經濟部中央標準局員工消費合作社印裂 480579 A7 _______B7 五、發明説明（/ ) 本發明偽有關於一種控制半導體處理設備的方法，更 待別地，傜有關於一種即時控制半導體處揮势備_方法， 其、中，對應的單元利用測量資料受到即時控制。 半導體元件偽透過大量的單元處理製造而成。據此， 像濺鍍設備、蝕刻設備等等之大鼍能输繪密-地執行處理的 設備偽被置放在一半導體處理線上，以執行對應的單元處 Μ ° 第1圖為控制該等半導體處理設備:> 習知方法的流程 圖。請參閲第J .圔所示，半導體處理势備偽IS由決定單元 處理是否R在其之最佳處理條件下執行來被控制。該方法 將貪於此t被描述。 首先，一個經由替干處理製成之産品的_特牲值像被測 f ，而且，對應於所測量特性值的資料像被儲存於一主 :機電腦的咨料_在器内。該資料偽被m眛顯示於一操作者 界面個人電路（〇 / I P C)的K視器上。然後，_著將該顯示 資料與_利用該0/1 PC執行電腦作業之操作者初始地設定 的最佳測量資料做比較，決定詼_理的锫袢值杲本_正確地 施加轫該產品。如果該産品被決定為不良的話，玆奄St » 重新處理，而且對該設備會採取確営的行丨縱決該設備 的萌題。 然而，該方法會遭.遇到若于問題。 首先，如果在二瘅串菫元處理被重S執户之後，在一 • 測替步驟出現錯誤的話，操作者利用卽時顯示於主機電腦 的資料向前埠溯該錯誤出現在嘟個最猶也靈盡_： 3中。其 本紙張尺度適用中國國家標準（CNS)A4規格（210x297公釐） , 裝 '訂^ (請先閲讀背面之·注意事項再填寫本頁) /9 Α7 Β7 經濟部中央標準局員工消費合作社印製 i'發明説明（z ) 後，對該良備採取一連串適當的行動W ®沣咳_設備的問題 。攀此，傺需雲大量的時除來分析該所測量曰ΒΠ賠£示的 »料，#眞盤一鍩誤埤fL行的_#驟且在目前執行的處理中 反映對該錯誤地勃π及所偵測的步驟所採取的行動。結果 ，在分析期間，_蔞元處琿會在錯譃地設定的處理條件下， 在寒設備印持續執行。此時，不宗莘讹劫片的處理並不能 _預先防止。 當某一步驟的處揮條件因工程師的鍩雖而淖有茂設定 為暴彳ij咖件時，當包JS數個晶圓的貨品係揮條件的值 被錯誤地輸入的情況下被持鑛處理時，及# @ 3 ^在處 理周遭因設備本身的問題而汐右®設定為最佳條件的情況 下被持屋執行時，錯、，迅$控處理條件會出現。 此外，由於半導體設備的處理挖制不f &時執行，不 完美地執行的處理不能夠W J卩被偵測到。齓果，工程師無 法探取解決與不完美♦μ ^ ^ _瑚相攧之問題的埯當行動 〇 因此，本發明之目的是為提供一種卽時控制半導體處 理辑備的方法，其中」如果芍測量的資料無法滿.足存主機 電腦i定的埽住丨量資料，一第一特殊規則，藉著被構築 於該ΐ機電腦内的據匕模組，該有一單元慮理在其内被即 瞎處理之設備的.薄作被停止、對一經由該單元處理製成之 産α的製程被停止爽者該‘哄的薄作與對該产旦的該處理 過轡#同時被停止。 ' 為了達到以上的目的和其他1憂點，本發明一種即時控 ~ 5 - ^紙張尺度適用中國國家標準（匚奶）人4規格（210'/297公釐） (請先閱請背面之·注意事 1· 項再填· :寫本頁) 裝· 、1Τ /y 五、 經濟部中央標準局員工消費合作社印製 發明説明（1 制半導體處理設備的方法包含如下之步驟：決宋繫痕於蟬 由一.單元處理製成之産品户特件值的測暑資料是否處於在 主機電腦中設定之》SjP麗氣的範2、之内；如果該測量 資料被決t為處於該最佳測量資料的範圉ί±ί，首先決定該 j則量資.料是否滿玛一第一怯殊規則；如果經由第一個決定 步驟決定該測囊身為滿s該笛一待殊規則的話，正常地 蓮作目命劫行該處理的鐵備；如果該請兽^焚決定為不 滿足i亥第一特殊規則的話，同時俸北目前執行該璧元寝理 之設備的M iV和對該産品的，f程如果詨剜晷咨糾》決定 為>1塵il該最佳測量資料的圍内的話，，停止毁Μ産.品的 製程；其次，在對該産品的製稃被停止之湊：，決定該週1量 1 a是否滿足該第一特殊規則；如果經由第二個決定步驟 決定該撰L量_直赳滿足該第一特殊規則的話，赏乍目 前執行該處理的笋偷；S如果_該測量資料被決定為不滿足 該第一特每規f的話，隻止目前執_行該處珥之(設條的蓮作 〇 該第一待殊規則為一最i控制崩.限，其偽被使用於羞 社i理控fj，（SPC) ji θ範圍偽從一上摔制極限到一控制 極、限。 根據本發明的一戀化實施例，該卽時控制半導體處理 設備的方法更包栝如下之步驟：第三，妒果經由該第一個 決定步驟決定該敗量足該(||二嚴規則的話，在該 設f被正亀蓮作之前，決定該測量資料是否滿足一第二特 :鍊規則，而且如果笔測量資料被決定為床滿足該第二唔殊 -6 - 本紙張尺度適用中國國家標隼（CNS ) A4規格（210X297公釐） 訂 (請先閱請背面<注意事項再填寫本頁) 480579 Α7 Β7 經濟部中央標準局員工消費合作社印製 五、發明説明（4 ) 規則的話，同時停止對該産品的琐释和誇設U的蓮作；及 第四，如果經由該第二値決定步驟決定該測鼋審$滿足該 第一特殊t則的話，在該設備被9常蓮作之前，決定該測 量疑斗是否滿足一 #二特4規則，而且如果該神I暑資料被 決定為不滿足該第二特洗規則的話，停认該設：的蓮作。 根據本發明的另一夢化實施例，該即時控制半導體處 理設備的方法更包括如下之步驟：·第三，如果經由該第一 値4定步驟決定該測量資料f足該第一特殊#則的話，在 該設備被正费蓮作之前，決定該ρ量育料是否f足一第二 待翁規則，而且如果該測量資料被決定為X藏巳該第二特 殊規則的話，同時声止對該産品的〜程和該設備t蓮作。 根據本發明的又另一遴化實施例，該即時崑制半導體 處理設備的方法更包含如下之步驟：第四，如經由該第 二個fc定步驟決定該測量S料逖足該I一特弘規則的話， 在it設備被正常靈今之前，決定該®量資料是否g A—第 二声/殊規則，而旦如畢該測署_資料被決定为X纈足該第二 特穸規則的話，停止該設備的蓮作。 該第二恃殊規則為一般控谁絲限，其啟被使用於SPC 而且包括2/3規則、規則和5趨翌L規則。 如先前所述之控制生導體處理設備K鈇果，利用測量 會料能夠即時摔制單元I理，而且在單元處理被完全够行 疬能夠立即決亩詨菫元處#是否在其最佳修性下塒執行。 因此，能隽預先防止不#美地_ α的處理。 本發明之以上目的和其他優點，藉由配合附圖詳細地 (請先閱請背面<注意事項再填寫本頁) I項再填· 裝· 訂 本紙張尺度適用中國國家標準（CNS ) Α4規格（210 X 297公釐） 480579 經濟部中央標準局員工消費合作社印製 A7 B7__五、發明説明（$ ) 描述其之較佳實施例，會變得更清楚，其中： 第1圖傺用於控制半導體處理設備之習知方线的流程 圔； 第2圖#太發明用於控制半導體處理設備之条，的示 意方塊圖； 第3 A和3 B圖描繪沐W堕用於RU满控制；確®處理 錄備：> 方吱的流程圖；及 第4 A和4 B圖描繪笋3 A和3 B晴__中所方之方法之 p /h蜜始·例的流程圖。 本發明琛在會配合該等附圖#吐歡作更完全β描述， 其中，本發明之較佳實施例被顯示。級_而，本發明可以以 很多不同的^式實現，而且不應被限制在於此€所展示的 F身例；更確切地說，這些莨沲例被提供於氕於本掲露會 是撤底且完全，而且會完伞傳達本發明的節_給熟習此項 兔術者。 第2圖像本發明用於控制半導體處理設備之条統的示 、急方塊圖。如在第2圔中所顯示般，該条統包括：一設備 1 ，單元處理偽於該設備1 Φ執行；及一主機電t。，個 別之單元處理的最佳測量資料偽儲存於該主機電内並 且包括一値能夠自動她柄對産品之製稈和該設備之蓮作停 处的聯鎖模組5 。該設備1傜線上連接至該主屬電腦3 ， 以致於該主機電腦3的聯鎖模組5能夠平順地樓搂眘料到 該設隨J及從該設備1接收瓷料。 第3 A和3 B圖描弟利用第2圔之么巧卽時控制半導 -8 - I紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閲請背面之·注意事項再填寫本頁) 1· 項再填- 裝·Employees' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 480579 A7 _______B7 V. Description of the Invention (/) The present invention relates to a method for controlling semiconductor processing equipment, and more specifically, there is a method for controlling semiconductors in real time. Method, in which, the corresponding unit is under real-time control using measurement data. Semiconductor devices are fabricated by processing a large number of cells. According to this, equipment such as sputtering equipment, etching equipment, etc. capable of carrying out densely and densely performing processing is pseudo-placed on a semiconductor processing line to execute the corresponding unit M ° Figure 1 is for controlling such Semiconductor processing equipment: > Flow chart of a conventional method. Please refer to J. 