電常數。並且特別有利於運用在,例如LC複合 型之元件,這類需同時具有導磁材料與介電材料之元件的 製作上,而可避免因將導磁材料(如Ferrite)與介電材 料(如BaT i 0 3 )兩種不同材料共燒所產生之匹配性、相 容性問題以及成品崩裂等困擾。 根據本發明的一種兼具高導磁率與高介電係數之鐵氧 體的製造方法,係將T i 0 2、金屬Μ之氧化物以及F e 20 3之原 料粉末,以滿足T i x( MF e 20 4+2x/y) y之組成比例調配並均勻混 合,其中x + y=l, 0&lt;χ&lt;1,其中金屬Μ可為Mn、Ni、Cu或 Ζ η中的任何一種或多種金屬;然後,將均勻混合之該原料 粉末以例如7 5 0°C之溫度預燒後磨成細微粉體;接著將該 粉體壓縮成形為所需之形狀;然後再以8 4 0至1 2 5 0°C之溫 度燒結,如此即形成兼具高導磁率與高介電係數之鐵氧 體。其中X與y之比例可依實際需要調整,以獲得各種具有 不同導磁率及介電常數之二元性鐵氧體材料,而可適用於 各種不同之元件製作上。 為使對上述本發明的特徵,以及本發明的其它特徵與 優點有更清楚的暸解,接下來將配合圖示加以詳細說明。 但必須先說明的是,本發明除了下述之實施例外,仍然可 以有其它的實施例。499399 V. Description of the invention (3) Electrical ferrite materials are made of raw material powders, such as T i 0 2, F e 2 0 3 and one or more metals of η, Ni, Cu or Z η The oxides are mixed in a proper ratio and uniformly mixed, and then sintered into a single material system. There will be no hard magnetic phases such as barium ferrite or strontium ferrite, so high permeability and high dielectric properties can be obtained. Electrical constant. And it is particularly useful for applications such as LC composite components, which need to have both magnetically conductive materials and dielectric materials, and can avoid magnetically permeable materials (such as Ferrite) and dielectric materials (such as BaT i 0 3) The problems of compatibility, compatibility and cracking of finished products caused by co-firing of two different materials. According to a method for manufacturing a ferrite having both high magnetic permeability and high permittivity according to the present invention, a raw material powder of T i 0 2, a metal M oxide, and F e 20 3 is used to satisfy T ix (MF e 20 4 + 2x / y) The composition ratio of y is adjusted and uniformly mixed, where x + y = 1, 0 &lt; χ &lt; 1, wherein the metal M may be any one or more of Mn, Ni, Cu, or Zn η ; Then, the raw material powder which is uniformly mixed is calcined at a temperature of, for example, 75 ° C, and then ground into a fine powder; then the powder is compacted into a desired shape; Sintering at a temperature of 50 ° C will form a ferrite with high magnetic permeability and high dielectric constant. Among them, the ratio of X and y can be adjusted according to actual needs to obtain various binary ferrite materials with different magnetic permeability and dielectric constant, which can be applied to the manufacture of various components. In order to have a clearer understanding of the features of the present invention described above, as well as other features and advantages of the present invention, it will be described in detail with reference to the drawings. But it must be stated first that the present invention may have other embodiments except for the following embodiments.

