TW415913B - Elevating mechanism and carrier conveying apparatus - Google Patents
Elevating mechanism and carrier conveying apparatus Download PDFInfo
- Publication number
- TW415913B TW415913B TW087104909A TW87104909A TW415913B TW 415913 B TW415913 B TW 415913B TW 087104909 A TW087104909 A TW 087104909A TW 87104909 A TW87104909 A TW 87104909A TW 415913 B TW415913 B TW 415913B
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- Prior art keywords
- aforementioned
- fixed surface
- brake
- lifting
- conveying device
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Abstract
Description
415913 A7 __ B7_ 五、發明説明（1 ) ' [發明之技術領域] 本發明係關於適於運送，例如收納有被處理基板的載 體等之升降機構及載體運送裝置。 [關聯技術之說明] 一般而言，在半導體裝置之製造工程方面，有一種對 於被處理體亦即半導體晶片施行氧化、擴散、Cvd等之 各種處理的工程，而為了謀求此處理工程之通過量 (through put)之提高、無塵化及省空間化，而提案有各種 處理裝置（請參照特開平4-丨33422號公報等）。 例如，上述公報中所产載的處理裝置，係在框體内之 後部上方設有一可透過被處理體保持具（即晶片容器）同時 進行晶片之熱處理的縱型熱處理爐，且，在框體之前部設 有用來運入、運出載體（即收容有多數張晶片之容器）之載 體搬入出口（也稱做10 口）。 經濟部中央標準局員工消贽合作社印狀 n I— - 1— m I n . I - I— I 1 II Τ» • 9-* (請先閱讀背面之注意事項再填寫本頁) 於上述框體内，在載體搬入出口侧上方設有用來保管 多數個載體之載體保管部，並在載體搬入出口與熱處理爐 之間，為了在載體與晶片容器間移載晶片而設有一用以設 置載體之載體設置部、及一用以設置晶片容器之晶月容器 設置部，且在此等載體設置部與晶片容器設置部間設有用 來移載晶片之晶片運送機構。又，於框體内，設有具有升 降機構之載體運送裝置；此升降機構係用(以在載體搬入出 口與载體保管部間、載體保管部與載體設置部間、或載體 搬入出口與載體設置部間進行載體之交接者。 作為此載體運送裝置之升降機構用者，已有採用一種 本紙悵尺度適用中國國家榡準（CNS ) Λ4規格（210X297公釐） 經滴部中央標準局負工消资合作社印繁 415913 A7 -- -----—^ B7 五、發明説明（2) ~ ' --- 高度為3〜如等需要較高之升降行程1由於難以使用球 形螺釘而藉吊材即鋼線或同步帶來懸吊升降等之構成。用 做此节材者，雖採用高強度之吊材，但萬—吊材切斷的時 候’由於重量大到例如70〜8〇 .升降體會掉下而可預 料到發生器具之損壞和危險。為此，將上述升降機構構成 為當吊材切斷時，將之用感測器來檢出，控制另外設置的 制動機構使升降體停止，以便可防止升降體之掉下。 然而，在上述升降機構方面 > 卻需要用來檢出吊材之 切斷的感測器、及包含一藉來自該感測器之信號來電控制 制動機構之電路的控制裝(置。為此，存在著招致成本之增 大，且，需要用電等之問題同時，也有.可能因感測器之誤 認而產生錯誤動作。 發明之概要 本發明之目的係在提供吊材切斷時，以機械代電地使 升降體停止以便可防升降體之掉下的升降機構及載體運送 裝ί。 本發明之第一特徵為，提供一種升降機構，此升降機 構包含有： 引導構件，係設在上下方向； 固定面，係配置成與該引導構件平行； 升降體’係被引導成可沿著前述引導構件升降； 制動體’係在垂直面内可回轉地軸支於該升降體之制 動體者，其在平常時位置於從前述固定面離開的位置，當 前述升降體掉下時，從下側向接近於前述固定面之方向回 本紙張尺度適州十國國家摞率（CNS ) Α4规格（2】Οχ 297公f ) (請先聞讀背面之注意事項再填寫本頁)415913 A7 __ B7_ V. Description of the Invention (1) '[Technical Field of the Invention] The present invention relates to a lifting mechanism and a carrier conveying device suitable for conveying, for example, a carrier containing a substrate to be processed. [Explanation of related technologies] Generally, in the manufacturing process of semiconductor devices, there is a process of performing various processes such as oxidation, diffusion, and Cvd on the object to be processed, that is, semiconductor wafers. In order to obtain the throughput of this process, (through put) has been improved, dust-free, and space-saving, and various processing devices have been proposed (see Japanese Patent Application Laid-Open No. 4- 丨 33422, etc.). For example, the processing device produced in the above-mentioned publication is provided with a vertical heat treatment furnace which can perform heat treatment of wafers simultaneously through a holder to be processed (that is, a wafer container) above the rear part of the housing, and in the housing The front part is provided with a carrier inlet (also referred to as a 10 port) for carrying in and out of a carrier (that is, a container containing a large number of wafers). Employees of the Central Bureau of Standards of the Ministry of Economic Affairs of the People's Republic of China printed a copy of the cooperative n I—-1— m I n. I-I— I 1 II Τ »• 9- * (Please read the precautions on the back before filling this page) in the box above In the body, a carrier storage section for storing a plurality of carriers is provided above the carrier carrying-out exit side, and a carrier for setting a carrier is provided between the carrier carrying-in exit and the heat treatment furnace for transferring the wafer between the carrier and the wafer container. A carrier setting section and a crystal moon container setting section for setting a wafer container, and a wafer transfer mechanism for transferring a wafer is provided between the carrier setting section and the wafer container setting section. In the frame, a carrier conveying device having a lifting mechanism is provided; the lifting mechanism is used (between the carrier carrying-in exit and the carrier storing section, between the carrier carrying-in section and the carrier setting section, or between the carrier carrying-in outlet and the carrier. Set up the transfer of carriers between the departments. As the lifting mechanism of this carrier transport device, a paper size has been adopted for China National Standards (CNS) Λ4 specifications (210X297 mm). Consumers 'cooperatives Yinfan 415913 A7------- ^ B7 V. Description of the invention (2) ~' --- Height 3 ~ If you need a high lifting stroke 1 Due to the difficulty of using spherical screws The material is a steel wire or a suspension with synchronous lifting and the like. Although used as a material for this section, although a high-strength hanging material is used, when the hanging material is cut off, 'the weight is as large as 70 ~ 80. The lifting body will fall and the damage and danger of the appliance can be expected. To this end, the above lifting mechanism is configured to detect by a sensor when the lifting material is cut off, and control a separate braking mechanism to make the lifting body Stop so that you can prevent However, in the above-mentioned lifting mechanism, a sensor for detecting the cut-off of the hanging material and a circuit including a circuit for controlling the braking mechanism by calling a signal from the sensor are needed. For this reason, there is an increase in cost, and there is a problem that electricity is required. At the same time, there may be erroneous operation due to misidentification of the sensor. SUMMARY OF THE INVENTION The object of the present invention is to provide a crane. When the material is cut, the lifting body is stopped mechanically to replace the lifting body so that the lifting body and the carrier can be prevented from falling. The first feature of the present invention is to provide a lifting mechanism, which includes: The guide member is provided in the up-down direction; the fixed surface is arranged parallel to the guide member; the lifter body is guided so as to be able to rise and fall along the aforementioned guide member; the brake body is pivotally supported on the shaft in a vertical plane so as to be rotatable. The brake body of the lifting body is normally located away from the fixed surface. When the lifting body falls, return to the paper rule from the lower side to the direction close to the fixed surface. Ten countries pile appropriate state rate (CNS) Α4 specification (2] Οχ 297 male f) (Please read smell precautions to fill out the back of this page)
