JP2002168684A - Fault detector of ultrasonic cleaner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately detect faults in an ultrasonic cleaner, while suppressing the interference of the outside as much as possible. SOLUTION: The fault detector for detecting normal operation of the oscillator in an ultrasonic cleaner comprises an ultrasonic transducer 10, having a central frequency identical to that of the oscillator and converting the oscillation of a sound wave generated from the oscillator into an analog signal, an amplifier 20 for amplifying the intensity of an analog signal generated from the ultrasonic transducer, a band-pass filter 30 having the same frequency as the oscillator and filtering interference of the external noise signal, and an integrator 40 for converting an analog signal from the ultrasonic transducer into a digital signal of high/low potentials which is employed for making the decision as to whether the oscillator in the ultrasonic cleaner is generating a sound wave normally.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a failure detecting device for an ultrasonic cleaning device, and more particularly, to a failure detecting device for an ultrasonic cleaning device applied to a semiconductor manufacturing process.

[0002]

2. Description of the Related Art Conventionally, in a process of manufacturing a semiconductor wafer, a wafer or a portion of an equipment table must always be kept clean. Thus, the work for maintaining the cleanliness is usually performed using an ultrasonic cleaning device. The ultrasonic cleaning apparatus usually has a water tank for receiving deionized water therein, and an ultrasonic vibrator is installed around the water tank, and the ultrasonic wave is generated by the vibrator to clean the ultrasonic cleaner. The necessary articles are placed in a water tank, and deionized water is used as a medium of sound wave transmission to remove dirt from the articles to be kept clean. However, if the transducer of the ultrasonic cleaning device fails, for example, if the output power of the transducer is insufficient, or if the output cannot be performed, a poor cleaning effect is created. Always has a detection device installed in the ultrasonic cleaning device. Thus, it is determined whether or not the vibrator of the ultrasonic cleaning device is operating correctly.

[0003] In the conventional detection method of the ultrasonic cleaning device, when the vibrator of the ultrasonic cleaning device is started by a sensor, it is detected whether or not the tank body of the cleaning tank is vibrating. The sensor used to detect whether or not the tank body of the cleaning tank is vibrating is usually a mercury switch, a piezoelectric sensor, or an IC type sensor for professionally detecting vibration. However, any type of sensor has the following disadvantages.

[0004] Mounting is difficult. The sensor must be mounted in close contact with the washing tank. For this reason, at the time of designing the cleaning tank of the ultrasonic cleaning apparatus, a specific position for attaching the sensor must be determined in advance. Otherwise, the sensor cannot be installed in the washing tank.

[0005]: It is susceptible to external interference. In addition to sensing the vibration of the tank body of the cleaning tank, the sensor is often unable to accurately detect the vibration of the tank body of the cleaning tank because it is subject to interference of a current signal and other vibration sources.

[0006] Due to the above-mentioned causes, the conventional fault locating device of the ultrasonic cleaning apparatus has caused considerable inconvenience in use.

[0007]

SUMMARY OF THE INVENTION In view of the above-mentioned defects, a failure detecting device for an ultrasonic cleaning device which accurately detects a failure of the ultrasonic cleaning device and minimizes the possibility of interference from the outside world and is easy to mount. A technical problem to be solved arises in order to obtain the object, and an object of the present invention is to solve the problem.

[0008]

SUMMARY OF THE INVENTION The present invention has been proposed to achieve the above object, and is used for detecting whether or not a vibrator of an ultrasonic cleaning apparatus is operating normally. A fault detecting device of the ultrasonic cleaning device, wherein the fault detecting device has the same center frequency as the concussion element, and senses a vibration of a sound wave generated by the concussion element of the ultrasonic cleaning device to detect an analog signal. An ultrasonic transducer that converts the output to an output, an amplifier used to amplify the output intensity of the analog signal generated by the ultrasonic transducer, and has the same frequency as the shaker, While the analog signal is being output, the filter used to filter interference of extraneous noise signals and an output from the ultrasonic transducer. An integrator used to convert the put analog signal into a high-low potential digital signal and output it, and to determine whether the vibrator of the ultrasonic cleaning device is generating sound waves normally or not. A failure detecting device for an ultrasonic cleaning device, and a failure detecting device for an ultrasonic cleaning device used for detecting whether a large number of vibrators are operating normally in a failure detecting device for a type of ultrasonic cleaning device. Wherein the fault locator has the same center frequency as the some vibrators, and is capable of sensing the vibration of the sound waves generated by the vibrators of the ultrasonic cleaning device, and converting the vibration into an analog signal. An ultrasonic transducer used to output the same, and an amplifier used to amplify the output intensity of an analog signal generated by the ultrasonic transducer. And Amplifier that, if you are androgynous the same center frequency as the shaking element, while the analog signal is output, and a filter capable of filtering the interference of external miscellaneous signals,
A peak detector capable of detecting the magnitude of the intensity of the analog signal and comparing with a standard value to determine whether or not some of the vibrators of the ultrasonic cleaning device have partially failed. And a failure detection device for the ultrasonic cleaning device.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below in detail with reference to FIGS. As shown in FIG. 1, a failure detecting apparatus for an ultrasonic cleaning apparatus according to the present invention includes the following mainly. It has an ultrasonic transducer 10, the ultrasonic transducer 10 has the same center frequency as the ultrasonic cleaning device to be detected, and senses vibrational energy of ultrasonic waves generated by the ultrasonic cleaning device, and The ultrasonic vibration energy can be converted into an analog signal and output. The ultrasonic transducer 10 has an amplifier 20 which is used to amplify a signal generated by the ultrasonic transducer 10. The ultrasonic transducer 10 further includes a band-pass filter 30 that filters a signal generated by the ultrasonic transducer 10. Accordingly, the ultrasonic transducer 10 can eliminate a miscellaneous signal caused by an external current and other miscellaneous signals caused by external interference. Furthermore, there is an integrator 40 which converts the analog signal rectified by the band-pass filter 30 into a digital signal of high and low potential and outputs the digital signal, thereby confirming whether the vibrator of the ultrasonic cleaning apparatus is in a normal state. Used to indicate whether or not.

Next, the operation of the present invention will be described with reference to FIG. For convenience of explanation, the present invention will be described with an example of an ultrasonic cleaning apparatus having a center frequency of 40 KHz. Among them, the center frequency at which the ultrasonic transducer 10 can sense is the center frequency of the ultrasonic cleaning device of 40 kHz.
Is the same as Therefore, when the ultrasonic cleaning apparatus is started, the ultrasonic transducer 10 can sense the vibration energy of the sound wave generated by the vibrator by the radiation sensing method, and has a center frequency of 40 kHz.
Generate an analog signal 50 of z. Thereafter, the analog signal 50 is processed by the amplifier 20 to increase its intensity. Further, the external interference signal is filtered by the band-pass filter 30, and the signal having only the center frequency of 40 kHz is retained. When the integrator 40 receives the signal having the center frequency of 40 kHz, it generates and outputs a high-potential signal. This means that the vibrator of the ultrasonic cleaning apparatus is in a normal operating state. Thus, if the output frequency of the vibrator of the ultrasonic cleaning device is insufficient, or if the operation of the ultrasonic cleaning device stops, the frequency of the signal sensed by the ultrasonic transducer 10 is 40 kHz. If not, the integrator 40 generates and outputs a low potential signal. This means that the ultrasonic cleaning device is in an abnormal operation state.

FIG. 3 shows an embodiment of the second aspect of the present invention. The invention according to claim 2 is a case where the ultrasonic cleaning device has a large number of concussors. In this case, the fault locating device of the present invention cannot simply detect whether or not the operating state is normal based on whether or not the vibrator generates sound waves. Therefore, a method for detecting whether or not the vibrator of the ultrasonic cleaning device has partially failed by a method for detecting whether or not the intensity of the sound wave generated by the ultrasonic cleaning device is accurate must be used. Must.

The detection method is as shown in FIG.
In the embodiment of the described invention, a peak detector 40a is employed in place of the integrator 40. The peak detector can distinguish the magnitude of the analog signal,
It can be determined whether the magnitude of the analog signal is lower than a normal value. Thus, when one of the plurality of transducers of the ultrasonic cleaning device fails, the intensity of the analog signal 50 detected by the ultrasonic transducer 10 decreases. Therefore, the peak detector 40a can detect that the intensity of the analog signal 50 is lower than a normal value. Thus, it is possible to determine that the vibrator of the ultrasonic cleaning device is partially broken.