499399 五、發明說明(4) 【實施例詳細說明】 根據本發明所揭露的兼具高導磁率與高介電係數之鐵 氧體,係源自於軟鐵氧磁體(S 〇 f t F e r r i t e)損失行為之 研究。一般的鐵氧磁體(F e r r i t e)之晶界常有一純物析 出,此析物之組成及其特性影響損失甚大。一般研究者多 注意此一晶界層之電阻率等性質,然而其介電性質也對損 失行為有所影響。原本在低損失之要求下應設法形成低介 電係數之晶界層,但經研究發現如果反其道而行不只可得 到高介電係數之鐵氧體,而且尚能在鐵氧體中保有高導磁 率之特性。根據本發明之鐵氧體為Ti x(MFe 20 4+2x/y) y,其中 x + y = l,0&lt;x&lt; 1,而Μ為Μη、Ni、Cu或Zn中的任何一種或 多種金屬之混合。以^1^(12%) + (:11(28%) + 211(60%)之鐵氧 體為例’其組成為 Tix(Ni〇 i2CU().28Zn().6Fe2〇4 + 2x/y)y。以此組所 燒成之體氧體,依X及y之不同配比而有不同之導磁率與介 電常數。如「第1圖」所繪示之實驗數據曲線可知,其導 磁率可為2至2260,而介電常數可為17至2775。其中之最 佳配比出現在0 . 0 0 3S 0 . 1 5之間,此時之導磁率在5至 1 3 0 0之間而介電常數則在5 0至2 7 7 5之間。因此,只要將上 述組成中的X及y配比做適當的調配,即可依需求獲得兼具 高導磁率與高介電係數二元性質之鐵氧體。 上述本發明之兼具高導磁率與高介電係數之鐵氧體, 可利用傳統精密陶瓷製程來加以製造,其製造流程如「第 2圖」所示。 首先進行原料粉末之調配1 0,將適當之原料粉末,如499399 V. Description of the invention (4) [Detailed description of the embodiment] The ferrite with high magnetic permeability and high permittivity disclosed in the present invention is derived from a soft ferrite (S ft Ferrite) Research on loss behavior. In general ferrite magnets (F e r r i t e), there is often a pure precipitate at the grain boundary. The composition of this precipitate and its characteristics affect the loss greatly. Most researchers pay attention to the properties of this grain boundary layer, such as resistivity, but its dielectric properties also affect the loss behavior. Originally, under the requirements of low loss, efforts should be made to form a grain boundary layer with a low dielectric constant, but studies have found that if the other way around is to obtain not only ferrite with a high dielectric constant, but also to retain it in the ferrite Characteristics of high magnetic permeability. The ferrite according to the present invention is Ti x (MFe 20 4 + 2x / y) y, where x + y = 1, 0 &lt; x &lt; 1, and M is any one or more of Mη, Ni, Cu or Zn Mixing of metals. Take ^ 1 ^ (12%) + (: 11 (28%) + 211 (60%) ferrite as an example. Its composition is Tix (Ni〇i2CU (). 28Zn (). 6Fe2〇4 + 2x / y) y. The body oxygens fired in this group have different magnetic permeability and dielectric constant according to different proportions of X and y. As shown in the experimental data curve shown in "Figure 1", The magnetic permeability can be 2 to 2260, and the dielectric constant can be 17 to 2775. The best ratio among them is between 0. 0 0 3S 0. 1 5 and the magnetic permeability is 5 to 1 3 0 0 The dielectric constant is between 50 and 2 7 7 5. Therefore, as long as the X and y ratios in the above composition are properly adjusted, both high magnetic permeability and high dielectric can be obtained as required. The ferrite with a binary nature of the coefficient. The above-mentioned ferrite having high magnetic permeability and high dielectric constant of the present invention can be manufactured by a traditional precision ceramic manufacturing process, and the manufacturing process is shown in FIG. 2 . First prepare the raw material powder 10, and mix the appropriate raw material powder, such as

第7頁 499399 五、發明說明(5) 丁 i 0 2、N i 0、C u 0、Ζ η0以及F e 20 3,依適當之比例調配以滿 足 T i x( MF e 20 4+2x/y) y,其中 x + y = 1,0&lt; x&lt; 1,在此實施例中 Μ = N i ( 1 2 % ) + C u ( 2 8 % ) + Z η ( 6 Ο % )。接著進行混合的步驟 2 Ο, 將上述之原料粉末經由乾式或水球磨充分混合均勻。 然後,進行預燒及研磨的步驟3 0,將完成均勻混合之 原料粉末以適當之溫度進行預燒,該預燒之溫度可為7 0 0 至9 0 0°C之間,例如7 4 0°C。預燒之後以水球磨將該預燒後 之產品研磨形成粒徑約在0. 2至1微米之微細粉體,其平均 粒徑例如為0 . 5微米。 接著,進行成形的步驟4 0,將上述之微細粉體經由壓 縮成形以得到所需之形狀。其中壓縮成形後之生胚密度例 如為 3.0g/cni3。 接著,進行燒結的步驟5 0,將該成形後之生胚以適當 之燒結溫度進行燒結。該燒結溫度可在8 4 0至1 2 5 Q°C之 間,其中較適當之燒結溫度約在9 0 0至1 1 0 0°C。 經由上述之步驟即可燒成本發明之兼具高導磁率與高 介電係數之鐵氧體。並且將組成中的X及y配比做適當的調 配,即可依需求獲得所需之兼具高導磁率與高介電係數二 元性質之鐵氧體材料。該材料在一電子元件的製作上,可 同時作為導磁材料以及介電材料,而避免傳統上以兩種不 同材料共燒所產生之缺點。 例如「第3圖」所示,為利用根據本發明之兼具高導 磁率與高介電係數之鐵氧體材料,製作一同時含有電感及 電容元件之電子組件之流程圖。其中之同時含有電感及電Page 7 499399 V. Description of the invention (5) Ding i 0 2, N i 0, Cu 0, Z η0, and F e 20 3, according to appropriate proportions to meet T ix (MF e 20 4 + 2x / y ) y, where x + y = 1, 0 &lt; x &lt; 1, in this embodiment M = Ni (12%) + Cu (28%) + Zη (60%). Then, a mixing step 20 is performed, and the above raw material powders are thoroughly mixed by a dry or water ball mill. Then, the calcining and grinding step 30 is performed, and the uniformly mixed raw material powder is calcined at an appropriate temperature, and the calcination temperature may be between 7 0 and 9 0 0 ° C, for example, 7 4 0 ° C. After calcining, the calcined product is ground with a water ball mill to form a fine powder having a particle diameter of about 0.2 to 1 micrometer, and the average particle diameter is, for example, 0.5 micrometer. Next, the forming step 40 is performed, and the above-mentioned fine powder is subjected to compression molding to obtain a desired shape. The density of raw embryos after compression molding is, for example, 3.0 g / cni3. Next, a sintering step 50 is performed, and the formed green body is sintered at an appropriate sintering temperature. The sintering temperature can be between 8 40 and 125 Q ° C, and the more suitable sintering temperature is about 900 to 110 ° C. Through the above steps, the ferrite having high magnetic permeability and high dielectric constant of the invention can be burned. In addition, the X and y ratios in the composition can be properly adjusted to obtain the required ferrite material with high permeability and high permittivity binary properties. This material can be used as both a magnetically permeable material and a dielectric material in the manufacture of an electronic component, avoiding the disadvantages of traditionally co-firing two different materials. For example, as shown in FIG. 3, it is a flowchart of manufacturing an electronic component including both an inductor and a capacitor element by using the ferrite material having high magnetic permeability and high dielectric constant according to the present invention. Which contains both inductance and electricity

第8頁 499399 五、發明說明(6) 容之電子組件,可如「第4圖」所繪示之積層LC元件1 0 0。 首先,可依上述實施例中步驟1 0至3 0相同的步驟,製成平 均粒徑為0. 5微米之細微粉體。 再經由鐵氧體生胚製程步驟4 5,將該粉體混合黏結劑 製成生胚薄片。 然後再進行印刷疊層步驟4 6,將形成電感1 01與電容 1 0 2所需之將導體線路1 0 3印刷在本發明之鐵氧體所製成之 生胚上,並多層疊合而成為壓合胚體。 再經由燒結步驟5 0,將該胚體以適當之燒結溫度進行 燒結。該燒結溫度可在8 4 0°C至1 2 5 0°C之間,其中較合適 之燒結溫度為約在9 0 0至1 1 0 0°C。如此,即燒結成一使用 本發明之一種兼具南導磁率與南介電係數之鐵氧體10 4所 製成之單一材質的電感-電容複合組件。 以上所述者,僅為本發明其中的較佳實施例而已,並 非用來限定本發明的實施範圍;即凡依本發明申請專利範 圍所作的均等變化與修飾,皆為本發明專利範圍所涵蓋。Page 8 499399 V. Description of the invention (6) The content of the electronic component can be a laminated LC device 100 as shown in "Figure 4". First, a fine powder having an average particle diameter of 0.5 μm can be prepared according to the same steps as steps 10 to 30 in the above embodiment. Then, through the ferrite embryonic process steps 4 and 5, the powder is mixed with a binder to form a green embryo sheet. Then, the printing and stacking steps 4 and 6 are performed, and the conductor lines 1 0 3 required for forming the inductors 101 and capacitors 102 are printed on the green embryo made of the ferrite of the present invention, and the layers are laminated and combined. Become a compact embryo body. After the sintering step 50, the green body is sintered at an appropriate sintering temperature. The sintering temperature may be between 840 ° C and 125 ° C, and a more suitable sintering temperature is between 900 ° C and 110 ° C. In this way, a single-material inductor-capacitor composite component made of the ferrite 104 having both the south permeability and the south permittivity of the present invention is sintered. The above are only the preferred embodiments of the present invention, and are not intended to limit the scope of the present invention; that is, all equivalent changes and modifications made in accordance with the scope of the patent application for the present invention are covered by the scope of the patent for the present invention. .

499399 圖式簡單說明 【圖式簡單說明】 第1圖,為根據本發明之一種兼具高導磁率與高介電係數 之鐵氧體之導磁率與介電常數之實驗數據圖。 第2圖,為根據本發明之一種兼具高導磁率與高介電係數 之鐵氧體的製造流程圖。 第3圖,為利用根據本發明之兼具高導磁率與高介電係數 之鐵氧體材料,製作一積層L C元件之流程圖。 第4圖,為根據本發明之一積層LC元件之結構示意圖。 【圖式符號說明】 10 原料粉末調配步驟 20 混合步驟 30 預燒及研磨步驟 40 成形步驟 45 鐵氧體生胚成形步驟 4 6 印刷積層步驟 5 0 燒結步驟 1 00 積層LC元件 101 電感(L) 102 電容(C) 10 3 導體線路 1 0 4 鐵氧體499399 Brief description of the diagram [Simplified description of the diagram] Fig. 1 is an experimental data diagram of the magnetic permeability and dielectric constant of a ferrite having high magnetic permeability and high permittivity according to the present invention. FIG. 2 is a flowchart of manufacturing a ferrite having both high magnetic permeability and high dielectric constant according to the present invention. FIG. 3 is a flow chart of manufacturing a laminated LC device using a ferrite material having both high magnetic permeability and high dielectric constant according to the present invention. FIG. 4 is a schematic structural diagram of a multilayer LC device according to the present invention. [Illustration of Symbols] 10 Raw material powder preparation step 20 Mixing step 30 Calcination and grinding step 40 Forming step 45 Ferrite embryo forming step 4 6 Printing and laminating step 5 0 Sintering step 1 00 Laminating LC element 101 Inductance (L) 102 Capacitance (C) 10 3 Conductor line 1 0 4 Ferrite

第10頁Page 10

Claims (1)

499399 |Λ 1 口. ,/p^ 六、申請專利範圍1---一一一—一— 1. 一種兼具高導磁率與高介電係數之鐵氧體,在一電子元 件中除了作為導磁材料外並同時作為介電材料,其特徵 在於該鐵氧體的組成為Tix(MFe2〇4 + 2x/y)y’其中X + y= l’ 0 &lt; x&lt; 1,而Μ為選自於Μη、Ni、Cu、Zn所組成之族群中 的任何一種或多種金屬。 2. 如申請專利範圍第1項所述之兼具高導磁率與高介電係 數之鐵氧體,為導磁率2至2 2 6 0,介電常數1 7至2 7 7 5之 具二元性質之鐵氧體材料。 3. 如申請專利範圍第1項所述之兼具高導磁率與高介電係 數之鐵氧體,其組成之最佳配比為0. 0 0 3S xS 0. 1 5,此 時導磁率在5至1 3 0 0之間,介電常數5 0至2 7 5 0之間。 4. 一種兼具高導磁率與高介電係數之鐵氧體的製造方法, 其中該鐵氧體在一電子元件中除了作為導磁性材料,並 同時作為介電材料,至少包含下列步驟: 將T i 0 2、金屬Μ之氧化物以及F e 20 3之原料粉末,以滿 足T i x( MF e 2〇4+2x/y) y之組成比例調配並均勻混 合,其中x + y = l,0&lt; x&lt; 1,而Μ為選自於Mn、Ni、 C u、Ζ η所組成之族群中的任何一種或多種金屬; 將均句混合之原料粉末預燒後,磨成細微粉體; 將該粉體壓縮成形為所需之形狀;以及 以8 4 0至1 2 5 0°C之溫度將成形後之粉體燒結。 5 .如申請專利範圍第4項所述之兼具高導磁率與高介電係 數之鐵氧體的製造方法,其中之X值在0 . 0 0 3〜0 . 1 5之 間。499399 | Λ 1 口., / P ^ VI. Application for patent scope 1 --- one-one-one-- 1. A ferrite with high magnetic permeability and high permittivity, in addition to being used in an electronic component Outside the magnetically permeable material and at the same time as a dielectric material, it is characterized in that the composition of the ferrite is Tix (MFe204 + 2x / y) y 'where X + y = l' 0 &lt; x &lt; 1 and M is Any one or more metals selected from the group consisting of Mn, Ni, Cu, and Zn. 2. The ferrite with high permeability and high permittivity, as described in item 1 of the scope of patent application, has a permeability of 2 to 2 2 6 0 and a dielectric constant of 17 to 2 7 7 5 Elementary ferrite material. 3. The ferrite with high magnetic permeability and high permittivity as described in item 1 of the scope of the patent application, the optimal ratio of its composition is 0. 0 0 3S x S 0. 1 5. At this time, the magnetic permeability Between 5 and 1 3 0 0, the dielectric constant is between 50 and 2 7 50. 4. A method for manufacturing a ferrite having both high magnetic permeability and high permittivity, wherein the ferrite, in addition to being used as a magnetically permeable material in an electronic component and also as a dielectric material, includes at least the following steps: T i 0 2, the oxide of metal M and the raw material powder of F e 20 3 are formulated and uniformly mixed to meet the composition ratio of T ix (MF e 204 + 2x / y) y, where x + y = l, X &lt; 1, and M is any one or more metals selected from the group consisting of Mn, Ni, Cu, Z η; the raw material powder mixed with the homogeneous sentence is pre-fired and ground into a fine powder; Compress the powder into a desired shape; and sinter the powder after molding at a temperature of 840 to 125 ° C. 5. The method for manufacturing a ferrite having both high magnetic permeability and high dielectric coefficient as described in item 4 of the scope of patent application, wherein the X value is between 0.03 and 0.15. 第11頁 499399 六、申請專利範圍 6. 如申請專利範圍第4項所述之兼具高導磁率與高介電係 數之鐵氧體的製造方法,其中將該均勻混合之原料粉末 預燒的溫度為7 0 0至9 0 0°C。 7. 如申請專利範圍第4項所述之兼具高導磁率與高介電係 數之鐵氧體的製造方法,其中該細微細體的之粒徑在1 微米以下。 8. 如申請專利範圍第4項所述之兼具高導磁率與高介電係 數之鐵氧體的製造方法,其中該細微細體的之平均粒徑 為0 . 5微米。Page 11 499399 6. Scope of patent application 6. The manufacturing method of ferrite with high magnetic permeability and high dielectric constant as described in item 4 of the scope of patent application, wherein the uniformly mixed raw material powder is pre-fired The temperature is between 7 0 and 9 0 ° C. 7. The method for manufacturing a ferrite having both high magnetic permeability and high dielectric coefficient as described in item 4 of the scope of the patent application, wherein the particle size of the fine body is less than 1 micron. 8. The method for manufacturing a ferrite having both high magnetic permeability and high dielectric coefficient as described in item 4 of the scope of patent application, wherein the average particle diameter of the fine bodies is 0.5 micron. 第12頁Page 12
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