419885 A7 __ _ B7 五、發明說明（1 ) 本發明係關於，形成在半導體基板等各種基板上之 LC振盪器。 有一種在半導體基板上’利用薄膜成形技術形成漩 渦形狀之圖型，將此圊型利用作為電感元件之半導體電419885 A7 __ _ B7 V. Description of the Invention (1) The present invention relates to LC oscillators formed on various substrates such as semiconductor substrates. There is a pattern on a semiconductor substrate that uses a thin film forming technology to form a swirl shape.
N 路’已為眾所周知。若在這種形成在半導體基板上之電 感元件通上電流，便會在垂直於漩渦形狀之圖型之方向 產生磁通’此磁通會在半導體基板表面產生渦流，抵消 有效磁通’因此，會有不能有效發揮電感元件之功能之 問題。尤其是，在電感元件流通之信號之頻率愈高，這 種傾向愈顯著，要在半導體基板上形成，含有電感元件 當作共振元件之LC振盪器十分困難》 本發明係有鑑於這些問題點而完成者，其目的在提 供，形成在基板上時也可以產生振盪動作之LC振盪器 〇 本發明之LC振盪器含有，在基板上夾著絕緣層重疊 兩個導體而成，分別連接其一方端部相互間，同時，將 上層之導体當作電感導体使用之電感元件。具有這種構 造之電感元件，就算形成在基板上，電感成分也不會因 渦流等而消失，由實驗確定，會有一定之電感，若將這 種電感元件當作LC振盪器之一個零件使用，則在基板 上形成LC振盪器時，仍可產生振盪作用。 上述基板以使用半導體基板較佳。尤其是，如能在 半導體基板上形成，能夠有效動作之電感元件，便能在 半導體基板上形成含電感元件之LC振盪器之各種構成零 本紙張尺度適用中國國家棵準（CNS)A4規格（210x 297公釐） ' 1 1— n I ϋ n I Λ ϋ n (請先閱讀背面之注意事t與填寫本頁) JST· 經濟部智慧財產局員工消費合作社印製 A7 419885 ________B7 五、發明說明（2 ) 件因此可以在半導體基板上一体形成整個a振盤器 ，而不需要外接零件。 (請先閱讀背面之注意事"i填寫本頁) 同時’上述兩個導体最好能形成為同—形狀之長條 形狀。同-形狀時’上層之導体不會直接面對基板表面 ，因此可以減低基板上產生之满流。同時由於使兩個 導体之形狀為長條形狀，可以使上層之導体有一定之電 感。尤其是’將導体形成為-周以上之璇渦形狀或蛇行 形狀時’可以使其具有很大之電感，因此，適合使用在 振盪頻率較低之LC振盪器。又，將導体形成未滿—圈之 環形狀或大体直線形狀時，較之形成為漩渦形狀等時， 可以使電感較小，因此適合使用在振盪頻率較高之LC振 盪器。 使兩個導体成漩渦形狀時，最好連接一方之導体之 内周端與另一方之導体之外周端。如此連接時，由實驗 征實’可以在基板上形成電感導体之狀態下，確保更大 之電感，可以實現，在基板上有效發揮功能之電感元件 〇 經濟部智慧財產局員工消費合作社印製 上述電感元件適合當作’具有電感成分與電容成分 之複合元件使用。此電感元件有相互重疊之兩個導体， 其特性也含有電容成分，因此若當作組合電感與電容使 用之LC振盪器之一個零件使用，便可以有效利用此電 感元件之特性》 茲參照附圖，具體說明應用本發明一實施形態之LC 振盪器如下。 本紙張尺度適用中國國家標準（CNS)A4规格⑵〇x297公釐) .c A7 419S85 B7 五、發明說明（3 ) 第1圖係表示一實施形態之LC振盪器之架構之電路 圖。第1圖所示之LC振盪器10含有，電晶體20，連接在 此電晶體20之基極一射極間之電容器22，連接在射極一 集極間之電容器24，以及串聯連接在基極、集極間之N way 'is well known. If a current is passed through the inductive element formed on the semiconductor substrate, a magnetic flux will be generated in a direction perpendicular to the pattern of the vortex shape. This magnetic flux will generate an eddy current on the surface of the semiconductor substrate, thereby canceling the effective magnetic flux. Therefore, There is a problem that the function of the inductive element cannot be effectively exerted. In particular, the higher the frequency of the signal flowing through the inductive element, the more pronounced this tendency is. It is very difficult to form an LC oscillator containing an inductive element as a resonant element on a semiconductor substrate. The present invention is made in view of these problems. The finisher aims to provide an LC oscillator that can generate an oscillating motion even when formed on a substrate. The LC oscillator of the present invention includes an insulating layer sandwiched between two conductors on the substrate and connected to one end of each. It is an inductive element that uses the upper conductor as an inductive conductor between each other. Even if an inductance element with this structure is formed on a substrate, the inductance component will not disappear due to eddy currents, etc. It is determined by experiments that there will be a certain amount of inductance. If this inductance element is used as a part of an LC oscillator , When the LC oscillator is formed on the substrate, an oscillating effect can still be generated. The substrate is preferably a semiconductor substrate. In particular, if an inductive element that can be effectively formed on a semiconductor substrate can be formed on the semiconductor substrate, the various components of an LC oscillator with an inductive element can be formed. The paper size is applicable to the Chinese National Standard (CNS) A4 specification ( 210x 297 mm) '1 1— n I ϋ n I Λ ϋ n (Please read the notes on the back and fill out this page first) JST · Printed by the Consumers ’Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs A7 419885 ________B7 V. Description of the invention (2) pieces can therefore be integrated on the semiconductor substrate to form the entire a vibrator, without the need for external parts. (Please read the "Notes on the back" and fill in this page) At the same time, the above two conductors should be formed into the same shape. In the same shape, the upper layer of the conductor will not directly face the substrate surface, so the full current generated on the substrate can be reduced. At the same time, because the shape of the two conductors is made long, the upper conductor can have a certain inductance. In particular, when the conductor is formed into a vortex shape or a meandering shape of more than -weeks, it can have a large inductance. Therefore, it is suitable to use an LC oscillator having a low oscillation frequency. In addition, when the conductor is formed into a full-loop loop shape or a substantially linear shape, the inductance can be made smaller than when the conductor is formed into a vortex shape or the like, and therefore, it is suitable to use an LC oscillator having a high oscillation frequency. When vortexing two conductors, it is preferable to connect the inner peripheral end of one conductor with the outer peripheral end of the other conductor. When connected in this way, it is verified through experiments that the inductive conductor can be formed on the substrate to ensure a larger inductance, and an inductive element that can effectively function on the substrate can be realized. The Intellectual Property Bureau of the Ministry of Economic Affairs, the Consumer Cooperative, printed the above The inductive element is suitable for use as a composite element having an inductive component and a capacitive component. This inductance element has two conductors that overlap each other, and its characteristics also include a capacitance component. Therefore, if it is used as a part of an LC oscillator that combines inductance and capacitance, the characteristics of this inductance element can be effectively used. The LC oscillator to which an embodiment of the present invention is applied will be specifically described as follows. This paper size applies the Chinese National Standard (CNS) A4 specification (0 × 297 mm). C A7 419S85 B7 V. Description of the invention (3) Figure 1 is a circuit diagram showing the structure of an LC oscillator in an embodiment. The LC oscillator 10 shown in FIG. 1 includes a transistor 20, a capacitor 22 connected between the base and the emitter of the transistor 20, a capacitor 24 connected between the emitter and the collector, and a base connected in series. Between poles and collectors
N 電容器26及電感元件30» 在此LC振盪器，兩個電容器22、24之電容量被設 定為電晶體20之端子間電容量之數十倍，而經由電容器 26連接電感元件3〇。 具有上述架構之本實施例之LC振盪器1 〇，係改良 柯耳匹茲電路之克拉普電路。在1^振盪器1〇,決定振 盪頻率之共振電路之電容器與電容器22、24、26之串 聯等效’因此，較之不具有相當於電容器26之電容器之 柯耳匹茲電路，可以加大電容器22及24之電容量。因 此，電晶體20之端子間電容量變化時，也不會對共振電 路之共振頻率產生影響，可以提高振盪頻率之穩定度。 第2圖係表示本實施形態之LC振盪器10所含之電感 元件30之平面構造圖。本實施形態之電感元件3〇具有， 形成在半導體基板3 1表面之漩渦形狀之兩根導體体1 ' 2 〇 此等兩根導体1、2具有大体同樣之形狀，而如第2 圖所示，從半導體基板3之表面看時，成為上層之一方 之導体1與成為下層之另一方之導体2大体上成重疊狀。 各導体1、2係由鋁或金等金屬薄膜，或聚矽等之半導體 材料所形成。 本紙張尺度適用中國國家標準（CNS>A4規格（2〗0 X 297公釐） ----1----- ^---裝 i ------訂---------線 (諳先閱讀背面之注意事Ϊ填寫本頁〉 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 419395 五、發明說明（4 第3圖係表示上述兩根導体i、2之連接狀態之圊。 如第3圖所示，在上層之導体丨之外周端（外緣端）與内周 端（中心端）’分別連接有引出線6a、6b ’上層之導体1之 内周端與下層之導体2之外周端，由連接線6c連接在一 起。 