491955 A7 B7 五、發明説明（1 ) 本發明係闞於液晶板之製造裝置，詳情是關於，將夾 裝有熱硬ft性樹脂之封閉材料之上下玻璃基板加熱、加壓 ，令該封閉材料硬化，Μ形成確保一定空隙之液晶板之製 造裝置。 液晶板（LCD)係在塗敷透明導電性電極之兩片玻璃基 板間，夾裝數之隔材，在兩片玻璃基板間保持一定之 間隔，而在兩玻璃基板間之周圍用封蘭材區劃之內側空間 内封裝液晶而成，其兩片玻瑞基板係藉對位標誌正確粘貼 在一起。 而構成液晶板之兩片玻璃基板，係在其一方之玻璃基 板上分散間隔材，另一方之玻璃基板之內面（面向一方之 玻璃基板之面）則安裝有熱硬化性樹脂之封閉材料，再藉 粘貼裝置對準上下玻璃基板之位置標誌，將其粘貼在一起 ，同時暫行固定之，使上下玻璃基板不致於分離開。而粘 貼在一起並暫行加K固定之兩片一组之玻璃基板則經過加 熱、加壓處理，將上下玻璃基板間之封閉材加壓到基板間 之空隙縮小到間隔材料之粒徑大小，而使該封閉材料硬化。 該傳統之用Μ使封閉材料硬化之裝置，係Μ可撓性材 料覆蓋粘貼後暫行固定之兩片一組玻璃基板之至少一方之 基板，將收容液晶板之容器內減壓，或從容器外部加壓， 而Μ這種狀態固定基板。因採上述架構，可在基板加上均 勻之壓力。而Κ可撓性材料將基板加壓之裝置，其加壓之 均勻性較使用剛性高之夾盤之裝置改善很多，因空隙不良 引起之顯示不均減少很多。 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） (請先閱讀背面之注意事項 --裝-- 本頁) 訂 經濟部中央標準局員工消費合作社印製 491955 經濟部中央標準局員工消費合作社印製 Α7 Β7 五、發明説明（2 ) 而關於加熱方法，日本國特開平5- 2 3 2 4 2 0號之提案 是，在夾壓兩片一組基板之上下夾盤配置加熱裝置，俾能 對整個板面加熱，依據此架構時，較使用爐内之加熱器對 液晶板側面加熱之方法，其高速加熱性，及均熱均獲得改 善。 惟，夾盤之一方將用可撓性構件時，上、下基板間之 空隙不良是可K有某種程度之改善，·但卻無法防止上、下 基板之横方向錯開，或基板之扭曲。尤其是為了提高生產 性而在一個容器內並排兩組液晶板時，横方向錯開之情形 不少。 而在上、下夾盤配置加熱裝置之裝置，因為是從上下 方傳熱，扭曲之情形比較少，但是仍無法防止上、下基板 間發生幾個μ®前後之偏移，而隨着液晶性能之提昇，這 種位置準確度會愈嚴格，基板之偏移已達無法容忍之值。 而且，經過實驗结果顯示，在傳統構造時，將兩片一組之 玻璃基板配置在偏離夾盤中心，或並排配置多數小基板時 ，基板之偏移會比配置在夾盤中心時大。從這些實驗结果 獲知，因上下夾盤之熱膨脹係數之差，或因上下夾盤及夾 盤之位置所產生之夾盤與基板間之摩擦係數之差，使夾盤 一基板間，基板一基板間發生剪斷力，尤其是僅周緣部用 封閉材料接合之上、下基板間，最容易釋放剪斷力，而在 上、下基板間發生基板之偏移，錯開。而且在傳統裝置， 要確保均熱性時，Μ加大上下加熱裝置之熱容量較為有效 ，但卻有犧性掉加熱，冷卻速度之間題。尤其是考盧量產 -5- 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） •裝-- (請先閱讀背面之注意事寫本頁) 訂491955 A7 B7 V. Description of the invention (1) The present invention relates to a manufacturing device for a liquid crystal panel. The details are related to heating and pressing a glass substrate above and below a sealing material sandwiched with a thermo-hard ft resin to make the sealing material. It is hardened and M forms a device for manufacturing a liquid crystal panel with a certain gap. The liquid crystal panel (LCD) is between two glass substrates coated with transparent conductive electrodes, sandwiching a number of spacers, maintaining a certain distance between the two glass substrates, and using a sealing material around the two glass substrates. The inner space of the zoning is encapsulated with liquid crystal, and its two Borui substrates are correctly pasted together by the alignment mark. The two glass substrates constituting the liquid crystal panel are dispersed spacers on one glass substrate, and the inner surface of the other glass substrate (the surface facing one glass substrate) is provided with a sealing material of a thermosetting resin. Align the position marks of the upper and lower glass substrates with the sticking device and paste them together while temporarily fixing them so that the upper and lower glass substrates cannot be separated. The two sets of glass substrates that are pasted together and temporarily fixed by K are heated and pressurized to pressurize the sealing material between the upper and lower glass substrates to the gap between the substrates to the particle size of the spacer material. This sealing material is hardened. The conventional device for hardening the sealing material with M is a flexible material covering at least one of the two sets of glass substrates temporarily fixed after being pasted, and decompressing the inside of the container containing the liquid crystal panel, or from the outside of the container. The substrate is fixed while being pressed. Due to the above structure, even pressure can be applied to the substrate. In the device where the flexible material presses the substrate, the uniformity of the pressure is much better than that of a device using a highly rigid chuck, and the display unevenness caused by poor gaps is greatly reduced. This paper size applies to China National Standard (CNS) A4 specification (210 × 297 mm) (Please read the precautions on the back-installation-this page) Ordered by the Central Standards Bureau of the Ministry of Economic Affairs and Consumer Cooperatives for printing 491955 Central Standards Bureau of the Ministry of Economics Printed by the employee consumer cooperative A7 B7 V. Invention description (2) As for the heating method, the proposal of Japanese Unexamined Patent Publication No. 5- 2 3 2 4 2 0 is to arrange the heating on the chuck above and below the two sets of substrates. The