經濟部中央標準局貝工消费合作社印裂 406518 3566twf.d〇c/〇〇6 A7Printed by Shellfish Consumer Cooperative of Central Standards Bureau of Ministry of Economic Affairs 406518 3566twf.d〇c / 〇〇6 A7
______ IP 五、發明説明（1 ) 本發明是有關於一種應用於固定式顯示圖案、文字之 有機電激發光（Organic Electro-Luminescent, OEL)元件的製 作方法’且特別是有關於一種利用定型化（patterne(j)有機 導電薄膜製作固定式顯示圖案、文字之有機電激發光元件 的方法。 有機電激發光的硏發起始於1960年代，迄今已超過30 年的歷史。在1963年首度發表以單晶有機化合物爲對象 的硏究報告中，於施加400伏特(Volts)之高電壓的狀態下 可以發光’但是其發光強度仍遠低於實用階段所需之強 度。 自從1987年美國柯達(Kodak)公司發表有機小分子電 激發光元件（Appl. Phys. Lett.，Vol.51，p914(1987))，以及 1990 年英國Cambridge大學亦成功地將高分子材料應用在電激 發光元件上(Nature, Vol.347, p539(1990))，奠定了有機電激 發光元件實用化的基礎，因而引發了各先進國家產、官、 學三界的高度重視，並進而投入後續的硏究與發展。 有機電激發光具有自發光、廣視角（達160度）、高應 答速度、低驅動電壓、全色彩等特點，被譽爲下一世紀的 平面顯示技術。目前有機電激發光元件的發展已經接近實 用化的階段，將來可望應用於下一代彩色平面顯示器。此 種平面發光元件的高階應用產品將定位在全彩平面顯示元 件，如小型顯示面板'戶外顯示看板、電腦及電視螢幕等。 目前對於有機電激發光元件相關技術之開發，多偏重 於元件與材料結構，對於圖案、文字之顯示技術方面，則 3 度適用中國國家《準（CNS )，\4坭格(2\ΟΧ29Ί^^ ) ~— (邻先間讀背而之注意事^'#填寫本頁) 裝· 線 -"•_部中央標準局貝工消费合作社印製 4065.8 3 5 6.6 tvvf.doc/006 ^ η __ _ B7 五、發明説明（>) ' 較爲欠缺。有機電激發光元件對於圖案、文字之顯示可大 略區分爲固定顯示與動態顯示兩類。其中，動態顯示可以 提供變動之圖案或文字的影像訊息，如數字顯示器、動態 式廣告看板、營幕顯示器等，但是需要製作出能夠顯示各 個像素（Pixel)的點矩陣（D〇t-Matdx)元件，並配合其複雜的 電路控制系統’因此對於製作技術與成本的需求較高；固 定顯示雖然僅能顯示固定之圖案或文字的影像訊息，如標 語、標誌指示板、汽車面板、固定式廣告看板等，但對於 製作技術與成本的需求皆較動態顯示低許多，僅需要一個 適當面積大小的平面顯示元件及一個簡單的操作電路。因 此’這兩種顯示方式的有機電激發光應用產品各有其市場 的定位與需求。 有機電激發光元件對於圖案、文字之顯示技術，對於 以溶液旋轉塗佈（Spin-Coating)製程之高分子電激發光元件 而言，仍爲一有待改進的課題。茲就習知技藝中固定式顯 不圖案、文字之有機電激發光元件的製作技術分別說明如 下： 請參照第1A圖至第1C圖’其所繪示的是習知一種以 陰極分隔柱（Cathode Separator)製作用以顯示圖案、文字之 有機電激發光元件的製作流程圖。此一方法是由普林斯頓 (Princeton)大學（Appl. Phys. Lett.，V〇l.77，p3197(1997))與先 鋒（Pioneer)公司（Jpn. J. A卯 1. Phys·，Vol.36, pl555(1997))同 時提出，以金屬電極像素化的方式，製作適合以小分子爲 材料之有機電激發光元件。 4 本纸張尺度通用中囡國家榡準（CNS ) /\4坭梢（210X297.;>々7~ -…' ~ — —-II------裝丨----\---訂------線 - - _ - ("先閱讀背而之注意事^:填艿本萸) 經滴部中央標準局員工消费合作社印餐 406518 3 566twf.doc/006 A7 _________ Η 7 五、發明説明（彡） 請穸照第1Α圖，首先提供銦錫氧化玻璃(ΙΤ〇玻璃)基 板’其中包括玻璃基底1〇〇及銦錫氧化層(Indmm Tm Onde， IT〇)1〇2。其次在銦錫氧化玻璃基板上形成τ型陰極分隔 柱104 ’用以隔離後續製程中將要形成之金屬電極。接著 請參照第1Β圖，以蒸鍍的方式，將有機材料蒸鍍於銦錫 氧化層102及Τ型陰極分隔柱1〇4上，形成有機發光層1〇6。 然後請參照第1C圖，在有機發光層丨06上，以蒸鍍方式 形成金屬電極108，完成顯示元件的製作。此種方法的製 程繁複，雖然可以製作出動態顯示元件，然而並不適用於 以溶液塗佈方式製作之高分子材料顯示元件。 請參照第2Α圖至第2F圖，其所繪示的是習知一種以 光阻-曝光程序將金屬電極定型化之有機電激發光顯示元 件的製作流程圖。此法是由Lidzey等人所提出(Synth. Met., V〇l_82, pl41(1996))，對於高分子材料之有機電激發光元 件’利用光阻-曝光程序在元件中製作出微小圖案之金屬 電極。 請參照第2A圖，首先提供銦錫氧化玻璃基板，其中 包括玻璃基底200及銦錫氧化層202。並於基板上依序形 成有機發光層204及光阻層206，其中有機發光層的材質 爲聚（2,5-二烷氧基-對位苯基乙烯）(p0ly(2,5-Dlalk0χyt phenylene-Vlnylene)， PDAOPV) 。 接著請參照第 2B 圖， 使 用接觸式光罩(Mask)208，以紫外光對光阻層206進行曝 光。經顯影之後，形成定型化光阻層206a及開口 210，如 第2C圖所示。其次請參照第2D圖，以蒸鍍方式在定型化 本纸银尺度適用中國國家標準（CNS ) Λ4规梢（210x?97公xTj __一~ ' —~ -------¾------IT------.¾ --'' ' * ί ; (誚先閱讀背而之注意事項妁填本頁} 3 5 灰/益 A7 3 5 灰/益 A7 經满部中央標苹局貝工消费合作社印繁 _ 们 1 .1 1 —. ··· 一·. I _ I 一-^—— “"-. - ||_ 五、發明説明（< ) 光阻層206a上及開口 210底部形成金屬層212。再以丙酮 (Acetone)將定型化光阻層206a及部分之金屬層212去除， 於有機發光層204表面上形成金屬電極214，如第2E圖所 示。將金屬電極214與外界進行電性連接，完成元件之製 作，如第2F圖所示。由此程序所製作之元件的起始電場 將會增加，而且其發光效率降爲一般光罩定型化（Mask Pattern)元件之35%。這是由於光阻塗佈、烘烤、紫外光曝 光 '顯影及去光阻等處理程序的影響，因而降低了發光材 料的螢光量子效率。 請參照第3A圖至第3C圖，其所繪示的是習知一種將 發光層定型化（Emitting Layer Pattern)之有機電激發光顯示 元件的製作流程圖。此法是HP公司與Rochester大學合作 (Advanced Materials, Vol.9, p392(1997))共同硏發出來的， 主要是利用聚對位苯基乙嫌（Poly(Phenylene Vinylene), PPV) 與其前軀體（Precursor)溶解性的差異，以微影製程 (Photolithographic Process)將有機發光層定型化而製作出高 分子兀件。 請參照第3A圖，首先提供表面被覆有機薄膜之銦錫 氧化玻璃基板，其中在銦錫氧化層300上，覆有聚對位苯 基乙烯層302以及聚丁二烯(Polybutadiene，PBD)與聚苯乙 烯(Polystyrene, PS)摻合層304。利用光罩306對其進行曝 光步驟，使得有機膜材產生光激發酸催化消去反應 (Photogenerated Acid Catalyzes Elimination)。經照光之後， 將光罩圖案轉移至有機膜材中，形成定型化聚對位苯基乙 6 本紙張尺度適用中ΐ國家掠举（CNS )八4疋林(210 X 297^"^ ) ~ 丨丨丨-------裝------ΪΤ------0 -- : (部先閱讀背而之注意事項^填$本頁) 經濟部中央標準局員工消费合作社印製 4065.8 3566twf.doc/0〇6 A 7 B7 五、發明説明（夕） 烯層302a以及定型化聚丁二烯與聚苯乙烯摻合層3〇4a， 如第3B圖所示。再經顯影後，即可得到定型化聚對位苯 基乙烯層302a，以作爲發光層，如第3C圖所示。由上述 步驟，可以製作出結構爲銦錫氧化層/定型化聚對位苯基乙 烯層/聚丁二烯：聚苯乙烯摻合層/鈣金屬層（ITO/Patterned PPV/PBD:PS/Ca)之高分子元件。請參照第4圖，其所繪示 的是習知一種具有定型化發光層之有機電激發光顯示元件 的結構剖面圖。其元件之結構是由玻璃基底400、銦錫氧 化層402、定型化有機電激發光層404、電子傳遞層406， 以及金屬電極408等所構成。 由此種方法製作之圖案的大小可達125 μιη，但是元件 的漏電流過大’其量子效率由一般製程的0.25%大幅地降 低至0.01%。此程序僅適用於少數具有前軀體的發光層材 料，而且在曝光的過程中會減低材料的螢光效率，在顯影 過程中亦會影響材料表面的淸潔度。 除了上述的製作方法外’ Yang Yang提出利用噴墨印 表機(Ink-]et Printer)取代旋轉塗佈機(Spin-Coater)，以噴墨 方式塗膜來製作高分子電激發光元件（Science, Vol.279, pll35(1998)) ’此法具有節省高分子材料之消耗，而且可以 製作任意的顯不圖案、文字，其墨滴的大小可達3Ομπι， 並且可以應用在全彩的顯示元件上等優點。由於此法爲一 種新製程’所以在應用上仍有許多問題有待克服，如銦錫 氧化玻璃的傳送、使用溶劑及噴墨頭阻塞等。 由於有機電激發光具有自發光、廣視角（達160度）、 7 1. · - IΛί衣 ^ ·. 訂 矣 - If ; . (誚1閱讀#而之注意事項再填寫本頁} 本紙张尺度適用中國國家樣準（CNS ) ( 210Χ 297公«.) 406518 i566twf.doc/006 Λ7 B7 經漭部中央標準局只工消费合作社印^ 五、發明説明（6) 高應答速度、低驅動電壓、全色彩等特點，因而被稱爲下 一世紀的平面顯示技術。目前對於有機電激發光元件相關 之技術開發多偏重於元件與材料結構，在顯示技術開發方 面則較爲欠缺。前述現階段之各種顯示技術都有其缺點與 問題，茲將其分析整理如表1所示。 因此本發明之主要目的就是在提供一種應用於固定式 顯示圖案、文字之有機電激發光元件的製作方法’而且是 一種對於使用溶液塗佈製程的高分子有機電激發光元件’ 以及使用蒸鍍製程的小分子有機電激發光元件皆可適用的 製作方法。 根據本發明之上述目的，提出一種顯示圖案或文字之 有機電激發光元件的製作方法，首先提供具有透光導電性 質的玻璃基板，對基板進行表面淸潔處理之後，在基板上 形成有機導電薄膜。然後將有機導電薄膜定型化，在有機 導電薄膜中形成用以顯示圖案、文字的區域。其次將適當 的電洞、電子傳遞層材料與發光層材料以塗佈或蒸鍍的方 式，在定型化有機導電薄膜層的表面形成有機發光層。接 著在有機發光層的表面上，依序形成適當的金屬電極及保 護層。以透光導電的玻璃基板爲正極，金屬電極爲負極， 施予適當的操作電壓，即可顯示出所需之發光的圖案或文 字。