A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（/ ) 本發明槪括係關於自動測試設備’且更特定地’係關 於用於測試及特徵化射頻\微波裝置之自動測試設備。 自動測試設備，即眾所認知之“測試機”’已經習慣 地用於製造半導體裝置之程序，以決定該製造過之裝置是 否包含缺陷。依此方式，大體積的裝置能夠被快速測試’ 因而同時減少上市時間及生產成本。 近來，測試已經被用於測試及特徵化高頻半導體裝置 ，該高頻半導體裝置係設計成操作於射頻（RF)即微波範 圍。如此之“無線”裝置包括那些用於細胞式電話工業之 裝置，其中，高容量及低成本之產品係特別重要。 一個時常測量之特徵係關於射頻/微波裝置之功率。 因爲高頻訊號之電壓及電流準位通常係難以測量，功率之 測量通常係用來特徵化射頻/微波裝置之性能。 第1圖顯示一個傳統的測試機100，該測試機100用 於測試一個測試中裝置（DUT) 118之功率，該測試中裝 置Π8係設計成操作於射頻或微波頻帶。該測試機100具 有一個測試機主體102，該測試機主體102具有一個電腦 化控制器106,該電腦化控制器106可以由一個測試機操 作員作程式規劃，以實施許多測試及分析操作。舉例而言 ，該控制器106可以被程式規劃，以控制射頻訊號源（例 如一個射頻源110)及接收器（例如一個射頻接收器112) 。該射頻源110及該射頻接收器112分別產生及偵測用於 測試中裝置118之測試訊號。 該測試機Π0亦包括一個測試頭104，該測試頭104 請 先 閱 讀 背 意A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (/) The present invention is about automatic test equipment and, more specifically, about automatic test equipment for testing and characterizing RF / microwave devices . Automatic test equipment, known as a "test machine", has been customarily used in the process of manufacturing semiconductor devices to determine whether the manufactured device contains defects. In this way, large-volume devices can be quickly tested ', thereby reducing both time to market and production costs. Recently, testing has been used to test and characterize high-frequency semiconductor devices that are designed to operate in the radio frequency (RF) or microwave range. Such "wireless" devices include those used in the cellular telephone industry, with high capacity and low cost products being particularly important. A frequently measured feature is the power of an RF / microwave device. Because voltage and current levels of high-frequency signals are often difficult to measure, power measurements are often used to characterize the performance of RF / microwave devices. Figure 1 shows a conventional tester 100 for testing the power of a device under test (DUT) 118, which is designed to operate in the RF or microwave band. The testing machine 100 has a testing machine body 102. The testing machine body 102 has a computerized controller 106. The computerized controller 106 can be programmed by a testing machine operator to perform many testing and analysis operations. For example, the controller 106 can be programmed to control a radio frequency signal source (such as a radio frequency source 110) and a receiver (such as a radio frequency receiver 112). The RF source 110 and the RF receiver 112 respectively generate and detect test signals for the device 118 under test. The testing machine Π0 also includes a test head 104. The test head 104 please read
再 填 本， 頁I I I I 訂 木紙張尺度適用中國國家標準<CNS)A4規格（2】0 X 297公釐〉 4407 0 3 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（2) 通常設定該測試機主體102及該測試中裝置118之間的訊 號的路徑》因此，該測試頭104包括用於導引測試訊號於 該射頻源110、該射頻接收器Π2及該測試中裝置118之 間的切換模組114。 於一個典型測試結構之中，一個諸如由美國加州惠普 公司所販賣之型號HP ECP-E18A功率感測器之功率感測器 116係連接至該切換模組114，且用於測量該測試中裝置 118產生之功率。因此，該切換模組1 1 4亦設定功率感測 器116及該測試中裝置Π8之間的訊號之路徑。該功率感 測器116典型地係亦連接至一個諸如由美國加州惠普公司 所販賣之型號HP EPM-441A功率計數器之功率計數器（未 示出）。 應有的認知爲，以上述方式實施功率測量可能導致測 量不確定性，其將對於雜訊數字測量之精確度有不利的影 響。 舉例而言，一種測量不確定之型態係肇因於阻抗不匹 配，此種阻抗不匹配能夠導致訊號反射，該訊號反射將影 響提供至測量系統之元件的功率大小，因而造成功率測量 之不準確。此外，阻抗不匹配在操作於高頻範圍之測量系 統中係格外重要。 此外，不同的測試系統能夠產生不同的阻抗不匹配準 位。此即，對於相同裝置所實施之功率測量可能隨測試機 不同而改變。此外’諸如測試機100之測試機係意味著測 試及特徵化大量的裝置。然而，不同的阻抗不匹配準位可 4 (請先Μ讀背面之注意事項再填窝本頁) '於------------1---- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 44 07 σ Α7 Β7 經濟部智慧財產局員工消費合作社印製 五、發明說明（]) 能因每一個受測試之裝置而產生。此意味著，由相同測試 機所實施之功率測量可能隨著裝置的不同而改變。這些測 試機不同級裝置不同之差異能夠導致不一致的功率測量， 其於大量生產的環境中是不想要的。 吾人瞭解，結合一個外部功率感測器於測試機中係麻 煩且成本高的。 因此，擁有一個能夠實施具有較少測量不確定性的功 率測量之測試機係令人期待的。如此之測試機能夠較準確 地測量功率，且能給予一個射頻/微波裝置之性能之較淸 楚之指示。擁有一個用於射頻/微波裝置之製造較簡單及 成本低之測試機係令人期待的。 發明摘要 由上述之發明背景說明，本發明之一個目的係提供一 個用於測試及特徵化射頻/微波裝置之測試機。 本發明之另一個目的係提供一個以漸增精確度而測量 射頻/微波裝置之功率測量之測試機。 本發明之又一個目的係提供一個簡單之方式，當實施 功率測量時，計算測試機之間及裝置之間的差異。 本發明之再一個目的係提供一個用於測試及特徵化射 頻/微波裝置之製造較簡單及成本低之測試機。 上述及其他目的係完成於：一個具有包括一個功率感 測器及複數個可程式規劃的儲存裝置之積體功率感測器模 組之測試機之中。該儲存裝置係以關於阻抗不匹配之資料 作程式規劃。 5 張尺ϋ用中國國家標準（CNS)A4規格（210 X 297公釐） ----II — I— I — I --------------- - - <靖先閱讀背面之注意事項再填寫本頁) 4407 經濟部智慧財產局員工消費合作社印製 Α7 Β7 五、發明說明（f) 於一個較佳實施例中，該功率感測器模組係插接於一 個測試機之內，因而可切換地連接該模組至複數個測量頻 道之一° 根據本發明之一個特色’該儲存裝置係以用於該功率 感測器的反射係數作程式規劃。 根據本發明之另一個特色，該複數個可程式規劃之儲 存裝置係使用複數個EEPROM來實施。 本發明之進一步的目的及優點，在考慮下列說明及圖 示之後將變得明白。 圖示簡單說明 參考下列更詳細的說明及附圖，本發明會獲得更佳的 瞭解，其中： 第1圖係爲一個傳統測試機之部分方塊圖； 第2A圖係一個根據本發明之測試機結合功率感測器 模組之方塊圖；_ 第2B圖係一個包括於示於第2A圖中之功率感測器模 組之示意圖； 第2C圖係一個連接至示於第2A圖裝置中之功率感測 器模組之切換模組的示意圖；及 第3圖係一個使用第2A圖設備實施功率測量之方法 的流程圖。 [元件符號說明] 1〇〇 測試機· 102 測試機主體 _ 6 冬紙浪κ㈣用中國國家標準（CNS)A4規格（加χ挪 I ---— III — I t - I i I I I I I ^ I I I I I---^ (請先閱讀背面之注意事項再填寫本頁) ^40703 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（t) 104 測試頭 106 電腦化控制器 110 射頻源 112 射頻接收器 114 切換模組 116 功率感測器 118 測試中裝置 200 測試機 202 測試主體 204 測試頭 206 可程式規劃控制電路 210 射頻源 212 射頻訊號接收器 214 切換模組 216 功率感測器模組 218 測試中裝置 220 方向連接器 221 功率感測器 222 開關 223 可程式規劃記憶體裝置 224 開關 226 開關 227 開關 230 線 7 C請先閱讀背面之注意事項再填寫本頁) 哀-----11訂·---- ·線 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） “07 0 3 A? B7 經濟部智慧財產局員工消費合作社印製 五 '發明說明（ 6 ) 232 線 234 線 238 通道 239 通道 245 方向元件 246 開關 256 方向元件 260 開關 264 開關 265 偏壓τ網路 266 開關 267 埠 268 埠 較佳實施例之說明 第2A圖顯示一個根據本發明之測試機200之方塊圖 。該測試機包括一個測試主體202，該測試主體結合 可程式規劃控制電路206。該測試機200主要係用於測試 及特徵化諸如那些用於行動電話之高頻半導體裝置β這些 裝置典型地係設計成操作於大約100萬赫茲至60億赫茲之 頻率範圍。因此，該測試主體亦包括複數個射頻/微波訊 號源（例如一個射頻源210)及複數個射頻/微波訊號接 收器（例如一個射頻訊號接收器212)。 一個測試機操作者能夠程式規劃該控制器2 0 6，以 實施許多用於測試、分析及特徵化高頻裝置之操作。舉例 8 本紙張尺度適用中國國家標準（CNS)A4規格（2】0 X 297公釐> (請先閱讀背面之注意事項再填寫本頁) -丨 褒·!-----訂---------線 U 44〇7 〇 3 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（) 而言，該測試機操作者能夠程式規劃該控制器2 0 6 ’以 命令該射頻源210提供用於測試中裝置之射頻測試訊號 ，且命令射頻接收器212偵測由該測試中裝置所產生之 射頻訊號，以反應於該測試訊號。 因爲測試中之高頻裝置通常包括較低頻類比電路及數 位電路，該測試機主體2 0 2亦用以產生及偵測低頻交流 訊號及數位訊號之電路（未示出）。此外’該測試機主體 2 0 2亦包括用以產生直流準位之電路（未示出）。 應瞭解的是，該測試機主體2 0 2係指結合習知技藝 中眾所週知之元件且可於傳統測試機中找到。因此’於該 測試機主體2 0 2中之這些元件之正確實施及其結構對於 本發明而言並不重要。 該測試機2 0 0亦包括一個結合至少一個切換模組2 1 4之測試頭2 0 4。其他關於該切換模組2 1 4之一般 結構及操作之細節可藉由參考美國專利公告號第5，57 2，1 6 0號，專利櫂人爲美國麻州波士頓之T E R A D Y N E®公司，而獲得，該文件係於此作爲參考。舉例而 言，該切換模組2 1 4包括複數個諸如方向連接器2 2 0 之方向元件，及諸如開關2 22、224、226及22 7之開關。該切換模組2 1 4亦包括用以控制方向元件及 開關之操作的電路（未示出）。該可程式規劃控制器2 0 6通常命令此電路之操作。 特別是，該方向連接器2 2 0係爲一個4璋裝置如 示於第2 A圖，該方向連接器2 2 0之一個埠係連接至該 9 (請先閱讀背面之注意事項再填寫本頁) 农·---„----—訂—----線 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 1 在在 〇 3 A7 B7 經濟部智慧財產局員工消費合作杜印製 五、發明說明） 射頻源2 1 0，而另一個埠則連接至開關2 2 4之一個鄺 點，該開關2 2 4可以被致動，其結合開關2 2 7以連接 該方向連接器2 2 0至一個測試中裝置2 1 8。因此’方 向連接器2 2 0 —個璋可以被視爲於該方向連接器2 2 0 之>源側〃，而另一個埠可以被視爲在方向連接器220 之、、測試中裝置側〃。因此，該射頻源2 1 0能夠產生一 個射頻/微波測試訊號，該射頻/微波測試訊號由該方向 連接器之源側通過至測試中裝置側，經由該開關2 2 4 ’ 至一個該測試中裝置218之電氣節點。· 該方向連接器2 2 0亦包括兩個連接至開關2 2 2之 擲點之埠。這些埠通常稱爲該方向連接器2 2 0之$順向 "及"逆向〃埠。特別是，該"順向"埠可以被視爲連接 至一個提供至連接器2 2 0之源側埠之訊號。類似地，該 $逆向'璋能夠被視爲連接至一個提供至連接器2 2 0之 測試中裝置側埠之訊號。因此，該開關2 2 4能夠被致動 ，以連接射頻接收器2 1 2至方向連接器2 2 0之順向或 逆向埠。 示於第2 Α圖之切換模組2 1 4係一個用於測試機2 0 0之切換模組之簡化版本。實際上的切換模組通常包括 複數個路徑或通道至測試中裝置。舉例而言，第2 C圖顯 示該切換模組2 1 4之更詳細方塊圖，該切換模組2 1 4 現在包括兩個通道2 3 8及2 3 9至該測試中裝置2 1 8 。該通道2 3 8及2 3 9可以用於該測試中裝置2 1 8之 端點施加及測量個別訊號。或者，於通道2 3 8及2 3 9 10 (請先Μ讀背面之注意事項再填寫本頁)Fill in this page again. Page IIII The size of the wood order paper is in accordance with Chinese National Standards < CNS) A4 specifications (2) 0 X 297 mm> 4407 0 3 A7 B7 ) Normally set the signal path between the tester main body 102 and the device under test 118. Therefore, the test head 104 includes a signal for guiding the test signal to the RF source 110, the RF receiver Π2, and the device under test. Switch module 114 between 118. In a typical test structure, a power sensor 116, such as a model HP ECP-E18A power sensor sold by Hewlett-Packard Company of California, is connected to the switch module 114. And is used to measure the power generated by the device 118 in the test. Therefore, the switching module 1 1 4 also sets the signal path between the power sensor 116 and the device Π8 in the test. The power sensor 116 is typically The ground system is also connected to a power counter (not shown) such as a model HP EPM-441A power counter sold by Hewlett-Packard Company of California, USA. It should be recognized that performing power measurement in the above manner can Leading to measurement uncertainty, which will adversely affect the accuracy of digital measurement of noise. For example, a type of measurement uncertainty is caused by impedance mismatch, which can cause signal reflection, This signal reflection will affect the amount of power provided to the components of the measurement system, resulting in inaccurate power measurement. In addition, impedance mismatch is particularly important in measurement systems operating in the high frequency range. In addition, different test systems can produce Different impedances do not match the level. That is, the power measurements performed for the same device may vary from test machine to test. In addition, a test machine such as test machine 100 means testing and characterizing a large number of devices. However, different The impedance mismatch level can be 4 (Please read the precautions on the back before filling in this page) 'Yes ------------ 1 ---- This paper size applies to Chinese national standards ( CNS) A4 specification (210 X 297 mm) 44 07 σ Α7 Β7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention ()) Can be generated for each tested device. This means that the power measurements performed by the same tester may vary from device to device. Differences between different levels of devices in these testers can lead to inconsistent power measurements, which are undesirable in a mass production environment. I understand that combining an external power sensor in a test machine is cumbersome and costly. Therefore, it is desirable to have a test machine that can perform power measurement with less measurement uncertainty. Such a test machine It can measure power more accurately, and can give a better indication of the performance of an RF / microwave device. It is desirable to have a test machine that is simpler and cheaper to manufacture for an RF / microwave device. SUMMARY OF THE INVENTION From the foregoing background of the invention, it is an object of the present invention to provide a tester for testing and characterizing RF / microwave devices. Another object of the present invention is to provide a tester for measuring power measurement of RF / microwave devices with increasing accuracy. Yet another object of the present invention is to provide a simple way to calculate the differences between testers and devices when performing power measurements. Still another object of the present invention is to provide a testing machine for testing and characterizing radio / microwave devices that is simpler and less expensive to manufacture. The above and other objects are accomplished in a test machine having an integrated power sensor module including a power sensor and a plurality of programmable storage devices. The storage device is programmed with information about impedance mismatch. 5 pieces of ruler with Chinese National Standard (CNS) A4 (210 X 297 mm) ---- II — I— I — I -----------------< Jing first read the notes on the back before filling out this page) 4407 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the Invention (f) In a preferred embodiment, the power sensor module is plugged in Within a test machine, the module is switchably connected to one of the plurality of measurement channels. According to a feature of the present invention, the storage device is programmed with a reflection coefficient for the power sensor. According to another feature of the present invention, the plurality of programmable storage devices are implemented using a plurality of EEPROMs. Further objects and advantages of the present invention will become apparent after considering the following descriptions and illustrations. Brief description of the drawings: The present invention will be better understood with reference to the following more detailed description and accompanying drawings. Among them: Figure 1 is a partial block diagram of a traditional testing machine; Figure 2A is a testing machine according to the invention A block diagram of the power sensor module; _ Figure 2B is a schematic diagram of the power sensor module shown in Figure 2A; Figure 2C is a diagram connected to the device shown in Figure 2A A schematic diagram of a switching module of a power sensor module; and FIG. 3 is a flowchart of a method for implementing power measurement using the device of FIG. 2A. [Explanation of component symbols] 100 testing machine · 102 testing machine body _ 6 Winter Paper Wave κ㈣ Chinese National Standard (CNS) A4 specification (plus χ Norwegian I ----III-I t-I i IIIII ^ IIII I --- ^ (Please read the notes on the back before filling out this page) ^ 40703 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (t) 104 Test head 106 Computerized controller 110 RF source 112 RF receiver 114 Switch module 116 Power sensor 118 Device under test 200 Test machine 202 Test body 204 Test head 206 Programmable control circuit 210 RF source 212 RF signal receiver 214 Switch module 216 Power sensor module 218 Device under test 220 Directional connector 221 Power sensor 222 Switch 223 Programmable memory device 224 Switch 226 Switch 227 Switch 230 Line 7 C Please read the precautions on the back before filling this page) Sorry ----- Order 11 · ---- · The paper size of the paper is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) "07 0 3 A? B7 Employee Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Description of the five 'invention (6) 232 line 234 line 238 channel 239 channel 245 directional element 246 switch 256 directional element 260 switch 264 switch 265 bias τ network 266 switch 267 port 268 port Description of the preferred embodiment Figure 2A shows A block diagram of a testing machine 200 according to the present invention. The testing machine includes a test body 202 that is combined with a programmable control circuit 206. The test machine 200 is mainly used for testing and characterizing such as those used in mobile phones. High-frequency semiconductor devices β These devices are typically designed to operate in the frequency range of approximately 1 million to 6 billion hertz. Therefore, the test subject also includes a plurality of RF / microwave signal sources (such as an RF source 210) and a plurality of RF / microwave signal receiver (such as an RF signal receiver 212). A tester operator can program the controller 206 to perform many operations for testing, analyzing, and characterizing high-frequency devices. Examples 8 This paper size applies to China National Standard (CNS) A4 specifications (2) 0 X 297 mm > (Please read the back first Please pay attention to this page before filling in this page)-丨 褒 · -------- Order --------- line U 44〇7 〇3 A7 B7 Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs In terms of (), the operator of the test machine can program the controller 2 06 'to order the RF source 210 to provide the RF test signal for the device under test, and order the RF receiver 212 to detect that the device is under test. The RF signal generated by the device is reflected in the test signal. Because the high-frequency device under test usually includes a lower-frequency analog circuit and a digital circuit, the tester body 202 is also used to generate and detect low-frequency AC signals and digital signals (not shown). In addition, the main body of the testing machine 202 also includes a circuit (not shown) for generating a DC level. It should be understood that the main body of the testing machine 202 refers to a combination of well-known components in the conventional art and can be found in traditional testing machines. Therefore, the correct implementation of these elements in the tester body 202 and its structure are not important to the present invention. The testing machine 200 also includes a testing head 204 which is combined with at least one switching module 2 1 4. Other details about the general structure and operation of the switch module 2 1 4 can be obtained by referring to U.S. Patent Publication No. 5,57 2,160. The patent holder is TERADYNE® Company of Boston, Massachusetts, USA. This document is here for reference. For example, the switching module 2 1 4 includes a plurality of directional elements such as a directional connector 2 2 0 and switches such as switches 2 22, 224, 226, and 22 7. The switching module 2 1 4 also includes a circuit (not shown) for controlling the operation of the directional elements and switches. The programmable controller 206 normally commands the operation of this circuit. In particular, the directional connector 2 2 0 is a 4 璋 device. As shown in Figure 2 A, one port of the directional connector 2 2 0 is connected to the 9 (Please read the precautions on the back before filling out this Page) Agriculture ·-„----— Order —---- The paper size of the paper is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) 1 In the 〇3 A7 B7 Intellectual Property of the Ministry of Economic Affairs Printed by Du Bureau of Consumer Affairs, V. Invention Description) RF source 2 1 0, and the other port is connected to a point of switch 2 2 4. The switch 2 2 4 can be actuated, which is combined with switch 2 2 7 In order to connect the directional connector 2 2 0 to a device under test 2 1 8. Therefore, the 'directional connector 2 2 0 — a frame can be regarded as the source side of the directional connector 2 2 0, and the other A port can be regarded as the side of the device under test in the directional connector 220. Therefore, the RF source 210 can generate an RF / microwave test signal, and the RF / microwave test signal is sourced by the directional connector. Pass to the device under test, through the switch 2 2 4 ′ to an electrical node of the device 218 under test. · The directional connector 2 2 0 also includes two ports that are connected to the toss points of the switch 2 2 2. These ports are commonly referred to as the "forward and reverse" ports of the directional connector 2 2 0. Especially The "forward" port can be viewed as a signal connected to a source-side port provided to connector 2 2 0. Similarly, the "reverse" port can be viewed as connected to a provided to connector 2 The signal of the device side port during the test of 20. Therefore, the switch 2 2 4 can be actuated to connect the RF receiver 2 12 to the forward or reverse port of the directional connector 2 2 0. It is shown in section 2 Α The switching module 2 1 4 in the figure is a simplified version of the switching module for the test machine 2000. The actual switching module usually includes multiple paths or channels to the device under test. For example, 2C The figure shows a more detailed block diagram of the switching module 2 1 4. The switching module 2 1 4 now includes two channels 2 3 8 and 2 3 9 to the device under test 2 1 8. The channels 2 3 8 and 2 3 9 can be used to apply and measure individual signals at the end of device 2 1 8 in this test. Or, at channels 2 3 8 and 2 3 9 10 (please first Note to fill out the back of this page)
- I I I I I I I I I I I 線 不价張尺度適用中國國家標準（CNS>A4規格（2】〇 X 297公釐） ΓΑΛ 0 M ' ' ^ A7 __ B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（？） 上之訊號可以使用相互連接方向元件2 4 5及2 5 6及開 關246及260之內部調變（I Μ)路徑而結合。 如上所述’測試機2 0 〇主要地係用於測試及特徵化 射頻/微波裝置。測量這些裝置產生之訊號之電壓及電流 準位係困難的，因此，測試機2 0 0通常用於實施功率測 量，其能夠特徵化裝置之性能。因此，儘可能地準確測量 這些裝置之功率測量係重要的。 因此，_試頭2 0 4亦結合一個功率感測器模組2 1 6，該功率感測器模組2 1 6結合一個包括一個功率感測 器2 2 1及複數個可程式規劃記憶體裝置（例如裝置2 2 3 )之功率感測器模組2 1 6 〇於一個較佳實施例中，該 記憶體裝置2 2 3係使用一個E EPROM而實施，該Ε E P R OM係諸如由美國加州M i 1 p i t a s之X I C 0 R®公司所製造之X 24645之EEPROM。 此外，該功率感測器2 2 1較佳地係以第2 B圖之方 式實施。舉例而言，開關2 2 6及2 2 7可以被致動，以 連接該功率感測器2 2 1至該功率感測器2 2 1。因此， 一個由該測試中裝置218產生之射頻/微波訊號可以於 線2 3 0上施加至該功率感測器2 2 1。 或者，開關2 2 6可以被致動，結合開關2 2 4及方 向連接器2 2 0 ’以連接該測試中裝置2 1 8至該射頻源 2 1 0。因此，該功率感測器2 2 1可以用於測量由該射 頻源210所提供之功率。 較佳地，示於第2 B圖之該功率感測器2 2 1係爲一 11 (請先閱讀背面之注意事項再填寫本頁) - 1 I 1 I ) I I — —— — — — — — — 本紙張尺度適用中國國家標準（CNS)A4規格（2]0x 297公釐） 經濟部智慧財產局員工消費合作社印製 A7 ____B7____五、發明說叼（/0 ) 個精密之功率裝置，其轉換射頻訊號成爲正比於該射頻訊 號功率準位之直流電壓準位。因此，一個射頻輸入係施加 至該線2 3 0，且正及負之直流輸出準位係分別提供於線 2 3 2及2 3 4之上。於線2 3 2及2 3 4之上之直流輸 出在施加至用於分析之控制器2 0 6之前，可以施加至一 個精密之類比至數位轉換器（未示出”此外，較佳地，一 個控制線2 3 6係用於範圍選擇。 於一個較佳實施例之中，該功率感測器2 2 1及該E E P R 0M (例如E EPROM223)係位於相同組件 上，且集合構成該功率感測器模組2 1 6。此外，適合的 連接器（未示出）係用於便利由該E E P R〇M至控制器 2 0 6之資料傳輸，以及由功率感測器2 2 1至切換模組 2 1 4之資料傳輸。因此，該功率感測器模組2 1 6較佳 地係插接於該測試機2 0 0之中，因而使得該功率感測器 模組216係容易連接及交換。 如上所述，該功率測量通常係用於特徵化一個射頻/ 微波裝置之性能。一個用以測量一個測試中裝置之功率之 簡化程序係包括施加測試訊號至該測試中裝置，然後測量 造成之功率以回應該測試訊號。因此，該射頻源2 1 0 ' 該方向連接器2 2 0、該開關2 2 4及該開關2 2 7可以 在控制器2 0 6之控制之下操作，用以施加測試訊號至該 測試中裝置2 1 8。此外，該功率感測器2 2 1、該開關 2 2 6及開關2 2 7能夠類似地被控制，以測量測試中裝 置之輸出功率。 ------------^---l·—— — — 訂-- ---詹·線 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（2]0 X 297公釐） A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（（丨） 然而，於一個實際上的測量結構，測量系統不同元件 之輸入及輸出阻抗係非完全匹配。因此，訊號反射能夠被 系統元件之間沿著傳輸路徑而產生。此意味著：施加至功 率感測器2 2 1之訊號可部份反射，因而影響提供至功率 感測器2 2 1之功率數量，因而造成功率測量之不確定性 〇這些不確定性通常稱爲、、不匹配"之不確定性。 因爲在測試中裝置218及切換模組214之間亦可 能存在著阻抗不匹配，所以該訊號之一部份通常由該切換 模組電路反射回該測試中裝置1 1 8。此種現象可以被視 爲反射訊號之第一階影響。 此外，因爲切換模組2 1 4係設計成使得雜訊訊號由 測試中裝置2 1 8通過至該功率感測器2 2 1，所以該訊 號之剩餘部份通常由該切換模組214通過而至該功率感 測器2 2 1。然後，於功率感測器2 2 1之阻抗不匹配將 會導致反射雜訊訊號之另一部分，由雜訊產生器2 2 1反 射回測試中裝置2 1 8。此現象可以被視爲該反射訊號之 第二階影響。 一個用於微波測試系統中補償反射訊號之影響的新穎 方式敘述於T E R A D Y N E ®公司擁有專利權之美國專 利申請案第08/955，782號，該案於此倂入作爲 參考。該案敘述一個包括決定切換模組電路之參數" (亦即Sh、s12、s21及s22)之步驟的校準程序。這 些S參數能夠被視爲形成切換模組電路之數學模型。舉例 而H，一個向量網路分析儀（vector ne two (請先Μ讀背面之注f項再填寫本頁)-The IIIIIIIIIII line price scale is applicable to the Chinese national standard (CNS > A4 specification (2) 0X 297 mm) ΓΑΛ 0 M '' ^ A7 __ B7 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The above signals can be combined using the internal modulation (IM) path of the directional elements 2 4 5 and 2 5 6 and the switches 246 and 260. As described above, the 'testing machine 2 0 0' is mainly used for testing and Characterizing RF / microwave devices. It is difficult to measure the voltage and current levels of the signals generated by these devices. Therefore, the test machine 200 is usually used to perform power measurement, which can characterize the performance of the device. Therefore, as much as possible It is important to accurately measure the power measurement of these devices. Therefore, the test head 2 0 4 also incorporates a power sensor module 2 1 6 which combines a power sensor module 2 1 6 with a power sensor 2 2 1 and a power sensor module 2 of a plurality of programmable memory devices (for example, device 2 2 3). In a preferred embodiment, the memory device 2 2 3 uses an E EPROM. While implementing, the Ε EPR OM is an EEPROM such as X 24645 manufactured by XIC 0 R® Company of Mi Pitas, California, USA. In addition, the power sensor 2 2 1 is preferably implemented in the manner of FIG. 2B. For example In other words, the switches 2 2 6 and 2 2 7 can be activated to connect the power sensor 2 2 1 to the power sensor 2 2 1. Therefore, an RF / microwave generated by the device 218 under test A signal can be applied to the power sensor 2 2 1 on line 2 3 0. Alternatively, the switch 2 2 6 can be actuated, combining the switch 2 2 4 and the directional connector 2 2 0 'to connect the device under test 2 18 to the RF source 2 1 0. Therefore, the power sensor 2 2 1 can be used to measure the power provided by the RF source 210. Preferably, the power sensor shown in FIG. 2B 2 2 1 is 11 (please read the precautions on the back before filling this page)-1 I 1 I) II — —— — — — — — — This paper size applies to China National Standard (CNS) A4 specification (2 ] 0x 297 mm) A7 ____B7____ printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Inventive 叼 (/ 0) precision power Position, converting the RF signal becomes proportional to the number of RF power hearing DC level of the voltage level. Therefore, an RF input is applied to the line 2 3 0, and positive and negative DC output levels are provided on the lines 2 3 2 and 2 3 4 respectively. The DC output above lines 2 3 2 and 2 3 4 can be applied to a precision analog-to-digital converter (not shown) before being applied to the controller 2 06 for analysis (also not shown). A control line 2 3 6 is used for range selection. In a preferred embodiment, the power sensor 2 21 and the EEPR 0M (such as E EPROM223) are located on the same component, and the set constitutes the power sensor. Detector module 2 1 6. In addition, suitable connectors (not shown) are used to facilitate data transmission from the EEPROM to the controller 2 06, and from the power sensor 2 2 1 to the switching module. Data transmission of group 2 1 4. Therefore, the power sensor module 2 1 6 is preferably plugged into the testing machine 2 0, thus making the power sensor module 216 easy to connect and As mentioned above, this power measurement is usually used to characterize the performance of an RF / microwave device. A simplified procedure for measuring the power of a device under test involves applying a test signal to the device under test and then measuring the Power in response to the test signal. Therefore, RF source 2 1 0 'The directional connector 2 2 0, the switch 2 2 4 and the switch 2 2 7 can be operated under the control of the controller 2 0 6 to apply a test signal to the device under test 2 1 8. In addition, the power sensor 2 21, the switch 2 2 6 and the switch 2 2 7 can be similarly controlled to measure the output power of the device under test. ------------ ^ --- l · —— — — Order---- Jan · Line (Please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 (2) 0 X 297 (Mm) A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Invention Description ((丨) However, in an actual measurement structure, the input and output impedances of different components of the measurement system are not exactly matched. Therefore, the signal The reflection can be generated along the transmission path between system components. This means that the signal applied to the power sensor 2 2 1 can be partially reflected, thus affecting the amount of power provided to the power sensor 2 2 1 Causes uncertainty in power measurement. These uncertainties are often referred to as, mismatches, " Because there may be impedance mismatch between the device 218 and the switching module 214 during the test, a part of the signal is usually reflected by the switching module circuit back to the device under test 1 1 8. This phenomenon can be regarded as the first-order effect of the reflected signal. In addition, because the switching module 2 1 4 is designed to allow the noise signal to pass from the device 2 1 8 under test to the power sensor 2 2 1, The remaining part of the signal is usually passed by the switching module 214 to the power sensor 2 2 1. Then, the impedance mismatch between the power sensor 2 2 1 will cause another part of the reflected noise signal to be reflected back to the device 2 1 8 under test by the noise generator 2 2 1. This phenomenon can be regarded as the second-order effect of the reflected signal. A novel method for compensating the effects of reflected signals in microwave test systems is described in US Patent Application No. 08 / 955,782, which is owned by TE ER A D Y N E ® Corporation, which is incorporated herein by reference. This case describes a calibration procedure that includes the steps of determining the parameters of the switching module circuit (i.e., Sh, s12, s21, and s22). These S-parameters can be viewed as mathematical models that form the switching module circuit. For example, H, a vector network analyzer (please read the note f on the back before filling this page)
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n I 線 本紙張尺度適用中國國家標準（CNS)A4規格（2】〇 X 297公爱) 440703 Α7 Β7 經濟部智慧財產局員工消費合作杜印製 五、發明說明（A ) r k a n a 1 y Z e r )及習知之校準技術可以被用於 決定切換模組2 1 4之S參數。 該向量網路分析儀亦可用於測量該功率感測器模組2 1 6之反射係數ΓΡ5及該測試中裝置2 1 8之反射係數rD 〇 —旦該切換模組2 1 4之S參數及該功率感測器模組 2 1 6及該測試中裝置2 1 8之反射係數爲已知，該反射 訊號之第一及第二階影響能夠被計算出，且用以當實施功 率測量時作出適當之校正。 本發明之一個重要的優點係：用於功率感測器模組2 1 6之反射係數rPS在功率感測器模組2 1 6插接於測試 機2 0 0之前，係較佳地測量及儲存於E E P R 0M之中 。如此則簡化用於功率測量之測試機2 0 0之校準，這是 因爲該反射係數rPS與功率感測器模組2 1 6係在一起。 因此，當一個功率感測器模組增加至一個測試機，或 者當測試機中之一個功率感測器模組與一個不同的功率感 測器模組交換時，在使用測試機實施功率測量之前，不需 要測量反射係數rPS。這是因爲反射係數rPS係容易地由包 括於功率感測器模組之E E P R Ο Μ所存取。 一種決定測試中射頻/微波裝置之功率之方法’較佳 地係根據示於第3圖之程序而實施。此種程序係在軟體之 控制下實施，該軟體係程式規劃於包含於測試主體2 0 2 之內的控制器2 0 6之中。 首先，關連於功率感測器模組2 1 6之反射的不匹配 資料係於方塊3 1 0之中測量。此不匹配資料包括反射係 14 {請先閲讀背面之注$項再填寫本頁) 裝.------ -訂-----I---埃 本紙張尺度適用中國國家標準（CNS)A4規格（2]0 X 297公釐） 14 07 0 3 Α7 Β7 經濟部智慧財產局員工消費合作杜印製 五、發明說明（丨3 ) 數rPS。於較佳實施例之中，該反射係數rps係使用—個連 接至功率感測器模組216之向量網路分析儀測量而得， 該功率感測器模組2 1 6係未插接於該測試機2 0 〇。因 此，該向暈網路分析儀測量功率感測器模組2 1 6之一個 捧2 6 7 (第2 C圖）看進去之反射係數Fps°此外’因 爲測試中裝置2 1 8係設計成涵蓋一個頻寬’ rPS較佳地 係於整個頻寬之許多頻率之下作決定。 在反射係數rPs之期望數目於方塊3 1 0之中決定之 後，於方塊3 1 2中’該反射係數係被程式規劃於E E P R〇M之中。該反射係數係被程式規劃於E E P R 0M之 中之方式對於本發明而言係不重要。 根據本發明之一個功率感測器模組包括一個功率感測 器及以直接相關於功率感測器之反射係數資料而程式規劃 於其內之EEPROM。然後，該功率感測器模組可以被 插接於一測試機之中，該測試機使用儲存於E E P R 0Μ 中之資料以減少不匹配之不確定性，且因此增加功率測量 準確度。 示於第3圖之方塊310至316之程序主要係在功 率感測器模組2 1 6及該測試機2 0 0之起始校正時期間 所實施。因此，方塊3 1 〇及3 1 2係很少實施。然而方 塊3 1 4至3 1 6主要係於一個製造程序之中重復實施。 用以快速測量大量射頻/微波裝置之功率測量。 特別是，諸如測試中裝置2 1 8之測試中射頻/微波 裝置’係於方塊3 1 4中連接至測試機2 0 0。通常’一 15 (請先M讀背面之注意事項再填寫本頁) 裝 • n Bi 訂--------.-娘 本紙張尺度適用中國國家標準（CNS)A4規格⑵G χ观公爱） Α7 Β7 五、發明說叼（外） 個測試中裝置係透過一個裝置介面板而連接至該測試機2 0 0。此外，測試中裝置及測試機之間的連接，可以使用 自動晶片握持設備，而以自動化之方式實施。或者，這些 連接可以以手動方式實施。 其次，測試中裝置2 1 8之功率係於方塊3 1 6之中 使用功率感測器2 2 1測量。因此，於切換模組2 1 4中 之開關264及266 (第2C圖）可以被致動，以由偏 壓Τ網路2 6 5 (第2 C圖）傳送一個射頻輸入至功率感 測器模組2 1 6。然後，該功率感測器模組2 1 6轉換該 射頻輸入成爲正比於該射頻輸入功率準位之直流電壓準位 0 此外，儲存於E E P R 0Μ之中之不匹配資料係用於 計算由該切換模組2 1 4之一個諸如埠2 6 8 (第2 C圖 )之埠看進去之反射係數rPS.._CORRECTED。該用於埠2 6 8 之校正不匹配資料可以使用下列方程式計算： Γ PS...CORRECTED = ^22+ (§21 S^Tps) /(1-Γ PS^ll) 方f壬式 1 因此，由埠2 6 8看進去之切換模組2 1 4之反射係 數S,1、S21、Si 2、S22亦被測量出。該S參數較佳地係 使用一個連接至該測試機2 0 0之向量網路分析儀測量。 舉例而言，該向量網路分析儀可以連接至一個裝置介面板 (未示出）上之測試機接腳，其係作爲測試頭2 0 4及測 試中裝置2 1 8之間之介面該測試機接腳可以連接至該 切換模組2 1 4之埠2 6 8 (第2 C圖）。此外’該3參 數較佳地係如同於方塊310中決定該反射係數之相同頻 】6 本紙張尺度適用中國國家標準（CNS)A4^格(210 X 297公ϋ (請先閲讀背面之ii意事項再填寫本頁)n I-line paper size applies Chinese National Standard (CNS) A4 specifications (2) 0X 297 public love) 440703 Α7 Β7 Intellectual Property Bureau of the Ministry of Economic Affairs, employee consumption cooperation Du printed 5. Description of invention (A) rkana 1 y Z er ) And the conventional calibration technique can be used to determine the S parameter of the switching module 2 1 4. The vector network analyzer can also be used to measure the reflection coefficient Γ5 of the power sensor module 2 1 6 and the reflection coefficient rD of the device 2 1 8 in the test. Once the S parameters of the switching module 2 1 4 and The reflection coefficients of the power sensor module 2 16 and the device 2 1 8 under test are known. The first and second order effects of the reflection signal can be calculated and used to make the measurement when performing the power measurement. Proper correction. An important advantage of the present invention is that the reflection coefficient rPS for the power sensor module 2 1 6 is better measured before the power sensor module 2 1 6 is connected to the tester 2 0. Stored in EEPR 0M. This simplifies the calibration of the tester 2000 for power measurement, because the reflection coefficient rPS is tied to the power sensor module 2 1 6. Therefore, when a power sensor module is added to a test machine, or when a power sensor module in the test machine is exchanged with a different power sensor module, before using the test machine to perform power measurement No measurement of reflection coefficient rPS is required. This is because the reflection coefficient rPS is easily accessed by E E P R 0 M included in the power sensor module. A method of determining the power of the RF / microwave device during the test 'is preferably implemented according to the procedure shown in FIG. This program is implemented under the control of software, which is planned in the controller 2 06 included in the test body 2 0 2. First, the mismatched data related to the reflection of the power sensor module 2 16 is measured in block 3 10. This mismatch includes the reflection system 14 (please read the note on the back before filling this page). -------- -Order ----- I --- Ebony paper size applies Chinese national standards ( CNS) A4 specification (2) 0 X 297 mm 14 07 0 3 Α7 Β7 Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs on consumer cooperation. 5. Description of invention (丨 3) Number of rPS. In a preferred embodiment, the reflection coefficient rps is measured using a vector network analyzer connected to a power sensor module 216. The power sensor module 2 1 6 is not plugged in The test machine was 200. Therefore, the reflection coefficient Fps ° of the power sensor module 2 1 6 which is measured by the halo network analyzer 2 6 7 (Figure 2 C). In addition, because the device 2 1 8 in the test is designed as Covering a bandwidth 'rPS is preferably determined under many frequencies of the entire bandwidth. After the desired number of reflection coefficients rPs is determined in block 3 1 0, the reflection coefficients in block 3 1 2 are programmed into E E P ROM. The manner in which the reflection coefficient is programmed into E E P R 0M is not important to the present invention. A power sensor module according to the present invention includes a power sensor and an EEPROM programmed into the power sensor module with the reflection coefficient data directly related to the power sensor. Then, the power sensor module can be plugged into a test machine, which uses the data stored in E EP R 0M to reduce the uncertainty of mismatch, and thus increase the accuracy of power measurement. The procedures of blocks 310 to 316 shown in Fig. 3 are mainly performed during the initial calibration of the power sensor module 2 16 and the tester 2000. Therefore, blocks 3 1 0 and 3 1 2 are rarely implemented. However, blocks 3 1 4 to 3 1 6 are mainly implemented repeatedly in one manufacturing process. Power measurement for rapid measurement of a large number of RF / microwave devices. In particular, a RF / microwave device under test, such as the device under test 2 18, is connected to the tester 2000 in block 3 1 4. Usually 'a 15 (please read the notes on the back before filling in this page) Loading • n Bi order --------.- The size of the paper is applicable to the Chinese National Standard (CNS) A4 size ⑵G χ Guan Gong Love) Α7 Β7 5. The invention says that (outside) the device under test is connected to the tester 2000 through a device interface panel. In addition, the connection between the device under test and the tester can be implemented in an automated manner using an automatic wafer holding device. Alternatively, these connections can be implemented manually. Secondly, the power of the device 2 1 8 in the test is in block 3 1 6 and measured with the power sensor 2 2 1. Therefore, the switches 264 and 266 (Figure 2C) in the switching module 2 1 4 can be actuated to transmit an RF input to the power sensor from the biased T network 2 6 5 (Figure 2C). Module 2 1 6. Then, the power sensor module 2 16 converts the RF input into a DC voltage level 0 that is proportional to the RF input power level. In addition, the mismatched data stored in the EEPR 0M is used for calculation by the switching The reflection coefficient rPS .._ CORRECTED of a port of module 2 1 4 such as port 2 6 8 (Figure 2C). The corrected mismatch data for port 2 6 8 can be calculated using the following equation: Γ PS ... CORRECTED = ^ 22 + (§21 S ^ Tps) / (1-Γ PS ^ ll) F f The reflection coefficients S, 1, S21, Si 2, and S22 of the switching module 2 1 4 viewed through port 2 6 8 are also measured. The S parameter is preferably measured using a vector network analyzer connected to the tester 200. For example, the vector network analyzer can be connected to a tester pin on a device interface panel (not shown), which is used as an interface between the test head 204 and the device under test 2 1 8 The machine pins can be connected to port 2 6 8 of the switching module 2 1 4 (Figure 2 C). In addition, 'the 3 parameters are preferably the same frequency as the reflection coefficient determined in block 310] 6 This paper size applies the Chinese National Standard (CNS) A4 ^ grid (210 X 297 gong) (please read the intention on the back first) (Fill in this page again)
> I I m I ϋ 一=0, ϋ n n - ϋ I - I 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 A〆3 A7 __；_ B7__ 五、發明說明（丨Λ ) 率點之下測量。 該校正之不匹配資料可以儲存於一包括於該控制器2 0 6中之記憶體之中。儲存該校正之不匹配資料之方式及 裝置對於本發明而言係不重要。 然後’該校正之不匹配資料係用於於方塊3 1 0中測 量之功率作校正。該校正較佳地係使用熟悉本項技藝人士 熟知之技術而計算。此外，當分析由該功率感測器模組2 1 6所測量出之功率時，該功率測量校正可以被該控制器 2 0 6所實施。 以上已經描述一個實施例，許多替代實施例或變化可 以被完成。舉例而言，以上已描述本發明之功率感測器模 組較佳地係倂入高自動化之測試設備，然而，此僅爲一個 例子。該功率感測器模組可以替代地與較少自動化之測試 系統一起使用。 此外，包括一個測試主體及一個測試頭之特定測試機 結構已經被描述。然而，此亦僅爲一個例子。該功率感測 器模組可以與一個任何結構之測試機一起使用。該功率感 測器模組亦可以與設計用於候補使用之測量設備一起使用 〇 此外，前文已述及：E E P R 0Μ係用於儲存於功率 感測器模組中之不匹配資料。然而，此亦僅係一個例子》 任何可程式化之非揮發儲存裝置可替代地使用。 該E E P R 0Μ亦用於儲存不匹配資料以外之資料。 舉例而言，該E E P R 0Μ可用於儲存功率感測器特定之 17 ί紙張尺度適用中國ΪΓ家標準（CNS)A4规格（2〗0 X 297公釐） --—I I I 1 I I I ! — I--— — I 訂— — — — — —---^ (請先Μ讀背面之注意事項再填寫本頁) 44 07 0 3 Α7 _____Β7__ 五、發明說明（4) κ因子資料。眾所周知，該κ因子係與功率感測器之效率 有關，且係爲一個（1 -|rPS丨2)之函數。 此外，第2 B圖顯示包含於功率感測器模組中之功率 感測器之特定實施之示意圖。然而，第2 B圖僅係例示性 的。任何有用的功率感測器電路可以替代使用。 此外，第3圖顯示用於使用功率感測器模組而實施功 率測量之步驟的特定序列。然而，此亦僅係一個例子°示 於第3圖之步驟可以以任何有用及方便的次序而實施，只 要功率感測器模組在任何功率測量實施之前已完全作程式 規劃。 因此，本發明僅受限於後附申請專利範圍之精神及範 — — — — — HI — — ! ---— II 訂.！I-嗅 <請先閱讀背面之注意事項再填寫本頁》 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4覘格（2〗〇 X 297公釐)> II m I ϋ 1 = 0, ϋ nn-ϋ I-I Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Consumer ’s Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A〆3 A7 __; _ B7__ V. Description of the invention (丨 Λ) Measured below the rate point. The corrected mismatch data may be stored in a memory included in the controller 206. The manner and means for storing the corrected mismatch data is not important to the present invention. 'The corrected mismatch data is then used to correct the power measured in block 3 10. The correction is preferably calculated using techniques familiar to those skilled in the art. In addition, when analyzing the power measured by the power sensor module 2 16, the power measurement correction can be implemented by the controller 2 06. One embodiment has been described above, and many alternative embodiments or variations can be made. For example, it has been described above that the power sensor module of the present invention is preferably incorporated into a highly automated test equipment, however, this is only an example. The power sensor module can instead be used with less automated test systems. In addition, a specific test machine structure including a test body and a test head has been described. However, this is only an example. The power sensor module can be used with a tester of any structure. The power sensor module can also be used with measurement equipment designed for alternate use. In addition, as mentioned earlier: E E P R 0M is used to store mismatched data in the power sensor module. However, this is only an example. Any programmable non-volatile storage device can be used instead. The E E P R 0M is also used to store data other than mismatched data. For example, the EEPR 0M can be used to store a specific 17 paper size of the power sensor. It is applicable to China National Standard (CNS) A4 specifications (2〗 0 X 297 mm) --- III 1 III! — I-- — — I Order — — — — — — --- ^ (Please read the notes on the back before filling out this page) 44 07 0 3 Α7 _____ Β7__ 5. Description of the invention (4) κ factor data. It is well known that the κ factor is related to the efficiency of the power sensor and is a function of (1-| rPS 丨 2). In addition, FIG. 2B shows a schematic diagram of a specific implementation of the power sensor included in the power sensor module. However, Figure 2B is only illustrative. Any useful power sensor circuit can be used instead. In addition, Figure 3 shows a specific sequence of steps for performing a power measurement using a power sensor module. However, this is only an example. The steps shown in Figure 3 can be implemented in any useful and convenient order, as long as the power sensor module is fully programmed before any power measurement is implemented. Therefore, the present invention is limited only by the spirit and scope of the scope of the attached patent application. — — — — — HI — —! ---— Order II! I-Smell < Please read the notes on the back before filling out this page. "Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs.