TW473801B - Lid plate device for protecting machine platen - Google Patents

Abstract

The present invention provides a lid plate device fixed above the machine platen in a clean room for protecting the machine platen. The device includes at least two supporting shafts and a plurality of rectangular sheet lid plates for connecting to the supporting shafts in an inclined and mutually parallel manner. Each lid plate has a part of area overlapped with the projecting plane of the adjacent lid plate in a vertical direction, wherein each lid plate is formed by an anti-acid zinc-plated steel plate, and the bottom of each lid plate is connected with a flow-guiding slot for carrying and guiding the carelessly leaked process liquid.

Description

473801 V. Description of the invention α) Field of the invention The present invention provides a cover device for protecting a machine, particularly a cover device fixed above a machine in a clean room to protect the machine. Background: In a general wafer factory, all processes are completed in a clean room. In order to save space, most of the clean rooms adopt a design similar to the middle floor of multiple floors; that is, a staggered mesh galvanized The steel frame and railing are set up at a certain height on the ground, and then the main platform and pipeline are set up on it. _ However, this design usually produces two problems. The first is that the galvanized steel frame is staggered and the railing is not enough to completely close the galvanized steel frame. Therefore, some accidental falling tools or It is a part that often passes through the gap between the mesh steel frame and the railing, and damages the machine or staff below. The second problem is that the mainframe and the criss-crossed pipelines that are installed on the mesh galvanized steel frame are often filled with many acidic or experimental process solutions, such as the wet #etching process. A mixed solution of a process for removing nitricacid and hydrofluoric acid from silicon dioxide. These solutions are very likely to flow out from the joint between the mainframe and the pipeline, and then drip into the gap between the mesh and the railing, thereby damaging the machine or the staff below.

473801 V. Description of the invention (2) Since these process solutions are all highly volatile, highly corrosive or toxic solutions, when the process solution leaks out, these solutions or volatile gases will definitely cause physical injury to workers. It may even lead to irreparable consequences, and the leaked process solution may drip and erode the machine downstairs, corrode the circuit and cause the failure of the entire machine, which will cause the entire production line to stop and resources. waste. In addition, in a clean, clean room, the particles generated by the volatilization of the process solution will certainly cause damage to the wafer surface. It is known that the solution to prevent these problems is to lay a cover device 100, which is slightly larger than the mainframe underneath, under the mesh iron frame to receive the accidentally dropped process solution, tools, and parts. Please refer to Fig. 1, which is a schematic diagram of a conventional technique. The conventional technology is to install a cover device 100 in a clean room 200, which includes a cover device 100, an air filter 202, and an air intake. Port 204, an air outlet 206, a meshed steel frame 2 0 8, a machine 2 1 0 a is provided on the meshed steel frame 2 0 8 and a machine 2 1 0 b is provided on the meshed steel frame Below 2008, the structure of the cover device 100 includes a piece of galvanized steel plate 102 fixed above the machine 2 1 0 b in the clean room, and four zinc plate steel plates 102 The four vertical support shafts 104 (two are shown in the figure), and the area covered by the galvanized steel sheet 102 is slightly larger than the machine 210b, which is used to protect the machine or workers below. Prevent the erosion of the process solution and the fall of tools and parts, and hurt the machine or staff below.

Page 5 473801 V. Description of the invention (3) Clean room 2 0 0 uses air filter 2 2, air inlet 2 0 4 and air outlet 2 0 6 to maintain cleanliness (c 1 ea η 1 iness) Requirements. Among them, the air filter 202 traps particles in the air and keeps the particles in the air below a certain level. The air inlet 2 0 4 supplies fresh air to the clean room 2 0 and at the same time dilutes the particle concentration in the air. The air outlet 2 06 is responsible for exhausting air out of the clean room 2 0 to generate sufficient convection. Because the design of clean room 2 0 0 is to reduce the air through the inflow and convection of air between the air inlet 2 0 4 and the air outlet 2 0 (as shown by the arrow), and then use the air filter 2 0 2 Particulates, which in turn meets the requirements for maintaining cleanliness. However, the cover device 100 of the conventional technology will cause the air circulation at the cover device 100 (as shown by the arrow), and the clean room 2000 cannot meet the requirements of cleanliness. As mentioned above, although the conventional technology can prevent the machine or workers from being eroded and damaged by the process solution and tools, it can also cause the air in the clean room to circulate, which seriously affects the cleanliness requirements in the clean room. SUMMARY OF THE INVENTION Therefore, the object of the present invention is to provide a new cover device to meet the requirements of cleanliness while taking into account industrial safety, and to solve the above problems. The invention provides a machine fixed in a clean room for protection.

Page 6 4 ~ 33〇i V. Description of the invention 数 Number of two sheet-shaped cover plates, and each of the cover plates 22 t is connected in series to a part of the rectangular piece on the shaft of the branch from one meter to 20 cm. Count several sheet-shaped cover plates, and each of the cover plates is connected to the Gu Hai fork axis a moment Ϊ 2 is perpendicular to the adjacent cover plate 2 = i cm to 20 cm. The acid-proof plated steel sheet i is on the f plane. Each cover in *: This top and bottom are made up, each should be connected to each adjacent cover < diversion slot, used to receive and guide the bottom of the plate is not provided The advantage of the present invention is that the cover assembly ^ ^ T e and λα u can effectively prevent the melting of the process, the invasion of preparation, and the fall of tools and parts, and the main length A ^ dry / close I also took into account the clean room. I want water. / 引 ", l 丨 Carefully leaked details of the invention of the Shaojie μ cleanliness invention Please refer to FIG. 2. FIG. 2 is an external view of a preferred embodiment of the present invention. As shown in FIG. 2 ', the cover plate device 10 includes four horizontal support shafts 1 parallel to each other, 2, four vertical support shafts parallel to each other, 3, a plurality of rectangular cover plates 14, and a flow guide. Tube 1 8. Among them, each support shaft 1 2, 1 3 and the cover plate 14 are made of acid-proof galvanized steel plate or material, and each support shaft 12 is used to connect the corresponding angles of the cover plates 14 in series. In order to fix a plurality of cover plates i 4 while maintaining a plurality of cover plates 1 4 to maintain a tilted and parallel $ row state, and each support shaft 1 3 is connected to a mesh steel frame (not shown in the figure) The fixed cover device 10 is arranged above the machine (not shown in the figure) below the clean room. And the diversion tube 18 is set at the same side corner of a plurality of rectangular cover plates 1 4

473801 V. Description of the invention (5) The area under the cover device 10 is slightly larger than that of the lower machine in the clean room, so it can prevent the erosion of the process solution and the fall of tools and parts, and protect the lower machine. Desk or staff. Please refer to Figure 3, which is a schematic diagram of the relative positions of adjacent cover plates shown in Figure 2. As shown in FIG. 3, each cover plate 14 is serially connected to each support shaft 12 in an inclined and parallel manner, and the top of each cover plate 4 is located in another phase on a vertical projection plane. Adjacent to the bottom of the cover 14. That is, any two adjacent cover plates 14 have a partial area that overlaps the vertical plane of the adjacent cover plate 14 and the minimum side length of the partial area on the projection plane β. It is from 1 cm to 20 cm to prevent the process solution from not dripping. Please refer to FIG. 4 and FIG. 5, which are schematic diagrams of any one of the cover plates 14 from the direction A and the direction B from the second view, respectively. As shown in Figure 4, the cover plate 14 is a rectangular sheet-shaped plate, and it is inclined at an angle of 1130 with the horizontal plane to receive and guide the water that may flow out from the joint between the main platform and the pipeline and drip on the net and railing The process solution between the gaps. As shown in FIG. 5, the bottom of the cover plate 14 includes a diversion groove 16 to guide the dropped process solution to the diversion tube 18. A diversion tube 18 is disposed below the same side corner of each cover plate 14 and is used to guide the process solution received by the diversion tank 16 to an outlet (not shown). Among them, __ each cover 14 is composed of two sheets 1 4a, 1 4b (or a forged L-shaped sheet), and the two sheets 14a, 1 4b are on the cover 1 4 An angled groove is formed at the bottom as the diversion groove 16, and each diversion groove 16 is arranged below the diversion groove 16

Page 8 473801 V. Description of the invention (6) The aforementioned diversion tube 18 is provided. Please refer to FIG. 6, which is a second embodiment of the present invention. The guide groove 16 at the bottom of each cover plate 4c is a forged arc-shaped design, instead of an acute angle structure formed by two pieces of objects 14a and 14b at the bottom of the cover plate 4c. Please refer to FIG. 7, which is a third embodiment of the present invention. On the top of each cover 14d, a barb top cover 15 is provided, so that the process solution dripped onto the cover 15 can flow down the arc of the cover 15 to the adjacent cover 14d. Or the guide groove 16 of the cover plate 14d itself, to prevent the process solution from dripping onto the machine or workers when the process solution drips on top of the cover plate 14 of the preferred embodiment of the present invention. Please refer to Fig. 8 and Fig. 9 'Fig. 8 and Fig. 9 are the fourth and fifth embodiments of the invention, respectively. As shown in Figure 8, a mesh 20 can be connected between the top of each cover 1 4e and the bottom of another adjacent cover 1 4e, which can better ensure the process solution or parts, The tool will not damage the machine or the staff through the gap formed by the top of each cover 14 and the bottom of another adjacent cover 14. In addition, as shown in Fig. 9, the meshes 22 can also be directly covered between the tops of the respective cover plates 14f. The invention uses a plurality of cover plates inclined and parallel to each other, and partially overlaps the projection plane of the vertical direction of the adjacent cover plates, so that the process solution or parts and tools cannot pass through the adjacent covers. The gap between the boards hurts the machine and staff downstairs. In addition, since this

Page 9 473801 V. Description of the invention (7) There are gaps between adjacent cover plates of the invention, so the convection effect of air in the clean room can be guaranteed, and the cleanliness requirements in the clean room can be taken into account. Compared with the conventional technology, the present invention, while maintaining industrial safety, also takes into account the strict requirements for cleanliness in the clean room, and achieves the best of both worlds. The above description is only a preferred embodiment of the present invention, and all equivalent changes and modifications made in accordance with the scope of the patent application for the present invention shall fall within the scope of the invention patent.

Page 10 473801 Brief description of the drawings Brief description of the drawings Figure 1 is a schematic diagram of a cover device of the conventional technology. FIG. 2 is an external view of a preferred embodiment of the present invention. FIG. 3 is a schematic diagram of relative positions of adjacent cover plates shown in FIG. 2. FIG. 4 is a schematic view of any one of the cover plates 14 as viewed from the direction A. FIG. FIG. 5 is a schematic view of any one of the cover plates 14 as viewed from the B direction. 6 to 9 are schematic diagrams of the second, third, fourth, and fifth embodiments of the present invention. Symbol description

100 '10 Cover device 102 Galvanized steel plate 104, 12 Support shaft 20 0 Clean room 202 Air filter 204 Air inlet α 206 Air outlet 208 Mesh steel frame 210a, b Machine table 14, 14c, 14d, .14e' 14f Covers 14a, 14b Sheets 15 Top cover 16 Baffles 18 Baffles 2 0 '22 Mesh p. 11

Claims (1)

473801 6. Scope of patent application 1. A cover device provided in a clean room (c 1 ea η r ο 〇m), the clean room is provided with a machine, the cover device includes: at least two support shafts Is fixed above the machine in the clean room; and a plurality of cover plates are respectively connected to the support shafts, and the top of each cover plate is above the bottom of another adjacent cover plate. 2. As for the cover device of the first patent application, each of the cover plates is a rectangular sheet plate, and each of the support shafts is used to connect the corresponding corners of the cover plates in series. 3. As for the cover device of the scope of patent application, the cover plates are connected in series to each of the support shafts in an inclined and parallel manner. 4. As for the cover plate device in the scope of patent application, each of the cover plates is an acid-proof galvanized steel plate. 5. For the cover device of the scope of patent application, any two adjacent cover plates have a partial area overlapping on the vertical projection plane, and the minimum side length of the partial area on the projection plane It is 1 cm to 20 cm. 6. As for the cover plate device in the scope of patent application, the top of each cover plate and the bottom of another adjacent cover plate are connected by a mesh. Page 12 473801 VI. Application for patent scope 7. For the cover device of the first scope of patent application, each of the cover plates is composed of two pieces, and the two pieces form an angle shape at the bottom of the cover plate. Of the groove. 8. As for the cover plate device of the scope of patent application, the bottom of each cover plate is an arc-shaped design for receiving and guiding a liquid. 9. As for the cover plate device of the scope of patent application, the top of each cover plate is additionally provided with a barb top cover. 1 0. A cover device provided in a clean room to protect a machine, the cover device includes: at least two support shafts fixed above the machine in the clean room; a plurality of cover plates, each of which Cover plates compete with each of the support shafts, and the bottom of each cover plate includes a flow guide groove, and the top of each cover plate is located above the flow guide groove of another adjacent cover plate; Below the same side corner of the bottom of each cover plate, it is used to guide the liquid collected by each diversion tank to an outlet. 11. The cover device according to item 10 of the patent application scope, wherein each of the cover plates is a rectangular sheet-shaped plate, and each of the support shafts is used to serially connect the corresponding 4 corners of each of the cover plates. 1 2. The cover plate device according to item 10 of the patent application scope, wherein each of the cover plates is Page 13 473801 VI. Scope of patent application Serially connected to each of the support shafts in an inclined and parallel manner. 1 3. According to the cover plate device of the scope of application for patent No. 10, wherein the side of the bottom of the cover plate adjacent to the guide tube is lower than the other side of the bottom of each cover plate, so that the dripping liquid can be smoothly Into the diversion tube. 14. The cover device according to item 13 of the patent application scope, wherein the cover device is tilted at an angle of about 1 ° to 30 °. 1 5 · The cover plate device according to item 10 of the patent application scope, wherein each of the cover plates is an anti-acid galvanized steel plate. 16. As for the cover device of item 10 of the patent application scope, any two adjacent cover plates have a partial area overlapping on a vertical projection plane, and the smallest area of the partial area on the projection plane The side length is 1 cm to 20 cm. 1 7. The cover plate device according to item 10 of the patent application scope, wherein the top of each cover plate and the bottom of another adjacent cover plate are connected by a mesh. 18. The cover plate device according to item 10 of the patent application scope, wherein the diversion groove is formed by an angle between two pieces. 19. The cover plate device according to item 10 of the patent application scope, wherein the guide groove is an arc-shaped design for receiving and guiding a liquid. Page 473 801 Page 15