上層之導体1具有電感導体之功能，介由連接在其 兩端之引出線6a ' 6b， 連接在形成於半導体基板3之LC振盪器10之其他構成零 件。 第4圖係第2圖之IV — IV線放大截面圖。如第4圖所 示’在半導体基板3之表面形成有絕緣層4，其上面之一 部分形成有漩渦形狀之導体2。並在絕緣層4與導体2之 上面形成有絕緣層5，其上面形成有導体1。 本實施形態之LC振盪器10所含之電感元件30具有 上述之構造’分別連接在上層之導体1兩端之兩條引出 線6a、6b間會出現一定之電感，因此，此上層之導体導 体1可以當作電感導体使用。若在此上層之導体1之下側 ，形成形狀與導体1大体相同之導体2，而以連接線6c連 接相互間之一方端子，則在將上層之導体1當作電感導 体使用時’可抑制在半導體基板3之表面產生渦流，可 使上層之導体導体1有效發揮電感導体之功能。因此， 可以在半導體基板3上，一体形成包含電感元件30之整 個LC振盈器1〇，而加以積体化。 其次再說明’為了類推上述本實施形態之電感元件 本紙張尺度適用中國國家標準（CNS)A4規格（2〗0 X 297公爱） 7 ------ .---1>-----裝--------訂--------- (锖先閱讀背面之注意事f填寫本頁) A7 419985 ------------B7_ 五'發明說明（5) 30之特性而進行之比較實驗之結果。 第5圈係表示，使用具有與含在電感元件30之導体i 同樣形狀之一層電極之電感元件，構成LC振盪器時之輸 出特性之測量結果》此輸出特性之測量所使用之電感元 件，係在’厚度0.13mm，比介電率3.17之絕緣構件之表 面’形成有，圖型寬度1mm，環繞之圖型之鄰接間隔〇.2mm ，租數5匝之電極者。而第5圖（後述之第圖至第圖也一樣) 之縱軸表示，以對數表示之衰減量，橫軸表示，以對數 表示之輸入信號之頻率。如第5圊所示，在令由一層電 極形成之電感元件充分離開其他導体基板，或半導體基 板之狀態下’使LC振盪器動作時，觀察到119MHz之振 盪頻率。 第6圖係使用第5圖所示輸出特性之測量所使用之電 感元件’令其逐漸接近導体基板之銅板時之LC振盪器之 輸出特性圖《如第6圖所示，在使用由一層電極形成之 電感元件’令其振盪之狀態下，觀察到，使铜板逐漸接 近此電感元件時’振盪頻率便從118MHz逐漸昇高至 139MHz、168MHz、198MHz，若夾著厚度3.17mm之絕 緣構件’使銅板密接於電極，便會停止振盪。 如此’只是使用在銅板上形成，由一層電極構成之 電感元件’ LC振盪器便會停止振盪動作。這是因為，使 銅板接近時’由一層電極構成之電感元件所具有之電感 會變小之故》使銅板接近時電感會變小之原因，可能是 信號輸入電極時產生之磁通，在銅板表面產生渦流，而 本紙張尺度適用中國固寥標準（CNS)A4規格（2]0 X 297公釐） --—ΙΊΙΙΙΊΙΙ——· — — — — — — I— ^ - — — — 111 — — (請先閱讀背面之注意事^<填寫本頁) 經濟部智慧財產局員工消費合作社印M农 經濟部智慧財產局員工消費合作社印製 419SS5 a7 __B7 五、發明說明（6 ) 抵消此磁通。 第7圖係表示’使用與第2圖所示之電感元件3〇 所含之兩根導体1、2同一形狀及配置之兩層電極之電感 元件，構成LC振盪器時之輸出特性之測量結果。而第8 、 圖係表示，使用具有與電感元件30所含之兩根導体i、 2同一形狀及配置之電感元件，使銅板密接於此時之LC 振盪器時之輸出特性之圖。 此等測量使用之電感元件，具有，在第5圖及 第6圖表示測量結果之電感元件，追加對應第2圖所示導 体2之電極之構造。再者，使銅板密接於此電感元件時 ，係介由充分薄之絕緣材料配置下層之電極與銅板β 使用成面對面配置有漩渦形狀之兩層電極之電感元 件之LC振盪器，在使此電感元件充分離開其他導電性 材料之狀態時，從第7圖所示之測量結果可以看出，具 有70MHz附近之振盪頻率。此頻率會比使用，由第5圖 所示之一層電極構成之電感元件時之振盪頻率（丨19ΜΗζ) 低，是因為，由兩層電極構成之電感元件，具有包含電 感成分與電容成分之複合元件之功能，因此 > 電容成分 會降低含有電感元件之共振電路之共振頻率之故。 而使上述具有兩層電極構成之電感元件密接於銅板 之狀態下，如第8圖所示，振盪頻率（127MHz)之位置會 偏移，但確認有同樣之振盪現象。這是表示，因為使用 上述具有雙重構造之電極之電感元件，因此密接銅板時 ，電感成分也不會消失，仍維持電感導体之功能。 本紙張尺度適用中國國家標準CCNS)A4規格（210 X 297公梦） -----_----^-----裝--------訂-------I* 線 (請先閱讀背面之注意事f填寫本頁) A7 B7 419885 五、發明說明（7 ) 如此，採用將兩層之電極形成為漩渦形狀之電感元 件’使其一方（當作電感導体使用之電極之相反側）密接 於銅板’其電感也不會消失，可以維持使用此電感元件 之LC振盡器之振盡動作。因此，由於使用，基本上具 N. 有相同構造之本實施形態之電感元件3〇，縱使在半導體 基板3表面上’形成此電感元件30及lc振盪器10之各 構成零件時，仍可使LC振盪器10產生振盪動作。 再者，本發明並不限定如上述實施形態，可在本發 明之主旨範圍内實施各種變形。例如，第2圓及第3圖所 示之電感元件10’上層之導体1之内周端與下層之導体 2之外周端係介由連接線6C連接在一起，但也可以相反 地’連接上層導体1之外周端與下層導体2之内周端。 而如果允許電感元件之電感可有某種程度之降低，則也 可以連接導体1與導体2之各外周端相互間，或各内周端 相互間。 第9圖係表示，使用具有與第2圓所示之電感元件30 所含之兩根導体1、2同一形狀及配置之雙層電極，而連 接此等各電極之外周端相互間之電感元件，以構成LC振 盪器時之輸出特性之測量結果。而第10圖係表示，在第 9圖所示特性測量使用之電感元件，密接銅板時之lC振 盪器之輸出特性之測量結果。如此等®式所示，使用兩 個電極之外周端相互間連接在一起之電感元件構成之LC 振盪器時，因為密接銅板，其振盪頻率會從117MHz變化 到171MHz，但可維持振盪動作，不會停止。 本紙張尺度適用t西因家標準（CNS)A4規格（210*297公釐） --------—.— — — Ml - 11 (諳先閲讀背面之注意事項-ί填寫本頁) * ;線' 經濟部智慧財產局員工消費合作社印製 10 419985 A7 -------B7__ 五、發明說明（8 ) 同時’上述實施形態’係將電感元件3〇所含之兩根 導体1 ' 2形成為旋渦形狀，因此可以實現具有大電感之 電感元件30，但也可以將兩根導体1、2形成為蛇行形狀（ 第11圖（A))。若將此電感元件10用作高頻電路之一個 \ 零件時，很小之電感便足夠，因此可以將導体〗、2之 阻數減少為未滿一匝（第丨丨圖⑺）），或形成為大体上呈 直線形狀（第11圖（C))。 同時，上述實施形態，係將兩根導体I ' 2大体上 設定成相同形狀，但也可以設定成不同形狀。例如，將 下層導体2之匝數設定成較上層導体1之匝數為多。如 此’在上層導体1之下側配置下層導体2之全部或一部 分’上層導体1便不會直接面對半導體基板3,因此可以 有效防止因上層導体1而產生之满流。 同時，上述實施形態，係藉在半導體基板3上形成 兩根導体1、 2而形成電感元件30，但亦可實現，在金 經濟部智慧財產局員工消費合作杜印製 屬等之導体基板上形成兩根導体1、2之電感元件3〇。從 第8圖所示之實驗結果，可以確認，這時仍然可發揮電 感元件30之有效功能，LC振盪器會進行振盪動作。若能 密接於導体基板上形成電感元件30,便能夠在金屬製遮 蔽盒等之表面配置電感元件30，可以很容易確保電感元 件之設置空間。N capacitor 26 and inductive element 30 »In this LC oscillator, the capacitance of the two capacitors 22 and 24 is set to several tens of times the capacitance between the terminals of the transistor 20, and the inductive element 30 is connected via the capacitor 26. The LC oscillator 10 of this embodiment having the above-mentioned structure is a Krapp circuit of a modified Cole Pitz circuit. At 1 ^ oscillator 10, the capacitor of the resonance circuit that determines the oscillation frequency is equivalent to the series connection of capacitors 22, 24, and 26. Therefore, it can be increased compared to a Colpitts circuit without a capacitor equivalent to capacitor 26. Capacitance of capacitors 22 and 24. Therefore, when the capacitance between the terminals of the transistor 20 is changed, it will not affect the resonance frequency of the resonance circuit, and the stability of the oscillation frequency can be improved. Fig. 2 is a plan view showing a planar structure of an inductance element 30 included in the LC oscillator 10 according to this embodiment. The inductance element 30 of this embodiment has two conductors 1 ′ 2 that are formed in a spiral shape on the surface of the semiconductor substrate 31. These two conductors 1 and 2 have substantially the same shape as shown in FIG. 2. When viewed from the surface of the semiconductor substrate 3, the conductor 1 which is one of the upper layers and the conductor 2 which is the other one of the lower layers are substantially overlapped. Each of the conductors 1 and 2 is formed of a metal thin film such as aluminum or gold, or a semiconductor material such as polysilicon. This paper size applies to Chinese national standard (CNS > A4 specification (2) 0 X 297 mm) ---- 1 ----- ^ --- install i ------ order ------ --- Line (谙 Read the notes on the back firstΪFill this page> Printed by the Employees 'Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Employees' Cooperatives of the Ministry of Economic Affairs ’Intellectual Property Bureau printed by 419395 The connection state between the two conductors i and 2. As shown in FIG. 3, the outer conductor (outer edge end) and the inner periphery (center end) of the upper conductor 丨 are respectively connected with the lead wires 6a, 6b ' The inner peripheral end of the upper conductor 1 and the outer peripheral end of the lower conductor 2 are connected together by a connecting wire 6c. The upper conductor 1 has the function of an inductive conductor and is connected through the lead wires 6a '6b connected at both ends thereof. Other components of the LC oscillator 10 formed on the semiconductor substrate 3. FIG. 4 is an enlarged cross-sectional view taken along line IV-IV of FIG. 2. As shown in FIG. 4, 'the insulation layer 4 is formed on the surface of the semiconductor substrate 3. A conductor 2 with a vortex shape is formed on a part of the upper part, and insulation is formed on the insulating layer 4 and the conductor 2 5. A conductor 1 is formed thereon. The inductive element 30 included in the LC oscillator 10 of this embodiment has the above-mentioned structure. 'There will be a certain interval between the two lead wires 6a, 6b respectively connected to the two ends of the conductor 1 in the upper layer. Inductor, therefore, the upper conductor 1 can be used as an inductive conductor. If the conductor 1 is formed below the upper conductor 1, a conductor 2 having substantially the same shape as the conductor 1 is formed, and one of the terminals is connected by a connecting wire 6c. , When using the upper conductor 1 as an inductive conductor, 'the eddy current can be suppressed on the surface of the semiconductor substrate 3, and the upper conductor 1 can effectively function as an inductive conductor. Therefore, it can be integrated on the semiconductor substrate 3. The entire LC vibrator 10 including the inductive element 30 is formed and integrated. Next, it will be explained 'in order to analogize the inductive element of this embodiment described above. The paper size applies the Chinese National Standard (CNS) A4 specification (2] 0 X 297 public love) 7 ------ .--- 1 > -------- install -------- order --------- (锖 read the note on the back first f (Fill in this page) A7 419985 ------------ B7_ Five 'invention description (5) 30 special The result of a comparative experiment conducted on the basis of the characteristics. The fifth circle shows the measurement results of the output characteristics of an LC oscillator using an inductive element having the same layer of electrodes as the conductor i included in the inductive element 30. The inductive element used in the measurement is formed on the "surface of an insulating member having a thickness of 0.13mm and a specific permittivity of 3.17". The pattern width is 1mm, and the adjacent interval of the surrounding pattern is 0.2mm, and the rent is 5 turns. For the electrode, the vertical axis of Fig. 5 (the same applies to the graphs to to be described later) indicates the amount of attenuation expressed on a logarithmic scale, and the horizontal axis indicates the frequency of the input signal expressed on a logarithmic scale. As shown in Section 5 (b), when the LC element is operated while the inductor element formed by one layer of electrode is sufficiently separated from other conductor substrates or semiconductor substrates, an oscillation frequency of 119 MHz is observed. Fig. 6 is an output characteristic diagram of an LC oscillator when an inductive element used for measuring the output characteristics shown in Fig. 5 is used to gradually approach a copper plate of a conductor substrate. "As shown in Fig. 6, when using a layer of electrode In the state where the inductive element formed caused it to oscillate, it was observed that when the copper plate gradually approached the inductive element, the 'oscillation frequency gradually increased from 118 MHz to 139 MHz, 168 MHz, and 198 MHz. If an insulating member with a thickness of 3.17 mm was sandwiched', The copper plate is closely attached to the electrode, and the oscillation stops. In this way, the LC oscillator, which is formed using only one layer of electrodes and formed on a copper plate, will stop the oscillation operation. This is because when the copper plate is approached, the inductance of an inductive element composed of a layer of electrodes becomes smaller. The reason why the inductance decreases when the copper plate is approached may be the magnetic flux generated when the signal is input to the electrode. Eddy currents are generated on the surface, and this paper size applies the China Solid Standard (CNS) A4 specification (2) 0 X 297 mm) --- 1ΊΙΙΙΊΙΙ—— · — — — — — — I — ^-— — — 111 — — (Please read the note on the back ^ < fill out this page first) Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and printed by the Consumers’ Cooperative of the Intellectual Property Bureau of the Ministry of Agriculture and Economy printed by 419SS5 a7 __B7 V. Explanation of the invention (6) Offset this magnetic flux . Fig. 7 shows the results of measurement of the output characteristics of the LC oscillator when two inductors with the same shape and configuration as the two conductors 1 and 2 included in the inductor element 30 shown in Fig. 2 are used. . The eighth and eighth figures are graphs showing output characteristics when an inductor having the same shape and configuration as the two conductors i and 2 included in the inductor 30 is used to closely contact the copper plate to the LC oscillator at this time. The inductive element used for these measurements has an inductive element whose measurement results are shown in Figs. 5 and 6, and an electrode structure corresponding to the conductor 2 shown in Fig. 2 is added. Furthermore, when the copper plate is tightly connected to this inductance element, the LC electrode of the inductance element with two layers of electrodes arranged in a vortex shape is used to arrange the lower layer electrode and the copper plate β through a sufficiently thin insulating material. When the element is sufficiently separated from other conductive materials, it can be seen from the measurement results shown in FIG. 7 that it has an oscillation frequency around 70 MHz. This frequency is lower than the oscillating frequency (19M) ζ) when using an inductive element composed of one layer of electrodes as shown in Figure 5, because the inductive element composed of two layers of electrodes has a composite that includes an inductive component and a capacitive component. The function of the element, therefore, the capacitance component reduces the resonance frequency of the resonance circuit containing the inductive element. In the state where the above-mentioned inductor element having the two-layer electrode is in close contact with the copper plate, as shown in Fig. 8, the position of the oscillation frequency (127 MHz) is shifted, but the same oscillation phenomenon is confirmed. This means that, because the above-mentioned inductive element having the double-structured electrode is used, even when the copper plate is tightly connected, the inductive component does not disappear, and the function of the inductive conductor is maintained. This paper size applies to China National Standard CCNS) A4 specification (210 X 297 public dream) -----_---- ^ ----- installation -------- order -------- -I * line (please read the note on the back f to fill out this page) A7 B7 419885 V. Description of the invention (7) So, using one of the two layers of electrodes to form a vortex inductive element, The opposite side of the electrode used by the conductor) is tightly connected to the copper plate, and its inductance will not disappear, so it can maintain the vibration exhaustion of the LC exhaustor using this inductance element. Therefore, due to the use, the inductor element 30 having the same structure in this embodiment is basically N. Even when the constituent elements of the inductor element 30 and the lc oscillator 10 are formed on the surface of the semiconductor substrate 3, The LC oscillator 10 generates an oscillation operation. The present invention is not limited to the embodiments described above, and various modifications can be made within the scope of the gist of the present invention. For example, the inner peripheral end of the upper conductor 1 and the outer peripheral end of the lower conductor 2 shown in the second circle and FIG. 3 are connected together via a connecting wire 6C, but may be connected to the upper layer in the opposite direction. The outer peripheral end of the conductor 1 and the inner peripheral end of the lower conductor 2. If the inductance of the inductive element is allowed to be reduced to some extent, the outer peripheral ends of the conductor 1 and the conductor 2 may be connected to each other, or the inner peripheral ends of the conductor 1 may be connected to each other. FIG. 9 shows the use of a double-layer electrode having the same shape and arrangement as the two conductors 1 and 2 included in the inductive element 30 shown in the second circle, and connecting the inductive elements at the outer peripheral ends of these electrodes To measure the output characteristics of the LC oscillator. Fig. 10 shows the measurement results of the output characteristics of the lC oscillator when the inductive element used in the characteristic measurement shown in Fig. 9 is tightly connected to the copper plate. As shown in the above formula, when using an LC oscillator composed of inductive elements with the outer edges of the two electrodes connected to each other, the frequency of the oscillation will change from 117MHz to 171MHz due to the close connection of the copper plate, but the oscillation operation can be maintained. Will stop. The size of this paper applies to CNS A4 specification (210 * 297 mm) --------—.— — — Ml-11 (Please read the precautions on the back first-fill in this page ) *; Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 10 419985 A7 ------- B7__ V. Description of the Invention (8) At the same time, the above-mentioned embodiment is the two components included in the inductor element 30. The conductor 1 ′ 2 is formed in a spiral shape, so that an inductive element 30 having a large inductance can be realized. However, the two conductors 1 and 2 may be formed in a meandering shape (FIG. 11 (A)). If this inductive element 10 is used as a part of a high-frequency circuit, a small inductance is sufficient, so the resistance of the conductor can be reduced to less than one turn (Figure 丨 丨 ⑺), or It is formed in a substantially straight shape (Fig. 11 (C)). Meanwhile, in the above-mentioned embodiment, the two conductors I'2 are set to be substantially the same shape, but they may be set to different shapes. For example, the number of turns of the lower layer conductor 2 is set to be greater than the number of turns of the upper layer conductor 1. In this way, 'the whole or a part of the lower conductor 2 is arranged below the upper conductor 1', the upper conductor 1 does not directly face the semiconductor substrate 3, and therefore it is possible to effectively prevent the full current caused by the upper conductor 1. At the same time, the above-mentioned embodiment forms the inductive element 30 by forming two conductors 1, 2 on the semiconductor substrate 3, but it can also be realized on the conductor substrate of the Intellectual Property Bureau, the Ministry of Finance and Economics, the consumer cooperation of printed materials, etc. An inductive element 30 forming two conductors 1, 2 is formed. From the experimental results shown in Fig. 8, it can be confirmed that the effective function of the inductance element 30 can still be exerted at this time, and the LC oscillator will oscillate. If the inductive element 30 can be formed in close contact with the conductor substrate, the inductive element 30 can be arranged on the surface of a metal shielding case or the like, and the space for installing the inductive element can be easily secured.
同時，在上述實施形態’ LC振蘯器係使用克拉普電 路，但也可以使用，利用電感與電容之共振產生振盪動 作之其他LC振盪器’例如，克耳匹茲電路。這時，若LC 本紙張尺度適闬中國國家標準（CNS)A4規格（210x 297公釐） -η . 經濟部智慧財產局員工消費合作社印製 419885 A7 B7 五、發明說明（9 ) 振盪器所含之電感元件是具有第2圖所示構造之電感元 件’則可實現在半導體基板上，或在導体基板上進行振 盪動作之LC振盪器。 如上述’依據本發明時，可以在基板上重疊形成兩 個導体’分別連接其一方之端子，則可以將上層之導体 當作具有一定電感之電感導体使用，而因為將此電感元 件當作LC振盪器之一個零件使用，因此在基板上形成 LC振盪器時，仍可以使其產生振盪動作。尤其是，依據 本發明時，因為可以實現’在半導體基板上有效作用之 電感元件’因而得實現’以往不可能之含電感之整體LC 振盪器之積体化。 第1圏係表示一施形態之LC振盪器之架構之電路圖》 第2圖係表示第1圖所示lc振盪器所含電感元件之平 面構造之圖。 第3圖係表示第2圖所示兩根導体之連接狀態之圖β 第4圖係表示第2圖之IV — IV線放大載面圖。 第5圖係表示LC振盪器之輸出特性之測量結果之圖。 第6圖係表示LC振盪器之輸出特性之測量結果之圖。 第7圖係表示lc振盪器之輸出特性之測量結果之圖β 第8囷係表示lc振盪器之輸出特性之測量結果之圖。 第9圖係表示lc振盪器之輸出特性之測量結果之圖。 第1 〇圖係表示LC振盪器之輸出特性之測量結果之圖 〇 第11圖係表示電感元件所含導体之變形例子之圖。 本紙張尺度適用中國國豕標準（CNS)A4規格（210 X 297公愛） -----i.---- .-------------訂---------線 (請先閱讀背面之注意事填寫本頁) 12 1.. .導体 2.. .導体 3.. .半導體基板 4.. .絕緣層 5.. .絕緣層 6a 6b.....引出線 419885 A7 B7 五、發明說明（10 ) 元件標號對照表 6c...連接線 10.. .電感元件 20.. .電容器 22.. .電容器 24.. .電晶體 30…電感元件 (請先閱讀背面之注意事項Vr填寫本頁) 經濟部智慧財產局員工消費合作社印製 13 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）Meanwhile, in the above-mentioned embodiment, the "LC oscillator" uses a Clapp circuit, but other LC oscillators that use an resonance between an inductor and a capacitor to generate an oscillating operation can be used, for example, a Kelpie circuit. At this time, if the size of the LC paper is suitable for the Chinese National Standard (CNS) A4 (210x 297 mm) -η. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 419885 A7 B7 V. Description of the invention (9) Included in the oscillator The inductive element is an inductive element having a structure shown in FIG. 2, and an LC oscillator that can be oscillated on a semiconductor substrate or a conductor substrate. As described above, "in accordance with the present invention, two conductors can be superposed on the substrate" to connect one of the terminals respectively, the upper conductor can be used as an inductive conductor with a certain inductance, and because this inductive element is used as an LC One part of the oscillator is used, so when the LC oscillator is formed on the substrate, it can still make it oscillate. In particular, according to the present invention, since an "inductive element that effectively functions on a semiconductor substrate" can be realized, it is possible to realize the integration of an integral LC oscillator including an inductor that was not possible in the past. Fig. 1 is a circuit diagram showing the structure of an LC oscillator in one embodiment. Fig. 2 is a diagram showing a planar structure of an inductance element included in the lc oscillator shown in Fig. 1. Fig. 3 is a diagram showing the connection state of the two conductors shown in Fig. 2. Fig. 4 is an enlarged sectional view taken along line IV-IV of Fig. 2. Fig. 5 is a graph showing the measurement results of the output characteristics of the LC oscillator. Fig. 6 is a graph showing the measurement results of the output characteristics of the LC oscillator. FIG. 7 is a graph showing the measurement results of the output characteristics of the lc oscillator. Β FIG. 8 is a graph showing the measurement results of the output characteristics of the lc oscillator. Fig. 9 is a graph showing the measurement results of the output characteristics of the lc oscillator. Fig. 10 is a graph showing the measurement results of the output characteristics of the LC oscillator. Fig. 11 is a graph showing an example of the deformation of the conductor included in the inductance element. This paper size applies to China National Standard (CNS) A4 specification (210 X 297 public love) ----- i .---- .------------- Order ---- ----- Wire (please read the notes on the back to fill in this page) 12 1 .. .Conductor 2..Conductor 3..Semiconductor substrate 4..Insulation layer 5..Insulation layer 6a 6b. .... lead-out wire 419885 A7 B7 V. Description of the invention (10) Component reference table 6c ... Connecting wire 10 ... Inductive element 20 ... Capacitor 22 ... Capacitor 24 .. Transistor 30 ... Inductive components (please read the precautions on the back first to fill in this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 13 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)