______ IP V. Description of the invention (1) The present invention relates to a method for manufacturing an Organic Electro-Luminescent (OEL) element applied to a fixed display pattern and text. (Patterne (j) organic conductive thin film method for producing organic electroluminescent devices with fixed display patterns and characters. The burst of organic electroluminescent light began in the 1960s and has a history of more than 30 years. It was first published in 1963. In the research report on single-crystal organic compounds, it can emit light under a high voltage of 400 Volts, but its luminous intensity is still much lower than that required for practical use. Since 1987, Kodak ( Kodak) company published organic small molecule electro-optical light-emitting elements (Appl. Phys. Lett., Vol. 51, p914 (1987)), and the University of Cambridge in 1990 also successfully applied polymer materials to electro-optical light-emitting elements ( Nature, Vol. 347, p539 (1990)), laid the foundation for the practical application of organic electro-excitation light elements, and therefore attracted great attention from the industry, government and academia of all advanced countries. The organic electro-excitation light has the characteristics of self-luminescence, wide viewing angle (up to 160 degrees), high response speed, low driving voltage, full color, etc., and is known as a flat display technology in the next century. The current development of organic electroluminescent devices is nearing the stage of practical application, and it is expected to be used in the next generation of color flat display. The high-end application products of such flat light emitting devices will be positioned in full-color flat display devices, such as small display panels. Outdoor display boards, computers, TV screens, etc. At present, the development of related technologies for organic electroluminescent devices is more focused on components and material structures. For the display technology of patterns and texts, China ’s National Standard (CNS) is applicable to 3 degrees. ， \ 4 坭 格 (2 \ ΟΧ29Ί ^^) ~ — (Nearly read from the back ^ '# Fill this page) Assembling and wiring- " • __ Printed by the Central Standards Bureau Shellfish Consumer Cooperatives 4065.8 3 5 6.6 tvvf.doc / 006 ^ η __ _ B7 V. Description of the invention (>) 'Lacks. The display of patterns and characters of organic electroluminescent elements can be roughly divided into fixed display and There are two types of dynamic display. Among them, dynamic display can provide changing image or text image information, such as digital display, dynamic advertising sign, camp screen display, etc., but need to make a dot matrix (D) that can display each pixel (Pixel) 〇t-Matdx) components and cooperate with its complex circuit control system 'so the demand for production technology and cost is higher; although the fixed display can only display fixed image or text image information, such as slogans, sign boards, cars Panels, fixed advertising signboards, etc., but the requirements for production technology and cost are much lower than dynamic displays. Only a flat display element with a suitable area and a simple operating circuit are required. Therefore, these two types of display organic electroluminescence applications have their own market positioning and needs. For organic electroluminescent devices, the display technology of patterns and characters is still a subject to be improved for polymer electroluminescent devices using the spin-coating process. The following are the descriptions of the manufacturing techniques of the fixed electro-optical light-emitting elements with fixed display and text in the conventional art: Please refer to FIG. 1A to FIG. 1C. Cathode Separator) Fabricates a flow chart for the production of organic electroluminescent elements for displaying patterns and text. This method was developed by Princeton University (Appl. Phys. Lett., V.l.77, p3197 (1997)) and Pioneer (Jpn. J. A 卯 1. Phys., Vol. 36). , pl555 (1997)) also proposed to use a metal electrode pixelation method to produce an organic electro-optical light element suitable for small molecules. 4 This paper standard is generally in the Chinese National Standard (CNS) / \ 4 坭 (210X297 .; > 々7 ~ -... '~ — —-II ------ installation 丨 ---- \- --Order ------ line--_-(" Read the back notice first ^: fill in this book) by the Ministry of Standards Bureau of the Central Consumers ’Bureau of Consumption of Indian Food 406518 3 566twf.doc / 006 A7 _________ Η 7 5. Description of the invention (彡) Please provide the indium tin oxide glass (ITO glass) substrate 'according to Figure 1A, which includes a glass substrate 100 and an indium tin oxide layer (Indmm Tm Onde, IT〇). 102. Secondly, a τ-type cathode separation pillar 104 ′ is formed on an indium tin oxide glass substrate to isolate a metal electrode to be formed in a subsequent process. Next, referring to FIG. 1B, an organic material is vapor-deposited by evaporation. An organic light emitting layer 10 is formed on the indium tin oxide layer 102 and the T-shaped cathode separation pillar 104. Then, referring to FIG. 1C, a metal electrode 108 is formed on the organic light emitting layer 06 by evaporation. Production of display elements. This method has a complicated process. Although dynamic display elements can be produced, it is not suitable for solution coating. Polymer material display element. Please refer to Figures 2A to 2F, which shows a flow chart for the fabrication of a conventional organic electroluminescent display element that uses a photoresist-exposure program to shape a metal electrode. This method It was proposed by Lidzey et al. (Synth. Met., V〇l_82, pl41 (1996)). For the organic electro-excitation light-emitting element of polymer materials, a photoresist-exposure procedure was used to make a micropatterned metal electrode in the element Please refer to FIG. 2A. First, an indium tin oxide glass substrate is provided, which includes a glass substrate 200 and an indium tin oxide layer 202. An organic light emitting layer 204 and a photoresist layer 206 are sequentially formed on the substrate. The material of the organic light emitting layer is Poly (2,5-dialkoxy-para-phenylethylene) (p0ly (2,5-Dlalk0xyt phenylene-Vlnylene), PDAOPV). Then refer to Figure 2B and use a contact mask (Mask) 208 The photoresist layer 206 is exposed with ultraviolet light. After development, a shaped photoresist layer 206a and an opening 210 are formed, as shown in FIG. 2C. Secondly, please refer to FIG. 2D. Silver scale applies Chinese National Standard (CNS) Λ 4 gauge (210x? 97 male xTj __ 一 ~ '-~ ------- ¾ ------ IT ------. ¾-' '' * ί; (诮 先Read the back of the note and fill in this page} 3 5 Gray / Benefit A7 3 5 Gray / Benefit A7 I _ I 一-^ —— ""-.-|| _ V. Description of the Invention (<) A metal layer 212 is formed on the photoresist layer 206a and the bottom of the opening 210. Then, the shaped photoresist layer 206a and a part of the metal layer 212 are removed with acetone, and a metal electrode 214 is formed on the surface of the organic light emitting layer 204, as shown in FIG. 2E. The metal electrode 214 is electrically connected to the outside to complete the fabrication of the device, as shown in FIG. 2F. The initial electric field of the device produced by this procedure will increase, and its luminous efficiency will be reduced to 35% of that of a general mask pattern device. This is due to the effects of processing procedures such as photoresist coating, baking, UV exposure, development, and photoresist removal, thereby reducing the fluorescent quantum efficiency of the luminescent material. Please refer to FIG. 3A to FIG. 3C, which shows a manufacturing flow chart of a conventional organic electroluminescent display element with an Emitting Layer Pattern. This method was developed by HP in cooperation with the University of Rochester (Advanced Materials, Vol. 9, p392 (1997)). It mainly uses Poly (Phenylene Vinylene) (PPV) and its precursors. (Precursor) The difference in solubility, the organic light-emitting layer was shaped by a photolithographic process to produce a polymer element. Referring to FIG. 3A, an indium tin oxide glass substrate coated with an organic film is first provided. The indium tin oxide layer 300 is covered with a polyparaphenylene vinyl layer 302 and polybutadiene (PBD) and polybutadiene. Polystyrene (PS) blended layer 304. The photomask 306 is subjected to an exposure step, so that the organic film material generates a photo-activated acid-catalyzed elimination reaction (Photogenerated Acid Catalyzes Elimination). After exposure to light, the photomask pattern was transferred to an organic film material to form a shaped poly-p-phenylethyl 6. This paper is suitable for the China National Crisis (CNS) Eighty-four Forest (210 X 297 ^ " ^) ~ 丨 丨 丨 ------- install ------ ΪΤ ------ 0-: (Notes for the Ministry to read the back first ^ Fill in this page) Staff of the Central Standards Bureau of the Ministry of Economic Affairs Printed by the consumer cooperative 4065.8 3566twf.doc / 0〇6 A7 B7 V. Description of the invention (Even) The olefin layer 302a and the shaped polybutadiene and polystyrene blended layer 304a, as shown in Figure 3B. After further development, a shaped polyparaphenylene vinyl layer 302a can be obtained as a light emitting layer, as shown in Fig. 3C. According to the above steps, an indium tin oxide layer / typed polyparaphenylene vinyl layer / polybutadiene: polystyrene blend layer / calcium metal layer (ITO / Patterned PPV / PBD: PS / Ca) can be prepared. ) Polymer elements. Please refer to FIG. 4, which is a cross-sectional view showing a structure of a conventional organic electroluminescent display element having a shaped light-emitting layer. The structure of the device is composed of a glass substrate 400, an indium tin oxide layer 402, a shaped organic electroluminescent layer 404, an electron transfer layer 406, and a metal electrode 408. The size of the pattern produced by this method can reach 125 μm, but the leakage current of the device is too large, and its quantum efficiency is greatly reduced from 0.25% of the general process to 0.01%. This procedure is only applicable to a few luminescent layer materials with a precursor, and the fluorescent efficiency of the material will be reduced during the exposure process, and the surface finish of the material will also be affected during the development process. In addition to the above-mentioned manufacturing method, Yang Yang proposed to use an ink-jet printer (Ink-) et Printer instead of a spin-coater to coat the film with an ink-jet method to produce a polymer electroluminescent device (Science , Vol.279, pll35 (1998)) 'This method can save the consumption of high-molecular materials, and can produce arbitrary display patterns and characters. The size of its ink droplets can reach 30μπι, and it can be applied to full-color display elements. Superior advantages. Since this method is a new process, there are still many problems to be overcome in application, such as the transfer of indium tin oxide glass, the use of solvents, and the blocking of inkjet heads. Since the organic electro-excitation light has a self-luminous, wide viewing angle (up to 160 degrees), 7 1. ·-IΛί 衣 ^ ·. Order If-If; Applicable to China National Standards (CNS) (210 × 297 male «.) 406518 i566twf.doc / 006 Λ7 B7 Printed by the Central Standards Bureau of the Ministry of Economics and Industry and Consumer Cooperatives ^ 5. Description of the invention (6) High response speed, low driving voltage Features such as full color are called flat display technology in the next century. At present, the development of technologies related to organic electroluminescent devices is more focused on the components and material structure, but it is relatively lacking in the development of display technology. Various display technologies have their shortcomings and problems, and their analysis is summarized as shown in Table 1. Therefore, the main purpose of the present invention is to provide a method for manufacturing an organic electroluminescent device for fixed display patterns and characters. It is a manufacturing method applicable to both high molecular organic electroluminescent devices using a solution coating process and small molecular organic electroluminescent devices using a vapor deposition process. Root The above object of the present invention is to provide a method for manufacturing an organic electro-optical light-emitting element displaying a pattern or a character. First, a glass substrate having a light-transmitting and conductive property is provided. After the substrate is subjected to surface cleaning treatment, an organic conductive film is formed on the substrate. Then, the organic conductive film is shaped, and an area for displaying a pattern or a text is formed in the organic conductive film. Secondly, appropriate holes, an electron transfer layer material, and a light-emitting layer material are coated or evaporated to form a shape An organic light-emitting layer is formed on the surface of the organic conductive thin film layer. Then, an appropriate metal electrode and a protective layer are sequentially formed on the surface of the organic light-emitting layer. A transparent and conductive glass substrate is used as a positive electrode, and a metal electrode is used as a negative electrode. By operating the voltage, the desired pattern or text can be displayed.
本紙張尺度適用中國國家梂準（CNS ) Λ4忧#, ( 2|〇x：?97,:.H in 尤 閱 讀 背This paper size is applicable to China National Standards (CNS) Λ4 忧 #, (2 | 〇x:? 97,:. H in especially read read back
I 再 Η 裝 頁 訂 線 406518 3 566twf.doc/006 A7 H7 五、發明説明（” 經濟部中央標準局员工消费合作社印裂 項 巨 製作方法 提出者 缺 點 1 陰極分隔 柱 Pioneer; Princeton Univ. a. 技術需求較高且製程繁複， 雖然可以製作出動態顯示元 件，但用於製作固定式圖文 顯示所需之成本過高。 b. 不適用於以溶液塗佈的高分 子元件。 2 銦錫氧化 玻璃定型 化 a. 將銦錫氧化玻璃定型化需要 經過上光阻、曝光、顯影、 蝕刻、去光阻等多項製作程 序。 b. 此顯示製程於高解析、低線 寬時將因電場的梯度分佈導 致所顯示的圖文亮度不均。 3 發光層 定型化 HP & Rochester Univ. a. 將發光層材料定型化需要經 過上光阻、曝光、顯影、蝕 刻、去光阻等多項程序。 b. 這些程序將會降低材料之螢 光效率，影響其表面的潔淨 度，因而無法得到良好效率 的發光兀ίΨ。 4 以光阻對 金屬電極 定型化 D. G. Lidzy et_ al. (Sheffield Univ.) a. 將金屬電極定型化需要經過 上光阻、曝光、顯影、蝕刻、 去光阻等多項程序。 b. 這些程序將會降低材料之螢 光效率，影響其表面的潔淨 度，因而無法得到良好效率 的發光元件。 C.此顯示製程於高解析、低線 寬時將因電場的梯度分佈導 致所顯示的圖文亮度不均。 5 以光罩對 金屬電極 定型化 a. 此顯示製程相當簡單，但受 限於金屬光罩，故解析度較 {氏0 b. t提高其解析度時亦會有電 場梯度分佈的問題。 6 噴墨印表 機 Yang Yang (UCLA) a. 此ίί可節省許多商分子材料 之消耗，可以製作任意的顯 示圖案、文字，而且可應用 在全彩的顯示元件上。 b. 此爲一種新製程，在應用上 仍有銦錫氧化玻璃的傳送、 使用溶劑及噴墨頭阻塞等許 多問題待克服。 ---\------裝丨"---^---訂------線 ("先間讀背而之注意事項杓填寫本頁) 本紙張尺度適用中國國家標準（CNS ) Λ4说枋（210X297公兑） 406518 3 5 66twf.doc/006 H7 五、發明説明（χ ) 爲讓本發明之上述和其他目的、特徵、和優點能更明 顯易懂，下文特舉一較佳實施例，並配合所附圖式，作詳 細說明如下： 圖式之簡單說明： 第1A圖至第1C圖繪示習知一種以陰極分隔柱製作有 機電激發光顯示元件之製作流程圖。 第2A圖至第2F圖繪示習知一種以光阻-曝光程序對 金屬電極定型化製作有機電激發光顯示元件之製作流程 圖。 第3A圖至第3C圖繪示習知一種將發光層定型化之有 機電激發光顯示元件的製作流程圖。 第4圖繪示習知一種具有定型化發光層之有機電激發 光顯示元件的結構剖面圖。 第5A圖至第5E圖繪示依照本發明之一較佳實施例， 一種應用於固定式顯示圖案、文字之有機電激發光元件的 製作流程圖。 圖式之標記說明： 100、200、400、500 :玻璃基底 經漓部中央標隼局员工消費合作社印^ ("先閱讀背而之注意事項孙填寫本頁) 102、202、300、402 :銦錫氧化層 104 :陰極分隔柱 106、204、508 :有機發光層 108、214、408、510 :金屬電極 206 :光阻層 206a :定型化光阻層 本紙張尺度適用中國國家摞车（CNS ) 格（210X297公犮） 經濟部中央標準局貝工消費合作社印鉍 406518 3 566twf.doc/006 A7 B7 五、發明説明（？） 208、306、506 :光罩 210 :開□ 212 :金屬層 302 :聚對位苯基乙烯層 302a :定型化聚對位苯基乙烯層 304 :聚丁二烯與聚苯乙烯摻合層 304a :定型化聚丁二烯與聚苯乙烯摻合層 404 :定型化有機電激發光層 406 :電子傳遞層 502 :透光導電層 • 504 :有機導電層 504a :定型化有機導電層 實施例 請參照第5A圖至第5E圖，其所繪示的是依照本發明 之一較佳實施例，一種應用於固定式顯示圖案、文字之有 機電激發光元件之製作流程圖。如第5A圖所示，首先提 供透光導電玻璃基板，其結構是由玻璃基底500及透光導 電層（Transparent Conductive Layer, TCL)502 所組成，其中 透光導電層502例如是銦錫氧化層(IT0)。對於基板進行表 面淸潔處理，以利後續製程進行。 其次，請參照第5Β圖，在透光導電層502表面上形 成有機導電層504。其中形成有機導電層504的方法例如 旋轉塗佈法，而有機導電層504係使用有機導電材料，如 聚乙炔（Polyacetylene，ΡΑ)、聚苯胺（Polyaniline，PAn)、聚 ("先閱讀背而之注意事項孙填，¾本頁) 、\s° 本紙張尺度適用中國國家梂準（CNS ) ( 210X297公#) 經满部中央標準局負工消费合作社印裝 406518 3 566twf.doc/006 A 7 ___ Η 7____ 五、發明説明（/。） 吩（Polythiophene，PT)、聚對位苯基乙嫌（Poly(Phenylene Vinylene)，PPV)、聚對位苯（p〇iy(Paraphenylene), PPP)、聚 乙烯 吩（PolytMophene Vmylene, PTV)、聚硫苯 (Poly(Phenylene Sulfide), PPS)、聚氧化二甲苯（P〇ly(Phenylene Oxide), PP0)及其衍生物（Derivatives)、自身摻雜衍生物 (Self-Doping Derivatives)與共聚物衍生物（Copolymer Derivatives)等。 此外有機導電層504之材料也可以使用由有機導電材 料與傳統高分子材料所構成的摻合體(Blend)，其中傳統高 分t材料例如聚甲基丙稀酸甲酯（Polymethyl Methacrylate, PMMA) ' 聚乙烯醇（P〇lyVinyi Alcohol，PVA)、聚環氧乙烷 (Polyethylene Oxide, PE〇）、聚乙烯對苯二甲酯（Polyethylene Terephthalate，PET)及聚丙稀醯胺(p〇iyacryiamide，PAA)等， 而傳統高分子材料之摻合比例約爲1%〜99%。 請參照第5C圖，將基板上之有機導電薄膜定型化， 在有機導電薄膜中形成用以顯示圖案、文字的區域，亦即 形成定型化有機導電層504a。其中形成定型化有機導電層 5〇4a的方法例如使用光罩506，以紫外光或電子束照射有 機導電薄膜上不需發光顯示圖案或文字之區域，對有機導 電薄膜進行曝光程序；或是使用電腦控制之雷射，直接在 有機導電薄膜上不需發光顯示圖案或文字之區域進行掃 猫。藉由上述方法可以定義出有機導電薄膜中用以顯示圖 案、文字的區域。 接著請參照第5D圖，在定型化有機導電層504a表面 12 本紙乐尺度適用中國國家樣準（CNS ) Λ4*^( 210x297^Tf] * 11,-^------裝---：---訂------線 - 与 . , (請先間讀背而之注意事項孙^寫本頁} 經濟部中央標隼局負工消费合作社印奴 406518 3 566twf.cioc/006 A? B7 ______ * __ ** * ' ........ ---1 - -一-. · 五、發明説明（Μ ) 上形成有機發光層508。其中形成有機發光層508的方法 包括蒸鍍法及旋轉塗佈法等，而形成有機發光層508之材 料例如厚度約爲1000A的聚（2-甲氧基，5-(2’-乙基己基氧)-對位苯基乙烯）層（Poly(2-Methoxy，5-(2’-Ethylhexyloxy)-p-Phenylene-Vinylene，MEH-PPV)，或者是由厚度約爲 500A 的氮，氮雙苯基-氮，氮’-(間-甲基苯）聯苯胺(队『-0^)1^1^1-N，N’-(m-Tolyl)Benzidine，TPD)及厚度約爲 500A 的三-(8-羥 基 ）銘（Tris-(8-Hydroxyquinoline)Aluminum，Alq3)疊合而 成之疊合層。其中氮，氮雙苯基-氮，氮’-(間-甲基苯）聯苯 胺爲電洞傳遞層（未顯示於圖中）之材料，而電洞傳遞層是 被覆於定型化有機導電層504a表面之上。三-(8-羥基 ） 鋁則是有機發光層508中所需之有機電激發光材料，覆蓋 於電洞傳遞層表面之上，與電洞傳遞材料疊合形成有機發 光層508。 然後請參照第5E圖，在有機發光層508的表面上， 依序形成金屬電極510及金屬保護層（未顯示於圖中）。其 中形成金屬電極510及金屬保護層的方法例如蒸鍍法，而 金屬電極510之材質包括鎂(Magnesium, Mg)，其厚度約爲 1000A。而金屬保護層之材質包括銀（Sliver，Ag)，其厚度 約爲1000A。 所以此元件之結構爲透光導電層/定型化有機導電層/ 有機發光層/金屬電極層/金屬保護層。其中有機導電層可 @胃機導電材料構成，或者由有機導電材料與傳統高分子 材料的摻合體等所構成；而有機發光層則可由例如聚(2-甲 ___ _「 ,J ^ | 訂 I 線 * - - 4 - (誚先閱讀背而之注意事項洱填‘片本頁) 經濟部中央標準局員工消费合作社印製 406518 3 566twf .d〇c/006 A7 , H7 五、發明説明（12 ) 氧基，5-(2’-乙基己基氧）-對位苯基乙儲）層，或者氮，氮’ 苯基-氮，氮’-(間-甲基苯）聯苯胺與三-(8-羥基 ）鋁疊合層 所構成。 因此元件之材料結構可由上述之有機導電層材料及有 機發光層材料組合而成，例如透光導電層/含雜質之聚π分 層/聚（2-甲氧基，5-(2’-乙基己基氧）-對位苯基乙烯）層/鎂金 屬電極層/銀金屬保護層(TCL/Doped PT/MEH-PPV/Mg/Ag)、 透光導電層/含雜質之聚苯胺層/聚（2-甲氧基，5-(2’-乙基己 基氧）-對位苯基乙烯）層/鎂金屬電極層/銀金屬保護層 (TCL/Doped PAn/MEH-PPV/Mg/Ag)、透光導電層/含雜質之 聚吩層/氮，氮雙苯基-氮，氮’-(間-甲基苯）聯苯胺層/三-(8-羥基 ）鋁層/鎂金屬電極層/銀金屬保護層（TCL/Doped PT/TPD/Alq3/Mg/ Ag)及透光導電層/含雜質之聚苯胺層/氮， 氮雙苯基-氮，氮’-(間-甲基苯)聯苯胺層/三-(8-羥基 ）鋁 層/鎂金屬電極層/銀金屬保護層（TCL/Doped PAn/TPD/Alq3/Mg/ Ag)等。 再以透光導電層502爲正極，金屬電極510爲負極， 施予適當的操作電壓，顯示出所需之發光的圖案或文字。 由上述本發明之較佳實施例可知，本發明提供一種固 定式圖文顯不之有機電激發光兀件的製作方法，與習知技 藝相比較，其具有下列的優點： 1.透光導電層不需要進行定型化(Pattern)步驟，因此 可以免除上光阻、曝光、顯影、蝕刻及去光阻等多項製作 程序所需的時間與成本。 I -------參------1T------φ, , . , "f,先間讀背而之注意事項再填ft''5本頁} 本紙张尺度適用中國國窣榡準（CNS )以叱彳Μ 210χ2ϋ；ΓΙ 經濟部中央標準局员工消費合作社印奴 406518 3 566twf.doc/006 五、發明说明（/> ) 2. 有機發光層或金屬電極亦不需要進行定型化步驟， 所以除了免除上光阻、曝光、顯影、蝕刻及去光阻等多項 製作程序之外，並且可避免這些程序對於發光材料螢光效 率的破壞以及表面潔淨度的影響’以得到良好發光效率的 有機電激發光元件。 3. 由於透光導電層或金屬電極定型化的製作程序’將 因電場的梯度分佈導致所顯示的圖案或文字亮度不均’進 而影響元件的顯示品質。此一現象於顯示高解析、低線寬 之圖案或文字時特別顯著。而以本發明之有機導電層定型 化程序而言’除了可以採用紫外光或電子束既有的快速、 高解析之標準製程外，其顯示圖文區域的電場及亮度分佈 亦會相當均勻。 4. 本發明之製作程序可以使用梯度光罩（Gradient Mask) 或者曝光時間來控制對有機導電性薄膜的總曝光量’刻意 製作出具有亮度漸層效果、明亮差異的顯示圖案。 5. 除了可以使用既有的紫外光或電子束之標準製程來 進行定型化程序外，也可應用電腦控制掃瞄之雷射，可以 更快速且輕易地製作出任意的顯示圖案、文字，而且可以 製作出由透光導電層或金屬電極定型化製程所無法顯示的 封閉圖形或文字。與噴墨印表機製程相比較，本發明的製 作程序更加簡便、有彈性。 6. 本發明之製作程序對於使用溶液塗佈製程的高分子 有機電激發光元件與使用蒸鍍製程的小分子有機電激發光 元件皆適用。I re-binding binding line 406518 3 566twf.doc / 006 A7 H7 V. Description of the invention ("Proposed shortcomings of the giant production method for printed items of the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 1) Cathode separation column Pioneer; Princeton Univ. A. The technical requirements are high and the manufacturing process is complicated. Although dynamic display elements can be produced, the cost required for producing fixed graphic displays is too high. B. Not suitable for polymer elements coated with solution. 2 Indium tin oxide Glass sizing a. The styling of indium tin oxide glass requires a number of manufacturing procedures such as photoresist, exposure, development, etching, and photoresist removal. B. This display process will be caused by the gradient of the electric field when the resolution is high and the line width is low. The distribution results in uneven brightness of the displayed graphics. 3 Styling of the light-emitting layer HP & Rochester Univ. A. Sizing of the material of the light-emitting layer requires a number of procedures such as photoresist, exposure, development, etching, and photoresist removal. B These procedures will reduce the fluorescent efficiency of the material and affect the cleanliness of its surface, so it will not be possible to obtain a good efficient luminescence. 4 Photoresist to metal DG Lidzy et_ al. (Sheffield Univ.) A. The sizing of metal electrodes requires a number of procedures such as photoresist, exposure, development, etching, and photoresist removal. B. These procedures will reduce the fluorescence of the material. Efficiency, which affects the cleanliness of the surface, so it is not possible to obtain a light-emitting element with good efficiency. C. When the display process is at high resolution and low line width, the brightness of the displayed text will be uneven due to the gradient distribution of the electric field. Molding of the mask to the metal electrode a. This display process is quite simple, but it is limited by the metal mask, so the resolution of the electric field gradient will increase when the resolution is higher than {° 0 b. T. 6 Inkjet printing Watch Yang Yang (UCLA) a. This can save the consumption of many commercial molecules, can make any display pattern, text, and can be applied to full-color display elements. B. This is a new process, in the application There are still many problems to be overcome such as the transmission of indium tin oxide glass, the use of solvents, and the blockage of the inkjet head. --- \ ------ 装 丨 " --- ^ --- Order ----- -Line (" note before reading (Write this page) This paper size applies the Chinese National Standard (CNS) Λ4 said (210X297) 406518 3 5 66twf.doc / 006 H7 V. Description of the invention (χ) In order to make the above and other purposes, features, The advantages and advantages can be more obvious and easy to understand. The following is a detailed description of a preferred embodiment in conjunction with the accompanying drawings. The brief description of the drawings is as follows: Figures 1A to 1C show a conventional method of separating by the cathode. Fabrication flow chart of fabrication of organic electroluminescent display elements by pillars. FIG. 2A to FIG. 2F show a conventional manufacturing flow chart for forming an organic electroluminescent display element by patterning a metal electrode using a photoresist-exposure program. FIG. 3A to FIG. 3C show a conventional manufacturing flow chart of an organic electro-mechanical excitation light display element that shapes a light-emitting layer. FIG. 4 is a cross-sectional view showing a structure of a conventional organic electroluminescent display element having a shaped light-emitting layer. Figures 5A to 5E show a manufacturing flow chart of an organic electro-optical light-emitting element applied to a fixed display pattern and text according to a preferred embodiment of the present invention. Explanation of the marks on the drawings: 100, 200, 400, 500: The glass substrate is printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Libraries ^ (" Read the precautions below and fill in this page first) 102, 202, 300, 402 : Indium tin oxide layer 104: Cathode separation pillars 106, 204, 508: Organic light-emitting layers 108, 214, 408, 510: Metal electrode 206: Photoresist layer 206a: Stylized photoresist layer CNS) grid (210X297): Bismuth Printing Co., Ltd. of the Central Standards Bureau of the Ministry of Economic Affairs 406518 3 566twf.doc / 006 A7 B7 V. Description of the invention (?) 208, 306, 506: Mask 210: Open 212: Metal Layer 302: Polyparaphenylene ethylene layer 302a: Stylized polyparaphenylene ethylene layer 304: Polybutadiene and polystyrene blended layer 304a: Stylized polybutadiene and polystyrene blended layer 404 : Shaped organic electro-excitation light layer 406: Electron transfer layer 502: Light-transmitting conductive layer • 504: Organic conductive layer 504a: Shaped organic conductive layer For examples, please refer to FIGS. 5A to 5E, which are shown in FIG. According to a preferred embodiment of the present invention, a fixed display pattern is applied. The text element Fabrication of organic electroluminescent light flowchart. As shown in FIG. 5A, a transparent conductive glass substrate is first provided. The structure is composed of a glass substrate 500 and a Transparent Conductive Layer (TCL) 502. The transparent conductive layer 502 is, for example, an indium tin oxide layer. (IT0). Surface cleaning is performed on the substrate to facilitate subsequent processes. Next, referring to FIG. 5B, an organic conductive layer 504 is formed on the surface of the light-transmitting conductive layer 502. The method of forming the organic conductive layer 504 is, for example, a spin coating method, and the organic conductive layer 504 is made of an organic conductive material, such as polyacetylene (PA), polyaniline (PAn), poly (" Note for Sun Sun, ¾ page), \ s ° This paper size is applicable to China National Standards (CNS) (210X297 公 #) Printed by the Central Bureau of Standards and Consumers ’Cooperatives 406518 3 566twf.doc / 006 A 7 ___ Η 7____ V. Description of the Invention (/.) Polythiophene (PT), Poly (Phenylene Vinylene) (PPV), Poly (Paraphenylene), PPP , PolytMophene Vmylene (PTV), Poly (Phenylene Sulfide), PPS, Poly (Phenylene Oxide, PP0) and its derivatives (Derivatives), Self-doping Derivatives (Self-Doping Derivatives) and copolymer derivatives (Copolymer Derivatives). In addition, the material of the organic conductive layer 504 can also be a blend composed of an organic conductive material and a conventional polymer material. Among them, traditional high-resolution materials such as polymethyl methacrylate (PMMA) '' Polyvinyl Alcohol (PVA), Polyethylene Oxide (PE), Polyethylene Terephthalate (PET), and Polyamine (PAA) Etc., and the blending ratio of traditional polymer materials is about 1% to 99%. Referring to FIG. 5C, the organic conductive thin film on the substrate is shaped, and a region for displaying a pattern or a character is formed in the organic conductive thin film, that is, a shaped organic conductive layer 504a is formed. The method of forming the shaped organic conductive layer 504a is, for example, using a photomask 506 to irradiate the organic conductive film with ultraviolet light or an electron beam in areas that do not need a light-emitting display pattern or text to perform an exposure process on the organic conductive film; or Computer-controlled lasers scan cats directly on areas of the organic conductive film that do not need to display patterns or text. The above method can be used to define the area in the organic conductive film for displaying patterns and characters. Next, please refer to Figure 5D. On the surface of the shaped organic conductive layer 504a, 12 paper scales are applicable to China National Standards (CNS) Λ4 * ^ (210x297 ^ Tf) * 11,-^ ------ install --- : --- Order ------ Line- and., (Please read the precautions beforehand Sun ^ write this page} Central Bureau of Standards, Ministry of Economic Affairs, Consumer Work Cooperatives, Innu 406518 3 566twf.cioc / 006 A? B7 ______ * __ ** * '........ --- 1--一-. · V. An organic light emitting layer 508 is formed on the description of the invention (M). The method includes a vapor deposition method, a spin coating method, and the like, and a material for forming the organic light emitting layer 508 is, for example, poly (2-methoxy, 5- (2'-ethylhexyloxy) -para-phenyl group having a thickness of about 1000 A. Ethylene) layer (Poly (2-Methoxy, 5- (2'-Ethylhexyloxy) -p-Phenylene-Vinylene, MEH-PPV)), or it is made of nitrogen, nitrogen bisphenyl-nitrogen, nitrogen'- (M-methylbenzene) benzidine (Team "-0 ^) 1 ^ 1 ^ 1-N, N '-(m-Tolyl) Benzidine (TPD)" and tri- (8-hydroxy) inscription with a thickness of about 500A (Tris- (8-Hydroxyquinoline) Aluminum, Alq3) is a superimposed layer. Nitrogen, nitrogen bisphenyl-nitrogen, nitrogen'- (M-methylbenzene) benzidine is the material of the hole transfer layer (not shown), and the hole transfer layer is coated on the surface of the shaped organic conductive layer 504a. Tri- (8-hydroxy) aluminum The organic electroluminescent material required in the organic light-emitting layer 508 is covered on the surface of the hole-transporting layer, and is superposed with the hole-transporting material to form the organic light-emitting layer 508. Then refer to FIG. 5E. On the surface of 508, a metal electrode 510 and a metal protective layer (not shown) are sequentially formed. A method for forming the metal electrode 510 and the metal protective layer is, for example, a vapor deposition method, and the material of the metal electrode 510 includes magnesium (Magnesium, Mg), with a thickness of about 1000 A. The material of the metal protective layer includes silver (Sliver, Ag), which has a thickness of about 1000 A. Therefore, the structure of this element is a light-transmitting conductive layer / typed organic conductive layer / organic light-emitting layer / Metal electrode layer / metal protective layer. The organic conductive layer can be composed of gastric conductive materials or a blend of organic conductive materials and traditional polymer materials, and the organic light-emitting layer can be made of poly (2- 甲 _ __ _ 「, J ^ | Order I line *--4-(诮 Please read the precautions below and fill in the 'page') Printed by the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 406518 3 566twf .d〇c / 006 A7, H7 V. Description of the invention (12) Oxygen, 5- (2'-ethylhexyloxy) -p-phenylethane storage layer, or nitrogen, nitrogen 'phenyl-nitrogen, nitrogen'-(m-methyl) Benzene) benzidine and tri- (8-hydroxy) aluminum laminated layer. Therefore, the material structure of the element can be composed of the above-mentioned organic conductive layer material and organic light-emitting layer material, such as a light-transmitting conductive layer / polyπ layer containing impurities / poly (2-methoxy, 5- (2'-B Hexyloxy) -paraphenylene vinyl) layer / magnesium metal electrode layer / silver metal protective layer (TCL / Doped PT / MEH-PPV / Mg / Ag), transparent conductive layer / polyaniline layer with impurities / poly (2-methoxy, 5- (2'-ethylhexyloxy) -p-phenylethylene) layer / magnesium metal electrode layer / silver metal protective layer (TCL / Doped PAn / MEH-PPV / Mg / Ag) 、 Light-transmitting conductive layer / Polyphenol layer containing impurities / Nitrogen, nitrogen-bisphenyl-nitrogen, nitrogen '-(m-methylphenyl) benzidine layer / tri- (8-hydroxy) aluminum layer / magnesium metal electrode layer / Silver metal protective layer (TCL / Doped PT / TPD / Alq3 / Mg / Ag) and light-transmitting conductive layer / Polyaniline layer containing impurities / Nitrogen, nitrogen bisphenyl-nitrogen, nitrogen '-(m-methylbenzene) ) Benzidine layer / tri- (8-hydroxy) aluminum layer / magnesium metal electrode layer / silver metal protective layer (TCL / Doped PAn / TPD / Alq3 / Mg / Ag), etc. The light-transmitting conductive layer 502 is used as a positive electrode, and the metal electrode 510 is used as a negative electrode. Appropriate operating voltage is applied to display a desired luminous pattern or text. As can be known from the above-mentioned preferred embodiments of the present invention, the present invention provides a method for manufacturing an organic electro-active light element with fixed graphic display, which has the following advantages compared with conventional techniques: 1. Light transmission and conductivity The layer does not need to be subjected to a patterning step, so the time and cost required for photoresist, exposure, development, etching, and photoresist removal can be eliminated. I ------- Refer to ----- 1T ------ φ,,., &Quot; f, read the precautions first, then fill in ft``5 pages} This paper Dimensions are applicable to China National Standards (CNS) to 210 210 × 2ϋ; ΓΙ Staff Consumption Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs, Innu 406518 3 566twf.doc / 006 5. Description of the invention (/ >) 2. Organic light-emitting layer or metal The electrode does not need to be shaped. Therefore, in addition to eliminating photoresist, exposure, development, etching, and photoresist, and other manufacturing procedures, these procedures can avoid the destruction of the fluorescent efficiency of the luminescent material and the cleanliness of the surface. Affect the organic electroluminescence light emitting element with good luminous efficiency. 3. Due to the manufacturing process of shaping the light-transmitting conductive layer or the metal electrode, the unevenness of the displayed pattern or text due to the gradient distribution of the electric field will affect the display quality of the device. This phenomenon is particularly noticeable when displaying high resolution, low line width patterns or text. In terms of the organic conductive layer sizing procedure of the present invention, in addition to the standard fast and high-resolution processes that are available with ultraviolet light or electron beams, the electric field and brightness distribution in the display area will also be fairly uniform. 4. The production program of the present invention can use a Gradient Mask or exposure time to control the total exposure of the organic conductive film ’to deliberately create a display pattern with a brightness gradient effect and a bright difference. 5. In addition to using the existing standard process of ultraviolet light or electron beam to perform the setting process, the computer-controlled scanning laser can also be used to make any display pattern and text faster and easier. Can produce closed graphics or text that cannot be displayed by the transparent conductive layer or metal electrode shaping process. Compared with the inkjet printing mechanism, the manufacturing process of the present invention is simpler and more flexible. 6. The manufacturing procedure of the present invention is applicable to both the polymer organic electroluminescent device using the solution coating process and the small molecule organic electroluminescent device using the evaporation process.
(S 本紙張尺度適用中國國家招:孪（CNS ) A4ML彳Μ 210X297公处） -------------裝一Γ^---1---訂------線 .-' - - » ' . 、 -·- (誚先閱讀背而之注意事項再"'寫本页) 406518 3566twf.doc/006 A 7 B7 五、發明説明（叫） 雖然本發明已以一較佳實施例揭露如上，然其並非用 以限定本發明，任何熟習此技藝者，在不脫離本發明之精 神和範圍內，當可作各種之更動與潤飾，因此本發朋之保 護範圍當視後附之申請專利範圍所界定者爲準。 丨，：--，--------裝一rl---------訂---,----線 '.-* (-先閲讀背而之注意事項#填艿本頁) 經濟部中央標準局貝工消费合作社印裝 / 6 本紙張尺度適用中國國家櫺準（CNS ) 枯（2〗Οχ297':.Μί )(S This paper size is applicable to China's national standard: Twin (CNS) A4ML 彳 Μ 210X297 public office) ------------- Install one ^^ --- 1 --- Order ---- --Line.- '--»'. 、-·-(诮 read the precautions before reading " 'write this page) 406518 3566twf.doc / 006 A 7 B7 V. Description of the invention (called) The invention has been disclosed as above with a preferred embodiment, but it is not intended to limit the present invention. Any person skilled in the art can make various modifications and retouches without departing from the spirit and scope of the present invention. The scope of protection shall be determined by the scope of the attached patent application.丨,:-, -------- install a rl --------- order ---, ---- line '.- * (-Read the back of the note # (Fill in this page) Printed by the Shellfish Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economics / 6 This paper size applies to China National Standards (CNS) withered (2 〖Οχ297 ':. Μί)