五、發明說明（1) 本發明係有關於過濾器更換時機檢測方法，特 於可正確地檢測光阻過濾器之更換時機而可降低光阻 器之使用成本的光阻過濾器更換時機檢測方法。 、/' 請參照第丨圖，第丨圖係顯示光阻被覆設備的 此種光阻被覆設備主要包括：泵1G、光阻 1 ° H =及切16。上述川將m㈣域綠過濟= ㈣後’由上述喷嘴16喷出至放置於夹盤18的晶圓i上' 且可藉由上述閥門14來控制噴出至上述晶 阻液。 彳工砸尤 然而，目前光阻過濾器12的更換時機為固定頻 個月更換’但是實際狀況因光阻液的使用率及黏； 素而對光阻過遽器丨2阻塞狀況也有所不同。為了取 使用哥命，因而需控制光阻過濾器12更換時機為最短的三 個月，也因此造成單價高的光阻過濾器12的浪費。 一 有鐘於此’本發明之目的係、為了解決上述問題而提供 一種過濾器更換時機檢測方法，_於藉由以既定轉速來 = 電流驅動之供液裝置的果來將流體經由過遽 至被噴激物’且上述過濾器更換時機檢測 定期以較上述既定轉速高的檢測轉速 =動上述供液裝置；以及檢測上有 喷出，若上述噴嘴未喷出上述流體，更換上：過體 其中，上述檢測轉速的設定方法包括下列步驟：設置 一堪用過據器：以上述既定轉速來驅動上述供液裝置，並 檢測由上述喷嘴所喷出至上述被噴讓物的上述流體直至V. Description of the invention (1) The present invention relates to a method for detecting the replacement timing of a filter. The method is specifically for a method for detecting the replacement timing of a photoresist filter, which can accurately detect the replacement timing of the photoresist filter. . , / 'Please refer to the figure 丨, which shows the photoresist coating equipment. This photoresist coating equipment mainly includes: pump 1G, photoresist 1 ° H = and cut 16. The above-mentioned river will be green and green = afterwards, 'the nozzle 16 will be ejected onto the wafer i placed on the chuck 18', and the ejection to the crystal resistance liquid can be controlled by the valve 14. However, the current replacement timing of the photoresist filter 12 is a fixed frequency for months. However, the actual situation is due to the use and viscosity of the photoresist fluid; the blocking condition of the photoresistor is also different. . In order to take the life of the brother, it is necessary to control the replacement time of the photoresist filter 12 for a minimum of three months, which also causes a waste of the photoresist filter 12 with a high unit price. Here is what the purpose of the present invention is to provide a filter replacement timing detection method in order to solve the above-mentioned problem, and to pass the fluid through a liquid supply device driven by a predetermined speed = current. The object to be irritated 'and the filter replacement timing is detected periodically at a higher detection speed than the predetermined speed = the liquid supply device is activated; and if there is a spray on the detection, if the fluid is not sprayed from the nozzle, replace: passing the body The method for setting the detection rotation speed includes the following steps: setting up a useful recorder: driving the liquid supply device at the predetermined rotation speed, and detecting the fluid ejected from the nozzle to the ejected object until
C:\Prograni Files\Patent\〇593-3868-E.ptd第 4 頁 4227 1 9 五、發明說明^ ' ，測到上述流體有缺陷為止；以及提高上 逮，直到上述喷嘴停止喷出上述流體為止，則置的轉 液裝置的轉速為上述檢測轉速。 則疋此時的供 2述供液裝置可為步進馬達’而上述流 述喷嘴之間可更設置有閥門。 上迷過遽器與上 依據上述本發明的過濾器更換時機檢測方法’以 :二i轉速高的檢測轉速來驅動上述供液裝置，外後i測 體=否有上述流體喷出’#上述喷嘴未喷出上述流 丄則更換上述過濾1。且上述檢測轉速的設定方法係以 迷既定轉&來驅動上述供液裝in則由±述喷嘴所 I出至上述被喷灑物的上述流體，直至檢測到上述流體有 缺陷為止，然後提高上述供液裝置的轉速，直到上述喷嘴 停止喷出上述流體為止，則定此時的供液裝置的轉速為上 述檢測轉速。因此，可正確地檢測光阻過濾器的更換時機 而可降低光阻過濾器的使用成本。 