TW403674B - Vacuum discharged gas filter - Google Patents

Abstract

It is provided a vacuum exhaust gas filter which can effectively catch the harmful gas, mist and dust form substance discharged from the vacuum discharged gas system of a semiconductor process. The vacuum discharge gas filter consists of an aggregate of fiber containing a specified amount of ionic group. There is no need to use a harmful substance removing apparatus by using said filter, and further there is no need of maintenance of discharged gas system.

Description

403674 A7 __B7 V. Description of the invention (1) Lian Yebu. The use of ribs 18 The present invention is a vacuum exhaust material for semiconductor manufacturing processes. In particular, it is a bl · ·% air-conditioned process system printed by employees' cooperatives of the Central Bureau of Quarantine of the Ministry of Economic Affairs. »Quality Half-piece Collective Dust Catching Quick Grey Xunhe K 0 Smoke» Λ Material Filtering Gas Evacuation Empty Exhaust True germline smoke > Body gas. The production and arrangement of the harmful system is to remove the gas, and the empty space must be really in one place. ’There is a process-quality product in the form of a body. The dust guide is half-ash. It is boiled with fog or degreased, and the tree is replaced. The preparation equipment has a large release type, and the agent must be sucked. If the equipment is used at a slow speed, the trapping is set to be equal to the shortage. To this, the petrochemical equipment must be equipped with dust or fog. It ’s easy, the gas-receiving body is equipped with a gas plug, and the long-lived pipe is plugged and connected. The empty tube inside the connected analysis pump is really matched with the existing equipment. Under the action of the agent, the action is immediate, and the loss of the sweeping force is required to clear the pressure to increase the number of workers. During the analysis period, the preparation must be set up and the problem must be changed. The solution is necessary. The lack of control within the Mingli point of the state of affairs is matched with the decisive solution, the solution of the M dust, the gray material or the haze of the smoke, and the tobacco donor is lifted out of the kh. By the reduction of the system qi bh for easy maintenance, bh. The burden-bearing section of the catch load M is the one that has been used first. Those who use lessons to solve the problem before solving the problem can be analyzed. Keti 'hemuweiming's basic hair is sexually isolated. Hejia set is this sex and the son's degree Yangmi K's base 3 S sex C child g / quarter ο period 5 -fc ♦ species ο this ~ 1X ο ο Cheng 0. Dayou has a filter body, gas collection and collection, and is used by Weizheng. This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm)-Policy-Γ (Please read the back Please fill in this page again for your attention), ιτ 403674 A1 B7 V. Description of the invention (2) The body is shaped into a hollow cylinder, which can properly achieve the invention. The invention is detailed below. As long as the fluorene-containing ionic group has an ionic group in the range of 0.1 to 6.0 millimoles / g, there is no difference in manufacturing by any method, but K is suitable to use the following method. For the fiber containing dimensionality, the method described in Japanese Patent No. 11 45380 $ is better. That is, acrylic raw material minerals are fibers formed from AN-based polymers containing 50% by weight of acrylonitrile (hereinafter referred to as AN), and the form can be any type of short fibers, fiber bundles, and non-woven fabrics. The method for imparting anionic groups to the AN-based fibers is to use alkaline hydrolysis to convert the nitrile group (M is referred to as the CN group) (please read the precautions on the back before filling out this page). Printing ο, the reuse of materials should be 6.K'chemical 4 for the oxygen hard reaction. from. In the case of oxygen, liquid hydrogen hydrogen K Dajia Deng and other G degrees Ha hydrogen make the cellulosic solution to be added as a base. Concentrated K water This gold method is based on ian liquid gold, and the material is not profitable. Iag dissolves alkalinity, or, there are chemicals, Dr water oxygen, oxygen measuring parts, different temperature-soluble bases, and hydrogen and heavy hydrogen strips. One should be defined as the anti-fine gold per sulphur St oxygen gold compound. When using M and other widgets such as hydrogen donating hydrogen, P is divided by 80, and there are M gold, The topological substance is regarded as J Jishang, the basic time is right, and the palladium property is appropriate. The upper body of the dimension is treated with good temperature, and the outer fiber is more high, and the base is higher. Grams of oxygen. , Sex, etc. in the fruit yin carboxyl group. The crystallinity M of the good piece of hydrogen is known as the basic solution of the 10th place, and the 10th place is the proton after the water, the upper degree of gold, and the liquid are separated into the ear lye κ, which is soluble in the warm state. Ziyang becomes water-determined in the form of molybdenum. When the water content in milliliters of L1 water is contained, the test paper is calibrated in accordance with the Chinese National Standard (CNS) A4 (210X297 mm). 403674 A7 B7 V. Invention Instructions (3)

The method described in Grigoriu's Applied Zone Molecular Chemistry 200 (1992) 27-36 is appropriate. That is, AN-based fibers containing an AN50 weight S: M are treated with an amino-containing agent plus M to react with the CN group to give an amino group. Here, the bath conditions for the amination treatment are: H20 / CN-based molecular weight concentration ratio = 2/1, amine / CN-based = 5/1, processing temperature = 1081 :, processing time = 2 to 15 hours. There are fluorene, N-dimethyl-1,2-diaminoethane, N, N-dimethyl-1,3-diaminopropane, N, N-diethyl-1,3-diaminopropane Wait. The cationic group herein refers to those having ionizing cationic properties in an aqueous solvent, such as amino, secondary amino, tertiary amino, and quaternary amino. The content of dimensional groups of the fibers used in this loquat is generally 0.1 to 6.0 millimoles / gram, and Ml. 0 to 5.5 millimoles / gram is suitable. No effect was observed when the ionic group was at 0.1 millimoles / gK. When it exceeds 6.0 millimolars / g, the tensile strength of the fiber is weakened, and the workability of the filter and the like is significantly deteriorated. The density of the sterilized material is 0.01 ~ 0.50g / cra3, W0.02 ~ 0.40g / <: «13 is preferable, and 0.03 ~ 0.108 / 〇 姐 3 is more preferable. When the density is 0.01 g / cm3 or less, it is easily deformed with respect to pressure changes, and the capture function cannot be performed. When O Ws / cai3 is released, the air permeability deteriorates. Even if the catch is small, the pressure loss will increase ^ • The filter life will be extremely shortened (please read the precautions on the back before filling this page) Γ- * 1Τ The center of the Ministry of Economy The Bureau of Consumer Standards of the Bureau of Standards prints a shape higher than the shape of the product, and the capacity of the container is shaped into a straight or circular shape. Therefore, the emptiness refers to the time and the fixed product. . State machine 茼 Jiayi shape 漶 Circle is a super-empty 10-degree middle tube ~ Various product circle: 1 force capacity open air W1 pressure preparation W set the book to 0, alignment, type ~ 2 phase single It's 5 ~ big again. Based on 0. Compared with chemical material 1: phase-type filter is as small and as small as possible, the size of the paper is applicable to China National Standard (CNS) A4 specification (210 × 297 mm) 403674 A7 B7 V. Description of the invention (4) The state is a hollow cylindrical shape, such as a hundred-view skirt shape, and includes a hollow circular frustum shape as appropriate. There is no difference in the molding method of this sacrificial wood. For example, when using the aforementioned anionic fiber, 10 ~ 15 weight S! Water is given, and then it is placed in a hollow cylinder molder and blown with 60C hot air and M. dry. Other methods include, for example, a method of heat-shrinking and shrinking and knitting cotton, and then heating and fusing, and a method of rolling into a tube after the cloth or silk is not formed. The reason why the present invention can rapidly capture gas, smoke, and dusty bark substances is not fully understood, but it can be assumed as follows. That is to say, the gas in contact with the filter material is easy to attach to the gas due to the fuming or ashing of the JF sturdy body of 沣 # @ 低 和 雔 性 基 --------- The trapping efficiency of ash, soot, and dust-like substances varies depending on the type of the ionic group, and it can be seen that it has a lot to do with the electrical effect during trapping. (Please read the notes on the back before filling out this page.) This is not limited to Fan Mingfa's copy of this book, but Mingfa's copy of this book's example 明 Example. In the case of the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs, the rate of printing is forbidden. Efforts should be made to find out the basic properties of the key, the degree of separation, the strength, and the tensile strength constant to the basic dry carboxy dry gram \ ermo mg 5 ο yowei fiber test for the scale to add a filter, filter, time After three glass washings, M i, S clock. Separately wash 30 sets of water, release water, change liters of miscellaneous liquids, 70 miscellaneous liquids, dissolve liters of water, 50 nanoliters of oxygen and hydrogen, and the size of this paper applies the Chinese National Standard (CNS) A4 (210X297 mm) 40 and 74 A7 B7 V. Description of the invention (5) Tilling (Ym 1) of M0.1N hydrochloric acid solution until the color disappears by adding phenolphthalein to the filtrate, the following formula is obtained:

