TW460686B - Process for reducing the wobbling motion of a rotating rotor body which is mounted so as to be freely floating and the arrangement for carrying out the process - Google Patents

Process for reducing the wobbling motion of a rotating rotor body which is mounted so as to be freely floating and the arrangement for carrying out the process Download PDF

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Publication number
TW460686B
TW460686B TW089108688A TW89108688A TW460686B TW 460686 B TW460686 B TW 460686B TW 089108688 A TW089108688 A TW 089108688A TW 89108688 A TW89108688 A TW 89108688A TW 460686 B TW460686 B TW 460686B
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Taiwan
Prior art keywords
rotor body
scope
patent application
rotor
rotation
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TW089108688A
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Chinese (zh)
Inventor
Christhard Deter
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Ldt Gmbh & Amp Co Laser Displa
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/04Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406Magnetic bearings
    • F16C32/0408Passive magnetic bearings
    • F16C32/0436Passive magnetic bearings with a conductor on one part movable with respect to a magnetic field, e.g. a body of copper on one part and a permanent magnet on the other part
    • F16C32/0438Passive magnetic bearings with a conductor on one part movable with respect to a magnetic field, e.g. a body of copper on one part and a permanent magnet on the other part with a superconducting body, e.g. a body made of high temperature superconducting material such as YBaCuO
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/04Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406Magnetic bearings
    • F16C32/044Active magnetic bearings
    • F16C32/0444Details of devices to control the actuation of the electromagnets
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M1/00Testing static or dynamic balance of machines or structures
    • G01M1/14Determining imbalance
    • G01M1/16Determining imbalance by oscillating or rotating the body to be tested
    • G01M1/22Determining imbalance by oscillating or rotating the body to be tested and converting vibrations due to imbalance into electric variables
    • G01M1/225Determining imbalance by oscillating or rotating the body to be tested and converting vibrations due to imbalance into electric variables for vehicle wheels
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M1/00Testing static or dynamic balance of machines or structures
    • G01M1/30Compensating imbalance
    • G01M1/32Compensating imbalance by adding material to the body to be tested, e.g. by correcting-weights
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M1/00Testing static or dynamic balance of machines or structures
    • G01M1/30Compensating imbalance
    • G01M1/34Compensating imbalance by removing material from the body to be tested, e.g. from the tread of tyres

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Balance (AREA)
  • Vibration Prevention Devices (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)

Abstract

In a process for reducing the wobbling motion in a rotating rotor body (1) which is mounted so as to be freely floating and which has relfecting surfaces (13) at its outer circumference, a measurement beam (5) with a given position of incidence is reflected by the reflecting surfaces (13) of the rotating rotor body (1) which pass by and, after reflection, is directed onto a position detector (17) whose signals are supplied to a computer (22). This computer (22) determines the difference between the greatest and the smallest value of the signals emitted by the position detector (17) during a complete revolution of the rotor body (1) and the angular positions of the rotor body (1) associated with both values and, from the latter, calculates control signals for the correction device (16). During the revolution or during a subsequent revolution of the rotor body (1), this correction device (16) causes a change of the distribution of mass at the rotor body (1) in a noncontacting manner and without influencing the reflecting surfaces (13) in such a way that the difference between the smallest and greatest value of the signals emitted by the position detector (17) which was determined during this revolution of the rotor body (1) is smaller than the difference which was determined during the preceding revolution. The description also concerns an arrangement for carrying out such a process.

Description

460686 、發明說明(1) 本發明係針對一種供、 轉子體顫動之方法,丄二&一,安裝成為自由飄浮之轉動 一被安裝成為自由飄%種供實施此種方法之裝置。 轉軸線,其係在對其;:之轉動,子體,有-空間穩定旋 合,並且其不被任何龙之角動量軸線與主惰性軸線重 確定。如果轉子體為二=步=用時,由其主惰性轴線所 主體為—完全均勻構造之1稱體,在對稱必須完全,及 轉軸線,與其對稱軸綠重入况下,主惰性軸線,並因此旋 由於不可避免之材料不祕^ ,:製造容差,實際轉子邮:性、,製造之不準確性及基本 少偏離此理想情形,不對應於此理想情形。其或 ,飄浮軸承裝置之旋 :主惰性軸線(如一無限制之 糸〇 。當干涉扭矩在外部竹田)不再與轉子體之對稱軸線 =之保留角動量,這導致办=系統總體時,則因為整個 fa; ί軸線。只要無其他外力ί ;角動量軸線之位置移離主 錐:向便固定。在此情形,轉子體’角動量轴線之空 :錐體包絡’繞角動量^ ^^性轴線在一也稱為”滾切 驅:實瞭例如在多面體掃里上線移,。 如果系統,以及因為環境之Γ ^實施之系統,因為軸承及 U不藉對應之構造力:定作用在轉子體; 在上所說明之結果。 疋尺寸予以抵消,其可能 在耸f子體安裝在剛性軸承 細=上。通常,此旋轉輛線既寺,後者將一旋轉軸線壓印 '''重合。因為相對於主_ M f與主惰性軸線也不與對稱 h性軸線之此位置差’轉子體460686, description of the invention (1) The present invention is directed to a method for supplying and trembling the rotor body. The second & one is installed as a free-floating rotation. The other is installed as a free-floating device for implementing such a method. The axis of rotation is related to its rotation: the child, which has a -space stable rotation, and it is not re-determined by any dragon's angular momentum axis and the main inert axis. If the rotor body is two = step = when used, the main body of the main inertia axis is-a completely uniform structure of the 1 scale body, the symmetry must be complete, and the axis of rotation, and its symmetry axis green reentry, the main inert axis Because of the unavoidable material, ^ :: manufacturing tolerance, the actual rotor post: nature, manufacturing inaccuracy, and little deviation from this ideal situation, does not correspond to this ideal situation. Or, the rotation of the floating bearing device: the main inert axis (such as an unrestricted 糸 〇. When the interference torque is outside the bamboo field) is no longer retained with the axis of symmetry of the rotor body = retained angular momentum, which leads to the total system, then Because the whole fa; ί axis. As long as there is no other external force, the position of the angular momentum axis moves away from the main cone: it will be fixed to the direction. In this case, the rotor's 'Angular Momentum Axis Empty: Cone Envelope' around the angular momentum ^ ^^ The axis is also called a "rolling drive": For example, if the system moves linearly in a polyhedron sweep, if the system , And because of the environmental implementation of the system, because the bearing and U do not use the corresponding construction force: fixed action on the rotor body; the results described above. 疋 size offset, it may be installed in the rigid body The bearing is thin = up. Usually, this rotating vehicle line is both a temple and the latter embossing a rotation axis `` overlap. Because this position is different from the main _ M f and the main inert axis and the symmetrical h-axis is different from this position '' rotor body

