478959 經濟部智慧財產局員工消費合作社印製 A7 五、發明說明（b 發明背景 發明領域 本發明關於廢氣處理系統，特別是關於一種廢氣處 理系統’其中通過旋風收集器的廢氣在過濾收集器過濾之 後排放’以及過濾收集器藉施加氣震來移除被吸附於過濾 總成中的粉末，藉以防止排氣口的堵塞。 相關技藝之描述 半導體業中使用各種不同的製造設備。由於製造程 序的特性，製造設備一般排放出大量各種不同廢氣，諸如 有毒、腐蝕性和可燃氣體，其有害於人體。 從設備排放出的有毒廢氣，在排放到外面之前，應 該用廢氣處理系統淨化。廢氣處理系統可分類為兩種程序 形式，亦即乾程序和溼程序形式。在乾程序形式的情況下， 有毒廢氣以熱程序或化學程序處理，且改變成無毒廢氣。 在溼程序形式中，水溶性廢氣被溶解程序處理並改變成無 毒廢氣。 特別是’乾程序形式廢氣處理系統被提供有一過淚 裝置，用以過濾廢氣處理程序中產生的粉末。例如，旋風 收集器被使用作為過濾裝置。 然而，雖然旋風收集器被用於廢氣處理系統中，但 通過旋風收集器的廢氣含有一定量粉末。殘餘粉末累積在 排放口中。最後，排放口被粉末堵塞，造成廢氣處理系統 的性能降低。 所以，在廢氣處理系統以乾程序處理廢氣時，系統 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 7—^ --------訂--------- (請先閲讀背面之注意事項再填寫本頁) 478959 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（、 费 性能不被粉末降低是有必要的。 本發明之概要說明 本發明之一目的在於過濾出排放口的粉末（廢氣係透 過該排放口而排出），並在必要時收集依附於過濾器的粉 末，藉以防止排放管的堵塞。 本發明之其他目的在於利用氣震將粉末從過濾器分 離出並收集粉末，藉以防止排放管的堵塞。 根據本發明之一層面，提供一種廢氣處理系統，包含： 一前處理設備，含有使惰性氣體與廢氣混合以穩定廢氣的 集合管、用以加熱與惰性氣體混合之廢氣以氧化廢氣的加 熱室、以及冷卻加熱廢氣的冷卻室，及收集附著於冷卻室 内壁粉末的第一收集箱；一旋風收集器，以離心方法將仍 留在廢氣中的粉末分離出，並收集分離出的粉末於第二收 集箱，然後排出淨化的廢氣；及一過濾收集器，用過濾室 的過濾總成，將仍留在從旋風收集器引入的廢氣中的粉末 過濾出，且施加氣震於附著於過濾總成中的粉末，以便使 粉末從過渡總成分離出，並將分離出的粉末收集在第三收 集箱中。 較佳地，過濾收集器包含：一過濾室，廢氣係從過 濾室的下部份引入，然後排到過濾室上部份.；一過濾總成， 設置於過濾室内以便過濾含在廢氣中的粉末；一感應器， 在過濾總成的上部份偵測過濾室的内壓；一供氣部份，儲 存壓縮氣體，若過濾室的内壓降至預定壓力以下，則將壓 縮氣體注入過渡總成内’以便移除附著於過濾總成上的粉 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 5 I I I I--1· I — — — — — — ---II--^ <請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印制衣 478959 A7 -------B7_— —__ 五、發明說明（3) 末；及第三收集箱，設置於過濾室的下部份以收集粉末。 較佳地，過濾總成包含··一固定於過濾室的支撐板， 具有多個通孔；一袋式過濾器，具有一個定置於通孔圓周 的圓形入口部份，以及一個固定耦合於入口部份的口袋式 過濾篩網；一過濾籠狀物，具有一個透過袋式過濾器的入 口部份固；t於支採板的圓形周緣、-個側壁形成為格栅結 構的圓柱本體、以及一個形成為圓形板結構以便支撐置入 其中的袋式過濾器的底面。 而且，供氣部份包含：一喷嘴部份，設於過濾室内， 具有多個將空氣注入支推板的每個通孔内的嗔嘴；及一空 氣槽，儲存該壓縮空氣，且根據來自感應器的信號將壓縮 空氣注入喷嘴部份。 根據本發明之另一層面，提供一種廢氣處理系統， 包含·· 一過濾收集器，其設置於廢氣排放管路中，其中過 慮收集器包含·一過濾室，其中廢氣透過所希望的入口/ 排放口被引入/排出，且含在引入廢氣的粉末被一過濾總 成過濾出，而且具有一氣震裝置，用以定期地施加氣震於 附著在過濾總成上的粉末，以便使粉末由過濾總成分離； 及一收集箱’用以收集被過波室過渡且由過渡總成分離的 粉末。 較佳地，過濾總成設置於過濾室的入口和排放口之 間的廢氣通道的中間部份，過濾總成包含：一固定於該過 濾室的支撐板，具有多個通孔；一袋式過濾器，具有一個 定置於該通孔圓周的圓形入口部份，以及一個固定耦合於 本纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -6 - MW MV I MM I I 0 I a·· 4MW I ΜΗ· I a* I I (請先閱讀背面之注意事項再填寫本頁) 478959 A7 B7478959 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 V. Description of the invention (b. BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to an exhaust gas treatment system, and particularly to an exhaust gas treatment system in which the exhaust gas passing through the cyclone collector is filtered by the filter collector Emissions' and filter collectors use aerodynamic shocks to remove the powder that is adsorbed in the filter assembly to prevent clogging of the exhaust ports. Description of Related Art Various types of manufacturing equipment are used in the semiconductor industry. Due to the characteristics of manufacturing processes Manufacturing equipment generally emits a large variety of different exhaust gases, such as toxic, corrosive and combustible gases, which are harmful to the human body. Toxic exhaust gases emitted from equipment should be purified with an exhaust gas treatment system before being discharged to the outside. The exhaust gas treatment system can It is classified into two program forms, that is, a dry program and a wet program. In the case of a dry program, the toxic waste gas is treated by a thermal program or a chemical program and is changed to a non-toxic waste gas. In the wet program form, the water-soluble waste gas is The dissolution program processes and changes to non-toxic exhaust gas. Yes' dry process type Exhaust gas treatment system is provided with a tearing device to filter the powder generated in the exhaust gas treatment process. For example, a cyclone collector is used as a filtering device. However, although a cyclone collector is used in the exhaust gas treatment system However, the exhaust gas passing through the cyclone collector contains a certain amount of powder. Residual powder accumulates in the exhaust port. Finally, the exhaust port is blocked by the powder, which causes the performance of the exhaust gas treatment system to decrease. Therefore, when the exhaust gas treatment system processes the exhaust gas in a dry process, the system This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 7— ^ -------- Order --------- (Please read the precautions on the back before filling This page) 478959 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (It is necessary that the performance is not reduced by the powder. A summary of the present invention is to filter the powder from the discharge port. (The exhaust gas is discharged through the discharge port), and the powder attached to the filter is collected when necessary to prevent clogging of the discharge pipe. His purpose is to use gas shock to separate the powder from the filter and collect the powder, so as to prevent the clogging of the discharge pipe. According to one aspect of the present invention, an exhaust gas treatment system is provided, comprising: a pretreatment equipment, which contains an inert gas and exhaust gas. A collecting pipe mixed to stabilize the exhaust gas, a heating chamber for heating the exhaust gas mixed with the inert gas to oxidize the exhaust gas, a cooling chamber for cooling the heated exhaust gas, and a first collection box for collecting powders attached to the inner wall of the cooling chamber; a cyclone collector The powder remaining in the exhaust gas is separated by a centrifugal method, and the separated powder is collected in a second collection box, and then the purified exhaust gas is discharged; and a filter collector, which uses the filter assembly of the filter chamber, will remain The powder in the exhaust gas introduced from the cyclone filter is filtered, and an air shock is applied to the powder attached to the filter assembly to separate the powder from the transition assembly and collect the separated powder in a third collection box in. Preferably, the filter collector includes: a filter chamber, the exhaust gas is introduced from the lower part of the filter chamber, and then discharged to the upper part of the filter chamber; a filter assembly is arranged in the filter chamber to filter the air contained in the exhaust gas; Powder; an inductor that detects the internal pressure of the filter chamber on the upper part of the filter assembly; a gas supply part that stores compressed gas; if the internal pressure of the filter chamber falls below a predetermined pressure, the compressed gas is injected into the transition Inside the assembly to remove the powder attached to the filter assembly The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 5 III I--1 · I — — — — — —- -II-^ < Please read the notes on the back before filling out this page) Printed clothing for the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478959 A7 ------- B7_— —__ 5. Description of the invention (3) And a third collection box, which is arranged at the lower part of the filter chamber to collect powder. Preferably, the filter assembly includes a support plate fixed to the filter chamber with a plurality of through holes; a bag filter having a circular inlet portion fixed to the circumference of the through hole, and a fixed coupling to A pocket filter screen at the inlet; a filter cage with a solid inlet through the inlet of the bag filter; a cylindrical body with a circular periphery on the support plate and a side wall forming a grid structure And a bottom plate formed into a circular plate structure to support the bag filter inserted therein. Moreover, the air supply part includes: a nozzle part, which is provided in the filter chamber, and has a plurality of nozzles for injecting air into each through hole of the support plate; and an air tank, which stores the compressed air, and The signal from the sensor injects compressed air into the nozzle section. According to another aspect of the present invention, there is provided an exhaust gas treatment system comprising a filter collector provided in an exhaust gas discharge line, wherein the filter collector includes a filter chamber in which the exhaust gas passes through a desired inlet / emission The mouth is introduced / exhausted, and the powder contained in the introduced exhaust gas is filtered out by a filter assembly, and has a gas shock device for periodically applying a gas shock to the powder attached to the filter assembly, so that the powder is filtered by the filter assembly. And separation; and a collection box 'for collecting the powder transitioned by the wave chamber and separated by the transition assembly. Preferably, the filter assembly is disposed at a middle portion of the exhaust gas passage between the inlet and the exhaust port of the filter chamber. The filter assembly includes: a support plate fixed to the filter chamber, having a plurality of through holes; a bag type The filter has a circular inlet portion fixed to the circumference of the through hole, and a fixed coupling to the paper size. Applicable to China National Standard (CNS) A4 (210 X 297 mm) -6-MW MV I MM II 0 I a ·· 4MW I ΜΗ · I a * II (Please read the precautions on the back before filling this page) 478959 A7 B7
經濟部智慧財產局員工消費合作社印製 五、發明說明（4) 該入口部份的口袋式過濾篩網；一過濾籠狀物，具有一個 透過該袋式過濾器的入口部份固定於支撐板的圓形周緣、 一個側壁形成為格柵結構的圓柱本體、以及一個形成為圓 形板結構以便支撐置入其中的袋式過濾器的底面。 而且，假如過濾室的内壓降低至預定壓力以下，則 氣震裝置將空氣供應到過濾總成，且粉末因供氣操作產生 的空氣壓力而分離。 應該瞭解的是，前面的一般性描述和以下的詳細描 述兩者係為例示性和解釋性，意圖提供所請求之本發明的 進一步解釋。 圖式簡要說明 在附圖中： 第1圖係顯示根據本發明之廢氣處理系統之一實施例 的圖； 第2圖係顯示根據本發明之廢氣處理系統之另一實施 例的圖； 第3圓係顯示根據本發明之廢氣處理系統的過濾收集 器的過濾總成的分解圓；及 第4圖係第3圖之過濾總成的剖面圖。 較佳實施例的詳細描述 現將詳細參考本發明之較佳實施例，本發明之例子 被描繪於附圓。 如第1圖所示，根據本發明之廢氣處理系統被提供有 一前處理設備、一旋風收集器18和一透過管路連接到前處 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ------------I I --I (請先閱讀背面之注意事項再填寫本頁) 上0· -線- 478959 A7 B7 五、發明說明（5) 理設備的過濾收集器20。前處理設備包含集合管10、加熱 室12、冷卻室14和收集箱16。 (請先閱讀背面之注意事項再填寫本頁) 集合管10將透過一管路（未顯示）供應的惰性氣體混合 於廢氣，以便穩定廢氣。加熱室12在所希望的溫度下加熱 廢氣，以便改變廢氣的化學性質。已加熱廢氣被引入冷卻 室14，然後冷卻。此外，集合管10的内側提供有一壓力計 22，用以檢查和顯示集合管10的内壓。 收集箱16被定置於冷卻室14的下部份，以便收集廢 氣通過加熱室12和冷卻室14的加熱和冷卻程序中產生的粉 末。 亦即，當廢氣通過加熱室12被加熱，產生包括氧化 的化學反應，因而粉末產生。假如粉末被引入冷卻室14 , 則粉末附著於冷卻室14冷内側。附著的粉末以刮除裝置（未 顯示）從冷卻室14分離，然後被收集到收集箱16中。 集合管10與加熱室12和冷卻室14相連通。被乾程序 淨化的廢氣透過與冷卻室14連接的管子24而排放到旋風收 集器18。此時，微細粉末隨著排放廢氣被帶到旋風收集器 18 〇 經濟部智慧財產局員工消費合作社印制衣 旋風收集器18包含旋風室26和收集箱28。旋風室26 具有本案申請人之韓國新型專利申請案第1998-25587號所 揭露之相同結構。引入旋風室26的廢氣受到離心作用，因 而粉末與廢氣分離且往下移動。 收集相28定置於旋風室26的下部份，且透過旁路閥3〇 而互相連通。所以，來自旋風室26的下移粉末被收集在收 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 x 297公釐） 經濟部智慧財產局員工消費合作社印制衣 478959 A7 B7 五、發明說明（6) 集箱28内。旁路閥30總是在開啟狀態，除了在更換收集箱 28的情況下。 旋風室26使透過離心方法淨化的廢氣透過上管路31 排放。所以，在旋風室26内過濾的粉末被收集在收集箱28 中，淨化的廢氣透過連接於上管路31的另一個管路34而供 應到過濾收集器20的過濾室36。在管路34中提供有一個旁 路過濾器32。 而且，在上管路中提供有一個旁路閥38。上管路被 連接到從過濾室36上部份延伸的另一個管路42。管路42亦 有一個旁路閥40。所以，上管路31和另一個管路42構成排 放管設備。在排放管設備末端提供一個由馬達驅動之送風 機（未顯示），以排放廢氣。 而且，當排放廢氣時，送風機亦作用為一個過濾室36 的壓力調節器。 同時，過濾收集器20含有過濾室36和收集箱46。管 路34和42分別連接到過濾室36的上部份和下部份。而且， 過濾總成44被提供於過濾室36中。收集箱46設置於過濾室 36的下部份。 過濾總成44設有一個有多個通孔且固定於過濾室36 側壁的支撐板50、一個袋式過濾器52、和一個組裝在每個 通孔的過濾籠狀物54。 亦即，如第3圖所示，首先，袋式過濾器52被置入形 成於支撐板50的通孔内。然後，過濾籠狀物54被置入袋式 過濾器52内。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -9 - ------------I ^---— II--^---------^ (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印制π 478959 A7 ___ B7 五、發明說明（7) 袋式過濾器52包含一個被放在通孔圓周的圓形入口 部份58，以及一個固定耦合於入口部份58的口袋式過濾篩 網59。 過濾籠狀物54在開口端有圓形周緣56，其透過袋式 過濾器52的入口部份而固定到支撐板5〇。如第3囷所示， 過濾籠狀物54亦提供有一個側壁形成格柵結構的圓柱趙， 以及一個形成為圓板結構的底面，以支禮置入其中的袋式 過濾、器52。如第4圖所示’支撑板5〇、袋式過濾器52和過 滤籠狀物54被互相組合。 而且，供氣部份60被提供於過濾室36之過濾總成44 上部伤。供氣部份60具有透過過漶室36側壁置入且具有多 個喷嘴來喷注空氣的喷嘴部份62、以及一個置於過渡室3 5 外面以供應空氣到喷嘴部份62的空氣槽64。 空氣槽64以預定壓力或更高來壓縮供氣管68供應的 空氣’並將壓縮空氣健存於其中。而且，空氣槽64由來自 設於過濾室36上部份的感應器66的信號所操作。 亦即，感應器66在過濾總成44上部份偵測到過渡室36 的内壓，然後輸出偵測信號到空氣槽64。若邊渡室36的内 壓降至預定壓力以下，則空氣槽64供應儲存空氣到喷嘴部 份62,因而空氣壓力（氣震）被作用於由過濾總成私過濾出 的粉末，藉此使粉末與過濾器分離。 空氣槽64可被建構來接收來自設於集合管1〇的氣壓 計22的對應壓力的信號，然後進行供氣操作，若過渡室％ 的内壓確定是降至預定壓力以下。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公茇） --------訂--------- (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 478959 - A7 ____ B7 五、發明說明（8) 在此實施例中，第1圖的廢氣處理系統接收由半導體 元件製造程序經過集合管10排放出的廢氣。廢氣在集合管 10内與惰性氣體混合以降低反應性，然後供應到加熱室 12 〇 加熱室12在預定溫度加熱被供應的廢氣。在此程序 中，廢氣氧化而改變諸如毒性、腐蝕性和可燃性的化學性 質。所以，廢氣被淨化且粉末成為副產物而產生。 因為含有粉末的廢氣，剛剛通過加熱室11，是很熱 的’所以廢氣被送到冷卻室14來降低溫度。在冷卻室Η中， 廢氣在室溫下冷卻。然而，含在廢氣中的粉末附著於冷卻 室14的冷側壁。 此時，附著的粉末降低冷卻室的效率。所以，附著 的粉末藉刮除裝置而從冷卻室14側壁分離，且被收集於收 集箱16中。收集箱16被定期更換。 在室溫下於冷卻室14冷卻的廢氣，經過管子24而送 到旋風收集器18。在旋風收集器18的旋風室26中，仍含在 廢氣中的粉末被離心程序分離。 集結於旋風室26中的粉末經過旁路閥30而被送到收 集箱28。廢氣通過管路31、34被引入過濾收集器20。此時， 因為旁獲§ 38除了特殊情況總是關閉，且另一個旁路閥32 除了特殊情況總是打開，所以廢氣被送到過濾室36。 引入過濾室36下部份的廢氣被送到過濾室36上部 份，並經由管路42而被送風機（未顯示）排放出。 同時，從過濾室36下部份送到上部份的期間，仍留 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 11 — — — — — — 111 — — — · I I I I — I I — — — — — — — — I* (請先閲讀背面之注意事項再填寫本頁) 478959 A7 B7 五、發明說明（9) 在廢氣中的粉末被過濾總成44過濾。 亦即，廢氣通過支撐板50的通孔（其中安裝有過濾總 成44之袋式過濾器52)而傳送到過濾室36的袋式過濾器 52。當廢氣通過袋式過濾器52的過濾篩網59時，剩餘的粉 末被袋式過濾器52過濾。 袋式過濾器52由軟材料製成。所以，袋式過濾器52 的形狀可因移動的廢氣而改變。然而，袋式過濾器52被過 濾籠狀物54所支撐以維持其形狀。 當廢氣在到達袋式過濾器52之前從旋風室26移到過 濾室36時，由於廢氣流動速度在過濾室36内部被降低，所 以粉末中比其他部份較重的一部份會自然地掉落到收集箱 46 〇 然後，廢氣通過袋式過濾器52之同時，粉末被袋式 過濾器52的過濾篩網59過濾出。所以，粉末累積在過濾篩 網59上。因此，隨著累積在過濾篩網59上的粉末量增加， 通過過濾篩網59的廢氣量減少。於是，過濾總成44的上壓 力降低，此係由於經過過濾總成44引入的空氣量少於被送 風機（未顯示）經由管路42排放出的空氣量。 感應器66輸出空氣槽64之對應壓力的偵測信號。空 氣槽64供應壓縮空氣到喷嘴部份62，因而空氣透過每個喷 嘴大量地注入。 所以，累積在袋式過濾器54之過濾篩網59的粉末因 氣震而分離，然後往下掉而被收集在收集箱46内。 若過濾總成44的上壓力增加到大於預定壓力，則來 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -12 - (請先閱讀背面之注意事項再填寫本頁)Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (4) A pocket filter screen at the entrance; a filter cage with a support plate fixed through the entrance of the bag filter A circular peripheral edge, a cylindrical body with a side wall formed as a grill structure, and a bottom surface formed with a circular plate structure to support the bag filter placed therein. Further, if the internal pressure of the filter chamber is lowered below a predetermined pressure, the air shock device supplies air to the filter assembly, and the powder is separated by the air pressure generated by the air supply operation. It should be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as requested. The drawings are briefly explained in the drawings: FIG. 1 is a diagram showing one embodiment of an exhaust gas treatment system according to the present invention; FIG. 2 is a diagram showing another embodiment of an exhaust gas treatment system according to the present invention; The circle shows an exploded circle of the filter assembly of the filter collector of the exhaust gas treatment system according to the present invention; and FIG. 4 is a cross-sectional view of the filter assembly of FIG. 3. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings. As shown in Fig. 1, the exhaust gas treatment system according to the present invention is provided with a pretreatment device, a cyclone collector 18, and a pipe connected to the front. 297 mm) ------------ II --I (Please read the precautions on the back before filling out this page) On 0 · -line-478959 A7 B7 V. Description of the invention (5) Device's filter collector 20. The pretreatment equipment includes a collecting pipe 10, a heating chamber 12, a cooling chamber 14, and a collection box 16. (Please read the precautions on the back before filling this page) The manifold 10 mixes the inert gas supplied through a pipe (not shown) with the exhaust gas to stabilize the exhaust gas. The heating chamber 12 heats the exhaust gas at a desired temperature so as to change the chemical properties of the exhaust gas. The heated exhaust gas is introduced into the cooling chamber 14 and then cooled. In addition, a pressure gauge 22 is provided on the inner side of the collecting pipe 10 for checking and displaying the internal pressure of the collecting pipe 10. The collection box 16 is positioned in the lower part of the cooling chamber 14 so as to collect the powder generated during the heating and cooling processes of the heating chamber 12 and the cooling chamber 14 through the exhaust gas. That is, when the exhaust gas is heated through the heating chamber 12, a chemical reaction including oxidation is generated, and thus powder is generated. If the powder is introduced into the cooling chamber 14, the powder adheres to the cold inside of the cooling chamber 14. The adhered powder is separated from the cooling chamber 14 by a scraping device (not shown), and then collected in a collection box 16. The collecting pipe 10 communicates with the heating chamber 12 and the cooling chamber 14. The exhaust gas purified by the dry process is discharged to the cyclone collector 18 through a pipe 24 connected to the cooling chamber 14. At this time, the fine powder is taken to the cyclone collector 18 along with the exhaust gas. 0 The clothes are printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The cyclone collector 18 includes a cyclone chamber 26 and a collection box 28. The cyclone chamber 26 has the same structure as disclosed in Korean Patent Application No. 1998-25587 of the applicant of the present case. The exhaust gas introduced into the cyclone chamber 26 is subjected to centrifugation, so that the powder is separated from the exhaust gas and moves downward. The collection phase 28 is fixed in the lower part of the cyclone chamber 26 and communicates with each other through the bypass valve 30. Therefore, the downward-moving powder from the cyclone chamber 26 was collected at the paper size of the paper to which the Chinese National Standard (CNS) A4 (21 × 297 mm) was applied. The clothing of the Intellectual Property Bureau of the Ministry of Economic Affairs, the consumer co-operative printed clothing 478959 A7 B7 V. DESCRIPTION OF THE INVENTION (6) Inside the header 28. The bypass valve 30 is always open except when the collection tank 28 is replaced. The cyclone chamber 26 allows the exhaust gas purified by the centrifugal method to be discharged through the upper pipe 31. Therefore, the powder filtered in the cyclone chamber 26 is collected in the collection box 28, and the purified exhaust gas is supplied to the filter chamber 36 of the filter collector 20 through the other pipe 34 connected to the upper pipe 31. A bypass filter 32 is provided in the pipeline 34. Moreover, a bypass valve 38 is provided in the upper line. The upper pipe is connected to another pipe 42 extending from the upper part of the filter chamber 36. Line 42 also has a bypass valve 40. Therefore, the upper pipe 31 and the other pipe 42 constitute a discharge pipe apparatus. A motor-driven blower (not shown) is provided at the end of the exhaust pipe equipment to exhaust the exhaust gas. Moreover, when exhaust gas is discharged, the blower also functions as a pressure regulator of a filter chamber 36. Meanwhile, the filter collector 20 includes a filter chamber 36 and a collection box 46. The pipes 34 and 42 are connected to the upper and lower portions of the filter chamber 36, respectively. Moreover, the filter assembly 44 is provided in the filter chamber 36. The collection box 46 is provided in the lower part of the filter chamber 36. The filter assembly 44 is provided with a support plate 50 having a plurality of through holes and fixed to the side wall of the filter chamber 36, a bag filter 52, and a filter cage 54 assembled in each through hole. That is, as shown in Fig. 3, first, the bag filter 52 is placed in a through hole formed in the support plate 50. Then, the filter cage 54 is placed in a bag filter 52. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -9------------- I ^ ---- II-^ ------ --- ^ (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs π 478959 A7 ___ B7 V. Description of the invention (7) The bag filter 52 contains a filter A circular inlet portion 58 around the aperture, and a pocket filter screen 59 fixedly coupled to the inlet portion 58. The filter cage 54 has a circular peripheral edge 56 at the open end, and is fixed to the support plate 50 through the inlet portion of the bag filter 52. As shown in FIG. 3 (a), the filter cage 54 is also provided with a cylindrical Zhao with a side wall forming a grill structure, and a bottom surface formed as a circular plate structure, and a bag-type filter 52 placed therein in a gift. As shown in Fig. 4, the 'support plate 50, the bag filter 52 and the filter cage 54 are combined with each other. Further, the air supply portion 60 is provided with an upper portion of the filter assembly 44 provided in the filter chamber 36. The air supply portion 60 has a nozzle portion 62 which is inserted through the side wall of the chamber 36 and has a plurality of nozzles to inject air, and an air groove 64 which is placed outside the transition chamber 3 5 to supply air to the nozzle portion 62. . The air tank 64 compresses the air supplied from the air supply pipe 68 at a predetermined pressure or higher and stores the compressed air therein. Further, the air tank 64 is operated by a signal from a sensor 66 provided on the upper portion of the filter chamber 36. That is, the sensor 66 detects the internal pressure of the transition chamber 36 on the filter assembly 44, and then outputs a detection signal to the air tank 64. If the internal pressure of the side crossing chamber 36 falls below a predetermined pressure, the air tank 64 supplies and stores air to the nozzle portion 62, so the air pressure (pneumatic shock) is applied to the powder filtered out by the filtering assembly, thereby making The powder is separated from the filter. The air tank 64 may be configured to receive a signal corresponding to the pressure from the barometer 22 provided in the collecting pipe 10, and then perform a gas supply operation if the internal pressure of the transition chamber% is determined to fall below a predetermined pressure. This paper size applies to China National Standard (CNS) A4 specifications (210 X 297 cm) -------- Order --------- (Please read the precautions on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478959-A7 ____ B7 V. Description of the Invention (8) In this embodiment, the exhaust gas treatment system of FIG. 1 receives the exhaust gas emitted by the semiconductor component manufacturing process through the manifold 10. The exhaust gas is mixed with an inert gas in the header 10 to reduce the reactivity, and is then supplied to the heating chamber 12. The heating chamber 12 heats the supplied exhaust gas at a predetermined temperature. In this procedure, the exhaust gas is oxidized to change chemical properties such as toxicity, corrosivity and flammability. Therefore, the exhaust gas is purified and powder is generated as a by-product. Because the exhaust gas containing powder has just passed through the heating chamber 11 and is very hot ', the exhaust gas is sent to the cooling chamber 14 to lower the temperature. In the cooling chamber Η, the exhaust gas is cooled at room temperature. However, the powder contained in the exhaust gas adheres to the cold side wall of the cooling chamber 14. At this time, the adhered powder reduces the efficiency of the cooling chamber. Therefore, the adhered powder is separated from the side wall of the cooling chamber 14 by the scraping device, and is collected in the collecting box 16. The collection box 16 is replaced regularly. The exhaust gas cooled in the cooling chamber 14 at room temperature passes through the pipe 24 and is sent to the cyclone collector 18. In the cyclone chamber 26 of the cyclone collector 18, the powder still contained in the exhaust gas is separated by a centrifugal process. The powder collected in the cyclone chamber 26 is sent to the collection box 28 through the bypass valve 30. The exhaust gas is introduced into the filter collector 20 through the lines 31, 34. At this time, since the bypass § 38 is always closed except in special cases, and the other bypass valve 32 is always open except in special cases, the exhaust gas is sent to the filter chamber 36. The exhaust gas introduced into the lower part of the filter chamber 36 is sent to the upper part of the filter chamber 36, and is discharged by a blower (not shown) through a pipe 42. At the same time, during the period from the lower part of the filter chamber 36 to the upper part, the paper size is still applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) 11 — — — — — — 111 — — — · IIII — II — — — — — — — — I * (Please read the notes on the back before filling this page) 478959 A7 B7 V. Description of the invention (9) The powder in the exhaust gas is filtered by the filter assembly 44. That is, the exhaust gas is transmitted to the bag filter 52 of the filter chamber 36 through the through hole of the support plate 50 in which the bag filter 52 of the filter assembly 44 is installed. When the exhaust gas passes through the filter screen 59 of the bag filter 52, the remaining powder is filtered by the bag filter 52. The bag filter 52 is made of a soft material. Therefore, the shape of the bag filter 52 may be changed by the moving exhaust gas. However, the bag filter 52 is supported by the filter cage 54 to maintain its shape. When the exhaust gas moves from the cyclone chamber 26 to the filter chamber 36 before reaching the bag filter 52, since the flow velocity of the exhaust gas is reduced inside the filter chamber 36, a part of the powder that is heavier than the other parts naturally falls After falling into the collection box 46, the exhaust gas passes through the bag filter 52, and the powder is filtered out by the filter screen 59 of the bag filter 52. Therefore, the powder accumulates on the filter screen 59. Therefore, as the amount of powder accumulated on the filter screen 59 increases, the amount of exhaust gas passing through the filter screen 59 decreases. As a result, the upper pressure of the filter assembly 44 is reduced, because the amount of air introduced through the filter assembly 44 is less than the amount of air discharged by the fan (not shown) through the pipe 42. The sensor 66 outputs a detection signal corresponding to the pressure of the air tank 64. The air tank 64 supplies compressed air to the nozzle portion 62, so that air is injected in a large amount through each nozzle. Therefore, the powder accumulated in the filter screen 59 of the bag filter 54 is separated by the air shock, and then is dropped down and collected in the collection box 46. If the upper pressure of the filter assembly 44 is increased to be greater than the predetermined pressure, the paper size applies the Chinese National Standard (CNS) A4 (210 X 297 mm) -12-(Please read the precautions on the back before filling this page )
ϋ A— ϋ mmaw ί ϋ t ϋ ϋ I ϋ ϋ ϋ «I I 3m, 經濟部智慧財產局員工消費合作社印製 478959 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（3 自空氣槽64的供氣操作停止。在此情況下，附著於過濾篩 網59的粉末被完全移除。所以，過濾總成44所做的過濾程 序可連續進行。 而且，收集箱46係定期更換。 如上所述’根據本發明之廢氣處理系統，含於廢氣 中的粉末可完全移除，且排放管路亦避免因粉末附著而堵 塞’藉此防止系統的性能降低或系統的運作因粉末而停 止。 如第2圖所示，根據本發明，另一個過濾收集器可額 外地提供於第1囷的實施例中，與存在的過濾收集器平行。 此處’過濾收集器的結構係相同於第1囷所示者。 在此實施例中，為了確定從旋風收集器排到過濾收 集器的廢氣的移動通路，提供一個三向闊於管路的分支 點。每個排放管路連接一個共同的管路以便排放廢氣。 所以’由前處理設備淨化的廢氣被傳送到兩個過濾 收集is的其中一個。假如要檢視其中一個過濾器，則廢氣 的移動通道被三向閥控制。於是，其中一個過濾收集器進 行處理廢氣的操作，而同時另一個過濾收集器進行檢視。 對於熟於此技者很顯然的是，本發明的各種修改和 變化可在不背離本發明之精神或範圍下做出。所以，本發 明意圖涵蓋本發明之修改和變化，只要他們是在隨附之申 請專利範圍的請求範圍以及他們的同等物的範圍内。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 13 — — — — — — — — — — — — — - — III — — — — — — — — — (請先閱讀背面之注意事項再填寫本頁) 478959 A7 _B7_ 五、發明說明（1]) 元件標號對照表 經濟部智慧財產局員工消費合作社印制衣 10...集合管 12…加熱室 14...冷卻室 16...收集箱 18...旋風收集器 20...過濾收集器 22··.壓力計 24…管子 26...旋風室 28…收集箱 30·.·旁路閥 31...上管路 32··.旁路閥 34··.管路 36…過濾室 38.··旁路閥 40…旁路閥 42···管路 44...過濾總成 46…收集箱 50...支撐板 52...袋式過濾器 54…過濾籠狀物 56...圓形周緣 58…入口部份 59…口袋式過濾篩網 60…供氣部份 62…喷嘴部份 64...空氣槽 66...感應器 68...供氣管 (請先M讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） 14ϋ A— ϋ mmaw ί ϋ ϋ ϋ I ϋ ϋ ϋ «II 3m, printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, printed 478959 printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, printed A7 B7 V. Description of the invention (3 from the air trough The gas supply operation of 64 is stopped. In this case, the powder adhering to the filtering screen 59 is completely removed. Therefore, the filtering process performed by the filtering assembly 44 can be continuously performed. Moreover, the collection box 46 is periodically changed. As above Said 'according to the exhaust gas treatment system of the present invention, the powder contained in the exhaust gas can be completely removed, and the discharge pipeline is also prevented from being clogged by powder adhesion', thereby preventing the performance of the system from being degraded or the system operation from being stopped by the powder. As shown in FIG. 2, according to the present invention, another filter collector may be additionally provided in the first embodiment, in parallel with the existing filter collector. Here, the structure of the filter collector is the same as that of the first filter collector.囷 In this embodiment, in order to determine the moving path of the exhaust gas discharged from the cyclone collector to the filter collector, a three-way branch point wider than the pipeline is provided. Each discharge pipeline Connect a common line to discharge the exhaust gas. So 'the exhaust gas purified by the pre-treatment equipment is sent to one of the two filter collection is. If one of the filters is to be inspected, the exhaust gas moving channel is controlled by a three-way valve. Therefore, one of the filter collectors performs the operation of treating exhaust gas, while the other filter collector performs the inspection. It is obvious to those skilled in the art that various modifications and variations of the present invention can be made without departing from the spirit of the present invention or Made within the scope. Therefore, the present invention is intended to cover the modifications and changes of the present invention, as long as they are within the scope of the appended patent application scope and their equivalents. This paper standard applies Chinese National Standards (CNS) A4 specifications (210 X 297 mm) 13 — — — — — — — — — — — — — — — — — — — — — — — (Please read the notes on the back before filling out this page) 478959 A7 _B7_ V. Description of the invention (1)) Component label comparison table Intellectual Property Bureau of the Ministry of Economic Affairs Employees' Cooperative Printed Clothes 10 ... Collection Tube 12 ... Plus Chamber 14 ... Cooling chamber 16 ... Collection box 18 ... Cyclone collector 20 ... Filter collector 22 ... Pressure gauge 24 ... Pipe 26 ... Cyclone chamber 28 ... Collection box 30 ... Bypass valve 31 ... Upper line 32 ... Bypass valve 34 ... Line 36 ... Filter chamber 38 ... Bypass valve 40 ... Bypass valve 42 ... Line 44 ... Filtration Assembly 46 ... Collection box 50 ... Support plate 52 ... Bag filter 54 ... Filter cage 56 ... Circular perimeter 58 ... Inlet portion 59 ... Pocket filter screen 60 ... Air supply unit Parts 62 ... Nozzle part 64 ... Air tank 66 ... Sensor 68 ... Air supply pipe (please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 (210 X 297 public love) 14