TW498321B - A recording method for optical super-resolution writing and magnetic flux detection - Google Patents
A recording method for optical super-resolution writing and magnetic flux detection Download PDFInfo
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498321 ν' , - ---案號 89121675 _¥ 月曰 絛4_ 五、發明說明(1) 發明的領域: 本發明係關於光寫磁讀之記錄媒體,特別是有關於一 種利用光學超解析寫入及磁通量偵測讀出之膜層結構及記 錄方法。 ° 習知技術: 更高的記錄密度是儲存媒體發展的趨勢,隨著記錄密 度的不斷增加,記錄跡(mark)將變得愈來愈小,光記錄二 體因光點大小受限於繞射極限不能無限地縮小,因為無法 檢測出比光點更小的記錄跡訊號,記錄密度的提升因此受 到限制。為了突破繞射極限的瓶頸,近場光學掃瞄式顯微 鏡(Near-field Scanning Microscope)及光學超解析 (Optical Super-Resolution Near-Fieid Structure)等 技術遂陸續被提出來應用於光記錄媒體。磁記錄媒體近年 來雖以60%甚至1〇〇%的速度增加記錄密度,但其記錄密度 的增加也將受限於超順磁極限(Super paramagnetic又 1 i m i t )而達飽和。 為了突破磁記錄媒體的超順磁極限,Hitachi公司於 1 9 98年,出了結合磁光碟及硬碟·技術的熱磁寫入、磁通量 偵測法續出的技術,即記錄松祖 、 、材料為磁光材料,利用傳統的 磁光寫入法記錄訊號、巨磁阻(GMR :以扣七 Magnetoresistance)薄膜磁頭谓測磁通量以讀出訊 以目前的磁光系統寫入最小的 I 4幻汛唬為〇 · 5 3 // m,記錄密度 達8· 36 Gbi t/in2。為了得至丨丨#^ ^ 「 行到更鬲的記錄密度,台大郭博 ;,成教授等人將突破繞射極限的卄 以的技術加入,提出了將固態浸498321 ν ',---- Case No. 89121675 _ ¥ Yue Yue 绦 4_ V. Description of the Invention (1) Field of the Invention: The present invention relates to a recording medium for optical writing and magnetic reading, and in particular to a method for writing by optical super-resolution Film structure and recording method for magnetic flux detection and reading. ° Known technology: Higher recording density is the development trend of storage media. As the recording density continues to increase, the recording mark will become smaller and smaller. The optical recording body is limited by the size of the light spot. The emission limit cannot be reduced indefinitely, because the recording trace signal smaller than the light spot cannot be detected, and thus the improvement of the recording density is limited. In order to overcome the bottleneck of the diffraction limit, technologies such as Near-field Scanning Microscope and Optical Super-Resolution Near-Fieid Structure were successively proposed to be applied to optical recording media. Although the magnetic recording media has increased the recording density at a speed of 60% or even 100% in recent years, the increase in the recording density will also be limited by the superparamagnetic limit (1 param) and reach saturation. In order to break the superparamagnetic limit of magnetic recording media, Hitachi Corporation in 1998 produced a technology that combined the thermo-magnetic writing and magnetic flux detection methods of magneto-optical disks and hard disks · technology, namely recording Songzu, ,, The material is a magneto-optical material. The traditional magneto-optical writing method is used to record signals, and the giant magnetoresistance (GMR: Magnetoresistance) thin-film magnetic head is used to measure the magnetic flux to read the signal. The smallest I 4 magic is written in the current magneto-optical system. The flood bluff was 0.53 // m, and the recording density was 8.36 Gbi t / in2. In order to obtain a higher recording density, Guo Bo from the National Taiwan University; Professor Cheng and others added the technology that breaks through the diffraction limit and proposed that the solid-state immersion