I 89108688.1 第 460686 五、發明說明(2) /平衡誤差或不平衡’並因為相罢 其有-種11打擊1'。藉適當改變在轉子C之位置/, 之重新定位V,可幾乎完全免除不轉子:之質量分布(材料 用在轉子體之力,可被軸承裝置吸 因為不平衡而作 固軸承及密集軸承緩衝,可補償不平衡形,足夠強 如果對稱軸線及旋轉軸線彼此銜f政應。 誤差,並因此導致例如鏡多面體 動 因此,儘可能嚴格遵守!g >六 D之正弦波束偏轉。 撕體時,必須保證二線以;施本身製 達成足夠之良好重合。此例如對於使之旋轉軸線間 作用鏡面而言特別重要。 ' 民用鏡夕面體,就光學 然而,儘管相當多人致力f 掃描器子組件並不適當符合其供I;::生:據示多面體 刷使用之要求。 如像產生應用及供在印 就角位置及轉子在固定軸旋 ί f 之不平衡W後藉裝置確定 4 ),在有不平衡之轉子體之區 々(鑽孔,研磨 :之:子體之區域,儘可能消除動量或在位於與不平衡相 :之Y驟過程,確定是否有足夠:、】知者。在—隨 枓,或程序是否應該繼續。整個铲t疋否已去除足夠材 剩餘之不平衡保持在預定量級以下予以重複,直到仍然. ::在使機動車輛之車輪平衡時,使 f曰加平衡重塊減低或去除不平衡 此種方法,其 _33_…知-種供,轉V體去除不平衡之方 460686 五、發明說明(3) __ 法,其中,自轉子體去除材料,供在一 不平衡之裝置平衡之目的。 :射4置測量 在此已知方法,平衡發生在個別測量裝置,i 固定軸承軸線至轉子體,其中,在實際使用平衡^置一 固定軸承軸線不再精確對應於軸承比。 、a、,此 然而’在例如鏡多面體形式之此種轉子體, 由飄浮軸承裝置使用,例如在主動磁性軸作 配合自 描器時,在其自身裝置預先以一固定軸承::以體掃 衡方法,4配合自由飄浮軸承裝置實際使用時貝預:J : 防止發生軸向振擺導致顫動。 、' —在此基礎,本發明之目的為建議一種方法,供在一、 安裝以便自由飄浮之轉動轉子體有效減低不想要之2以 ,據本發明,此係藉一供在一被安裝成為自由飄浮,二 在其外部圓周有反射面之轉動轉子體減低顫動之方法幸 ;舰其中,一有一既定入射位置之測量束被經過之轅叙趟 面所反射’此轉子體以-不對應於諧振頻率: 复1 Ϊ Ϊ速度旋轉,並在反射後,被導至一位置檢測器, 二。號予U供給至一電腦,其在轉子體之一整轉時, 置檢測器所發出訊號之最大及最小值 ^ =與,值關聯之旋轉位置…後者計算控;= ς、之杧制讯號,在此轉時,或在一隨後轉時,該校正 罝=一種非接觸方式導致轉子體質量分布之變化,並且^ :7 t致使在轉子體之此轉時所確定’在位置檢測器所發 出讯號之最小與最大值間之差,小於在前一轉時所確定之I 89108688.1 Article 460686 V. Description of the invention (2) / Balance error or imbalance 'and because of it, it has 11 kinds of 11 strikes 1'. By properly changing the position of V in the rotor C, repositioning V can almost completely eliminate the mass distribution of the rotor (the force of the material used in the rotor body can be absorbed by the bearing device due to imbalance and solid bearing and dense bearing cushioning) , Can compensate the unbalanced shape, strong enough if the symmetry axis and the rotation axis are connected to each other. Error, and therefore cause, for example, mirror polyhedron movement, so strictly observe as much as possible! G > Six-D sinusoidal beam deflection. When tearing the body It is necessary to ensure the second line; the system itself achieves sufficient good coincidence. This is particularly important, for example, to make the mirror surface between the rotation axis. 'Civil mirror surface body, as for optics, however, although many people are committed to f-scanners The sub-assembly does not properly meet its requirements for I; :: Health: According to the requirements for the use of polyhedron brushes. For example, the imbalance W generated by the application and the position of the rotor in the fixed corner and the rotor on the fixed shaft are determined by the device. 4 ), In the area where the rotor body is unbalanced (drilling, grinding: the area of the child body, remove momentum as much as possible or in the Y-step process with the unbalanced phase: determine whether there is Enough :,] know. In-as soon as, or whether the procedure should continue. Whether the entire shovel has been removed enough material remaining imbalance remains below a predetermined magnitude and is repeated until still. :: In the motor vehicle When the wheels are balanced, the method of reducing the weight by adding the weights or removing the imbalance is as follows: _33 _... Know-how, remove the imbalance by turning the V body 460686 V. Description of the invention (3) __ method, of which Material is removed from the rotor body for the purpose of balancing in an unbalanced device .: Shooting 4-position measurement is a known method here. Balance occurs in individual measuring devices, i fixes the bearing axis to the rotor body, where balance is actually used ^ The placement of a fixed bearing axis no longer corresponds exactly to the bearing ratio. However, this' for example, such a rotor body in the form of a mirror polyhedron is used by a floating bearing device, such as when an active magnetic shaft is used as a self-scanner, in Its own device uses a fixed bearing in advance: using the body-sweeping method, 4 in cooperation with the free-floating bearing device in actual use. Pre-J: J: to prevent the occurrence of axial vibration caused by chattering. The purpose of the invention is to propose a method for a rotating rotor body which is installed so as to float freely and effectively reduce unwanted ones. According to the present invention, this is provided by one being installed to become free floating and the other on its outer circumference. Rotating rotor body with reflecting surface method to reduce chattering; For one of the ships, a measuring beam with a predetermined incident position is reflected by the passing surface. This rotor body does not correspond to the resonance frequency: complex 1 Ϊ Ϊ speed Rotate and, after being reflected, be guided to a position detector. 2. The number U is supplied to a computer, which sets the maximum and minimum values of the signal sent by the detector when one of the rotors is fully rotated. The rotation position associated with the value ... the latter calculation control; = ς, 杧 control signal, when this rotation, or a subsequent rotation, the correction 罝 = a non-contact manner causes the mass distribution of the rotor body to change, and ^: 7 t causes the difference between the minimum and maximum values determined by the position detector at this revolution of the rotor body to be less than that determined at the previous revolution

89l〇8688.ptd 第8頁 460686 五、發明說明(4) 差之方式影響反射面,直到碎定 一~^~^ 在根據本發明之方法,直=之產低於預定最小值。 轉動轉子體實施減低顫動之予以安裝以便自由飄浮 定其旋轉軸線。 、罝,而不藉一剛性軸^ 流體軸承,諸如可較佳佴自 ^ 體轴承’但也特別是磁裝置使用之氣體 承軸線有效供轉子體不剛性軸承,可以—種致使軸 方式予以定尺寸。磁性輪承可特;料何結構及材料固定之 开發之旋轉轴線可在某些極::;:;:此使用,其中,轉; :’’在一由諸如自機械軸承已知之:f整其本身,在該情 卜旋轉軸線之確實或強㈣j轴,點所確定之軸承轴 二間之通常輻散比較,並且相似广轉軸線與對稱軸 此等磁性軸承之空氣間隙為相對流體軸承之情況’ 士大偏差。最後,這導致生 大,因而可適應甚至相 :掃描器,特別是在應用在使用兄,及其使用在多面 之相當大品質相關問題。 β寫雷射束之影像投影時 鑪ί此方面’根據本發明之方法,以% 2線之位置,及其因此相對於轉子體务旋 軸線,與對稱軸線之位置儘可能重ί為元全相同之主惰性. ;方法之步驟,將旋轉軸線"拉向":對::::據本發明 :,直到達成最佳運作之方式工作:、:=最佳可能重 改進。此係完全c猎以提供品質之明顯 更式確定之習知平衡方::::位置藉機械軸承不可變 合之主惰性軸線之衍此情形不與旋轉軸線重 之位置,被拉向"旋轉軸線,直到已使發 89l08688.ptd 第9頁 4 60686 五、發明說明(5) 生不平衡所產生之轴承少 以Si達成旋轉轴線與對稱照於本發明,不 根據本發明之方 、’果之較佳重合。 軸線之位置重合,目而可達成J:軸線之位置合適與對稱 根據本發明之方法為_交 ^運作之-大優點。由於 擺之品質最後受到影響, ^過程,所可達成之軸向振 驟數予以確定^ 並基本上藉所實施之交互作用步 另外,根據本發明之方法,i — —狀態(自由飄浮),者 "另外優點在於在後者之 動,其為完全與此轉;==飄浮轉動轉子體之顫 相同。在此方面,在羊^ 现後使用所將取之狀態完全 可在旋轉之自由飄浮轉;^ u據本發明之方法甚至 用之裝置時實施。 a 者位於在其將行予以使 根據本發明之方法可 夕 轉,在位置檢測器所發出::之於在轉子體之二 成如何大之差實施。例如,電°腦可以、之差,達 使在位置檢測器所發出 種致使/、以一種致 差,儘可能完全補償,因小值之間發生之 能小之方式控制校正裝置 2 ^考轉時,此差已儘可 及/或缓慢旋轉轉子!# \ _式予以構形。在相對大質量 行藉校正裝置在轉子體?^ 較之在使用小型:上成分布之變化’在此情形 在後-'㈣,為會局部及定量上更容易理解。 电細权佳為以一種致使在轉子體之每—轉89l〇8688.ptd Page 8 460686 V. Description of the invention (4) The poor way affects the reflecting surface until it is broken down by one ~ ^ ~ ^ In the method according to the present invention, the yield is lower than a predetermined minimum. The rotor body is rotated to reduce flutter and installed so as to float freely and determine its axis of rotation.罝, instead of borrowing a rigid shaft ^ fluid bearing, such as the 佴 self-bearing can be better 'but also the gas bearing axis used by the magnetic device is effective for the rotor body non-rigid bearing, you can-a way to cause the shaft to be determined size. The magnetic wheel bearing can be special; the structure of the material and the fixed axis of rotation of the material can be developed in certain poles ::;:;: this use, where, the rotation;: '' known from, for example, mechanical bearings: f itself, in the true or strong axis of rotation of this case, compare the usual divergence between the two bearing shafts determined by the points, and the air gap between these magnetic bearings similar to the wide rotation axis and the symmetry axis is relative fluid Bearing situation 'discrepancy. In the end, this leads to a large scale and can therefore be adapted or even phased: scanners, especially in applications where they are used, and their use in many aspects have considerable quality-related issues. β write the laser beam when projecting the furnace. According to the method of the present invention, the position of the% 2 line and its position relative to the rotor axis of rotation and the axis of symmetry are as much as possible. The same main inertia. The steps of the method, "pulling the axis of rotation": to :::: according to the invention: until the best way of working is achieved:,: = the best possible re-improvement. This is a conventional balancing method that provides a clearer definition of quality: ::: The position is derived from the main inert axis of the mechanical bearing immutable. This position is not heavy with the rotation axis, and is pulled towards " Rotate the axis until 89l08688.ptd Page 9 4 60686 V. Description of the invention (5) Bearings produced by imbalance are rarely achieved with Si in the axis of rotation and symmetry. According to the present invention, according to the invention, 'Fruit overlaps better. The positions of the axes are coincident, and the objective can be achieved. J: The position of the axes is appropriate and symmetrical. The method according to the present invention is a great advantage of operation. Because the quality of the pendulum is finally affected, the process can be determined by the number of axial vibrations ^ and basically by the interaction steps implemented. In addition, according to the method of the present invention, i — state (free floating), The other advantage is that in the latter movement, it is exactly the same as this rotation; In this regard, the state in which the sheep will be used in the future can be completely free-floating while rotating; it is carried out according to the method of the present invention and even the device. a is located where it will be implemented so that the method according to the present invention can be turned on, and the position detector sends out: how much difference it takes to implement in the rotor body. For example, the power of the brain can be adjusted so that it can be used to control the correction device in a manner that is different from that caused by the difference. It can be compensated as completely as possible. At that time, the difference is as close as possible and / or the rotor is slowly rotated! # \ _Style to shape. Are relatively large masses borrowing correction devices in the rotor body? ^ Compared with the use of small: the change in the upper distribution ’In this case, the post-'㈣ is easier to understand locally and quantitatively. The electrical fineness is preferably such that every rotation of the rotor body

89108688.ptd 第10頁 一很短 器所發 能完全 體之旋 一種致 何其他 使用相 之運作 之高旋 置檢測 ,電腦 值間之 足夠小 時間, 出最小 補償之 轉速度 使在實 適當百 對小交 精確度 轉速度 裔之訊 可有利 差,每 交互作 460686 五、發明說明(6) 時’校正裝置僅工作 (之一),在位置檢測 差,很難有機會儘可 之狀況及特別是轉子 有利在隨後諸轉,以 10%,15% 或20%(或任 分布之校正。雖然僅 最後可達成特別良好 步驟特別適合轉子體 費相對短時間到達位 然而,在很多情形 之位置檢測器之訊號 以調整,因而在選擇 達成很良好之運作。 在此方面,在轉子 所有直接連續諸轉, 正。 在轉子體質量分布 間,強度及/或空間: 據本發明之方法特另,j 内,完成在轉子體質 或增加質量。 在轉子體質量分布 實施。然而,較佳為 因而緊接在隨後(諸)轉 與最大訊號之間發生 方式予以構形。依使用 而定’在此等情形,可 測訊號間之差僅減低約 分比)之方式實施質量 互作用步驟,以此方式 。由於使用小交互作用 ’交互作用過程仍然僅 號間之最小剩餘差。 以一種致使已連續獲得 次減低約一半之方式予 用步驟時,可相對快速89108688.ptd Page 10-A very short device can be used to perform a complete rotation test. What is the use of the other high phase rotation detection, the computer value is small enough time, the minimum compensation of the rotation speed makes it practically 100%. The news on the accuracy and speed of the small cross can be favorable. 460686 for each interaction. 5. Description of the invention (6) 'The calibration device only works (one). In the case of poor position detection, it is difficult to have the best possible situation. In particular, the rotor is advantageous for subsequent turns, with 10%, 15%, or 20% (or any correction of the distribution. Although only a good step can be achieved in the end, it is particularly suitable for the rotor body to reach the position in a relatively short time. However, in many cases the position The detector signal is adjusted to achieve very good operation in the selection. In this respect, all the rotors are directly and continuously rotated, positive. Between the mass distribution of the rotor body, the strength and / or space: The method according to the invention is particularly different Within j, complete or increase the mass in the rotor body. Implement in the mass distribution of the rotor body. However, it is preferred to be immediately between the subsequent turn (s) and the maximum signal Embodiment quality raw embodiment be configured. Set by use 'in such case, the difference between the sense signal may be reduced by about only division ratio) of the interaction step manner, in this manner. Due to the use of small interactions, the interaction process still has only the smallest residual difference between the numbers. Relatively fast when applying steps in a way that results in about a half reduction

^僅:J已:;诸轉之流動,可使用 弟一或第二轉等,供測量及校 裝置相對於時 較佳為二Γ 一之方式實施。然而,根 量分希μ母情況,在局部有限區域 刀布上之變化,特別是藉局部去除 上之變化,可以任h I 藉暴露至雷射束,Π…式予以 暴路至電子束及/^ Only: J has: The flow of the turns can be implemented using the first or second turn, etc., for the measurement and calibration device. However, in the case of the root volume, the change in the local knife area, especially the local removal, can be used to exposing the laser beam to the electron beam and h ... /

89108688.ptd 第11頁 460686 五、發明說明⑺ ----___________ 或暴露至離子走子患 較佳為予以脈i ::;有=形:所採用之輕射同樣 轉子體之旋轉速度同步。 式,輻射予以脈動,俾與 在此方面’脈衝時間及/ 或脈衝功率,_ € 禽長度及/或脈衝頻率及/ 整。在實施電所供給之訊號予以調 以預設定μ共根據本發明之方其使用之分類系統予 特別較佳為藉位梦;所利用輻射之脈衝體系 之旋轉速度與輕射:::::==二而在轉子體 根據本發明之方法, 達成間早之同步。 相對於轉子體之對準,纟::有利構形,在於所利用之束 校正裝置可使所利用之曰°之控制訊號予以調整,因而 或自相同開始點進行2向至在轉子體之不同入射點, 在根據本發明之方反射面之不同位置。 檢測器所發出訊號之最父^裝置較佳為在及只要在位置 極限時’亦即在已到既二最大值間之差下降低於既定下 基本上,根據本以=振擺精確度時予以中斷。 為其諧振頻率之一之之方法,可在轉動轉子體在不碰巧 轉子體在其額定速度旋實施。然而,其在 時,以一種特別較佳方2日寸,在測罝時及在質量分布變化 所利用轉子體m式予以實施。 實現。在-有利方式,,可以任何適當方式 承。然而’轉子體可同承在被動超導磁鐵轴 在一種特別較井方、良好°又置在主動磁鐵軸承。 _根據本發明之方法予以實施為供 89108688.ptd 第12頁 460686 五、發明說明(8) :構f如鏡多面體或如多面體掃 予以實施供任何型式之轉;:轉子體;然基 在根據本發明之方法,可 特別較佳為使用雷射束作為測^何適當測量束;然而, 本發明也係針對一種裝置,n 一特別有利方式予以實施。 明之方法可藉其以 子體之裝4 ’可藉一驅二’此為一種有一轉 圓周有反射面;而且 走轉’ i且其在其外部 子體之自由飄浮支承,—、 由承裝置在旋轉時供轉 導至延伸經過其之轉動轉子= : = —測量束,其可予以 檢測反射面所反射之測量束^ 一里面,—位置檢測器供 旋轉角度位置,一校正裴置可二=置供固定檢測轉子體之 在轉子體之質量分布,及—=仂=—種非接觸方式改變 入,及-裝置供固定檢測轉:::器連接至其輸 量=方式,供給控制訊變在轉子體之質 裝置,其較佳為予以脈為/供-雷射產生器作為校正 如Ne-YAG-雷射產生器或如? ^,再次較佳為予以構成 在根據本發明之裝置,7°田產生器。 測器。“,供位置檢剛J =何適當裝置作為位置檢 CCD-陣列。 °之種特別較佳選擇,為一 而且’雷射產生器同檨知 置,作為一供產生測量束={為使用在根據本發明之裝 里束之裝置。供產生測量束之袭置較 4 60 68689108688.ptd Page 11 460686 V. Description of the invention ---- ___________ or exposure to ion walking accidents is better to be pulsed i: ;; = = shaped: the same light shot is used to synchronize the rotation speed of the rotor body. The radiation is pulsed, and in this respect ’pulse time and / or pulse power, _ € bird length and / or pulse frequency and / or integer. In the implementation of the signal provided by the power station, it is adjusted to preset the classification system used by the party according to the present invention to particularly preferably the borrowing dream; the rotational speed and light emission of the pulse system of the radiation used :::: == 2 and the rotor body according to the method of the present invention, to achieve early synchronization between. Relative to the alignment of the rotor body, 纟 :: An advantageous configuration is that the beam correction device used can adjust the control signal of ° used, so it can be 2 directions from the same starting point to the difference in the rotor body. The incident points are at different positions on the square reflecting surface according to the present invention. The parent device of the signal sent by the detector is preferably at and as long as it is at the position limit, that is, when the difference between the two maximum values has fallen below the predetermined value. Basically, according to the original = Be interrupted. One of its resonance frequencies can be implemented by rotating the rotor body without accidentally rotating the rotor body at its rated speed. However, at this time, it was implemented with a particularly preferred square inch, using the m-type rotor body when measuring radon and changing the mass distribution. achieve. In an advantageous manner, it can be undertaken in any suitable manner. However, the rotor body can be supported on the passive superconducting magnet shaft in a particularly well-positioned, well-positioned and active magnet bearing. _ The method according to the present invention is implemented for 89108688.ptd Page 12 460686 V. Description of the invention (8): Structure f is implemented as a mirror polyhedron or as a polyhedron sweep for any type of rotation ;: rotor body; The method of the present invention may particularly preferably use a laser beam as a suitable measuring beam; however, the present invention is also directed to a device, and is implemented in a particularly advantageous manner. The method of the Ming Dynasty can be based on the child's equipment 4 'can borrow one drive two' This is a kind of circle with a reflective surface on the circumference; and the 'i' and its free floating support on its external body,-by the support device When rotating, it is used to conduct to the rotating rotor that extends past it: = = —Measuring beam, which can detect the measuring beam reflected by the reflecting surface ^ One inside, —Position detector for rotation angle position, one correction = The mass distribution of the rotor body in the rotor body for fixed detection, and-= 仂 =-a non-contact method to change the input, and-the device is used for fixed detection transfer ::: the device is connected to its output = mode, and provides control information For the mass device that changes in the rotor body, it is better to give the pulse / supply-laser generator as a correction such as a Ne-YAG-laser generator or such as? ^, Again, it is preferable to be constituted in the device according to the present invention, a 7 ° field generator. Tester. ", For position detection J = what appropriate device is used as the position detection CCD-array. ° This is a particularly preferred option, and is also known as the 'laser generator, as a measurement beam = {for use in Device for holding a beam according to the present invention. The position for generating a measuring beam is less than 4 60 686

= 使在反射面之束之入射點之取向,可予以位 置5周盖之方式予以設置。 之ΐ置’有利為提供-鏡多面體或-多面 7 一 ^ ,、、、轉子體,及有利為提供一被動超導磁鐵軸承 或-主f磁鐵軸承作為軸承裝置。然而,在特定使用情 Ϊ:ίΓ U另一適當軸承裝置’例如流體軸承(諸如 氣to釉承),供自由飄浮軸承裝置。 在以下參照圖式更完全解釋本發明。 圖1示一根據本發明之裝置之示意圖,其中使用一 體掃描器’作為轉子則,並設置在—外殼2内。後人 -環形:央部份3 (圖2),其中設置一平面平行板4,作: ί、測里光束5之透明窗,其將行予以偏轉,並來自— 源6 (在圖1中僅很基本指示),例如一雷射產生器(圖2 )。 使用在多面體掃描器1之永久磁性鏡多面體7予以插。 中央部份3之腔中,於是中央部份3藉一底座板8及—苔在 9,以一種真空緊密方式予以封閉。 揽板 底座板8及蓋板9係以玻璃作成,並支承供磁性軸承 之磁鐵線圈1 0,供驅動單元之磁鐵線圈1 1,及永久磁^置 利用永久磁鐵系統,鏡多面體7與底座板8或蓋板9 觸’因而不可能損壞成鏡面之形式設置在鏡多面, 周之反射面1 3。 之圓 供初始操作’首先精確調整裝置之軸向位置,並〜 後產生使鏡多面體γ旋轉之電磁回轉場。相對於旋轉'、、;後 460686 五、發明說明(ίο) -- ,多面體7,始終以一種致使其對應於鏡多面 車由線之方式產生一旋轉軸線A-A,其中,| 之情形,始終以相同方式,以一種可重現w、疋產生磁场 外殼2之旋轉軸線A-A之位置。然而,通常f給疋相$方、 面體7之旋轉軸線AA所旨在,相對於主惰性夠保證鏡夕 之表面法線N之南精確度90度對準(圖2),n 、之鏡面 體7之鏡面13之顫動。 因而導致鏡多面 在底座板8及蓋板9之磁鐵線圈1 〇,11 、 布,適合以一種完全對稱方式實施。 水久磁鐵1 2之分 而且,裝置曾以一種致使有自由區丨55, _ 可適當通達鏡多面體7之端面27 ,以供位消融輻射通過 供影響鏡多面體7之質量分布之方式^以^蜊量目的,或 在鏡多面體7之旋轉中心之情形,其中在只施。此首先為 —距離測量裝置1 4,其根據光學原理工斤不之實例提供 專利5, 171,984號,並且其檢測鏡多 ,例如根據美國 =測量結果獲得一訊號,供一主二其中, 向組份。 戴袖承之轴向方 而且’在磁鐵線圈10外面可造 承裝置及供驅動單元之磁鐵線圈u &胖供,性轴 動雷射產生器之校正裝置丨6之雷射光。其傳輸—包含脈 之带射耘射、S嗜 /生态1 6 (作為切削或整形雷 “可;施=多寺面(Γ;為在額定速度旋轉), 89108688.ptd 第15頁 460686 五、發明說明(11) 料之部份去除,在該情形,以—種致使以__種致 U之法線N自主惰性軸線A_A之週期性位置偏差: ”顫動誤差"最少之方式發生鏡多面體7口此 之影響之方式實施控制。 深位置 利用在該實例所使用之雷射消融法,並且在例 射在石英玻璃使用在】千赫(kHz)之重複速率時,可雷 1x10-7立方毫米/脈衝之去除速率,其對應於2. 之質量變化。 兄々= The orientation of the incident point of the beam on the reflecting surface can be set by positioning it in a 5-round cover. It is advantageous to provide-a mirror polyhedron or-a polyhedron 7 a ^,,, and a rotor body, and it is advantageous to provide a passive superconducting magnet bearing or a main f magnet bearing as a bearing device. However, in specific use cases: ΓΓ Another suitable bearing device, such as a fluid bearing (such as a gas to glaze bearing), is provided for a free floating bearing device. The invention is explained more fully below with reference to the drawings. FIG. 1 shows a schematic diagram of a device according to the present invention, in which a body scanner 'is used as a rotor, and it is arranged in a housing 2. Posterity-ring: central part 3 (Figure 2), which is provided with a plane parallel plate 4 as: ί, a transparent window of the measuring beam 5, which deflected the row and comes from-source 6 (in Figure 1 Very basic instructions only), such as a laser generator (Figure 2). The permanent magnetic mirror polyhedron 7 used in the polygon scanner 1 is inserted. In the cavity of the central part 3, the central part 3 is closed in a vacuum-tight manner by a base plate 8 and -moss at 9. The base plate 8 and the cover plate 9 are made of glass, and support a magnetic coil 10 for magnetic bearings, a magnetic coil 11 for a drive unit, and a permanent magnet using a permanent magnet system. The mirror polyhedron 7 and the base plate 8 or the cover plate 9 is touched, so it is impossible to damage the mirror surface, and it is arranged on the multiple surfaces of the mirror, and the peripheral reflection surface 1 3. The circle is provided for the initial operation. First, the axial position of the device is precisely adjusted, and then an electromagnetic rotary field is generated to rotate the mirror polyhedron γ. Relative to the rotation ',,; after 460686 V. Description of the Invention (ίο)-, the polyhedron 7 always generates a rotation axis AA in such a way that it corresponds to the mirror polyhedron from the line, where the situation of | always takes In the same manner, the position of the axis of rotation AA of the magnetic field housing 2 can be reproduced in w and 疋. However, f is usually aimed at the phase axis, the rotation axis AA of the facet 7 is intended to be aligned at 90 degrees relative to the main inertia to ensure the accuracy of the surface normal N of the mirror (Figure 2), The tremor of the mirror surface 13 of the mirror body 7. As a result, the multi-faceted magnet coils 10, 11 and cloth on the base plate 8 and the cover plate 9 are suitable for implementation in a completely symmetrical manner. Shuijiu magnet 12 points. Moreover, the device has a way to allow a free zone 丨 55, _ can properly reach the end face 27 of the mirror polyhedron 7, in order to affect the mass distribution of the mirror polyhedron 7 by means of in-situ ablation radiation ^ to ^ The amount of clams, or in the case of the center of rotation of the mirror polyhedron 7, is only applied. This is firstly-the distance measuring device 14, which provides patent No. 5,171,984 according to the example of the optical principle and has many detection mirrors. For example, according to the United States = measurement results, a signal is obtained for one master and two. To the components. The sleeve shaft is worn axially and the laser light of the correction device of the laser generator for the driving unit and the magnetic coil u & Its transmission—including the pulse of the pulse, S / ecology 1 6 (as a cutting or shaping thunder "may; Shi = Duosian surface (Γ; for rotation at rated speed), 89108688.ptd page 15 460686 V. Description of the invention (11) Partial removal of material. In this case, the periodic position deviation of the autonomous inert axis A_A caused by the normal N of __specified U: "mirror error" occurs in the least possible way. The control method is implemented in 7 ways. The deep position uses the laser ablation method used in this example, and when it is used on the quartz glass at a repetition rate of kilohertz (kHz), it can mine 1x10-7 cubic meters. Mm / pulse removal rate, which corresponds to a mass change of 2.

Nd-YAG-雷射在脈衝長度1〇〇毫微秒及重複速率i〇kHz, 使用在金屬及矽時,再次達成1χι〇-7立方毫米之去 率〇 益為供此:的、重要的是在一平面實施材料之去除,並且 體7凹’Λ否則可能導致將會負影嚮高速旋轉鏡多面 处之強度之>陷波電壓。與供材料移位之其他可想像及可 用匕之方法’名如,蒸發’蒸敷,減^著’濺除,化學轉變 (氡化,氮化),離子植入等比較,雷射消融之方法有很大 其實際不影響鏡多面體7之材料特徵及材料組成, ,、為必要,因為熱處理或數薄a扃古 。 4歡得增在N逮旋轉鏡多面體7.所 ,路之極端應力下’始終導致強度相關問冑。^而,基本 ^ ’也可使用供在轉子體1?文變材料分布之其他此等方 mu射束以_種致使雷射脈衝在鏡 =體7之表面27故意衝擊一預定區域23,並導致在該位 去除材料之方式,予以控制在鏡多面體7之額定旋轉速Nd-YAG-laser at a pulse length of 100 nanoseconds and a repetition rate of ikHz, when used in metal and silicon, once again achieves a removal rate of 1x7-7 mm3. The benefits are as follows: The removal of the material is performed on a plane, and the body 7 concave 'Λ may otherwise result in a > notch voltage that will negatively affect the intensity at multiple faces of the high-speed rotating mirror. Compared with other imaginable and usable methods for material displacement, such as, "evaporation", "reduction", "sputtering", chemical transformation (halidation, nitriding), ion implantation, etc., laser ablation The method is very large, and it does not actually affect the material characteristics and material composition of the mirror polyhedron 7, which is necessary because of heat treatment or a small amount of time. 4 Huandezheng has been found in the rotating mirror polyhedron 7. Therefore, the extreme stress of the road always leads to strength-related problems. ^ Also, the basic ^ 'can also use other such mu beams for the distribution of materials in the rotor body 1 to change the laser pulse on the surface 27 of the mirror = body 7 to deliberately impact a predetermined area 23, and The way that causes the material to be removed in this position is controlled at the rated rotation speed of the mirror polyhedron 7

89108688.ptd 第16頁 46〇686 —----- 五、發明說明(12) 度 5 y =^例如1. 3kHZ時發生困難。如果此係在鏡多面體7之額 2紅轉速度實施,這具有鏡多面體7之狀態與其在隨後操 面絕對相同之優點。當然,材料之去除不一定必須在鏡多 ^體7之領定旋轉速度實施’其旋轉速度也不影響為旋轉 夕線A A之主惰性軸線之位置。例如,供極高速旋轉,鏡 二面體7雷射消融可遠低於其額定旋轉速度實施;不過, 此情形必須仔細調整旋轉速度不對應於鏡面體7之 振旋轉速度。 &丨^圖式中所示之具體例,也可使鏡多面體7之旋轉與切 篇:射16之脈衝特性同# ;在此方面,供同步精確度所將 / 求不太嚴格,因為,實際上,材料去除是否發生 顫動誤差之最大振幅,或發生在自其(+ /_1〇。)之較小 腑Ϊ f無關緊要。在任何情形,由於所需要之大量雷射 二旦t f :均值確定,並且在材料去除時將行繼續取得 測里立即提供關於過程成功之證實。 舢H ί面13測1法線N之位置,j吏用作為光源6之測量帝 少目'於多面體掃描器i予以固定在定位二 體7之每-移動鏡面13反射至一獅—陣列;被鏡 =測=之接收機線。利用一⑽接收 式二 :達成優於-角秒之解析度。供給一測量值 一供確定旋轉反射小面(鏡13)之小面循環或 =¥在多面體掃描器1之外殼2之中央部份3,^在時一之 k田 ,5亥感測裔供給關於鏡多面體7之瞬時旋轉角度 460686 五、發明說明(13) 位置之資訊。 圖4中之曲線圖示所插入之鏡多面體7之所 ;* ί" ° ^ ^ ^ , ; ;;§;^ 角又决差所產生之組份丨9,以及旋轉轉子體丨( :示)之重疊顫動誤差2〇所構成。二誤差併稱為錐形^ 在圖4中之視圖,Χ_軸線表示鏡多面體7之旋轉 0 ,及Υ-軸線表示位置檢測器17(CCD_陣列)所 二 號之關聯振幅W。 、里檢測戒 =圖^卞所不,顫動誤差2 〇表示總訊號之正弦組份。89108688.ptd Page 16 46〇686 ———- V. Description of the invention (12) Degree 5 y = ^ For example, 1.3kHZ has difficulty. If this is implemented at the red rotation speed of the mirror polyhedron 7, this has the advantage that the state of the mirror polyhedron 7 is absolutely the same as that at the subsequent operation. Of course, the removal of the material does not necessarily have to be performed at the specified rotation speed of the mirror body 7, and the rotation speed does not affect the position of the main inert axis of the rotation line A A. For example, for extremely high-speed rotation, laser ablation of the mirror dihedron 7 can be performed much lower than its rated rotation speed; however, the rotation speed must be carefully adjusted in this case, which does not correspond to the vibrational rotation speed of the mirror 7. The specific example shown in the figure can also make the mirror polyhedron 7 rotate and cut: the pulse characteristics of the shot 16 are the same as #; In this respect, the synchronization accuracy will not be strict / required because In fact, it does not matter whether the maximum amplitude of the flutter error occurs in the material removal, or if it occurs at a smaller value (+ / _ 1〇.). In any case, due to the large number of lasers required, t f: the mean value is determined, and will continue to be obtained when the material is removed. The test immediately provides confirmation of the success of the process.舢 H ί The position of the normal 13 measured by the plane 13 is used as the measurement of the light source 6 by the Emperor's Eye 'on the polyhedron scanner i to be fixed at each of the positioning two bodies 7-the moving mirror 13 is reflected to a lion-array; Receiver line under test. Utilize a receiver to receive Equation 2: Achieve better resolution than -angular seconds. Supply a measurement value for determining the facet rotation of the rotating reflection facet (mirror 13) or = ¥ in the central part 3 of the housing 2 of the polyhedron scanner 1, ^ at the k field, 5 Hai sense sensor Information on the instantaneous rotation angle of the mirror polyhedron 7 460686 V. Description of the invention (13) Position information. The curve in Figure 4 shows the location of the inserted mirror polyhedron 7; * ί " ° ^ ^ ^,;; §; ^ The angle and the component produced by the difference 丨 9 and the rotating rotor 丨 (: show ) Is constituted by the overlapping flutter error 20. The two errors are also called cones. In the view in Fig. 4, the X-axis represents the rotation 0 of the mirror polyhedron 7, and the Y-axis represents the associated amplitude W of the position detector 17 (CCD_array). , Detection or = = Figure ^ 卞 does not, tremor error 2 〇 represents the sinusoidal component of the total signal.

写^於不山:對其供給位置檢測器1 7及供角度檢測之感測 "=輸出汛唬之電腦22。依據檢測之測量值,電腦 確=在多面體鏡7之一整轉時所發生最大測量值W s;:董值Wmin間之差D(請見圖4) ’並另確定與此等項Γ* ^ :聯之轉子體i之旋轉位置ΧιΑΧ2,並自此確定控4二里。: 送至校正裝置16。#雷射束24被後者 ::::Write ^ Yu Bushan: supply the position detector 17 and the angle detection sensor " = output the computer 22 of the flood. According to the measured measurement value, the computer confirms that the maximum measured value W s occurred during one full revolution of the polyhedron lens 7 ;: the difference D between the Dong value Wmin (see FIG. 4) 'and also determines these terms Γ * ^: The rotation position XιΑχ2 of the rotor body i of Lianzhi, and the control position is determined as long as four miles. : Send to calibration device 16. # 雷射 束 24 by the latter ::::

^、]之區域23 ’在鏡多面體7之該(或一)隨後 ;:間:巧量之差Dl小於先前測量差D之方式完成材料之在 : 同犄,杈正裝置1 6再次藉電腦2 2予以控制,因A 疋之差D!大於-預定最小值;在該或一隨後整轉前,'、、、新 =裝,1 6以一種致使在隨後再次所測量最大此 :間之差再次減低之方心實施另一雷射消融。重丄:, v驟,直到此差最後變為小於預定最小值。 唓^,] Of the area 23 'This (or one) is followed by the mirror polyhedron 7 :: time: the difference between the amount D1 is smaller than the previous measurement difference D to complete the material in the same way: the same, the device 16 borrows the computer again 2 2 is controlled because the difference between A and D! Is greater than-the predetermined minimum value; before this or a subsequent full turn, ',,, new = installed, 1 6 in such a way that the maximum measured again in the following time: The center of the difference is reduced again to perform another laser ablation. Repeat: v, until the difference finally becomes less than the predetermined minimum. Che

89108688.ptd 第18頁 4 60 686 — —i 五、發明說明(14) 隶後,圖5示自圖4之曲線圖,复由^ 完全消失(纟達到供顫動誤差2〇之預,/1動誤差2〇已幾乎 該過程正常予以截止),由於以二=小殘留水準時, 料去除(供連續測量),在該 式元成許多步驟及材 固定角度誤差Ϊ9仍然存在(圖月5/。堇自鏡面13至鏡面13之 圖6中之視圖隶後示控制校正梦署1 ρ 順序(在圖式之頂部),及作用在長於置夕16之整形雷射之脈衝 衝順序(在圖式之底部)之示意圖,夕面體7之表面27之脈 對應於圖2中之裝置’相對於所 置,校正裝置16之切削雷射之脈、J取大顆動誤差之位 τ*3/4之整倍數(τ= 一轉 、序之發射時間偏移 種致使在鏡多面體7旋韓Λ㈣間)。實際^ ^ 圖2中所示束路和之到量^除材料時,繼續測量對應於 程。 員疋極限,便中斷測量及去除之過 ^ <^3 ί ΐ Ξ f, ^ ^ ^ ^ * 在此情形,轉子體Γ係以二々鏡多面體7之外殼。 作成。-圍繞其U + ;狀水久磁鐵12及—鏡多面體7 卻褒置26予以冷卻低於種超導材料,其藉冷 圏11產生一磁世,、品皿度。供驅動裝置之磁鐵線 —上述型4 其作用在旋轉主體1,並使其旋轉。 體1之位置穩<之被動磁鐵軸承,具有不需要藉調節使轉子 材料所感應電产^ ^二"水久磁鐵12在定子部份25之超導 撕之凍,.Ό狀態,以一種穩定,抗干擾並確 89108688.ptd 第19頁 ί 460686 五、發明說明(15) 切可重現之方式引導轉子體1 2。 圖3中基本上所示之裝置,也具有在鏡多面體7之表面27 之自由區1 5實際上不受任何種類之上層結構限制之優點。 【元件編號說明】 1 轉子體 2 外殼 3 中央部份 4 平行板 5 測量束 6 光源 7 鏡多面體心 8 底座板 9 蓋板 10 磁鐵線圈 11 磁鐵線圈 12 永久磁鐵 13 反射面 14 距離測量裝置 15 自由區 16 校正裝置 17 位置檢測器 18 感測器 19 角度誤差 20 顫動誤差89108688.ptd Page 18 4 60 686 — — i V. Description of the invention (14) Afterwards, Figure 5 shows the graph from Figure 4 and disappears completely from ^ (供 reached the prediction of the tremor error of 20, / 1 The dynamic error 20 has almost been cut off by this process normally). Since the material is removed (for continuous measurement) at the level of two = small residuals, many errors in the formula and the fixed angle error Ϊ9 still exist (Figure 5 / The view in FIG. 6 from the mirror 13 to the mirror 13 is shown below to control the correction of the dream department 1 ρ sequence (at the top of the diagram), and the pulse sequence of the shaping laser that is longer than Zhixi 16 (in the diagram) The bottom 27 of the formula), the pulse of the surface 27 of the eve surface 7 corresponds to the device in FIG. 2 ′ Relative to the device, the cutting laser pulse of the correction device 16 and J take the position of the large motion error τ * 3 An integer multiple of / 4 (τ = one revolution, the order of the time shift of the launch causes the mirror polyhedron to rotate between 7 and ㈣ ㈣). Actually ^ ^ The beam path and the amount shown in Figure 2 ^ Divide the material and continue measuring Corresponds to the process. The limit of the member, the measurement and removal are interrupted ^ < ^ 3 ί ΐ Ξ f, ^ ^ ^ ^ * In this case The rotor body Γ is made of the outer shell of a dihedral mirror polyhedron 7. It is made of-around its U +; shaped hydrous magnet 12 and-the mirror polyhedron 7 is placed 26 for cooling below a kind of superconducting material, which is generated by cold chilling 11 A magnetic world, and the degree of quality. The magnet wire for the driving device-the above-mentioned type 4 acts on the rotating body 1 and rotates it. The position of the body 1 is stable and the passive magnet bearing has a rotor that does not need to be adjusted by adjustment. The electric induction induced by the material ^ ^ 2 " The superconducting tearing of the water long magnet 12 in the stator part 25 is in a stable state, with a stable, anti-jamming and accurate 89108688.ptd page 19ί 460686 V. Description of the invention (15) Guide the rotor body 12 in a reproducible way. The device basically shown in Fig. 3 also has a free area 15 on the surface 27 of the mirror polyhedron 7 which is practically not restricted by any kind of superstructure. Advantages [Description of component numbers] 1 Rotor body 2 Housing 3 Central part 4 Parallel plate 5 Measuring beam 6 Light source 7 Mirror polyhedron 8 Base plate 9 Cover plate 10 Magnet coil 11 Magnet coil 12 Permanent magnet 13 Reflective surface 14 Distance measuring device 15 Free Zone 16 Correction device 17 Position detector 18 Sensor 19 Angle error 20 Flutter error

89108688.ptd 第20頁 46068689108688.ptd Page 20 460686

89108688.ptd 第21頁 4686 圖式簡單說明 不通過一根據本發 ~ 主動磁性軸承有一 裝置之(概略)剖面 圖2示圖〗中之铲f形鏡夕面體作為轉子體;,在— 路徑之視圖;兄夕面體之頂視圖’有-反射測量束之束 圖3示—根據本發明之#里/ 及軸向磁鐵軸承右—凌置之(概略)剖面圖,在一被動 圖4為曲線圖;;鏡//>體作為轉子體; 圖5為對應於圖Λ & 面體之錐形誤差之組份;、好 圖6示在Γ'種新 &線圖,但在補償顫動誤差後,u 置之脈動雷射%x 么明之方法,供雷射消融之校玉 田射源之脈衝序列及雷射輕射之脈衡序列。 89108688.ptd 第22頁89108688.ptd Page 21 4686 The diagram simply does not pass a (schematic) cross-sectional view of the active magnetic bearing with a device according to the present invention (schematic) cross-sectional view of Figure 2. Figure shovel f-shaped mirror surface as the rotor body ;,-path The top view of the brother ’s plane is the beam of the reflection measuring beam. Figure 3 shows the # 里 / and axial magnet bearing right according to the present invention-Ling Zhizhi (schematic) sectional view, a passive figure 4 Is a graph; a mirror // > body is used as a rotor body; FIG. 5 is a component corresponding to the cone error of the figure Λ &surface; Fortunately, FIG. 6 is shown in a Γ′new & line diagram, but After compensating for the flutter error, the method of pulsating laser% x set by u is the pulse sequence of the school Yutian source for laser ablation and the pulse balance sequence of laser light. 89108688.ptd Page 22

Claims (1)

460686 案號 89108688 條正 Xf 修正 90〇 3〇 3 0„ 修正本’_ 六、申請專利範圍 1. 一種被安裝成為自由飄浮的轉動轉子體(1)之顫動減 低方法,該轉動轉子體在其外部圓周有反射面(13),其 中,一有既定入射位置之測量束(5 )被經過之轉動轉子體 (1 )之反射面(1 3 )所反射,並在反射後,被導至一位置檢 測器(1 7 ),其訊號予以供給至一電腦(2 2 ),其在轉子體 (1)之每一整轉時’確定位置檢測器(丨7)所發出訊號之最 大及最小值間之差,並且電腦(2 2 )確定與該二值關聯之轉 子體(1)之角位置,並自後者’計算控制校正裝置(丨6)之 控制訊號,在該轉時或在轉子體〇)之隨後一轉時,該校 正裝置(16)以一種非接觸方式導致在轉子體(丨)之質量分 =之變化,並且不以一種致使在轉子體(丨)之此轉時所確 =位置檢測器(1 7 )所發出訊號之最小及最大值間 在:一轉時所確定之差之方式,影響反射面⑴)。 2. 如申請專利範圍第丨項之方法, 限區域⑽内’完成在轉子體⑴之;量=上 或以或2項之方法,其中,藉局部去除 f f變在轉子體⑴之質量分布。 4.如申睛專利範圍第丨 電子照射及/或離子昭#、二:其中’藉雷射照射, 5如申社奎』, 射改變在轉子體(U之質晉八士 如申凊專利範圍第4 y <買里分布。 體⑴之質量分布所使用;其中,供改變在轉子 6.如申請專利範斤:用=(24)予以脈動。 體(1)之質量分布所使用 =,其中,供改變在轉子 ”更用之輻射(24)予以與轉子體⑴之旋 89108688.ptc 第23頁 460686 曰 修正 ___tt,. B9108688_ 六、申請專利範圍 轉速度脈動同步。 7. 如申請專利範圍第5項之方法,其 (17)所供給之訊號調整脈衝時間及/或脈衝長戍脈衝 頻率及/或脈衝功率。 q贡度及/或脈衝 8. 如申請專利範園第7項之方法,其中 (17)之訊號觸發所利用輕射(24)之脈衝體系。 U 9 ·如申請專利範圍第4項之方法,其中 控制訊號調整所利用束(24)相對於轉子體(1)之準。)之 10.如申請專利範圍第丨項之方法,其中 位置檢測器(1 7)所發出却祙夕昙,s具丄祕汉八晋隹疋 迅-既m拉t 最小最大值間之差不再超 過既疋界限時’中斷校正裝置(丨6)。 π.如申請專利範圍第丨項之方法,其中,轉子 測量時及在質量分布改變日夺,以其額定速度旋轉。 25) ,其中,使用一鏡多面 ,其中,使用一雷射束 1 2.如申請專利範圍第i項之方法,其中,轉子體(1) 以支承在一被動超導磁鐵軸承(丨2, 1 3.如申請專利範圍第1項之方法 體(7)作為轉子體(1)。 1 4.如申請專利範圍第1項之方法 作為轉子體(1)。 15. —種供實施申請專利範圍第i項之方法之裝置, =體⑴,可藉-驅料元使錢轉,並且其在其外部― 有至少一反射面(13),有—軸承裝置(10,12 ; 12, 供在旋轉時自由飄洋支承轉子體⑴,一光源⑻ 生一測置束⑸,其可予以導至轉動轉子體⑴之至少一產反 89108688.ptc 第24頁 460686 修正460686 Case No. 89108688 Article Xf Amendment 9003003 0 0 Amendment '_ VI. Patent Application Scope 1. A method for reducing the vibration of a rotating rotor body (1) installed as a free-floating rotor body There is a reflecting surface (13) on the outer circumference, of which a measuring beam (5) having a predetermined incident position is reflected by the reflecting surface (1 3) of the rotating rotor body (1) passing by, and after being reflected, it is guided to a The position detector (1 7), its signal is supplied to a computer (2 2), which determines the maximum and minimum values of the signal from the position detector (丨 7) at each full revolution of the rotor body (1) And the computer (2 2) determines the angular position of the rotor body (1) associated with the binary value, and calculates the control signal of the control correction device (丨 6) from the latter, at this turn or at the rotor body 〇) The following rotation, the correction device (16) causes a change in the mass fraction of the rotor body (丨) in a non-contact manner, and does not do so in a manner that causes the rotor body (丨) to rotate at this time. = Between the minimum and maximum values of the signal from the position detector (1 7) In: The way of the difference determined at one turn affects the reflecting surface ⑴). 2. If the method of the scope of patent application 丨, the method is completed within the rotor area within the limited area 量; the amount = up or by or 2 The method, in which the mass distribution in the rotor body is removed by locally removing ff. 4. Such as the patent scope of ShenJian Patent 丨 Electron Irradiation and / or Ion Zhao # 2: Among them, 'by laser irradiation, 5 such as Shen Shekui', Radiation changes in the rotor body (the quality of the U.S. patent is in the 4th y < Buyi distribution of the patent scope. The mass distribution of the body is used; among them, changes are made in the rotor 6. If the patent is applied: Use = (24) Pulse. The mass distribution of the body (1) is used =, of which the radiation used to change the rotor "is more used. (24) The rotation with the rotor body is 89108688.ptc page 23 460686 said to modify ___tt, B9108688_ VI. Synchronization of rotation speed pulsation with patent application scope. 7. If the method of patent application scope item 5 is used, the signal provided by (17) adjusts the pulse time and / or pulse length chirp pulse frequency and / or pulse power. Q Contribution and / or pulse Method, in which the signal of (17) triggers the pulse system of light shot (24). U 9 · The method of item 4 in the scope of patent application, wherein the control signal adjusts the beam (24) used relative to the rotor body (1) 10. The method according to item 丨 of the scope of patent application, wherein the position detector (1 7) issued the 祙 xi 昙, s 丄 汉 八 八 eight Jin 隹 疋 Xun-both m pull t minimum maximum When the difference no longer exceeds the existing limit, the correction device is interrupted (6). π. The method according to item 丨 of the patent application range, wherein the rotor rotates at its rated speed during measurement and when the mass distribution changes. 25), wherein a mirror facet is used, wherein a laser beam 1 is used 2. The method according to item i of the patent application range, wherein the rotor body (1) is supported by a passive superconducting magnet bearing (2, 1 3. The method body (7) as claimed in the scope of patent application as the rotor body (1). 1 4. The method body as claimed in the scope of patent application as the rotor body (1). 15.-A patent for implementation The device of the method of the range i, = body, can be turned by the-drive material, and it has at least one reflective surface (13) on the outside, and-bearing device (10, 12; 12, for During the rotation, the floating body supports the rotor body, a light source generates a measurement beam, which can be guided to at least one of the rotating rotor body. 89108688.ptc Page 24 460686 Correction 號8910洲狀 申請專利範圍 r射’―位置檢測器(17)供檢剩測量束(5)#及射而 (13)反射,—奘罟门只、糾印〜认 j里末糟反射面 人七要 衷置(18供固疋檢測轉子體(1)之旌鑪自许 ί leiΓΛ"Λ£( 16) τ ^^ ^ ^ ^ ^ Λ Λ # 供固—於、丨貝里/刀布,並有一電腦(22)位置檢測器(17)及 其:::轉:體⑴之旋轉角度位置之裝置(⑻連接至 ' I 並且其供給控制訊號至校正裝置(1 6 )。 產生哭W專利範圍第15項之裝置’其中,設有一雷射 產生益作為校正裝置(16)。 7. 士申。月專利範圍第1 6項之裝置,並 ND-YAG雷射連吐哭斗、, 八中’ δ又有一 u 6)。射產生為或—激元雷射產生器作為雷射產生器 其中 其中 其中 其中 設有一脈動 設有一CCD-供產生測量 供產生測量 18. 如申請專利範圍第15 雷射產生器(16)。 19. 如申請專利範圍第15項之裝置 陣列作為位置檢測器(丨7)。 2 0 ·如申睛專利範圍第1 5項之裝置 束之裝置(5)為一雷射產生器。 束^梦如署申^專利範圍第1 5項之褒置’其中,供產生測量 之二 以一種致使束之入射點在至少一反射面(1 3 ) 之二向可予以位置調整之方式予以設置。 .如申凊專利範圍第15項之裂置’ )為 —鏡多面體(7)。 起導H明專利知圍第1 5項之裝置’其中’設有一被動 起導磁鐵轴承(12,25)作為軸承裝置。No. 8910 continent application patent scope r-radiation '-position detector (17) for residual measurement beam (5) # and radiation and (13) reflection,-yamen only, correction printing ~ identify the reflection surface Seven people must be sincere (18 for the solid furnace detection rotor body (1) of the furnace since Xu lei ΓΛ " Λ £ (16) τ ^^ ^ ^ ^ ^ Λ Λ # Supply fixing-Yu, Bailey / knife cloth And a computer (22) position detector (17) and its ::: turn: device of the rotation angle position of the body (⑴ is connected to 'I and it supplies a control signal to the correction device (1 6). Cry W The device of the scope of the patent No. 15 'Among them, a laser generating benefit is provided as a correction device (16). 7. Shishen. The device of the scope of the patent No. 16 of the month, and the ND-YAG laser continuous vomiting,中 中 'δ has another u 6). The radiation generation is or-the excimer laser generator is used as the laser generator, wherein one of which is provided with a pulsation and the other is provided with a CCD-for generation measurement for generation measurement. 15 Laser generator (16). 19. For example, the device array in the scope of patent application No. 15 is used as a position detector (丨 7). 2 0 · The device (5) of the device of item 15 in the patent scope is a laser generator. The beam ^ dream is applied for the application of item 15 of the patent scope ', which is used to generate the second measurement to A way to make the incident point of the beam on at least one reflecting surface (1 3) can be adjusted in two directions. (Such as the fission of the patent application No. 15) is-mirror polyhedron (7). The device "15" of the patent guide No. 15 of the Ming Dynasty is provided with a passive magnet guide bearing (12, 25) as a bearing device. 2001.03.30.025 460686 案號 89108688 _Ά 曰 修正 六、申請專利範圍 2 4.如申請專利範圍第1 5項之裝置,其中,設有一多面 體掃描器(7)於一主動磁鐵軸承中。 2 5.如申請專利範圍第1 5項之裝置,其中,設有一流體 軸承作為軸承裝置。2001.03.30.025 460686 Case No. 89108688 _Ά Name Amendment 6. Scope of patent application 2 4. For the device of scope of patent application No. 15 wherein a polyhedron scanner (7) is provided in an active magnet bearing. 25. The device according to item 15 of the scope of patent application, wherein a fluid bearing is provided as the bearing device. 89108688.ptc 第26頁89108688.ptc Page 26
TW089108688A 1999-06-24 2000-05-06 Process for reducing the wobbling motion of a rotating rotor body which is mounted so as to be freely floating and the arrangement for carrying out the process TW460686B (en)

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Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10013035A1 (en) * 2000-03-17 2001-09-27 Gerhard Wanger Rotating shaft balancing device, uses selectively activated laser beam for removal of material from shaft during its rotation
DE10204043C1 (en) * 2002-02-01 2003-07-10 Siemens Ag Mechanical oscillation signal detection and evaluation device has respective signal evaluation method assigned to each detected measuring point
DE102005024139B4 (en) * 2005-05-23 2016-11-24 Schenck Rotec Gmbh Method for determining the imbalance reference axis and method for determining the imbalance and corresponding devices
EP1901877B1 (en) 2005-07-11 2017-10-04 ebm-papst St. Georgen GmbH & Co. KG Method and assembly for balancing a fan
KR20100099234A (en) * 2007-12-11 2010-09-10 블루스코프 스틸 리미티드 Method of metal coating and coating produced thereby
DE102008034343B4 (en) 2008-07-23 2017-03-16 Continental Mechanical Components Germany Gmbh Turbocharger with sealed and cooled bearings
DE102008034342A1 (en) 2008-07-23 2010-01-28 Continental Mechanical Components Germany Gmbh Method for operating weight of turbo charger, involves determining tumbling motion of rotor body, and changing mass distribution of rotor body such that tumbling motion of rotor body is reduced
JP2011112514A (en) * 2009-11-26 2011-06-09 Ihi Corp Balance correction apparatus and method
JP5773126B2 (en) * 2011-01-24 2015-09-02 株式会社Ihi Balance correction device and balance correction method
CN114199547B (en) * 2021-12-17 2024-05-28 大连民族大学 Special fixture capable of realizing slow variation of excitation amplitude for rotor-bearing test bed
DE102022107598A1 (en) 2022-03-30 2023-10-05 Raylase Gmbh 1Balanced mirror unit for a laser deflection device and corresponding balancing method
DE102023108218A1 (en) 2023-03-30 2024-10-02 Raylase Gmbh Balanced mirror unit for a laser deflection device and corresponding balancing procedure

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3621180A (en) * 1969-06-03 1971-11-16 Singer General Precision System for correcting unbalances on a rotating mass
IT1052844B (en) * 1975-12-16 1981-07-20 Cnen PROCEDURE AND EQUIPMENT FOR THE DYNAMIC BALANCING OF ROTATING BODIES IN PARTICULAR FOR CENTRIFUGES
US4773019A (en) * 1986-04-24 1988-09-20 Mechanical Technology Incorporated Microprocessor laser control system for multiplane balancing of rotors
DD299546A5 (en) * 1987-04-07 1992-04-23 Bundesamt Fuer Wehrtechnik Und Beschaffung Referat Atiii 1,De ARRANGEMENT FOR MEASURING THE IMMIGRATION OF INDIVIDUAL SCREW BLADES
NL9001260A (en) * 1990-06-01 1992-01-02 Philips Nv SCANNING DEVICE WITH A ROTATABLE MIRROR, AND DRIVE UNIT USED IN THE SCANNING DEVICE, AND ROTOR BODY USED IN THE DRIVE UNIT.
DE4032299A1 (en) * 1990-10-11 1992-04-16 Siemens Ag Monitoring rotatable component esp. rotor shaft - time-dependently measuring oscillatory path of component in radial direction and rotary position
DE4227014A1 (en) * 1992-08-14 1994-02-17 Budig Peter Klaus Prof Dr Sc T Balancing electromagnetically-supported rotor - using measured values obtained from control loop selected by rotary-angle pulses adjustable to 360 degrees, balancing manually and by using angle-dependent current regulating values
DE4339064A1 (en) * 1993-11-16 1995-05-18 Bosch Gmbh Robert Eliminating rotor imbalance
DE19619997A1 (en) * 1996-05-17 1997-11-20 Karlsruhe Forschzent Balancing method for superconducting magnet located rotor mass

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