--^-------.^--------1Τ------.---1J 415913 A7 勉消部中央標率局負Η消費合作社印裝 五、發明説明（3 ) , — 一一 轉而與前述固定面卡合，藉以制動前述升降體； '㉟勢機構—’係將該制動體成，可從下側向接近於 刖述固定面之方向回轉； ： 吊構件，係連結於前述制動體，透過此制動體來懸吊 月’j述升降體之吊構件者’其在懸吊前述制動體之張力下’ 机拒前述附勢機構之回轉力而向離開前述固定面之方向， 回轉附勢前述制動體；及 制動器，係在平常時，在給定位置禁止由該吊構件之 張力所引起之回轉；其特徵為： 當前述吊構件切斷時，，藉前述附勢機構，使失去來自 。玄吊構件之張力的附勢力之前述制動體向前述固定面回轉 ，使此制動體卡合於前述固定面，藉此使前述升降體停止 0 - 若依此特徵，則在吊材切斷時，能以機械代電使升降 體確實地停止，藉以防止升降體之掉下。 本發明之第二特徵為提供載體運送裝置，此載體運送 裝置包含有： 固定框’係向上下方向延伸設置； 支持臂’係被設成可沿著該固定框向上下方向移動者 ’其用以運送收容有被處理體之載體；及 升降機構’係設在前述固定框與支持(臂之間，其將前 述支持臂移動至上下方向之給定位置來加以保持之同時， 防止支持臂之掉下； 其中，前述升降機構包含有： 本紙張尺度適财_家财.（CNS) Μ規格（2歌別公幻 (請先聞讀背面之注意事項再填筠本頁) ....裝' —訂-^ -------. ^ -------- 1T ------.--- 1J 415913 A7 The Central Standardization Bureau of the Ministry of Reluctance is responsible for printing by consumer cooperatives Explanation (3), — One by one turn to engage with the aforementioned fixed surface, so as to brake the aforementioned lifting body; '㉟ potential mechanism —' is to make the braking body from the lower side to the direction close to the fixed surface described ;: The suspension member is connected to the aforementioned braking body, and the suspension member suspended by the above-mentioned lifting body is suspended under the tension of the aforementioned braking body through the braking body. In the direction away from the aforementioned fixed surface, the aforementioned braking body is swiveled; and the brake is forbidden to rotate by the tension of the hanging member at a given position in normal times; its characteristics are: when the hanging member is cut off At the same time, by the aforementioned affiliation mechanism, the loss comes from. The brake body with tension and tension of the suspending member is turned to the fixed surface, and the brake body is engaged with the fixed surface, thereby stopping the lifting body. 0-According to this feature, when the hanging material is cut off It can stop the lifting body reliably by replacing the electricity with machinery, so as to prevent the lifting body from falling down. A second feature of the present invention is to provide a carrier conveying device. The carrier conveying device includes: a fixed frame is provided to extend upward and downward; a support arm is provided to be movable along the fixed frame in the upward and downward directions; The carrier containing the object to be processed is transported; and the lifting mechanism is provided between the fixed frame and the support (arm, which moves the support arm to a given position in the up-down direction to hold it, and prevents the support arm from being held. Drop; Among them, the aforementioned lifting mechanism includes: The paper size is suitable for wealth _ home wealth. (CNS) Μ specifications (2 songs do not public fantasy (please read the precautions on the back before filling out this page) ... '—Order
-(I 415913 A7 ___________— B7 五、發明説明（4) 弓丨導構件，係向上下方向設在前述固定框； 固疋面，係配置成與該引導構件平行； 升降體，係被引導成可沿著前述引導構件升降； 制動體’係在垂直面内可回轉地軸支於該升降體之制 動體者，其在平常時位置於從前述固定面離開的位置，當 前述升降㈣下時，從下侧向接近於前述較面之方向回 轉而與前述固定面卡合，藉以制動前述升降體； 附勢機構’係將該制動體附勢成’可從下側向接近於 前述固定面之方向回轉： 吊構件，係連結於前声制動體，透過此制動體來懸吊 前述升降體之吊構件者，其在懸爷前述制動體之張力下， 抗拒前述附勢機構之回轉力而向離開前述固定面之方向， 回轉附勢前述制動體；及 ‘ 制動器’係在平常時，在給定位置禁止由該吊構件之 張力所引起之前述制動體之回轉； 其特徵為： 經濟部中央標準局負工消t合作社印裝 當前述吊構件切斷時，藉前述附勢機構’使失去來自 該吊構件之張力的附勢力之前述制動體向前述固定面回轉 ，使此制動體卡合於前述固定面，藉此使前述升降體停止 〇 若依此特徵’則在吊構件切斷時，能私機械方法代電 性方法使升降體確實停止，藉以防止升降體之掉下。尤其 是，在既高價又大重量之半導體晶片的載體運送方面，可 防止掉下時之損壞同時，可防止設在支持臂下部之控制機 本紙張尺度適用中國國家標準{ CNS ) A4規格（210X297公t ) 415913 A7 ---_ B7 五、發明説明（"一~ ^-- 器的損傷* 本發明之第三特徵為提供—種在㈣體方面具有特徵 之載體運送裝置，該制動體包含有： 軸’係使此制動體回轉； ▲制動構件，係被設置成從此軸向半捏方向外方突出， S别述升降體掉下時則回轉而被塞人其與前述固定面之間 來推壓前述固定面；及 节構件連結部，係設在與前述轴之前述固定面相反之 一邊，藉以連結前述吊構件。 右依此特徵，吊構件，丨夾著軸連結於與固定面相反之 一邊的吊構件連結部，所以制動構件不會SJ吊構件之振動 等而向固定面側回轉，可防止制動構件之錯誤動作。又， 在升降體之落下時，將制動構件從下侧推入固定面與袖間 ，所以可確實地將制動構件鎖住於固定面，可使升降體確 實停止。 ί5满部中央標隼局貝工消費合作社印製 本發明之第四特徵為提供一種在制動構件方面具有特 徵之載體運送裝置，該制動構件係於其前端具有一按壓於 固定面之按壓面’ ·此按壓面係形成為，愈往向與藉由前述 附勢機構之前述制動構件的回轉方向相反之方向，前述按 壓面與前述軸之距離變為愈大。 本發明之第五特徵為提供一種在按壓面方面具有特徵 之載體運送裝置，此按壓面形成有齒部以便按壓於固定面 時嵌入固定面。 本發明之第六特徵為提供一種在制動構件方面具有特 本紙張尺度適用中國國家標準（CNS ) Α4規格（2】ΟΧ297公釐） _________B7 五、發明説明（6 ) 徵之載體運送裳置，該制動構件係形成桿狀。 本發明之第七特徵錢供—種在时機構方面具 徵之載體運送展置，該附勢機構為—張力彈著。 本發明之第八特徵為提供一種在附勢機構方面具 徵之載體運送裝置，該„機構為一壓鐵。 ' ' •本發明之第九特徵為提供—種在吊構件方面具有 之載體運送裝置，該吊構件為附齒皮帶a 本發明之第十特徵為提供一種在申構件方面具有特徵 之載體運送裝置，該吊構件為一鋼線。 本發明之第十一特徵产提供-種在固定面方面具有特 徵之載體運送裝置，該固定面係由鋁所成。 +發明之第十二特徵為提供—種在固定面及制動體方 面具有特徵之載體運送裝置， 前述固定面’係設有卡止突起； 前述制動體*係包含： 軸，係用以使該制動體回轉； 卡止構件，係被設成從該軸向半徑方向外方突出，俾 使其前端卡合於前述固定面上之卡止突起；及 經"部中央標準扃負工消費合作社印^ 节構件捲繞部，係用以捲繞前述吊構件，俾可繞著前 述軸回轉。 若依此特徵，由於作成設在固定面之咔止突起與卡止 構件可卡止，因此可確實地進行升降體之制動停止。 本發明之第十三特徵為在卡止構件方面具有特徵之載 體運送裝置•該卡止構件係於前端，形成有一用來卡合於 本紙張尺度適用中國國家標牟（CNS ) A4規格（2!0X297公釐） 9 415913 五、發明説明（ A7 B7 固 定面上之卡止突起的爪部 經濟部中央標率局員工消贽合作社印製 本發明之第十四特徵為提供一種其吊構件為附齒皮帶 之載體運送裝置。 本發明之第十五特徵為提供一種其附勢構件為張力彈 簧之載體運送裝置。 本發明之第十六特徵為提供一種其附勢構件為一捲繞 於該軸之扭簧的載體運送裝置。 圖式之簡單說明 第1圖係顯示本發明之第一實施形態；其中，第1八圖 為非作動狀態之側面圖，圖為動&狀態之側面圖。 第2圖為一斜視圖，係顯示備有載體運送裝置的熱處 理裝置之概略構成。 第3圖係顯示載體運送裝置之升降機構的圖；其中， 第3A圖為正面圖，第3B圖為侧面圖。 第4圖為一平面斷面圓，係顯示載體運送裝置之升降 機構。 第5圖，為制動體之正面圖。 第6圖為制動體之平面圖。 第7圓為本發明第二實施形態之圖；其中第7 A圖係顯 示非作動狀態之側面圖，第7B圖係顯示作動狀態之側面 圖。 ； 通宜實施形態之說明 以下，根據附圖詳述本發明之實施形態。第1圖係顯 示本發明之第一實施形態，其中第1A圖為非作動作狀態 請 先 閏 讀 背 面 之 注 Ϊ i 裝 訂 本紙伕尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 10 經濟部中央標準局負Η消費合作社印31 415913 A7 ____B7 五、發明説明（8) 之側面圖，第1B圖為作動狀態之側面圖；第2圖為一斜視 圖’係顯示備有載體運送裝置之熱處理裝置的概略構成； 第3圓係顯示載體運送裝之升降機構，其中第3a圖為正面 囷’第3B圖為側面圖，第4圖為一平面斷面圖，係顯示載 體運送裝置之升降機構；第5圖為制動體之正面圊；第6圖 為制動想之平面圖；第2圖係顯示本發明之第二實施形萍 ’其中第7A圖為非作動狀態之側面圖，第7B圖為作動狀 態之侧面圖。 首先’一面參照第2圖一面說明備有載體運送裝置之 熱處理裝置的概略構成。fb熱處理裝置係在未圖示之框體 内之後部上方設有縱型熱處理爐2 >且各框體之前部設有 一用以搬入搬出載體3(收容有多數張晶片w之容器）之載 體搬入出口（也稱做10 口）4。該熱處理爐2，可透過被處理 體保持具（即晶片容器1)同時熱處理多數張被處理體即晶 片W。 於上述框艘内，在載體搬入出口 4之下部設有一用來 載置载體3之載體載置體5，而在載體搬入出口 4之上方則 設有一用來保管多數個載體3之棚狀載體保管部6。在載體 搬入出口 4與熱處理爐2之間，為了在載體3與晶片容器1間 移載晶片W，而設有用來設置載體3之載體設置部7及用來 設置晶片容器1之晶片容器設置部8 而這些載體設置部7 與晶片容器設置部8之間則設有一用來進行晶片之移載的 晶片運送機構（也可稱為移載機構）9，在上述熱處理爐2之 下方’設有升降機構12及晶片容器運送機構π。其中，該 本紙张尺度適用中國國家標孪（CNS) Α4現格（210x297公釐） (請先閱讀背面之注意事項再填寫本頁) ---訂 11 經漓部中央梯準局貞工消费合作社印製 415913 五、發明説明（9) 升降機構12係於用來開閉爐口 2之蓋體10上透過保溫筒11 <·> 載置上述晶片容器1，與溫筒丨1 一同把該晶片容器1搬入熱 處理爐2内之給定溫度領域或為搬出而使之升降；該晶片 運送機構13係將晶片容器1從上述蓋體10上之保溫筒11上 運送至晶片容器設置部8，或從晶片設置部8運送至蓋體10 上之保溫筒11上。 又，在框體内，設有一備有升降機構14之載體運送裝 置15 ;該升降機構14係用以在載體搬入出口 4之載體載置 台5與載體保管部6間、載體保管部6與載體設置部7間、或 載體搬入出口 4與載體設年部7間進行載體3之運送交接。 此載體運送裝置15, 一如第3圖及第4圖所示，具有一透過 吊材即同步皮帶I 8使升降體17升降之升降機構14 ;該升降 體17係沿著大致垂直之固定面16地被支持成可升降之狀態-(I 415913 A7 ___________- B7 V. Description of the invention (4) The bow guide member is arranged in the above fixed frame in the up-down direction; the fixing surface is arranged parallel to the guide member; the lifting body is guided into The brake body can be lifted along the aforementioned guide member; the brake body is a brake body which is pivotally supported by the lift body in a vertical plane, and is normally located at a position away from the fixed surface. Rotate from the lower side to the direction closer to the aforementioned relatively surface and engage with the fixed surface to brake the lifting body; the attachment mechanism 'appends the braking body to be able to approach the fixed surface from the lower side. Rotating in the direction: The hoisting member is connected to the front brake body, and the person who suspends the hoisting member of the lifting body through the braking body resists the turning force of the potential-affected mechanism under the tension of the suspension body of the suspension master. The direction of leaving the fixed surface is to turn the braking body in turn; and 'brake' is to prohibit the rotation of the braking body caused by the tension of the hanging member at a given position in normal times; It is printed by the Central Bureau of Standards of the Ministry of Economic Affairs of the Ministry of Economic Affairs and the cooperative. When the suspension member is cut off, the aforementioned braking mechanism is used to turn the braking body that loses the tension from the suspension member to the fixed surface, so that This braking body is engaged with the aforementioned fixed surface, thereby stopping