TW429403B - Method for improving the optical quality of a 45 DEG micro-mirror device - Google Patents
Method for improving the optical quality of a 45 DEG micro-mirror deviceInfo
- Publication number
- TW429403B TW429403B TW88117286A TW88117286A TW429403B TW 429403 B TW429403 B TW 429403B TW 88117286 A TW88117286 A TW 88117286A TW 88117286 A TW88117286 A TW 88117286A TW 429403 B TW429403 B TW 429403B
- Authority
- TW
- Taiwan
- Prior art keywords
- micro
- mirror device
- optical quality
- improving
- mirror
- Prior art date
Links
Landscapes
- Weting (AREA)
- Semiconductor Lasers (AREA)
- Optical Elements Other Than Lenses (AREA)
- Optical Head (AREA)
Abstract
This invention discloses a method for improving the optical quality of a 45 DEG micro-mirror device. The method is: prepare an alkaline aqueous solution as the etchant, control the temperature in the range of 55 DEG C to 95 DEG C and proceed the etching with the stir and vibration means, then form a micro-mirror on the 111 plane with an angle of 45 DEG relative to the silicon substrate. This method can improve the optical quality of a 45 DEG micro-mirror device. By incorporating a laser diode and other optical sensors onto a silicon substrate, the micro-mirror can be applied to a thin optical pick-up head.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW88117286A TW429403B (en) | 1999-10-07 | 1999-10-07 | Method for improving the optical quality of a 45 DEG micro-mirror device |
JP2000121296A JP2001116913A (en) | 1999-10-07 | 2000-04-21 | Method for improving optical quality of 45° micro-mirror device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW88117286A TW429403B (en) | 1999-10-07 | 1999-10-07 | Method for improving the optical quality of a 45 DEG micro-mirror device |
Publications (1)
Publication Number | Publication Date |
---|---|
TW429403B true TW429403B (en) | 2001-04-11 |
Family
ID=21642529
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW88117286A TW429403B (en) | 1999-10-07 | 1999-10-07 | Method for improving the optical quality of a 45 DEG micro-mirror device |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2001116913A (en) |
TW (1) | TW429403B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100580657B1 (en) * | 2004-11-11 | 2006-05-16 | 삼성전기주식회사 | Micro mirror array and manufacturing method for the same |
KR100601991B1 (en) | 2005-02-15 | 2006-07-18 | 삼성전기주식회사 | Manufacturing method of micro mirror array and optical device comprising micro mirror |
JP2017069241A (en) * | 2015-09-28 | 2017-04-06 | 京セラ株式会社 | Semiconductor laser element package and semiconductor laser device |
-
1999
- 1999-10-07 TW TW88117286A patent/TW429403B/en not_active IP Right Cessation
-
2000
- 2000-04-21 JP JP2000121296A patent/JP2001116913A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2001116913A (en) | 2001-04-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4A | Issue of patent certificate for granted invention patent | ||
MM4A | Annulment or lapse of patent due to non-payment of fees |