TW473449B - SMIF-compatible open cassette enclosure - Google Patents

Description

V. Description of the invention (1 Background of the invention The scope of the invention The invention relates to-input / output openings, in particular a receiving device installed in an SMTF (Standardized Mechanical Interface) input / output opening, which can be used to send-bare card E back and forth to —Equipped with a _positive input / output opening ^ processing tool'wire_set, which can isolate the operator from the interior of the input / output opening after the card g is loaded. Explanation of related techniques_ A type proposed by HP The SMIF system has been described in U.S. Patent Nos. 4,532,970 and 4,534,389. The purpose of the smif system is to reduce the flux of microparticles that semiconductor wafers receive during the storage and transportation of semiconductor processes. This can be achieved by achieving this goal The methods include: mechanically ensuring that the gaseous medium (such as air or nitrogen) around the wafer is basically fixed relative to the wafer during storage and transportation, and that the particles in the surrounding environment do not enter the adjacent wafer. In the environment, the SMIF system can use a small amount of particulate-free gas to provide a clean environment for the object, the movement of the gas, the direction of the air flow, and the outside Dyestuffs are controlled. In the paper by Miliir Parikh and Ulrich Kaempf: "SMIF: U-Transfer Technology for Wafer Cards in the Manufacturing of Very Large Integrated Circuits" (Solid State Technology (July 1984, pages 111 to 115), for a more detailed description of the proposed system. The above type of system involves particle sizes below 0.02 microns (μιη) to above 200 microns . This size of particles is extremely destructive in the semiconductor manufacturing process. -4- This paper size is applicable to China National Standard (CNS) A4 specification (21〇X 297 mm). -------------- ------- Order --------- line (Please read the notes on the back before filling out this page) Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs System κΒ7 ______ V. Description of the invention (2) The reason is the tiny geometrical dimensions used in the manufacture of semiconductor devices. The current geometrical dimensions used in advanced semiconductor processes do not exceed half a micron. If the size of the pollution particles is greater than 0.1 micron, Severely affected semiconducting at 0.5 micron geometry Of course, the shrinking of the geometrical dimensions of semiconductor processing is the trend. At present, the geometrical dimensions in research and development laboratories are close to 0.1 microns and below. The geometrical dimensions in the future will become smaller and smaller. Therefore, my concern is The size of pollutant particles will also become smaller and smaller. A SMIF system has three main parts: (i) a micro-volume sealed pod for storing and transporting wafer cassettes; (2) —a micro-environment for ultra-clean air. The clean air will flow through the cassette loading opening and the wafer processing area of the processing station, so that the environment in the inflammation and the microenvironment become a tiny clean space; and (3) robotic input / output (I / O) openings The assembly can load and unload wafer cassettes and / or wafers in sealed pods to processing equipment, and does not cause the wafers in the wafer cassettes to be polluted by the external environment. The system provides a continuous, ultra-clean environment for wafers being transferred in a fab. Many wafer foundries have not yet (or only partially) switched to SMIF solutions. The so-called local change may fix the SMIF input / output opening at the front of the processing tool, but the wafer (or other similar workpiece) is shipped in the factory in a bare cassette instead of the SMIF pod. . Under this condition, the cassette is carried by the operator to the input / output opening and placed on an opening door of the input / output opening, and then passes through the input / output opening downward, so that the workpiece can be transferred back and forth to the processing tool. . There are several disadvantages to manually loading naked cards into SMIF input / output openings. First of all, during the process of transporting the bare cassette back and forth in the factory, the workpiece in the cassette -5-i paper size applies to China National Standard (CNS) A4 specifications _ (21C) x 297) ---- ----- I ------------- Order --------- Line t Please read the notes on the back before filling out this page) Printed by A7 B7, Employee Consumer Cooperative of Intellectual Property Bureau, Ministry of Economic Affairs 5. Description of the invention (3) The direction is preferably vertical or near vertical, so as to prevent the workpiece from falling out of the jam. However, in order to properly load the -card E on an input / output opening, the operator must rotate the cassette so that the workpiece is level when the workpiece is on the opening 1 and the argon 1. Repeated rotation-like actions when loading and unloading cards g at different input / output openings in the factory will cause operator fatigue or cause repeated overwork injuries to the operator's