TW491803B - Apparatus for wafer loading/unloading with stabilized motion - Google Patents

Abstract

The invention relates to an apparatus for wafer loading/unloading, especially to an apparatus for wafer loading/unloading with stabilized motion, the principal structure of which comprises: a panel mounted at a workstation, on which an entrance and a load platform are provided, and a cover provided on the entrance in close contact with the panel; a vertical transmission module, one end of which is fixed on the panel; a horizontal transmission module provided on the vertical transmission module to move the cover of entrance and the opened cover of a cassette inwards, and descending with the vertical transmission module; and at least a vibration elimination module connected between the other end of the vertical transmission module opposite to the end connected to the panel and the panel, thereby eliminating the vibration while the apparatus is moving.

Description

491803 V. Description of the invention (1) This family has a wafer loading and unloading device with a stable operation effect of crystals, especially a horizontal transmission module with one transmission effect, two transmissions, It mainly uses the second straight drive module with a stable vibration module and can eliminate the device when it is operating, and at least one detection accuracy and prevents the miscalculation of the crystal, in order to improve the wafer detector. Those who suffered collision damage due to the location of 0 wafers In recent years, due to the increasing requirements for lightness, thinness, and shortness of electronic-related purple products, f = degree development and people's semiconductor manufacturing processes for electricity have become increasingly important. _Before the integrated circuit 4 (1C), which is the basis of the integrated circuit, must :: 3 J wafers become available masks, or read the wafer engraving number, etc .; Second expansion, printing, and money engraving The pre-integrated circuit manufacturing process has entered the deep sub-micron f = and the integrated electrical requirements are more stringent, but if the environmental cleanliness of the entire two-year old environment is to be improved, the cleanliness of the working environment is improved. The higher the level of expertise, the cost of the investment will be violent and 2 to 2 will be respectful and effective. Therefore, the general system is: a production space with a high degree of cleanliness is set up around the production equipment, and the general-type cleanliness is sufficient. Therefore, a wafer transfer box (cassette, bot, or FOUP) that can carry = several wafers Uaf2 must be used to carry out wafers in workstations, storage cabinets, or storage bays in each production block (interbay). Wafer cassette stations or sorters (high cleanliness) and general work environment (general cleanliness) movement and transfer work to carry out the clothing & in each production step of each wafer. Each workstation, storage cabinet, or wafer sorter must be equipped with a wafer loading and unloading device to perform the operation of loading wafers from the transfer box into the workstation, or loading and unloading the wafers into the transfer box from the workstation. .

Page 4 Platform 1 2 Loading—ΐ = The panel (as shown in Figure 1) is loaded at the loading D; m box · (not shown) at the loading port, and is set at its loading port for loading and unloading. Iς f will open the bucket lid of the wafer transfer box, and load the loading port cover 16 and the door cover-t detector 1 6 2 (as shown in Figure 3; Mouth cover plate 16: The position and number of wafers, processing; Zha: The past in the wafer transfer box ": The wafers are loaded and unloaded. The wafers used by robotic brake manufacturers are loaded. The transmission of the dream is her. However, due to the pressure of the rainbow: the drive module of the J series of instantaneous bursting movement, the speed can not be controlled, & pieces, its shift: read the crystal on the detector i 6 2 Circular transmission vibration is also more prone to errors or unable to judge t |, and; when the position and the movement of counting wafers, positioning errors are more likely to occur # 2 for loading and loading damage. In addition, the pressure source of the pneumatic cylinder must be = Super clean, = The added cost burden of touching the disc is a considerable amount. When the accidental loss of power, the pneumatic cylinder will also go down due to air leakage, & ⑽ The collision problem due to the period. W Cheng is unpredictable. In order to solve the mystery question ~ Qiao, ... Follow the question and put on display another module, as shown in Figure 10, the master of the transmission module 50 = 2 ^ The basic structure includes: a base 54, a lifting base 58 and a servo motor 52 H. A linear slider 5 4 2 is provided on each side of the base 5 4. ; Both sides of the lifting seat 5 8 are provided with sliding holes 5 °, and a screw hole 5 8 2 is inserted in the middle, which can be inserted into the linear slide rails ^

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4 2 and the screw 5 6 turn, which in turn drives the supporting frame 5 9 on the lifting 8 to rise or fall with it. And with a servo motor 5 seat 5 8 rising or lowering, the loading port cover 2 driving screw 5 6 can be screwed and fixed on the lifting seat 5 1 6 and the speed of the transport box door cover. Unpredictable hole 5 8 4 slides 5 4 2, and the vibration of which is still a pair of movements is the grinding of the production rate, how to respond to the loading of the sperm balls, and it is substantially straight. The user and the inventor, as well as the sales and trial results of the wafers, can use the word power without the need to serve the screw 5 6 4 and can not drive the accuracy and load of the drive, the transmission Dust, also loaded with loading and unloading. The novel solution can not only work effectively when the present inventor wants to work on semiconductors and improve it, and finally researched to solve it. However, the displacement caused by its movement increases by 5 4 2 and slipping moments, and the moments that cannot be caused by sliding caused by linearity are caused by contamination of photos due to the contamination of photos, and the vibration generated by a kind of stability during use has been a difficult point for a long time. Research and development Yuan actuation effect is that although accidental transmission module lost problem, but with the gap 58 will be positioned due to gram big problem with the slide hole 'for. Reduced by another rub. The wafer problem described in this paper proposes a load-out device. The device is eagerly expected to reduce the movement of the device. Based on many years of practical experience, samples and improved load-out device service motors 5 2 will generate additional turns caused by linear sliders. The imbalance between the subsequent loading of the load-carrying module components and the shortcomings of the wafer placement, the solution, the design to eliminate the amount of dust during transmission, and the related concepts of the difficult industry have been solved, and a specific problem has been identified.

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The main object of the present invention is a wafer loading and unloading device with stable operation effect, which is mainly a flat-drive module combined with an anti-vibration module to reduce the number of branches and water. ：… ： Vibration during low-speed transmission. The wafer is loaded into the transmission block at the open axis. The loading and unloading device of the present invention is equipped with the loading and unloading action of the present invention. The device can use a building pillar to turn the circumference for another purpose, the device, which has another purpose of the passage space, and the device, which can be effectively reduced 'is to provide: a horizontal transmission module system with stable action Seven for the transmission wheel t is provided with at least-rollers, cooperation-with a linear motioner that converts the movement into stability. The purpose is to provide a wafer with stable action. The vertical transmission module uses a lifting fixture with a roller to stabilize the lift. The person provides a lift drive system to a wafer straight transmission module with a stable action. Dust measurer. One purpose is to provide a kind of wafer carrying and dismantling with stable operation effect. The vibration damping module is connected to the vertical transmission group and the panel by a positioning column, and includes an adjusting body to facilitate the setting of a vibration damper . In addition, in order to make your reviewing committee have a better understanding and understanding of the features, structure, and achievement of the present invention, I would like to refer to the preferred implementation drawings and detailed descriptions as follows: ^ First, please refer to Figure 1 Figures 3 through 3 are perspective views of a preferred embodiment of the present invention, as shown by Zhou. Its main structure includes:-panel 1 1, a vertical transmission module 30, and a horizontal transmission module. 5. Description of the invention 5. The description of the invention is provided with al0 (i show: Xiao Zhen module 4 !. Among them, the panel " can be locked to not), there is-loading port 1 12 and another set T 1 2: Loading port cover 丄 6 of measuring device 1 6 2 can be fitted on the man-loading level:? The panel 11 is tightly attached, and there is an i2 below the loading port 1 12 for loading a wafer transfer box (not shown), and the lid is secured under the loading platform. The cracked member is transmitted by 1 ^ π vertical transmission module 30 is fixed at the upper end of the panel 1 straight transmission, horizontal transmission module 20 is fixed at the vertical π & & T f The upper end is 9 and the two ends of the vibration damping module 40 are the same as the bottom end of the vertical transmission module 30. After the door cover (not shown) is loaded on the tray, the transfer box is opened and the module 2 is transferred inward, and the thin plate is lowered by the horizontal transmission, and the vibration reduction module 4 = transmission The transfer of module 30 is reduced to a minimum. W dagger, inspection, can be used to accurately read the vibration 6 while the device is being driven down; 2: 2 can be used with the loading port cover 1 'to facilitate the wafer position in the workstation or the box inside the storage cabinet And quantity of precise actions. The robotic arm loads and loads the wafer. Secondly, please refer to FIG. 5 and the stand of the horizontal transmission module of the flute c loader. Figures show that the main structure of the loader of the present invention includes: a shell- Figures and sections. As shown in the figure, the second-transmission wheel 2 6,-transfer: block 2 ^,-stepper motor (not shown) The components of the fork group can be fixed, repeat 8. The housing 2 2 is capable of accommodating 2 and the interior is provided with a slide rail 2 2 on each side.

~ As the power source of the module, by 491803 V. Invention description (6) A driving wheel 2 4 drives a driving wheel 2 6 to rotate, and the driving wheel 2 6 is provided with a support post 2 6 2 at a position away from the axis. The support column 2 6 2 is provided with two rollers 2 6 4 and 2 6; two sides of the transmission block 2 8 are provided with sliders 2 8 4 respectively, and the sliders located on both sides of the housing 22 2 2 2 and the middle part is provided with a long restricting opening 2 8 2 with a direction perpendicular to the rail 2 2 2, which can accommodate the rollers 2 6 4 and 2 6 6. The cooperation of 2 8 2 with the slider 2 8 4 and the slider 2 2 2 can convert the circular motion of the transmission wheel 26 into the linear motion of the transmission block 2 8 on the slide rail 2 2 2. And the restriction port 2 8 2 can be divided into two parts, the upper part of which is in contact with the roller 2 6 4 on one side, and the other side has a gap 2 8 3 between the roller 2 6 4 and the lower part. The other side of the opposite upper part is in contact with the roller 2 6 6, and a gap 2 8 3 is left between the opposite side and the roller 2 6 6, so that each roller can roll freely in the restricted mouth and there will be no A loose collision situation occurs, so that the detector 16 can not accurately detect the position and number of wafers due to the loose collision of the single gap 2 8 3 when the detector 1 62 is operating. In addition, the driving wheel 24 and the driving wheel 26 can be replaced by a driving gear and a driving gear, respectively, and still can play the same effect, or a reduction gear set can be used instead of the driving wheel, with different gear ratios. And can adjust different torque ratios. In addition, the structure and transmission principle of this horizontal transmission module 20 can make the transmission block 2 8 still have the function of maintaining the positioning when the rollers 2 6 4 and 2 6 6 are at the top dead center position, which can prevent the An external force parallel to the slide rail 2 8 4 caused a relative displacement between the loading port cover 16 and the loading port 1 1 2 (as shown in Fig. 1), resulting in the absence of the wafer transfer box door cover.

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491803 V. Description of the invention (7) The method can be turned on or off precisely. For more information, please refer to the invention of the horizontal transmission mold module ascending-descending stand diagram, as shown in the fixed seat 36 of the present invention. Among them, the plate 18 and the housing are supported and supported into a bearing. The belt is provided with a screw on the belt. With the adjustment of a solid seat, it can be adjusted 3 4, the passage 3 8 to 3 and there can be 3 8 empty screws on the seat 3. Roll 3 6 Roller 5 'shape can have 4, one should be loaded into the flat support vertical space 3 2 by borrowing 2 solid drive screw holes 3 through screw room 3 4 3 8 embodiment 6 5, wheel 3 6 5 Up and down, 3 6 4 will become stable. Read the fourth set of erection diagrams and vertical screw 3, 3 6 1 2 transmission die 4 5, set the screw on the fixed rod 3 8 6 3 and hole 3 The side of 6 5 is rotated and the middle of the wheel 2 can be adjusted to different three-point descending 3 shapes. Figure 7: The bottom of the vertical moving seat moving module 3 8 is fixed on the bottom (the parts of the group are the screw 3 rod 3 8 fixed seat 3 4 rotating. The plurality of rollers 3 are rolled, and the wall 3 4 6 is lifted steadily. The lifting seat 3 can be adjusted in its position, and can be adjusted in angle and contact, plus 6 is limited to the figure and the moving module is fixed at 0: The structure of the motor is fixed on the surface as the third component, and 8 is set on Fix the lower lifting seat wheel 3 6 roller 3, as shown in Figure 8, the three-dimensional, cut-out package in the frame is shown in the main package 3 2 and the transmission diagram of a plate) the ends of the two sides and the lower seat 3 4 parts, The seats of 3 6 2 and 3 6 6 2 and 3 can be used to make the vertical transmission surface diagrams respectively. If it contains: a lifting seat 3 module is fixed, you can use one on the inside of each shape, and "quote from a transmission body 3 6 1 4 can make 6 4 abut on both sides of the lower seat 3 6 6 Each roller is an adjustable roller 3 6 4 and two rollers 3 6 4 are set on the rollers and the two fixed rollers 3 6 2 are set up and down, which can be set up and down on the aisle at different angles with the rollers in the aisle space. Without face

491803 V. Description of the invention (8) Extra vibration. The adjusting body 3 6 1 corresponding to each roller adjusting seat 3 6 5 is also provided on the seat body 3 6 1 of the lifting seat 3 6 to adjust the position of the adjustable roller 3 6 4, and each is provided with a first fixed screw 3 6 7 The locking adjusting screw and a second fixing screw 3 6 8 are used to ensure the position of the roller adjusting seat 3 6 5 is fixed. In addition, a support seat 39 can be provided on the lifting seat 36, which can be raised or lowered with the lifting seat 36 for erecting the horizontal transmission module 20, and a space between the servo motor 32 and the screw 38 can be provided. The belt 3 2 2 is connected and driven. Finally, please refer to FIG. 9A and FIG. 9B, which are a perspective view and a cross-sectional view of the damping module of the present invention, respectively. As shown in the figure, its main structure includes: an adjusting body 42, two adjusting columns 44, and two positioning columns 46. The two sides of the adjusting body 4 2 are respectively provided with a first screw hole 4 2 2 and a second screw hole 4 2 4. The thread directions of the two screw holes are reversed. One end of the adjusting column 4 4 is provided. The thread 4 4 2 and the other end are respectively provided with a small hole 4 4 4. The threads 4 4 2 of the two adjustment posts 4 4 are also in opposite directions and correspond to the screw holes of the adjustment body 4 2. One end of the positioning post 4 6 Threads 4 6 6 can be fixed to the screw holes (not shown) on the panel 11 and the vertical transmission module 30 respectively, and the other end is provided with a slot 4 6 2 which can be locked with one end of the adjustment post 4 4 Close, a small hole 4 6 4 is penetrated in the direction of the vertical slot 4 6 2 and corresponds to the small hole 4 4 4 of the adjustment column 4 4, and a connecting column 4 4 6 can be passed through each small hole to fix it . In addition, one end of the connecting post 4 4 6 can be provided with a hoop 4 4 8 to prevent the connecting post 4 4 6 from coming loose, and a positioning nut 4 8 can be added to the positioning post 4 6 to position the positioning post 4 6 be tightly fixed.

491803 V. Description of the invention (9) Conversely, ϊϊ :; '' 4 2 2 and the second screw hole 4 2 4 are in the same thread direction-Yu 碉 whole 4 $ ί 6 installed and adjusted-after the appropriate angle, the screw Column 44 snaps into the slot and feeds it between the pillars, and the entire C-block 4 2 drives the drive module and the panel 1 1 I, then the phase of household A = :: 14: 8 will be determined ... ^ As a result, the freedom of movement can be limited. Whoever invents the relative movement of the transmission module components is mainly carried out in a rolling manner, which not only can improve the stability of the transmission. Chance of dust pollution due to friction.里 / 乂 置; ί :: And when the present invention is related to-a kind of wafer loading and unloading device, a kind of wafer loading and loading dreaming device with a stable operation effect, Douzhu = = stable transmission One of the effects is the horizontal transmission module: the vertical transmission / Bit ^ vibrator group, which can eliminate the vibration of the device when it is in operation, in order to improve the detection accuracy and prevent the position of the wafer from being misjudged. Therefore, the present invention is really rich in novelty. The nature and progress of the patent application are undoubtedly unquestionable. Converting to the patent, the review commissioner has given the present invention a non-use as soon as possible. The driver is only the preferred embodiment of the present invention, and: Equal changes and modifications in structure, characteristics, and spirit should be included in the scope of patent application of the present invention.

Page 12 491803 V. Description of the invention (1) Brief description of drawing number ... 1 1 Panel 1 1 2 Loading port 1 2 Loading platform 1 6 Loading V cover 1 6 2 Detector 1: 6 5 Door bolt rotation Column 1 8: Drive module fixing plate 1: 9 Lower cover 2 0 Horizontal drive module 2 2 Housing 2 2 2 Slide rail 2 4 Drive wheel 2 6 Drive wheel 2 6 2 Support post 2 6 4 First roller 2 6 6 Second roller 2 8 Drive block 2 8 2 Limit V 2 8 3 Clearance 2 8 4 Slider 3 0 Vertical drive module 3 2 Servo motor 3 4 Mounting frame 3 4 5 Channel space 3 4 6 Channel space side wall 3 6 Lift Seat 3 6 1 Seat body 3 6 2 Fixed roller 3 6 3 Screw hole 3 6 4 Adjustable roller 3 6 5 Roller adjustment seat 3 6 6 Adjustment screw 3 6 7 First fixed screw 3 6 8 Second fixed screw 3 8 Screw 3 8 2 Bearing 3 9 Support seat 4 0 Damping module 4 2 Adjusting body 4 2 2 First screw hole 4 2 4 Second screw hole 4 4 Adjustment post 4 4 2 screw pattern 4 4 4 small hole 4 4 6 tie post

Page 13 491803 V. Description of the invention (11) 4 6 Positioning column 4 6 2 Card slot 4 6 4 Kid L 4 6 6 Thread 4 4 8 Hoop 4 8 Nut 5 0 Vertical drive module 5 2 Servo motor 5 4 Base 5 4 2 Linear slide 5 6 Screw 5 8 Lifting seat 5 8 2 Screw hole 5 8 4 Slide hole 491803 Brief description of the drawing Figure 1: This is a perspective view of a preferred embodiment of the present invention; Figure 2 ... The perspective view of the embodiment shown in FIG. 1 after the lower cover is removed; FIG. 3 is a perspective view of the back of the embodiment shown in FIG. 1; FIG. 4 is a view of the horizontal transmission module and the vertical transmission module of the present invention. Three-dimensional ffl; Figure 5: A perspective view of the horizontal transmission module of the present invention; Figure 6: A cross-sectional view of the horizontal transmission module as shown in Figure 5; Figure 7: A vertical transmission as shown in Figure 4 A perspective view of the module lifting base; Figure 8 is a cross-sectional view of the lifting base in a fixed base as shown in Figure 7; Figure 9A: is a sectional view of the vibration damping module of the present invention; Figure 9B: It is a three-dimensional exploded view of the vibration damping module shown in FIG. 9A; and FIG. 10: It is a conventional wafer loading and unloading device. A schematic view of the drive module.

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Claims (1)

Scope of patent application • A wafer loading and unloading device with a stable operating effect. The main manufacturing system includes: a panel, which can be locked to a workstation, and the panel is provided with a loading port. The entrance cover is provided with i on the loading port, and the plate can be closely sealed, and the loading port is provided with a loading platform to load a wafer transfer box; ', a vertical transmission module, which One end is fixed on the panel; a Shiping drive module is set on the vertical drive module, which can lower the mouth cover and the opened wafer transfer box door to the straight drive module and lower the work waste from the vertical plate = Connect the panel to the vertical drive module. 〃 Between the panels, you can eliminate the vibration of the device when it is operating. 2 If the patent application scope of the first item is Cheng T u only load and unload device, J: Zhongxi horizontal transmission module structure includes · Eight-: body, which is used to house the components of the module and a slide rail is fixed on each side; 疋, a motor is installed on the side of the housing, which can be used. 1 & & for horizontal transmission module The power transmission wheel is connected to the motor and is worthy of transmitting power to the driver k, ^ + j. The transmission wheel is provided with a support pillar at a position away from the axis, and at least one roller is provided on the support pillar; and A transmission block is located above the casing. A slide block is arranged on each side of the transmission block, and the sliding blocks are respectively arranged on the slide rails of the casing. I1H Page 16 491803 VI. Scope of patent application There is a restriction port to accommodate the roller. The function of the slider and the restriction port can be used to convert the circular motion of the transmission wheel into a horizontal linear motion. 3 · The loading and unloading device as described in item 2 of the scope of patent application, wherein the limitation of the transmission block: the mouth is an elongated hole, and its direction is perpendicular to the sliding handle of the housing. 4 · The loading and unloading device as described in item 2 of the patent application scope, wherein The restriction system can be divided into two parts, the upper part of which is in contact with a roller on one side, a gap is left between the other side and the roller, and the lower part is on the other side opposite to the upper part. The rollers are in contact, and a gap is left between the opposite side and the rollers, so that each roller can freely roll in the restricted mouth without loosening the collision person. 5 · The loading and unloading device as described in item 2 of the patent application scope, wherein the horizontal transmission module further includes a driving wheel, and the power of the motor is transmitted to the driving wheel by the driving wheel. 6 · The loading and unloading device according to item 5 of the scope of the patent application, wherein the driving wheel and the driving gear train can be replaced by a driving gear and a driving gear, respectively. 7. The loading and unloading device according to item 2 of the scope of patent application, wherein the motor is a stepping motor. 8 · The loading and unloading device as described in item 1 of the scope of patent application, wherein the panel is further provided with a drive module fixing plate for fixing the vertical drive mold curse. -9 · The loading and unloading device described in item 1 of the scope of patent application, wherein the Page 17 6 10 11 12 、 Application patent scope f :, the structure of the moving module includes: of: on the panel, it can be used to accommodate and support the vertical transmission space, "each component, the two sides of the two sides are respectively Forming-ίϊ fixed to the fixed seat 卩 ^ σσ each ° -bearing, so that the screw and sigh at the lower end of the fixed seat, so as to drive the screw rotation; :: 座 《ί Lifting seat is provided with-screw holes , Can make the screw horizontally drive the module from the basin: ;;;;; ::: drive the second one installed on it :; The structure of the load lifting seat described in item 9 of the luxury patent scope includes a private clothing 1 螺 口 Ϊ 一 Ϊ 体 螺 螺 ： 容 ;; each member of L fixed lifting seat, which is provided with ^ screw holes, through which the screw can pass through m wheels, two are set on both sides of the base, by the roller It can contact the solid lowering action. The soil can make the lifting seat stably lift, such as No. 10 of the scope of patent application, +, ^ ^ The plurality of rollers are loaded and loaded on the seat body J, among which the scope of patent application 10th = Those who set the system symmetrically. A plurality of rollers on each side of the lifting seat in the bean roll two, ... into the two opposite carrying-out means' ::: fixing base and at least the passage space of the form - not :: 2, for each of the rolling roller against the corresponding side wall drawn up the angle d. 4918U3 VI. Scope of patent application 13 · If you apply for the loading and unloading device described in item 10 of the upper body of the seat, each side is equipped with a roller adjusting seat, and each can be divided into at least one adjustable roller The fixed roller is fixed on the base. The load described in Section 13: The loading and unloading device has an adjustment screw corresponding to the roller adjustment seat. The loading and unloading device described in Item 13 has at least one fixing screw to ensure the fixing. The loading and unloading device described in Item 9 serves a motor. The loading and unloading device described in item 9 further includes a support base, which is fixed to the horizontal transmission module of the lifting attack. The loading and unloading device described in item 1, the system includes:. Each side of the whole body is provided with a screw hole; one end is provided with a thread to be screwed into the adjusting body respectively and is provided on the vertical transmission module opposite to the connecting plate, and one end of each is provided with a-^ slot, which can be engaged at the end By. The roller system on both sides of the patent range of the loading and unloading device described in item 18 and at least the patent range still contains the position adjustment range of the patent range of the roller range. The patent range is 14%. If you apply for the seat body adjustment seat, if you apply for a motor, such as a patent application, a vertical transmission module is used to support and frame an adjustment body such as a patent application, a vibration suppression module, the two adjustment posts, and their screw holes; Column, the other end and the surface post are not provided with thread 1 9 · For example, the patent application 16 17 18, in which the side roller is adjusted, which is used to adjust, where the roller is in the seat, and the two sides of the panel 'With adjustments' Page 19 491803 VI. Application scope of patent 20 of the two sides of the two tunes · If applying for the vibration damping engagement, place _ 21 · If applying for the vibration damping end, prevent 2 2 · If applying for the vibration damping there is a thread the screw Cap 2 3 · —The seed system includes a panel, and the plate is densely loaded with one vertical and one horizontal module and applied to the shell wheel. The entire column has two screw holes and screw holes. The patent range module is still included, and a patent range module is worn. The group is still packaged. The patent scope of the connection module is still packaged. The modules are packaged separately, and the actions are as follows: The pattern is also the pattern. The pattern is also the eighth. The hoop out of the project is the vertical nut, and the corresponding loading body described in the loading and unloading device, the column, and the adjustment column and the positioning column and the connecting column are fixed through. The loading and unloading device of A, wherein, can be hooped on one of the connecting columns. The 20th contains two loosening and the eighteenth contains two screws. The fruit loading and unloading device is mainly described in the loading and unloading device. Among them, one end of each positioning post is provided with a drive module and a panel, and another load can be locked. Wafer-carrying transmission module The transmission module includes a fixed, internal body, connected to a motor at a workstation. The panel is provided with a loading port inlet cover plate, which can be installed on the loading port, and can be connected with the lower surface entrance. A loading platform is provided for boxing; one end is fixed on the panel; and the vertical transmission module is provided, and the horizontal transmission is a housing for receiving the components of the module and two A sliding handle is fixed on each side; a motor is provided to provide power for the horizontal transmission module; a transmission can transmit power, and the transmission wheel leaves the shaft center Page 20 491803 VI. There is a support column at the location of the patent application, and at least one roller is provided on the support column; and a transmission block is located above the housing, and a slider is provided on each side of the support block, which is located across On the sliding handle of the housing, and the middle part of the transmission block is worn-there is a restriction port to accommodate the roller, and the circular motion of the transmission wheel can be converted into the use of the slider and the restriction port. Horizontal linear movement, so as to move the loading port cover and the opened wafer transfer box door inward, and lower it with the action of the vertical drive module. 24. The loading and unloading device as described in item 23 of the scope of patent application, wherein the restriction opening of the transmission block is an elongated hole, and its direction is perpendicular to the slide of the housing. 25. The loading and unloading device as described in item 23 of the scope of the patent application, wherein the restricting opening can be divided into two parts, which are in contact with a roller on the opposite side and the other side Then there is a gap between each and the roller, so that the roller can freely roll in the restricted mouth without loosening the collision person. 0 2 6 · The loading and unloading device as described in item 23 of the patent application scope, wherein the horizontal transmission module A driving wheel is further included, through which the power of the motor is transmitted to the driving wheel. 27. The loading and unloading device as described in item 23 of the scope of patent application, the structure further includes at least one vibration damping module connected between the other end of the vertical transmission module opposite to the connection panel and the panel. Eliminate vibration when the device is operating. 28 · —A kind of wafer loading and unloading device with stable operation effect, its main structure Page 21 491803 6. The scope of the patent application system includes: A panel that can be locked to a workstation. The panel is equipped with a loading port and another loading port cover is set on the loading port. The panel is tightly attached, and there is a loading platform under the loading port for loading a wafer and a transfer box; A vertical transmission module, one end of which is fixed on the panel, the vertical transmission module system includes: a fixed seat, fixed on the panel, which can be used to receive and support the various components of the vertical transmission module. A channel space is formed on the inner side respectively; a screw is provided with a bearing on the upper and lower portions of the screw to fix the screw on the fixed seat; a motor is fixed on the lower end of the fixed seat to drive the screw to rotate; and a lifting seat, The lifting seat is provided with a screw hole through which the screw can pass, and can perform stable lifting movements in accordance with the passage space of the fixed seat; and a horizontal transmission module is provided on the lifting seat of the vertical transmission module, which can Move the loading port cover and the opened wafer transfer box door inward, and lower it by the vertical drive module. 29. The loading and unloading device as described in item 28 of the scope of patent application, wherein the structure of the lifting seat includes: A body for accommodating and fixing the various components of the lifting seat, a screw hole is passed therethrough to allow the screw to pass therethrough; and a plurality of rollers are respectively arranged on both sides of the seat body, and the roller and the fixing seat The side walls of the passage space are in contact with each other, so that the lifting seat can perform a stable lifting action. Page 22 491803 VI. Patent application scope 30. The loading and unloading device as described in item 29 of the patent application scope, wherein a plurality of roller systems on each side of the lifting seat are arranged at least two different angles and fixed The side wall of the seat passage space is also set at a corresponding angle for each roller to abut against and roll. 31. The loading and unloading device described in item 29 of the scope of patent application, wherein two sides of the base body are each provided with a roller adjusting seat, and a plurality of roller systems on each side can be divided into at least one The adjusting roller is disposed on the roller adjusting seat and at least one fixed roller is fixed on the seat body. 3 2 · The loading and unloading device as described in item 31 of the scope of patent application, wherein the seat body further includes an adjusting screw corresponding to the roller adjusting seat for adjusting the position of the adjustable roller. 3 3 · The loading and unloading device as described in item 31 of the scope of patent application, wherein the base body further includes at least one fixing screw for securing the position of the roller adjusting base. Page 23