(0. 1 X 70) -0. 1Y carboxyl (mole / g) =-

X ⑵ tertiary atmosphere (millimoles / g) Dry to constant volume, finely weigh about 0.5 g (Xg) of test fiber, add 70 ml of 0.1N hydrochloric acid aqueous solution, leave it for 30 minutes, filter with glass filter, add about 50 ml of ion-exchanged water, washed with water. Repeat washing with water three times until the filtrate is colored with phenolphthalein. Titrate (ΥπΙ) with M0.1N sodium argon oxide aqueous solution, and find the following formula: (O.ix 70) -0.1Υ tertiary amino group (mmol / g ) =-

X (3) Pressure loss (c m H g) Connect a U-type flow pressure meter into which mercury is injected, before and after the filter, and determine the difference between the height of the mercury column after the filter and the degree before the filter. (4) Captured amount (g) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page) The difference between the weight of the wood material before use (Xg) and the weight of the filter material after use (Yg) Calculate:

Captured amount (g) = YX (5) Captured efficiency (ϋί) Using the known gas amount per unit time of the exhaust line, find the total amount of gas (Xg) relative to the captured amount during the extended use of the filter material (Ys). -7- This paper size is in accordance with Chinese National Standard (CNS) A4 specification (21 × 297 mm) 403674 at B7 V. Description of invention (6)

Y trapping efficiency (¾) = -X 100

X (6) Tensile strength (g / d) According to JIS L 1015 7.7 tensile strength 7.7.1 standard test method.窨 妩 Example 1 An anionic group-containing fiber was produced by the following method. An AN-based fiber containing 90% by weight of AN was subjected to alkaline hydrolysis treatment according to the conditions in Table 1. After the obtained fiber was subjected to acidification treatment with a pH 2.5 aqueous hydrochloric acid solution, it was dehydrated and dried to obtain physical properties, which are shown in Tables 1 to 5 of the reduced dimension. After being left in ammonia gas for 30 minutes, the Molar ratio of the carbaryl group and the acidic carboxyl group was adjusted to 1: 1, and this fiber was used to make a filter material. am · ^^^^ 1 ^^ — ^ 1 ^^^^ 1 ^^^^ 1 flm nn ^ n nn «^ l < .¾, -mouth (please read the precautions on the back before filling this page) '' The consumption standards of employees of the Central Bureau of Standards of the Ministry of Economic Affairs of Du printed paper are in accordance with Chinese National Standards (CNS) A4 (210X297 mm) 403674 A? B7 V. Description of Invention (7) Table 1 Fiber Ho. Hydrolytic Treatment (NaOH) Characteristics Value Concentration Adhesion Amount Temperature Time Tensile Strength (Base Weight); (Weight X) (V) (Minutes) (g / d) (inmol / g) 1 37 90 108 1 3.6 0.02 2 37 90 108 2 3.5 0.1 3 37 90 108 20 1.8 2.2 4 37 90 115 30 0.3 5.6 5 37 90 120 30 Cannot measure 6.4 (Please read the precautions on the back before filling out this page) The Central Consumers Bureau of the Ministry of Economy staff consumer cooperatives printed anionic base type The cast iron was prepared as follows. After opening the fiber containing the anionic group, the M card was opened with fiber, and then a weight of 10 to 15 was given by a mister. S: moisture, put in a hollow with an outer diameter of 180 mm and an inner diameter of 90 π m The cylindrical shaper was compressed to a height of 130 mm, and hot air was blown in at 60 °, and dried to obtain a molded body. The obtained cymbal was installed in a vacuum pump of a CVD process vacuum exhaust system manufactured by a semi-corporeal body, and then a gas, smoke and dust-like substance trapping experiment was performed until the cymbal loss during operation was 圼 30 cmHg. Table 2 shows the characteristic values and trapping results of the wood used. The CVD referred to here is an abbreviation for Chemical Vapor Deposition. This paper size applies to China National Standard (CNS) A4 (210X297 mm) Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 403674 V. Description of the invention (8) Examples of the present invention Examples of the present invention Examples of the present invention Examples of the present invention Example of the present invention Kite σι η- ω ω 〇〇4 ^-ω μ Fiber No. 05 Ο Ο ro to to ΓΟ cn ΓΟ 〇to to σ > to ^ Carboxyl (mraol / g) thin 0.70 cannot be processed '〇〇〇 〇〇〇Icn cn oooo CJ1 〇H- * Density (g / cm 3) 1: 0.7 H-1 »-» ►- * ♦-»Η- * 1-J oooooo · <! ~ ^ 0 -O shape (Diameter: height) 1 P oooot * 〇H- * · * · · OO 00 O Ca5 CO OO Pressure loss before test (cni-Hg) m 滟 IS Hk CO OO CO O〇00 0〇 < D tso 4a » .-^ 3 ro to capture amount (g) 1 〇〇〇Q 〇5 ·-* Co ΓΟ N5 OO Η- »Cf5 0〇0¾ capture efficiency α) 1 m 3 π Phan Xie 2 II 11 i I — Binding ^ (Please read the notes on the back ^ before filling out this page) This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 403674 A7 B7 V. Description of the invention (9) Collection efficiency For a carboxyl amount of 0.02 millimoles / g, which is about 5.6 millimoles / g, about 6 times, a significant effect of containing a carboxyl group can be seen. In the trapped state, dust-like substances were accumulated on the gas inlet side and the outlet side of the thin material surface. Even inside, there are many attachments on the gas inlet side and outlet side. It can be seen that when the gas passes through the filter medium, the gas is likely to be aerosolized or dusty.窨 Example 2 A secondary dimension containing a cationic group was prepared by the following method. Including AN90 weight! The O-series fibers of C were subjected to crosslinking treatment using hydrazone according to the conditions in Table 3, and then washed with water, and then treated with MN, N-dimethyl-1,3-diaminopropane. It was washed with water, dehydrated, and dried to obtain the physical properties of fibers No. 6 to No. 10 in Table 3. (Please read the notes on the back before filling out this page) The paper size printed by the Employees' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs applies the Chinese National Standard (CNS) Α4 specification (210 × 297 mm) 403674 A7 B7 V. Description of the invention (10 ) Consumption cooperation by employees of the Central Bureau of Standards of the Ministry of Economic Affairs ^ cd 〇〇-ν] ω 孅 Dimension No. Η-Λ ^ Η- »Η-1 · —» Ca? CO CO CO Concentration (weightϋ;) Delivery Coupling (combination) 102 102 102 102 102 Temperature (1C) N? GO GO CO 〇〇Ol CJ1 tn Φ 35 CO CO CJ1 C71 CJI ooooo Concentration (weight; t;) M r at = f = ^ Ϊ I. XJl rn CT " τη ja mmz: lirm 1 rrcs t— * CO 1 105 105 105 105 105 temperature (V) to ♦ —4 〇〇ooo ·. To — 9 m sn r = w φ moo o co tensile strength (g / d) 漭 05 0100 0 0 CO —0 CO i ^ ϊ. m -12- I, I 1 I _〆. Order (please read the note on the back before filling this page) This Paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 4〇3674 λ7 B7 V. Description of the invention (11) Cationic base type filter material is made as follows. 