device can not only heat the entire surface of the panel. According to this structure, compared with the method of heating the side of the liquid crystal panel using the heater in the furnace, its high-speed heating performance and soaking are improved. However, when one of the chucks will use a flexible member, the gap between the upper and lower substrates can be improved to some extent, but it cannot prevent the lateral direction of the upper and lower substrates from being staggered or the substrate to be distorted. . In particular, when two sets of liquid crystal panels are arranged side by side in one container in order to improve productivity, there are many cases where the horizontal direction is staggered. However, the device equipped with a heating device on the upper and lower chucks transmits heat from above and below, and there is less distortion, but it still cannot prevent several μ® shifts between the upper and lower substrates. With the improvement of performance, this position accuracy will become stricter, and the deviation of the substrate has reached an intolerable value. Moreover, the experimental results show that, in the conventional structure, when two sets of glass substrates are arranged away from the center of the chuck, or when a large number of small substrates are arranged side by side, the offset of the substrates will be larger than that when it is arranged at the center of the chuck. From these experimental results, it is known that the difference in the coefficient of thermal expansion between the upper and lower chucks or the friction coefficient between the chuck and the substrate due to the position of the upper and lower chucks and the position of the chuck makes the chuck-substrate, substrate-substrate Shearing force occurs between the upper and lower substrates, especially when only the peripheral edge portion is connected with the upper and lower substrates. The shearing force is most easily released, and the substrate is shifted and staggered between the upper and lower substrates. Moreover, in the traditional device, to ensure the uniformity of heat, it is more effective to increase the heat capacity of the upper and lower heating devices, but there is a problem between heating and cooling speed. Especially the production of Kalu -5- This paper size is applicable to the Chinese National Standard (CNS) Α4 specification (210X297mm) • Packing-(Please read the notes on the back first and write this page) Order
491955 經濟部中央標準局員工消費合作社印製 A 7 _______^_B7_'五、發明説明（3 ) 裝置時，必須準備配合生產線之生產節拍之裝置數。又因 處理上之理由，液晶板在安裝於製造裝置時，至少接觸於 基板之部分必須冷卻到某一溫度K下。 本發明係有鑑於傳統技術所存在之問題點而完成，其 目的在提供，能夠將玻璃基板之整面均勻加熱，同時對該 玻璃基板之加壓也能夠以均一之分布負荷作用在該基板， 而且能在加熱處理後迅速冷卻夾盤之液晶板製造裝置。 為達成上述目的，本發明所採之技術手段是，在使兩 片玻璃基板中間夾裝間隔材料而成面對面，以重叠狀態加 熱、加壓，使配在上述兩片基板間之熱硬化性樹脂構成之 封閉材料硬化之液晶板製造裝置，由可夾住經過對準位置 ，且暫行固定之兩Η—組玻璃基板之一方之固定夾盤，以 及，面向此固定夾盤，可改變與該夾盤間之間隔使成寬窄 自如，同時藉加壓構件加壓之可動夾盤，所構成，上述固 定夾盤呈雙層構造，在靠近玻璃基板之上層構件埋設有冷 卻裝置，違端之下層構件裝備有加熱裝置，並配設有可Μ 從接觸狀態分離上、下構件之分離機構，而可動夾盤則呈 裝配加熱裝置之空心構造，同時其抵接玻璃基板之加壓面 係Κ具可撓性之構件構成，為其特徵。 上述固定夾盤可Μ使用剛性高，熱傳導率良好之材料 ，例如金靥板或黑鉛板等。但直接接觸在玻璃基板之構件 則限定使用具有接近玻璃基板之熱膨脹係數之構件。而此 分割成上下兩層之固定夾盤，係在接近玻璃基板側之上層 構件埋設冷卻装置。該冷卻裝置Μ水冷式較佳，因此在上 -6- (請先閱讀背面之注意事' 寫本頁) •裝· 訂 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 491955 經濟部中央標準局員工消費合作社印製 A7 B7五、發明説明（4 ) 層構件要形成冷卻用管之配管通路。 而離玻璃基板較遠一側之下層構件則裝備加熱裝置， 可藉熱傳導而達成均勻加熱。 上述可動夾盤係在平面形狀呈矩形狀之具有隔熱功能 之框體之一側架設酗性低之可撓性構件者，在該可撓性構 件與框體所區劃之空心部配設加熱裝置，藉此Μ間接方式 對可撓性構件加熱，使裝置整體之溫度分布平均，Κ提高 玻璃基板之均熱性。構成可動基板之可撓性構件可Μ使用 剛性低之黑鉛板，或具有與玻璃基板之熱膨脹係數相同程 度之熱膨脹係數之薄膜，例如浸泡聚四氟乙烯（PTFE)玻 璃纖維布，或浸泡含碳之聚四氟乙烯（PTFE)玻璃纖維布 等〇 而上述加熱装置係輔助加熱器，因此不必如傳統方式 將上下加熱器控制成同一溫度，只要設定在接近裝設在固 定夾盤之加熱装置之溫度便可Μ。而且其加熱装置Μ使用 熱容量小之附設橡膠加熱器之反射板較佳。反射板可視裝 設在固定夾盤之加熱裝置之溫度上昇倩況，以反射板反射 固定夾盤放出之熱量，藉此將橡膠加熱器之輸出減到最低 ,對節省能源有頁獻。 該反射板之例子可Μ舉出，铅板，或塗敷金、銀之金 羼反射鏡膜等。 而用Μ分開固定夾盤之下層構件與上層構件之接合面 之分離機構，則可Κ使用，利用偏心凸輪之機構，或利用 油壓、氣壓缸之機構等。 -7- (請先閲讀背面之义意^-¥ •裝-- ^本頁) 訂491955 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A 7 _______ ^ _ B7_ 'V. Description of the Invention (3) The number of devices must be prepared to match the production cycle of the production line. For processing reasons, when the liquid crystal panel is mounted on a manufacturing device, at least the portion contacting the substrate must be cooled to a certain temperature K. The present invention is completed in view of the problems existing in the conventional technology, and the purpose thereof is to provide that the entire surface of the glass substrate can be uniformly heated, and at the same time, the pressure on the glass substrate can be applied to the substrate with a uniform distributed load. Furthermore, the liquid crystal panel manufacturing device capable of rapidly cooling the chuck after the heat treatment. In order to achieve the above object, the technical means adopted in the present invention is to face each other by sandwiching a spacer material between two glass substrates, heating and pressing them in an overlapped state, so that the thermosetting resin disposed between the two substrates The closed material hardened liquid crystal panel manufacturing device is composed of a fixed chuck that can pass through the alignment position and is temporarily fixed to one of the two glass substrates, and, facing the fixed chuck, the clamp can be changed. The gap between the plates is wide and narrow, and the movable chucks are pressed by a pressure member at the same time. The fixed chucks have a double-layer structure. A cooling device is embedded in the upper layer member near the glass substrate, and the lower layer member is violated. Equipped with a heating device, and equipped with a separation mechanism that can separate the upper and lower members from the contact state, while the movable chuck has a hollow structure equipped with a heating device, and its pressure surface that abuts the glass substrate can be It is characterized by a flexible member. The above-mentioned fixed chuck can be made of a material with high rigidity and good thermal conductivity, such as a gold plate or a black lead plate. However, members directly contacting the glass substrate are limited to those having a coefficient of thermal expansion close to that of the glass substrate. The fixed chuck which is divided into two upper and lower layers is embedded with a cooling device on the upper layer member near the glass substrate side. The cooling device M is more water-cooled, so in the above -6- (Please read the note on the back first 'to write this page) • The size of the paper is bound to the Chinese National Standard (CNS) A4 (210X297 mm) 491955 Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs A7 B7 V. Description of Invention (4) The multi-layer components shall form a piping passage for cooling pipes. The lower component on the side farther from the glass substrate is equipped with a heating device, which can achieve uniform heating by heat conduction. The movable chuck is one in which a flexible member having a low intoxicity is erected on one side of a rectangular shape of a frame having a heat insulation function, and heating is provided in the hollow portion defined by the flexible member and the frame. In this device, the flexible member is heated by the M indirect method, so that the temperature distribution of the entire device is averaged, and K is used to improve the uniformity of the glass substrate. The flexible member constituting the movable substrate can be a black lead plate having a low rigidity or a film having a coefficient of thermal expansion equivalent to that of a glass substrate, such as immersion polytetrafluoroethylene (PTFE) glass fiber cloth, or immersion containing Carbon polytetrafluoroethylene (PTFE) fiberglass cloth, etc. The above heating device is an auxiliary heater, so it is not necessary to control the upper and lower heaters to the same temperature as in the traditional way, as long as it is set close to the heating device installed on the fixed chuck The temperature can be M. Moreover, the heating device M preferably uses a reflecting plate with a rubber heater having a small heat capacity. The reflecting plate can be visually monitored for the temperature rise of the heating device installed on the fixed chuck, and the heat emitted by the fixed chuck is reflected by the reflecting plate, thereby minimizing the output of the rubber heater, which contributes to energy conservation. Examples of the reflecting plate include a lead plate, and a gold or silver-coated gold mirror film. The separation mechanism that separates and fixes the joints between the lower and upper members of the chuck with M can be used as a mechanism using an eccentric cam or a mechanism using a hydraulic or pneumatic cylinder. -7- (Please read the meaning of the back ^-¥ • Install-^ this page) Order
本紙張又度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） 491955 經濟部中央標準局員工消費合作社印製 A 7 _____B7 五、發明説明（5 ) 依據上述手段時，使可動夾盤呈空心構造，與玻璃基 板接觸之加壓面用剛性較固定夾盤低之可撓性構件構成， 使固定夾盤與可動夾盤之加壓面具有剛性差，藉此使可動 夾盤之剛性低之可撓性構件密接於玻璃基板，施加均勻分 布之負荷，而得在上下玻璃基板間形成均一之空隙。 而固定夾盤係採上、下層構件之雙層構造，在靠近基 板一側之上層構件装備冷卻裝置，在遠離基板之下層構件 裝備加熱裝置，藉此可達成快速冷卻，快速加熱。而且， 因為上逑雙層構造之固定夾盤係藉分離機構構成為接近離 開自如狀，因此，若在加熱、加壓成形後，分開上、下層 構件而冷卻上層構件，便可K提高泠卻效率，安装下一液 晶板令其經過熱履歷時，不會對液晶板上之溫度分布產生 不良影響。 茲參照附圖，說明本發明實施形態之一個例子如下。 第1圖表示液晶板製造裝置之概要，用K夾住經過對 準位置且暫行固定之兩Η—組玻璃基板，對其加熱、加壓 ，將裝在玻璃基板間之封閉材料加壓到一定間隙，令其 硬化。圖中，1係由上、下層構件之雙層構造構成之固定 夾盤，2係面向上述固定夾盤1之上方配置之可動夾盤， 3係用以將構成固定夾盤1之上、下層構件la、lb之接 合狀態向上下方向分開之分離機構。 上述固定夾盤1用以承載構成液晶板之兩Η—組玻璃 基板，由剛性很高之黑鉛板構成之平面形狀呈矩形狀之上 層構件la與下層構件lb所構成，在接觸於玻璃基板之上層 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） (請先閲讀背面之主意事叹馬本頁) -裝· 訂 491955 經濟部中央標準局員工消費合作社印製 A7 ____^_B7__' __五、發明説明（6 ) 構件la插入配置冷卻裝置4之冷卻水配管，下層構件lb則 插入配置加熱裝置5之加熱器。而上述上、下層構件la、 lb在對玻璃基板加熱、加壓時，相對之面（接合面）係保持 在接觸狀態，使插入配置在下層構件lb之加熱裝置5之熱 量會傳至上層構件la，而得有效對玻璃基板加熱。 而上逑上、下層構件la、lb之接合面可分別形成為平 坦面，使整面可Μ相互接觸，或在上、下層構件la、lb之 任一方接合面，除其周圍外形成凹處，使下層構件lb之熱 量可經由該凹處之空氣層熱傳導至上層構件la。形成該凹 處時，可改善固定夾盤1之均熱性及平坦性，再者，上、 下層構件la、lb之接觸部位，縱使改善其平坦度，仍因接 觸熱阻很大，要取得熱度平衡而提高均熱性也是很困難。 因此，在上層構件la與下層構件lb之間夾裝有緩衝性，且 熱傳導率良好之薄膜，例如黑鉛纖維薄膜，取代提高平坦 度0 並在上層構件la與下層構件lb周圍幾處架設彈簧6， 俾恒Μ穩定之狀態維持上、下層構件la、lb之接觸狀態。 藉此彈簧6之作用，壓縮夾在上、下層構件la、lb間之黑 鉛纖維薄膜，填滿上、下層構件la、lb間之空隙，獲得均 熱性。 又在固定夾盤1之與玻璃基板接觸之上層構件la之上 面周圍，配設圍繞載置在該固定夾盤1上面之兩片一組之 玻璃基板a、b周圍之框7，加Μ固定之。此框7之厚度與 玻璃基板a、b之缌厚度相同，在框7之外側安裝0環8, (請先閱讀背面之注意Ϋ- -裝-- :寫本頁) 訂This paper is again applicable to the Chinese National Standard (CNS) A4 specification (210 × 297 mm) 491955 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A 7 _____B7 V. Description of the invention (5) Make the movable chuck hollow according to the above measures The structure, the pressing surface contacting the glass substrate is made of a flexible member with lower rigidity than the fixed chuck, so that the pressing surface of the fixed chuck and the movable chuck have poor rigidity, thereby making the rigidity of the movable chuck low. The flexible member is in close contact with the glass substrate, and a uniformly distributed load is applied to form a uniform gap between the upper and lower glass substrates. The fixed chuck adopts a two-layer structure of upper and lower members. The upper member near the base plate is equipped with a cooling device, and the lower member away from the base plate is equipped with a heating device, thereby achieving rapid cooling and rapid heating. In addition, because the fixed chuck of the double-layer structure of the upper cymbal is configured to be close to and free from the separation mechanism, if the upper and lower members are separated after cooling and heating, the upper members are cooled and the upper members are cooled. Efficiency, when installing the next LCD panel and letting it go through the thermal history, it will not adversely affect the temperature distribution of the LCD panel. An example of an embodiment of the present invention will be described below with reference to the drawings. Fig. 1 shows the outline of a liquid crystal panel manufacturing device. Two sets of glass substrates that pass through the alignment position and are temporarily fixed are clamped by K, heated and pressed, and the sealing material installed between the glass substrates is pressed to a certain degree. Clearance to allow it to harden. In the figure, 1 is a fixed chuck composed of a double-layered structure of upper and lower members, 2 is a movable chuck disposed above the fixed chuck 1, and 3 is used to form the upper and lower layers of the fixed chuck 1. A separating mechanism that separates the components la, lb from each other in the up and down direction. The above-mentioned fixed chuck 1 is used to carry two sets of glass substrates constituting a liquid crystal panel, and is composed of a high-rigid black lead plate and a rectangular upper layer member la and a lower layer member lb, which are in contact with the glass substrate. The upper layer of this paper applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please read the idea on the back page and sigh on this page)-Binding · Order 491955 Printed by the Consumer Standards Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs ____ ^ _ B7__ '__V. Description of the Invention (6) The component la is inserted into the cooling water pipe configured with the cooling device 4, and the lower component lb is inserted into the heater configured with the heating device 5. When the upper and lower members la, lb are heated and pressurized on the glass substrate, the opposite surface (joining surface) is kept in contact, so that the heat inserted into the heating device 5 disposed in the lower member lb will be transferred to the upper member. la, so that the glass substrate can be effectively heated. The joint surfaces of the upper and lower members la, lb can be formed as flat surfaces, respectively, so that the entire surfaces can contact each other, or a recess is formed on any of the joint surfaces of the upper and lower members la, lb except for the surroundings. , So that the heat of the lower layer member lb can be thermally conducted to the upper layer member la through the air layer of the recess. When the recess is formed, the uniformity and flatness of the fixed chuck 1 can be improved. Furthermore, even if the contact portions of the upper and lower members la, lb are improved, even if the flatness is improved, the contact thermal resistance is very large. It is also difficult to balance and improve the soaking properties. Therefore, a cushioning film with good thermal conductivity, such as a black lead fiber film, is sandwiched between the upper member la and the lower member lb. Instead of improving the flatness 0, a spring is set up around the upper member la and the lower member lb. 6. The stable state of the constant M maintains the contact state of the upper and lower members la, lb. By the action of the spring 6, the black lead fiber film sandwiched between the upper and lower members la, lb is compressed, and the gap between the upper and lower members la, lb is filled, so as to obtain heat uniformity. A frame 7 is arranged around the upper surface of the fixed chuck 1 which is in contact with the glass substrate and the upper layer member la. The frame 7 is arranged around the two sets of glass substrates a and b placed on the fixed chuck 1. Of it. The thickness of this frame 7 is the same as the thickness of the glass substrates a and b. Install the 0 ring 8 on the outside of the frame 7. (Please read the note on the back first--install-: write this page)
本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 491955 經濟部中央標準局員工消費合作社印製 A7 ____B7_· _五、發明説明（7 ) 將其構成為，令後述之可動夾盤2下降而抵接在玻璃基板 時，由固定夾盤1與可動夾盤2及0環8區劃密閉空間， 並可經由通路9將其內部空間真空排氣。 配置在固定夾盤1上方之可動夾盤2,係在較上述固 定夾盤1大很多之具有隔熱功能之矩形狀之框體2 a之一側 開口面（下面）架設由可撓性構件構成之加壓板2b，所構成 。該加壓板2b係具有與玻璃基板相同程度之熱膨脹率，且 有可撓性之薄片，例如，使用浸泡聚四氟乙烯（PTFE)之 玻璃布。若靜電成為問題，則使用浸泡含碳聚四氟乙烯（ PTFE)玻璃布。 上述加壓板2b在安裝時，可將構成加壓板2b之薄片之 邊緣，沿着框體2a之外側面豎起，而Μ薄片固定用配件11 按壓該豎起之緣部，再Μ螺栓12固定薄片固定用配件11。 再者，架設加壓板2b時，應Κ中央部向下方多少下垂之狀 態，鬆弛狀態固定之。 又在上述可動夾盤2之内部，即在框體2 a內側之較加 壓板2b為上方之位置，收容配置有加熱裝置10。此可動夾 盤2所應具有之性能是與固定夾盤1之上下之溫度顒係。 因之希望裝配不易使加壓板2 b產生溫度不均之加熱裝置10 。其構造係如第2圖所示，在加壓板之上方吊掛支持平面 均熱性很高，熱容量小之附設橡膠加熱器之反射板。 此附設橡膠加熱器之反射板10，係在矽橡膠加熱器l〇a 之下面安裝反射板l〇b而成，可藉反射板10b反射由固定 夾盤1之上層構件lb放出之熱量，藉此可將橡膠加熱器 -10- (請先閱讀背面之>Α-意事f 本頁) .裝· ,ιτ 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） 491955This paper size applies to China National Standard (CNS) A4 (210X297 mm) 491955 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 ____ B7_ · _ V. Description of the invention (7) It is structured as a movable chuck described later When the lower part 2 comes into contact with the glass substrate, the closed space is delimited by the fixed chuck 1 and the movable chuck 2 and the 0 ring 8, and the internal space can be evacuated through the passage 9. The movable chuck 2 arranged above the fixed chuck 1 is mounted on a side opening surface (lower side) of a rectangular frame 2 a having a heat insulation function which is much larger than the fixed chuck 1 described above. The pressure plate 2b is configured. The pressure plate 2b is a flexible sheet having the same thermal expansion coefficient as that of a glass substrate, for example, a glass cloth impregnated with polytetrafluoroethylene (PTFE). If static electricity becomes a problem, use carbon-impregnated polytetrafluoroethylene (PTFE) glass cloth. When the pressure plate 2b is installed, the edge of the sheet constituting the pressure plate 2b can be erected along the outer side surface of the frame 2a, and the M sheet fixing attachment 11 presses the erected edge portion, and then the M bolt 12Fixing sheet fixing attachment 11. Furthermore, when the pressure plate 2b is erected, the central portion of K should be lowered to some extent, and the relaxed state should be fixed. A heating device 10 is also housed inside the movable chuck 2, i.e., a position above the pressure plate 2b inside the housing 2a. The performance of the movable chuck 2 is related to the temperature above and below the fixed chuck 1. Therefore, it is desirable to assemble a heating device 10 that does not easily cause uneven temperature of the pressure plate 2 b. Its structure is shown in Figure 2. It is hung above the pressure plate to support the reflecting plate with high heat uniformity and small heat capacity. The reflecting plate 10 with a rubber heater is formed by installing a reflecting plate 10b under the silicone rubber heater 10a. The reflecting plate 10b can reflect the heat emitted by the upper member lb of the fixed chuck 1 by using the reflecting plate 10b. This can be a rubber heater-10- (Please read the first page on the back > Α- 意 事 f on this page). Loading ·, ιτ This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 491955
i〇a之輸出減至最低限度，對節省能源有貢獻。而反射板 l〇b則可以使用，鉛板，或施加塗敷金屬鏡膜之平板等。 K上述方式構成之可動夾盤2係吊掛支持在支持構件 13,令支持構件13向下移動，則呵使加壓板2b抵接在固定 夾盤1之0環8,而在加壓板2b及0環8及上層構件lb之 間形成一密閉空間。 用Μ使構成固定夾盤1之上、下層構件la、lb從接觸 狀態分開之分離機樺3，係利用偏心軸1 4 ,在固定夾盤1 之左右兩側分別從中心分開相等間隔在前後方向各設兩台 ，而令該等分離機構同時動作，藉此將上層構件la與下層 構件lb從接觸狀態分離開，而將上層構件la提向上方。 該分離機構3係介由軸承16,將偏心軸14成可轉動狀 支持在軸箱15上，而在該僱心軸14之前端，即支持上層構 伴U之下靣之部位，安裝釉承1 6 ’ ；偏心軸1 4之基端側刖 經由耦接頭18連结在旋轉缸17之輸出軸，藉旋轉紅17之旋 轉使偏心軸14轉動，而藉該偏心軸14之轉動，介由軸承16’ 將上層構件la提昇距離L,離開與下層構件lb之接觸。 經濟部中央標準局員工消費合作社印製 .(請先閲讀背面之注意事項再填寫本頁) 再者，在分離機構3用Μ轉動偏心軸14之驅動源不限 定為上述旋轉缸（氣壓式引動器），也可Κ使用電動馬達。 而上、下層構件la、lb則Μ引導支柱等加以支持，避免 在上述分離機構3動作時，雙方之相對位置關係偏移。 接下再說明上逑製造裝置之動作。從固定夾盤1上將 可動夾盤2拉向上方成打開狀態下，將經過定位且暫行固 定之兩片一組玻璃基板a、b載置於固定盤1之上層構件 la之上面。接着降下可動夾盤2,令該夾盤2之加壓板2b -11- 本紙張尺度適用中國國家標準（CNS ) A4規格(210X 297公t ) 491955 經濟部中央標準局員工消費合作社印製 A7 _ B7 五、發明説明（9 ) 接觸到0環8, K加壓板26，0環8、及上層構件la構成密 閉空間，而經由固定夾盤1之通路9對上逑密閉空間進行 真空排氣。藉此，可動夾盤2之加壓板2b便變形而密接 於坡璃基板a,而玻璃基板a、b則受到加壓。K這種狀態 令固定夾盤1之加熱裝置5與可動夾盤2之加熱裝置10動 作，固定夾盤1則由下層構件IbK熱傳導對上層構件la加 熱，藉熱傳導將玻璃基板a、b加熱·，跟傳统方式一樣， 將玻璃基板a、b之封閉材料壓縮到一定之空隙，並固定 之。這時，陲着加熱，玻璃基板a、b,固定夾盤1,可動 夾盤2之加壓板2 b也會熱膨脹，但固定夾盤1及加壓板2b 之熱膨脹係數與玻璃基板大致上相同，因此可以抑制栢互 間之錯開。再者，如果可動夾盤2之加熱裝置10是附設加 熱器之反射板時，固定夾盤1放出之熱量由反射板l〇b加 Μ反射，而對玻璃基板a之加熱有貢獻，因此可K將加熱 裝置10本身之加熱器之輸出降到最低限度。 經過上述加熱、加壓之成形後，切斷固定夾盤1之加 熱裝置5與可動夾盤2之加熱裝置10之加熱器，使上述密 閉空間再回到大氣壓力，將可動夾盤2移至上方，取出固 定夾盤1上之成形台（粘貼在一起之玻璃基板）。而在取出 後，令固定夾盤1之上層構件la之冷卻裝置4動作，Μ冷 卻該固定夾盤1,但如果是Κ備有冷卻裝置4之上層構件 la與被加熱之下層構件lb相接觸之狀態進行冷卻時，要冷 卻到一定溫度所需之時間會較長，同時熱量之損失會相當 大，冷卻效率也不佳，對生產性有很大之影響。 -12- 本紙張又度適用中國國家標準（CNS ) A4g ( 210X297公釐） (請先閲讀背面之注意事項本頁) •裝·The output of i〇a is minimized, which contributes to energy conservation. The reflecting plate 10b can be a lead plate or a flat plate coated with a metal mirror film. The movable chuck 2 constructed in the above manner is suspended and supported on the support member 13 so that the support member 13 moves downward, so that the pressure plate 2b abuts on the ring 8 of the fixed chuck 1, and the pressure plate 2 A closed space is formed between 2b and 0 ring 8 and the upper member lb. Separating machine 3 that separates the upper and lower members la, lb constituting the fixed chuck 1 from the contact state with M, uses eccentric shafts 14 to separate the left and right sides of the fixed chuck 1 from the center at equal intervals in front and back. Two units are provided in each direction, and the separating mechanisms are operated simultaneously, thereby separating the upper-layer member la from the lower-layer member lb from the contact state, and lifting the upper-layer member la upward. The separating mechanism 3 supports the eccentric shaft 14 on the shaft box 15 through a bearing 16 through rotation, and the glaze bearing is installed at the front end of the employment shaft 14 to support the lower part of the upper structure U. 1 6 ′; the base end side of the eccentric shaft 14 is connected to the output shaft of the rotary cylinder 17 via a coupling 18, and the eccentric shaft 14 is rotated by the rotation of the rotating red 17, and the rotation of the eccentric shaft 14 is passed through The bearing 16 'lifts the upper member la a distance L away from the contact with the lower member lb. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. (Please read the notes on the back before filling in this page.) Furthermore, the drive source for rotating the eccentric shaft 14 in the separation mechanism 3 is not limited to the above-mentioned rotary cylinder (pneumatic pneumatic actuation) Device) or electric motors. The upper and lower members 1a and 1b are supported by guide pillars and the like to prevent the relative positional relationship of the two sides from shifting when the separating mechanism 3 is operated. Next, the operation of the winder manufacturing device will be described. The movable chuck 2 is pulled upward from the fixed chuck 1 to be opened, and the two sets of glass substrates a, b positioned and temporarily fixed are placed on the upper layer la of the fixed chuck 1. Then lower the movable chuck 2 to make the pressure plate 2b of the chuck 2 -11- This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 g t) 491955 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 _ B7 V. Description of the invention (9) Contact with 0 ring 8, K pressure plate 26, 0 ring 8, and upper member la constitute a closed space, and the upper closed closed space is vacuum-evacuated through the passage 9 of the fixed chuck 1. gas. As a result, the pressure plate 2b of the movable chuck 2 is deformed and closely adheres to the sloped glass substrate a, and the glass substrates a and b are pressed. This state of K causes the heating device 5 of the fixed chuck 1 and the heating device 10 of the movable chuck 2 to operate. The fixed chuck 1 heats the upper member la by the heat conduction of the lower member IbK, and heats the glass substrates a and b by the heat conduction · As in the traditional method, the sealing materials of the glass substrates a and b are compressed to a certain gap and fixed. At this time, the glass substrates a and b, the pressure plate 2 b of the fixed chuck 1 and the movable chuck 2 also thermally expand while being heated, but the thermal expansion coefficients of the fixed chuck 1 and the pressure plate 2 b are approximately the same as those of the glass substrate. Therefore, it is possible to suppress the staggering of Bai. Furthermore, if the heating device 10 of the movable chuck 2 is a reflecting plate with a heater, the heat emitted from the fixed chuck 1 is reflected by the reflecting plate 10b plus M, and contributes to the heating of the glass substrate a. K minimizes the output of the heater of the heating device 10 itself. After the above heating and pressure forming, the heaters of the heating device 5 of the fixed chuck 1 and the heating device 10 of the movable chuck 2 are cut off, so that the enclosed space is returned to atmospheric pressure, and the movable chuck 2 is moved upward Side, take out the forming table (the glass substrate pasted together) on the fixed chuck 1. After taking out, the cooling device 4 of the upper member la of the fixed chuck 1 is actuated, and the fixed chuck 1 is cooled, but if it is provided with the cooling device 4, the upper member la is in contact with the heated lower member lb. When cooling in a state, the time required to cool to a certain temperature will be longer, at the same time, the loss of heat will be considerable, the cooling efficiency is not good, and it will have a great impact on productivity. -12- This paper is again applicable to Chinese National Standard (CNS) A4g (210X297mm) (Please read the precautions on the back page first)
