4 44 彳] ο Α7 ____Β7 __五、發明說明（） 發明領域： 本發明係關於一種雙套管（d 〇 u b 1 e t u b e )，特別是關 於一種用於氣體輸送並可即時監控氣體外洩之雙套管。 發明背景’· 單套管（single tube)係一種用於輸送氣體或液體之 管路，其已廣泛應用於與流體輸送有關的設備環境中。一 般的單套管設計僅著重於流體的輸送，而没有針對流體的 外洩（特別是氣體）情況，做進一步的防護設計，因此在發 生外洩事件時，特別是有毒物質外洩時1往往造成人員的 傷亡以及產品的損失° 鑒於單套管在防止流體外洩缺乏妥善防護設計的情 況下，一種雙套管（double tube)的管路設計被提出。請 參閱第1圖，其為習知雙套管之側面圖。雙套管10的結 構係著重在現有的單套管1 2外加裝一外管1 4，使其環繞 包覆在内管（單套管）的外圍，以進一步防止流體（特別是 氣體）發生外洩情況。 儘管在防止流體外洩的效果上，雙套管的設計結構較 優於單套管；但在根本上，雙套管的結構僅僅只是單套管 結構的延伸，換言之，雙套管僅提供進一步的保障，但卻 2 本紙張尺度適用中國國家標準（CNS)A4规格（210 X 297公釐） (請先閲讀背面之注意事項再填冩本頁) 4 4 4 1 1 Ο Α7 經濟部智慧財產局員工消貲合阼 Β7 _五、發明說明（） 無法真正有效控制流體外洩的情況，且當内管發生外洩 時，外界無從得知此一情況，以便做適當的狀況處置，如 人員疏散、即時換裝管路等。再者，由於雙套管之内外管 路間的真空度無法做即時的監測，使得污染物可能進入内 管（單套管）中。因此，在對管路的防護品質有嚴格要求的 環境下，如半導體製造廠區、核能發電廠區或化學工廠， 習知的單套管與雙套管的設計結構，皆不足以達到上述環 境的要求。 另一方面，就實際應用層面而言，習知的雙套管設計 必須先行訂定所需的產品規格，以符合現場環境的需要， 而無法於設備裝置現場製作。例如：若一工廠設備環境需 要一 L形的雙套管，則必須丈量精確的尺寸，以作為向特 定雙套管製造商訂製所需規格之雙套管的依據。上述向特 定雙套管製造商所訂製而來的管路設計，往往不符合實際 上的需要，從而增加現場施工的困難度|且其價格成本昂 貴。 綜上所述，習知的雙套管設計具有多項缺點亟待改 進，其中包括無法即時得知管路的防護品質、施工不易且 無法於設備裝置現場製作等缺陷。 發明目的及概述= (請先閱讀背面之注意事項再填寫本頁) --線' 3 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 4 4 4 1 i u A7 _____B7_五、發明說明（） 為了有效解決上述習知的單套管與雙套管的缺點，本 發明揭露一種改良式雙套管，其搭配一氣體外洩偵測裝 置，以便進行即時化（r e a 1 t i m e )的氣體外洩偵測。上述 氣體外洩偵測裝置係運用幫浦以及既有之真空技術設 備，另配合一壓力指示計（pressure gauge)，以構成一氣 體外洩偵測機制。 裝設雙套管之目的，係在於增加輪送管路設備的可靠 度，以避免在氣體（或液體）的輸送過程中，因氣體（或液 體）外洩事件而造成人員與產品之危害。本發明所揭露之 改良式雙套管，可改善習知之雙套管的多項缺陷，包括施 工不易且無法於設備裝置現場製作、以及缺乏即時偵測機 制等缺點，其應用領域包含所有需要使用具腐蝕、毒性， 以及可/易燃氣體之設備與環境。 因此，本發明之目的之一，係提供一改良式雙套管， 藉由基本的真空元件之結合，可降低管路設備的成本，並 可獲得生產設備最佳之安全性。 本發明之另一目的，係提供一改良式雙套管，藉由一 氣體外洩即時偵測機制，增強輸送管路設備的可靠度，以 避免氣體（或液體）在輸送過程中，因外洩事件而造成人員 與產品之危害。 -------------t--------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 4 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 444110 ___B7__ 五、發明說明（） 本發明所揭露的改良式雙套管，包括一内管、一外 管、一第一接合端、一第二接合端以及一氣體外洩偵測裝 置。該氣體外汽彳貞測裝置包括一壓力指示計，一幫浦導管 (p u m p i n g p i p e )以及一個或複數個閥門，例如手動閥 (manual valve, MV)。當一改良式雙套管於現場裝設完成 後，隨即打開閥門，以藉由渦輪分子式幫浦（turbo-molecular pump)與乾式幫浦（dry pump)的抽氣效率，使 改良式雙套管之内外管間達到最佳的真空度，而後關閉閥 門。上述程序完成後，一種或多種氣體透過第一接合端導 入改良式雙套管，而後藉由第二接合端與反應室之管路接 合，並經由内管將至少一種氣體輸送至反應室；其中，當 改良式雙套管的内管發生洩漏時，由於外洩氣體會導致内 管與外管間之氣體壓力增加的緣故，壓力指示計的讀數會 隨之增加，顯示氣體外洩的情況；此時，工作人員可經由 壓力指示計判讀而即時進行適當的處置，以避免因氣體外 洩所造成的損害。若氣體外洩係由於内管之破裂而必須更 換内管，則僅需於管路完成後，重新以渦輪分子式幫浦與 乾式幫浦柚氣，以使改良式雙套管之内外管間再度達到最 佳的真空度，而後關閉閥門即可立刻回復設備的穩定狀 態，以節省復歸時間並達到最大的管路輸送效率。壓力指 示計係用以增加雙套管之即時偵測功能，並協助輸送管路 設備人員便於做定時之監控。 圖式簡單說明： 5 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） I - I I I I -------( ^ i I ------ I ---- - t (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作达印製 i. άάΑ110 Α7 _____Β7_ 五、發明說明（） 本發明將輔以下列圖式做更詳細的說明，其中： 第1圖為習知雙套管之側面圖； 第2圖為本發明所揭露之改良式雙套管的側面圖； 第3圖為本發明所揭露之改良式雙套管，配合一氣體供 應槽與一反應室的配置圖。 圖號對照說明： ·.-- Ϊ ! i f I --------------------^ - 琴 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財L1 6 10雙套管 12單套管 1 4外管ί 200 内 管 〆 202 外 管 204 第 — 端 206 第 -- 端 208 第 一 接 合 端 210 第 --- 接 合 端 212 幫 浦 導 管 214 封 閉 空 間 216 壓 力 指 示 計‘ 300 改 良 式 雙 套 管 302 内 管 304 外 管 306 幫 浦 導 管 308 壓 力 指 示 計 3 10 渦 輪 分 子 式 312 第 — 接 合 端 314 第 二 接 合 端 316 氣 體 供 應 管 路 318 總 閥 門 320 反 應 室 32 2 手 動 閥 324 乾 式 幫 浦 本紙張尺度適用中國國家標準（CNS)A4規格（210 χ 297公釐） 444 1 1 〇 Α7 經濟部智慧讨 Β7__五、發明說明（） 發明詳細說明： 本發明所揭露的改良式雙套管，包括一内管、一外 管、一第一接合端、一第二接合端以及一氣體外洩偵測裝 置。該氣體外洩偵測裝置包括一壓力指示計，一幫浦導管 以及一個或複數個闊門。上述改良式雙套管的運作原理， 將輔以一較佳實施例說明如下，但其應用之領域並不以較 佳實施例所描述者為限。 請參閱第2圖 > 其為本發明所揭露之改良式雙套管的 (侧視）結構圖。内管2 0 0係一單套管，一種或數種氣體即 經由内管2 0 0輸送。外管2 0 2係一口徑較大的管路，且其 環繞包覆在内管2 0 0的外圍。此外，内管2 0 0與外管2 0 2 分別密合於第一端204與第二端206，此第一端與第二端 係分別代表内管2 0 0與外管2 0 2的管路外端，而使内管與 外管之間形成一封閉空間2 14。當内管發生破裂時1管内 的氣體將會洩出，此時外管即可發揮防護的作用，以避免 外洩氣體進一步的擴散。第一端2 0 4與第二端2 0 6分別與 第一接合端2 0 8和第二接合端2 1 0接合。第一接合端2 0 8 進一步與一氣體輸送入口端接合；第二接合端2 1 0則連接 於一氣體輸送出口端。 另一方面，在外管2 0 2上具有一開〇，以連接幫浦導 管2 1 2。幫浦導管2 1 2的另一端係連接至一獨立的幫浦或 7 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 χ 297公釐）4 44 彳] ο Α7 ____ Β7 __V. Description of the invention () Field of the invention: The present invention relates to a double sleeve (d 〇ub 1 etube), in particular to a device for gas transportation and real-time monitoring of gas leakage. Double casing. BACKGROUND OF THE INVENTION 'A single tube is a type of pipe used to transport gas or liquid, which has been widely used in the environment of equipment related to fluid transport. The general single-tube design only focuses on the transportation of fluids, and does not address the leakage of fluids (especially gases), so it does not provide further protection design. Therefore, in the event of leakage, especially when toxic substances are leaked1 Causes personal injury and product loss ° In view of the lack of proper protection design of single sleeve to prevent fluid leakage, a double tube pipeline design has been proposed. Please refer to Figure 1, which is a side view of a conventional double sleeve. The structure of the double casing 10 is focused on adding an outer tube 1 4 to the existing single casing 12 to surround the outer tube (single casing) around the outer tube to further prevent fluid (especially gas). A leak occurred. Although the design of the double sleeve is better than that of the single sleeve in preventing the fluid from leaking out, the structure of the double sleeve is only an extension of the single sleeve structure. In other words, the double sleeve only provides further However, 2 paper sizes are applicable to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling out this page) 4 4 4 1 1 〇 7 Intellectual Property of the Ministry of Economic Affairs Bureau staff elimination and combination B7 _V. Description of the invention () It is impossible to effectively control the leakage of fluid, and when the internal pipe is leaked, the outside world has no way of knowing this situation in order to deal with the appropriate situation, such as personnel Evacuation, immediate replacement of pipelines, etc. Furthermore, because the vacuum between the inner and outer pipes of the double casing cannot be monitored in real time, contamination may enter the inner pipe (single casing). Therefore, in environments with strict requirements for the protection quality of pipelines, such as semiconductor manufacturing plants, nuclear power plants or chemical plants, the conventional single and double casing design structures are insufficient to meet the above environmental requirements. . On the other hand, in terms of practical application, the conventional double-tube design must first set the required product specifications to meet the needs of the field environment, and cannot be produced on-site. For example, if a factory equipment environment requires an L-shaped double sleeve, the exact size must be measured as a basis for ordering the double sleeve with the required specifications from a specific double sleeve manufacturer. The above-mentioned piping design made to a specific double casing manufacturer often does not meet the actual needs, thereby increasing the difficulty of on-site construction | and its price and cost are expensive. In summary, the conventional double casing design has a number of shortcomings that need to be improved, including shortcomings such as the inability to know the protection quality of the pipeline in real time, the difficulty of construction, and the inability to make the equipment on site. The purpose and summary of the invention = (Please read the notes on the back before filling this page)-Thread '3 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 4 4 4 1 iu A7 _____B7_ 5. Description of the Invention () In order to effectively solve the shortcomings of the conventional single casing and double casing, the present invention discloses an improved dual casing, which is equipped with a gas leakage detection device for real-time (rea 1 time). The above-mentioned gas leakage detection device uses a pump and an existing vacuum technology device, and also cooperates with a pressure gauge to form a gas leakage detection mechanism. The purpose of installing double sleeves is to increase the reliability of the rotary pipeline equipment to avoid the harm of personnel and products caused by the gas (or liquid) leakage during the transportation of gas (or liquid). The improved double casing disclosed in the present invention can improve many shortcomings of the conventional double casing, including disadvantages such as difficulty in construction and in-situ production of equipment and devices, and lack of real-time detection mechanism. Its application fields include all the necessary tools. Corrosion, toxicity, and flammable / flammable equipment and environment. Therefore, one of the objects of the present invention is to provide an improved double sleeve, which can reduce the cost of piping equipment and obtain the best safety of production equipment through the combination of basic vacuum components. Another object of the present invention is to provide an improved double sleeve, which enhances the reliability of the pipeline equipment by a real-time gas leakage detection mechanism to avoid gas (or liquid) during transportation due to external Damage to personnel and products caused by the accident. ------------- t -------- Order --------- Line (Please read the precautions on the back before filling this page) 4 Paper Size Applicable to China National Standard (CNS) A4 specification (210 X 297 mm) A7 444110 ___B7__ 5. Description of the invention () The improved double sleeve disclosed in the present invention includes an inner pipe, an outer pipe, and a first joint end A second joint end and a gas leakage detection device. The gas outside steam pressure measuring device includes a pressure indicator, a pump conduit (pum p i n g p i p e), and one or more valves, such as a manual valve (MV). When a modified double casing is installed on site, the valve is opened immediately, so that the improved double casing can be extracted by the turbo-molecular pump and the dry pump. The best vacuum is achieved between the inner and outer pipes, and the valve is closed. After the above procedure is completed, one or more gases are introduced into the modified double sleeve through the first joint end, and then the second joint end is connected with the pipeline of the reaction chamber, and at least one gas is delivered to the reaction chamber through the inner pipe; When the inner pipe of the improved double casing leaks, because the leaked gas will increase the gas pressure between the inner pipe and the outer pipe, the reading of the pressure indicator will increase accordingly, showing the situation of gas leakage; At that time, the staff can immediately take appropriate measures through the pressure indicator reading to avoid damage caused by gas leakage. If the gas leakage is due to the rupture of the inner pipe, the inner pipe must be replaced after the pipe is completed, and the turbo molecular pump and the dry pump grapefruit gas need to be re-used after the pipe is completed, so that the inner and outer pipes of the improved double casing can be re-used To achieve the best vacuum degree, and then close the valve to immediately return to the stable state of the equipment to save reset time and achieve maximum pipeline delivery efficiency. The pressure indicator is used to increase the real-time detection function of the double casing, and to assist the pipeline personnel to facilitate regular monitoring. Brief description of the drawing: 5 This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) I-IIII ------- (^ i I ------ I ---- -t (Please read the notes on the back before filling this page) Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs on the consumption cooperation of employees i. άάΑ110 Α7 _____ Β7_ V. Description of the invention () The present invention will be supplemented by the following drawings for more detailed description Among them, FIG. 1 is a side view of a conventional double sleeve; FIG. 2 is a side view of an improved double sleeve disclosed in the present invention; and FIG. 3 is a modified double sleeve disclosed in the present invention. Configuration diagram of a gas supply tank and a reaction chamber. Comparison of drawing numbers: · .-- Ϊ! If I -------------------- ^-琴 (Please Please read the notes on the back before filling this page) Ministry of Economic Affairs Smart Money L1 6 10 Double Casing 12 Single Casing 1 4 Outer Tube ί 200 Inner Tube 〆 202 Outer Tube 204 No. — End 206 No.-End 208 First Joint End 210 first --- joint end 212 pump conduit 214 enclosed space 216 pressure indicator '300 modified double sleeve 302 Inner tube 304 Outer tube 306 Pump conduit 308 Pressure indicator 3 10 Turbo molecular formula 312 First-joint end 314 Second joint end 316 Gas supply line 318 Main valve 320 Reaction chamber 32 2 Manual valve 324 Dry pump paper size Applicable to China National Standard (CNS) A4 specification (210 χ 297 mm) 444 1 1 〇Α7 Wisdom discussion by the Ministry of Economics B7__V. Description of the invention () Detailed description of the invention: The improved double casing disclosed in the present invention includes one An inner tube, an outer tube, a first joint end, a second joint end, and a gas leakage detection device. The gas leakage detection device includes a pressure indicator, a pump conduit, and one or more tubes. The operation principle of the above-mentioned improved double sleeve will be described as follows with a preferred embodiment, but its application field is not limited to those described in the preferred embodiment. Please refer to FIG. 2 > it is (Side view) structural diagram of the improved double casing disclosed in the present invention. The inner tube 200 is a single casing, and one or several gases are transported through the inner tube 200. The outer tube 2 0 2 is a larger-diameter tube, and it surrounds the outer tube 2 0. In addition, the inner tube 2 0 and the outer tube 2 2 are closely adhered to the first end 204 and the second end 206, respectively. The first end and the second end respectively represent the inner tube 2 0 0 and the outer tube 2 0 2 The outer end of the pipeline forms a closed space 2 14 between the inner tube and the outer tube. When the inner tube is ruptured, the gas in the 1 tube will leak out, and the outer tube can play a protective role at this time to avoid further diffusion of the leaked gas. The first end 2 0 4 and the second end 2 6 are respectively engaged with the first joint end 2 08 and the second joint end 2 1 0. The first joint end 2 0 8 is further connected to a gas delivery inlet end; the second joint end 2 10 is connected to a gas delivery outlet end. On the other hand, there is an opening 0 on the outer tube 202 to connect the pump guide tube 2 12. The other end of the pump conduit 2 1 2 is connected to a separate pump or 7 (Please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 (210 χ 297 mm) )
4 4 4 1 1 C A7 __B7__ 五、發明說明（） 複數個串聯的f浦（未表示出）。幫浦與幫浦導管的作用係 提供柚氣機制，以便將内外管間之封閉空間2 1 4的氣體柚 離。幫浦導管2 1 2另與一壓力指示計2 1 6偶合，以提供量 测封閉空間2 1 4内之壓力值的機制。由於壓力指示計2 1 6 的配置，輸送管路維護人員可藉由壓力指示計監測雙套管 的内外管之間的壓力，以便得知内管當中的氣體是否發生 外茂 在一實施例中，第一接合端2 0 8係與氣體供應槽的輸 送管路接合，而第二接合端 21 0則連接至一反應室 (process chamber)。請參閱第3圖，其為本發明所揭露 之改良式雙套管，.配合一氣體供應槽與一反應室的配置 圖。改良式雙套管3 0 0係由内管3 0 2、外管3 0 4以及幫浦 導管3 0 6與壓力指示計3 0 8所構成。渦輪分子式幫浦3 1 0 以及幫浦導管 3 0 6構成一柚氣機制，並經由壓力指示計 3 0 8監測改良式雙套管的内外管之間的壓力值。改良式雙 套管3 0 0的第一接合端3 1 2係與複數個氣體供應管路3 1 6 的總閥門3 1 8連接，以接收由氣體供應槽（未表示出）所輪 送出的氣體。改良式雙套管3 0 0的第二接合端3 14係與反 應室320連接，以將内管302中的氣體輸送至反應室320 中 。 當雙套管於現場裝設完成後，隨即打開手動閥3 2 2， 並藉由渦輪分子式幫浦3 1 0與乾式幫浦3 2 4進行抽氣，以 8 本紙張尺度適用令國國家標準（CNS)A4規格（210 x 297公釐） -----------------線---- (諝先閱讀背面之注意事項再填寫本頁) 4 4 4 1 1 0 A7 __B7__ 五、發明說明（） (請先閲讀背面之注意事項再填寫本頁) 達到最佳的真空度"真空度可以根據實際需要予以調整， 如1 (Γ7至1 O_5torr，而後關閉手動閥322以維持雙套管之 内外管間以及幫浦導管内的真空度=一般而言，架設有氣 體輸送管路之設備環境中，通常皆有幫浦抽氣設備的配 置；因此，現有的真空技術設備即可提供所需之抽氣設 備》 當改良式雙套管3 0 0的内管3 0 2發生氣體外洩時 > 由 > 經濟部智慧財產局員工消費合作江中提 於外洩氣體會導致内管3 0 2與外管3 0 4間之氣體壓力增加 的緣故，壓力指示計3 0 8的讀數會隨之增加，顯示氣體外 洩的情況；此時，工作人員可經由壓力指示計3 0 8判讀而 即時進行適當的處置1以避免因氣體外洩所造成的損害。 若氣體外洩係由於内管3 0 2之破裂而必須更換内管，則僅 需於新的内管裝設完成後，重新以渦輪分子式幫浦3 1 0與 乾式幫浦3 2 4抽氣，以使改良式雙套管之内外管間再度達 到最佳的真空度，而後關閉手動閥3 2 2即可立刻回復設備 的穩定狀態，由此可節省復歸時間並達到最大的管路輸送 效率。壓力指示計 3 0 8係用以增加雙套管之即時偵測功 能，並協助輪送管路設備人員進行監控。藉由渦輪分子式 幫浦3 1 0與乾式幫浦3 2 4所抽取的氣體，將經由洗滌器做 前置處理，而後通過幫浦導管將處理過後的廢氣輸送至廢 氣處理單元。 在上述之較佳實施例t，雖然改良式雙套管3 0 0的第 9 本紙^尺^適用中國國家標準(CNS)A4規格（210 >< 297公釐） 444 110 A7 __B7_ 五、發明說明（） —接合端3 i 2係與複數個氣體供應管路3 1 6的總閥門3 1 8 連接1以接收由氣體供應槽（未表示出）所輸送出的氣體； 而第二接合端3 1 4係與反應室3 2 0連接，以將内管3 0 2中 的氣體輸送至反應室3 2 0中，但改良式雙套管3 0 0的輸入 端與輸出端（即第一接合端與第二接合端）可於任何需要 輸送套管之處套接。因此，本發明所揭露之改良式雙套管 可應用於廣泛的設備環境中，且僅需利用現有之真空抽氣 設備與簡便的套接過程，因此提高了現場施工之可行性° 以上所述僅為本發明之較佳實施例而已，並非用以 限定本發明之申請專利範圍；凡其它未脫離本發明所揭 示之精神下所完成之等效改變或修飾，如改良式雙套管 之兩端分別與不同於上述實施例所述者接合，均應包含 在下述之申請專利範圍内。 (請先閱讀背面之注意事項再填寫本頁) . 經濟部智慧財產局員工消費合作社印製 10 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）4 4 4 1 1 C A7 __B7__ 5. Description of the invention () A plurality of f pumps in series (not shown). The function of the pump and the pump duct is to provide a pomegranate gas mechanism to separate the gas in the enclosed space 2 1 4 between the inner and outer pipes. The pump catheter 2 1 2 is also coupled with a pressure indicator 2 1 6 to provide a mechanism for measuring the pressure value in the closed space 2 1 4. Due to the configuration of the pressure indicator 2 1 6, the maintenance personnel of the conveying pipeline can monitor the pressure between the inner and outer pipes of the double casing by the pressure indicator, so as to know whether the gas in the inner pipe is moisturized. In one embodiment, The first joint end 208 is connected to the conveying pipe of the gas supply tank, and the second joint end 208 is connected to a process chamber. Please refer to FIG. 3, which is an arrangement diagram of an improved double sleeve disclosed in the present invention, which is matched with a gas supply tank and a reaction chamber. The improved double casing 300 is composed of an inner tube 300, an outer tube 300, a pump catheter 300, and a pressure indicator 300. The turbo molecular pump 3 0 0 and the pump duct 3 0 6 constitute a pomegranate gas mechanism, and the pressure value between the inner and outer pipes of the improved double casing is monitored through a pressure indicator 3 0 8. The first joint end 3 1 2 of the improved double sleeve 3 0 0 is connected to the main valve 3 1 8 of a plurality of gas supply lines 3 1 6 to receive the gas from the gas supply tank (not shown). gas. The second joint end 314 of the modified double sleeve 300 is connected to the reaction chamber 320 to transfer the gas in the inner tube 302 to the reaction chamber 320. After the double casing is installed on site, the manual valve 3 2 2 is opened, and the air is pumped by the turbo molecular pump 3 1 0 and the dry pump 3 2 4. The national standard of the country is applicable to the paper size of 8 (CNS) A4 size (210 x 297 mm) ----------------- line ---- (谞 Please read the precautions on the back before filling this page) 4 4 4 1 1 0 A7 __B7__ V. Description of the invention () (Please read the notes on the back before filling this page) To achieve the best vacuum degree " Vacuum degree can be adjusted according to actual needs, such as 1 (Γ7 to 1 O_5torr, and then Close the manual valve 322 to maintain the vacuum between the inner and outer pipes of the double casing and the pump duct = In general, in the equipment environment where the gas transmission pipeline is installed, there is usually a pump pumping equipment configuration; therefore, Existing vacuum technology equipment can provide the required extraction equipment. "When the gas leaked from the inner tube 3 2 of the improved double casing 3 0 0 > From > Consumers' cooperation with the Intellectual Property Bureau of the Ministry of Economic Affairs Because the leaked gas will cause the gas pressure between the inner tube 3 0 2 and the outer tube 3 0 4 to increase, the pressure indicator The reading of 3 0 8 will increase accordingly, indicating the situation of gas leakage; at this time, the staff can immediately take appropriate measures through the reading of the pressure indicator 3 0 1 to avoid the damage caused by the gas leakage. The gas leakage is due to the rupture of the inner tube 3 02, and the inner tube must be replaced. After the new inner tube is installed, the turbo molecular pump 3 1 0 and the dry pump 3 2 4 are used to extract air again. In order to achieve the best vacuum between the inner tube and the outer tube of the improved double casing, closing the manual valve 3 2 2 can immediately restore the stable state of the equipment, thereby saving the return time and achieving the maximum pipeline transportation efficiency. The pressure indicator 3 0 8 is used to increase the real-time detection function of the double casing and assist the personnel of the pipeline equipment to monitor. The gas extracted by the turbo molecular pump 3 1 0 and the dry pump 3 2 4 The pre-treatment will be done through the scrubber, and then the treated exhaust gas will be sent to the exhaust gas treatment unit through the pump duct. In the above-mentioned preferred embodiment t, although the ninth paper of the improved double-tube 300 ^ Applicable Chinese National Standard (CNS) A4 specifications (210 > < 297 mm) 444 110 A7 __B7_ V. Description of the invention ()-Joint end 3 i 2 is connected to a plurality of gas supply lines 3 1 6 and the main valve 3 1 8 is connected to receive The gas delivered from the gas supply tank (not shown); and the second joint end 3 1 4 is connected to the reaction chamber 3 2 0 to transfer the gas in the inner tube 3 02 to the reaction chamber 3 2 0. However, the input end and the output end of the improved double casing 300 (that is, the first joint end and the second joint end) can be sleeved at any place where the casing is needed. Therefore, the improved double casing disclosed in the present invention can be applied to a wide range of equipment environments, and only needs to use the existing vacuum extraction equipment and a simple socketing process, thereby improving the feasibility of field construction. It is only a preferred embodiment of the present invention, and is not intended to limit the scope of patent application for the present invention; any other equivalent changes or modifications made without departing from the spirit disclosed by the present invention, such as the two of the improved double casing The ends are respectively connected with those different from those described in the above embodiments, and all of them should be included in the scope of patent application described below. (Please read the notes on the back before filling out this page). Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 10 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)