the aforementioned lifting body. If this feature is used, when the hanging member is cut off, the mechanical body can be stopped by a private mechanical method instead of an electrical method, thereby preventing the lifting body from being stopped. In particular, in terms of carrier transportation of semiconductor wafers that are both expensive and heavy, it can prevent damage at the same time, and can prevent the control machine located under the support arm. The paper size applies Chinese national standards {CNS) A4 Specification (210X297 male t) 415913 A7 ---_ B7 V. Description of the invention (" 一 ~ ^-Damage to the device * The third feature of the present invention is to provide a carrier transport device with characteristics in the carcass, The brake body includes: a shaft 'turns the brake body; ▲ a brake member is arranged to protrude outward from the axial half-pinch direction; when the lifting body falls off, it is turned and plugged The fixed surface is pushed between the fixed surfaces; and the joint connection portion of the joint member is provided on the side opposite to the fixed surface of the shaft to connect the hanging member. According to this feature, the hanging member sandwiches the shaft The suspension member is connected to the opposite side of the fixed surface from the fixed member, so the brake member can be turned to the fixed surface without the vibration of the SJ suspension member. This prevents the brake member from malfunctioning. When the lifting body is dropped, The brake member is pushed into the fixed surface and the sleeve from the lower side, so the brake member can be reliably locked on the fixed surface, and the lifting body can be stopped reliably. The fourth feature is to provide a carrier conveying device having characteristics in terms of a braking member. The braking member has a pressing surface pressed against a fixed surface at the front end thereof. The pressing surface is formed so as to move forward and backward by the aforementioned power. The rotation direction of the brake member of the mechanism is opposite to that of the mechanism, and the distance between the pressing surface and the shaft becomes larger. A fifth feature of the present invention is to provide a carrier conveying device having a characteristic of a pressing surface which is formed with a tooth portion so as to be fitted into the fixing surface when pressed against the fixing surface. A sixth feature of the present invention is to provide a special paper standard in terms of brake members, applicable to Chinese National Standard (CNS) A4 specifications (2) 0 × 297 mm) _________B7 5. Description of the invention (6) The carrier for transporting the clothes, the The brake member is formed in a rod shape. The seventh feature of the present invention is a kind of carrier conveyance display which is characteristic in terms of time mechanism, and the supporting mechanism is tension tension. An eighth feature of the present invention is to provide a carrier conveying device which is characteristic in terms of supporting mechanism. The mechanism is a compacted iron. '' The ninth feature of the present invention is to provide a carrier conveying which is provided in the hanging member. The hanging member is a toothed belt a. A tenth feature of the present invention is to provide a carrier conveying device having characteristics in the application member, the hanging member is a steel wire. The eleventh feature of the present invention provides- A carrier conveying device having a characteristic of a fixed surface, the fixed surface is made of aluminum. + The twelfth feature of the invention is to provide a carrier conveying device having a characteristic of a fixed surface and a brake body. The aforementioned fixed surface is provided with There are locking protrusions; the aforementioned braking body * includes: a shaft for rotating the braking body; a locking member is provided to protrude outward from the axial radial direction, and its front end is engaged with the aforementioned fixing The locking protrusions on the surface; and the section member winding section of the central standard “Consumer Cooperative Consumer Cooperative Association” is used to wind the above-mentioned hanging member, and the shaft can be rotated around the aforementioned axis. According to this feature, The locking protrusion and the locking member provided on the fixing surface can be locked, so that the braking stop of the lifting body can be reliably performed. A thirteenth feature of the present invention is a carrier conveying device having the characteristics of the locking member • The The locking member is attached to the front end, and a locking protrusion on the fixed surface of the fixed surface is formed to fit the Chinese paper standard (CNS) A4 specification (2! 0X297 mm) to the paper size. 9 415913 The fourteenth feature of the present invention printed by the staff of the Central Standards Bureau of the Ministry of Economic Affairs of the People's Republic of China is to provide a carrier conveying device whose hanging member is a toothed belt. A fifteenth feature of the present invention is to provide The component is a carrier conveying device of a tension spring. A sixteenth feature of the present invention is to provide a carrier conveying device whose potential component is a torsion spring wound around the shaft. Brief Description of the Drawings Figure 1 shows the present invention The first embodiment; among them, FIG. 18 is a side view of the non-actuated state, and FIG. Is a side view of the active & state. FIG. 2 is a perspective view showing the heat of the carrier conveying device. The schematic structure of the processing device. Fig. 3 is a diagram showing the lifting mechanism of the carrier conveying device; of which, Fig. 3A is a front view and Fig. 3B is a side view. Fig. 4 is a plane cross-section circle showing the carrier conveyance. The lifting mechanism of the device. Fig. 5 is a front view of the brake body. Fig. 6 is a plan view of the brake body. The seventh circle is a diagram of the second embodiment of the present invention; and Fig. 7 A is a side view showing the non-acting state. Fig. 7B is a side view showing the operating state. Description of the universal embodiment will be described in detail below with reference to the drawings. Fig. 1 shows a first embodiment of the present invention, of which Fig. 1A Please read the note on the back for non-operational status. I The size of the bound paper is applicable to the Chinese National Standard (CNS) A4 (210X297 mm). 10 The Central Bureau of Standards of the Ministry of Economic Affairs and the Consumer Cooperative Press 31 415913 A7 ____B7 V. Invention Explanation (8) is a side view, and FIG. 1B is a side view of an operating state; FIG. 2 is an oblique view 'shows a schematic configuration of a heat treatment device equipped with a carrier transport device; and a third circle shows a load The lifting mechanism of the body transporting device, wherein FIG. 3a is the front view; FIG. 3B is the side view, and FIG. 4 is a plan sectional view showing the lifting mechanism of the carrier conveying device; and FIG. 5 is the front view of the brake body. Figure 6 is a plan view of the braking concept; Figure 2 is a side view of the second embodiment of the present invention, wherein Figure 7A is a side view in an inactive state, and Figure 7B is a side view in an activated state. First, a schematic configuration of a heat treatment apparatus provided with a carrier transporting device will be described with reference to FIG. 2. The fb heat treatment device is provided with a vertical heat treatment furnace 2 above the rear part of a frame (not shown), and a carrier for carrying in and out of the carrier 3 (a container containing a plurality of wafers w) is provided at the front of each frame. Move into the exit (also called 10 ports) 4. This heat treatment furnace 2 is capable of simultaneously heat-treating a plurality of wafers, namely wafers W, through the wafer holder 1 (i.e., wafer container 1). In the above-mentioned frame, a carrier mounting body 5 for placing the carrier 3 is provided below the carrier carrying-in exit 4, and a shed shape for storing a plurality of carriers 3 is provided above the carrier carrying-out exit 4. Carrier storage section 6. Between the carrier carrying-in exit 4 and the heat treatment furnace 2, in order to transfer the wafer W between the carrier 3 and the wafer container 1, a carrier setting section 7 for setting the carrier 3 and a wafer container setting section for setting the wafer container 1 are provided. 8 A wafer conveying mechanism (also referred to as a transfer mechanism) 9 for transferring wafers is provided between the carrier setting portion 7 and the wafer container setting portion 8, and is provided below the heat treatment furnace 2 The elevating mechanism 12 and the wafer container transport mechanism π. Among them, the paper size is applicable to the Chinese National Standard (CNS) Α4 (210x297 mm) (please read the precautions on the back before filling out this page) --- Order 11 by the Ministry of Justice of the Central Government of China Printed by the cooperative 415913 V. Description of the invention (9) The lifting mechanism 12 is mounted on the cover 10 for opening and closing the furnace mouth 2 through the heat insulation tube 11 < · > to place the above-mentioned wafer container 1 together with the temperature tube 丨 1 The wafer container 1 is moved into a given temperature range in the heat treatment furnace 2 or raised and lowered for carrying out; the wafer transport mechanism 13 transports the wafer container 1 from the heat-retaining cylinder 11 on the cover 10 to the wafer container setting portion 8 Or, it is transported from the wafer setting portion 8 to the heat insulation cylinder 11 on the cover 10. In the frame, a carrier conveying device 15 equipped with a lifting mechanism 14 is provided; the lifting mechanism 14 is used between the carrier mounting table 5 and the carrier storage section 6 at the carrier carrying-in exit 4, and the carrier storage section 6 and the carrier. There are 7 installation units, or the carrier carry-in exit 4 and the carrier installation department 7 carry out the delivery of the carrier 3. This carrier conveying device 15, as shown in Figs. 3 and 4, has a lifting mechanism 14 for lifting the lifting body 17 through a timing belt I 8 which is a lifting material; the lifting body 17 is along a substantially vertical fixed surface 16 lands are supported in a liftable state
D 此升降機構14 |具有一前面被敞開之斷面成“”形 狀的固定框19 ;而此固定框19之内面則被作成上述固定面 16。上述固定框19,係形成大致垂直狀態，而被螺栓等固 定在框體Η之内壁；在此固定框19内則可升降地支持著上 述升降體17«作為上述固定框19之材料用者，宜使用由具 有剛性之同時易讓後述之制動構件36嵌入之金屬材料，例 如is合金所成者。 、 在上述固定框19之内面，沿著長向地設有左右一對之 導軌20;而於兩導軌20，透過支持體21可升降地支持上述 升降體17。上述導軌20及支持體21，雖說宜為將支持體21 本紙張尺度適用中國國家樣準（cns ) μ規格uioxm公釐) ]~一~~ (請先聞讀背面之注意事項再填寫本頁)D The lifting mechanism 14 has a fixed frame 19 whose front surface is opened in a cross-section; and the inner surface of the fixed frame 19 is made into the fixed surface 16 described above. The fixed frame 19 is formed in a substantially vertical state, and is fixed to the inner wall of the frame body 螺栓 by bolts or the like. The fixed frame 19 supports the lifting body 17 «as the material of the fixed frame 19, which can be raised and lowered. It is preferable to use a metal material, such as an is alloy, which is rigid and easy to be inserted into a brake member 36 described later. A pair of left and right guide rails 20 are provided on the inner surface of the above-mentioned fixed frame 19 along the longitudinal direction; and on both guide rails 20, the above-mentioned lifting and lowering body 17 is liftably supported by a support 21. The guide rail 20 and the support 21 mentioned above, although it should be the support 21, the paper size is applicable to the Chinese national standard (cns) μ size uioxm mm)] ~ 一 ~~ (Please read the precautions on the back before filling this page )
4^5913 A7 _____β7 五、發明説明（10) 可滑動地設在導轨20上而成之線性導向，但使支持體21透 過車輪在導軌20上行走者也可。 就上述升降機構14之驅動機構而言，在可調整高度地 設置在上述固定框19下方之地板上的驅動部設置台22上， 透過軸承24，可垂直旋轉地安裝有一用來驅動上述同步皮 帶1 8之驅動滑輪23同時，安裝有一用來旋轉驅動該驅動滑 輪23之附有減速齒輪的馬達25。又，在上述固定框β之内 面上端部，透過軸承2 7，可垂直旋轉地安裝有一與驅動滑 輪23對應之從動滑輪26。 上述同步皮帶18’係張力強度上，以内部具有芯材 為理想。此同步皮帶18並非為無端狀（endless)，而是有端 狀；其係橫跨驅動滑輪23與從動滑輪26而卷掛成c字形； 其上方端係連結固定在後述之制動體3 1，而下方端則連結 固定在升降體17。 經浠部中央標準局—工消費合作社印聚 在上述升降體17，軸支著一在垂直面内可回轉的制動 體31 ;在此制動體31，設有張力彈簧32以作為將該制動體 31向接近上述固定面16之方向回轉附勢之附勢手段，同時 為了藉升降體17之自重在該張力彈簧32之阻力下將制動體 向離開固定面16之方向拉伸，而連結上述同步皮帶18之上 方端。藉此，當同步皮帶18被切斷時，藉由張力彈簧32使 制動體31接觸嵌入於固定面16，使升降體7停止< 上述制動體3 1，係如第5及至6圖所示，包含有：一透 過軸承33在垂直面内可回轉地設在升降體π之軸34 ;向 固定面16側斜下方延出設在該軸34之一端的制動構件36 ; 134 ^ 5913 A7 _____ β7 V. Description of the invention (10) A linear guide formed by being slidably provided on the guide rail 20, but it is also possible for the supporter 21 to walk on the guide rail 20 through the wheels. As for the driving mechanism of the lifting mechanism 14, the driving portion setting table 22 which is adjustable in height and is arranged on the floor below the fixed frame 19, is vertically rotatably mounted through the bearing 24 for driving the timing belt. At the same time, the driving pulley 23 of 18 is provided with a motor 25 with a reduction gear for rotationally driving the driving pulley 23. A driven pulley 26 corresponding to the driving pulley 23 is rotatably mounted vertically at the upper end of the inner surface of the fixed frame β through a bearing 27. It is preferable that the timing belt 18 'has a core material in the tensile strength. The timing belt 18 is not endless, but has an end shape; it is wound in a c-shape across the driving pulley 23 and the driven pulley 26; and its upper end is connected and fixed to a brake body 31 described later. The lower end is connected and fixed to the lifting body 17. The central standard bureau of the Ministry of Industry and Industry and Consumer Cooperatives printed and gathered on the above-mentioned lifting body 17 and a shaft supported a braking body 31 which can be rotated in a vertical plane; here, the braking body 31 is provided with a tension spring 32 as the braking body. 31 rotates the potential means of attachment in a direction close to the fixed surface 16 and simultaneously connects the synchronization in order to stretch the brake body in a direction away from the fixed surface 16 under the resistance of the tension spring 32 by the weight of the lifting body 17 The upper end of the belt 18. As a result, when the timing belt 18 is cut, the brake body 31 is brought into contact with the fixing surface 16 by the tension spring 32 to stop the lifting body 7 < The brake body 31 is shown in FIGS. 5 and 6 , Including: a shaft 34 rotatably provided on the vertical axis π through a bearing 33 in a vertical plane; a brake member 36 provided at one end of the shaft 34 obliquely below the fixed surface 16 side; 13