為讓本發明之上述目的、特徵、和優點能更明顯易 度下文特舉較佳實施例，並配合所附圖式，作詳細說明 如下： 圖式簡單說明 第1圖係顯示光阻被覆設備的示意圖； 第2圖係顯示適用於本發明之光阻被覆設備的示意 圖；以及 ， 第3圖係顯示具有一定電流驅動之步進馬達的轉速與C: \ Prograni Files \ Patent \ 〇593-3868-E.ptd page 4 4227 1 9 V. Description of the invention ^ ', until the above fluid is detected to be defective; and increase the catch until the nozzle stops ejecting the above fluid So far, the rotation speed of the liquid transfer device is the above-mentioned detection rotation speed. Then, the liquid supply device at this time may be a stepping motor 'and a valve may be further provided between the flow nozzles. The method of detecting the filter replacement timing according to the above invention and the filter according to the present invention is to drive the liquid supply device with a high detection speed of two rotation speeds, and the external measurement body = whether the above-mentioned fluid is ejected. If the nozzle does not spray the flow, the filter 1 is replaced. And the method of setting the detection speed is to drive the liquid supply device in a predetermined rotation & then the fluid flowing from the nozzle to the sprayed object is detected until the fluid is detected to be defective, and then raised. The rotation speed of the liquid supply device is until the nozzle stops ejecting the fluid, and the rotation speed of the liquid supply device at this time is determined to be the detection rotation speed. Therefore, the replacement timing of the photoresist filter can be accurately detected, and the use cost of the photoresist filter can be reduced. In order to make the above-mentioned objects, features, and advantages of the present invention more obvious and easy, the preferred embodiments will be described below, and in conjunction with the accompanying drawings, the detailed description is as follows: The drawings are briefly explained. The first diagram is a photoresist coating device. Figure 2 is a schematic diagram showing a photoresist coating device suitable for the present invention; and Figure 3 is a diagram showing the rotation speed and
C:\Program Files\Patent\0593-3868-E.ptd第 5 頁 A”” 9 五、發明說明（3) 轉矩的曲線圖。 〔符號說明〕 1、2〜晶圖；10、20〜泵；12、22過濾器；14 '24〜 闕門；16、26〜喷嘴；18、28〜夾盤；2〇1〜步進馬達； 202〜第一皮帶輪；2〇3〜正時皮帶；2〇4〜第二皮帶輪； 205〜螺桿，206〜伸縮囊。 實施例 請參照第2圖，第2圖係顯示適用於本發明之光阻被覆 設備的示意圖。本發明的過濾器更換時機檢測方法係適用 於包括有泵20、光阻過濾器22、閥門24以及噴嘴26的光阻 被覆設備。換言之’本發明的過濾器更換時機檢測方法係 適用於藉由以既定轉速（一般正常的轉速）來驅動具有例如 一定電流驅動方式的步進馬達2〇1之供液裝置的泵2〇來將 流體（例如光阻液，未圖示）經由過濾器22而由喷嘴26喷灑 至例如放置於夾盤28的被喷灑物（例如晶圓）2。且可藉由 上述閥門24來控制喷出至上述晶圓2上的上述光阻液之喷 灑量。又上述泵20除了上述步進馬達201外，還包括：第 一皮帶輪202、正時皮帶（Ti ming Be 1 1 )203、第二皮帶輪 204、螺桿205以及伸縮囊206，並以設置於上述步進馬達 201之轉動轴的上述第一皮帶輪202經由上述正時皮帶 203、第二皮帶輪204、螺桿205而驅動上述伸縮囊206，而 吸取上述光阻液，進而由上述喷嘴26喷出。 上述本發明的過濾器更換時機檢測方法係可於既定的 期間（例如1天、3天、1週等），以較上述既定轉速（一般正 C:\ProgramFiles\PatentA0593-3868H5.ptd第 6 頁 — 4227 1 9_ _ 五、發明說明（4) 常的轉速）高的檢測轉速來驅動上述供液裝置（例如定電流 驅動方式的步進馬達）201，然後檢測上述喷嘴26是否有上 述流體（例如光阻液）噴出，若上述喷嘴26未喷出上述流 體’則表示上述過濾器22已受污染而達不堪使用的狀態， 故需更換上述過濾器2 2。 且上述檢測轉速的設定方法係首先設置一堪用過濾器 於第2圖所示的光阻被覆設備，接著以上述既定轉速（一般 正常的轉速）來驅動上述供液裝置（例如定電流驅動方式的 步進馬達）201，並檢測由上述噴嘴26所喷出至上述被喷灑 物（例如晶圓）2的上述流體（例如光阻液），直至檢測到上 述流體有缺陷為止，然後提高上述供液裝置2〇1的轉速， 直到上述噴嘴2 6停止喷出上述流體為止，則定此時的供液 裝置201的轉速為上述檢測轉速。 請照第3圖，第3圖係顯示具有一定電流驅動之步進馬 達的轉速與轉矩的曲線圖。由第3圖可知，具有一定電流 驅動之步進馬達的轉速愈快，則其轉矩愈小，而上述喷嘴 26所喷出的光阻液愈少。