TW471583U - Orifice built-in valve - Google Patents
Orifice built-in valveInfo
- Publication number
- TW471583U TW471583U TW90211979U TW90211979U TW471583U TW 471583 U TW471583 U TW 471583U TW 90211979 U TW90211979 U TW 90211979U TW 90211979 U TW90211979 U TW 90211979U TW 471583 U TW471583 U TW 471583U
- Authority
- TW
- Taiwan
- Prior art keywords
- valve
- orifice built
- orifice
- built
- Prior art date
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP02025699A JP4137267B2 (en) | 1999-01-28 | 1999-01-28 | Orifice built-in valve |
Publications (1)
Publication Number | Publication Date |
---|---|
TW471583U true TW471583U (en) | 2002-01-01 |
Family
ID=12022125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW90211979U TW471583U (en) | 1999-01-28 | 2000-07-06 | Orifice built-in valve |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4137267B2 (en) |
TW (1) | TW471583U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI649510B (en) * | 2016-07-29 | 2019-02-01 | 日商富士金股份有限公司 | Built-in throttle valve and pressure type flow control device |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3861206B2 (en) | 2003-12-08 | 2006-12-20 | 株式会社フジキン | Fluid controller |
US7686280B2 (en) * | 2005-12-28 | 2010-03-30 | Circor Instrumentation Technologies, Inc. | Removable valve seat member for diaphragm valve |
JP5301983B2 (en) * | 2008-12-26 | 2013-09-25 | 株式会社フジキン | Gasket type orifice and pressure type flow control device using the same |
DE102009027527A1 (en) * | 2009-07-08 | 2011-01-20 | Robert Bosch Gmbh | Valve |
KR101366019B1 (en) | 2010-02-22 | 2014-02-21 | 가부시키가이샤 후지킨 | Mixture gas supply device |
JP6321972B2 (en) | 2014-01-21 | 2018-05-09 | 株式会社フジキン | Pressure flow control device and overshoot prevention method at the start of the flow control |
JP6416529B2 (en) | 2014-07-23 | 2018-10-31 | 株式会社フジキン | Pressure flow control device |
JP6516696B2 (en) * | 2016-03-01 | 2019-05-22 | 株式会社鷺宮製作所 | Volume adjustment valve |
JP6307557B2 (en) * | 2016-06-17 | 2018-04-04 | Ckd株式会社 | Fluid control valve |
JP6748586B2 (en) * | 2016-07-11 | 2020-09-02 | 東京エレクトロン株式会社 | Gas supply system, substrate processing system and gas supply method |
JP6786096B2 (en) | 2016-07-28 | 2020-11-18 | 株式会社フジキン | Pressure type flow control device |
JP6929098B2 (en) * | 2017-03-30 | 2021-09-01 | 株式会社キッツエスシーティー | Metal diaphragm valve |
US11231026B2 (en) | 2017-10-31 | 2022-01-25 | Fujikin Incorporated | Valve device |
JP7140402B2 (en) * | 2017-11-30 | 2022-09-21 | 株式会社フジキン | Valve device, fluid control device and semiconductor manufacturing device using this valve device |
WO2019107139A1 (en) * | 2017-11-30 | 2019-06-06 | 株式会社フジキン | Valve device, fluid control device using said valve device, and semiconductor manufacturing device |
JP7187428B2 (en) * | 2019-11-29 | 2022-12-12 | 株式会社鷺宮製作所 | Rotary switching valve and refrigeration cycle system |
WO2023053724A1 (en) * | 2021-09-30 | 2023-04-06 | 株式会社フジキン | Valve with orifice, and flow rate control device |
US11761547B1 (en) * | 2022-04-07 | 2023-09-19 | Horiba Stec, Co., Ltd. | Valve orifice insert |
-
1999
- 1999-01-28 JP JP02025699A patent/JP4137267B2/en not_active Expired - Lifetime
-
2000
- 2000-07-06 TW TW90211979U patent/TW471583U/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI649510B (en) * | 2016-07-29 | 2019-02-01 | 日商富士金股份有限公司 | Built-in throttle valve and pressure type flow control device |
Also Published As
Publication number | Publication date |
---|---|
JP2000213667A (en) | 2000-08-02 |
JP4137267B2 (en) | 2008-08-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4K | Issue of patent certificate for granted utility model filed before june 30, 2004 | ||
MK4K | Expiration of patent term of a granted utility model |