TW449107U - Plasma processing device - Google Patents

Plasma processing device

Info

Publication number
TW449107U
TW449107U TW89213996U TW89213996U TW449107U TW 449107 U TW449107 U TW 449107U TW 89213996 U TW89213996 U TW 89213996U TW 89213996 U TW89213996 U TW 89213996U TW 449107 U TW449107 U TW 449107U
Authority
TW
Taiwan
Prior art keywords
processing device
plasma processing
plasma
processing
Prior art date
Application number
TW89213996U
Other languages
Chinese (zh)
Inventor
Kiichi Hama
Toshiaki Hongoh
Yasuyuki Kuriki
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP24660795A external-priority patent/JP3153743B2/en
Priority claimed from JP19568696A external-priority patent/JP3153768B2/en
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW449107U publication Critical patent/TW449107U/en

Links

TW89213996U 1995-08-17 1996-08-14 Plasma processing device TW449107U (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP23333395 1995-08-17
JP24660795A JP3153743B2 (en) 1995-08-31 1995-08-31 Plasma processing equipment
JP12794196 1996-04-23
JP19568796 1996-07-05
JP19568696A JP3153768B2 (en) 1995-08-17 1996-07-05 Plasma processing equipment

Publications (1)

Publication Number Publication Date
TW449107U true TW449107U (en) 2001-08-01

Family

ID=27527160

Family Applications (1)

Application Number Title Priority Date Filing Date
TW89213996U TW449107U (en) 1995-08-17 1996-08-14 Plasma processing device

Country Status (1)

Country Link
TW (1) TW449107U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8604696B2 (en) 2008-12-23 2013-12-10 Industrial Technology Research Institute Plasma excitation module

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8604696B2 (en) 2008-12-23 2013-12-10 Industrial Technology Research Institute Plasma excitation module

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MK4K Expiration of patent term of a granted utility model