WO2003001633A3 - Method and device utilizing driving force to deliver deposition compound - Google Patents

Method and device utilizing driving force to deliver deposition compound Download PDF

Info

Publication number
WO2003001633A3
WO2003001633A3 PCT/US2002/002520 US0202520W WO03001633A3 WO 2003001633 A3 WO2003001633 A3 WO 2003001633A3 US 0202520 W US0202520 W US 0202520W WO 03001633 A3 WO03001633 A3 WO 03001633A3
Authority
WO
WIPO (PCT)
Prior art keywords
driving force
deposition compound
device utilizing
utilizing driving
tip
Prior art date
Application number
PCT/US2002/002520
Other languages
French (fr)
Other versions
WO2003001633A2 (en
Inventor
Chad A Mirkin
Seunghun Hong
Vinayak P Dravid
Original Assignee
Univ Northwestern
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Northwestern filed Critical Univ Northwestern
Priority to AU2002337637A priority Critical patent/AU2002337637A1/en
Publication of WO2003001633A2 publication Critical patent/WO2003001633A2/en
Publication of WO2003001633A3 publication Critical patent/WO2003001633A3/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/007—Processes for applying liquids or other fluent materials using an electrostatic field
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/18—Processes for applying liquids or other fluent materials performed by dipping
    • B05D1/185—Processes for applying liquids or other fluent materials performed by dipping applying monomolecular layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/165—Monolayers, e.g. Langmuir-Blodgett

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)

Abstract

In one aspect, a method of nanolithography is provided using a driving force to control the movement of a deposition compound from a scanning probe microscope tip to a substrate. Another aspect of the invention provides a tip for use in nanolithography having an internal cavity and an aperture restricting movement of a deposition compound from the tip to the substrate. The rate and extent of movement of the deposition compound through the aperture is controlled by a driving force.
PCT/US2002/002520 2001-01-26 2002-01-28 Method and device utilizing driving force to deliver deposition compound WO2003001633A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002337637A AU2002337637A1 (en) 2001-01-26 2002-01-28 Method and device utilizing driving force to deliver deposition compound

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26455001P 2001-01-26 2001-01-26
US60/264,550 2001-01-26

Publications (2)

Publication Number Publication Date
WO2003001633A2 WO2003001633A2 (en) 2003-01-03
WO2003001633A3 true WO2003001633A3 (en) 2004-03-04

Family

ID=23006551

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/002520 WO2003001633A2 (en) 2001-01-26 2002-01-28 Method and device utilizing driving force to deliver deposition compound

Country Status (2)

Country Link
AU (1) AU2002337637A1 (en)
WO (1) WO2003001633A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004033480A2 (en) * 2002-05-21 2004-04-22 Northwestern University Peptide and protein arrays and direct-write lithographic printing of peptides and proteins
AU2003298516A1 (en) 2002-05-21 2004-04-23 Northwestern University Electrostatically driven lithography
US7321012B2 (en) 2003-02-28 2008-01-22 The University Of Connecticut Method of crosslinking intrinsically conductive polymers or intrinsically conductive polymer precursors and the articles obtained therefrom
WO2005048283A2 (en) 2003-07-18 2005-05-26 Northwestern University Surface and site-specific polymerization by direct-write lithography
WO2005115630A2 (en) 2004-04-30 2005-12-08 Bioforce Nanosciences, Inc. Method and apparatus for depositing material onto a surface
US8273781B2 (en) 2009-03-11 2012-09-25 Nippon Soda Co., Ltd. Process for preparation of 1-alkyl-5-benzoyl-1H-tetrazole derivatives
CN109693329B (en) * 2017-10-23 2020-04-10 北京赛特超润界面科技有限公司 Writing brush printing film making device and nano film printing method based on same
CN112647056A (en) * 2020-12-01 2021-04-13 上海征世科技有限公司 Diamond film based on nano particle modification and preparation method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5354985A (en) * 1993-06-03 1994-10-11 Stanford University Near field scanning optical and force microscope including cantilever and optical waveguide
WO2000041213A1 (en) * 1999-01-07 2000-07-13 Northwestern University Methods utilizing scanning probe microscope tips and products therefor or produced thereby
WO2000046595A1 (en) * 1999-02-03 2000-08-10 Aclara Biosciences, Inc. Multichannel control in microfluidics
US6270946B1 (en) * 1999-03-18 2001-08-07 Luna Innovations, Inc. Non-lithographic process for producing nanoscale features on a substrate
US6280799B1 (en) * 1998-12-28 2001-08-28 Dai Nippon Printing Co., Ltd. Viscous substance discharging method using a viscous substance dispenser and pattern forming method using a viscous substance dispenser

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5354985A (en) * 1993-06-03 1994-10-11 Stanford University Near field scanning optical and force microscope including cantilever and optical waveguide
US6280799B1 (en) * 1998-12-28 2001-08-28 Dai Nippon Printing Co., Ltd. Viscous substance discharging method using a viscous substance dispenser and pattern forming method using a viscous substance dispenser
WO2000041213A1 (en) * 1999-01-07 2000-07-13 Northwestern University Methods utilizing scanning probe microscope tips and products therefor or produced thereby
WO2000046595A1 (en) * 1999-02-03 2000-08-10 Aclara Biosciences, Inc. Multichannel control in microfluidics
US6270946B1 (en) * 1999-03-18 2001-08-07 Luna Innovations, Inc. Non-lithographic process for producing nanoscale features on a substrate

Also Published As

Publication number Publication date
WO2003001633A2 (en) 2003-01-03
AU2002337637A1 (en) 2003-01-08

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