TW418419B - SOG pipeline system capable of continuous production and its operation procedure - Google Patents

Abstract

The present invention relates to a SOG pipeline system capable of continuous production and its operation procedure, wherein a buffer tank is installed between a conventional SOG solution tank and a SOG dripping unit, and a plurality of position sensors are installed in the buffer tank for level detection and constant-flow control by a pump, so that SOG in the solution tank can flow into the buffer tank. Meanwhile, the periphery of the buffer tank is installed with a cooling unit so that the buffer tank can be maintained at a low temperature to prolong the life span of the SOG solution and prevent crystallization in the pipeline due to evaporation of the organic solution. The aforementioned structure can achieve a continuous production and avoid an interruption in the production due to a replacement operation of the SOG solution in the conventional process, thereby increasing the economical benefit of the machine. Meanwhile, the present invention can reduce the consumption cost of SOG by alleviating the residual problem of SOG.

Description

A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 4184 1 ^ V. Description of the invention () Background note: The present invention proposes a modification of the hin-OnHass (hereinafter referred to as soG) pipeline system that is well known in the needle industry. Membership. Before introducing the SOG pipeline system, the SOG bismuth semiconducting process is lacking. The flatness of the wafer surface is easy to carry out in the subsequent process. * If the EJ is uneven during the exposure, it will not be focused. * The light is not enough on the concave plaque. As a result, the case will become distorted. 9 Any time The angle general Ru product method (if you learn the vapor deposition method or the splashing method), if the degree is too thick, it is easy to produce hollows in the depression area, (VO i (0 .., which leads to the photography process in the law). Medium * The photocathode will be hidden from the vine through the hole, causing the photoresistance in the empty space to become thin. * This will cause the dielectric etched layer to form a hole or even a reliable layer of Pd under the bismuth. The photoresist in the hole 3V is not clear enough, which will cause the crystal to be dyed during the subsequent process and greatly reduce the yield of the product. Therefore, it has the function of a dielectric layer and changes the surface flatness and Elimination of voids and other effects / At present, the industry is not so ΰ, mainly because it has a photo-resistance flow, which can completely fill the low-concave area to eliminate the generation of empty wine. Stupidly coated with SO G and fully baked Baking silicon oxide which causes the solvent to become a solid, which is used as a dielectric layer for the purpose of the dielectric layer; tSOG pipeline system Draw 1 m, it includes solvent inert io, dripping element 2ad, the solution weight 10 contains a SOG solvent bottle with a capacity of 500 ec, and the main winter bottle is to check the chemical persistence of S0G. Stored between -1C and 4Ί〇, if you use it under Shi Feng, it will only last for 10 days, otherwise Ra will add a cooling system but increase production costs. The opening and closing VI and a connection to the opening and closing valve VI t--a 3 'sheet ^^ _ Applicable to the Chinese national standard (〇 see) eight 4 threats (210 > < 297 mm), (Please read first (Notes on the back then fill out this page)

418419 A7 B7 V. Description of the invention () Suction switch SIV2, the on-off valve VI is controlled by a self-controlling • control circuit (not shown in the figure) that can measure SOG. M guarantees that the amount of each crystal is constant. The amount of SOG. The back suction valve V2 is controlled by a detector (not shown in the figure) to prevent residual SOG from flowing out of the drip nozzle. Then, using the nitrogen pressure at one end of the SOG solution to squeeze S 0G from the solution bottle 11 After passing through the switch valve U, the suction switch V2 is sucked back and finally dripped onto the crystal HW. According to the prevailing process conditions, when the coating process of three batches of wafers (150Η in total) is completed, there will be an average of 100-120cc. SOG solution. The remaining, in order to ensure that the fourth batch of wafers (that is, the next 50 不会) will not stop the process halfway due to insufficient SOG dosage, so each bottle of 500G SOG only provides 150H wafers. The manufacturing cycle is drawn, and the production cost is increased due to the cost of SOG. In practice, after replacing the new SOG solution bottle, in order to ensure the cleanliness of the SOG solution and eliminate the air bubbles or Residual SOG, do a simulated distribution (disperer > and test to confirm the number of foreign particles and wart product. Only after the thickness meets the specifications, the chip is actually released, and the use efficiency of the machine is greatly reduced. For the industry; how to improve the know-how The SOG pipeline system available for continuous production is a very important subject. Summary of the invention: Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs The main purpose of the present invention is to provide a SOG pipeline system capable of continuous production. You can avoid wasting expensive SO G solution and thereby reduce manufacturing costs. Another object of the present invention is to provide a SO G pipeline system that can be continuously produced to avoid process interruption and increase simulation distribution S3 due to replacement of SOG solution bottles. 3.10, 000 This paper size is applicable to the standards of China and the Central European countries (CNS> A4 (210X297 mm) A7 B7 418419 V. Description of the invention ()), test time, and further improve the efficiency of the machine. The invention mainly consists of adding a punching slot between the conventional SOG solution tank and the SOG dripping unit-element, and by setting a number of position sensors in the punching tank meat for liquid level detection and pumping. Make a fixed flow control so that the solution tank meat SO G can flow into the grate flushing tank. At the same time, a cooling unit is added around the yuan flushing tank to keep the buffer tank at low temperature. Extend the life of SOG fatigue and prevent organic volatilization. Causes the pipeline to crystallize. With the above structure, the production can be continuously connected to avoid rabbits. It is known that the production is interrupted due to the replacement of the SOG solution tank, so that the highest efficiency of the machine can be achieved. At the same time, the invention can also be modified by: S The 0 G residual problem achieves the effect of saving the SO G consumption cost. The known S0G pipeline system. According to the S0G pipeline system of the present invention, your reviewing committee has more clearly illustrated the technical means of the present invention and its effects with diagrams and explained in detail as follows: The conventional 500cc SOG solution bottle is only enough for three batches of wafers (a total of 150Η). Before the coating is actually being performed, part of the SOG solution is consumed in the mold stage, and the remaining about 100ec will not be enough for the next The batch of crystals is discarded, and unnecessary waves are formed due to the high cost of SOG. The above problem is solved by the present invention. The present invention provides an improved operating principle of the SOG pipeline system. The main f system is the addition between the SOG solution tank and the drip unit. Yiyuan K collected the remaining SOG solution, and passed the three-segment position 5 ΪPlease read the precautions on the back before filling in this page) Printed by the Central Bureau of Standards of the Ministry of Economic Affairs and Consumer Cooperatives. Xi ^ 2 is to act as an ambassador, Zi Zuojian Use, and the proposed distribution of Η and use fee. In order to decompose the system, its work channel was borrowed. ^ Ί | —Order J. ^ ---- „----- 1 i ---- The private paper standard is free to use Chinese National Standard (CNS) 210X297 mm) f 418419 A7 B7 V. Description of the invention () The detector is used for level detection and control_ solution bottle to add SO G solution to the buffer tank. Figure 2 is the SOG pipeline system embedded in the present invention, where the number 10 is the solution tank. A 500g S0G solution bottle 11 is labeled W, and the base 30 is a yuan punch. Its capacity is 250cc and three position detectors Sbl, Sb2, and Sb3 are internally detected. Whether the capacity is lower than 50 cc, 100cg and 200cc, the MV control valve V3 located between the solution bottle 11 and the Yuan channel 30 is opened, so that the SOG solution is replenished from the bottle U to the channel 30. Of course, the Sbl, The detection capacity values of Sb2, ^ b3 can be adjusted depending on the situation. At the same time, a cooling unit 40 is installed around the Suihong tank 30, and the temperature of the SOG solution is controlled by-It: and reduces the solvent volatility caused by SOG. The crystallization produces particles, which prolongs the life of SO G. In addition, a heating device is included in the dripping Ningyuan 20 for increasing SOG from low temperature to room temperature. A suction valve V2, wherein the other end of the switching valve VI-connected to the cylinder 60 is connected to the suction valve _ 阙 V2, and finally, the SOG solution is dropped on the wafer W. The heating device can surround the SOG pipeline. A heating water pipe turn 51. The child switch 孩 VI is controlled by an automatic control circuit (not shown in the figure) that can measure S0G to ensure that the drop of each wafer is a certain amount. S0G. The reversing switch glow V2 It is controlled by a detector (not shown in the figure below) to prevent residual SOG from flowing out of the mouthpiece. Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (read the precautions on the back before filling out this page) in Dechong A pump 60 is provided between the 攒 30 and the opening valve VI. Since the conventional system (as shown in picture 1) uses the high pressure of chlorine gas to make the SOG solution flow from the solution bottle 11 into the drip unit 20, in the present invention, Make S0G flow from the solution bottle 11 into the buffer tank 30. The flushing tank must be maintained at a pressure lower than the pressure of nitrogen. Therefore, one end of the output pipe of the drum is connected to the switching valve VI, and the input pipe is connected to this paper. Country-like_ (CMS) Α4 specification (210X297 mm) 1 9 Α7 Β7 V. Instructions () The SOG solution connected to the Yuan channel is provided with an open valve V7 in the middle of the pipeline. In the case of fennel, a delivery pipe containing a switching valve V4 is also connected to the buffer channel. On the SO G liquid surface, a pressure detecting device S is also placed on the liquid surface, so please read _ 阋 — read back. Note again / fill in the page and install the pressure detecting device S to detect the pressure higher than 3 Atmospheric pressure (3 atm) will automatically open the _close valve 4, then the tube will discharge Ziyuan -30 gas to K until the pressure sensor detects the pressure to 1 atmosphere, and then switch V4 off. The control procedure of the present invention at the time of E is as follows: Order 1. When the S0G liquid level in the yuan sink gradually decreases to 100cc, it is detected by Sb2, and Sb2 is closed, so that the on-off valve V3 is opened, and the solution bottle will be K A flow rate of 1 cc per second is added to the 30 gullets of the Yuan Chuan to the level of the Sb3 detection liquid level to allow the maximum capacity of 200cc to close the on-off valve V3. Yuan Chuanrou also has a minimum allowable position detection unit Sbl to prevent accidents. 2. When the S0G in the solution bottle _ 11 is used up to 40 cc, the position sensor Sal closes the # 黟 valve to open for 50 seconds, and the solution bottle 11 completely flows into the buffer tank 30. When the battery is exhausted, the forging device-action notifies the staff to change the solution. bottle. When changing the solution bottle, the machine still works without interruption. Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 3. The SOG capacity of the solution bottle 11 is 500ce, and the output flow rate is controlled at 1 cc per second. The opening and closing time is 50 seconds, so the solution bottle is provided each time. 50 (^ to the buffer ceremony 30, and the soldier can provide ten times. 4. The pressure sensor S located in the Yuan channel is used to control the exhaust of the opening valve 4 to maintain the hydraulic pressure at 3 atmospheres and 1 atmosphere M 5. Wrap a heat-reducing coupling around the chute, so that the temperature of the yuanheng tank is controlled—7-This paper size is applicable to the Chinese national standard CCNS) A4 size (210X297 mm) A7 B7 丨 4'84 ' 9 — '._____ Description of the invention () _ 4¾ and 4¾ to maintain the freshness of SOG and reduce SOG volatilization and produce contaminated particles to the conveying pipe. At the same time, the conveying pipe of the dripping unit surrounds a heating water pipe 11 51 for the conveying pipe The internal SOG temperature has increased from fC to about 0. Printed by the Central Standards Bureau of the Ministry of Economic Affairs-Industrial and Consumer Cooperatives. The structure of the present invention, in addition to providing the SOG pipeline system, must also include the daily maintenance system of the machine. Best use. The soft maintenance system is connected to a suction tank with an on-off valve U at the bottom of the yuan sink. Therefore, when the maintenance tank is flushed, first open the open valve V5 to drain the remaining self-suction tank in the yuan sink, and then remove it. Wash the trough with M. At the same time, a pipeline is connected at an appropriate height A of the gully groove 30 to connect an SOG detector, in case that the switching valve V3 is turned off, an excessive amount of SOG flows into the gully groove 30, and the height rises above A, then Excessive S0G emerges from the pipeline, and the S0G detector detects that excess S0G flows into the buffer tank 30, and the machine alarms. At the same time, an IP A supply terminal containing a switch V6 is connected between the on-off valve V7 and the cylinder 60. Although the IPA supply mainly provides the purpose of purifying the second half of the pipeline when the on-off valve V7 is closed and the open poppet valve V6 is opened, it can flow through the second half of the pipeline. After reassembling, cleaning, flushing and replacing the solution bottle with IPA, a Purge process must be performed before coating the crystals. The operation procedure is as follows: first open the shutter valve V Then, close the opening and closing valve V6, and then open the pouch 60 to flow IPA through a wisdom line system and flow out of the drip unit. But note that the wafer is not placed at this time, because this action is only used to clean the distribution tube (pu keeps the S0G cleanliness of 0 coated on the wafer. Comparing the distribution of the present invention to the Temple of the Knowers, it is obvious that this hair— 8 — This paper music scale is applicable to Chinese national standards; (CNS) 8 4 specifications (2! 0X297 mm.) A7 B7 5. Description of the invention () It has the following advantages: 1. The 50fcSOG dissolving bottle of the invention will It can be used completely without conventionally having about 100 cC and it will be discarded. Because SOG itself is very expensive, the invention of tamping can greatly reduce the use cost of SOG. 2. Because the invention is changing SOG solution crane At that time, Yantai provided SOG dissolution through the yuan slot, so when the present invention is coated with SOG, the Jianjianji production does not happen to be twisted in the midway as it is known. The present invention is only available on a regular basis. During the maintenance of the machine, it is necessary to stop the machine lotus work, so that the invention has a greater machine efficiency than the conventional one, greatly reducing the manufacturing cost. 9 Therefore, the invention is significantly improved compared to the conventional technology street. , The use of value in the real industry / conversion method to put forward the merits of learning and learning. The best example of hair resistance has been disclosed in the front. Everyone knows that the simple combination and other functional replacements made by those in the industry will not depart from the scope of the patent application below. (Please read the back first Note: Please fill in this page again), install. R cont. R The Ministry of Economic Affairs, the Ministry of Economic Affairs, X, and the consumer spending f ± A si -9 winter paper standards, using Chinese national standards (, CNS) A4 specifications (2 丨 0X297 Mm)

Claims (1)

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