In I. 1 -- 一 r - i I -ί I 0 : I ! · — I- I ------- (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家榡隼（CNS ) A4规格{ 210X 297公釐） 415913 A7 B7 五、發明説明（11 經"部中央榡準局貝Η消費合作社印製 及為了將同步皮帶18之上方端連結固定於上述軸34而設置 之皮帶固定部37。此皮帶固定部37 ,備有藉螺检之鎖緊來 夾緊同步皮帶18之夾緊構件38，39 ;其下部夾緊構件38係 固定在一設在軸34之安裝台40上。 在上述安裝台40上》安裴有—掛上張力彈簧32之一端 的彈簧掛部41 ;而掛上張力彈簧32之另一端的另一方之彈 簧掛部42，則安裝在升降體]7。上述制動體3〖之皮帶固定 邛3 7，係如第1 a圖所示，設在從轴34偏心之位置，以便 藉同步皮帶18之張力亦即升降體n之荷重在轴34產生順時 針方向（制動構件從固定面,離開之方向）之力矩。為了防止 因上述力矩而使軸34作出超出必要之回轉，而在軸34設有 一向上方延出之制動構件43，且在升降體丨7安裝有一使制 動構件43之前端部碰觸用之承受板44。 —方面，上述張力彈簧32被張掛成在軸34產生向反時 針方向（制動構件36接近於固定面之方向）之力矩Q此時， 張力彈簧32被設定為小於同步皮帶之張力亦即升降體之荷 重之彈簧力。藉此，使制動體31在升降體17之升降移動中 不會隨便向固定面16惻回轉，且在同步皮帶18被切斷時’ 如第1B圖所示，可自動地向固定面16側回轉。 上述制動構件3 6 ’係以形成向固定面丨6側斜下方延出 之桿狀為理想。又’制動部構件36之前端部，係以形成為 與上述固定面16接觸之制動時產生大摩擦阻力之構造，例 如形成有易嵌入固定面16之齒部1 !5為理想。 十 在上述升降體17，成一體地形成有一向前方水平延出 (請先閱讀背面之注意事項再填寫本頁)In I. 1-一 r-i I -ί I 0: I! · — I- I ------- (Please read the precautions on the back before filling this page) This paper size is applicable to Chinese countries 榡隼 (CNS) A4 specification {210X 297 mm) 415913 A7 B7 V. Description of the invention (11 Printed by the Ministry of Economy, Trade and Industry Bureau of Belarus Consumer Cooperative and for fixing the upper end of the timing belt 18 to the above-mentioned shaft 34 A belt fixing portion 37 is provided. The belt fixing portion 37 is provided with clamping members 38 and 39 for clamping the timing belt 18 by screw-locking; the lower clamping member 38 is fixed to a shaft 34 On the mounting table 40. On the above mounting table 40, "Ampey has-hang the spring hanging portion 41 on one end of the tension spring 32; and hang the spring hanging portion 42 on the other end of the tension spring 32, then install In the lifting body] 7. The belt fixing 邛 3 7 of the braking body 3 is set at an eccentric position from the shaft 34 as shown in Fig. 1a, so that the tension of the timing belt 18, that is, the load of the lifting body n A clockwise moment (direction in which the brake member moves away from the fixing surface and away from the shaft) is generated on the shaft 34. In order to prevent the moment from being caused by the moment The shaft 34 rotates more than necessary, and a braking member 43 extending upward is provided on the shaft 34, and a receiving plate 44 for mounting the front end of the braking member 43 in contact with the lifting body 7 is installed. The tension spring 32 is stretched to generate a torque Q in the counterclockwise direction of the shaft 34 (the direction in which the brake member 36 approaches the fixed surface). At this time, the tension spring 32 is set to be smaller than the tension of the timing belt, that is, the load of the lifting body. As a result, the braking body 31 does not randomly rotate toward the fixed surface 16 during the lifting and lowering movement of the lifting body 17, and when the timing belt 18 is cut, as shown in FIG. 1B, it can automatically move to the fixed surface. It rotates on 16 sides. The above-mentioned braking member 3 6 ′ is preferably formed in a rod shape extending obliquely downward to the fixing surface 丨 6 side. The front end of the braking portion member 36 is formed so as to contact the above-mentioned fixing surface 16. A structure that generates large frictional resistance during braking. For example, it is ideal to form teeth 1 and 5 that can easily fit into the fixed surface 16. Ten lifting bodies 17 are integrally formed with a horizontally extending forward (please read the note on the back first) Refill This page)
.^ϋ - - I I. ^ ϋ--I I
II
-/V 本紙张尺錢用巾®·:料（⑽）A4娜（2igx 297公金） 415913 A7 B7 經濟部中央標率局I工消費合作杜印^ i、發明説明（12) " 之懸臂梁狀之升降臂46 ;而此升降臂46則安裝有一用來可 水平移動地支持載體3之支持臂47。支持臂47，係如第2圖 所示在升降臂46之下部配置一對，而以設成可向升降臂46 之長向及與長向正交之方向水平移動為理想。又，支持臂 47，係以構成為可裝卸地支持載體3之上部，且可沿著支 持臂47之長向水平移動載體3為理想。 上述固定框19之前面，係如第4圖所示以藉具有可供 升降臂16移動的縫槽48之蓋板49來被覆，以及，升降機構 14之驅動部，係如第3B圖所示，以藉蓋部50來覆蓋為理 想。在升降機構件，設有一用來檢出升降體17之移動距離 1 或高度之感測器；該升降機構14及支持臂17則被設成藉控 制裝置來自動或半自動地控制（省略圖示）^ 其次，說明由以上之構成所成之載體運送裝置15之作 用。藉由馬達25之驅動，將其驅動力透過同步皮帶18從驅 動滑輪23傳輸給升降體17，使升降體17升降。藉由升降體 17之升降及支持臂47之驅動，在載體搬入出口 4之載體載 置台5與載體保管部6之間、載體保管部6與載體設置部7之 間、或載體搬入出口 4與載體設置部7之間，進行載體3之 交接。 且說，由於上述升降體17係透過卷掛在從動滑輪26之 同步皮帶18而成為懸吊之狀態，因此若同#皮帶18萬一被 切斷時，升降體17則有自動节下之虞。然而，在上述升降 體17卻在垂直面内可回轉地軸支著制動體3丨，且在此制動 體31設有一將之向接近於固定框〗9之固定面16的方向回轉 本紙ί長尺度適用中國國家榡準{ CNS ) Α4规格（210Χ 297公釐） 15 (請先閱讀背面之注意事項再硝寫本頁 i衣.-/ V Paper towel with money ruler ··: material (⑽) A4na (2igx 297 public gold) 415913 A7 B7 I Industrial and Consumer Cooperation Duan of the Central Standards Bureau of the Ministry of Economic Affairs i. Cantilever of the description of the invention (12) " The beam-shaped lifting arm 46 is provided with a supporting arm 47 for supporting the carrier 3 horizontally. As shown in FIG. 2, a pair of support arms 47 are arranged below the lifting arm 46, and the supporting arms 47 are preferably provided so as to be horizontally movable in the longitudinal direction of the lifting arm 46 and a direction orthogonal to the long direction. The support arm 47 is desirably configured as a detachable upper portion of the support carrier 3 and is capable of moving the carrier 3 horizontally along the length of the support arm 47. The front surface of the fixed frame 19 is covered with a cover plate 49 having a slot 48 for the lifting arm 16 to move as shown in FIG. 4, and the driving part of the lifting mechanism 14 is shown in FIG. 3B It is preferable to cover by the cover portion 50. A sensor for detecting the moving distance 1 or height of the lifting body 17 is provided on the lifting mechanism part; the lifting mechanism 14 and the support arm 17 are set to be controlled automatically or semi-automatically by a control device (not shown) ^^ Next, the function of the carrier transporting device 15 constructed as described above will be described. Driven by the motor 25, its driving force is transmitted from the driving pulley 23 to the lifting body 17 through the timing belt 18, so that the lifting body 17 is raised and lowered. By the lifting of the lifting body 17 and the drive of the support arm 47, between the carrier mounting table 5 and the carrier storage section 6 of the carrier carrying-in exit 4, between the carrier storage section 6 and the carrier setting section 7, or between the carrier carrying-in outlet 4 and Carrier 3 is transferred between the carrier setting portions 7. In addition, since the lifting body 17 is suspended by being wound on the timing belt 18 of the driven pulley 26, if the same belt 18 is cut, the lifting body 17 may be automatically lowered. However, the above-mentioned lifting body 17 supports the brake body 3 rotatably in a vertical plane, and here the brake body 31 is provided with a long scale which rotates the paper toward a direction close to the fixed surface 16 of the fixed frame 9 Applicable to China National Standard {CNS) A4 specification (210 × 297 mm) 15 (Please read the precautions on the back before writing this page.)
、1T 415913 A7 B7, 1T 415913 A7 B7
五、發明説明（A 附勢之張力彈簧32，同時為了在該張力彈簧32之阻力下藉 升降體17之自重將制動體31向離開固定面16之方向拉，而 連結著上述同步皮帶18。 為此，若上述同步皮帶18被切斷時，制動體31則被上 述張力彈簧3 2強迫回轉至固定面16側，藉此使制動體31接 觸嵌入於制動體31。即，在來自此時之摩擦或嵌入之制動 作用下停止升降體17，從而可防患升降體Π之落下於未然 〇 具體言之’在制動體31之回轉下，使制動構件36之前 端部接觸於固定框19之固(定面16,進而在其摩擦與升降體 17之自重下制動構件16進一步被回轉而強烈地推壓固定面 16，成為嵌入固定面16之鎖住狀態，藉此使升降體〖7停止 。為了使其產生上述制動作用，而有必要確實地被支持於 導執20 ’以便防止升降體17向離開固定面16之方向變位， 且，有必要將制動構件36之軸34至前端部之長度設定為， 比軸34與固定面16間之距離更長。 如此，若依上述載體運送裝置15,則由於構成為，當 使升降體17沿著固定面16升降的同步皮帶丨8被切斷時，藉 張力彈簧32使制動體接觸嵌入於固定面16俾使升降體丨了停 止，因此同步皮帶18被切斷時，可用機械以代電確實地使 升降體17停止，藉以防止升降體17之掉下彳。因此，由於同 步皮帶18之切斷時未使用電式控制裝置作為用來停止升降 體17以防止落下之安全裝置，故並不需要用電，可謀成本 之減低同時，不會產生錯誤動作，可謀信賴性之提高。 I II - I - ^^1 p'i I- - , -II 1 —I— t.»l - 1-- (請先閲讀背面之注意事項再填寫本頁) 經漪部中央梂隼局貞工消費合作社印聚 16 經#部中央榡準局負工消费合作社印狀 415913 A? ___ B7 五、發明説明（14) ' 又，由於上述制動體31備有一透過軸承33在垂直面内 可回轉地設在升降體17之軸34、一向固定面16側斜下方延 出而設在此軸34之制動構件36、及為了連結固定同步皮帶 18而設在上轴34之皮帶固定部37，因此可獲得用簡單之構 成來確實地作動之制動體31，從而可謀成本之減低。又， 將已切斷之同步皮帶18換為新的同步皮帶，且使制動體31 復返原來之位置，藉此可使載體運送裝置15再起動。 以上，雖藉圖式來詳述本發明之實施形態，但本發明 絕非受限於上述實施形態，可在不脫離本發明之要旨的範 圍内作各種設計變更等。巧如，制動構件36可形成為凸輪 狀、及扇形以替代桿狀。例如，扇形之中心部被固定在扇 形之中心部，在扇形之周緣部形成有多數齒部等之制動構 件也可。就制動體3 1之附勢手段而言，當然以張力彈簧32 為且，例如壓縮彈簧、卷簧、板普也可；又，除了彈簧以 外，壓鐵等也可。申請專利範圍第丨項之發明，也可適用 於載體運送裝置以外之升降機構。此時，作為兩材用者， 除了同步皮帶以外，例如鋼線也可，或在固定框之上端部 安裝鋼線卷上轉筒也可。 其次，於第7A圓、第7B圖顯示升降機構之其他實施 形態，此升降機構61，係與第4圖所示之升降體17同樣， 透過支持體21而滑動自如地配置在一設在彳固定框19之導軌 20，在此升降體61，設有軸承（未圖示）；在此軸承63軸支 著軸63 ;而在此軸63，則固定有一齒輪（同步滑輪）65 ,在 此齒輪（同步滑輪)65，同步皮帶67之一端被卷繞在其外周， 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁)V. Description of the invention (A Affected tension spring 32 is connected to the timing belt 18 described above in order to pull the brake body 31 away from the fixed surface 16 by the weight of the lifting body 17 under the resistance of the tension spring 32. For this reason, when the timing belt 18 is cut, the brake body 31 is forced to rotate to the fixed surface 16 side by the tension spring 32, thereby bringing the brake body 31 into contact with the brake body 31. That is, at this time, The lifting body 17 is stopped under the action of friction or embedded braking, so that the lifting body Π can be prevented from falling. Specifically, 'under the rotation of the braking body 31, the front end of the braking member 36 contacts the fixing frame 19' The fixed (fixed surface 16), and further under the friction and the weight of the lifting body 17, the braking member 16 is further rotated to strongly push the fixed surface 16 to a locked state embedded in the fixed surface 16, thereby stopping the lifting body [7] In order to generate the braking effect described above, it is necessary to be surely supported by the guide 20 ′ in order to prevent the lifting body 17 from being displaced away from the fixed surface 16, and it is necessary to move the shaft 34 of the brake member 36 to the front end. Length It is set to be longer than the distance between the shaft 34 and the fixed surface 16. In this way, if the carrier conveying device 15 is used as described above, since the lifting body 17 is lifted along the timing belt 8 which is raised and lowered along the fixed surface 16, it is cut. At this time, the tension body 32 makes the braking body contact the embedded surface 16 to stop the lifting body. Therefore, when the timing belt 18 is cut off, the lifting body 17 can be stopped by a machine to replace the electricity, thereby preventing the lifting body 17 Therefore, since the electric control device is not used as a safety device to stop the lifting body 17 to prevent falling when the timing belt 18 is cut, electricity is not required, and the cost can be reduced. Mistakes may occur, which can improve reliability. I II-I-^^ 1 p'i I--, -II 1 —I— t. »L-1-- (Please read the precautions on the back before (Fill in this page) Printed by the Central Government Bureau of the Ministry of Economic Affairs, Yin Gong Consumer Cooperative Co., Ltd. 16 Certificate of the Ministry of Economic Affairs, the Central Government Bureau of Work, Consumer Cooperatives, Seal 415913 A? ___ B7 V. Description of the invention (14) 31 A transmission bearing 33 is provided on the lifting body 1 so as to be rotatable in a vertical plane. The shaft 34 of 7, the brake member 36 provided on this shaft 34 extending obliquely downward to the side of the fixed surface 16, and the belt fixing portion 37 provided on the upper shaft 34 to connect and fix the timing belt 18, can be easily used. The brake body 31 is configured to operate reliably, thereby reducing costs. Furthermore, the cut timing belt 18 is replaced with a new timing belt, and the brake body 31 is returned to the original position, thereby enabling the carrier The transport device 15 is restarted. Although the embodiments of the present invention have been described in detail with reference to the drawings, the present invention is not limited to the above embodiments, and various design changes and the like can be made without departing from the gist of the present invention. Coincidentally, the braking member 36 may be formed in a cam shape and a fan shape instead of a rod shape. For example, the fan-shaped center portion may be fixed to the fan-shaped center portion, and a brake member such as a plurality of teeth may be formed on the fan-shaped peripheral portion. As for the potential means of the brake body 31, of course, the tension spring 32 is also used, for example, a compression spring, a coil spring, and a plate can be used; in addition to the spring, a pressure iron can also be used. The invention in the scope of patent application No. 丨 can also be applied to the lifting mechanism other than the carrier conveying device. At this time, as a dual material user, in addition to the timing belt, for example, steel wire may be used, or a steel wire roll reel may be mounted on the upper end of the fixed frame. Next, other embodiments of the lifting mechanism are shown in circles 7A and 7B. The lifting mechanism 61 is the same as the lifting body 17 shown in FIG. The guide rail 20 of the fixed frame 19 is provided with a bearing (not shown) in the lifting body 61; here, the bearing 63 supports the shaft 63; and on this shaft 63, a gear (synchronous pulley) 65 is fixed, here Gear (synchronous pulley) 65, one end of the timing belt 67 is wound around its outer circumference. This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page)
17 4l5dis A7 〜________ B7 一 五、發明説明（15) 並藉固定五金69固定在齒輪狀之外周。此同皮帶67，係與 第3圖所示之實施形態同樣，卷繞於設在上部之從動滑輪 及設在下部之驅動滑輪；即，旋轉驅動滑輪，藉此使升降 體向上下移動。 在齒輪（同步滑輪）65之上側形成有倒角部71 ; 一方面 ，在則述升降體61 ’設有一與前述倒角部7丨對向之制動器 73 ^在此處，同步皮帶67，係對於齒輪（同步滑輪外加 第7A圖中順時針旋轉之旋轉力，以作為支持升降體“之 重量的反作用力。因此，如此圖所示，齒輪（同步滑輪）65 - 動,¾ 之第面75以 防止齒輪（同 步滑輪65)之其以上之旋轉，藉由同步皮帶67來支持升降 體61。 一方面，在升降體61之下部設有彈簧掛部77 ;在軸63 也設有彈簧掛部79。此張力彈簧81之張力，係設定為小於 同步皮帶67之張力；而只要藉由同步皮帶67懸吊升降體6ι ，齒輪（同步滑輪）65即如第7A圖所示》保持一使其倒角部 71抵觸於第一面75之位置。 麵消部中央榡率局員工消费合作杜印^ n - .n n ϋ n I i^i . n n n - - n T (請先閲讀背面之注意事項再填寫本頁) 在轴63 ’固定有卡止構件83。此卡止構件μ，係從轴 63向斜下方突出形成；其前端則形成有爪部85。 —方面，在固定框19之固定面，隔著—規定間隔，設 有一用來卡合於卡止構件83之爪部85之卡彳止突起87。 在這種構成下’萬一同步皮帶67被切斷的話，圖中順 時針回轉齒輪（同步滑輪65)之張力則消失。於是，如第7β 圖所示，在張力彈簧81之張力下，齒輪（同步滑輪）65則向 本紙張尺度剌巾g| _縣（CNS ) Λ4规格（2 j Q χ 297公着） 18 經漓部中央標準局貝工消費合作社印焚 4l^9ls A7 --------B7 五、發明説明（Μ) 反時針之方向回轉，帶動向斜下方突出之卡止構件83向水 平方向回轉。然後，卡止構件83前端之爪部85卡合於固定 面16之卡止突起87同時，嵌入固定面丨6’以制動掉下之升 降體61使之停止。此時，加諸於齒輪（同步滑輪）65之反時 針旋轉之力，則藉著抵觸於制動器之第二面89而支持齒輪 (同步滑輪）之倒角面71。又，在升降體6丨設置制動器以便 防止爪部85旋轉水平以上也可β 如此’在本實施形態之升降機構方面，當同步皮帶 被切斷時，卡止構件83則在張力彈簧81之作用下確實地回 轉。因此，不用電式方法产可使升降體51之掉下確實停止 。又，由於在固定面16以給定間隔設有卡止突起87，所以 °丁確實卡止構件83之爪部85，可確實進行落下停止。 以上，雖根據圓式來詳細說明本實施形態，但本發明 並不限疋於上述實施例，可作不脫離本發明之要旨的各種 變更。例如，卡止構件並不一定為桿狀，凸輪狀也可。又 ’就附勢機構來說’其並不一定為張力彈簧，卷繞於轴63 的扭簧也可。 如上所說明’若依本發明’則當使升降體沿著固定面 升降之吊材切斷時，由於構成為藉附勢機構使制動體接觸 、嵌入於固定面，俾使升降體停止，所以吊材被切斷時， 用機械代電地使升降體確實停止，藉此可防止升降體之翁$ 下。因此，未使用電式控制裝置’從而不需要用電，可謀 成本之減低同時，不會引起錯誤動作，可提高信賴性。 又，若依照本發明，則由於上述制動體備有：一透過 本紙張尺度適用中國國家標準（CNS ) Λ4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁)17 4l5dis A7 ~ ________ B7 I. V. Description of the invention (15) It is fixed on the outer periphery of the gear by fixing hardware 69. This is the same as the belt 67, which is the same as the embodiment shown in Fig. 3, and is wound around a driven pulley provided at the upper portion and a drive pulley provided at the lower portion; that is, the drive pulley is rotated to move the lifting body up and down. On the upper side of the gear (synchronous pulley) 65, a chamfered portion 71 is formed; on the one hand, a brake 73 facing the chamfered portion 7 丨 is provided on the lifting body 61 '. Here, the timing belt 67, For the gear (synchronous pulley plus the clockwise rotation force in Figure 7A as a reaction force to support the weight of the lifting body. Therefore, as shown in the figure, the gear (synchronous pulley) 65-moving, ¾ of the 75th surface In order to prevent the gear (synchronous pulley 65) from rotating above, the lifting body 61 is supported by a timing belt 67. On the one hand, a spring hanging portion 77 is provided below the lifting body 61; a spring hanging portion is also provided on the shaft 63 79. The tension of the tension spring 81 is set to be smaller than that of the timing belt 67; as long as the lifting body 6m is suspended by the timing belt 67, the gear (synchronous pulley) 65 is maintained as shown in FIG. 7A. The chamfered portion 71 abuts the position of the first surface 75. The consumer consumption cooperation of the Central Government Bureau of the Consumer Affairs Department ^ n-.nn ϋ n I i ^ i. Nnn--n T (Please read the precautions on the back first (Fill in this page again) On the shaft 63 ', a locking member 83 is fixed. This card The member μ is formed to protrude obliquely downward from the shaft 63; the front end is formed with a claw portion 85.-On the fixed surface of the fixing frame 19, a predetermined interval is provided for engaging the locking member 83 The locking protrusion 87 of the claw portion 85. In this configuration, if the timing belt 67 is cut off, the tension of the clockwise turning gear (synchronous pulley 65) disappears. Therefore, as shown in FIG. 7β It is shown that under the tension of the tension spring 81, the gear (synchronous pulley) 65 is aligned with the paper size g | _ county (CNS) Λ4 specification (2 j Q χ 297) 18 Consumption cooperative printing 4l ^ 9ls A7 -------- B7 V. Description of the invention (M) Turning counterclockwise, the locking member 83 protruding obliquely downward is turned to the horizontal direction. Then, the locking member The claw portion 85 at the front end of the 83 is engaged with the locking protrusion 87 of the fixed surface 16 while being engaged with the fixed surface 6 ′ to stop the falling lifting body 61. At this time, it is added to the gear (synchronous pulley) 65 The force of anti-clockwise rotation supports the gear by abutting against the second surface 89 of the brake (same as Pulley) chamfered surface 71. It is also possible to provide a stopper on the lifting body 6 丨 to prevent the claw portion 85 from rotating above the horizontal level. Β In this way, in the lifting mechanism of this embodiment, when the timing belt is cut, the locking member 83 is surely rotated by the tension spring 81. Therefore, without using the electric method, the falling of the lifting body 51 can be stopped. Moreover, since the fixing protrusions 16 are provided with locking protrusions 87 at a predetermined interval, ° The claw portion 85 of the locking member 83 can be reliably stopped and stopped. Although the present embodiment has been described in detail based on the circular form, the present invention is not limited to the above embodiment, and can be used without departing from the present invention. Various changes to the gist. For example, the locking member is not necessarily a rod shape, and a cam shape may be used. It is not necessarily a tension spring as far as the potential mechanism is concerned, a torsion spring wound around the shaft 63 may be used. As described above, 'if according to the present invention', when the lifting material that lifts the lifting body along the fixed surface is cut, the braking body is contacted with the potential supporting mechanism and embedded in the fixed surface to stop the lifting body. When the hanging material is cut off, the lifting body is actually stopped with a machine instead of electricity, which can prevent the lifting body from falling. Therefore, no electric control device is used, thereby eliminating the need for electricity, reducing costs, preventing malfunctions, and improving reliability. In addition, according to the present invention, since the above-mentioned brake body is provided with:-the size of this paper applies the Chinese National Standard (CNS) Λ4 specification (210X297 mm) (please read the precautions on the back before filling this page)
19 415933 A7 ______B7 五、發明説明（17) 一 軸承在垂直面内可回轉地設在升降體之軸、一向固定面側 斜下方延出設在此軸之制動構件、及一為了連結固定同步 皮帶而設在上述軸之吊構件連結部，因此獲得以簡單之構 成確實地作動之制動體’且可謀成本之減低。 (請先閑讀背面之注意事項再填寫本瓦} "' 經漓部中央標隼局員η消费合作社印製 20 本紙張尺度適用中國國家標準（CNS ) Α4規格（2】0Χ 297公釐） 415913 A7 B7五 '發明説明（18) 元件標號對照 經濟部中央標準局員工消f合作社印繁 1...晶片容器 23...驅動滑輪 2...熱處理爐 24,27,33...軸承 3...載體 2 5...馬達 4...載體搬入出口 26...從動滑輪 5...載體載置台 30...皮帶驅動部 6...載體保管部 31...制動體 7...載體設置部 32...張力彈簧 8...晶片容器設置部 3 4，6 3.. ‘轴 9...晶片運送機構 36...制動構件 10…蓋體 37...皮帶固定部 11...保溫筒 38,39…夾緊構件 12…升降機構 40...安裝台 13...晶片容器運送機構 43...制動器構件 H...升降機構 44...承受板 15...載體運送裝置 45…*部 16...固定面 46...升降壁 17,61...升降體 47...支持臂 18...同步皮帶 48...縫槽 19...固定框 49...蓋板ΐ 20…導軌 50... % 21...支持體 65…齒輪（同步滑輪） 22…驅動設置台 67...同步皮帶 (請先閲讀背面之注意Ϋ項再填寫本頁) -----.-------------./ \策------訂--------^~ L 1^ L------ 本紙張尺度適用中國國家標牟（CNS ) A4規格（2】OX 297公釐） 21 經滴部中央標隼局貝工消费合作社印裝 415913五、發明説明（19) 69.. .固定五金 71.. .倒角部 73.. .制動器 75.. .第一面 A7 B7 81…張力彈簣 83…卡止構件 8 5...介部 87…卡止突起 77,79...彈簧掛部 (請先閱讀背面之注意事項再填寫本頁) 袈· 本紙張尺度逋扪中國國家標準（CNS ) A4規格（210x29"?公釐） 2219 415933 A7 ______B7 V. Description of the invention (17) A bearing is rotatably provided on the shaft of the lifting body in a vertical plane, a braking member provided on the shaft is extended obliquely below the side of the fixed surface, and a timing belt is connected for fixing Further, since the suspension member connection portion provided on the shaft is provided, a brake body that can be reliably operated with a simple structure can be obtained, and cost reduction can be achieved. (Please read the precautions on the back before you fill out this tile} " 'Printed by a member of the Central Standards Bureau of the Ministry of Economic Affairs and Consumer Cooperatives 20 This paper size applies to Chinese National Standards (CNS) Α4 specifications (2) 0 × 297 mm 415913 A7 B7 five 'invention description (18) the component number is compared with the staff of the Central Bureau of Standards of the Ministry of Economic Affairs, the cooperatives printed by the Chinese Communist Party ... the wafer container 23 ... the drive pulley 2 ... the heat treatment furnace 24, 27, 33 ... Bearing 3 ... Carrier 2 5 ... Motor 4 ... Carrier carry-in exit 26 ... Driven pulley 5 ... Carrier mounting table 30 ... Belt drive section 6 ... Carrier storage section 31 ... Brake body 7 ... Carrier setting portion 32 ... Tension spring 8 ... Wafer container setting portion 3 4, 6 3. 'Shaft 9 ... Wafer transport mechanism 36 ... Brake member 10 ... Lid 37 ... belt fixing portion 11 ... insulation tube 38,39 ... clamping member 12 ... lifting mechanism 40 ... mounting table 13 ... wafer container transport mechanism 43 ... brake member H ... lifting mechanism 44 ... bearing plate 15 ... carrier conveying device 45 ... * section 16 ... fixing surface 46 ... lifting wall 17,61 ... lifting body 47 ... support arm 18 ... timing belt 48. ..Slot 19 ... fixing frame 49 ... cover ΐ20 ... Rail 50 ...% 21 ... Support 65 ... Gear (synchronous pulley) 22 ... Drive setting table 67 ... Timing belt (Please read the note on the back before filling this page) -----. -------------./ \ 策 ------ Order -------- ^ ~ L 1 ^ L ------ This paper size applies to China Standard Mou (CNS) A4 specification (2) OX 297 mm 21 Printed by the Central Standards Bureau of the Ministry of Standards and Printing Co., Ltd., Shellfisher Consumer Cooperative 415913 V. Description of the invention (19) 69 .. Fixed hardware 71.. 73 .. brake 75 .. first surface A7 B7 81 ... tension spring 83 ... locking member 8 5 ... intermediate section 87 ... locking projection 77,79 ... spring hanging section (please read the back first Please pay attention to this page and fill in this page) 袈 · This paper size 逋 扪 Chinese National Standard (CNS) A4 size (210x29 "? mm) 22
Claims (1)
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|---|---|---|---|
| JP10104497 | 1997-04-03 |
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| TW415913B true TW415913B (en) | 2000-12-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| TW087104909A TW415913B (en) | 1997-04-03 | 1998-04-01 | Elevating mechanism and carrier conveying apparatus |
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| KR (1) | KR100565471B1 (en) |
| TW (1) | TW415913B (en) |
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| US8747052B2 (en) | 2006-11-22 | 2014-06-10 | Beijing Sevenstar Electronics Co., Ltd. | Automation for high throughput semiconductor batch-wafer processing equipment |
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| JPH0628278B2 (en) * | 1988-06-17 | 1994-04-13 | 大日本スクリーン製造株式会社 | Elevator for substrate transfer |
| JP3278204B2 (en) * | 1992-08-14 | 2002-04-30 | ナプソン株式会社 | Wafer measurement system |
| JP2913439B2 (en) * | 1993-03-18 | 1999-06-28 | 東京エレクトロン株式会社 | Transfer device and transfer method |
| US5645419A (en) * | 1994-03-29 | 1997-07-08 | Tokyo Electron Kabushiki Kaisha | Heat treatment method and device |
| JPH10335424A (en) * | 1997-04-03 | 1998-12-18 | Tokyo Electron Ltd | Lift mechanism and carrier moving apparatus |
| US6499933B2 (en) * | 1997-04-03 | 2002-12-31 | Tokyo Electron Limited | Elevating mechanism, carrier conveying apparatus and heat treatment installation |
-
1998
- 1998-04-01 TW TW087104909A patent/TW415913B/en not_active IP Right Cessation
- 1998-04-03 KR KR1019980011796A patent/KR100565471B1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR100565471B1 (en) | 2006-09-20 |
| KR19980081070A (en) | 1998-11-25 |
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| Date | Code | Title | Description |
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| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |