TW431940B - Method for cleaning an abrasive surface - Google Patents

Method for cleaning an abrasive surface Download PDF

Info

Publication number
TW431940B
TW431940B TW88122434A TW88122434A TW431940B TW 431940 B TW431940 B TW 431940B TW 88122434 A TW88122434 A TW 88122434A TW 88122434 A TW88122434 A TW 88122434A TW 431940 B TW431940 B TW 431940B
Authority
TW
Taiwan
Prior art keywords
door panel
extension
fire door
central part
central portion
Prior art date
Application number
TW88122434A
Other languages
Chinese (zh)
Inventor
Rajeev Bajaj
Bradley Withers
Rahul Surana
Stephen Jew
Wilbur C Krusell
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Application granted granted Critical
Publication of TW431940B publication Critical patent/TW431940B/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321After treatment
    • H01L21/32115Planarisation
    • H01L21/3212Planarisation by chemical mechanical polishing [CMP]

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Special Wing (AREA)

Abstract

A method of cleaning an abrasive surface, such as a polishing pad in a chemical-mechanical-polishing apparatus, includes the application of an acidic cleaning solution to the abrasive surface, while applying an abrasive force to the abrasive surface for the removal of reaction by-products and processing debris from the abrasive surface. The acidic cleaning solution chemically reacts with the reaction by-products, and in conjunction with the abrasive force, removes the reaction by-products from the abrasive surface. In a preferred embodiment, a polishing pad used to remove copper from a semiconductor substrate is cleaned by applying a dilute hydrochloric acid solution to the polishing pad, while rotating a cleaning disk against the polishing pad.

Description

M431940 五、新型說明: 【新型所屬之技術領域】 [0001] 本創作關於一種防火門板抗變形結構,主要指一種 可減小防火門板受熱變形量以增進防火安全性。 【先前技術】 [0002] 防火門為現代建築之主要防火安全建材,並該防火 門可提供阻熱及防止火焰滲入以具防火安全功效,而各 國一般具防火標準使得於門體一側受熱面加熱至設定溫 度(我國為925°C)時其門體另一側非受熱面溫度不得高於 設定背溫(我國為260°C),且門體之變形量不得超過設定 曲度以防止外界火苗由變形門隙滲入門體内側。 [0003] 習知防火門板大多由金屬製造,並該防火門係於金 屬門板内設置阻熱材阻熱,但因金屬特性當受熱時將產 生較大變形情形,因而目前防火門測試時即針對防火門 側緣位置為主要測試點以確保防火門側緣不會產生較大 滲火間隙。 [0004] 請參閱第八圖所示即為習知結構之一,並該防火門1 ’二侧具金屬門板11’ ,並於二門板11’間設置阻熱材 12’ ,並該防火門Γ設於外框2’内,又當由防火門Γ 之一侧門板11’加熱(如箭頭所示)時該防火門Γ將朝向 加熱方向產生彎曲變形,然而因門板11’受熱時將產生 中央凸出並側方對應彎曲,將造成側方彎曲變形量過大 並與外框2’產生較大間隙a情形,且該門板11’面積愈 大時將造成側方變形量相對更大,並該較大間隙a更會造 成火焰滲入之通道,因而習知金屬防火門具變形量不易 1012015438-0 101204741^單編號A〇101 第3頁/共19頁 M431940 [0005] [0006] [0007] [0008] 減少缺失,雖然習知結構係可於防火門内設置骨架減低 變形量,但該骨架為金屬材質時其骨架本身亦將受熱彎 曲,因而該藉由骨架抗變形設計仍不易確實減小門板11 ’側緣之受熱變形量。 【新型内容】 本創作之主要目的在提供一種藉由門板中央部、側 部組合設計以減小門板受熱變形量。 本創作之另一目的在提供一種門板中央部、側部設 置可提供受熱變形之延伸段以更減小門板受熱變形量, 並可具組合整體質感。 . 本創作之防火門板由金屬材質製造,並包括一中央 部、二側部,並該中央部面積大於二側部面積,又二側 部對應中央部位置為内側端,另一側為外側端,又該中 央部二侧分別與二側部内側端由點焊或其他方式固接, 又本創作組成門體時可具二門板,並於二門板内設置阻 熱材,側方設置侧框,使得由一侧防火門板加熱時因中 央部面積小於習知防火門板,可具較小變形量及減緩影 響側部變形情形,又該面積較小之二側部本身變形量較 小,使得二側部外側端變形量可有效減小以防止門板側 緣與外框間產生較大滲火間隙,並可具較佳防火安全性 功效。 本創作之中央部二側及二側部之内侧端位置可分別 設置對應中央部、二側部之板面不同方向之第一延伸段 、第二延伸段,並令第一延伸段、第二延伸段由點焊或 其他適當方式接合,使得該第一、第二延伸段可於受熱 101204741^^^11 A0101 第4頁/共19頁 1012015438-0 M431940 時提供變形空間以更減小中央部、二側部變形量。 [0009] 本創作中央部之第一延伸段可朝向中央部内面彎曲 ,並端緣朝向中央部中央方向,並具第一彎曲部、第一 接合端,又二側部之第二延伸段向内垂直方向彎曲具側 壁,並於側壁朝向第一接合端方向延伸具第二接合端, 並使中央部之第一接合端與二側部之第二接合端固接, 並因固接位置位於組合門板内侧、由門板外侧不能觀視 ,可具較佳整體質感,又當由門板加熱令該中央部受熱 ^ 變形時該面積較小之中央部可具較小變形量,且第一彎 曲部可提供變形時朝變形方向展開以減小中央部影響側 部變形量,又該二侧部之第二延伸段側壁亦可朝向變形 方向展開減小變形量,使得二側部外側端之變形量可更 為減低以具更佳抗變形功效。 [0010] 本創作另一實施例之中央部之第一延伸段可朝向中 央部内側具側壁,並於側壁朝向中央部外側方向具第三 接合端;又二側部内側端之第二延伸段可朝向側部内面 • 彎曲,並端緣朝向側部中央方向,並具第二彎曲部、第 四接合端,並使二側部之第二延伸段可置於中央部之第 一延伸段位置,並使第三接合端、第四接合端固接,且 組合後該固接位置位於組合門板内側,由門板外側不能 觀視,可具較佳整體質感,又當門板加熱令中央部受熱 變形時該面積較小之中央部可具較小變形量,且中央部 之第一延伸段可朝受熱方向展開,並該第一延伸段係牵 引側部之第二延伸段,並該第二延伸段之第二彎曲部可 對應變形以減小側部外側端之變形量以具更佳抗變形功 10120474产單編號 Α°1ίΗ 第 5 頁 / 共 19 頁 1012015438-0 M431940 效。 【實施方式】 [0011] 在本創作以下各實施例中類同功能結構以相同圖號 表示,請參閱第一、三圖,本創作第一實施例之防火門板 io由金屬材質製造,並包括一中央部i、二側部2,並該 中央部1面積大於二侧部2面積,並二側部2對應中央部i 位置為内側端21,另一側為外側端22,又該申央部i二側 及二側部2之内側端21位置分別設置對應中央部丨、二側 部2之板面不同方向之第一延伸段丨丨、第二延伸段23,並 該第一延伸段11朝向中央部1内面彎曲,並端緣朝向中央 部1中央方向,並具第一彎曲部lu、第一接合端112,又 —側部2之第二延伸段23向内垂直方向彎曲具侧壁231, 並側壁231 —侧可容置第一彎曲部m,並於侧壁231朝 向第一接合端112方向延伸具第二接合端232,並使中央 部1之第一接合端112與二側部2之第二接合端232點焊固 接,並因該固接位置位於組合門板1〇内側、由門板1〇外 側不能觀視,可具較佳整體質感,而本實施例之二侧部2 對應中央部1為直向設置,並本創作組成門體時具二門板 10,並於二門板1〇内設置阻熱材3,側方設置側框4,並 該門體設於外框5上。 [0012] 請參閱第四圖,本創作由一側防火門板丨〇加熱時因 中央部1面積小於習知防火門板1 〇,可具較小變形量,並 該面積較小之二側部2本身變形量可更為減小,又該中央 部1受熱變形時第一彎曲部可提供變形時朝向變形方 向展開以減小中央部1影響側部2變形量,又該二側部2之 10削74产單编號A〇101 第6頁/共19頁 1012015438-0 M431940 側壁231亦可朝向變形方向展開減小變形量,使得二側部 2外側端2 2之變形量可更為減低以具更佳抗變形功效,並 使該外側端22與外框5之間隙b可遠小於習知設計(如第八 圖之滲火間隙a)以具更佳防火焰滲入功效。 請參閱第五圖’本創作第二實施例類同第一實施例 ,其主要差異在該二側部2對應中央部1可為橫向設置, 並因中央部1面積較小,且該門板10之二側上、下端為最 易變形位置,因而該設計亦可具本創作訴求功效。M431940 V. New type description: [Technical field to which the new type belongs] [0001] This creation relates to a fire door panel anti-deformation structure, which mainly refers to a type that can reduce the heat deformation of the fire door panel to improve fire safety. [Previous technology] [0002] Fire doors are the main fire safety building materials for modern buildings, and the fire doors can provide heat resistance and prevent flame penetration to have fire safety functions, and countries generally have fire standards to make the heating surface on the side of the door. When heated to the set temperature (925 ° C in China), the temperature of the non-heating surface on the other side of the door body must not be higher than the set back temperature (260 ° C in China), and the deformation of the door body must not exceed the set curvature to prevent outside The flame penetrates the inside of the body from the deformed door gap. [0003] Conventional fire door panels are mostly made of metal, and the fire door is provided with a heat insulating material in the metal door panel to prevent heat, but due to the metal characteristics, it will cause a large deformation when heated, so the current fire door test is aimed at The position of the fire door's side edge is the main test point to ensure that the fire door's side edge does not create a large fire gap. [0004] Please refer to the eighth figure, which is one of the conventional structures, and the fire door 1 'has metal door plates 11' on both sides, and a heat insulating material 12 'is provided between the two door plates 11', and the fire door Γ is set in the outer frame 2 ', and when heated by one side door panel 11' of the fire door Γ (as shown by the arrow), the fire door Γ will bend toward the heating direction, but will be generated when the door panel 11 'is heated. The center is convex and the side is bent correspondingly, which will cause the side bending deformation to be too large and produce a large gap a with the outer frame 2 ', and the larger the area of the door panel 11' will cause the side deformation to be relatively larger, and The larger gap a will further cause a passage for the flame to penetrate, so it is not easy for the conventional metal fire door to deform 1012015438-0 101204741 ^ Single number A〇101 Page 3 of 19 M431940 [0005] [0006] [0007] [0008] Reduction of loss. Although the conventional structure can be provided with a skeleton inside the fire door to reduce the amount of deformation, the skeleton itself will also be heated and bent when the skeleton is made of metal. Therefore, it is still difficult to reduce the door panel by the anti-deformation design of the skeleton. 11 'The amount of thermal deformation of the side edge. [New content] The main purpose of this creation is to provide a design of the central part and side parts of the door panel to reduce the amount of heat deformation of the door panel. Another purpose of this creation is to provide a central and lateral arrangement of the door panel that can provide thermally deformed extensions to further reduce the amount of thermal deformation of the door panel and have a combined overall texture. The fire door panel of this creation is made of metal material, and includes a central part and two side parts, and the area of the central part is larger than the area of the two side parts, and the positions of the two sides corresponding to the central part are the inner ends, and the other side is the outer ends. The two sides of the central part and the inner ends of the two side parts are respectively fixed by spot welding or other methods. When the door body is formed by this creation, two door panels can be provided, and a heat insulating material is provided in the two door panels, and a side frame is provided on the side. Therefore, when the fire-resistant door panel on one side is heated, the area of the central part is smaller than that of the conventional fire-resistant door panel, which can have a small amount of deformation and slow down the influence of the side deformation. The amount of deformation at the outer end of the side can be effectively reduced to prevent a large fire gap between the side edge of the door panel and the outer frame, and it can have better fire safety effects. The first and second extensions corresponding to the different directions of the central and two sides of the plate surface can be set on the two sides of the central part and the inner ends of the two sides, respectively. The extensions are joined by spot welding or other suitable methods, so that the first and second extensions can be heated when it is heated 101204741 ^^^ 11 A0101 Page 4 of 19 1012015438-0 M431940 to provide deformation space to further reduce the central part , The amount of deformation on both sides. [0009] The first extension of the central portion of the creation can be bent toward the inner surface of the central portion, and the end edge faces the central direction of the central portion, and has a first curved portion, a first joint end, and a second extension of the two side portions. The inner side is bent with a side wall, and the side wall is extended with a second joint end toward the first joint end, and the first joint end of the central part and the second joint end of the two side parts are fixedly connected. The inside of the combined door panel can not be viewed from the outside of the door panel, which can have a better overall texture, and when the central part is heated by the door panel, the central part with a smaller area can have a smaller amount of deformation when deformed, and the first curved part It can be provided to expand in the deformation direction during deformation to reduce the amount of deformation of the central portion affecting the side portion, and the side wall of the second extension of the two sides can also be expanded toward the deformation direction to reduce the amount of deformation, so that the amount of deformation at the outer end of the two sides Can be further reduced for better anti-deformation effect. [0010] In another embodiment of the present invention, the first extension of the central portion may have a side wall toward the inner side of the central portion, and have a third joint end in the direction of the side wall toward the outer side of the central portion; Can be bent toward the inner surface of the side, with the end edge facing the center of the side, with a second bend and a fourth joint end, and the second extension of the two sides can be placed at the first extension of the center The third joint end and the fourth joint end are fixedly connected, and the combined position is located inside the combined door panel, which cannot be viewed from the outside of the door panel, and can have a better overall texture. When the door panel is heated, the central part is deformed by heat In this case, the central portion with a smaller area may have a smaller amount of deformation, and the first extension of the central portion may be expanded toward the heating direction, and the first extension is a second extension of the traction side, and the second extension The second curved portion of the segment can be deformed correspondingly to reduce the amount of deformation at the outer end of the side portion for better deformation resistance. 10120474 Production Order No. Α ° 1ίΗ Page 5 of 19 1012015438-0 M431940 effective. [Embodiment] [0011] In the following embodiments of the present invention, the similar functional structures are indicated by the same drawing numbers. Please refer to the first and third drawings. The fire door panel 10 of the first embodiment of this creation is made of metal and includes A central portion i, two side portions 2, and the area of the central portion 1 is larger than the area of the two side portions 2. The position of the two side portions 2 corresponding to the central portion i is the inner end 21, and the other side is the outer end 22. The first and second extensions 23 and 23 of the two sides of the part i and the inner end 21 of the two-side part 2 are respectively provided corresponding to the central part 丨, the two extensions 23 of the plate surface in different directions, and the first extension 11 is bent toward the inner surface of the central portion 1, and the end edge faces the central direction of the central portion 1, and has a first bent portion lu, a first joint end 112, and a second extension 23 of the side portion 2 is bent inwardly in the vertical direction. The wall 231 and the side wall 231 can receive the first bent portion m on one side, and the side wall 231 extends with a second joint end 232 toward the first joint end 112, and the first joint ends 112 and 2 of the central portion 1 The second joint end 232 of the side part 2 is spot-welded and fixed, and the fixed position is located in the composite door panel 1. The side and the outside of the door panel 10 can not be viewed and can have a better overall texture, while the side part 2 of this embodiment corresponds to the central part 1 in a vertical setting, and when this composition is used to form the door body, there are two door panels 10, and The two door panels 10 are provided with a heat insulation material 3 inside, a side frame 4 is provided on the side, and the door body is provided on the outer frame 5. [0012] Please refer to the fourth figure. In the present invention, one side of the fire door panel is heated because the area of the central part 1 is smaller than the conventional fire door panel 10, which can have a small amount of deformation, and the side area 2 with the smaller area. The amount of deformation itself can be further reduced, and the first bending portion of the central portion 1 can be expanded toward the deformation direction when deformed to reduce the amount of deformation of the side portion 2 affected by the central portion 1 when the heat is deformed, and the two side portions 2 to 10 Cut 74 production order number A〇101 Page 6 of 19 1012015438-0 M431940 The side wall 231 can also be expanded toward the deformation direction to reduce the amount of deformation, so that the amount of deformation of the outer side 22 of the two sides 2 can be further reduced. It has better anti-deformation effect, and the gap b between the outer end 22 and the outer frame 5 can be much smaller than the conventional design (such as the fire penetration gap a in the eighth figure) to have better flame penetration prevention effect. Please refer to the fifth figure. The second embodiment of this creation is similar to the first embodiment. The main difference is that the two side portions 2 can be arranged horizontally corresponding to the central portion 1, and because the area of the central portion 1 is small, and the door panel 10 The upper and lower ends of the two sides are the most easily deformed positions, so the design can also have the effect of this creation.

請參閱第六圖,本創作第二實施例類同第一實施例 ,其主要差異在中央部1之第一延伸段11朝向中央部1内 側垂直方向彎曲具侧壁Π3,並於侧壁113朝向中央部】外 側方向具第三接合端114 ;又二側部2内側端21之第二延 伸段23朝向側部2内面彎曲,並端緣朝向側部2中央方向 ’並具第二彎曲部233、第四接合端234,並使二側部2之 第二延伸段23置於中央部1之第一延伸段n位置,並使第 三接合端114、第四接合端234點焊固接,且組合後該固 接位置位於組合門板1 〇内側,由門板1 〇外側不能觀視, 可具較佳整體質感。 請參閱第七圖,當由一側門板1〇加熱令中央部j受熱 變形時該面積較小之中央部丨可具較小變形量,且中央部 1之第一延伸段11可朝受熱方向展開,並該第一延伸段u 係牵引側部2之第二延伸段23,並該第二延伸段23之第二 f曲部233可對應變形以減小側部2外側端22之變形量以 具更佳抗變形功效。 [0016] 1012〇474产單編號仙1。1 是以由以上所述’本創作確可較習知產品具減低受 第7頁/共19頁 1012015438-0 M431940 熱變形量功效,而本創作更經防火測試可符合測試標準 ,並前述實施例為本創作例示,並非本創作限制,凡依 據本創作精神所為之等效改變亦應屬於本創作範疇内。 【圖式簡單說明】 [0017] 第一圖係本創作之第一實施例門板分解圖。 [0018] 第二圖係本創作之第一實施例組合成門板剖視示意圖。 Ϊ [0019] 第三圖係本創作之第一實施例組合正視及設於外框上示 意圖。 [0020] 第四圖係本創作之第一實施例於一側門板加熱變形示意 圖。 [0021] 第五圖係本創作之第二實施例組合正視示意圖。 [0022] 第六圖係本創作之第三實施例組合成門體剖視示意圖。 [0023] 第七圖係本創作之第三實施例於一侧門板加熱變形示意 圖。 [0024] 第八圖係習知金屬防火門加熱變形示意圖。 · 【主要元件符號說明.】 [0025] 10門板 1中央部 11第一延伸段 [0026] 111第一彎曲部 112第一接合端 11 3側壁 [0027] 114第三接合端 2側部 21内側端 [0028] 2 2外側端 23第二延伸段 231側壁 [0029] 232第二接合端 233第二彎曲部 234第四接合端 101204741^^^^ A0101 第8頁/共19頁 1012015438-0 M431940 [0030] 3阻熱材 4側框 5外框 [0031] 1, 防火門 11’門板 12’阻熱材 [0032] 2, 外框 1〇題74ί^編號A_1 第9頁/共19頁 1012015438-0Please refer to the sixth figure. The second embodiment of this creation is similar to the first embodiment. The main difference is that the first extension 11 of the central portion 1 is bent toward the inner side of the central portion 1 with a side wall Π3 in a vertical direction, and the side wall 113 Toward the central portion] with a third joint end 114 in the outer direction; and the second extension 23 of the inner end 21 of the two side portions 2 is bent toward the inner surface of the side portion 2 and the end edge faces the center direction of the side portion 2 and has a second bent portion 233, the fourth joint end 234, and the second extension section 23 of the two side portion 2 is placed at the first extension n position of the central portion 1, and the third joint end 114 and the fourth joint end 234 are spot-welded and fixed. And, after the combination, the fixed position is located inside the combined door panel 10, which cannot be viewed from the outside of the door panel 10, and can have a better overall texture. Referring to the seventh figure, when the central portion j is deformed by heating the door panel 10 on one side, the smaller central portion 丨 may have a smaller amount of deformation, and the first extension section 11 of the central portion 1 may face the heating direction. Unfolded, and the first extension u is the second extension 23 of the side 2 and the second f-curved portion 233 of the second extension 23 can be deformed correspondingly to reduce the amount of deformation of the outer end 22 of the side 2 For better anti-deformation effect. [0016] 1012〇474 Production Order No. Sin 1.1 is based on the above-mentioned 'this creation can indeed reduce the effect of the heat distortion amount of the product compared to conventional products. Page 7 of 19 1012015438-0 M431940 The fire test can also meet the test standards. The foregoing embodiment is an example of the creation and is not a limitation of the creation. Any equivalent change based on the spirit of the creation should also fall within the scope of the creation. [Schematic description] [0017] The first diagram is an exploded view of the door panel of the first embodiment of the present invention. [0018] The second figure is a schematic sectional view of a door panel assembled by the first embodiment of the present invention. [0019] The third picture is a combination of the first embodiment of the present invention and a front view and an intention shown on the outer frame. [0020] The fourth diagram is a schematic diagram of a first embodiment of the present invention in which a door panel is deformed by heating. [0021] The fifth diagram is a schematic front view of the combination of the second embodiment of the present invention. [0022] The sixth diagram is a schematic sectional view of a door body assembled by the third embodiment of the present invention. [0023] The seventh diagram is a schematic diagram of a third embodiment of the present invention in which a door panel is deformed by heating. [0024] FIG. 8 is a schematic diagram of a conventional metal fire door heating deformation. · [Description of main component symbols.] [0025] 10 Door panel 1 central portion 11 first extension [0026] 111 first curved portion 112 first joint end 11 3 side wall [0027] 114 third joint end 2 side portion 21 inside End [0028] 2 2 Outer end 23 Second extension 231 Side wall [0029] 232 Second joint end 233 Second bend 234 Fourth joint end 101204741 ^^^^ A0101 Page 8 of 19 1012015438-0 M431940 [0030] 3 heat-resistant material 4 side frame 5 outer frame [0031] 1, fire door 11 'door panel 12' heat-resistant material [0032] 2, outer frame 10 title 74 ^ number A_1 page 9 of 19 1012015438 -0

Claims (1)

六、申請專利範圍: .種防火門板抗變形結構,並該防火門板由金屬材質製造 ,包括: 一中央部; —側部,該中央部面積大於二側部面積,並二側部對應中 央°卩位置為内側端,另一側為外侧端,又該中央部二側分 別與二側部内側端固接。 .如申晴專利範圍第1項所述之防火門板抗變形結構,其中 該中央部與二側部由點焊固接。 •如申凊專利範圍第1項所述之防火門板抗變形結構,其中 二側部對應中央部為直向設置。 .如申請專利範圍第1項所述之防火門板抗變形結構,其中 二侧部對應中央部為橫向設置。 .如申凊專利範圍第3或4項所述之防火門板抗變形結構,其 中忒中央部二側及二側部之内側端位置可分別設置對應中 央部、二側部之板面不同方向之第一延伸段、第二延伸段 ,並令第一延伸段、第二延伸段接合。 如申印專利範圍第5項所述之防火門板抗變形結構,其中 該中央部之第一延伸段朝向中央部内面彎曲,並端緣朝向 ,部中央方向,並具第一彎曲部、第一接合端,又二側 部之第二延伸段向内垂直方向彎曲具側壁,並於侧壁朝向 第一接合端方向延伸具第二接合端,並使中央部之第一接 合端與二側部之第二接合端固接。 .如申請專利範圍第5項所述之防火門板抗變形結構,其中 彎曲具側 ;又二侧 1012015438-0 «亥t央部之第一延伸段朝向中央部内側垂直^ 壁,並於側壁朝向_央部外側方向 1〇12_ 产單編號_ ^ι〇Ι/^19Ι ° M431940 部内側端之第二延伸段朝向側部内面彎曲,並端緣朝向側 部中央方向,並具第二彎曲部、第四接合端,並使二側部 之第二延伸段置於中央部之第一延伸段位置,並使第三接 合端、第四接合端固接。6. Scope of patent application:. A kind of fire door panel anti-deformation structure, and the fire door panel is made of metal material, including: a central part;-side part, the central part area is larger than the two side part area, and the two side parts correspond to the center ° The 卩 position is the medial end, the other side is the lateral end, and the two sides of the central part are respectively fixedly connected to the medial ends of the two sides. The fire door panel anti-deformation structure according to item 1 of Shen Qing's patent scope, wherein the central portion and the two side portions are fixed by spot welding. • The anti-deformation structure of the fire door panel as described in item 1 of the patent scope of Shenyin, in which the two side portions correspond to the central portion and are arranged vertically. The anti-deformation structure of the fire door panel according to item 1 of the scope of the patent application, wherein the corresponding central portion of the two side portions is arranged laterally. The anti-deformation structure of fire door panels as described in the 3rd or 4th of the scope of patent application for Shenyang, in which the two sides of the central part of the central part and the inner end positions of the two sides can be provided with different directions corresponding to the plate surfaces of the central part and the two sides, respectively. The first extension section and the second extension section join the first extension section and the second extension section. The anti-deformation structure of a fire door panel according to item 5 of the scope of the printed patent, wherein the first extension of the central portion is bent toward the inner surface of the central portion, and the end edge is directed toward the center of the portion, and has a first bent portion, a first The joint end and the second extension of the two side portions are bent inwardly with a side wall, and the side wall is extended toward the first joint end with a second joint end, and the first joint end of the central portion and the two side portions are bent. The second joint end is fixedly connected. The anti-deformation structure of the fire door panel according to item 5 of the scope of patent application, wherein the bending side is provided; and the other side 1012015438-0 «The first extension of the central part is perpendicular to the inner side of the central part, and the side wall faces _ 中心 部 外向 1〇12_ Production order number_ ^ ι〇Ι / ^ 19Ι ° M431940 The second extension of the inside end of the part is bent toward the inner side of the side, and the end edge is oriented toward the center of the side, and has a second bent part And a fourth joint end, the second extension of the two sides is placed at the position of the first extension of the central part, and the third joint and the fourth joint are fixedly connected. 10120474^^^^ A〇101 第11頁/共19頁 1012015438-010120474 ^^^^ A〇101 Page 11 of 19 1012015438-0
TW88122434A 1998-12-21 2000-03-09 Method for cleaning an abrasive surface TW431940B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US21880498A 1998-12-21 1998-12-21

Publications (1)

Publication Number Publication Date
TW431940B true TW431940B (en) 2001-05-01

Family

ID=22816581

Family Applications (1)

Application Number Title Priority Date Filing Date
TW88122434A TW431940B (en) 1998-12-21 2000-03-09 Method for cleaning an abrasive surface

Country Status (2)

Country Link
TW (1) TW431940B (en)
WO (1) WO2000037217A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI394637B (en) * 2005-08-30 2013-05-01 Tokyo Seimitsu Co Ltd Pad conditioner, pad conditioning method, and polishing apparatus
CN112171513A (en) * 2020-09-29 2021-01-05 合肥晶合集成电路股份有限公司 Polishing pad processing method and chemical mechanical polishing equipment

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004506337A (en) 2000-08-11 2004-02-26 ロデール ホールディングス インコーポレイテッド Chemical mechanical planarization of metal substrates
JP4945857B2 (en) * 2001-06-13 2012-06-06 Jsr株式会社 Polishing pad cleaning composition and polishing pad cleaning method

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5981454A (en) * 1993-06-21 1999-11-09 Ekc Technology, Inc. Post clean treatment composition comprising an organic acid and hydroxylamine
EP0696495B1 (en) * 1994-08-09 1999-10-27 Ontrak Systems, Inc. Linear polisher and method for semiconductor wafer planarization
JP3192346B2 (en) * 1995-03-15 2001-07-23 株式会社東芝 Semiconductor device manufacturing method and semiconductor manufacturing apparatus
US5823854A (en) * 1996-05-28 1998-10-20 Industrial Technology Research Institute Chemical-mechanical polish (CMP) pad conditioner
US5773364A (en) * 1996-10-21 1998-06-30 Motorola, Inc. Method for using ammonium salt slurries for chemical mechanical polishing (CMP)
JP3231659B2 (en) * 1997-04-28 2001-11-26 日本電気株式会社 Automatic polishing equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI394637B (en) * 2005-08-30 2013-05-01 Tokyo Seimitsu Co Ltd Pad conditioner, pad conditioning method, and polishing apparatus
CN112171513A (en) * 2020-09-29 2021-01-05 合肥晶合集成电路股份有限公司 Polishing pad processing method and chemical mechanical polishing equipment

Also Published As

Publication number Publication date
WO2000037217A1 (en) 2000-06-29

Similar Documents

Publication Publication Date Title
JP4282162B2 (en) Composite baking plate and manufacturing method thereof
TW431940B (en) Method for cleaning an abrasive surface
CN207825469U (en) Print platform and 3D printer
JP2886788B2 (en) Glass plate mounting structure
CN1044576C (en) Layer compound material off-set deformation compound-rolling technology
TW535489B (en) Composite working method of heat conduction device and the product thereof
JP2859484B2 (en) Method for producing composite material of oxide dispersion strengthened platinum and platinum
TWI325941B (en)
CN211909206U (en) Low-noise PTC heater
KR100826701B1 (en) Oven including a cook top frame and manufacturing method thereof
JPS621754Y2 (en)
JP4470022B2 (en) Heating element
CN220955252U (en) Heat insulation strip structure integrating fireproof function and heat insulation function
JPH0274337A (en) Sheet prepared by hot contact of cork sheet with vinyl sheet
CN214571565U (en) Curved glass
JPH10139492A (en) Heat generating glass
CN214532632U (en) High-temperature-resistant and fire-resistant aluminum alloy door and window
KR100445645B1 (en) Manufacturing method for cladding aluminum on carbon steel
CN215001680U (en) Contact type flexible sealing assembly
CN212367750U (en) Sheet metal part connecting structure for compression joint fixation, sheet metal electric appliance box and air conditioner
TWI828467B (en) Fire door lining manufacturing method and structure
CN209089254U (en) A kind of PTC ceramics heater
TWM408611U (en) Heat insulation structure of fireproof door
JP3024564B2 (en) Induction heating cooker
TWM594043U (en) Composite metal three-dimensional plate