TW497196B - Automatic inspecting device for the plugging position of font-opening unified pod - Google Patents

Abstract

An automatic inspecting device for the plugging position of font-opening unified pod (FOUP) is disclosed, which is used for detecting whether the gate of the FOUP plugging hole is consistent to ensure that the system won't be crashed down when the wafer is transferred to the next processing equipment. The automatic inspecting device for the plugging position of FOUP can be applied in the top suspension transmission system, and the correctness of the position of the plug hole gate can be simultaneously detected in the process of transferring the wafer. Furthermore, sensors and indicator lamp are utilized to detect which plugging hole or gate is wrong, so that the gate with wrong position can be moved back to the correct position using plug. Thus, the damage of plugging hold or gate of FOUP can be prevented, and the number of times that the machine is crashed down can also be reduced.

Description

497196 A7 B7 V. Description of the invention (Field of the invention: The present invention relates to inspection elements for wafer gates, and in particular to automatic inspection elements for wafer gate insertion hole pick-up positions. Printed and invented by the Consumers ’Cooperative of Intellectual Property Bureau, Ministry of Economic Affairs Background: Integrated circuit is an electronic product that reduces various electronic components and circuits required for a specific circuit to an area of less than 2 square centimeters. It not only has a multi-layer structure, but also includes multiple processes. It depends on the structure required by different products. Various processes such as film deposition, lithography, money engraving, and diffusion are sequentially performed on the Shixi substrate. Various processes5 are prepared and can be divided into multiple machines based on their different functions. Therefore, they must often be processed in different processes, machines, and Wafers are transferred between wafer storage locations for integrated circuit fabrication. Based on the convenience of integrated circuit fabrication, wafers are usually referred to as a batch of 25 wafers. Therefore, in order to cooperate with each transfer or manufacturing Action, put a batch of wafers into a container, this volume Is is called a wafer gate (Front-Opening Unified Pod; FOUP). Manufacturing of integrated circuits requires It is carried out in a clean room, and it is known that before production is not automated, it is necessary to manually transfer wafers between the machine and the storage to transfer the wafers. In this way, it is not only labor-intensive but also time-consuming. The bottleneck exists. Therefore, there is the use of mechanical transmission systems' Figure 1 shows the manufacturing of integrated circuits with two top-hanging transmission systems 2 This paper size applies to China National Standard (CNS) A4 specifications (210 X 297 Meal) Please read Back & Precautions 4

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III Order 497196 A7 V. Description of the invention (Dust-free schematic diagram. Please refer to Zhao 1 ># 加 制 爸爸 ..., younger 1 picture, there are several process equipment 10 and wafer 1A in the integrated circuit manufacturing clean room , ”Japanese yen storage area 12. Among them, regardless of the process equipment 10 and the wafer storage area 12, there are loading places for wafer gate loading and unloading. 4. There is no top suspension conveyor system. Before the first appearance, all operators need to rely on the operator 18 to pick up the supply in the blood storage place 12 and the wafer gates are manually moved between the Λ and δ tables.士 a in μ + & 平 卞 # The wafer is transferred from the aa round storage to the first process 5 and the machine σ is prepared. When the wafer has completed this process step, the wafer is transferred to the first 1 The process did not prepare the machine, and then the wafer was transferred to the third process equipment machine, so that the wafer is completed. Such an action consumes manpower and time. It is also very difficult to plan the integrated circuit manufacturing process, not only Consider the flow of each process and monitor the flow of each batch of wafers β (read first Note on the back, please fill out this page again.) I.-Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Therefore, the current integrated circuit manufacturing is mostly installed in a clean room with a mechanical transmission system such as a top suspension transmission system 20. The overhead suspension conveying system 20 is composed of a plurality of safety lanes 22 installed securely on the ceiling adjacent to the processing equipment 10 and the wafer storage space. These rails 22 are connected to the processing equipment 10 and the wafer storage. It is placed at the position of 12 and the top suspension conveying system 20 has a plurality of main bodies 26 for grasping the wafer gate. The suspension member 2 8 is connected to the movable carrier 24 on the lane 22. ' Moving the carrier can drive the wafer gate. Using the top suspension transfer system 20, the wafer box 16 can be picked up and moved between the wafer storage 12 and the processing equipment. The operator can go to the operator. 1 8 Disadvantages of time-consuming and labor-intensive transportation. This paper size applies to China National Standard (CNS) A4 (210 x 297 public love)

ϋ ϋ J ^ eJ · innnnnn I # · 497196 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7-~ ----- V. Description of the invention () The purpose and summary of the invention: In view of the above background of the invention, Wafer gate process_ Whether the wafer gate is moved from the wafer storage to the processing equipment, or is manufactured by one of the processing equipment and transported to the other processing equipment, the machine will be closed and locked. The action of the round gate is to close the state of the wafer gate that can originally take the wafer. However, because there are two openings in the latching hole of the wafer gate, it is easy to cause the machine to close the wafer gate and only enter the first gate. When the wafer gate is transported from the top suspension transfer system to another process equipment, an error will occur when the process equipment performs the opening operation. At this time, the two gates must be manually adjusted to the same position before proceeding to the next operation. Such repetitive situations can easily cause damage to the wafer gate plug holes. Therefore, the object of the present invention is to provide an automatic inspection component for the insertion position of the wafer cassette, which can automatically detect before the wafer gate is sent to the next process equipment to ensure that the position of the gate of the wafer gate insertion hole is correct. . Yet another object of the present invention is to provide an automatic inspection element that can be directly applied to the insertion position of a wafer cassette on the main body of a top suspension transfer system, and can simultaneously detect the insertion hole gate during the process of grasping and transporting the wafer gate. Location correctness. According to the purpose described above, the present invention provides a wafer cassette insertion position, and the paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 meals) ------ ^ 丨 丨 丨 丨 --- ---- Order --------- (Please read the precautions on the back before filling this page) 4 ^ 7196 V. Description of the invention () The automatic inspection components are placed, including two columns that are parallel to each other Each pillar has a screw, and a cross bar is sleeved on the two pillars' screws to 'form a gate-like or Η-shaped element', and this cross-rod is in An end which is not in the same direction as the screw and has a plug capable of opening and closing the wafer gate opening. Among them, the pillar may further have a rigid sensor and a display lamp 'connected to the monitoring device to monitor the condition of the plug. In addition, depending on the operator's needs, two pillars are connected to the τ bay part suspension conveyor system of the wafer gate, or a tenon is provided on the non-screw end of the two pillars to fix the wafer. One side of the brake. The method of using the automatic inspection element of the wafer cassette insertion position of the present invention is as follows: The wafer gate is placed in the automatic inspection element, so that the gate opening of the wafer gate faces the cross bar. At this time, the tenon can be used to fix the wafer gate. The gateless side prevents the wafer gate from being removed by the notched end of the gate shape of the automatic inspection component. Next, push the crossbar toward the gate, and the plug on the crossbar can enter the pick-up hole of the wafer gate. Using the indicator light on the crossbar to detect the plugging status, we can know whether the plugging has encountered an obstacle in the plugging hole, and then cooperate with the sensor on the pillar to detect the plugging position. , It can be judged that when the tether is tied to the first or second gate, it encounters an obstacle. Subsequently, the wrong position of the gate is returned to the correct position manually by using a plug. By using the automatic inspection component of the insertion position of the wafer cassette of the present invention, damage to the insertion holes or gates of the wafer gate can be avoided, and it is not necessary to wait for the machine to issue an error. The paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) Please read the note of back Φ first

Fill out this page Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 497196 A7 ___B7_ V. Description of the invention () Correct the information when it is in order to reduce the time to restore the machine and increase the smoothness of production. Brief description of the drawings: The preferred embodiment of the present invention will be described in more detail in the following explanatory text with the following figures, in which: Figure 1 shows a product equipped with a top suspension transmission system Schematic diagram of clean room for circuit manufacturing; Figure 2 shows a cross-sectional schematic diagram of a top suspension transfer system; Figure 3 shows a schematic diagram of an open wafer cassette; Figure 4 does not show a closed wafer It is not intended that FIG. 5 shows a schematic diagram of the automatic inspection component of the cassette insertion position of the present invention; and FIG. 6 shows the automatic inspection component of the cassette insertion position of the present invention applied to the top suspension Schematic diagram of the transmission system. Drawing number comparison explanation: Please read the note of S]

1 «Reload page IIIIII Order Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Co-operative Printing 10 Process Equipment 12 Wafer Storage 14 Loading Place 16 Wafer Box 18 Operator 20 Top Suspension Conveying System This paper applies the Chinese national standard (CNS) ) A4 specification (210 X 297 mm) 497196 A7 _ B7 V. Description of the invention (22) Road 26 Main body 40 Process equipment 44 Wafer box 48 Carrier 52 Main body 80 Wafer gate main body 84 Handle 88 Wafer gate 9 0b Pick-up hole 102 mortise 106 Sensor 110 Post 120 Cross bar 124 Plug 128 Light indicator 132 Light indicator 24 Carriage 28 Suspension member 42 Loading place 46 Rail 50 Suspension member 54 Position connection element 82 Wafer 86 Connection point 90a Plug hole 100 Post 104 Screw 108 Sensor 1 12 Tenon 122 Insert 126 Indicator 130 Indicator < Please read the notes on the back first: fill in this page) Printed by the employee's consumer cooperative of the property bureau 200 The main body of the top suspension conveyor system 202 Suspension member 203 Protection device 204 Wafer gate 206 Inspection element 207 Cross bar 208 Plug hole 2 10 Bolt hole 212 Bolt 214 Bolt The paper size is applicable to the Chinese National Standard (CNS) A4 gauge (210 X 297 mm) 497196 A7 B7 5. Description of the invention (Detailed description of the invention: Figure 2 shows the top A schematic diagram of the suspension conveying system, Fig. 4. Referring to Fig. 2, the wafer gate 44 is located at the loading point 4 of the process supply 40, and the process equipment 40 has a top suspension conveying system above the ceiling. Among them, the growth of the suspension member 50 is used to lower the main body and the style 52 and to grab the 1st gate 44. Then, the suspension member 50 is shortened to raise the main body. At the same time, the wafer is also taken to the ceiling. Direction (as shown by the dotted line), and then move the wafer gate to the place required by the process along the gangway 46 by the poison carrying rack 48. :: The component 50 is a metal wire that can bear the weight of the main body, wafer and wafer gate. ^ The winding device in the conveying rack 48 can control the suspension members: the main body is raised and lowered. Using the top ㈣ conveying system, = section: labor costs, and can also automate production. Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Figure 3 shows the opening The schematic diagram of the wafer is shown in Figure 4, and the closed cassette is shown in Figure 4. Please refer to Figures 3 and 4, where in the integrated circuit manufacturing, the wafer 82 processed in each operation is usually A batch is used as a unit, and a batch is usually 25 pieces, which is embedded in the wafer gate body 80 as shown in FIG. 3. The wafer gate main body 80 is generally semi-cylindrical, and is provided with a handle 84 next to it for easy access by the operator. The robotic arm can take wafers one by one from the opening of the wafer gate for manufacturing. After the entire batch is manufactured, the machine will close the gate 88, and use the plug to insert the paper from the plug. The paper size applies the Chinese National Standard (CNS) A4 (210 X 297 mm) 497196 A7 B7 V. Description of the invention (The 90a and the socket 90b are locked to prevent falling during handling. In addition, besides the wafer gate, it can be connected and transported from the connection point 86 and the top suspension transfer system. Please refer to Figure 1 and Figure 1 again The reason is shown as a schematic diagram of the integrated circuit manufacturing clean room equipped with a top suspension transfer system. The integrated circuit manufacturing clean room has several process equipment 10 and wafer storage 12. Each process The equipment 10 and the wafer storage area 12 each have a wafer gate loading location 1 4 'This loading location can be used by the machine to pick up and place wafers. In addition, the top suspension transfer system 20 is installed adjacent to the process equipment 10 It is used to transfer the wafer gate between the processing equipment 10 and the wafer storage 12 on the ceiling of the wafer storage 2. The overhead suspension transfer system 20 is composed of a plurality of rails 22 that are safely installed on the ceiling. These rails 22 are connected with process equipment 丨 〇 and crystal The storage place 12 is located. Among them, the top suspension conveying system 20 has a plurality of main bodies 26, and these main bodies can grasp the wafer gate and use the movable members 28 and the movable handling on the lane 22. The rack 24 is connected. The top suspension transfer system 20 ′ can be used to freely pick and move the wafer cassette 16 between the wafer storage 12 and the process equipment 10, which can save the time-consuming and labor-intensive shortcomings caused by the operator 18's handling. Please read the back 1 first Note 1 I want to win 1 Fill in this page k

I order IIIIII. I Φ Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs during the transfer of wafer gate 16 regardless of whether wafer gate 6 is moved from wafer storage 12 to process equipment 10 or by One of the process equipment 10 will be shipped to the other process equipment after manufacturing, the machine will perform the action of closing and locking the wafer gate, that is, the original wafer can be taken out of the wafer as shown in Figure 3

497196 A7 B7 V. Description of the invention (Circular interrogation state 'After closing, it becomes the wafer interrogation state as shown in Figure 4. However, due to the two general interrogation gates of the plug-in hole of the general wafer, "the machine executes the shutdown The plug of the round question only enters the first door and asks if the door is locked. When the wafer is opened and transported by the top suspension conveyor system to another process equipment, an error will occur when the process equipment performs the opening operation. The two gates are adjusted to the same position, and then the next movement is performed. Such a repetitive situation can easily cause the damage of the wafer gate plug holes. This is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, and the present invention provides a crystal The automatic inspection component of the cassette insertion position can be automatically detected before the wafer gate is sent to the down-process equipment to ensure that the gate position of the wafer gate insertion hole is correct. Please refer to FIG. 5 and FIG. 5 The reason is shown as a schematic diagram of the automatic inspection component of the cassette pick-up position of the present invention. Among them, the component of the present invention is composed of two pillars 100 and 110 each having a screw and a socket, and is sleeved on the pillar. 1〇〇 It is similar to the gate-shaped element formed by the crossbar 1 2 0 of the pillar 1 10, and the pillars 〇〇〇 and 110 have a tenon 102 and a tenon 112, respectively. After entering, the tenon 102 and the tenon 1 12 are used to fix the position of the wafer gate. At this time, the gate position of the wafer gate is facing the crossbar 1 2 0. Then, push the crossbar 1 2 0 in the direction of A. The plug 1 2 2 and the plug 1 2 4 on the component can enter the plug hole of the wafer gate. When the plug 1 22 or the plug 1 24 enters the plug hole and encounters an obstacle, the crossbar can be used. The indicator light 126 and indicator light 128 on the plug 122 on the 120 and the indicator light 130 and indicator 132 on the plug 124 are used to determine which plug has encountered an obstacle. In the embodiment of the present invention, the paper size Applicable to China National Standard (CNS) A4 specification (210 X 297 mm) Please read the note on the back and fill in this page to bind 497196 A7 B7 V. Description of the invention () Indicator light 1 2 6 and indicator light on the crossbar 1 2 0 1 3 0 is green light, indicator light 1 2 8 and indicator light 1 2 2 are red light. When the component of the present invention is activated, the green indicator light will be affected. When the plug encounters an obstacle, the green light is off and the red light is on. So you can know which of the plug holes in the wafer gate has different gate positions. Then the sensors on the pillar 100 and the pillar 110 For example, sensor 1 06 and sensor 1 08, this sensor can detect the plug position, so that it can be judged that the plug encountered an obstacle when it was tied to the first or second gate. Then Then, manually use the plug to adjust the wrong position of the gate to the correct position. The automatic check element of the cassette plug position of the present invention can be directly applied to the main body of the top suspension transfer system. During the process of grasping and transporting the wafer gate, the correctness of the position of the bolt hole gate can be detected simultaneously. Figure 6 illustrates the application of the automatic inspection component for the position of the cassette plug of the present invention to the top suspension conveyor system. Please refer to FIG. 6, in which the main body of the top suspension transmission system 200 is connected to the carrying rack by a suspension member 200 and the ceiling's way. Protection device 203. Next, the automatic inspection element of the insertion position of the wafer cassette of the present invention is connected to the main body 200 of the top suspension transfer system and printed by the consumer co-operative society of the Intellectual Property Bureau of the Ministry of Economic Affairs, printed on 2003, and then used as described above. Then, the cross bar 2 07 is moved, and the plug position 212 and the plug 214 on the cross bar 2 07 are inserted into the plug holes 208 and 2 10 of the wafer gate 204 for gate position detection. This paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 mm) 497196 A7 __— —_B7 V. Description of the invention () For the automatic inspection component of the cassette plug position of the present invention, please refer to Figure 5 The positions of the tenon 10 and the tenon 1 12 can be moved according to the size of the wafer gate, and the position and length of the screw 104 in the component, the position of the sensor, and the length position of the plug 1 22 and the plug 24 It can be adjusted depending on the position and depth of the plug holes in the wafer gate. In addition, the indicator light on the screw 104 can be changed according to the needs of use. The above descriptions are merely examples, and the present invention is not limited thereto. By using the automatic inspection component of the wafer inspection position of the present invention, damage to the insertion holes or gates of the wafer gate due to machine movement or manual adjustment can be avoided, and gate errors can be detected early. Correct the information again, which can reduce the time to restore the machine and increase the smoothness of production. As will be understood by those familiar with this technology, the above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the patent application for the present invention; all others completed without departing from the spirit disclosed by the present invention, etc. Effective changes or modifications should be included in the scope of patent application described below. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is sized to the Chinese National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

497196 A8 B8 C8 D8 The scope of the patent application is two, and the line is flat, and the cross-rods are screwed together.-Less: Including the element with a small end to one, check the column to check the position. Socket-shaped insert box round crystal UQuI Some of the facing rods cross one of the above> ο The upper rod is inserted with a screw 1 or as few as there is, and the end sleeve is placed one rod and the other one is horizontal. Home. Bits and bolts are locked in a box with a small circle to Jingyou's description of the items described in the first column. Fan Shangli technical secondary school, please apply, such as yuan 2 check and check from the position C. The box feels round and has a crystal with a description of the items described in the first column of the first paragraph Fan Shangli technical secondary school, please apply, such as the yuan 3 check the position of the anchor. Insert the light box to show 8 ^ 日 日 才 晶 J's description with the above-mentioned pole 1 horizontal section Fan Shangli technical secondary school, please apply, such as Yuan 4 check and check: the first in the package, , Object No. 2 Column Check, No. 2 Check, Move No. 1 Column, No. Socket, No. 1 Box, No. 1 Round Crystal Line, Flat No. 5 Phase (Please read the note on the back first_Fill this page)-Install the intellectual property of the Ministry of Economic Affairs Bureau employee consumer cooperatives printed the same object-shaped column two first and rod screw one and the first one; with rod with screw end two 1 the first thing has a shape with a column and also one end is less to the middle with its upper end The first pole of the second screw and the second pole of the screw and the first pole of the second screw are connected to the pole sleeve and the first pole of the second screw. One-way pick-up pin 1 This paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm) 497196 A8 B8 C8 D8 Patent application scope Round with card crystal on the second article of the first state \ 枉 枉 minor items \ Straight 5th of the first paragraph of the circle on the upper side of the material and the state of the state, please apply for it, one by one to apply for the first 6 and check In the moving tenon, it is checked and inspected. Positioning device for positioning measurement. Insert a box with the description of the objects on the round crystal. The 5th section of the description. Fan Shangli Specialist please, please. Positioning the device to measure the sense of feu 捃 A box with a round shape on the crystals described in Item 2 of the 5th paragraph Fan Hezhong asked the application such as Yuan 8 to check it (please read the precautions on the back first) ^: Fill in this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs9. The automatic inspection component of the cassette insertion position as described in item 5 of the scope of patent application, wherein the above-mentioned crossbar has an indicator light. 1 〇. — An automatic inspection element for the insertion position of a wafer cassette is used to transport a top suspension transfer system of a wafer gate. The automatic inspection element for the insertion position of the wafer cassette includes at least: The 1, 1, and the snails of the rod are shaped like one and the other. The pole is tied to the pole one by one; the screw is inserted with the pole 211 and the end with the least number of snails. The second and the unified ties are connected with the rod and the screw is conveyed. One of the hanging poles is also suspended at the mouth. The sleeve on the top of the opening is connected to the connecting rod at the top of the connecting rod, which is transverse to the connecting rod. It is a two-sided column. The paper size applies to Chinese National Standard (CNS) A4 specifications ( 210 X 297 Public Love> 497196 AS B8 C8 D8, patent application scope 1 1. The automatic inspection element of the cassette insertion position as described in the patent application scope item 10, wherein the above-mentioned first pillar has At least one first tenon, and the second post has at least one second tenon. 1 2 · The automatic inspection element for the cassette insertion position according to item 10 of the patent application scope, wherein A sensor is provided on the first pillar. 1 3 · The automatic inspection element for the insertion position of the cassette as described in Item 10 of the patent application scope, wherein the second pillar has a sensor on it. 14. According to the patent application scope item 10 described in Check the components, among which there is an indicator light on the above-mentioned crossbar. ------ f --- · --- install -------- order ------ (please read the back first Note: $ Fill this page) Printed by the Intellectual Property Bureau of the Ministry of Economy, Employee Consumer Cooperatives 15 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)