TW428279B - Manufacturing method of metal interconnects - Google Patents

Manufacturing method of metal interconnects

Info

Publication number
TW428279B
TW428279B TW88109281A TW88109281A TW428279B TW 428279 B TW428279 B TW 428279B TW 88109281 A TW88109281 A TW 88109281A TW 88109281 A TW88109281 A TW 88109281A TW 428279 B TW428279 B TW 428279B
Authority
TW
Taiwan
Prior art keywords
forming
dielectric layer
metal wire
spacer
manufacturing
Prior art date
Application number
TW88109281A
Other languages
English (en)
Inventor
Shr-Ying Shiu
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW88109281A priority Critical patent/TW428279B/zh
Application granted granted Critical
Publication of TW428279B publication Critical patent/TW428279B/zh

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
TW88109281A 1999-06-04 1999-06-04 Manufacturing method of metal interconnects TW428279B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW88109281A TW428279B (en) 1999-06-04 1999-06-04 Manufacturing method of metal interconnects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW88109281A TW428279B (en) 1999-06-04 1999-06-04 Manufacturing method of metal interconnects

Publications (1)

Publication Number Publication Date
TW428279B true TW428279B (en) 2001-04-01

Family

ID=21640978

Family Applications (1)

Application Number Title Priority Date Filing Date
TW88109281A TW428279B (en) 1999-06-04 1999-06-04 Manufacturing method of metal interconnects

Country Status (1)

Country Link
TW (1) TW428279B (zh)

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Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent
MK4A Expiration of patent term of an invention patent