圔. The semiconductor processing potential is controlled by the decision unit whether or not R is performed under its optimal processing conditions. The method will be described by this t. First, a special value image of a product made through a dry process is measured f, and a data image corresponding to the measured characteristic value is stored in a host computer's reference material. The data is pseudo-displayed on a K-viewer of an operator interface personal circuit (0 / IPC). Then, compare the display data with the best measurement data initially set by the operator who uses the 0/1 PC to perform the computer operation, and determine the value of the rationale. The correct application of the product . If the product is determined to be defective, St »re-process it, and take corrective action against the device, regardless of the device's problems. However, this method suffers from problems. First of all, if an error occurs in the first test after the second user has processed the S account, the operator uses the information displayed on the host computer at the time to trace back to the port. Ye Lingji_: 3 in. The size of this paper applies the Chinese National Standard (CNS) A4 specification (210x297 mm), binding '(please read the precautions on the back before filling out this page) / 9 Α7 Β7 Printed by the Central Consumers Bureau of the Ministry of Economic Affairs Consumer Cooperatives After making a description of the invention (z), take a series of appropriate actions on the well-being of the device. In order to solve this problem, a large amount of time is needed to analyze the measured data. The # Β 盘 一 鍩 假 埤 fL 行 的 ## step is reflected in the currently executed processing to reflect the error. π and the action taken by the detected step. As a result, during the analysis period, under the processing conditions set erroneously, the execution of the device will continue to be executed in the cold equipment. At this time, the processing of the Buddhism robberies cannot be prevented in advance. When the processing conditions of a certain step are set by the engineer to be violently set due to the failure of the engineer, when the value of the condition of the product line containing several JS wafers is entered incorrectly, the mine is held. During the processing, and # @ 3 ^ when the processing is performed by the owner of the house under the condition that the Xiyou® is set to the optimal conditions due to the problem of the equipment itself, the processing conditions will be wrong and the control will appear quickly. In addition, since processing of semiconductor devices is not performed at f & time, processing that is not performed perfectly cannot be detected. As a result, engineers cannot explore solutions to the problems associated with imperfections. Therefore, the object of the present invention is to provide a method for controlling semiconductor processing equipment in a timely manner, where "if" The measured data cannot be full. There is a first special rule for storing the amount of data determined by the host computer, a first special rule, which is based on the data module built in the computer. That is, the thin processing of the blind processing equipment is stopped, and the process of producing α produced by the unit processing is stopped. The coveted thin processing and the processing of the production process are stopped at the same time. '' In order to achieve the above purpose and other concerns, the present invention provides a real-time control ~ 5-^ The paper size is applicable to the Chinese national standard (milk milk) person 4 specifications (210 '/ 297 mm) (Please read the back first. Note 1 · Refill the item:: write this page), install, 1T / y 5. Print the invention description by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (1) The method of manufacturing semiconductor processing equipment includes the following steps: Yu Chan: The unit's heat treatment data of the product's special item value made by the unit processing is within the range 2 of the "SjP Beauty" set in the host computer; if the measurement data is determined to be at the best The range of the measurement data is determined first. The j is determined first. It is expected whether Manma is the first rule; if it is determined by the first decision step that the capsule is full and the flute is a rule. Normally, lotus is used as an iron preparation for the purpose of stealing the treatment; if the beast is determined to fail to meet the first special rule of the Hai, at the same time, Beibei currently implements the M iV and For this product, if the process is not correct, the decision is> 1. If it is within the range of the best measurement data, stop the process of destroying the M product. Second, before the production of the product is stopped: determine whether the first 1 quantity 1 a of the week meets the first special rule; if it passes The second decision step determines the amount of L. If the first special rule is satisfied, the first step is to perform the processing; if the measurement data is determined not to satisfy the first special rule f Only the current implementation of the place where it is performed (the lotus of the article is set. The first special rule is a minimum control collapse. Its pseudonym is used in the social control fj, (SPC) ji θ The range is from a top limit to a control pole and limit. According to an embodiment of the present invention, the method for controlling semiconductor processing equipment at a time includes the following steps: Third, the jealousy passes through the first This decision step determines whether the loss is enough for the (|| two strict rules, before the setting f is made by Zheng Lilian, decide whether the measurement data meets a second special: chain rule, and if the pen measurement data is determined as The bed satisfies this second special specification -6-This paper size is applicable to Chinese national standard (CN S) A4 specification (210X297 mm) (please read the back of the page first, and then note this page) 480579 Α7 Β7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. If the rules of the invention (4) are stopped at the same time A trivial explanation of the product and a presumption of U; and fourth, if it is determined through the second decision step that the test test $ satisfies the first special rule, before the device is made by 9 Chang Lian , Determine whether the measurement doubt meets the # 1 special 4 rule, and if the god I summer data is determined not to meet the second special wash rule, stop recognizing the design: lotus. According to another of the present invention In a dream embodiment, the method for controlling semiconductor processing equipment in real time further includes the following steps: Third, if the measurement data is determined to satisfy the first special condition through the first step, the device is Before Fei Lian is working, decide whether the ρ amount breeding material is a second rule of treatment, and if the measurement data is determined to be the second special rule of X Tibetan mastiff, at the same time stop the process and The device is made in lotus shape. According to yet another alternative embodiment of the present invention, the method for instant semiconductor processing equipment further includes the following steps: Fourth, if the second fc determination step is used to determine that the measurement S is sufficient for the I-specific In the case of Hiroshi's rule, before the IT device is normalized, it is determined whether the amount of data is g A—the second sound / special rule, and once the test is completed, the data is determined as X Val is the second special rule. If so, stop the lotus of the device. This second special rule is for general control, which is used in SPC and includes 2/3 rule, rule and 5 trend rule. As mentioned earlier, the control of the raw conductor processing equipment K can be used to instantly measure the unit, and when the unit processing is completely enough, it can be immediately determined whether the unit is at its best repair. Sexual diarrhea execution. Therefore, it is possible to prevent the processing of # 美 地 _α in advance. The above object and other advantages of the present invention are detailed in conjunction with the accompanying drawings (please read the back of the page first, < notes before filling in this page), and then fill in I. Refilling, binding, and paper size. Applicable to China National Standard (CNS) Α4 Specifications (210 X 297 mm) 480579 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7__V. Description of the Invention ($) The preferred embodiment will be clearer, of which: Figure 1 is used The flow of the conventional method for controlling semiconductor processing equipment; Figure 2 # Schematic block diagram of the invention for controlling semiconductor processing equipment; Figures 3 A and 3 B depict the use of RU full control ; OK ® processing recording: > Flow chart of Fang Shui; and Figures 4 A and 4 B depict a flow chart of p / h honey beginning and example of the method described in Figures 3 A and 3 B. The present invention will be described in more detail in conjunction with these drawings #TUhuan, wherein the preferred embodiment of the present invention is shown. However, the present invention can be implemented in many different forms, and should not be limited to the F forms shown here; rather, these examples are provided in the present disclosure. Bottom and complete, and will complete the umbrella to convey the festival of the invention _ to those familiar with this rabbit surgery. The second image is a block diagram of a system for controlling semiconductor processing equipment according to the present invention. As shown in Section 2 (a), the clause includes: a device 1, unit processing is performed pseudo-the device 1 Φ, and a host computer t. The best measurement data processed by the individual units is stored pseudo-inside the main unit and includes an interlocking module 5 that can automatically stop the product stem and the lotus of the device. The device 1 傜 is connected to the host computer 3 online, so that the interlocking module 5 of the host computer 3 can smoothly understand the setting and receive porcelain from the device 1. Figures 3 A and 3 B depict the use of the second time to control the semiconducting -8-I paper size applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the first and note on the back (Fill in this page again) 1. Fill in the items-Pack ·
、1T 480579 A7 B7__ 五、發明説明（G ) 體處理設備之方法的流程圖。請參閲第2、3_ A和3 B圖 所示，該方法將會詳細地作描述。 在步驟M0 ，對應於經由一蜇元處拥完遞之_産品之特 性值的測量資冑v被決穿杲本仿於在該主機電腦内預設之單 元處理之最佳測量資料的範匱f。誶朵醱以0包括四値子 步驟 q2,S14，S16 和 S18 。 在步驟S12 ，對應於經由C，气坪之_別産品之最 佳待性值的最住湖I鼍資料被設j於电主機電腦的4 U體内 〇 在步驕L4 ，該處揮像於具有一龆句栝20革25te晶圓 之舉洗地區的設備巧執行。 在.步驪S16 ，經由處，揮淙成之産品的牲姓馆滤測量， 而且對輯於該等測量特性值的測量資料被回報f該主機電 腦。 在步rbis ，該測量及回報資料被泮宙是否位於儲存 在該主機電腦之|2億體中之最佳測量資料的餐J内。儲存 於該本機電腦之記億體内之最连資料的範蠻,為一》% :菊丨袖戥繼_産品的最大杳紂癞_。 經濟部中央標準局員工消費合作社印製 如果誌測量和回報資料被決定為位於被儲存在諫主機 電腦内之最佳測量資料的範圍内的話，有關於該_畺資料 晕_否滿足一第一特姝，規則的笛一浓定僳在步驟完成。 該笋一嗜殊規則是為在統計處理e制（spc)中所使用 的^)大滓制極限，例如，範圍從一 F坊制糨限（UCL)到一 下控制極限（LCL)的與蚵極限。由於該控制極限搡藉箸測 -9 - 本紙張尺度適用中關家標準（CNS ) A4規格（2獻297公釐) ' 經濟部中央標準局員工消費合作社印製 480579 A7 .__B7____ 五、發明説明（D ) 量透過單元處理産生之産品的特件倌和統計地計+算所測量 的特性值來得到，該控制極限可以作為處理中之改變的指 磾。容句話說，當目前執行之虡捆的剜景咨钭不是位於該 控制極限的啷圍内時，表示若干故障偽_也規_於目前執 卽使當該測昝咨料像位於被設定# t «雷腦_肉之罾佳 測量資料廊範麗内時，要作出有關·於詨測量資料是否滿足 該第一待冰崴則之進一步之決宙的理由如下。如果該處理 iM吏蓮作故障出頊於該^備中髩是在最佳處理條件下被執 於，且在該處理完成之後所測量的資料是位於最佳測量^ 料的範圍内的話，目前處理的産品可能不是故障的。然而 ，經由該設備内之後面的處理所處理之不良産品的可能性 注於該設碏的領作故瞳而像t |加。不良産品之wr绝杜和 該詩備的蓮作故障能夠在步驟S2〇 »頊先偵鉍 >〔防止。 否則，如果該回報資料在步驟S18被決定為不是位於 妒儲存在主機電腦内之最佳測量資料的範圍内的話，對該 産品的經傷於步觏s ,〇由構築在主機雷腦肉的聯鎖模組 5停止。 如果該回報資料在步驟S20被決定為滿足_該第一特殊 規則吃話，該掛備#步驟S40被不常葎作D!執行後苟的處 理。 否則，如果該回報資料在步驟S20被決定為不滿足該 弟一特殊規刖的話，對該産品_的製程及該設備@蓮作在步 IS50由該聯鎖模組5停止。 -10 - 標準（CNS ) A4 規格（210χ297公釐） (請先閱#背面之。注意事項再填寫本頁) —φ裝- •項再填寫太 、1Τ 480579 A7 B7 五、發明説明（8 ) 當該回報資料不滿足該第一特殊規則時，這表示該回 報資料不是位於從該上控制極限到該下控制極限的範圍内 Ο 在對該産品之製程和該設備之蓮作於步驟S50被停止 之後，一連串調整被設定在該停止之設備内之處理條件的 動作偽由工程師執行，以致於在該設備上的問題在步驟 S60被解決。當該等問題被解決時，後面的處理被執行。 在對該産品之製程於步驟S30被停止之後，關於該回 報資料是否滿足該第一待殊規則的第二決定僳於步驟S70 做成。 作出國於該回報資料是否滿足該第一特殊規則之第二 決定的理由傜如下。在一測量處理所測量的資料根據處理 性能的形式而具有不同的特性，例如，整批式處理或者單 一式處理。據此，即使該測量資料不是在該最佳測量資料 的範圍内，如果該測量資料並非嚴重和不利地影響該産品 的話，偽沒有必要聯鎖該設備。 經濟部中央標準局員工消費合作社印製 (請先閱#背面之>i意事項再填寫本頁) 如果該測量資料在步驟S70被決定為滿足該第一特殊 規則的話，該設備係在步驟S80被正常蓮作，以致於後面 的處理被執行。 否則，如果該測量資料不滿足該第一待殊規則的話， 該設備的蓮作偽於步驟S90被建搆在該主機電腦内的聯鎖 模組5停止。 其後，偽採取一連串適當的動作來調整該設備的處理 條件，以致於問題能夠被解決。當該等問題被解決時，後 -11- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ι〇υ：>79 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（1 ) 面的處理被執行。 於此時，有關在步驟S60和S100所採取之連串適當動 作的資訊每當該等動作被採取時偽被自動儲存於主機電腦 。藉此，當在該半導體處理設備内被執行之後面的處理被 控制時*有鼯所採用之動作的儲存資訊能夠被使用於尋找 對聯鎖選擇有影響的重要因素。 以上的步驟被重覆執行直到整·値處理被完成為止。 當該設備被停止時，操作者或者工程師藉著關於警告 訊號的顯示資訊是否被産生於採線上式連接至該設備和該 主機電腦之0/1電腦的監視器上來被告知事實，以致於操 作者或者工程師能夠迅速處理狀況。 該方法可以如第4 A和4 B圖所示般作改變。在該方 法中*決定該測量是否滿足第二特殊規則的步驟S110和 S120僳進一步分別被包括在步驟S20與S40之間和在步驟 S70與S80之間。這些步驟S110和S120將會被描述。 如果該測量資料經由於步驟S20的第一決定被決定為 滿足該第一待殊規則的話，在該設備像於步驟S40被正常 蓮作之前，藺於該測量資料是否纈足第二待殊規則的第三 決定偽於步驟S110做成。如果該測量資料偽於步驟S110被 決定為不滿足該第二特殊規則的話，對該産品的製程和該 設備的蓮作僳同時停止。如果該測量資料經由於步驟S70 的第二決定被決定為滿足該第一特殊規則的話•在該設備 僳於步驟S80被正常蓮作之前，簡於該測量資料是否滿足 第二特殊規則的第四決定偽於步驟S120做成。如果該測量 -12 - 本紙張尺度適用中國國家標準（CNS )八4規格（210X297公釐） ----------- (請先閲请背面<注意事項再填寫本頁) 訂 經濟部中央標準局員工消費合作社印製 480579 A7 ____B7_ 五、發明説明（丨0 ) 資料係於步驟S120被決定為不滿足該第二特殊規則的話， 該半導體處理設備被即時控制侔可停止其之蓮作。 換句話說，作為本發明的另一變化實施例，決定該測 量資料是否滿足該第二持殊規則的步驟S110可以進一步僅 被包括在步驟S20與S40之間。作為本發明的又另一變化 實施例，決定該測量資料是否滿足該第二恃殊規則的步驟 S120可以進一步僅被包括在步驟S70與S80之間。 該兩實施例的步驟S110和S120像與第一變化實施例之 先前描述的步驟S110和S120相同。因此，其之詳細描述將 會被省略。 該第二特殊規則是為一般使用於統計處理控制<SPC) 的控制極限。在該等實施例中，2/3規則、4/5規則和5 趨勢規則。 在第三和第四決定該測量資料是否滿足該第二待殊規 則的步驟S110和S120中，要被應用的該等第二待殊規則是 根據什麼處理將會被執行而被個別地決定。在本發明中， 該等第二特殊規則傺以下面的七種方式應用到該處理。該 數値決定步驟被設置以防止該處理因錯誤的決定而受到不 利的影響。 被應用到該等步驟S110和S120的第二特殊規則可以為 :(1)所有第二特殊規則，即，2/3規則、4/5規則和5 趨勢規則；（2)只有2/3規則；（3)只有4/5規則；（4) 只有5趨勢規則；（5) 2/3規則和4/5規則：（6) 2/3規 則和5趨勢規則；（7) 4/5規則和5趨勢規則。 -13 - 本紙張尺度適用中國國家標準（CNS )八4規格（210X297公釐） (請先閱番背面之一注意事項再填寫本頁)1T 480579 A7 B7__ V. Flow chart of the method for explaining the (G) body processing equipment. Please refer to Figures 2, 3_ A and 3 B. This method will be described in detail. In step M0, the measurement data corresponding to the characteristic value of the product that has been delivered through a unit is determined to be passed through. This model is similar to the range of the best measurement data processed by the unit preset in the host computer. f. Each of them includes four steps with 0 steps q2, S14, S16, and S18. In step S12, the data corresponding to the best livelihood value of the product through C, air quality and other products is set in the 4 U body of the computer of the host computer. In the step proud L4, the image is waved there. The equipment is performed in a washing area with a haiku 20 leather 25te wafer. At step S16, the family name filter measurement of the finished product is passed everywhere, and the measurement data on the measurement characteristic values are reported to the host computer. At step rbis, is the measurement and report data stored in the meal of the best measurement data stored in the host computer's 200 million volume? Fan Man, the most connected data stored in the local recorder of the local computer, is a "%": Ju 丨 sleeve 戥 following _ product's largest __. Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. If the measurement and reporting data is determined to be within the range of the best measurement data stored in the computer of the host computer, is there any information on the _ Specially, the regular flute set is completed in steps. The special rule is to use ^) large limit in statistical processing e system (spc), for example, the range from one Ffang system limit (UCL) to the following control limit (LCL). limit. Due to this control limit, I guess -9-This paper size applies the Zhongguanjia Standard (CNS) A4 specification (2 297 mm) '' Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 480579 A7 .__ B7____ 5. Description of the invention (D) The quantity is obtained through the special parts of the product produced by the unit processing and the statistically calculated + calculated characteristic values. The control limit can be used as an indicator of changes in processing. Let's say that when the current scene information is not within the control limit, it indicates that some faults are false. It is currently performed so that when the test information is located in the set # t «雷 脑 _ 肉 之 罾 佳佳 资料 料 资料 面 丽 Fan Line, there are reasons to make further decisions about whether the 詨 詨 measurement data satisfies the first waiting ice rule. If the processing iM failure occurs in the device, it is performed under the optimal processing conditions, and the data measured after the processing is within the range of the optimal measurement material, the current processing The product may not be malfunctioning. However, the possibility of a defective product being treated through the rear treatment inside the device is noted on the collar of the device as a pupil and like t | plus. The wr of the bad product and the failure of the lotus of the poetry preparation can be detected in step S20 first. ≫ [Prevent. Otherwise, if the report data is determined not to be within the range of the best measurement data stored in the host computer in step S18, the injury to the product will be caused by step 觏 s. The interlocking module 5 stops. If the report data is determined to satisfy the first special rule in step S20, the standby #step S40 is not frequently performed as D! Processing after execution. Otherwise, if the reported data is determined in step S20 as not meeting the special regulations of the brother, the process of the product and the device @ 莲 作 在 步 IS50 are stopped by the interlocking module 5. -10-Standard (CNS) A4 specification (210x297 mm) (Please read the # on the back. Please note this page before filling in this page) — φ equipment-• item and then fill in too, 1T 480579 A7 B7 V. Description of the invention (8) When the report data does not satisfy the first special rule, it means that the report data is not within the range from the upper control limit to the lower control limit. 0 In the manufacturing process of the product and the lotus of the device, it is performed in step S50. After the stop, a series of actions of adjusting the processing conditions set in the stopped device are executed by the engineer, so that the problem on the device is resolved in step S60. When these issues are resolved, subsequent processing is performed. After the production process for the product is stopped at step S30, a second decision as to whether the report data meets the first waiting rule is made in step S70. The reasons for the country's second decision on whether the return information meets the first special rule are as follows. The data measured in a measurement process has different characteristics depending on the form of the processing performance, for example, batch processing or single processing. According to this, even if the measurement data is not within the scope of the best measurement data, it is not necessary to interlock the device if the measurement data does not seriously and adversely affect the product. Printed by the Employees' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the notice on the back of the # first and then fill out this page) If the measurement data is determined to meet the first special rule in step S70, the device is in step S80 is made by normal lotus, so that the subsequent processing is performed. Otherwise, if the measurement data does not satisfy the first waiting rule, the fraud of the device is stopped in step S90 by the interlocking module 5 built in the host computer. After that, a series of appropriate actions are taken to adjust the processing conditions of the device so that the problem can be solved. When these problems are resolved, the post-11- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) ι〇υ: &79; printed by the Consumer Standards Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 5. SUMMARY OF THE INVENTION (1) The processing of (1) is performed. At this time, information on the series of appropriate actions taken at steps S60 and S100 is automatically stored in the host computer whenever such actions are taken. Thereby, when the subsequent processing is controlled in the semiconductor processing equipment, the stored information of the actions used by the 鼯 can be used to find important factors that affect the selection of the interlock. The above steps are repeatedly performed until the rectification processing is completed. When the device is stopped, the operator or engineer is informed of the fact by the display information on the warning signal whether it is generated on the monitor connected to the device and the 0/1 computer of the host computer, so that the operation The engineer or engineer can handle the situation quickly. This method can be changed as shown in Figures 4A and 4B. In this method, steps S110 and S120, which determine whether the measurement meets the second special rule, are further included between steps S20 and S40 and between steps S70 and S80, respectively. These steps S110 and S120 will be described. If the measurement data is determined to satisfy the first rule according to the first decision of step S20, whether the measurement data satisfies the second rule is required before the device is processed normally by step S40. The third decision is made in a pseudo manner in step S110. If the measurement data is determined to be inconsistent with the second special rule in step S110, the process of the product and the operation of the device are stopped simultaneously. If the measurement data is determined to satisfy the first special rule through the second decision of step S70 • Before the device is normally used by step S80, it is simpler than whether the measurement data meets the fourth of the second special rule The decision is made in a pseudo-step S120. If the measurement is -12-This paper size is applicable to China National Standard (CNS) 8-4 specification (210X297 mm) ----------- (Please read the back first & note before filling this page) Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 480579 A7 ____B7_ V. Description of the Invention (丨 0) If the data is determined in step S120 to not meet the second special rule, the semiconductor processing equipment is controlled in real time and can be stopped. Made of lotus. In other words, as another modified embodiment of the present invention, step S110, which determines whether the measurement data satisfies the second special rule, may be further included only between steps S20 and S40. As yet another modified embodiment of the present invention, step S120 of determining whether the measurement data satisfies the second special rule may be further included only between steps S70 and S80. Steps S110 and S120 of the two embodiments are the same as steps S110 and S120 described previously in the first variation. Therefore, a detailed description thereof will be omitted. This second special rule is a control limit generally used for statistical processing control (SPC). In these embodiments, the 2/3 rule, the 4/5 rule, and the 5 trend rule. In the third and fourth steps S110 and S120, which determine whether the measurement data meets the second rule, the second rule to be applied is individually determined according to what processing will be performed. In the present invention, the second special rules 傺 are applied to the process in the following seven ways. The numerical decision step is set to prevent the process from being adversely affected by a wrong decision. The second special rule applied to these steps S110 and S120 may be: (1) all second special rules, that is, 2/3 rule, 4/5 rule, and 5 trend rule; (2) only 2/3 rule (3) Only 4/5 rule; (4) Only 5 trend rule; (5) 2/3 rule and 4/5 rule: (6) 2/3 rule and 5 trend rule; (7) 4/5 rule And 5 trend rules. -13-This paper size is applicable to China National Standard (CNS) 8-4 specification (210X297 mm) (Please read one of the precautions on the back of the fan before filling out this page)
，579 A7 B7 1、發明説明（丨、） 首先，（1)到（7)之第二特殊規則被應用到步驟S110 的情況將會被描述。該等情況將會以使用（υ之第二待殊 規則之情況的例子作描述。在這情況中，該步驟S110主要 分成三個步驟S112, S114和S116。這將會被詳細描述。 在步驟S112，該測量資料被決定是否滿足2/3規則。 如果該測量資料在步驟S112被決定為滿足2/3規則的 話，該測量資料傜於步驟S114被決定是否満足4/5規則。 如果該測量資料在步驟S114被決定為滿足4/5規則的 話，該測量資料偽於步驟S116被決定是否滿足5趨勢規則 〇 使用（2)至（7)之第二特殊規則之步驟S110的過程基 本上偽與使用（1)之第二特殊規則之步驟S110之以上描述 的過程相同。因此*其之詳細描述將會被省略。 然後，（1)到（7)之第二特殊規則被應用到步驟S120 的情況將會被描述。該等情況將會以使用（1)之第二特殊 規則之情況的例子作描述。在這情況中，該步驟S120主要 分成三個步驟S122,S124和S126。這將會被詳細描述。 在步驟S122，該測量資料被決定是否滿足2/3規則。 如果該測量資料在步驟S122被決定為滿足2/3規則的 話，該測量資料偽於步驟S124被決定是否滿足4/5規則。 如果該測量資料在步驟S124被決定為滿足4/5規則的 話，該測量資料偽於步驟S126被決定是否滿足5趨勢規則 〇 使用（2)至（7)之第二特殊規則之步驟S120的過程基 -14 ~ 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閲請背面之注意事項再填寫本頁) 裝· 訂 經濟部中央標準局員工消費合作社印製 480579 經濟部中央標準局員工消費合作社印製 A7 B7五、發明説明（丨Z ) 本上偽與使用（1)之第二特殊規則之步驟$120之以上描述 的過程相同。因此，其之詳細描述將會被省略。 如果該測量資料傜於步驟S110和S120被決定為不滿足 2/3規則的話，這表示在該測量資料中之連續三値點中的 兩個點存在於一個在2<^與3<r•之間的區域。如果該測量資料 像在步驟S110和S120被決定為不滿足4/5規則的話，這表 示在該測量資料中之連續五値點中的四個點不存在於一個 在-1『與1(Γ之間的區域。如果該測量資料偽於步驟S110和 S120被決定為不滿足5趨勢規則的話，這表示在該測量資 料中之至少五値點偽處於持續增加趨勢或者持續減少趨勢 中。 當該半導體處理設備像如先前所述被控制時，傜有可 能即時控制於該等設備中執行的處理。據此，一連串像停 止對産品之製程、停止該設備之蓮作和同時停止對該産品 之製程和該設備之蓮作般的適當動作能夠在問題一出現時 就採取。結果，能夠避免不良地執行處理。不良地執行處 理在失去解決目前出現之問題的機會時傺會發生。 本發明用於控制半導體處理設備的方法可以如先前所 述即時執行，而且可以被執行以致於會産生處理問題的若 干處理及在測量處理之前的處理被聯鎖在一起。此外，本 發明用於控制半導體處理設備的方法可以被執行以致於只 有由操作者選擇的某些重要處理偽如先前所述般被處理。 如先前所述，根據本發明，傷有可能決定一處理是否 在一測量步驟被完成之後馬上在最佳條件下執行。因此， -15 - (請先閱翁背面之注意事 1· 項再填· 裝II :寫本頁)579 A7 B7 1. Description of the Invention (丨,) First, the case where the second special rule (1) to (7) is applied to step S110 will be described. These cases will be described using an example of the case of the second special rule of υ. In this case, the step S110 is mainly divided into three steps S112, S114, and S116. This will be described in detail. In step In S112, the measurement data is determined to meet the 2/3 rule. If the measurement data is determined to satisfy the 2/3 rule in step S112, the measurement data is determined in step S114 to determine whether it satisfies the 4/5 rule. If the measurement If the data is determined to satisfy the 4/5 rule in step S114, the measurement data is false compared to whether the 5 trend rule is satisfied in step S116. The process of step S110 using the second special rule of (2) to (7) is basically false The process is the same as described above in step S110 using the second special rule of (1). Therefore, a detailed description thereof will be omitted. Then, the second special rule of (1) to (7) is applied to step S120 The situation will be described. The situation will be described using the example of the second special rule of (1). In this case, the step S120 is mainly divided into three steps S122, S124, and S126. This will Will be detailed Description. In step S122, the measurement data is determined to satisfy the 2/3 rule. If the measurement data is determined to satisfy the 2/3 rule in step S122, the measurement data is determined to satisfy the 4/5 rule in step S124. If the measurement data is determined to meet the 4/5 rule in step S124, the measurement data is determined to be in accordance with the 5 trend rule in step S126. The use of the second special rule of (2) to (7) in step S120 Process base -14 ~ This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the notes on the back before filling out this page) Binding and ordering Printed by the Central Consumers Bureau of the Ministry of Economic Affairs Consumer Cooperatives 480579 Printed by A7 B7 of the Consumer Standards Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the Invention (丨 Z) The process described above is the same as the above-mentioned step $ 120 using the second special rule of (1). Therefore, the detailed description will be It will be omitted. If the measurement data is determined not to satisfy the 2/3 rule after steps S110 and S120, it means that two of the three consecutive points in the measurement data exist in A region between 2 < ^ and 3 < r •. If the measurement data is determined not to satisfy the 4/5 rule in steps S110 and S120, this means that the The four points do not exist in a region between -1 ′ and 1 (Γ. If the measurement data is determined to not satisfy the 5 trend rule in pseudo steps S110 and S120, it means that at least five of the measurement data The point counterfeit is in a trend of continuous increase or decrease. When the semiconductor processing equipment is controlled as described previously, it is possible to immediately control the processing performed in such equipment. Accordingly, a series of appropriate actions such as stopping the process of the product, stopping the lotus operation of the device, and simultaneously stopping the process of the product and the lotus operation of the device can be taken as soon as the problem arises. As a result, the processing can be prevented from being performed undesirably. Poorly executed processes do not occur when there is no opportunity to solve the problems that currently arise. The method for controlling a semiconductor processing apparatus of the present invention can be executed immediately as described previously, and can be performed so that several processes that cause processing problems and processes before the measurement process are interlocked together. In addition, the method of the present invention for controlling a semiconductor processing apparatus can be performed so that only certain important processings selected by an operator are processed as previously described. As previously stated, according to the present invention, it is possible to determine whether a treatment is performed under optimal conditions immediately after a measurement step is completed. Therefore, -15-(Please read the notes on the back of Weng 1 · Items and then fill in · Pack II: Write this page)
、1T 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） 480579 A7 B7 五、發明説明（θ ) 因機會遣失而出現的問題可以預先防止。此外，由於該處 理偽根據像第一特殊和第二特殊規則般之種種的統計資料 來被決定是否被正常執行，不良地執行處理的原因，例如 ，錯誤地設定處理條件或者設備本身的問題，能夠被準確 且迅速地偵測。 本發明業已配合先前所述的實施例作描述。然而，很 明顯的是，很多選擇、改變和變化·對於熟習此項技術之人 仕來說，在根據前面的描逑之下，僳顯而易知的。據此， 本發明包含所有該等落於後附之申請專利範圍之精神和範 圍内的選擇、改變和變化。 元件標號對照表 1 設備 3 主機電腦 5 __聯鎖模組 ----------II (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部中央標準局員工消費合作社印製 -16 - 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）、 1T This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 480579 A7 B7 5. Description of the invention (θ) Problems caused by missed opportunities can be prevented in advance. In addition, since the processing is pseudo-determined based on various statistical data like the first special rule and the second special rule, whether the processing is performed normally, and the reason for performing the processing poorly, for example, the processing conditions are incorrectly set or a problem with the device itself, Can be detected accurately and quickly. The invention has been described with reference to the previously described embodiments. However, it is clear that many choices, changes, and changes are obvious to those skilled in the art, based on the previous description. Accordingly, the present invention includes all such choices, changes, and variations that fall within the spirit and scope of the appended patent application scope. Component number comparison table 1 Equipment 3 Host computer 5 __Interlocking module ---------- II (Please read the precautions on the back before filling this page) Order by the Consumer Standards Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs -16-This paper size applies to China National Standard (CNS) A4 (210X297 mm)