478972 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（） 發明货景： 本發明係為一種超音波洗淨裝置故障偵測裝置’特別 是指一種適合用於半導體製程使用之超音波洗淨裝置故障 偵測裝置。 按，半導體晶圓製程中常常需要清潔晶圓或是設備機 台的一部份，而這些清潔的工作通常係使用超音波洗淨裝 置進行。超音波洗淨裝置通常具有一內部承裝有去離子水 * , 外 I 的水槽，且於水槽的周圍設置超音波震通子，藉由震通子 產生超音波，且將要清潔的物品置入水槽中，藉由去離子 水作為音波傳導的媒介，將清洗物的雜質抒垢去除。然而 ，如果超音波清洗裝置的震邇子產生故障，例如：震邇子 輸出的功率不足，或是無法輸出時，就會造成清洗效果不 佳的情形，因此一般於超音波清洗裝置上必須設置有檢測478972 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention () Invention situation: The invention is a fault detection device for an ultrasonic cleaning device, especially an ultrasonic sensor suitable for use in semiconductor manufacturing processes. Sonic cleaning device fault detection device. According to the semiconductor wafer manufacturing process, wafers or parts of equipment often need to be cleaned, and these cleaning tasks are usually performed using ultrasonic cleaning equipment. Ultrasonic cleaning devices usually have a water tank with deionized water * and I inside, and an ultrasonic vibrator is set around the water tank. Ultrasonic waves are generated by the vibrator, and the items to be cleaned are placed in In the water tank, impurities in the washing are removed by using deionized water as a medium for sound wave transmission. However, if the vibrator of the ultrasonic cleaning device fails, for example, the power output of the vibrator is insufficient or cannot be output, the cleaning effect will be poor. Therefore, it must be set on the ultrasonic cleaning device. Has detection
I 裝置，以偵測超音波清洗裝置的震邀子是否正確蓮作。 習用的檢測超音波清洗裝置的方法，係藉由感測器偵 I 測超音波震盪子啟動時，清洗槽的槽體是否有震動產生， 而用以偵測清洗槽體有否震動的感測器，通常為水銀開關 、壓電感測器，或者是專門用來偵測震動的1C形式感測 器，然而，不論使用何種感測器，其皆具有下列共同的缺 點： 1·安裝不易：因為感測器必須要緊密貼住清洗槽，因此在 設計超音波清洗裝置的清洗槽時，必須要預先預留裝置 感測器的位置，否則便無法將感測器安裝於清洗槽上。 2·易受外界干擾：因感測器除了會感測到清洗槽體的震動 一 2- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -------------裝-------訂------II ·線 (請先閱讀背面之注意事項，再填寫本頁) 478972 經濟部智慧財產局員工消費合作社印製 A7 B7五、發明説明（） 外，遝會受到電流雜訊，及其他震動來源的干擾，因此 時常會無法正確偵測出清洗槽體的震動。 由於以上之原因，使得習用的超音波清洗裝置的故β章 檢測裝置在使用上有相當不便之處，本發明人有鑑於此， 乃苦思细索，積極研究，加以多年從事相關產品研發之經 驗*並經不撕不斷試驗及改良，終於發展出本發明。 發明概述： 本發明之主要目的，係在於提供一種不易受干擾，且 能夠正確檢測出超音波清洗裝置故障之超音波洗淨裝置故 障偵測裝置。 本發明之又一目的，係在於提供一種安裝方便，能夠 有效提升使用彈性之超音波洗淨裝置故障偵測裝置。 本發明為達成上述及其他目的，其所採用之技術手段 >元件及其功效玆採一較佳實施例配合相關圖式詳細說明 如下。 圖式說明： 圖ίΐ係為本發明第一實施例的電路構造示意圖。 圖2係為本發明第一實施例的感測方法的動作示意圖。 圖13係為本發明第二實施例的電路構造示意圖。 圖14係為本發明安裝於一超音波洗淨裝置之方法的示意圖 圖號說明： 1半導體設備機台 3線路 5傳輸界面 2洗淨槽 4訊號處理電路總成 6監控電腦 一3 — 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） 478972 Α7 Β7 € 經濟部智慧財產局員工消費合作社印製 五、發明説明（） 10超音波換能器 30滹波器 40a峰位檢出器 詳细說明： 如圖1所示，本發明之超音波洗淨裝置故障偵測裝置 之中主要包括：一超音波換能器10，係具有與欲檢測之超 音波洗淨裝置相同的中心頻率，可以感測該超音波洗淨裝 置產生之超音波之震動能量*並將超音波的震動能量轉換 為一類比訊號的輸出；及一放大器20，係用以將該超音波 換能器產生之訊號放大；及一滤波器30，係用以將該超音 波換能器10產生之訊號的雜訊過滤，以消除該超音波換能 器10所受到的外界電流雜訊及其他外界干擾所產生的雜訊 ;及一個積分器40，係用以將經由該滤波器30整流過的類 比訊號轉換為高低電位的數位訊號輸出，藉以表示該超音 波洗淨裝置的震盪子是否正常的狀態。 如圖2所示，係為本發明之蓮作示意圖，為方便說明 起見，兹Μ本發明使用於一個中心頻率為40KHz之超音波 洗淨器的場合為實例加Μ說明。其中該超音波換能器10所 能夠感測的中心頻率與該超音波洗淨裝置的中心頻率相同 為40ΚΗΖ，因此超音波洗淨裝置啟動時，該超音波換能器 可Μ藉由輻射感測的方式感測到震盡子產生的音波震動能 童，且產生一中心頻率為40ΚΗζ的類比訊號50。然後該類 比訊號50經由放大器20處理後，將其強度加大，然後再經 由滤波器40處理，將其他外界干擾雑訊滤除，僅保留中心 20放大器 40積分器 50類比訊號 一4一 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） ----------券-- (请先閲讀背面之注意事項再填寫本頁) Γ 經濟部智慧財產局員工消費合作社印製 478972 A7 B7__ 五、發明說明（） 頻率為40KHZ的訊號通過，然後該積分器40係可以在接受 到中心頻率為40KHz的訊號時，產生髙電位的訊號輸出， 藉Μ表示該超音波洗淨裝置的震烫子正常運作的狀態’而 如果超音波洗淨裝置的震通子輸出的頻率不足’或是停止 蓮作時，則該超音波換能器10感測到的訊號頻率便不足40 KHz，此時該積分器40便會產生低電位的訊號輸出，藉Μ 表示該超音波洗淨裝置不正常蓮作的狀態。 如圖3所示，係為本發明的第二實施例，當超音波洗 淨裝置具有多數個震通子時，則本發明之故障感測裝置便 無法單純藉由震通子是否產生音波來檢測其運作是否正常 ，而必須要檢測該超音波洗淨裝置產生的音波強度是否正 確的方法來檢測該超音波洗淨裝置是否有部份的震通子故 障。其檢測方法如圖3所示，該第二實施例係將前述的積 分器40變更為一個峰位檢出器40a，該峰位檢出器40a係可 Μ分辨該類比訊號的大小，並判斷該類比訊號的大小是否 低於正常值。因此當超音波洗淨裝置的多個震盪子的其中 之一故障時，該超音波換能器10所檢測出的類比訊號50的 強度降低，則該峰位檢出器40a便可以檢測出該類比訊號 50的強度低於標準值，因此而判斷出該超音波洗淨裝置之 中部份的震還子故障。 如圖4所示，係為本發明之裝置安裝於一超音波洗淨 裝置之方法的示意圖，本發明之超音波洗淨裝置故障檢測 裝置在安裝時，其超音波換能器不需要直接安裝在超音波 洗淨裝置的洗淨槽上，而且其體積小，不佔空間，因此可 一5 一 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 裝 ϋ n ί ϋ 一S°J· B^i ϋ 1 Βϋ ϋ ·ϋ ϋ— I ' 478972 Α7 Β7 五、發明說明（） Μ安裝在半導體設備機台的任意位置*所以使得本發明的 超音波洗淨裝置的故障檢測裝置的安裝位置具有相當大的 彈性。如圖4所示，本發明安裝時，係將該超音波換能器 10裝置於一半導體設備機台1內部靠近洗淨槽2的位置，然 後藉由一線路3將該超音波換能器10檢測到的類比訊號傳 導至一個由前述放大器20、滤波器30、積分器40等電路元 件組成的訊號處理電路總成4，然後再經由一個傳輸界面5 將該訊號處理電路總成4產生的判斷訊號傳遞給一監控電 腦6，藉Μ監控該超音波洗淨裝置的蓮作是否正常。 本發明由於不須直接將超音波換能器10裝置於洗淨 槽之上，且具有體積小不佔空間的特性，因此其可以任意 安裝在半導體設備機台上的任意位置，因此使得本發明的 安裝方式具有相當大的彈性，因此可以大幅地增進半導體 機台空間配置的彈性；同時，本發明的故障檢測裝置係可 以藉由滤波器滤除外界干擾所產生的雜訊，因此可以避免 電流雜訊及外界震動所產生的干擾訊號影響到檢測结果的 正確性，因此大大地提升了本發明的檢測結果正確性。 -6- -------------裝---------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）I device to detect whether the son of the ultrasonic cleaning device is correct. The conventional method for detecting an ultrasonic cleaning device is to use a sensor detection I to detect whether the tank of the cleaning tank is vibrated when the ultrasonic oscillator is started, and is used to detect whether the cleaning tank is vibrated. Sensors are usually mercury switches, piezo-inductive sensors, or 1C sensors specifically used to detect vibration. However, no matter which sensor is used, they all have the following common disadvantages: 1. Easy to install : Because the sensor must be closely attached to the cleaning tank, when designing the cleaning tank of the ultrasonic cleaning device, the position of the device sensor must be reserved in advance, otherwise the sensor cannot be installed on the cleaning tank. 2 · Vulnerable to external interference: In addition to the sensor's ability to sense the vibration of the cleaning tank-2-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ------- ------ Install ------- Order ------ II · Line (Please read the precautions on the back before filling this page) 478972 Printed by A7, Consumer Cooperatives, Intellectual Property Bureau, Ministry of Economic Affairs B7 V. Description of the invention () In addition, radon will be interfered by current noise and other sources of vibration, so often the vibration of the cleaning tank cannot be detected correctly. Due to the above reasons, the conventional beta cleaning device of the conventional ultrasonic cleaning device is inconvenient in use. In view of this, the inventor has carefully studied and actively researched and engaged in research and development of related products for many years. Experience * and through continuous testing and improvement without tearing, the invention has finally been developed. SUMMARY OF THE INVENTION The main object of the present invention is to provide a failure detection device for an ultrasonic cleaning device which is not easily disturbed and can correctly detect a failure of the ultrasonic cleaning device. Another object of the present invention is to provide a fault detection device for an ultrasonic cleaning device which is convenient to install and can effectively improve flexibility in use. In order to achieve the above and other objects, the present invention adopts a technical means > element and its effect. A preferred embodiment is described in detail below with reference to related drawings. Description of the drawings: The diagram is a schematic diagram of the circuit structure of the first embodiment of the present invention. FIG. 2 is an operation schematic diagram of a sensing method according to the first embodiment of the present invention. FIG. 13 is a schematic circuit configuration diagram of the second embodiment of the present invention. FIG. 14 is a schematic diagram of the method for installing in an ultrasonic cleaning device according to the present invention. Explanation of the drawing numbers: 1 semiconductor equipment machine 3 line 5 transmission interface 2 washing tank 4 signal processing circuit assembly 6 monitoring computer 1 3 — this paper The scale is applicable to Chinese National Standard (CNS) Α4 specification (210 × 297 mm) 478972 Α7 Β7 € Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (10) Ultrasonic transducer 30 Acoustic wave 40a Peak position detection Detailed description of the device: As shown in FIG. 1, the ultrasonic cleaning device failure detection device of the present invention mainly includes: an ultrasonic transducer 10, which has the same center as the ultrasonic cleaning device to be detected Frequency, which can sense the vibration energy of the ultrasonic wave generated by the ultrasonic cleaning device * and convert the vibration energy of the ultrasonic wave into an analog signal output; and an amplifier 20 for generating the ultrasonic transducer Signal amplification; and a filter 30, which is used to filter the noise of the signal generated by the ultrasonic transducer 10, so as to eliminate the external current noise and other noise received by the ultrasonic transducer 10 Noise caused by external interference; and an integrator 40, which is used to convert the analog signal rectified by the filter 30 into a high-low potential digital signal output to indicate whether the oscillator of the ultrasonic cleaning device is normal status. As shown in FIG. 2, it is a schematic diagram of the lotus of the present invention. For convenience of explanation, the present invention is used as an example to explain the case where the ultrasonic cleaner with a center frequency of 40 KHz is used. The center frequency that can be sensed by the ultrasonic transducer 10 is the same as the center frequency of the ultrasonic cleaning device is 40K40Z. Therefore, when the ultrasonic cleaning device is activated, the ultrasonic transducer can detect the The measurement method senses the sonic vibration energy child generated by the shaker, and generates an analog signal 50 with a center frequency of 40KΗζ. After the analog signal 50 is processed by the amplifier 20, its intensity is increased, and then processed by the filter 40 to filter out other external interference signals. Only the central 20 amplifier 40 integrator 50 analog signal and 4 paper are retained. Standards are applicable to China National Standard (CNS) Α4 specifications (210 × 297 mm) ---------- coupons-(Please read the precautions on the back before filling this page) Γ Consumer Cooperatives, Intellectual Property Bureau, Ministry of Economic Affairs Printed 478972 A7 B7__ V. Description of the invention () The signal with a frequency of 40KHZ passes, and then the integrator 40 series can generate a signal of a pseudo-potential when receiving a signal with a center frequency of 40KHz. Let M denote the ultrasonic washing The state of normal operation of the vibrator of the clean device 'and if the frequency of the output of the vibrator of the ultrasonic cleaning device is insufficient' or when the lotus is stopped, the signal frequency sensed by the ultrasonic transducer 10 is insufficient 40 KHz, at this time, the integrator 40 will produce a low-potential signal output, and M represents the abnormal state of the ultrasonic cleaning device. As shown in FIG. 3, it is a second embodiment of the present invention. When the ultrasonic cleaning device has a plurality of vibrators, the fault detection device of the present invention cannot simply rely on whether the vibrators generate sound waves. In order to detect whether the operation is normal, it is necessary to detect whether the intensity of the sound wave generated by the ultrasonic cleaning device is correct to detect whether the ultrasonic cleaning device has a part of the vibrator failure. The detection method is shown in FIG. 3. In the second embodiment, the integrator 40 described above is changed to a peak position detector 40a. The peak position detector 40a can distinguish the magnitude of the analog signal and judge Whether the size of the analog signal is lower than normal. Therefore, when one of the plurality of oscillators of the ultrasonic cleaning device fails, the intensity of the analog signal 50 detected by the ultrasonic transducer 10 decreases, and the peak position detector 40a can detect the The strength of the analog signal 50 is lower than the standard value, so it is judged that the vibrator of the ultrasonic cleaning device is faulty. As shown in FIG. 4, it is a schematic diagram of a method for installing the apparatus of the present invention in an ultrasonic cleaning device. When the fault detecting device of the ultrasonic cleaning device of the present invention is installed, the ultrasonic transducer does not need to be directly installed. On the cleaning tank of the ultrasonic cleaning device, and its volume is small and does not take up space, it can be applied to the paper size of China National Standard (CNS) A4 (210 X 297 mm). (Please read the back first Please note this page before filling in this page) Decoration n ί ϋ S ° J · B ^ i ϋ 1 Βϋ ϋ · ϋ ϋ — I '478972 Α7 Β7 5. Description of the invention () Μ is installed at any position of the semiconductor equipment machine * Therefore, the installation position of the fault detection device of the ultrasonic cleaning device of the present invention has considerable flexibility. As shown in FIG. 4, when the present invention is installed, the ultrasonic transducer 10 is installed inside a semiconductor device machine 1 near the cleaning tank 2, and then the ultrasonic transducer is connected through a line 3. The analog signal detected by 10 is transmitted to a signal processing circuit assembly 4 composed of the aforementioned circuit components such as amplifier 20, filter 30, integrator 40, and then generated by the signal processing circuit assembly 4 through a transmission interface 5. The judgment signal is transmitted to a monitoring computer 6 to monitor whether the lotus operation of the ultrasonic cleaning device is normal. The invention does not need to directly install the ultrasonic transducer 10 on the cleaning tank, and has the characteristics of small volume and no space, so it can be arbitrarily installed at any position on the semiconductor device platform, thus making the invention The installation method has considerable flexibility, so it can greatly improve the flexibility of the space allocation of the semiconductor machine. At the same time, the fault detection device of the present invention can filter the noise generated by the external interference through the filter, so the current can be avoided. Interference signals generated by noise and external vibrations affect the accuracy of the detection results, thus greatly improving the accuracy of the detection results of the present invention. -6- --------- install --------- order --------- line (please read the precautions on the back before filling this page) Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the scale is applicable to China National Standard (CNS) A4 (210 X 297 mm)