、1T 491955 Α7 Β7 五、發明説明（10 ) 因此，本裝置使上下雙層構造之固定夾盤成為可藉分 離機構分開之分開自如狀，加熱成形後之冷卻時可K將上 層構件la與下層構件lb分離開，K移開下層構件lb之熱影 響之狀態下冷卻上層構件la。而藉上逑操作，可K迅速將 準備載置下一玻璃基板之上層構件la之表面溫度降低到一 定之溫度Μ下，在安裝下一玻璃基板預熱時，可Μ防止在 基板上之溫度有分布不均。 另一方面，也可以在加熱時，令上層構件la與下層構 件lb相互接觸，而藉上層構件la之冷卻能力，彈性設定玻 璃基板之溫度。 本發明之液晶板製造裝置，依據申請專利範圍第1項 所述之架構，可將玻璃基板之整面均勻加熱，同時對該玻 璃基板之加壓也能K均一之分布負荷加壓，而且，在熱處 理後，可Μ將載置玻璃基板一側之夾盤表面迅速冷卻到一. 定溫度Κ下。 又依申請專利範圍第2項所逑之架構，Κ上下加熱裝 置對玻璃基板加熱時，能夠Κ反射板反射下側之熱量，使 其有效作用在玻璃基板，因此，裝在可動夾盤側之加熱器 可以使用熱容量較小者，可提供對節省能源有幫助之裝置。 而且，依申請專利範圍第3項所逑之架構時，可Κ抑 制加熱時固熱膨脹引起之偏移。 圖式之簡單說明 第1圖係表示本發明製造裝置之實施形態之一個例子 -13- 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） (請先閲讀背面之注意事項舄本頁) .裝·1T 491955 Α7 B7 V. Description of the invention (10) Therefore, this device makes the upper and lower double-layered fixed chucks freely separated by a separating mechanism, and can cool the upper layer la and the lower layer when it is cooled after heating and forming. The member lb is separated, and K removes the upper member la in a state where the lower member lb is thermally affected. With the operation of the upper surface, the surface temperature of the upper layer member la ready to be placed on the next glass substrate can be quickly reduced to a certain temperature M. When the next glass substrate is preheated, the temperature on the substrate can be prevented. There is uneven distribution. On the other hand, it is also possible to bring the upper member la and the lower member lb into contact with each other during heating, and use the cooling ability of the upper member la to elastically set the temperature of the glass substrate. According to the structure of the liquid crystal panel manufacturing device of the present invention, the entire surface of the glass substrate can be uniformly heated according to the structure described in the first patent application scope. At the same time, the pressure on the glass substrate can be uniformly distributed with K, and, After the heat treatment, the surface of the chuck on which the glass substrate is placed can be quickly cooled to a predetermined temperature K. According to the structure described in item 2 of the scope of the patent application, when the K upper and lower heating device heats the glass substrate, the K reflecting plate can reflect the heat on the lower side, so that it can effectively act on the glass substrate. The heater can use the smaller heat capacity, which can provide a device that helps to save energy. Moreover, according to the structure described in item 3 of the scope of patent application, it is possible to suppress the displacement caused by solid thermal expansion during heating. Brief Description of Drawings Figure 1 shows an example of the embodiment of the manufacturing device of the present invention. 13- This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back first. This copy Page)
、1T 經濟部中央標準局員工消費合作社印製 491955 A7 B7 五、發明説明（ 之部分切除正面圖； 第2圖係表示可動夾盤之構造之放大載面圖； 第3圖係表示分開固定夾盤之上、下層構件之分雛機 構之配置平面圖； 第4圖係表示利用偏心軸之分離機構之動作說明圖， (a)係上層構件接觸於下層構件之狀態，（b)係分離機構 使上層構件向上方移動之狀態。 符號說明 1 ....固定夾盤 la 下層構件 2. 分離機構 4. 加熱裝置 加熱裝置（可動夾盤側） lb 10 上層構件 可動夾盤 冷卻裝置 -------1 — — ^-I (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 12 14 16 18 ..玻璃基板 .彈簧 _〇環 .螺栓 .偏心軸 1 6 ’ 軸承 .耦接頭 -14- 2b 13 15 17 .加壓板 •框 .通路 .支持構件 .軸箱 .旋轉缸 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs, 1T 491955 A7 B7 V. Description of the invention (Partial cut-away front view; Figure 2 is an enlarged side view showing the structure of the movable chuck; Figure 3 is a separate fixed clip The plan view of the arrangement of the sub-mechanisms of the upper and lower members of the disk; Fig. 4 is an explanatory diagram showing the operation of the separation mechanism using an eccentric shaft, (a) is the state where the upper member is in contact with the lower member, and (b) is the separation mechanism The state of the upper member moving upward. Symbol description 1 .... fixed chuck la lower member 2. separation mechanism 4. heating device heating device (movable chuck side) lb 10 movable chuck cooling device of upper member ---- --- 1 — — ^ -I (Please read the notes on the back before filling out this page) Order printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 12 14 16 18 .. glass substrate. Spring _〇 ring. Bolt. Eccentricity Shaft 16 'Bearing. Coupling -14- 2b 13 15 17 .Pressure plate • frame. Passage. Supporting member. Shaft box. Rotary cylinder This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm)