TW447771U - Etching chamber - Google Patents

Etching chamber

Info

Publication number
TW447771U
TW447771U TW89210092U TW89210092U TW447771U TW 447771 U TW447771 U TW 447771U TW 89210092 U TW89210092 U TW 89210092U TW 89210092 U TW89210092 U TW 89210092U TW 447771 U TW447771 U TW 447771U
Authority
TW
Taiwan
Prior art keywords
etching chamber
etching
chamber
Prior art date
Application number
TW89210092U
Other languages
Chinese (zh)
Inventor
Chuan-Jie Huang
Bin-Yi Shin
You-Luen Lin
Jiang-Ren Peng
Guang-Hung Lin
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW89210092U priority Critical patent/TW447771U/en
Publication of TW447771U publication Critical patent/TW447771U/en

Links

TW89210092U 2000-06-13 2000-06-13 Etching chamber TW447771U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW89210092U TW447771U (en) 2000-06-13 2000-06-13 Etching chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW89210092U TW447771U (en) 2000-06-13 2000-06-13 Etching chamber

Publications (1)

Publication Number Publication Date
TW447771U true TW447771U (en) 2001-07-21

Family

ID=21669079

Family Applications (1)

Application Number Title Priority Date Filing Date
TW89210092U TW447771U (en) 2000-06-13 2000-06-13 Etching chamber

Country Status (1)

Country Link
TW (1) TW447771U (en)

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004