第5頁 498321 五、發明說明(2) 透鏡(SIL :Solid Immersion Lens)與巨磁阻薄膜▲頭 (GMR)結合技術,此技術利用固態浸沒透鏡得到比繞射極 限更小的光點以寫入更小的記錄跡訊號來提高記錄密度, 甚至將固態浸沒透鏡、磁線圈及巨磁阻薄膜磁頭等設計於 同一飛行器(S1 i d e r )上。此法的缺點為光學頭之物鏡必須 以小於雷射波長的高度(約1 〇 〇〜1 5 0 nm )飛行於碟片上,方 能產生近場(near f i e 1 d )效應,如此將增加光碟飼服系統 設計的複雜性。另外,將固態浸沒透鏡、磁線圈及巨磁阻 薄膜磁頭皆設計於同一飛行器(SI ider)上,整個飛行器將 因為太重而不易控制精確的飛行高度。 發明之概述: 本發明之目的為提供一種利用光學超解析寫入及磁通 量憤測讀出之磁片膜層結構及記錄方法,結合光學超解析 (Optical Super-Resolution Near-Field Structure)及 巨磁阻磁頭(GMR)甚至穿遂性磁阻磁頭(TMR :Tunneling ) 技術以突破光學繞射極限及超順磁極限來提高磁光碟片之 記錄密度’此技術僅需在磁光碟片上多鍍一層遮罩層 (mask layer)及一層中間層(interface iayer)即可達到 近场光學寫入效果,免除了將近場光學機構設計於飛行器 (SI ider)上增加其困難性的缺點。 為達成本發明之上述及其他目的,本發明提出一種利 用光i超解析寫入及磁通量偵測讀出之碟片膜層結構,包 括··一基板;一第一保護層,形成於該基板上;一遮罩 層’形成於該第一保護層上;一中間層,形成於該遮罩層 麵 0178-5708TW.ptd 第5頁Page 5 498321 V. Description of the invention (2) The combination of SIL (Solid Immersion Lens) and giant magnetoresistive film ▲ head (GMR) technology. This technology uses a solid-state immersion lens to obtain a light spot smaller than the diffraction limit for writing. Smaller recording trace signals are used to increase the recording density, and even solid-state immersion lenses, magnetic coils, and giant magnetoresistive film magnetic heads are designed on the same aircraft (Sider). The disadvantage of this method is that the objective lens of the optical head must fly on the disc at a height less than the laser wavelength (about 1000 ~ 150 nm) to produce a near-field (near fie 1 d) effect, which will increase Complexity of CD Feeding System Design. In addition, the solid-state immersion lens, magnetic coil, and giant magnetoresistive thin-film magnetic head are all designed on the same aircraft (SI ider). The entire aircraft will be too heavy to control the precise flight height. Summary of the invention: The object of the present invention is to provide a magnetic sheet film structure and recording method using optical super-resolution writing and magnetic flux reading, combined with optical super-resolution near-field structure and giant magnetism GMR and even truncated magnetoresistive head (TMR: Tunneling) technology to break the optical diffraction limit and superparamagnetic limit to increase the recording density of magneto-optical discs. This technology only requires an additional layer of shielding on the magneto-optical discs. A mask layer and an interface iayer can achieve the near-field optical writing effect, eliminating the disadvantage of designing the near-field optical mechanism on a SI ider to increase its difficulty. In order to achieve the above and other objectives of the present invention, the present invention proposes a disc film layer structure using optical i super-analytic writing and magnetic flux detection readout, including a substrate; a first protective layer formed on the substrate A masking layer is formed on the first protective layer; an intermediate layer is formed on the masking layer 0178-5708TW.ptd page 5
五、發明說明(3) 上;一記錄層,形成於該中間層上;一 、 於該記錄層i ;以及一濁滑層,形成於今^保護層,形成 本發明另提出一種利用光學;弟-保護層上。 讀出ΐΐ:方*,包括:-膜層結構,依d量谓測 第一保濩層、一遮罩層、一筹依序為一基板、一 護層及一潤滑層;一光風 a 3 、一記錄層、一第二保 與一磁線圈位於該膜層=端於該基板端;以及一讀取頭 為了讓本發明之上 明顯易懂,下文特舉_2其他目的、特徵、和優點能更 古兒明如下。 又戶、施例,並配合所附圖表,詳細 圖式之簡單說明: 第1圖係顯示本於日日〜 圖。 x月貫施例之碟片膜層結構之示意 第2圖係顯示太级 符號說明: *月具施例之記錄方法之示意圖。 I 0〜基板; 30〜遮罩層; 5 0〜記錄層; 7 0〜第二保護層; 9 0〜磁化方向; II 0〜雷射光點大小 1 3 0〜磁線圈; 1 5 0〜透鏡; 1 7 0〜訊號跡。 搞: 2 0〜第一保護層; 40〜中間層 6 0〜讀取層 80〜潤滑層 1 0 0〜讀取頭; ;1 2 0〜遮罩層所開的孔徑; 1 4 0〜飛行器; 1 6 〇〜雷射光; 0178-5708TW.ptd 第6頁 498321 五、發明說明(4) 較佳實施例: , 本發明主要為利用光學超解析及磁通量㈣技術以突 破光學繞射極限及超順磁極限的限制來提高記錄媒體之記 錄密度。本發明實施例之利用光學超解析寫入及磁通量# 測讀出之膜層之製造程序如下·· 、 製程開始首先準備-基板10,此基板可為玻璃或聚碳 馼酯(Polycarbonate),其次,於基板1〇上濺鍍形成一第 -保護層20。之後’力第一保護層2〇上減鑛形成一遮罝層 (mask layer)30。再於遮罩層3〇之上依序 間 (interface layer)40 > e (rec〇rding 取層(readout layer)60(選用)、第二保護層7〇以及利用 旋轉塗佈形成潤滑層(iubricant layer)8〇。其中第一保 護層20、第二保護層7〇及中間層4〇之材料可為氮化矽1 (:iN),遮罩層30之材料可為銻或氧化銀,記錄層5〇之材 =可為铽、鐵及鈷之合金(TbFeC〇),讀取層6〇之材料可 為鏑、铽、鐵及鈷之合金(DyTbFeC〇),保護層8〇可藓 旋轉塗佈而形成。此膜層結構如第1圖所示。 9V. Description of the invention (3); a recording layer formed on the intermediate layer; one on the recording layer i; and a turbid slip layer formed on the present protective layer to form another use of optics of the present invention; brother -On the protective layer. Read ΐΐ: square *, including:-film structure, measure the first protective layer, a masking layer, a substrate, a protective layer and a lubricating layer in order according to d; a light wind a 3, A recording layer, a second protection, and a magnetic coil are located at the film layer = end at the substrate end; and a read head is provided for the purpose of making the present invention obvious and easy to understand, and other purposes, features, and advantages are enumerated below_2 Can be more ancient as follows. In addition, the examples and the accompanying diagrams are used to explain the detailed drawings briefly: Figure 1 shows the date from the day to the day. Schematic diagram of the disc film layer structure of the x-month embodiment. Figure 2 shows the prince symbol. Explanation: * A schematic diagram of the recording method of the month embodiment. I 0 ~ substrate; 30 ~ mask layer; 50 ~ recording layer; 70 ~ second protective layer; 90 ~ magnetization direction; II 0 ~ laser spot size 1 3 0 ~ magnetic coil; 150 ~ lens ; 1 70 ~ signal trace. Engage: 2 0 ~ first protective layer; 40 ~ intermediate layer 6 0 ~ reading layer 80 ~ lubricating layer 1 0 ~ reading head; 1 2 0 ~ aperture opening of the mask layer; 1 4 0 ~ aircraft 16 0 ~ Laser light 0178-5708TW.ptd Page 6 498321 V. Description of the invention (4) Preferred embodiments: The present invention mainly uses optical super-resolution and magnetic flux chirp technology to break the optical diffraction limit and The paramagnetic limit is limited to increase the recording density of the recording medium. In the embodiment of the present invention, the manufacturing process of the film layer using optical super-analytic writing and magnetic flux # measurement readout is as follows. The preparation of the process begins with the preparation of a substrate 10, which may be glass or polycarbonate, followed by A first-protective layer 20 is formed on the substrate 10 by sputtering. After that, the first protective layer 20 is demineralized to form a mask layer 30. Then on the mask layer 30, an interface layer 40 > e (rec〇rding readout layer 60 (optional), a second protective layer 70, and spin coating to form a lubricating layer ( iubricant layer) 8. The material of the first protective layer 20, the second protective layer 70, and the intermediate layer 40 may be silicon nitride 1 (: iN), and the material of the masking layer 30 may be antimony or silver oxide. Material of recording layer 50 = alloy of rhenium, iron, and cobalt (TbFeC〇), material of reading layer 60, alloy of rhenium, rhenium, iron, and cobalt (DyTbFeC〇), protective layer 80 It is formed by spin coating. The structure of this film is shown in Figure 1. 9
一本發明以磁光碟片為記錄媒體,其記錄方法如第2圖 ::虚記錄層5 0之材料的磁化方向9 〇為垂直/面以提“ 錄始度’讀取層60為一層磁通量放大的讀取層以利於讀取 頭的訊號讀取,在記錄層50與基板10間則加鍍一層貝遮 罩層30 ’此遮罩層3〇可在雷射光16〇照射下,開一小^雷 射光點110之孔徑(Aperture) 120以縮小雷射光點大小寫田入 更小的訊號跡1 7 0。本發明的讀取頭1 〇 〇結合礤線圈In the present invention, a magneto-optical disc is used as a recording medium, and the recording method is as shown in FIG. 2 :: The magnetization direction of the material of the virtual recording layer 50 is 90% perpendicular to the surface to increase the "recording degree" and the reading layer 60 is a magnetic flux The enlarged reading layer facilitates the signal reading of the reading head, and a shell mask layer 30 is added between the recording layer 50 and the substrate 10. The mask layer 30 can be opened under the irradiation of laser light 16 Small ^ Aperture 120 of the laser light spot 110 reduces the size of the laser light spot and enters smaller signal traces 170. The reading head 100 of the present invention is combined with a coil
第7頁 0178-5708TW.ptd 498321 五、發明說明(5) ; (magnetic coil)130設計於锻膜側’磁線圈WO及讀取頭 100是位於同一飛行器140上,讀取頭1〇〇可為磁阻薄膜磁 頭(MR)、巨磁阻薄膜磁頭(GMR)或穿遂性磁阻薄膜磁頭 (TMR)。光學頭則設計於基板側,標號15〇為透鏡,雷射光 160之波長可為紅光(65〇nm)或藍光。 雖然本發明已以較佳實施例揭露如上,铁 限定本發明,任何熟習此技藝者, 二二亚g用以 和範圍内,當可作些許之更動=不脫離本發明之精神 範圍當視後附之申請專利範園所ς定者=本發明之保護Page 7 0178-5708TW.ptd 498321 V. Description of the invention (5); (magnetic coil) 130 is designed on the forged film side. The magnetic coil WO and the reading head 100 are located on the same aircraft 140, and the reading head 100 may It is a magnetoresistive thin film magnetic head (MR), a giant magnetoresistive thin film magnetic head (GMR) or a puncture magnetoresistive thin film magnetic head (TMR). The optical head is designed on the side of the substrate. The reference number 15 is a lens. The wavelength of the laser light 160 may be red light (650 nm) or blue light. Although the present invention has been disclosed in the preferred embodiment as above, the present invention is limited by the iron. Anyone skilled in this art can use it within the range. When it can be changed slightly, it will not deviate from the spirit of the present invention. Attached to the patent application park = the protection of the present invention
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