wrists and arms. In addition, care must be taken during the rotation of the card E to prevent the workpiece from being jammed and prevent the workpiece from sliding forward or falling out of the card. Another problem related to safety is that when the opening plate is separated from the opening door, there is a so-called "pinch" between the two. The operator must be careful when the opening ^ returns to its original position inside the opening plate so that the hand does not come into contact with the male point. Another safety-related hazard is that the coffee input / output opening is basically provided with a laser device, which is located below the opening plate and can be used to generate the mapping and position data of the workpiece. If the operator looks directly at the laser device when the opening door is lowered and leaves the opening plate, the retina may be damaged. In addition to safety considerations, another problem is to manually load the bare card cassette onto the flap input / output opening. Wu Wu, sister -w ► The door is a horse, and the operator may accidentally damage the input / The output opening, or the inside of a processing tool equipped with the input / output opening, is damaged. Inventing Total Cobalt Therefore, one advantage of the present invention is to provide a cover on an input / output opening which can isolate the operator from the interior of the opening after the bare card M has been loaded on the opening. Another advantage of the invention is that it provides-with ergonomic design-6 ^ This paper size applies the CNS A4 specification (21G X 297 male " ---------- ---------- Order --------- line (Please read the precautions on the back of the 8S before filling in this page) cc ^ / ^ Q: (j:,-

V. Description of the invention (4 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs " After the field card box is loaded manually, the cover can automatically turn the card E to ease the operator's manual rotation of the card when it is hidden The resulting fatigue and overwork. Another advantage of the present invention is that it can provide a 01-level environment in the bare-card-cartridge-round-cartridge that is loaded on an input / output opening. Another advantage of the cover according to the present invention is that : The cover can be used with traditional SMIF input / output openings. According to the present invention (another advantage of the cover is that the operating body and operating procedures of the cover are the same as the operating software and operating procedures of traditional SMIF input / output openings. This month can provide the above and other advantages. In a preferred embodiment, the present invention relates to an ergonomic I loading assembly for an input / output opening. A bare cassette can be easily loaded. Above and easily unloaded from the assembly. The loading assembly can still provide isolation between the operator and the input / output opening after the loading of the jam is completed to reduce safety risks, and the workpiece is located in the Reduces the amount of particulates and contaminants around the workpiece when in the mouth. In a preferred embodiment, the loading assembly includes a cover assembly with a fixed cover portion surrounding the opening plate and two pivotable cover portions The two pivots can be opened and closed in a similar manner to the upper and lower jaws. When opened, we can place the ^ box in the cover assembly, and when closed, the two pivoted covers can hold the card. The cassette is enclosed in the cover assembly. The loading assembly also includes a pivot carrier plate, and the cassette can be loaded on the pivot carrier plate after the pivot cover portions are opened. The carrier plate can accept the workpiece in the direction of Vertical or near-vertical cassettes. Then, when the pivot covers are partially closed, the paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ------------ ------- Order --------- line (please read the notes on the back before filling this page) ccj y A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs When the child pivots the carrier plate, it will rotate the cassette and place it on one of the opening doors of the opening. At this time, the workpiece is horizontal to a and then the opening The plate, the pivot carrier plate, and the cassette can be removed from the opening plate, so that the workpieces in the cassette can be processed by the processing tool. In an alternative embodiment, the total capacity of the holding device can be loaded with a bare card g. The cover includes a cover part similar to the traditional SMIF pod and a door. One of the cover parts can be framed between the open position and a closed position; when turned to the open position, we can load the caliper in the accommodation Inside the device; when turned to the closed position, the cassette will be isolated in the receiving device. Once entering the receiving device, the opening door will be lowered away from the opening plate along with the door of the receiving device and the card® supporting it The workpieces in Elika Marina are processed by the processing tools. Under the simplification of the drawings, the present invention will be described with reference to the drawings, which are shown in the drawings; Figure 1-A perspective view of the input / output opening, the input / The output opening includes the cover according to the present invention, and the cover is loaded with the workpiece jam. It is a side view of the input / output opening. The input / output opening includes the cover according to the present invention, and the cover is in the open position. Can hold one load Cassette with workpieces; Figure 3 is a side view of the loading opening 'The loading opening includes a cover according to the present invention, and the cover is in a closed position; Figure C is a partial side view showing that the present invention has been lowered at the opening door The mechanism for preventing the cover from opening when it is far away from the opening plate; the paper ruler is thin after the cover 4 is wound and the carrier plate is engaged with each other according to the present invention! !! — &Quot;-— — — — — — — — — — Order ------- • Line (Please read the notes on the back before filling out this page)

Partial front view printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs; the figure shows a partial front view of the cover part and the frame transfer board after being separated from each other according to the present invention; and FIG. 6 is a cross section of the present invention (each 4 A side view of an alternative specific example of the device, in which the shovel portion is an open position; A side view of an alternative specific example of the accommodating device according to the present invention, in which the t 盍 portion is a closed position; FIG. 8 is Figures 7 and 8 are top views of the door in the alternative embodiment; Figure 9 is a bottom view of the door in the alternative embodiment shown in Figure 7 and Figure 8; Figure 10 is the alternative shown in Figure 7 and Figure 8 Bottom view of a clever example in which the t-latch hub has been rotated clockwise. DETAILED DESCRIPTION The present invention will be described below with reference to FIGS. I to 10, which are not roughly related to the-system, the Shaw system. A bare cassette can be loaded into the processing tool through a S-input / output opening fixed to the front of the processing tool. The child cassette can be any type that can carry one or more workpieces (such as semiconductor wafers). , Prototype masks, and flat panel displays) As shown in FIGS. I to 3, the input / output opening 106 includes an opening door 104 and an opening plate 102. When there is no cassette on the opening, the opening plate is located around the opening door. The input / output opening may include a micro-environment (not shown) under the opening plate, but this is not the key to the present invention. After the cassette loading is completed (described later), the opening door will be fixed to the opening door by using The elevator is lowered and away from the opening plate, so as to lower the cassette into the microenvironment. Then, each workpiece and / or the entire cassette will be transferred back and forth by a robot to the processing paper. Specifications (210 X 297 mm) _____________-------- Order --------- line (Please read the precautions on the back before filling this page) _ CC ") < 9 U γ

V. Description of the invention (7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs for processing. Still referring to Figures i to 3, according to the present invention, the card g loading assembly ⑽ can be accepted-equipped with vertical or near vertical Turn the card M to the workpiece @ ιι〇. And turn the card M 'to make the workpiece approximately horizontal; and after the card M is loaded, isolate the card M and the input / output openings from the operator. The card is loaded with the assembly Opening plate 102 and opening door 104 (to be described later), including a cover for her

It is 1080, which includes a fixed part and two grip turning parts. The three parts Z are opened at the same time to accommodate the bare card g; and closed again to close the card s. The cover assembly 108 includes a fixed cover portion 112 fixedly mounted on the opening plate and extending upward from the opening plate. The fixed cover portion can be screwed to the opening plate by screws or threads, or fixed to the opening plate by other known fixing methods. In a preferred embodiment, the portion 112 is made of a durable and static dissipative material, such as stainless steel. Other materials' such as aluminum or plastic (such as polycarbonate) can also be used. The child solid cover cover 112 includes a flat rear wall and a pair of flat side walls. The former extends along one rear end of the opening plate and the latter extends along the side of the opening plate in order to input / output. The opening is surrounded on three sides. The height of the fixed cover portion 112 疋 is preferably about the height of the cassette 110, but it may be higher in an alternative embodiment. & The cover assembly further includes a pivotal storage injury 114 pivotally connected to the fixed cover portion i 12. The upper pivot cover part preferably includes a pair of flat side plates and a centrally-shaped arc plate, the former being substantially parallel to the side wall of the fixed cover portion and the latter being connected to the pair of side plates. In a preferred specific example, 詨 -10- This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 Gong Chu 丨 丨 丨 —II I ----- It — 11 ----- line (Please read the precautions on the back before filling this page) ccj-7 ^ ： · '^ y A7

The side plate is made of a material that can dissipate static electricity, such as stainless steel, and the central plate can be made of and ancient .. V. Description of invention (8) Printed by the Intellectual Property Bureau Staff Consumer Cooperative of the Ministry of Economic Affairs has- The transparent window is made of stainless steel so that we can view the card E located in the cover. For example, the window can be made of polycarbonate. In alternative embodiments, the side and center plates can also be other The material is made of t. In the alternative embodiment, the central plate may also be made entirely of stainless steel or polycarbonate. In the alternative embodiment, other transparent and static dissipative materials may be used instead. Polycarbonate. The side plates are pivotally connected to the rear of the side wall of the fixed cover part, so that the upper pivot cover part can be turned between the open position and the closed position. The upper pole turn The side plates of the two P injuries are also gripped at the _ ends of the buckle structure 彳 116 provided on both sides of the fixed cover part, the purpose of which will be described later. The side plates are separated from each other and are located on the fixed 4 parts of the cover part are outside the side wall. Therefore, when the upper part pivots When moved to its closed position, the side plates of the upper pivot cover portion can pivot downward and pass over the side walls of the fixed cover portion without touching the side walls of the fixed cover portion. The distance between the side plates and the side walls It ’s good _ small distance to prevent pollutants from entering it. The pressure inside the processing tool and the input / output opening should always be higher than the pressure of the surrounding plant space, forcing ultra-clean air in the input / output opening (basically level 〇1) ) Flows out of the opening, through the cover assembly 108, and outwards to the | area through the space between the parts of the cover assembly. Therefore, when the cassette is already loaded in the loading assembly 100, and the cover parts After it has been closed, the cassette can be maintained in an ultra-clean environment. The cover assembly 108 finally includes a pivoting cover portion 118, which includes a pair of side plates, and the side plates are pivoted approximately parallel to the upper portion. The side panel of the cover part is also coplanar with it. The lower pivot cover part 118 also includes a side panel extending from the pair of side panels -11 · ------------------ --- Order --------- line (Please read the precautions on the back before filling this page) This paper size applies to Chinese National Standards (CNS ) A4 size (210 X 297 "") ^ iS; ^ A7 _______B7 V. Description of the invention (9) The center plate. These side plates are preferably made of stainless steel or other solid and durable materials that can dissipate static electricity The central plate is preferably made of non-recorded steel with a transparent central window, which is made of polycarbonate. ° The central plate of the pivot cover is as above. The central plate of the middle and lower pivot cover parts can also be made entirely of stainless steel or polycarbonate. In the alternative embodiment, the transparent window can also be made of other materials that can dissipate static electricity. The side plate of the cover portion 118 is pivotally connected to the front bottom of one of the side walls of the fixed cover portion so as to pivot between the open and closed positions. Each side plate of the lower pivot cover portion includes a finger 120 extending from the side plate, and the finger is pivotally connected to a second end of the connecting member 116 (the opposite end is also That is, the link member is fixed to one end of the upper pivot cover portion 114). As shown in Figure 3, when the edge of the upper pivot cover part is closed, the edge of the lower pivot cover part can be engaged. Therefore, when the cover assembly is closed, the different parts of the cover assembly (upper and lower parts) The edge of the pivot cover part together with the fixed cover part) can completely surround the cassette. In a preferred embodiment, there may be a small space between the edges of the central plate of the upper and lower pivot cover portions to facilitate the discharge of ultra-clean air from the cover assembly to the surrounding atmosphere. We can move the cover assembly 108 between its open and closed positions manually or automatically. If it is opened manually, in a preferred embodiment, a handle (not shown) is provided on the central plate of the lower pivot cover portion. Since the link member 116 is pivotally connected between the upper and lower pivot cover portions, when the chin pivot cover portion is turned outward (ie, counterclockwise in FIG. 2) to its open position, the connection The lever member will make the upper pivot cover part rise to its open position. 12 · + Paper scale is applicable to Chinese National Standard (CNS) A4 ^ (210x297 ^ »(Please read the precautions on the back before filling this page) --- ----- Order --------- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economics < 7 U (J ^ 7

V. Description of Invention (10) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. After the upper and lower pivot cover parts are in their open positions, the cassette 110 can be loaded in the card loading assembly 100, which will be described in more detail below. When the lower pivot cover part is turned inward to its closed position, the connecting member will also cause the upper pivot cover part to be turned down to its closed position. Another possible alternative is to set the handle on the upper pivot cover part. In this specific example, the 'upper pivot cover portion will drive the lower pivot cover portion between its open and closed positions via the link member ΐ6. Anyone familiar with this technique knows that a small linear lead screw driver can be inserted between the upper pivot cover part and the fixed cover part, or between the lower chin part and the fixed cover part. The assembly 108 can be opened and closed automatically. 1 to 3, 5A, and 5B, in addition to the cover assembly 108, the loading assembly 100 of the present invention further includes a pivot carrier plate 122 pivotally connected to the opening door 104. The pivot carrier plate 122 includes a first plate 124 and a second plate 126, which are approximately 90 to each other. Thus, an L-shaped member is formed. As shown in Fig. I, Fig. 2, Fig. 5A, and Fig. 5B, when the opening door is located in its original position within the opening plate 102, the pivoting carrier plate 122 is installed on the first plate 124u The shape member 128 is fixed to the lower pivot cover portion 丨〗 8. The reason why the u-shaped member can fix the pivot carrier plate to the lower pivot cover part is because of the U-shaped structure. The member can engage a rod installed on the side plate of the lower pivot cover part 30. As shown in Figs. 5A and 5B, when the cover assembly 108 is closed and the opening door starts to descend, the U-shaped member 128 will be separated from the sample 130, which will be described in more detail below. However, when the opening door is located in its original position in the opening plate (as shown in Figs. 1, 2, and 5A), the U-shaped portion 128 will be firmly engaged with the lever 130. Therefore, regardless of the lower pivot cover portion, -13- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -------- Order --------- Line (please first (Please read the notes on the back and fill in this page) A7 B7 printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (11) The transfer board will be moved accordingly. Although the lower pivot cover part 118 is pivotally connected to the fixed cover part 112 and the pivot carrier plate 122 is pivotally connected to the opening door, the lower pivot cover part n8 and the pivot load. The plate 122 shares the same pivot axis , As shown by the dashed line in Figure 5a. In this way, regardless of whether the part 118 is opened or closed, the pivot carrier plate 122 can be freely pivoted with the lower cover part 118. As anyone skilled in the art knows, a pair of extraction / shock absorbers can be used. The assembly 150 (described in more detail below) is mounted on the opening door 104 via a pair of spacers 152, so that the lower pivot cover portion 118 and the frame rotation axis of the pivot carrier plate 122 are concentric. After the cover assembly is opened, the cassette 110 can be loaded on the pivot carrier plate by loading the cassette at the rear (when the operator carries the cassette to the input / output opening, the rear is facing downward) The first plate 124 is abutted and supported on the pivoting carrier plate 122, and the bottom of the cassette is abutted on the second plate 126. Responsibility of the card tray ι4 is traditionally provided with ribs. Therefore, the first plate 124 of the pivot carrier plate 122 may include a pair of inclined guides that can engage the ribs, thereby guiding the card E to the space between the guides. A niche. These guides are preferably made of Delrin or other materials with a low coefficient of friction to reduce particles between the cassette and the guide. The second plate 126 may include a coincidence feature, which may interact with the guide on the first plate 124 to ensure that the card g is properly positioned on the pivoting carrier plate and may repeat this positioning. After the lid cover assembly 108 is in the open position, the position of the pivoting carrier plate allows the operator to carry out the cassette according to the state when the calendar 110 is carried to the input / output opening (that is, the direction of the workpiece is vertical or near vertical). Of loading. In a specific example, the 'pivot carrier plate can be opened and accommodate the workpiece direction and vertical ----_ 丨 | | 丨 _ | ------ " order ---- 丨 line (please read the note on the back first) Please fill in this page for matters) -14 · 7

-------- ^ --------- ^. (Please read the notes on the back before filling in this page) The difference is 5. Card case. As long as the card ... has been loaded on the pivot carrier plate 12 :, the cover assembly 108 can be closed as described above ^ "Green ^ Ding Muwan. Closing the lid assembly will = pivot the carrier plate, so that:板 126 贴 # is on the opening door, and makes the workpiece tens of thousands. In the specific example, when the workpiece is accepted, the universal system of the workpiece is different from the vertical by 50 ～ 梅 你 Λ Therefore, the pivoting carrier plate will rotate 85 In order to make the workpiece level. In the alternative ^ ^ ^ ^ ^ ^ ^ ^ ^ may be different. The angle opening door when the workpiece is accepted has traditionally been included-the pod sensor As long as the cover part is closed, the carrier board is rotated to access the 1-door interface with the opening door, the second board 120 will contact and activate the pod positioning sensor. Then, ^ and then used for the input / output opening of the child The control circuit will lower the opening door and away from the opening plate. During the opening door falling and away from the opening plate, the operator preferably cannot open the i-assembly. In the traditional valve input / output opening, the opening plate includes-pairs Fingers that can be rotated in a plane parallel to the opening plate. In-traditional SMIF In the system, when the f opening door and the pod door are lowered and away from the opening plate and the pod shell, the fingers can be turned inward and engage the laughing shell to fix the pod shell to the positioning of the opening board. These fingers can also be used to prevent the cover assembly from opening when the opening door is lowered and away from the opening plate. For details, please refer to Figure 4A first, the buckle installed on the opening plate 102 The object 134 is in its retracted position. The lower pivot cover part i 18 includes a protrusion 136 at the bottom of one of its central plates. When the finger 134 is in its retracted position (for example, there is no cassette on the input / output opening) When), the lower pivot cover part can be freely rotated from the closed position shown in FIG. 4A to one of the open positions shown in FIG. 4B. However, 'as long as the pod positioning sensor indicates that the opening door is loaded with __ ^ -15 -This paper size is in accordance with China National Standard (CNS) A4 specification (21 × 297 mm A7 B7) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy When away from the opening plate, the fingers 134 will pivot inward to their position in FIG. 4. The finger 134 at this position is located directly below the & 136, so that the lower pivot cover part [a and the entire cover total < 108 cannot be opened. As long as the workpiece in the caliper UG is processed 70 and opened When the door has also returned to its original position in the opening plate, the control circuit for the input / output opening of the child will rotate the finger 134 to return it to its original position in the ® 4 A 'to make the cover The assembly was opened, and the card 110 was removed. 3 Illusion, the pivot carrier plate 122 is mounted on the opening door by the bearing / damper assembly 150 and the spacer 152. When the opening door is lowered and away from the opening plate The pivoting carrier plate and the caliper carried on it will descend with the opening door. At this time, the u-shaped member 128 will move away from the rod 130, so that the pivot carrier plate 122 is completely separated from the lower pivot cover portion 118 (as shown in FIG. 5B) ^, and then the workpiece can be transferred back and forth to the processing tool. After the treatment is completed, the opening door will return to its original position in the opening plate, and at the same time, the mouth-shaped member on the pivoting carrier plate will once again engage the rod 130 (as shown in Fig. 2, Fig. 2, and Fig. 5A). The pivot carrier is attached to the lower pivot cover portion 118 again and moves with it. The system is best to add a shock absorber to prevent a cover assembly 108 from opening and closing quickly. The fast opening and closing will cause the workpiece in the cassette 110 to vibrate or move. Therefore, in addition to having the pivotal carrier plate 122 mounted on the opening door 104 in a rotating manner, the bearing / vibration absorber assembly 150 also includes a motion damping mechanism. In a preferred embodiment, the bearing within the assembly 50 may include a bearing having more than two frictional joint washers, which can exert resistance on the rotation of the bearing. These gaskets are preferably attached to each other by spring force. 16- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) — — — — — — — — — — — — — — 1 ^ --------- ^ i ^ w— (Please read the notes on the back before filling in this page) Β7 A7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Invention Description (14) Reliable, and It is best made of stainless steel and Teflon to reduce the generation of particles. The assembly 150 is preferably sealed to prevent the above particles from entering the system. As described above, the 'pivot carrier plate 122 is fixed to the lower pivot cover part during the opening and closing process of the cover assembly 108, so , The resistance from the bearing / shock absorber assembly of 15 will be passed to the cover assembly. The degree to which the motion-damping bearing within the assembly j 50 is resistant to rotation or varies with the movement of the cover parts between their open and closed positions. For example, if the angle of the lower pivot cover part turning outward is 85 °, the damping rate of the assembly 150 in all directions against pivoting is 35 for the middle part of the rotation. This is about 40%, and the first and last 25. It is 100%. In alternative specific examples, each of the angles and percentage ranges listed above may be different. Another possible alternative is that the assembly 150 can exert a fixed resistance throughout the entire frame rotation range of the upper and lower pivot cover parts. In the above description, the opening doors are moved downwards, while the opening plates are fixed. However, one possible approach is as follows: When the bare cassette is loaded in the input / output opening in the aforementioned manner, the opening door is fixed, and the opening plate and the cover assembly are moved upward and away from the opening door, the pivot carrier plate, and the cassette. Another ―possibly < method is: when the bare cassette is loaded in the input / output opening in the manner described above, the opening door and the opening plate can be moved. In the above description, the cover assembly 108 includes three parts: a fixed part and two pivot parts. The cover assembly 108 may also include only two parts: a fixed Shaofen and a pivoting part. In this specific example, a portion of the cover can be pivoted outwards in the manner previously described to accommodate a vertical or near vertical cassette. And -11 -11 ---- — order i · — · — 艺 —-line (Please read the precautions on the back before filling this page) -17- / CC J -7 〇: ^

V. Description of the invention (15) After printing by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the pivot Shao Fen will pivot inward, so that the workpiece is located at a level of approximately water. & As shown in FIG. 6 to FIG. 10, in an alternative embodiment of the present invention, a housing assembly 200 is provided, which is similar to a conventional SMn- ^ that can be loaded on an input / output opening. . The housing assembly 200 includes-a fixed part 202,-a pivot cover part 204, and a hire ... The grip assembly drive can be used to manually pivot the pivot cover part 204 Between the open position shown in FIG. 6 and a closed position shown in FIG. 7. An automated pivot assembly may also be used in alternative embodiments. In operation, the receiving device assembly 200 is located on a conventional input / output opening, such as the opening 106 of the first embodiment. After carrying a bare card to the input / output opening, it can be manually loaded on the door 106, so that the workpiece direction of the card is horizontal. As shown in the " top view, the door 206 may include a coincidence feature 21, to ensure that the cassette is properly oriented on the door. After the card cover 110 is placed on the door 2Q6, the pivot cover 4 injury 204 can be moved to its closed position. The pivot assembly 208 includes a pin and a shock absorber assembly 2H. The former can pivot the pivot cover portion 204 to the fixed cover portion 202, and the latter can prevent the frame cover portion from rotating. Fengang produces quick opening and closing actions. The shock absorber assembly may be a pneumatic or hydraulic shock absorber having a known construction. Another method is: the rotation assembly 208 may include a friction bearing, such as the bearing in the aforementioned assembly 150. The pivot cover portion 204 includes a pair of fixedly mounted fingers (not shown). When the frame cover portion 204 is moved to its closed position in FIG. 7, the pair of fingers can be connected to the door 206. The button 212 is engaged. Fingers on the pivot cover part 204 • 18- This paper size applies the national standard (CNS) A4 specification (210 X 297 mm) • ------- I * -----丨 Order ------- Line · (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of Invention (16) Objects and buttons on door 206 212 are all close to the side of the cover assembly 200, and do not hinder the placement of the cassette 110 on the door 206. Now refer to the bottom view of the door 206 in FIG. Pod door has the same characteristics and components = the door includes a latch assembly having a latch hub 214 that can engage the first and second translational latch plates 216. Another mechanism (not shown) is to In the form of a passive lock key, it protrudes from the opening door into the opening t 218 on the latch hub 214 so as to rotate the latch hub clockwise and counterclockwise. The rotation of the latch hub 214 will cause the first and second The translation latch plate 216 is translated in the opposite direction. In the conventional SMIF pod, the latch plate is used to latch the pod door to the pod case so that when the latch hub 214 rotates The pod door can be released from the pod shell. Further relevant details of this latch assembly can be found in U.S. Patent No. 4,995,43, issued to Bonora et al .: "Accessibility with improved latch mechanism "Sealed, transportable container", the patent is owned by the assignee of the present application, the entire contents of which are incorporated herein by reference. The door 206 includes a roughly ^ -shaped member 220 in addition to the traditional member, It has an arm 222 and a connecting portion 224 extending between the arms 222. The end of the arm 222 is located in a groove on the rib 226. The rib 226 forms a shaft, and the C-shaped member 220 can pivot about the shaft (into , Page 9 of Figure 9.) As long as the cover portion 204 is pivoted to its closed position in Figure 7, the fingers on the cover portion will engage the button 212 on the upper surface of the door 206, As before, the button 212 passes through the door 206 and is installed at the corner portion 228 of the component 220. This joint will pivot the connecting portion 224 to the outside of the page in Fig. 9. The connecting portion 224 that is off the page will Engage and activate the English positioning on the opening door • 19- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ------- " " Order --------- line (Please read the precautions on the back before filling out this page) Employee Consumer Cooperatives, Intellectual Property Bureau, Ministry of Economic Affairs Printed A7 B7 __ 5. Description of the invention (17) The sensor. Once the sensor is activated, the latch key on the opening door will rotate the latch hub 214 to retract the latch plate 216. Then, the opening door 104 and the door 206 together with the cassette 11 placed thereon will move downward and away from the opening plate, so that the workpiece in the cassette 110 can be processed. In addition to activating the latch key on the opening door, the pod positioning sensor will also turn the finger 134 on the opening plate (as shown in the related description in Figures 4A to 4C) and engage the frame cover. Section 204. Therefore, when the opening door is away from the opening plate, the operator cannot lift the cover portion 204. When the opening door 104 and the door 206 are moved downward, the cover portions 202 and 204 will still be fixed on the opening 102, so these fingers will be separated from the button 212 on the door 206, so that the button 212 will no longer be The corner 228 of the component 220 is offset to the outside of the page in FIG. 9. However, this alternative embodiment utilizes the following facts: As soon as the pod positioning sensor is activated, the latch hub 214 will turn clockwise from the position shown in FIG. 9 to the position shown in FIG. 10. After reaching this position, a part of the latch hub 214 will be located below the connection portion 224, so that the connection portion is maintained in a state of "turned off the page of Fig. 9 and Fig. 10". Therefore, the The connecting part will remain in contact with the pod positioning sensor. When the wafer is processed and the opening door is coplanar with the opening plate again, the control system will rotate the latch hub counterclockwise to return it to the position shown in FIG. 9 'while the latch fingers on the opening plate are It will return to its contracted position. Then, I can manually lift the pivot cover portion 204 to remove the bare card cassette from the receiving device assembly 200. Although the present invention has been described in detail herein, the present invention is not limited to this -20- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ----------- ---------- Order --------- line (please read the notes on the back before filling in this page) ^ > 4 / A7 B7 i 、 Invention (18) Describe specific examples. Those skilled in the art can make various changes, substitutions, and modifications' to the present invention without departing from the spirit and scope of the present invention. The spirit and scope of the present invention are explained and defined by the attached patent application park. -Line (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 21

Claims (1)

A8 B8 C8 D8 6. Scope of Patent Application 1. A loading assembly for loading a bare card containing at least one work piece onto a SMIF input / output opening, the input / output opening including a surrounding The opening plate of the opening door, the opening door can be vertically translated relative to the opening plate, and the loading assembly includes: a cover assembly including a fixed cover portion mounted on the opening plate and at least one pivot The cover part, the at least one pivot cover part is pivotally connected to the fixed cover part, and can be moved between a first position and a second position; when moving to the first position, we can move A cassette is loaded in the cover assembly; when moved to the second position, the at least one pivotal cover portion and the fixed cover portion can substantially isolate the cassette. 2. If the patent application No. 1 is applied to a bare card, the human / sacrifice loading assembly still includes a mechanism for accommodating a card g containing at least a substantially vertical workpiece, and Rotate the cassette until the at least one workpiece is approximately horizontal. 0 --------------------- Order --------- line-win (Please read the precautions on the back before filling out this page) National Consumer Standards of the Intellectual Property Bureau of the Ministry of Economic Affairs (CNS) A4 Standard (210 X 297 mm)