TW450017B - Composite interconnection elements for microelectronic components, and methods of making same - Google Patents

Abstract

Interconnection elements for electronic components, exhibiting desirable mechanical characteristics (such as resiliency, for making pressure contacts) are formed by shaping an elongate element (core) of a soft material (such as gold) to have a springable shape (including cantilever beam, S-shape, U-shape), and overcoating the shaped elongate element with a hard material (such as nickel and its alloys), to impart a desired spring (resilient) characteristic to the resulting composite interconnection element. A final overcoat of a material having superior electrical qualities (e.g., electrical conductivity and/or solderability) may be applied to the composite interconnection element. The elongate element may be formed from a wire, or from a sheet (e.g., metal foil). The resulting interconnection elements may be mounted to a variety of electronic components, including directly to semiconductor dies and wafers (in which case the overcoat material anchors the composite interconnection element to a terminal (or the like) on the electronic component), may be mounted to support substrates for use as interposers and may be mounted to substrates for use as probe cards or probe card inserts. In one embodiment, a hybrid composite interconnection element is formed by mounting a core to an end of an flat elongate element formed from a sheet, and overcoating at least the core, the flat elongate element providing a ""floating"" support for the overcoated core, capable of absorbing non-planarities (tolerances) of an electronic component. Methods of fabricating interconnection elements on sacrificial substrates are described. Methods of fabricating tip structures and contact tips at the end of interconnection elements are described.

Description

450017 Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperative, printed A7 B7 V. Description of the invention (1) Invention technology The invention is an intermediate quick-connecting element for the manufacture of electronic components, especially micro-sisters. In particular, it shows the interconnected components that are dim and its manufacturing method. 0 The original case: &gt; This application is based on the common and pending pending Meipu Patent No. 08, filed on May 26, 1995. / 452, Part of 255 consecutive applications ("Patent Case" status: pending approval) • Therefore, the pending applications are the joint and pending pending US patent applications filed on November 15, 1994. Part of the consecutive reading of the application No. 〇52Λ812 (status: pending approval), this application is a joint and jointly approved US patent No. 08 / 152,812 filed on November 16, 1983 Achievement of part of the application (status: pending approval / approved). Inventive Devices Electronic Components, especially micro-electronic devices such as half-cell components (chips), usually have a large number of terminals (also referred to as junctions, poles, or conductive areas). In order to install these components into a system (or subsystem), several components must be interconnected with each other, and usually pass through the middle of a printed circuit (or wiring) board (PCB, PVB). Thing. The semiconductor device is generally arranged inside a half-jam sauce package having a plurality of external contacts in the form of K pins, pads, leads, solder balls, and the like. Many forms of semi-lead packaging are known • and the technology for connecting the semi-response components inside the packaging includes wiring, TAPED-AUTOMAED BONDING (TAB), and the like. In some examples, the semiconducting hip element is provided with a lifting protrusion ^ n- Amf ^^^^ 1 14 &gt; ^^^ 1 an fn ·-V .yf.1 (This page) The paper size is in accordance with Chinese National Standard (CNS) A4 (210X297 mm) 450,000. The Central Sample Rate Bureau of the Ministry of Economic Affairs, Shellfish Consumption Cooperation Du printed Α7 Β7 i 'Invention Description (2) The floating wafer technology is connected to another electronic component. Generally speaking, the mutual relationship between electronic components can be classified into two general types: Λ relatively permanent "and" easy to disassemble ". An example of w relatively permanent connection is soft soldering. Once two components are soldered to each other, a de-soldering procedure must be used to separate the components. Wire bonding is another example of a "relatively permanent" connection. An example of "easy to disassemble" connection is that the rigid pins of an electronic component are accommodated by the elastic insertion elements of another channel subassembly. This socket element uses a sufficient contact force (pressure) on the pins. Ensure a reliable radon connection there. The interconnecting elements that are to be brought into pressure contact with an electronic component here are referred to as "springs" or "spring elements." Spring elements are known and present in various shapes and sizes. In today's microelectronics environment, it is very important that all interconnecting components including springs become smaller and smaller, so that most of these interconnecting components can be deployed in a small area. High-density interconnects. Conventional techniques for manufacturing spring elements generally involve forging (punching) or inscriptions of spring materials such as phosphor screens or beryllium saw alloys or cadmium or nickel-iron-cobalt (such as kovar) alloys. Form individual reed elements, form reed elements, have a reed shape (such as an arc), M — good contact material (for example, precious gold such as gold • it can exhibit low contact when it comes in contact with similar materials Obstruction) Electric suspected bomb Element, M, and a large number of such shaped, electric sickle spring elements into a linear, edge-to-edge, or array pattern. When gold is plated with the aforementioned materials, it is sometimes thin (such as , 30-50 microinches) is suitable. The paper size is applicable to China National Standard (CNS) A4 specifications (2) 0 × 29 · / mm) —f ^ i I ^ —tlr-I nil—-J (please read the precautions on the back before filling in this card) 450017 A7 B7 DuPont Packing Cooperate with the Consumers of the Central Standards Bureau of the Ministry of Economic Affairs V. Description of the Invention (3) Various Problems and Restrictions and the Manufacturing of Spring Elements The technology is the same. For example, when the application requires most springs (intermediate interconnect elements) M — fine pitch (for example, 10 μ) pitch configuration, these procedures are limited. Such fine pitch is necessary for each spring The size (for example, in terms of M cross section) is substantially smaller (for example, 3) in the pitch. The punching area must be adjusted and will limit how much material leaves the spring to form a spring. Best, even if it can be quite straight Weighing springs as small as 1 free The small size forces the limit of the contact force that can be used by the spring as much as possible. This is particularly severe for arrays of spring manufacturing areas. In general, a specific minimum contact force is required to cause damage to sub-assemblies (such as terminals on electronic components) Reliable M-force contact. For example, a contact (load) force of about 15 grams (including as little as or less than 2 grams per contact and 150 grams or more per contact) can be guaranteed A reliable electrical connection is applied to a terminal of an electronic component, which may be contaminated by a thin film on its surface or cause corrosion or oxidation on its surface. Each strong spring requires the spring material's drop strength or the spring element's The minimum contact force of the size is increased. Generally speaking, the higher the yield strength of a material, the more difficult it is to use K (such as street beds, bending, etc.). And the requirement to make the spring smaller must be ruled out to make it larger in cross section. Another limitation of the accompanying conventional intermediate connection element is that when using hard materials (such as those that can be used to make springs), there must be quite &quot; hostile &quot; (e.g., high temperature) procedures, such as brazing, Come to install the intermediate connection components on the terminals of an electronic sister. For example, we all know that the flexible pins are brazed to the semi-conducting Russian packaging which is quite durable. This kind of "hostile" (please read the notes on the reverse side before filling out this page). Binding.-Chuanquan-This paper size is applicable to China National Standard (CNS) A4 (210X29? Mm) 45〇〇1 7 Λ7 --------- Β7 V. Description of the Invention (4) The program is generally unnecessary (and often not feasible) in the case of sister-in-law pieces such as semiconductor components that are indeed quite "fragile". of). Relatively ground wire bonding is an example of a fairly "friendly" procedure that is less likely to damage fragile electronic components than brazing. Soft selection is another example of a fairly "friendly" program. The problem with companion mounting of springs to electronic components is the main mechanical nature. If the spring is mounted on one end of a substrate (the purpose of which is to design this as a fixed object) • and it must respond to the force applied to its free end, the “weak soil joint” (weakest point • (In use) The point where the injection will be a spring (such as a base with a strong spring joint) connected to the substrate (such as a terminal of a subassembly).逭 Can be used as a reason for at least part of the 安装 to use a hostile Λ procedure (eg, brazing) procedure K to mount the spring on the substrate. Another difficult question about the intermediate connection element includes spring contact *. However, the terminals directed to the sub-assembly are not completely coplanar. Lack of certain mergers. Intermediate connection elements that adjust for these "tolerances" (total non-planarity). Hard-pressed joints are manufactured to conform to the terminals of the subassembly. Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the notes on the back and fill in this page). The following patents for paintings are as follows: 5,386,344, 5,336,380, 5,317,479, 5,086,337, 5,067,007 , 4,989,0 69 '4,893,172' 4,793,814 '4,777,564' 4,764,848 '4, 667,219, 4,642,889, 4,330,165, 4,295,700, 4,067,10 4, 3,795,037, 3,616,532' and 3,509,27 ❶.昍 台 昍 Therefore, one of the purposes of the present invention is to provide manufacturing sub-assemblies. * Especially this paper size applies Chinese National Standard (CNS) A4 (210X297 mm) 450 0 1 Α7 Β7 printed by the staff consumer cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. Fifth, the description of the invention (5) the technology of the intermediate connection elements of microelectronic components. Another object of the present invention is to provide an intermediate connection element for making contact with a sister-in-law piece. Another object of the present invention is to provide a technique for safely fixing an intermediate connection element with controlled impedance. According to the present invention, the technology of manufacturing intermediate quick-connecting elements, especially spring elements, and the technology of installing intermediate connecting elements to the sub-assembly. The costly technology overcomes the problem of making relatively small spring elements. • It can also use a sufficient contact force K to ensure a reliable intermediate connection. The disclosed technology also overcomes problems when mounting springs on electronic components such as half-diaphragm »components. According to the present invention, a composite intermediate connecting element is manufactured by installing an elongated element ("nucleus") on a sub-assembly, forming the core into a spring shape, and covering the core to strengthen the final composite intermediate. Element and / or from securely fixing the final composite intermediate element to the Xiaozi sister piece. As used herein, the term "spring-shaped M" refers to an elongated element of virtually any shape that will exhibit one of the elongated elements (top) as being rattan (restored) relative to the force marinated on the top. Move. This includes elongated elements that have one or more curved M and substantially straight elongated elements. Or, the core is shaped before being installed on a child piece. Or the core is installed or partially It is not a sowing substrate for an electronic component. The sowing substrate is removed after being shaped, and before or after the outer cover is reworked. According to one aspect of the present invention, the top surface of the calendar surface 1 has a different rough surface finish treatment. It is arranged on the contact end of the intermediate element. (See also the patent case 11 (Please read the precautions on the back before filling this page) Γ This paper size applies to China National Standard (CNS) Α4 size (210X297 mm) 4 5 0 0 1 7 Α7 Β7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs of the People's Republic of China. 5. Description of Invention (6) (A-11F). In one embodiment of the present invention, the nuclear system has a relatively low output intensity. "Soft" material, and outside Covered with a "hard" material with a fairly high drop strength. For example, a material such as gold thread is attached (eg, glycocalyx) to the bonding pads of half of the carcass element * and is covered (eg • Laihuahua Electroplating) M—hard materials such as nickel and its alloys. Relative to the "coarse" of the core, military and multi-calorie outer coating, with microprojections (see Figures 5C and 5D of the patent case) The outer covering and the outer covering extending the whole or only a part of the length of the shuttle are described. In the latter case, the top end of the core can be exposed in combination, and M is provided as a sub-assembly (see also the patent case). The connection point of the 5th). Generally speaking, the content described here * noun "plating" is used for several experiments covering the core. It is within the scope of the present invention * this Nuclear energy is covered by any suitable technology * including but not limited to: involving the deposition of materials from aqueous solutions, electrolytic thorium plating, thorium-free plating, chemical vapor deposition (CVD), physical vapor deposition (PVD), causing liquids, solids or vapors The process of decomposition, and all these are generally notified Different processes of similar materials. Generally speaking, it is more suitable for the child to use a gold material such as nickel. Electrochemical steps are more suitable, especially for electroless plating. In another embodiment of the present invention, a core is used. A slender element of the "hard" material family * inherently acts as a spring element and is mounted on one end of one of the terminals of the rafter assembly. The core, and at least the adjacent area of the rafter, is covered with M The material that fixes the core to the terminal will be strengthened in a while. This way, the core is not required (please read the precautions on the back before filling out this page) 'Binding-Bookmark This paper size applies to China National Standard (CNS) Α4 specifications (210X29? Mm) 10 Printed by Zhengong Consumer Cooperative, Central Standards Bureau, Ministry of Economic Affairs 4 50 01 7 A7 B7 V. Invention Description (7) Installed before the covering step * and less likely to damage the taste of electronic components It can be used to "tack" the nucleus at the tangent position M for the overburden action. These &quot; friendly &quot; steps include soldering, gluing, and threading one end of the hard core into one of the soft parts of the terminal. One of the first examples of nuclear systems is being exposed. An embodiment in which the core is a flat tap is also disclosed. The materials department, which represents both nuclear and external employment, was revealed. In the main text below, there is a technique that starts with a core that is quite chopped (low yield strength), roughly very small size (for example, 2.0 or less) or less. Soft materials such as gold, which are easily attached to semiconductor elements, generally lack sufficient elastic properties as springs. (This kind of soft and metallic materials mainly exhibits plasticity rather than elastic deformation.) Other soft materials that can be easily attached to semiconductor components and have strong properties are injected into non-fungus, such as the most elastic In the case of wood. In either case, the eaves and electrical characteristics of the box can be overlaid outside the core and given to the final coupling intermediate connection element. The final composite intermediate connection element can be made very small * yet exhibits a good contact force. Furthermore • several of these shuttle intermediate connecting elements can be arranged in a fine (for example, 10 »as) gap even if it has a length larger than the gap (for example, · 100 nfls) compound intermediate The connecting element can be manufactured with an ultra-small size, such as a "micro-strong spring" for connectors and sockets * having a cross-sectional size of 25 micrometers (tfm) or less. This manufacturing has a reliable intermediate connection with dimensions measured in micrometers instead of mils, which fully solves the existing intermediate connection technology and (please read the notes on the back before filling in the blind <) This paper standard applies to Chinese national standards (CNS ) Α4 specifications (210 × 297 mm) 11 4 5 0 0 1 7 Α7 Β7 Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (8) Development of future regional array technology. The composite intermediate connection element of the present invention exhibits superior electrical characteristics * including electrical conductivity, solderability, and low contact resistance. In many cases, the bias of the intermediate connection element relative to the applied contact force results in a "wi Ping" contact, which helps to ensure that a reliable contact is formed. An additional advantage of the present invention is that the connection system formed with the intermediate connection element of the present invention can be easily removed. In order to cause the sister-in-law to bury in the middle, the delay welding is optional *, but in general, it is not appropriate within the system standard. According to one aspect of the present invention, a technique is described as an intermediate connecting element with a controlled impedance. These technologies typically have a plutonium coating (eg, swimming), a conductive core, or an entire composite intermediate connection element (insulating layer) with a dielectric material, and a dielectric material overlying an external calendar with a conductive material. By grounding the conductive material of the outer layer, as a result, the quick coupling element can be effectively shielded, and its impedance can be easily controlled. (See also No. 10K painting in the case of Tongli). Based on one aspect of the present invention, the intermediate connection element can be pre-made into a single military unit for later attachment to an electronic component. The different techniques for accomplishing this are described here. Although not specifically covered in this document, it is necessary to install multiple individual intermediate connecting elements to a substrate or to suspend most individual intermediate connecting elements in an elastomer or a support base. The stoneware on the wood can be considered quite pure. It should be easy to understand that the composite intermediate connection element of the present invention is greatly different from the conventional coatings that have been used to strengthen concrete properties or strengthen the ability to resist corrosion (please read the precautions on the back before filling this page). This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) 12 A7 B7 4 50cm. 5. Description of invention (9) technology. The outer coating of the present invention pays special attention to Jia's strengthening and fixing of the intermediate connection element to the terminals of the ® subassembly and / or imparts the elastic characteristics to the resulting composite intermediate connection element. Stress (contact force) is the portion of the intermediate connection element that is specifically intended to absorb stress. One of the advantages of the present invention is that the procedures described here are based on "prefabricated" intermediate connection elements, such as on a sowing member, and then the intermediate connection elements are mounted on an electronic component. Compared with directly manufacturing intermediate connecting elements on the sub-assembly, the present invention reduces the period of time during the processing of electronic components. In addition, yield problems that may be combined with the manufacture of intermediate connecting elements can thus be separated from the subassembly. For example, • It is hypocritical to destroy a completely superior and rather expensive sacroiliac element on the other hand by an error in the process of manufacturing and installing the intermediate access element there. Installation of prefabricated intermediate connection elements on the «subassembly is fairly straightforward. • Proof can be obtained from the following. It should also be understood that the present invention provides novel techniques for manufacturing strong springs. Generally speaking, the operating structure of the fruit spring is a product of plating, not bending and fixing. This provides a wide range of materials for constructing the spring shape • and a variety of "friendly" procedures for attaching the core's "temporary support (falsowork)" to the sister-in-law's part. "Ship structure (superstructure)" functions outside the cover, both terms are derived from the field of civil engineering. Other purposes of the present invention. Features and advantages will become apparent from the following description. This paper size applies Chinese national standards ( CNS) A4 size (210X297mm) (Please read the notes on the back before filling out this page) Order printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 13 450 0 1 7 A7 B7 (5) References for the invention (10) Reference materials, which will be described in detail for the best practice examples in this case. The examples will be attached to M. Although the present invention will explain these better practice examples, I should It is understood that it is not intended to limit the spirit and scope of the present invention in these specific embodiments. The first A image according to an embodiment of the present invention * includes a tracking portion at one end of an intermediate connection element. Sectional view; Figure 1B is a cross-section 圔 of a longitudinal portion including one end of an intermediate connection element according to another embodiment of the present invention; Ring 1C is according to another embodiment of the present invention * including an intermediate connection Cross section of the longitudinal part of one end of the element: The first Dil is according to another embodiment of the present invention. A cross-section drawing of a susceptible part including one of the intermediate connecting elements. The first E-ring is according to another of the present invention. An embodiment. A cross-section of a facing part including one of the intermediate connecting elements. The second 2A circle is according to the present invention, which is mounted on a roller of a roller assembly. The cross section of the 2B wall is a cross-sectional view of the intermediate connecting element with a multi-die according to the present invention * One of the intermediate layers is an intermediary material; The 2C garden is based on the majority of the present invention installed to a The three-dimensional circle of the intermediate connection element on the electronic component (eg, the probe card is embedded); Figure 2D is an eaves section circle according to the present invention, an exemplary first step of the technology for manufacturing the intermediate connection element: Figure 2E is based on The hair • for the second intermediate connecting element made of Zhi (Read Notes on the back and then fill the page)

T This paper size is in accordance with Chinese National Standard (CNS) A4 (210X297 mm) 14 4 5 0 0 1 7 A7 B7 Printed by the Shellfish Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 5. Description of the invention (11) Exemplary further cross section; Figure 2F is a cross-sectional view according to the present invention, an exemplary first step of the second E-ring technology for manufacturing an intermediate connection element; Figure 2G is an experimental view according to the present invention. Sectional loops of a plurality of individual intermediate connecting elements manufactured according to the 2D-2F plaque technique; Figure 2H is according to the present invention. • Exemplary majority relies on 2D-2F garden technology and mutual M-specified space system. A cross-section of an individual intermediate connection element manufactured; 2I 圔 is a cross-sectional view of an alternative embodiment of manufacturing an intermediate connection element according to the present invention * shows one of the elements; FIG. 3A is based on the invention A cross-section of one embodiment of an insert; FIG. 3B is a cross-section of another embodiment of an insert according to the invention; FIG. 3C is another embodiment of an insert according to the invention Example sectional view; 4A root According to the present invention, in a preliminary step of manufacturing an insert, a top plan view of a soft metal foil; and Section 4B is a cross-sectional view of Section 4A of a soft gold raft in accordance with the present invention in a subsequent performance procedure step. Figure 4C is based on the present invention, in a subsequent program step. • A perspective view of the soft metal frame in Figure 4A; Figure 4D_ is a step in a subsequent program, according to the present invention, in Figure 4A. Soft metal foil as the figure between the two electronic components; (Please read the precautions on the back before filling out this page) This paper size applies the Chinese National Standard (CNS) Α · 4 size (210 X 297 mm) 15 450017 A7 B7 V. Description of the invention (12 The 5th A (a) is a top plan view of a gold foil in a preliminary step of manufacturing an insert according to one of the present invention instead of the real life; (5) The present invention * is in the step-by-step process of a post-mining process. • The vertical drawing of the soft gold foil of the 5th A circle; FIG. 5C is a three-dimensional circle based on the gold foil of the AB of the present invention; According to the present invention, in a post-mine process step, the fifth in a subsequent process step * 6A1I is an alternative embodiment of the insert between two sub-assemblies; 6A1I is according to an alternative embodiment of the present invention | In the initial step of a insert », a top plane 砍 of gold is cut; Circle 6B In accordance with the present invention, in the subsequent mining process step "Medium, the 6th round of the soft gold foil foil stand up; the 6C circle is the soft metal foil in accordance with the present invention, the drawing of the A»; Figure 6 D According to the present invention, in a subsequent program step, the sixth in a post-mine program step, the sixth (please read the precautions on the back before filling this page), π Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs The soft gold foil is used as an insert between the two sub-assemblies; Figure 7A is an example of the replacement of a cell according to the present invention. The top plane of 萡; Country 7B is an erection diagram of the soft gold foil of circle 7A as an insert between two electronic components in a subsequent procedure step according to the present invention; FIG. 8A is based on this Invention, a cross-section view of one particular joint manufacturing individual intermediate joint surgery; $ According to the present invention, another particular entanglement system Make individual intermediate connection elements: cross-section rings of ί;

This paper size applies the Chinese National Standard (CNS) A4 specification (210 × 297 mm) 16 V. Description of the invention (for) Α7 Β7 Printed by the Consumers Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs According to the present invention, a connector and a The cross-section ring of the rafter subassembly located on the right side of the connector. Who Invented? The aforementioned US Application No. 08 / 452,255 filed on 5/26/95 (the parent case) is incorporated herein by reference. This application note outlines several of the technologies disclosed. An important aspect of the present invention is that a composite intermediate element is formed to form a core (which can be installed on the core of the core assembly), and then the core material is covered by the core 俾: As a result, the mechanical characteristics of the composite intermediate connection element; and / or, when the intermediate connection element is mounted on a terminal of a sub-assembly, the intermediate connection element is securely fixed to the terminal. In this way, an elastic intermediate connection element (strong spring element) can be manufactured. Starting from a core of a soft material family, it can be easily formed into a spring-shaped bark and easily attached to even the most vulnerable Electronic components. In view of the fact that the conventional technique of forming spring elements from self-hardening materials is not easy to favor, and it can be demonstrated that counter-intuition, soft materials can form spring elements. Figures IA, IB, 1C, and 1D show * According to the present invention, the general shape of the K, the different shapes of the composite intermediate link. The following mainly describes the composite intermediate joint element of the elastic deer. However, it should be understood that inelastic composite intermediate connection elements are also within the scope of the present invention. Further, the following mainly describes a composite intermediate connecting element having a soft core (easy to shape | and easy to attach to the sister-in-law by a friendly program), and covered with a hard (elastic) material. However, the core can be a hard material. Please read the precautions on the back before writing this page. The paper size is applicable to China National Standards (CNS) Α4 specifications (210X297 mm) 17 450 0 1 A7 B7 Central Ministry of Economic Standards Duzhen Dun, Consumer Cooperation of the Bureau of Industry, V. Explanation of the Invention (14) The material also belongs to the scope of the present invention. The "inner * outer covering procedure" is mainly used to securely fix the intermediate connection element to the terminal of an electronic component. In circle 1A, the radon intermediate connecting element 110 includes a "soft" material (such as a core 112 having a material having a drop strength of less than 40,00 (1 psi), and a "hard" material (such as Material with a drop strength greater than 80,000 psi). The core 112 is an elongated (configuration) as a substantially straight cantilever, and may be a material having a 0.0005 to 0.0020 inch (0.001 inch = 1 mil N25 micron (Wm)) diameter lead. The shell 114 is based on any suitable procedure, such as an appropriate electroplating procedure (eg, by electroplating), onto the formed core 112. Figure 1A This may be one of the simplest spring-spring shapes for the intermediate connection element of the present invention, that is, a beam arm that is straight at an angle to the force "F" held at its top llflb. When this force is used by one of the «sub-assemblies" When the dumpling is marinated and added to an intermediate connection element, the top is distorted downward (as shown), and the top will be directed to the top. * · Use a "smear" action to move Meet the cricket. This smearing contact ensures a reliable contact is formed in the intermediate connection element And the contacted terminals of the sister-in-law piece. Because of its "hardness" and its thinness controls its thickness (0.00025 to 0.0 0500 inches), the shell 114 imparts a flexible elasticity to all the intermediate connection elements 110. In this way, a kind of indirect intermediate connection between electronic components (not shown) can be achieved between the two ends 110a and 110b of the intermediate connection element 110. (In the circle 1A, reference capture No. 110a refers to one end of the intermediate connection element 110, and the actual end relative to the end 11 Ob is not shown.) When contacting one of the electronic components, the intermediate connection element 11 applies this Chinese paper standard ( CNS) A4 specification (210X297mm) 18 (Please read the precautions on the back before filling this page) Order r ~~ 4 5〇00 7 Printed by the Central Standard of the Ministry of Economic Affairs, Cooper Cooperative, A7, 5. Description of the invention ( 15) Affected by a contact force (ffi force), as shown by the arrowhead marked "F". Intermediate connecting elements (eg, Πβ) will be biased in response to an applied force, and the bias (elastic energy) depends on how much In the middle of all connecting elements, The advantage (larger) of the covering material (relative to the material of the core) is the drop strength, K, and the thickness of the covering material. In the first drawing, the radon intermediate connection element 120 similarly includes a soft core 122 ( Comparison 112) and a hard shell 124 (Comparison 114). In this example, the core 122 is determined to have two bends, and can therefore be regarded as an S-shape. As in the example in Figure 1A, M this way * is located in The flexible intermediate connection element between the sub-assemblies (not shown) can be achieved between the two ends 120a and 12Qb of the intermediate connection element 120. (In the first drawing, the reference numeral 120a designates one of the cymbals * of the intermediate connection element 120, and the actual end relative to the end 120b is not shown). When contacting one of the terminals of the electronic component • The connecting element 120 is affected by a contact force (pressure). As shown by the arrow “F w.” In Figure 1C, the gas is connected to the middle element. 130 similarly includes a soft core 132 (comparative 112) and a hard shell 134 (comparative 114). In this example, the core 132 is determined to have a bend, and can therefore be regarded as a υ. As in circle 1A In the example · M this way • The elastic intermediate connection element located between the sister-in-law pieces (not shown) can be achieved between the two ends 130a and 130b of the intermediate connection element 130. (In the circle 1C, reference No. 130a shows a part of one of the intermediate connecting elements 130, and the actual end relative to Jing 130b is not shown.) When contacting one of the sister-in-law pieces, the intermediate connecting element 13Q receives a contact force (scratching Force), such as supplementary note that this paper size applies Chinese National Standard (CNS) A4 specifications (210X297 mm) (Please read the precautions on the back before filling this page) • H ^. 19 m 4 50 01 7 A7 B7 Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperative, V. Invention Description (16) Alternatively, the intermediate connection element 130 can be used by the lotus to make contact except at its end 130b. * As shown by the arrow "F". The first D rule has a soft core 142 and a hard core 144. Another embodiment of the elastic intermediate connection element. In this example, the intermediate connection element 140 is an absolutely simple beam arm (compare Fig. 1A) * which has a curved top 140b, which is subjected to a vertical action on it Affected by the contact force "F" of the step_. The 1st E group suspects another embodiment of an elastic intermediate connection element with a soft core 152 and -hard 154. In this example, the intermediate connection element 150 is roughly "C-shape" · It is best to have a slightly curved tip 150b, and it is suitable for pressure contact as shown in the arrow of the broadcast. It should be understood that the delay core can be easily formed into any springable shape • In other words, a shape that will bias a result composite intermediate connection element in response to a force applied to its tip. For example, the core may be set to form a traditional media shape. However, a loop shape Not suitable due to the full length of the intermediate connection element Accompanying electricity (or similar) and the adverse effects on the circuit when operating at high frequencies (speeds). The property of the shell, or at least one of the layers (described below) has a Obviously higher yield strength than core material. Therefore, the shell discolors the core in terms of establishing the mechanical properties (e.g., elastic energy) of the final intermediate bonding element. The ratio of yield strength to the core is preferably at least 2 : 1 * Including at least 3: 1 and at least 5: 1, and the ratio of M to 10: 1 is the same. It is also obvious that the external calendar should be overlaid like this or at least one multilayer tyti clothing II order- (Please read the precautions on the back before filling in this page) This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) 20 5 0 0 1 7 A7 B7 V. Description of the invention ( 17 The Central Government Bureau of the Ministry of Economic Affairs printed the core end of the Consumer Cooperatives. (However, in the case described in the mother case, the core of the 1 core is exposed. In this case, the core must be conductive.) From a theoretical point of view * only the elasticity of the final composite intermediate connection element (spring Shape) part is covered with M hard material. From this point of view, it is generally unnecessary to have both ends of the core covered. However, in terms of interpersonal issues, it is best to cover the whole core. The special reasons for the fixation (attachment) of the external review to one end of an electronic component and the resulting advantages are discussed in more detail below. Composite materials of nuclear (112, 122, 132, 142) include, but are not limited to: gold, aluminum, silicon, magnesium, and the like. The use of silver, palladium, platinum; metals or alloys of elements such as platinum group metals are also not feasible. Soft solders made of lead, tin, thallium, bismuth, cadmium, antimony and their alloys can also be used. Compared to attaching one of the nuclear (medium) plutonium to the puppet of a pupal element (discussed in more detail below), in general, it is easy to join (using temperature, pressure, and / or ultrasonic energy to achieve bonding ) Of any material (for example, gold) will simmer in the present invention. Any material that is easy to cover (for example, thorium plating), including non-metallic thorium materials *, can be used as a nuclear concept and is within the scope of this invention. Composite materials for the shell (114, 124, 134, 14 4) include (and, as described below, for a multiplicity of individual layers), but are not limited to: nickel, and its alloys; mesh, cobalt , Rhenium, and other alloys; gold (especially hard gold) and silver, both of which show the guaranteed current carrying capacity and excellent contact resistivity characteristics; platinum group elements; precious gold rhenium and others Alloy; stroke and molybdenum. In a situation where soldering is essential, tin, lead, and bismuth can also be used. Please read the precautions on the back before filling out this page. This paper applies the Chinese national standard {CNS) A4 size (210X297mm) 21 Ministry of Economic Affairs, Central Bureau of Standards, Industry, Labor and Cooperation, Du Duan 50 017 A7 _B7_ V. Invention Description (18), rhenium, and other alloys. The technique of burying these covering materials in the different nuclear materials mentioned above will inevitably vary depending on the application. Generally speaking, 霣 and 霣 -free 霣 plating are more suitable technologies. However, in general, the gold-plated core may be counterproductive. According to a working surface of the present invention, when the electroplating (especially electroless plating) is nickel-like on a gold core, a thin initial mushroom is first applied to the gold rod. Start. An exemplary intermediate connection element *, such as those shown in Sections 1 A-1 E 鼷, may have a core diameter of about 0.001 inches and a shell thickness of 0-001 inches. The intermediate connection element thus has a 0.003 inch The full diameter of time (ie, the core diameter plus twice the shell thickness). Broadly speaking * such thicknesses will be in the order of 0.2 to 5.0 (1/5 to 5) times the thickness of the core (eg, • diameter). Exemplary parameters of some composite intermediate connection elements are: (a)-a gold wire core with a diameter of 1.5 mils is determined to form a substantially C-shaped curved ridge with a full height of 40 mils and a radius of 9 mils (comparison Section 1 E) is a nickel plating of M0.75 mils (full diameter = 1.5 + 2x0.75 = 3 mils) * and can optionally accept a final overcoat of gold at 50 withdrawals (eg reducing And strengthen contact resistance). As a result, the coupling element in the middle exhibits a spring constant (k) of 3-5 g / mil. In use, a deflection of 3 to 5 mils will cause a contact force of 9 to 25 grams. This example is useful in terms of a spring as an insert. (b) —The gold core media with a diameter of 1.0 mil is shaped as a suspended tree with a full height of 35 mils and a curved shape. • It is suspected to be K 1.25 mils. The paper size is applicable to Chinese national standards (CNS 〉 A4 size (210X297mm) 22 ---------- Installation ----- 1T ------ ^ (Please read the precautions on the back before filling in this X) 450017 Α7 Β7 Printed by Shellfish Consumer Cooperative of Central Bureau of Standards of the Ministry of Economic Affairs. 5. Description of Invention (l3) (full diameter = 1.0 + 2X1.25 = 3.5 mils), and optionally accept the final mold plating of gold when 5fl withdrawal The result is that the intermediate connecting element has a strong spring constant of about 3 g / mil, which is useful for a spring element of a probe. (C) A gold core medium with a diameter of 1,5 is shaped. It is a roughly S-shaped curve with a full height of 20 mils and a radius of about mils. It is plated with 0.75 mils of training or feeding (full diameter = 1,5 + 2X0.75 = 3 mils) Ear). This result shows that the intermediate connecting element exhibits a spring constant (k) of about 2-3 g / mil * and is useful for a reed element mounted on a half-conductor element. As follows will be In more detail, the core does not require a round eave section, but can instead be a flat tap (which has a square cross-section) that extends from a piece. It should be understood that as the user uses herein, the term "tab" is not It is to be confused with the noun w TAB (Tape Automated Boding) ”. The second drawing hides an embodiment 200 of an intermediate connection element 210 installed on a sub-assembly 212 provided with a terminal 214. In this example, Medium * A soft (for example, gold) wire core 216 is joined (attached) to one end 216a of the terminal 214, which is constructed from a terminal extending from the terminal and has a spring-like shape (compare 1B garden), each having a Free end 216b. The joining, shaping and disengaging system in this way «is achieved using a wire bonding device. The bonding at the core 媾 216a covers only the mule 214-a relatively small exposed surface. A shell K is placed at the core of the line On 216, in this example, it shows K multilayers, with an inner layer 218 and an outer calendar 220, both of which can be plated and coated (please read the precautions on the back before filling out this page)-installed. The size of the paper used for the book is applicable to the Chinese national standard (C NS) 6 4 grids (210 × 297 mm) 23 4 5 Ο (Π γ Α7 Β7 Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. The invention description (2)) The sequence is appropriately applied. One of the more employed or The multi-calendar system uses K formed by a hard material (such as its alloy) to impart a required elastic energy to the intermediate connection element 210. For example, the outer layer 220 may be a hard material, while the inner WTW is a hard material When the material 220 is plated on the nuclear material 216, it acts as a material for a ringworm retarder or a barrier layer (either as an activation picture or as a cargo landing layer). Or • The inner layer 218 may be a hard material and the outer layer 220 may be a material (such as soft gold) that exhibits more gaseous properties including electrical conductivity and solderability. When soldering or yellow mesh soldering is required, the outer layers of the intermediate connection elements may be lead-cadmium solder or gold-tin yellow mesh materials, respectively. One end of Gumu leather 芊 h 2A circle K is shown in a rough way. Another main feature of the present invention is that the printed-elastic intermediate connecting element can be securely fixed to the terminal on the mold. The attachment end 210a of the intermediate connection element will be affected by considerable mechanical stress. As a result, a compressive force (rib number "F") applied to the free end 210b of the intermediate connection element. As shown in Figure 2A * The outer cover (i'Mk, 220) covers not only the core 216, but also the entire rest of the terminal 214 adjacent to the core 216 in a sloppy (non-disruptive) manner (ie, except for the junction Outside 216a) Storm® surface. This securely and reliably fixes the intermediate connection element 210 on the rafter. The covering material provides a substantial (for example, * greater than 513%) to the intermediate connection element that is fixed to the terminal. In general, only a portion of the adjacent core's terminals need to be covered with a covering material. However, it is generally more suitable to cover the entire remaining surface of the terminal. Preferably, each calendar of the shell is metallic. --------- Λ ------ Order ------ Good (please read the notes on the back before filling this page) This paper size applies to Chinese national standards (CNS &gt; A4 specifications (210X297 mm) 450017 A7 B7 printed by Zhengong Consumer Co., Ltd. of the Central Bureau of Standards of the Ministry of Economic Affairs 5. Description of the invention (21) As a general design • The nuclear laboratory is attached to a relatively small area of the terminal (eg, joint) The incomplete entanglement adjusts the stress due to the contact force ("F") forced on the resulting composite intermediate connection element. Due to the integral surface of the shell-covered rafters® surface (except that includes the core end 216a attached to the terminal Outside the small area of the attachment) * All the intermediate connection structures are firmly fixed to the hungry. The overlying adhesion and ability to respond to contact forces will exceed those of the nuclear plutonium (216a) itself as here User, the noun "锩 子 姐 ww (eg, 212) includes, but is not limited to, intermediate substrates and insert substrates; semiconductor crystal gardens and chessware, by any suitable semiconducting material department such as silicon (Si) or gallium arsenide (GaSa); product intermediate connection slot; test slot; 锇Components, components and substrates • As described in this case; semiconductor packaging • Ceramic ceramic and plastic packaging, and chip carriers; and connectors. The Zhuang connection element in the present invention is particularly useful as: ♦ directly install the intermediate connection element to the silicon chess piece * Eliminates the need for semiconductor packaging; the intermediate connection element extends like a probe from the substrate (described in detail below) for the test sub-assembly; and the intermediate connection element of the reference insert (described in detail below) The intermediate connecting element of the present invention is unique in that it can benefit from the mechanical properties (for example, high drop strength) of a hard material, without being limited by the typical poor joining characteristics associated with hard materials. As mentioned, the fact that this special sticky shell (overlay) acts as a "ship building" on one of the "temporary supports" of the core is very feasible. • Both terms are borrowed from the field of civil engineering. This greatly has- ------- Installation ------ Order ------ Quan (Please read the precautions on the back before filling this page) This paper standard is in accordance with Chinese National Standard (CNS) A4 specification (2! 〇X 297 mm) 25 450017 economy. A7 B7 printed by the Bureau Cooperative Consumer Cooperative Co., Ltd. 5. Description of the invention (22) The intermediate connecting element is different from the conventional technology, in which the tin plating system is used as a protective (such as anti-corrosion) coating calendar. It is generally impossible to impart the mechanical properties of the intermediate quick-connect structure. And this is indeed a significant relative to any non-metallic, anticorrosive uranium coating, such as benzotriazole that is connected to the electrical intermediate. (BTA). Most of the advantages of the present invention lies in the fact that a plurality of discrete intermediate connection structures are easily formed on the substrate, from different levels * such as a PCB with a decoupling capacity higher than one of the substrates. The heights, and their free degrees, are coplanar with each other. In addition, the electrical and mechanical characteristics of the intermediate connection element according to the present invention (e.g., plasticity and elasticity) are easily adapted to a variety of specific applications. For example, in a given application, the intermediate connection element may be supplemented to simultaneously exhibit plasticity and elasticity. (The plastic deviation may be required to adjust the overall planarity in the sister piece interconnected by the intermediate contact element when M is thin. When the intermediate action is performed, the intermediate connection element must generate a critical minimum contact force. Contact. It is also advantageous that the intermediate connection element forms a smearing contact with the terminals of a stack of sub-assemblies, due to the sudden appearance of a mixed contaminant film on the contact surface. Several characteristics are detailed in this case, including "but not limited to" Yu: making intermediate connection elements on a sacrificial substrate; transmitting most intermediate connection elements to an electronic component; providing intermediate connection elements with contact ends, preferably with a rough surface finish; using intermediate connection elements in a stack The sub-assembly M forms a temporary * then permanent connection with the electronic component; the intermediate building elements M are arranged to have different spaces at one of their ends and their opposite ends; the spring clip is manufactured in the same procedure as the intermediate connection element And counter-offering; using the middle ---------- ^ ------ 1Τ ------ ^ (Please read the precautions on the back before filling out this page) This paper size applies to China country Standard (CNS) Α4 specification (2Ϊ0 × 297 mm) 26 450017 Α7 Β7 Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Shelley Consumer Cooperative Co., Ltd. 5. Description of the invention (23) Connection elements to adjust the difference in thermal expansion between the connected components; exclude Consecutive layout of semi-concrete hip packages (such as SIMMs); and selective soldering of intermediary intermediate connection elements (difficult contact structure) ° Careful anti-resistance 2B image shows multi-calendar joints Connection element 22G. The innermost (internally elongated conductive element) 222 of the intermediate embedding element 220 is an uncoated core or an over-cored core as described above. The end 22 2b of the innermost 222 is M—suitable light Known by the Military Materials Division (not shown). A medium 224 is applied to the innermost 222 by electrophoresis steps. A 226 degree is applied to the medium layer 224. When used, the outer layer 226 is electrically grounded. This will cause the intermediate buried component 22 0 to have a controlled impedance. An exemplary material for the dielectric layer 224 is a polymeric material, marinated in any suitable thickness (eg, · 0.1-3.0 mils) in any manner. Foreign calendar 22 6 can be overemployed For example, in the example where the innermost 222 is an uncoated core, at least one layer of the outer calendar 226 is a spring material. When all the intermediate connecting elements are required to show the elasticity. The needle card is bundled in Figure 2C to show a Embodiment 23Q, in which most (six shown) intermediate connecting elements 231 ... 236 are mounted on one of an electronic sister piece 24Q ^-h_ surface, such as a probe card inserted To the vice assembly of a probe card). The inserts and conduction tracks of the probe card are excluded from this for the sake of clarity. 丄 ... Terminal 2… 236a starts at a first Gap (space), such as a 0 · 01 --------- f ------ ΐτ ------ .. A (Please read the precautions on the back before filling this page) This paper size applies to China National Standards (CNS &gt; A4 size (210X297 mm) 27 4 500A7 B7 Printed by the Central Laboratories of the Ministry of Economic Affairs of the Bayer Consumer Cooperatives. 5. Description of the invention (24) 0 inch gap . Intermediate connecting elements 231 ... 236 are shaped and / or oriented K and their free ends (tops) are within a second, finer gap, such as 0.005 inches. Indirect joints that form an intermediate joint from one gap to another are typically referred to as "spatial transformations." As shown • All the embodiments disclosed here * Although only one intermediate connection element can be displayed, the present invention can be applied to the manufacture of a plurality of intermediate connection components in a space M system configuration specified by each other, such as in a side game Figure or plaque on a square array. The use of a certain material has been discussed above for directly mounting the intermediate connection element to the terminal of the sister-in-law piece. Generally speaking, the intermediate connection element of the present invention can be manufactured on, or mounted on, a suitable surface of any composite substrate, including an instrument holder. Pay attention to the project, its description, for example, for the manufacture of 11A-11F, most of the intermediate quick-connection structure (such as the * elastic connection structure) as a separate and different structure for installation on the sub-assembly, and it is described in the 12th -12 C Mount a sowing substrate (carrier) and transfer the majority of the intermediate connection elements to an electronic component. Sections 2D-2F show techniques for manufacturing a plurality of intermediate connecting elements with a pre-molded end structure using a sacrificial substrate. The first step of the 2D editing technique 250, wherein a chess-type layer of the light military material 252 is applied on one surface of the sacrificial substrate 2 54. The sacrificial substrate 254 can be from a thin (1 to 10 mil) mesh or aluminum foil * depending on the example. The light military material 252 can be a common photoresist. The photomask employs the 252 series 镛 type as the opening with most 涸 (three shown) at the positions 256a, 256b, and 256c. At this point, I -------- seed coat -------- -IT ------ ^ (Please read the note ^^ on the back first, and then write it!) This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 28 4 50 0 1 7 Central Ministry of Economic Affairs Standard Bureau Shellfisher Consumer Cooperative Co., Ltd. printed A7 B7 V. Description of Invention (25) Intermediate connecting elements shall be made. Positions 256a, 250b, and 256c. In this example, they are comparable to those of the sister-in-law. The positions 256a, 2 56b, and 2 56c are better processed in the previous stage to have a rough or characteristic surface structure. As shown, this can be accomplished by forming a low drop at positions 25 6a, 2 5 6b, and 2 5Sc within the foil 254 in the manner of a 257M tool. Or the surface of the foil at these locations can have a surface structure by means of chemical etching. Any technology that accomplishes this general purpose is within the scope of this invention * such as sandblasting, hammering, and the like. Next, a large number of (leadingly shown here) 258 systems are formed at various positions (such as · 256 b), as shown in country 2E. This can be done with any combination of techniques such as electroplating, and can include end structures with multiple materials. For example, the end structure 258 may have a thin (e.g., 10-100 micro-in.) Barrier layer applied to the chain on the animal substrate * followed by a thin (e.g., 1 G micro-in.) Layer of soft gold. * Next is a thin (eg, 20 micro-inch) calendar of hard gold * Then a rather thick (eg * 20 (at 5 micro-inch)) of training • Finally, thin (eg, 10D 撖 inch) soft gold. Generally speaking, the first thin barrier nickel system is used to protect the post-history gold from being "poisoned" by the material of the substrate 2 54 (such as • aluminum, feed). • This fairly thick nickel layer system provides strength to Those who can easily join the end structure. The present invention is not limited to any item of how the end structure is formed on the substrate, because these items are different due to their unheard application. As shown in Section 2E, most of them are tilted (this display A) The core 260 for the intermediate connection element can be formed on the end structure 258. Such as relying on any technology that joins a flexible core to the terminal of the above electronic component. The core 26Q then ---------矣 ------ ΐτ ------ # 1 (Read the notes on the back of the poem before filling this page) This paper uses the Chinese National Standard (CNS) Α4 rule (210 × 297 mm) 4 500A7 B7 Printed by the Consumers' Cooperative of the China Standards and Quarantine Bureau of the Ministry of Economic Affairs 5. Description of the invention (26) W—It is best to use the hard gold 262 Μ as described above and cover it with light. The cover material 252 is then removed. As a result, most of the discrete intermediate connection elements 264 are mounted on the surface of the sowing substrate, as shown in Figure 2F. Μ — Similar to at least the terminals as described in Figure 2A ( 214) The outer covering material 26 2 securely fixes the core 2 6Q to its opposite end structure 2 58 and, if necessary, imparts elastic properties to the final intermediate connecting element 2664. As seen in the case of Lili, the majority The intermediate connecting element mounted to the base of the animal can be transmitted to the terminals of the sub-assembly as a group. Alternatively, two divergent paths can be used. As shown in Section 2G_, "by any combination of Step cost * Such as chemical selection * The seeding substrate 254 can be simply removed. Because most thin chemical etching steps will etch a material at a rate greater than that of other materials, and other materials can Slightly touched in this step • This phenomenon It is advantageously used to remove the thin nickel barrier calendar in the end structure at the same time as the sacrificial substrate is removed. However, if the thin barrier is to be removed, it can be removed in a subsequent etching step. This causes several (There are three &gt; individual connecting elements, separate and single intermediate connecting elements 204 · as indicated by virtual 266, and may be installed later (by means such as cutting or brazing) to the sub-assembly It can be mentioned that the covering material can also be slightly thinned during the process of removing the substrate and / or the thin barrier calendar. However, this situation is best not to occur. 0 In order to prevent external The thinning of the cover is better to use the thin gold calendar. Or, if the Chinese national standard (CNS) A4 specification (210X297 mm) is applied at about 20 paper sizes, 30 ---------- Pei-(Please (Read the notes on the back before filling out this page)

1T line 450017 Α7 Β7 Printed by Zhengong Consumer Cooperative, Central Bureau of Standards, Ministry of Economic Affairs V. Invention Description (27) • V The hard gold at the time of micro English is covered with about 10 inches of soft gold; Μ As the outermost layer outside the cover material 262 * The foreign employer who uses this kind of gold is due to its superior electrical resistance, contact resistance and solderability, and it is generally not affected by the use of κ to remove thin arrays and to be removed Influenced by the etching solution of the substrate. In addition, as illustrated in FIG. 2 (a), before removing the substrate 254 to be removed, any composite support structure 26, such as a thin plate with many holes, can be used; many (three of which are shown) connecting elements K Desired relative space h A positional relationship “fixed” • The hole on the plate to be removed will be removed. The support structure 266 may be a lining material or a mold-inducing material covered with a lining material. Further processing can be carried out (not specified); for example, many connecting components are mounted on a die part such as a silicon chip or a printed circuit board. In addition, in some applications it is necessary to stabilize the tip of the connecting element 264 (relative to the tip structure) and to avoid movement * especially when using a contact force, for this purpose, it is necessary to use a suitable sheet with many holes Material 268, such as a screen made of concrete, to limit the movement of the tip of the connecting element. The unique advantage of the above-mentioned technology 25D is that the pointed structure 258 can be made of materials that are desired in the world. And it can be of any desired structure. As mentioned above, the gold system has a good performance. Typical of precious metal alloys with II characteristics such as contact resistance, solderability and corrosion resistance. Since gold is also extensible * its special combination is used as the final cover marinated in any of the connection elements described here, especially the elastic connection elements described here * Other precious gold 靥 shows similar desires 霣. However, certain materials that demonstrate this excellent electrical durability are not compatible with externally connected connection elements. For example, * Ju is obviously fragile, and when it is covered as a strong connection element, it does not perform well. --East (please read the notes on the back before filling this page) This paper size applies to Chinese National Standard (CNS) Α4 size (210X297 mm) 31 m 4 50 0 1 7 A7 B7 Shellfish consumption of the Central Standards Bureau of the Ministry of Economic Affairs Cooperative cooperative printing V. Description of invention (28) * K is considered fi, M technology 250 is a typical technology to stably overcome such restrictions, for example • the first employment of multi-layered tip structure (see 258) can be thrown (non- The gold mentioned above) · rely on its excellent electrical characteristics for connecting electronic parts without affecting the mechanical behavior of the resulting connecting elements. Circle 2I illustrates another embodiment 270 for manufacturing a connecting element. In this embodiment, M is equivalent to the 2D picture on K. The technique described above applies a light material 272 on the substrate to be removed, and jk circles it so that it has many (shown among them A) Opening 276. In the area defined by these openings 276, K is used to manufacture connection elements in the form of discrete junctions. (If so far, explain the above, when it is joined to the end of the sub-component or the substrate to be removed Area * and when the opposite end of the connecting element is not joined to the rafter part or the substrate to be removed, a connecting element is "discrete".) By any suitable method | can cause the area in the opening, such as more than once Curling, as shown by a single ® line 278 extending into the surface of the substrate 274 to be removed. A core (line trunk) 280 is bonded to the surface of the substrate to be removed in the opening 27 6 and may be of any suitable shape * in this description * for clarity. Only one end of a connecting element is shown, ( (Not shown) The other end can be attached to a stack of parts. It can be clearly observed that the technology 270 is different from the previous technology 250 in that the nuclear system is directly connected to the substrate 274 to be removed, rather than the tip structure 258. on. «In this example, the M-Futuronic bonding technology · Gold wire core (280) S is solidly bonded to the surface of the aluminum substrate (2 74). In the next step of the method (270), it is included in the pressurized 28 卩 * on the core 280 and the exposed area of the substrate 274 in the opening 276 (eg, K species (please read the precautions on the back before Fill in this purchase) • Packing-• -0 Spring paper sizes are applicable to Chinese National Standards (CNS) A4 (21〇 乂 297 mm) 32 4 Printed by the Bayer Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5 0 0 17 A7 ___ B7 V. Description of the invention (29) Plating method) A gold mill 282. The main purpose of this layer 282 is to form a contact surface on the crotch of the obtained connecting element (for example, once the substrate to be removed is removed). After that, the layer 284 is coated with the same material as nickel 284 * As mentioned above, the main purpose of the calendar 284 is to add the desired mechanical properties (such as alkali properties) to the resulting composite connection element. In this embodiment, another main purpose of the layer 284 is to enhance the durability of the surface of the joint made on the lower end of the resulting embedded component. The final layer of gold can be placed outside of 靥 284, and M strengthens the electrical properties of the resulting connection elements ». In the final step, removing the light army material 27 2 and the substrate to be removed 2 74 results in many army-one connection elements (compare Fig. 2G); or many connection elements with predetermined space between them (compare 2B circle) . This embodiment 270 is a typical example of a technique for making a protruding contact tip in the crotch portion of a connection element. In this example, an excellent example of a "gold-clad nickel" contact tip * will be described. However, in the context of the present invention *, according to the techniques described herein, other analog contact tips can be made at the ends of the connecting elements. Another excitement of this embodiment 270 is that the contact tip is completely protruded on the substrate to be removed (274), instead of being designed on the surface of the substrate (254) to be removed as in the foregoing example 250. The main body using the intermediate connecting element of the present invention has been described above. In general, as used herein, an "insert w" refers to a substrate that has contact points on two opposing surfaces and is disposed between two sub-components and each electronic component. Note that an insert is required One of at least two sister-in-law's sister-in-law pieces was removed (for example, to replace, improve, and the like ---------- batch of clothes ----- 11-- ---- ^-(Please read the notes on the back before filling in this page) The paper size applies to the Chinese National Standard (CNS) A4 specification (2 丨 0'〆297mm) 33 4 5〇 &quot; A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (3) Purpose &lt; 〇 Figure 3A is a solid spot example 300 showing the use of the insert of the intermediate a connector of the present invention. Generally, a Insulating substrates 302, such as PCB-type substrates, are provided with a large number of penetration holes (e.g., plated channels) 306, 308, or the like, each having exposure to an insulating substrate. The top (upper) 302a and bottom (bottom) 302b surfaces of the material 302. A pair of soft cores 311 and 3 12 are penetrating holes 30 6 attached to the top surface 3Q2a of the substrate 3Q2. Part 霣. A pair of soft cores 313 and 314 are attached to the Sailu portion of the through hole 3D 6 on the bottom surface of the base 302. Similarly, a pair of soft cores 3 15 and 3 16 are attached to the substrate The exposed portion of the penetrating hole 3G8 on the top surface of 302, and a pair of soft cores 317 and 31 & A are attached to the portion B of the penetrating hole 308 on the bottom surface of the base 302. The core 311 ... 3 18 is then The outer layer is covered with a hard material 320M to form intermediate connection structures 322 and 324 on the top surface 302a of the substrate 302, and intermediate connection structures 326 and 328 are formed on the bottom surface 3D2b of the substrate 302. In this manner, corresponding The core 311 ... 318 is firmly fixed to the corresponding Sailu part of the penetration hole, and the intermediate connection structure 322M® is connected to the intermediate connection structure 326. The intermediate connection structure 3 2 4 is connected to the middle. Connection structure 328. It will be understood that by setting each intermediate connection structure (such as · 322) as a pair of intermediate connection elements (such as 322, 312), the external components (not shown) can be more reliable. Male connection (eg, compared to a single intermediate connection element). As shown, the intermediate connection element 31 The top groups of 1, 312, 315, and 316 are all formed in the same shape. K and the bottom groups of the middle connecting elements are the same ----------- world-(please read the note on the back first) Please fill in this page again) The size of the paper used for this edition applies to the Chinese National Standard (CNS) A4 specification (2 〖0X297mm） 34 Printed by the Bayer Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 4 5〇〇 1 η Α7 _! Z __________ 5 Invention description (31) Shape. It should be understood that the bottom group of the intermediate connection element can be provided with a different shape from the top group of the intermediate connection element * which will provide a mechanism for manufacturing a machine having a shape different from that of the intermediate connection element extending from the bottom surface of the substrate The meeting of the intermediate connection structure extends from the top surface of the insulating substrate of the structure. Fig. 3B of a character oil Fig. 3B shows another embodiment 30 using an insert of one of the intermediate quick-connecting elements of the present invention. In this embodiment, a plurality of (one shown here) intermediate connecting elements 332 are fabricated on a pattern (for example, an array) of a substrate (not shown) to be sown. A support substrate 3 34 is provided with a plurality of countersinks 336 in a pair of die designs. The supporting substrate 334 is placed on the intermediate connecting member 332 so that the intermediate connecting member 332 extends through the hole 336. The intermediate connecting element 3 3 2 is loosely held in the supporting substrate by a suitable material 338 (such as a strong concrete) and extends from the top and bottom surfaces of the supporting substrate. The sacrificial substrate was then removed ". Obviously • In the process of making this insert, the supporting substrate 334 (compared to 266) can be easily dropped by 44". In most installations on the sacrificial substrate (254) On the intermediate connecting element (Comparison 264). Inserting λ 物 营 3 3C_ series gun shows another embodiment 360 using one of the inserts of the intermediate connecting element of the present invention. This embodiment 360 is similar to the aforementioned one. Example 330 except that the intermediate connection structure 362 (comparison 332) is supported on the hole 366 (comparison 336) by relying on the electro-education 368 of the intermediate connection structure 362 to the through hole 366 of the supporting substrate. ， Supporting substrate 384 (Comparison 266) can be dropped simply and purely in the process of making this insert. The paper size is applicable to the Chinese National Standard (CNS) Λ4 specification (210 X 297 mm) 35 1-- ------ 1 ------, 1T ------ # * (Please read the notes on the back before filling out this page) Printed by the Central Standards Bureau of the Ministry of Economic Affairs and Consumer Cooperatives 4 50 0 1 7 A7 _____B7 __V. Description of the Invention (32) ”In most of the intermediate connecting elements mounted on the sowing substrate (254) (Comparison 266) . 3B and 3C show the fact that a single intermediate connection element (332, 362) can be used to complete a single connection of the corresponding dies of two electronic components. It should be understood and understood from the present invention that any conductive element can be used in place of the intermediate connection element of the present invention, as shown in Sections 3 and 3C. It should be understood that in the embodiments of the inserts of 3A, 3B, and 3C *, the sister-in-law piece (not shown) can be arranged on both ends of the insert (300, 330, 360), and the insert A radon gas connection is formed between the various crickets (not shown). Forming an intermediate pedestal piece from 上述 The above contents mainly focus on forming an intermediate connecting element from a flexible core, which is shaped and covered by a hard material. The present invention also relates to the formation of an intermediate connecting element, which is formed with a soft gold foil sheet K-shaped (such as by punching or etching) and covered with a hard material branch. The conventional technique of forming a connection structure which can be deformed in a vertical direction from a flat metal calendar made of an elastic material is illustrated *, for example, in USP 4,833,172 ("MATSUH0T0"). The HATSUMOTO case β is a circling flat strong spring made on a thin sheet of chain edge. The internal ridge of each spring is aligned with a hole through the insulating tab, which corresponds to the position of the wafer pole (32) and is soldered (31) to the pole. The outer ends of each of the springs are fixed to a thin plate and are connected to a substrate electrode (Kin solder) (41). The MATSUMOTO case of strong springs is manufactured by adhering a thin, flat strong spring material (copper, a Burmese alloy, or a composite metal) to an insulation. N 1 ^ — m ^^^ 1 n ^^^ 1 m ^^^ 1TJ • yfi (please read the precautions on the back before filling out this page) This paper size is applicable to the China National Standard (CNS) A4 specification (210X 297 mm) 36 4500 A7 B7 V. Invention Explanation (33) Printed by Shelley Consumer Cooperative of China Standards Bureau of the Ministry of Economic Affairs «. Sheets (Polyimide resin, glass, gas resin, glass polyimide resin, polyester resin, polystyrene containing quartz Amine resin, or a polyimide, a gas-containing resin containing a carbon fiber, or a polybasic grease). Then • Each hole larger than the spiral portion of the conductive flat coil spring that has been formed is formed on the insulating sheet material. Then, the flat spring material is photo-etched to form a spiral shape. Finally, the conductive flat strong spring is soldered to the corresponding chamfered electrode (32) and the substrate «pole (42). Some alternatives to this step sequence are described in the MATSUMOTO case (see, for example, lines 4 · 27-36), which include hot-press staking, brazing or welding instead of soldering. The preferred size of each spring is 10-40 μm thickness and 40-70 // m width (diameter). The spring structure described in the MATSUMOTO case consists of an inherently long conduction path between interconnected poles (32, 42), as described above, and this structure is not accessible to many applications. In addition, it becomes necessary to use a larger diameter spiral spring in the increased vertical direction (spring constant given by M). Furthermore, the device of the MATSUMOTO case merely establishes a single spring constant for each spring of all the intermediate connections between the sterns. It is obvious from the above that the present invention is easy to establish a first intermediate spring constant of a composite intermediate connection element (overlay core), the intermediate coupling element protruding upward and connected to a first ® subassembly; M and establishing a composite intermediate connection element (Outer core) A second spring constant that is not similar to the first spring constant, and the intermediate connecting element protrudes downward to connect with a second sub-assembly (for example, see 3AM). Generally speaking, for a given cover * and for covering all cores at the same time * the completely obscure spring rate is easily adjusted by the thin film to adjust the physical characteristics of the core element (eg, thickness, shape and many more). This paper size applies Chinese National Standard (CNS) Α4 specification (210 X 297 mm) ---. 1 '-----' Cai-(Please read the precautions on the back before filling this page) * τ Γ 450017 A7 B7 Shellfish Consumer Cooperatives of the China Standards Bureau of the Ministry of Economic Affairs. This concept is promoted by the following examples.醍 Buttocks Example 1 The 4A, 4B, 4C, and 4D sides illustrate the technique of making an insert using M according to the present invention. In the 4A exposure, it shows that a flat, thin (such as 0. 0 G1 — 0 · Q 05 hours) soft sheet of gold (for example, gold, soft mesh alloy, soft aluminum alloy) sheet 402 is shaped (such as By punching or etching), the majority of the elongated elements 404, 406 (herein shown in Fig. 2) described at the boundary of K. Each elongated element has a middle portion and two lanthanum portions extending from the middle portion in the plane of the sheet. As shown in Figure 4B, a layer of photomask lining 408, such as a photoresist, is applied to a thin layer of soft gold foil outside the area of the elongated elements. The crotch portion of each elongated element is flat relative to the laminae. One end 404a of the elongated element 404 is bent in a single direction (upward * as shown) by forming a tap extending upward from the sheet 402. The other end portion 404b of the elongated element is bent in a direction opposite (downward as shown), and K 借 is formed into a tap extending from the sheet 402 to the bottom of the sheet. Taps (404a, 4 0 4b) can be extended from the sheet to virtually any box distance 雠 • for example 5-100 mils · K for microelectronic applications. The shape of these taps (404a, 404b) can be independently controlled by the bending step. Therefore, the taps extending upwards have the same or different shapes as the taps extending downwards. It should be understood that the taps can be formed in the same steps as the shape of the elongated element, and that these steps can be performed using conventional equipment. As shown in Section 4C 圔, an absolute calendar (dielectric) supports the calendar 410 * Thin layers (瞑, plates) such as 铥 (Tm) or polyimide · with IIIIII ϋ IH line f (Please First read the notes on the back and then fill out this page) This paper size applies to Chinese National Standard (CNS) A4 (210 X25 * 7 mm) 4 50 Ο 1 7 Α7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs ^ _ B7 V. Description of the invention (35) A plurality of holes 4 12. The insulating sheet 410 is placed on the soft metal sheet 402. Therefore, the holes 412 are aligned with the taps on one side of the sheet relative to the mask material, and a suitable adhesive (not shown) is fixed to the soft gold. On thin slices. The insulating thin film in this embodiment and the following embodiments can be a technology having a coating of a dielectric material. The trim assembly is then covered with a hard material 4 12 such as nickel and its alloys. The supporting sheet 4 10 and the mask material 4 08 ensure that only the elongated elements are covered with the hard material. Finally, the light military material 408 is stripped, and the soft metal that has not been covered is removed by, for example, a selected chemical etching method. . Alternatively, the intermediate connecting element may exhibit a good contact resistance characteristic, such as a material of gold and an outer cover, at a later completion step. This results in an intermediate connection structure with composite intermediate connection elements (overlay taps) extending from its top and bottom surfaces. * As shown in Figure 4D, each of the upwardly extending coupling intermediate connection elements has a role to play. And is connected by a coil (402) to one of the relative taps which also serves as a downward extension of the desired product * each of the composite intermediate connection elements is sufficient to impart a required contact force (such as * 15 g) to a The e-sister piece is for the sister-in-law. This way * an insert 400 can be obtained, which has two tips for connecting a terminal 420 of a first electronic component (not shown) to a terminal 422 of a second sub-assembly (not shown), and can be obtained One is a second intermediate connection structure used in an insert, and the structure has two tips for connecting the terminal 424 of the first sub-assembly (not shown) to the corresponding terminal 426 of the second electronic assembly (not shown). Use. ---------- Batch clothing ----- 1T ------ ^ (Please read the precautions on the back before filling out this page) The paper size applies to China National Standard (CNS) Α4 Specifications (210 × 297 mm) 39 4 500 1 A7 B7 Printed by the Male Workers Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the Invention (36) The fourth 4D shows an intermediate connection structure 400, which is composed of an elongated element 4 16 Formed, M is covered with the same material 412 in the manner of forming the aforementioned intermediate connection structure. The elongated element 416 is longitudinally aligned with the elongated element 406 at a distance, and the elongated element 404 is laterally aligned with the long-length element 406 at a distance, indicating that the intermediate connection element can be arranged in a K array. The space between adjacent slender elements will be described in more detail for the 7A and 7B circles. One of the advantages of this technology, and the technology that will be apparent later, is that a soft, non-elastic gold foil that can be easily formed (weighing bed and shape) can be coated with K, and M—like a soft palate core. Set and cover M to show a diffusive way, showing strong elastic properties. A fixture can perform the function of the photomask during an overcoating (eg, plating) procedure, and making the photomask material a non-essential technical level is within the technical scope of the present invention. A plurality of intermediate connecting elements may form a corresponding contact structure, and then be supported in the vicinity of each other such as a support sheet *, which is also within the technical scope of the present invention. -In general * the supporting layers (410) are in a prescribed relationship with each other, such as K-vertical (X * y &gt; array horizontal, supporting most of the intermediate connecting elements. The supporting layer may be flexible * as described above, Or it can be rigid (for example, * such as a ceramic magnet creator). A flexible support calendar has a good adhesion that allows the anchored intermediate connecting element to "float" in a certain vertical position. Surface differences (tolerances) of electronic parts. This main deer will be described in detail when discussing Figures 7A and 7B. Example 1 tt 2 .1. N I n. N ^ line * (please first Read the notes on the reverse side and fill in this page] This paper size is applicable to China National Standard (CMS) A4 (21 ο X 297 mm) 40 Printed by the Staff Consumer Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs Α7 Β7 V. Description of the invention ( 37) Circles 5A-5F show alternative techniques for making an insert from a flat sheet of metal. As shown in circle 5A, a flat sheet of gold (for example, feed) is cast (eg, foil) into a shape (street Bed, etch, or the like) 俾 has opposed elongated elements 504 and 506, And so on are substantially adjacent to each other and parallel. The bottom ends of the elongated elements 502 and 504 are held by a ring 506. K A similar to the 4A-4D embodiment, one of the elongated elements 504 is curved « Taps bent in one direction, and the other one is bent into a tap in the opposite direction, resulting in the configuration shown in 5B (compared to 4B 圔). As shown in 5C_ A mask material 510, such as a photoresist, is applied to the sheet 502, outside the area of the ring 508 and the elongated elements 504 and 506. The sheet 50 2 is then coated with an outer S (eg, plated) K—a hard gold ring material ( Such as nickel or its alloy) 512, use K to convert the taps (shaped elongated elements 504 and 506) into intermediate connecting elements that function as ® springs. Then • The mask material 510 is moved by an etching method such as buried In addition, it results in the insert structure 500 shown in country 5D * which has a composite intermediate connection element of the upper finger and corresponds to the composite intermediate connection element of the lower finger, and the intermediate connection element of the upward and downward clamps both function as Cantilever, each foot K imparts a required contact force (eg, 15 grams) to the pair of electronic components皤 子。 In this way, you can get 500 inserts * It has two brackets, which is used to connect the 52DS of a first daughter module (not shown) to a second ® daughter (not shown)皤 子 522。 This paper size uses Chinese National Standard (CNS) A4 specifications (210X297 mm) 41 I --.------------ 1T ------ &amp; (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperatives of the Central Procurement Bureau of the Ministry of Economic Affairs 4 500 1 7 A7 _B7_ V. Description of the invention (38) Example of the 4A_4D circle as a universal design 400 is better than Example 500 of the 5A-5D garden. Example of the joint arm ί 3 As shown in Figures 6A-6D, a similar one (for example, for the previous embodiment for 5A-5E painting) • K can be formed against a soft gold coil 602 There are two parallel (side by side) elongated elements 604 and δ06, which share a common bottom 608. One of the elongated elements 60 4 is bent into a tap that extends in one direction, and the other of the elongated element is bent into a tap that extends in an opposite direction, resulting in a group as shown in FIG. 6B State (compare Fig. 5B) ° As shown in Fig. 6C, a suitable mask material, such as a photoresist 610, is applied to the sheet 602. In the elongated elements 604 and 606 and their common bottom 608 area, outer. The sheet 602 is then covered (eg, “plated”) with a hard gold (such as nickel or its alloy) 812, and “M” converts the taps (shaped elongated elements 604 and 606) into intermediate connecting elements that function as springs. . Then • the mask material 61Q was removed by a method such as a determined etching method • and all non-covered (by 612) soft metal (60 2) was removed | resulting in the insert structure shown in 6D1I 600 * It has a coupling intermediate connection element of the upper finger and corresponds to a coupling intermediate connection element of the lower finger, and the intermediate connection element of the upward and downward fingers both act as cantilevers, and each foot κ imparts a contact force of a shop (For example, 15 grams) to the opposing terminal of an electronic component. In this way, an insert 6QQ can be obtained, which has two ends for one --- I;-I ---- wood ----I- ~~ order (please read the precautions on the back before filling this page ) This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) 42 450017 A7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (39) The first sub-assembly (not shown) The terminal 620 is connected to a corresponding electronic device 622 of a second electronic component (not shown). Although not shown, most intermediate connecting elements can be «fixed to—such as supporting pieces with a plurality of holes" and arranged on a thin horizontal ring (such as a rectangular array). As shown in 4CB. "Mei Cheng" as an example, for example, the embodiment of Figures 4A-4D. Obviously, the original length of the slender element (404, 406) (before bending) establishes a limit on how well the tap can extend from the sheet, in other words , Which is the limit on the length (and / or height) of the coupling element in the result. As used herein, the term "length" generally refers to the shape of an elongated element (if there is a track size before &gt; The term "height" generally refers to the stepwise size of the elongated element (and the final intermediate connecting element) after shaping and coating. For the reasons discussed in this document, these terms are generally replaceable. As described above, • A region of microelectronics is considered to be desirable for fabricating an array of intermediate connection elements with a fine gap of 0.010 inches (10 mils) between adjacent intermediate connection elements. However, It can also be desirable for each intermediate connection element to have a height of 50 mils, 100 or more. See circle 4D, which can be seen in the middle of the intermediate quick-connect structure (for example, 40 6, 416) 10 Mil space Such a height of the middle tensioning element is physically impossible. Figures 7A and 7B show the technology for overcoming material limitations according to the present invention. ----- 1T ------. ¾ ^ an | (Please read the notes on the back before filling in this page) This paper size applies to China National Standard (CNS) A4 (210X297 mm) 43 4 5 0 0 1 Α7 Β7 Printed by the Consumer Cooperatives of the Central Government Bureau of the Ministry of Economic Affairs 5. Description of the Invention (40) Country 7A shows a flat sheet of soft material 702. A single elongated element 704 (compare 404, 504) , 604) 僳 is formed on the sheet 702, and is bent in one direction (downward, as shown) * to form a tap that extends downward from the sheet 702. Because, as mentioned above, we expect to have a considerable length but Intermediate connecting elements arranged closely to each other, the core 710 is then attached to the upper (as shown) surface of the tap, near the free end of the tap *, and is shaped to have a resilience. The core can have any (For example * comparing the shape shown in circle 1B) and can be of virtually any desired length * And a gold bonding wire is connected to the tap together. As shown in Section 7B, the final fibrillation system of the tap 7D4 and the core 71 0 is covered with a hard material section 712 such as suspicion and its alloy. Nuclear 710 Roughly (eg, at ninety degrees) extends to the surface of tap 704. In this way, an intermediate connection structure for an insert can be obtained, which has two ends for a first electronic component The terminal 720 (not shown) is connected to a terminal 722 corresponding to one of the second sister-in-law pieces (not shown). The tap (the outer shell is plated with the elongated element 7Q4 of the material section 712) serves as the core 710 A "suspension support", and also a scissor tip at the lower end of the core (as shown). This is advantageous, especially for applications that require intermediate building elements to adjust the total deviation in coplanarity of the terminals of an electronic component to be contacted. For example, an electronic component may have a non-planar surface. In this case, the terminals of the sub-component (eg, 722) will be at different positions on the “ζ” (vertical) axis. The two structures act to regulate this non-planarity. First ---------- Install ------ Order (please read the precautions on the back before filling this page) This paper size adopts China National Standard (CNS) Α4 specification (21〇 × 297) (Centi) 44 4 5 〇 0 t 7 Α7 Β7 Employees' Cooperative Cooperatives of the Ministry of Economic Affairs of the Central Bureau of Commerce of the People's Republic of China Imprint 5. Description of the Invention (41) First, the tap (704) can easily be used to adjust these irregularities (positional tolerances) ) * While allowing the intermediate connection element 710 to establish a relatively strong and predictable elastic force between the two interconnected electronic components. The second * outer core can also exhibit a combination of plastic and elastic deformation. Plastic deformation regulates the non-planarity of the terminals on the electronic component. Therefore, the overlying elongated element mainly functions as a suspension support for the overlying elongated element 710 without making a considerable contribution to the contact force used by the overlying elongated element 710, even if it is harder than An overlying elongated element 710. (Comparing the diffuse support 338 of Example 330 of Plaque 3B). Alternatively, the elongated element 7D4 may be substantially entirely covered by the light army (for example, this is more than the mask material 510 of the 5C garden), so that the elongated element 704 acts on the force formed mainly by plastic deformation rather than strong deformation | reaction. In this respect * this alternative structure will bear some (limited) functional similarities to the embodiment shown in Figure 3B. The slender element 70 4 is partially or completely covered by a mask. Although it is necessary to control the outer material Π2 formed on it, it is necessary to adjust its physical characteristics * to be employed within the scope of the present invention. Obviously • The embodiment of FIGS. 7A-7B can make the intermediate quick-connecting element M-fine (such as &gt; 10 mil) gap, but it has a length and extension to a gap larger than 逭 (such as · 1D0 Mils). The core (71Q) can be mounted on a flat coil spring at one end, such as the flesh end of a spiral spring as shown in the aforementioned USP 4.893.172, which is contained in the scope of the present invention.馎 诰 Inexpensive Draw Elements 8A and 8B_shows the technology for manufacturing corresponding intermediate connection elements. (Please read the precautions on the back before filling out this page) This paper size is applicable to China National Standard Vehicle (CNS) Α4 specification (210 X 297 mm) 45 edited by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs, printed A7 B7 V. Invention Description (42) Such as the "Mizun contact" of most of these components, and automatically These sisters are assembled into a shuttlecock assembly such as a semi-conductive cross-member or insert as a supporting substrate. Circle 8A shows a technique 80 0, in which a flat sheet (foil) 80 2 such as a soft-feed material is formed into a plurality of (this shown one) slender elements (tap) 804 by street bed, etching or the like. . The elongated member 804 'is then formed into a shape having a spring. Each of the elongated members 80 4 has a bottom portion 804a, which is actually a residual (residual) portion of the sheet 802, and it is preferably allowed to remain coplanar with the sheet 8Q2. Each elongated element 804 has one end (top) 8Q4b at the opposite end of the elongated element 804 from the bottom 804a. The elongated element 804 is bent in the area 804c between the top 804b and a portion 8 (Md) adjacent to the bottom 8Q4a * to have any shape entangled with a strong spring. Suitable photomask materials 806 · such as photoresist, Naishi On the second support of the sheet 802, it is included (as shown) on the bottom 804a of the elongated element 804, leaving the "operable" part of the elongated element 804 unmasked. The element is then clad with a combination of materials 8Q8. It is determined as the ability to impart ® properties to the final intermediate connection element, as described above. The clad material can optionally cover the bottom 804a of the elongated element 804. Guangjun Material 8Q 6 is then removed, such as by buried etching. This results in a large number of corresponding composite intermediate connection elements that can be mounted on a sub-assembly or supported by a fixed element. The bottom (804a) is connected to a predetermined space (for example, a line) from each other supporting the substrate. Alternatively, most of the intermediate connecting elements formed according to this technology can be supported by an elastomer in an array. --------- 1 clothing ------ ir ------ ^ (Please read the back first Note: Please fill in this page again.) This paper size is applicable to China National Standard (CNS) A4 (2 丨 OX297 mm) 46 4500 0 A7 Β7 Printing policy of the Bayer Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (43 ) Section 8B shows another technique 8 513 · In which a flat sheet (萡) 852 such as a soft mesh material is punched, etched, or the like to form a plurality (this shows six) of elongated elements (tap) 854. The elongated element 8Q4 is set to have the shape of a spring. The split head 854a is comparable to the bottom 904a in the previous embodiment 800. In this example 850, the sheet is weighed so that the bottom 854 a are all connected to each other. The "bridge" 85 6 shown is for illustrative purposes only. The slender element can be shaped during or after the weighing bed. The slender element 854 is fixed to have a spring shape, and then the quilt Cover with a suitable material (not shown), as described above. The outer cover (not shown, as described above) is best applied while the elongated elements are still interconnected with each other * and any photomask material is applied Include a majority in a final step The thin sheets of connected, overlying elongated elements are further punched to separate (separate) the overlying and overlying elongated elements from each other. As in the previous example 8Q0, this technique 850 causes the knife to have multiple opposing intermediate connecting elements, They can be mounted to a sister-in-law piece, or they can be supported in an array by the bottoms that hold them together. Alternatively, most intermediate connection elements formed according to this technique can be suspended in an array by a body Medium.

Fig. 9 shows another advantage of using the above-mentioned materials to manufacture an intermediate connection element from a thin sheet of soft gold, which has been coated with M-hard material. «The connector 900 includes a plastic base 902 and a plurality (showing two tilts) for the intermediate connecting elements 9 04,306 in the connector body 902. Each intermediate connecting element (902, 904) M—Similar to the above-mentioned 4A-4D. The paper size applies the Chinese National Standard (CNS) A4 specification (2ΙΟ × 297 mm) --------- install --- --- Order ------ 涞 (Please read the precautions on the back before filling this page) A7 45001 7 _B7_ V. Description of the Invention (44) The way of inserting characters in the garden is made. That is, a soft gold 羼The sheet 910 is sickle-shaped and shaped to have a specific shape, and is covered with a long K-hard material 912, which provides the mechanical properties (such as elasticity). As in the previous example, a final layer (not shown) of a material family with outstanding radon properties (such as • gold) can be applied to the overlying intermediate connection element. The connector 900 is accommodating another mating connector or electronic component, such as the one shown in the figure, which has pins 924 and 926 extending from the surface, and the pins 924 and 926 are inserted into the intermediate connecting element 904, respectively. And 306. As mentioned above, the present invention is very different from the conventional technology, in which an overlying beta is used to impart the required mechanical properties (such as • elasticity) to another non-differential, easy-to-form, and uninterrupted intermediate connecting element. (Contact structure). In the know-how • Tu calendars (including Jinxiao plating) are mainly used to strengthen the electrical characteristics of intermediate connection components * and prevent corrosion. The intermediate connection element can be made "on its original position" on the electronic component, or "prefabricated" for subsequent mounting on the electronic component. Although the present invention has been shown and described in detail in the drawings and the foregoing description, it is provided for illustration rather than limitation on characteristics. We should understand that only the preferred embodiments have been shown and described, and all changes and modifications from the spirit of the invention should be protected. Undoubtedly, those skilled in the invention of the present invention will think of many other variations of the above-mentioned "master", and those who are disclosed are intended to be within the scope of the present invention. These changes are described in the mother's case. This paper size applies the Chinese National Standard (CNS) Α4 specification (210X297 mm) (Please read the precautions on the back before filling this page) Set the consumption of employees of the Central Standards Bureau of the Ministry of Economic Affairs Printed by the cooperative 48 A7B7 Amendment: Ming Ming. V. Description of the invention (45) Component number comparison table Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economics Printed 110 Electrical intermediate connection parts 114 Shell 122 Core 130 Electrical intermediate connection elements 134 Hard shell 142 Soft core 150 Intermediate connection element 154 Hard shell 212 Electronic component 216 Wire core 220 Outer layer 222 Inner slender conductive element 226 Outer layer 240 Electronic component 254 Sacrifice substrate 258 Pointed sacrifice structure 262 Cover material 2 56 # Structure 272 Mask material 276 Opening 280 Core 284 Material layer 30Γ), 3 08 Penetration hole 320 Hard Materials Division 112 Core 120 Intermediate connection element 124 Hard shell 132 Core 140 Intermediate connection element 144 Hard shell 152 Soft core 210 Intermediate connection element 214 I. UJ ~ Γ 218 Inner layer 220 Figure 2 Β Intermediate connection element 224 Dielectric layer 231 ··· 236 Intermediate connection element 252 Photomask material 257 Pressure Flower Tool 260 Core 264 Intermediate Connection Element 268 Sheet 274 Substrate 278 Army One Compressed 282 Gold Layer '302 Insulating Substrate m ... 3 18 Core (Please read the precautions on the back before filling this page) -40-Paper method Quick Speed Standards Chinese National Standard (CNS) A4 Specification (2 [0 × 297mm) ^ • SQOi? A7 B7 V. Description of Invention (46) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 322 · 324, 326, 323, 332 Intermediate connection element 334 Support substrate 336 Perforation hole 333 Material 362 Intermediate connection structure 364 Support substrate 366 Penetration hole 368 Plating 300-330, 360 Insertion 31 Soldering 32 Wafer electrode 41 Soft solder 42 Substrate electrode 400 Intermediate connection groove (insert 402 sheet 404, 406 elongated element 408 mask material shake 410 insulation layer support layer 412 most M holes (hard material Ϊ 41 2 416 elongated element 420 422, 424, 426 Terminals 5 0 0 Inserts 502 Sheets 50 4 506 Slim elements 510 Photomask material 512 Hard metal materials 520 '522 Terminals 600 Inserts 6 02 Soft metal wire coils (sheets) 60 4, 606 Slim elements 608 Bottom 610 Photomask material (Photoresist) 612 Hard metal material 6 20, 622 Terminal 702 Flat thin Η 704 Slim element 710 Core 712 Cover material (hard material) 720 '722 Terminal 802 Flat thin Η (Foil) 804 Slim element ( Tap) 806 Photomask material 808 Material 852 Flat and thin 箔 (foil) 8S4 Slim 7t pieces (Tap ί 85Β Bridge 900 Connector 902 Connector body 904 &gt; 9 Of) Intermediate connection elements (Please read the note on the back first Please fill in this page for more details) This paper's standard is applicable to Chinese National Standards (CNS) M specifications (2⑴X 297mm) 4 50 CM 7 A7 B7 V. Description of the invention (47) 910 Soft gold shock sheet 920 Electronic component 912 哽 材 科 924 '926 then (Please read the notes on the back before filling out this page)

-1T Printed by the Central Bureau of Standards of the Ministry of Economic Affairs and printed by a consumer cooperative. The paper standard is a universal ten-country national standard (CNS). A4 (210 × 297 mm)

Claims (1)

4 50 0 1 t. Application for Patent Scope Revision of Patent No. 85105623. Revision of the scope of patent application (锖 Please read the precautions on the back before filling this page) Date of amendment: April 1990-A manufacturing for microelectronic applications A method of intermediately connecting components includes: providing a core of a relatively soft material; and covering the core with a shell of a relatively hard material, wherein the core is a joint patterned by a metal sheet. 2. A method for manufacturing an insert, comprising: forming an intermediate connection element such as two joints on a first sheet, the intermediate connection element having a first joint and a second joint; bending such A joint whereby one of the two joints extends from the sheet in a first direction, and thereby the other of the two joints extends from the sheet in a second direction; with a drop strength higher than the The second material of the first sheet covers the joints. 3. The method according to the second item of the patent application scope, further comprising: providing a plurality of intermediate connecting elements; and the consumer goods cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs uses an insulating sheet to support the majority with a spatial relationship between each other Intermediate connection element. 4. The method according to item 2 of the patent application scope, which is ten: Before folding the joints, the first joint is longitudinally aligned with the younger one. 5. The method of claim 2 in the scope of patent application, wherein: before the joints are bent, the first joint is parallel to the first joint. 45〇〇ι7 6. Scope of patent application Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 6. The method of claim 2 in the scope of patent application, wherein: before bending the joints, the first joint of _J is parallel to the second joint, and the joints share a base 7 ·- A method of manufacturing an intermediate connecting element, comprising: forming a first-sheet material-as a second-extension element of a joint, the joint having a free end; and mounting the first end of the first extension member on The free end of the joint, the second extension element has a second end, the second extension element is made of a second material; and the third material is covered with a third material having a higher drop strength than the second material The second lengthening element and at least one adjacent part of the first lengthening element-8. if the method of claim 7 of the patent application scope further includes: covering the entire first lengthening element during the period of covering the second lengthening element . 9. The method according to item 7 of the patent application scope, further comprising: mounting the first ends of most of the second extension elements to the free ends of most of the joints. 10. The method according to item 9 of the scope of patent application, further comprising: arranging the plurality of joints in a spatial relationship with each other a 11 · —a kind of elastic intermediate connection element with controlled impedance for manufacturing for use in microelectronic applications The method includes: forming an internally elongated conductive element to have a shape of a spring; the paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 g t), ^ --------- order --- ---- 1-Wire 琦 (Please read the notes on the back before filling this page) 450 0 1 7 A8 B8 C8 D8 The scope of patent application is to apply a dielectric material on the internal component; a conductor Material is overlaid on the dielectric material layer. 12 'The method according to item ^ of the scope of patent application, wherein: the internal element includes a core of a material having a yield strength; the core is covered with a material having a sufficient thickness and a sufficient yield strength' the yield strength of the cover material Larger than the core, the resulting intermediate connecting element has a desired amount of elasticity. 13. —Ten connection elements for microelectronics, including: a core made of a soft material; a hard material located outside the core; where * the choice of the hard material is based on the intermediate connection obtained The element has the ability to be elastic, and the core is a joint formed from one piece of material. 14. A method of manufacturing individual spring contact elements, comprising: patterning a sheet to have a plurality of extension elements, each extension element having a tip and a base portion opposite to the tip; each The extension element is shaped so that the area between the tip and a portion of the extension element adjacent to the base portion has a spring shape; it is selected based on its ability to make the resulting intermediate connecting element elastic. The material covers at least each of the entire lengthening elements except its base portion. 1 5_ The method according to item 14 of the patent application scope, further comprising: separating the spring contact element from the sheet. Cn (cns) m ϋ &quot; ^ Please read the notes on the back before filling out this page) Install --------- Order --------- line! Member of Intellectual Property Bureau, Ministry of Economic Affairs, Consumer Cooperatives Printing (210 χ 297 mm) AS B8 C8 D8 VI. Application for Patent Scope 16. For the method of the scope of patent application item 15, it further includes: mounting the spring contact element on an electronic component. 17. Such as The method for applying for the scope of patent application No. 14 further includes: supporting the plurality of spring contact elements with a predetermined spatial relationship between each other. -------------- installation ---- ( Please read the precautions on the back before filling this page) Order --------- Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Online Economics The paper size is applicable to China National Standard (CNS) A4 (210 X 297 public) meal)