且由於上述既定轉速（一般正常 的轉速）較慢’而此時的轉矩較大；當檢測到上述光阻液 有缺陷時，即表示上述過濾器2 2已不堪使用，屿時過濾阻 塞嚴重導致壓差過大，故漸漸地提高上述步進馬達2〇1的 轉速，而使上述步進馬達201的轉矩降低，進而使上述步 進馬達201失步（亦即轉矩小到無法使光阻液通過上述過濾 器22而由上述喷嘴26喷出），因而本發明設定此時之上述 步進馬達2 0 1的轉速為上述檢測轉速，以檢測上述過濾器C: \ Program Files \ Patent \ 0593-3868-E.ptd Page 5 A ”” 9 V. Description of the invention (3) Curve graph of torque. 〔Explanation of symbols〕 1, 2 ~ crystal picture; 10, 20 ~ pump; 12, 22 filter; 14'24 ~ 阙 gate; 16, 26 ~ nozzle; 18, 28 ~ chuck; 2 ~ 1 ~ stepping motor 202 ~ first pulley; 203 ~ timing belt; 204 ~ second pulley; 205 ~ screw, 206 ~ retractable bag. Example Please refer to FIG. 2, which is a schematic diagram showing a photoresist coating device suitable for the present invention. The filter replacement timing detection method of the present invention is applicable to a photoresist coating device including a pump 20, a photoresist filter 22, a valve 24, and a nozzle 26. In other words, the filter replacement timing detection method of the present invention is suitable for driving a pump 20 of a liquid supply device having, for example, a stepping motor 2101 with a constant current driving method at a predetermined speed (normally normal speed). A fluid (for example, a photoresist liquid, not shown) is sprayed from the nozzle 26 to the sprayed object (for example, a wafer) 2 placed on the chuck 28 through the filter 22. The spraying amount of the photoresist liquid sprayed onto the wafer 2 can be controlled by the valve 24. In addition to the stepping motor 201, the pump 20 further includes a first pulley 202, a timing belt (Ti ming Be 1 1) 203, a second pulley 204, a screw 205, and an expansion bladder 206. The first pulley 202 entering the rotation shaft of the motor 201 drives the expansion bladder 206 through the timing belt 203, the second pulley 204, and the screw 205, sucks the photoresist, and is sprayed from the nozzle 26. The above-mentioned method for detecting the filter replacement timing of the present invention can be performed within a predetermined period (eg, 1 day, 3 days, 1 week, etc.) at a higher speed than the above-mentioned predetermined speed (generally C: \ ProgramFiles \ PatentA0593-3868H5.ptd page 6 — 4227 1 9_ _ V. Description of the invention (4) Constant rotation speed) The high detection speed is used to drive the liquid supply device (such as a stepper motor with constant current drive) 201, and then check whether the nozzle 26 has the fluid (such as Photoresist liquid), if the nozzle 26 does not discharge the fluid, it means that the filter 22 is contaminated and unusable, so the filter 22 needs to be replaced. And the method for setting the detection speed is to first set a photoresist coating device with a filter as shown in Figure 2, and then drive the liquid supply device at the predetermined speed (generally normal speed) (such as a constant current drive method). Stepper motor) 201, and detect the fluid (for example, photoresist) ejected from the nozzle 26 to the object to be sprayed (for example, wafer) 2 until the fluid is detected to be defective, and then increase the above The rotation speed of the liquid supply device 201 is until the nozzle 26 stops discharging the fluid, and the rotation speed of the liquid supply device 201 at this time is set to the detection rotation speed. Please refer to Figure 3. Figure 3 is a graph showing the speed and torque of a stepping motor with a certain current drive. As can be seen from FIG. 3, the faster the rotation speed of the stepping motor driven with a certain current, the smaller its torque, and the less the photoresist liquid sprayed from the nozzle 26. And because the above-mentioned predetermined speed (generally normal speed) is slow 'and the torque is large at this time; when the photoresist liquid is detected to be defective, it means that the above-mentioned filter 22 is unusable, and the filter blockage is severe at the time of the island. Because the pressure difference is too large, the rotation speed of the stepping motor 201 is gradually increased, so that the torque of the stepping motor 201 is reduced, and the stepping motor 201 is out of step (that is, the torque is too small to make the light The liquid barrier passes through the filter 22 and is sprayed from the nozzle 26. Therefore, the present invention sets the rotation speed of the stepping motor 201 at this time to the detection speed to detect the filter.
C:\ProgramFiles\Patent\0593-3868-E.ptd第 7 頁 ^227fq 五、發明說明（5) ------ 22是否堪用。 依據上述本發明的過濾器更換時機檢測方法， 述既定轉速高的檢測轉速來驅動上述供液裝置，秣 义 上述喷嘴是否有上述流體喷出，若上述噴嘴未喷檢測 體，則更換上述過濾器。且上述檢測轉速的設定方法^流 上述既定轉速來驅動上述供液裝置，並檢測由上述=以 喷出至上述被喷灑物的上述流體，直至檢測到上述流所 缺陷為止，然後提高上述供液裝置的轉速，直到上述有 停止噴出上述流體為止，則定此時的供液裝置的轉速嘴 述檢測轉速。因此，可正確地檢測光阻過濾器的更換& j 而可降低光阻過濾器的使用成本。 、'機 雖然本發明已以較佳實施例揭露如上，然其並非用、 限定本發明，任何熟習此項技藝者，在不脫離本發明之= 神和範圍内，當可作更動與潤飾，因此本發明之保護 當視後附之申請專利範圍所界定者為準。 固C: \ ProgramFiles \ Patent \ 0593-3868-E.ptd page 7 ^ 227fq 5. Description of the invention (5) ------ 22 Is it acceptable. According to the filter replacement timing detection method of the present invention described above, the liquid supply device is driven with a detection speed of a predetermined rotation speed, meaning whether the nozzle ejects the fluid, and if the nozzle does not spray the detection body, the filter is replaced. . And the setting method of the detection rotation speed is to drive the liquid supply device by the predetermined rotation speed, and detect the fluid ejected from the above = to the object to be sprayed until the defect of the flow is detected, and then increase the supply. The rotation speed of the liquid device is determined until the above-mentioned stop of the discharge of the fluid, and the detection speed of the rotation nozzle of the liquid supply device at this time is determined. Therefore, the replacement of the photoresist filter can be accurately detected, and the use cost of the photoresist filter can be reduced. "Although the present invention has been disclosed in the preferred embodiment as above, it is not intended to limit or limit the present invention. Any person skilled in this art can make changes and decorations without departing from the scope of the present invention. Therefore, the protection of the present invention shall be determined by the scope of the attached patent application. solid