4 parts by weight of the fiber containing a cationic group and 1 part by weight of the fiber of Table 1 (fiber No. 3) containing an anionic group. After the fiber is uniformized by a K card machine, 10 to 15 weights are imparted with a mister. !! I ;, a molded body was prepared according to the method of Example 1. The trapping experiment of the obtained filter material was carried out in the same manner as in Example 1. The characteristic values and trapping results of the barnwood are shown in Table 4. — ^ 1 ^^^ 1 nn Kt .......... I .......—-! ^ 1. ^ 1 I—-----— HI—— 一 aJ (Please (Please read the notes on the back before filling this page).-Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs. 13- This paper applies the Chinese National Standard for Painting (CNS) A4 (210 X297 mm) 403674 A7 B7 5 Description of the invention (U) Printed comparative example bmm Comparative example Comparative example Comparative example Comparative example Comparative example Comparative example Comparative example Comparative example Comparative example Comparative example Comparative example Comparative method B55 Printed by the Central Bureau of Standards of the Ministry of Economy C55 ^ C5) 00 0D 00 CD 00 -si Fiber No. 0.04 0.04 6.3 0.04 CO OO Ca > CJl CO ο ^ ^ ^-* «4 ^ k Grade 3 amino (Caol / g) m 0.005 0.07 Cannot process 0.07 i 0.07 0.07 0.07 0.01 0.50 _0.55 . Density (g / cm3) 1: 0.7 1: 0.7 Thickness 45 coffee plate shape j 1: 0.7 1: 0.7 1: 0.7 1: 0.7 1: 0.7. 1: 0.7 '1 Shape (diameter: height) 〇 〇 〇 to I CO 〇oooo fO I— »· · · · 〇0-< 1 O CO OO CO Pressure loss before test (cm-Hg) Xiang CO 112 1 Ro ro co o -j σ > co co ro 〇 〇0〇〇 > o Capture (g) 1 1 s 1 to CO N5 CD C D OO < C CO 03 CO CO Os9 Capture efficiency (¾) mm Waterlogging to 1 ^ Special line 丨 Full line 翮 黼 Aiming to allow deformation after Hf ist test 1 _ -14- i /, -β (Please Please read the notes on the back before filling in this page) This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) A7 403674 B7 V. Description of the invention (13) The capture efficiency is 0.1 milliliter in the third level amino 83! K at Er / g, up to nearly 99S at full capture at 3.4 mmol / g M: result. ......... I 1 ^ 1---I-二 I 1 owe—1.1--I i ^ l I i H -3 、 1 · (Please read the notes on the back before filling in this Page), --- Also, the trapping state is that the dust surface has accumulated on the gas inlet side only on the gas inlet side, and the interior is concentrated on the gas inlet side. In addition, the gas inlet side surface was not observed to have attachments at 2 cm in the thickness direction, and it was found that the base material of the male-female type had particularly excellent trapping ability. Example 3 A masculine male group-containing fiber was prepared from M polyvinyl vinyl fibers, and a collection experiment was performed. Ammonia conditions were a 503: aqueous solution of MN, N-dimethyl-1,3-diaminopropane, and treated at 1021 × 24 hours. The obtained 缵 Μ IN sodium hydroxide aqueous solution was immersed for 30 minutes, and then washed with water, dehydrated and dried to obtain a fiber containing 2.1 millimoles of tertiary amino group. The obtained fiber was prepared in the same manner as in Example 2 to produce a filter material with a density of 0.07 g / CBi :, and a collection experiment was performed in the same manner as in Example 1. The collection efficiency 94 «includes the collection state, and its tendency is the same as that of the second embodiment. hh Example 1 The consumer cooperative of the Central Standards Bureau of the Ministry of Economic Affairs prints polyester hot-melt fibers that do not contain ionic groups. The M card is opened in male form. It is installed in the same molder as in Example 1. It is not hot air to be molded body. The obtained filter medium was subjected to a capture experiment in the same manner as in Example 1. The results are shown in Table 5. -15- This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 403674 V. Description of invention (A7 B7 Printed by the staff of the Central Bureau of Standards, Ministry of Economic Affairs, Du printed L0 擗 mV m Deformation after the test No No deformation without leakage and trapping efficiency (%) ... Yeah | trapping amount (g) 112 1 Pressure loss before test (cm-Hg) 〇LT5 CO CO • · CSJ · Ο Ο ο m shape (diameter: height ) 1: 0.7 1: 0.7 1: 0.7 Thickness 45mm Plate-like density (g / cm 3) 0.01 0.07 0.50 0.07 m Comparative example (poly, pigmented fiber) (Please read the precautions on the back before filling out this page) Paper dimensions Applicable to China National Standard (CNS) A4 specification (210X297mm) Μ 403674 B7 V. Description of the invention (15) The collection efficiency at density 0.07 g / cb 3 Μ is 1S; at Μ, it does not play the role of alder When the density is 0.50g / cm3, the collection efficiency is also as low as 4¾, which is obviously inferior to that of the filter material containing the male sex group. Moreover, the collection state is that "the surface of the material has only dust-like substances accumulated on the gas inlet side, and the interior Then, the entire body is approximately uniformly attached, and it is known that the trapping is physical. As mentioned above, the filter material of the present invention can be used as an exhaust material for a vacuum exhaust system for a semiconductor manufacturing method, without the need for a decontamination equipment, and the vacuum exhaust system can be shortened. In addition, the exhaust system does not need maintenance at all, which can save savings. Funding, improve operability. It can also avoid the hazardous work of directly processing hazardous substances 1! Ml!-1 ^ 1 ...... II -¾, vs (please read the precautions on the back before filling this page), ~ "The paper size printed by the Employees' Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs is compliant with the Chinese National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

3 ο I would like to ask if you would like to indicate whether the original substantive content will be changed after this It is superfluous * 1 11 Patent Application Announcement No. 84 1 0 1 5 6 1 "Vacuum Exhaust Filter Material" Patent Case (Amended on November 18, 88) Six patent application scopes: 1. A vacuum exhaust filter material for vacuum exhaust system of semiconductor process, which consists of 0.1 to 6.0 millimolars / gram of ionic-based fiber aggregates, and the density of the fiber aggregates is from 0.01 to 0.55 g / cm3. 2. For example, the filter material in the scope of patent application, wherein the ionic group is a cation group. 3. For the filter material in the scope of claims 1 or 2, the density of the fiber assembly is 0.001 to 0.50 g / cm3. 4. For the filter material in the scope of patent application item 1 or 2, the fiber assembly system forms a hollow cylindrical shape. (Please read the note on the back before filling in this page.) Order the paper size printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs to apply the Chinese National Standard (CNS) A4 specification (210X297 mm). Whether the original substantive content will be changed after this It is extravagant * 1 11 Patent application scope announced No. 84 1 0 1 5 6 1 "Vacuum Exhaust Filter Material" Patent Case (Amended on November 18, 88) Six patent application scopes: 1. A vacuum exhaust filter material for vacuum exhaust system of semiconductor process, which consists of 0.1 to 6.0 millimolars / gram of ionic-based fiber aggregates, and the density of the fiber aggregates is from 0.01 to 0.55 g / cm3. 2. For example, the filter material in the scope of patent application, wherein the ionic group is a cation group. 3. For the filter material in the scope of claims 1 or 2, the density of the fiber assembly is 0.001 to 0.50 g / cm3. 4. For the filter material in the scope of patent application item 1 or 2, the fiber assembly system forms a hollow cylindrical shape. (Please read the note on the back before filling in this page.) Order Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm)