TW471583U - Orifice built-in valve - Google Patents

Orifice built-in valve

Info

Publication number
TW471583U
TW471583U TW90211979U TW90211979U TW471583U TW 471583 U TW471583 U TW 471583U TW 90211979 U TW90211979 U TW 90211979U TW 90211979 U TW90211979 U TW 90211979U TW 471583 U TW471583 U TW 471583U
Authority
TW
Taiwan
Prior art keywords
valve
orifice built
orifice
built
Prior art date
Application number
TW90211979U
Other languages
Chinese (zh)
Inventor
Tadahiro Omi
Eiji Ideta
Ryosuke Doi
Koji Nishino
Shinichi Ikeda
Original Assignee
Fujikin Kk
Tadahiro Omi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk, Tadahiro Omi filed Critical Fujikin Kk
Publication of TW471583U publication Critical patent/TW471583U/en

Links

TW90211979U 1999-01-28 2000-07-06 Orifice built-in valve TW471583U (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02025699A JP4137267B2 (en) 1999-01-28 1999-01-28 Orifice built-in valve

Publications (1)

Publication Number Publication Date
TW471583U true TW471583U (en) 2002-01-01

Family

ID=12022125

Family Applications (1)

Application Number Title Priority Date Filing Date
TW90211979U TW471583U (en) 1999-01-28 2000-07-06 Orifice built-in valve

Country Status (2)

Country Link
JP (1) JP4137267B2 (en)
TW (1) TW471583U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI649510B (en) * 2016-07-29 2019-02-01 日商富士金股份有限公司 Built-in throttle valve and pressure type flow control device

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3861206B2 (en) 2003-12-08 2006-12-20 株式会社フジキン Fluid controller
US7686280B2 (en) * 2005-12-28 2010-03-30 Circor Instrumentation Technologies, Inc. Removable valve seat member for diaphragm valve
JP5301983B2 (en) * 2008-12-26 2013-09-25 株式会社フジキン Gasket type orifice and pressure type flow control device using the same
DE102009027527A1 (en) * 2009-07-08 2011-01-20 Robert Bosch Gmbh Valve
KR101366019B1 (en) 2010-02-22 2014-02-21 가부시키가이샤 후지킨 Mixture gas supply device
JP6321972B2 (en) 2014-01-21 2018-05-09 株式会社フジキン Pressure flow control device and overshoot prevention method at the start of the flow control
JP6416529B2 (en) 2014-07-23 2018-10-31 株式会社フジキン Pressure flow control device
JP6516696B2 (en) * 2016-03-01 2019-05-22 株式会社鷺宮製作所 Volume adjustment valve
JP6307557B2 (en) * 2016-06-17 2018-04-04 Ckd株式会社 Fluid control valve
JP6748586B2 (en) * 2016-07-11 2020-09-02 東京エレクトロン株式会社 Gas supply system, substrate processing system and gas supply method
JP6786096B2 (en) 2016-07-28 2020-11-18 株式会社フジキン Pressure type flow control device
JP6929098B2 (en) * 2017-03-30 2021-09-01 株式会社キッツエスシーティー Metal diaphragm valve
US11231026B2 (en) 2017-10-31 2022-01-25 Fujikin Incorporated Valve device
JP7140402B2 (en) * 2017-11-30 2022-09-21 株式会社フジキン Valve device, fluid control device and semiconductor manufacturing device using this valve device
WO2019107139A1 (en) * 2017-11-30 2019-06-06 株式会社フジキン Valve device, fluid control device using said valve device, and semiconductor manufacturing device
JP7187428B2 (en) * 2019-11-29 2022-12-12 株式会社鷺宮製作所 Rotary switching valve and refrigeration cycle system
WO2023053724A1 (en) * 2021-09-30 2023-04-06 株式会社フジキン Valve with orifice, and flow rate control device
US11761547B1 (en) * 2022-04-07 2023-09-19 Horiba Stec, Co., Ltd. Valve orifice insert

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI649510B (en) * 2016-07-29 2019-02-01 日商富士金股份有限公司 Built-in throttle valve and pressure type flow control device

Also Published As

Publication number Publication date
JP2000213667A (en) 2000-08-02
JP4137267B2 (en) 2008-08-20

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MK4K Expiration of patent term of a granted utility model