FIG. 4 is an explanatory view when the apparatus of the present invention is installed in an ultrasonic cleaning apparatus. When installing the failure detecting device of the ultrasonic cleaning device of the present invention, the ultrasonic transducer does not need to be directly attached to the cleaning tank of the ultrasonic cleaning device, and its volume is small and does not take up space, so semiconductor equipment is not required. It can be installed at any position on the table. Therefore, the mounting position of the failure detecting device of the ultrasonic cleaning device of the present invention has a considerable degree of freedom.

As shown in FIG. 4, in the present invention, the ultrasonic transducer 10 is mounted at a position close to the cleaning tank 2 inside the semiconductor equipment base 1 at the time of mounting. Thereafter, a signal processing electrical assembly circuit 4 in which the analog signal detected by the ultrasonic transducer 10 through the line 3 is composed of electrical circuit elements such as the amplifier 20, the band-pass filter 30, and the integrator 40.
After that, the transmission interface 5 further transmits a judgment signal of the signal processing electric assembly circuit 4 to the control computer 6, thereby controlling whether the ultrasonic cleaning apparatus is operating normally. You do it.

The present invention relates to the ultrasonic transducer 1
Since it is not necessary to directly mount the “0” on the cleaning tank, and has such a characteristic that it is small in volume and does not take up space, it can be mounted arbitrarily at any position on the semiconductor equipment stand. Therefore, the mounting method of the present invention has a considerable degree of freedom. Therefore, the spatial arrangement of the semiconductor equipment table can be greatly increased. At the same time, the fault locating device of the present invention can remove the noise signal generated by the external interference by the filter, so that the noise noise signal and the interference signal generated by the external vibration affect the accuracy of the detection result. Therefore, the accuracy of the detection result of the present invention can be improved.

[0016]

According to the present invention, the failure detection device for an ultrasonic cleaning device can remove external noise signals, is small in volume, is convenient for installation, and accurately detects a failure in the ultrasonic cleaning device. It is an invention which has a truly remarkable effect, for example, it can be performed.

[Brief description of the drawings]

FIG. 1 shows an embodiment of the invention described in claim 1, and is a structural explanatory view of an electric circuit.

FIG. 2 is an explanatory diagram of the operation of the sensing method according to the first embodiment.

FIG. 3 shows an embodiment of the invention described in claim 2, and is a structural explanatory view of an electric circuit.

FIG. 4 is an explanatory view when the present invention is attached to an ultrasonic cleaning device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Semiconductor equipment stand 2 Cleaning tank 3 Line 4 Signal processing assembly electric circuit 5 Transmission interface 6 Control computer 10 Ultrasonic transducer 20 Amplifier 30 Band-pass filter 40 Integrator 40a Peak detector 50 Analog signal

Claims (2)

[Claims] 1. A failure detecting device for an ultrasonic cleaning device used for detecting whether or not a vibrator of an ultrasonic cleaning device is operating normally, wherein the failure detecting device is the same as the vibrator. An ultrasonic transducer having a center frequency, sensing the vibration of the sound wave generated by the consonator of the ultrasonic cleaning device, converting it into an analog signal and outputting the analog signal, and an analog transducer generated by the ultrasonic transducer. An amplifier used to amplify the output intensity of the signal, and having the same frequency as the concussion element, for filtering out interference of extraneous noise signals while the analog signal is being output. A filter to be used, and an analog signal output from the ultrasonic transducer is converted into a high-low potential digital signal and output. And an integrator used for judging whether or not the vibrator of the ultrasonic cleaning device normally generates a sound wave. 2. A failure detection device for an ultrasonic cleaning device, which is used to detect whether or not a plurality of vibrators are operating normally in a failure detection device for an ultrasonic cleaning device,
The fault locator has the same center frequency as the above-mentioned some concussion elements, and is capable of sensing the vibration of the sound waves generated by the concussion element of the ultrasonic cleaning device, and converting the output into an analog signal and outputting the analog signal. An ultrasonic transducer used to amplify the output intensity of an analog signal generated by the ultrasonic transducer; and an amplifier having the same center frequency as the vibrator. While the signal is being output, a filter capable of filtering interference of extraneous noise signals, and detecting the magnitude of the intensity of the analog signal, and slightly shaking the ultrasonic cleaning apparatus in comparison with a standard value. An ultrasonic cleaning apparatus comprising: a peak detector capable of judging whether or not a child has a partial failure. Failure probing devices.