TW403674B - Vacuum discharged gas filter - Google Patents
Vacuum discharged gas filter Download PDFInfo
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- TW403674B TW403674B TW084101561A TW84101561A TW403674B TW 403674 B TW403674 B TW 403674B TW 084101561 A TW084101561 A TW 084101561A TW 84101561 A TW84101561 A TW 84101561A TW 403674 B TW403674 B TW 403674B
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- filter material
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- vacuum exhaust
- fiber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/16—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres
- B01D39/1607—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres the material being fibrous
- B01D39/1623—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres the material being fibrous of synthetic origin
- B01D39/163—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres the material being fibrous of synthetic origin sintered or bonded
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
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- Chemical Kinetics & Catalysis (AREA)
- Filtering Materials (AREA)
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- Filtering Of Dispersed Particles In Gases (AREA)
- Treating Waste Gases (AREA)
Abstract
Description
403674 A7 __B7五、發明説明(1 )连業卜.的利用筋18本發明係闞於半導體製程用之真空排氣漶材。尤指一 經濟部中央橾準局員工消費合作社印製 氣 bl·· % 空 真 的 程 製 體。 »質 半物 集狀 捕塵 速灰 迅和 K 0 可煙 » Λ 材體 濾氣 氣的 排出 空排 真统 種系 煙 > 體 氣 的。 出備 排設 铳害 系除 氣有 排備 空必 真般 於一 由 , ’ 害 中有 程質 製物 體狀 導塵 半灰 在和 霧 沸害 或除 脂, 樹又 換。 交備 子設 離型 有大 , 有 劑須 著必 吸, 用慢 所度 備速 設集 害捕 除為 等點 此缺 來其 向 1 石 化必 塵備 灰設 或為 化點 霧缺 煙其 易, 容管 體配 氣塞 , 堵 長生 管發 配而 接, 連出 的析 泵内 空管 真配 與在 備而 設, 害能 除著 在吸 因存 又尚 。 在 降劑 下著 性吸 作使 操即 致, 以失 ’ 損 掃力 清壓 以加 加增 工出 停析 期內 定備 須設 劑 著 吸 換 更題 須課 必的 也決 , 解 態要 狀所 的明 力發 點内 缺管 述配 上在 決, 解化 Μ 塵 ’ 灰 材或 溏化 種霧 一 煙 供體 提氣 於的 在出 kh , 接 的使 目泵 之空 明真 發由 本藉 減 Μ 易 容 養 保 的 統 系 氣 bh 使 捉。 捕擔 材負 逋費段 Μ 經手 先的的 , 者題 前用課 出使決 析少解 的統 克系 \ 氣 耳排 萁空 毫真 ο程 1 體 ο導 有半 含的 用成 利製 可體 ’ 合 目維 明纖 發之 本基 述性 上子 離 . 合 佳集 為該 性且 子’ 離度 陽密 K 的 基 3 S 性 C 子g/ 季 ο 期 5 -fc♦ 種 ο 此 ~ 1X ο ο 成0. 達有 材具 濾體 氣合 排集 空維 真雄 用而 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) -策-- Γ (請先閲讀背面之注意事項再填寫本頁) ,ιτ 403674 A1 B7 五、發明説明(2 ) 體成型為中空圓筒狀,即可適當達成本發明。 玆詳述本發明如下。 含離子性基的缵維,只要含離子性基在0.1〜6.0毫莫 耳/克,Μ任何方法製造均無差別,惟K使用下述方法 為宜。 含維子性基的纖維,日本專11 45380$號記載方法 為佳。即丙烯酸系原料鑛維,係由含丙烯腈(Μ下稱AN) 50重量Μ上的AN系聚合物形成之纖維,其形態可為短 纖維、孅維束、不織布等不拘。對該AN系纖維賦予陰離 子性基之方法,可利用鹼性水解,將腈基(M下稱CN基) (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標隼局員工消費合作社印製 ο 、物重用供化性應再之 6.K'化 4 作的氧硬反。離。 在、氧用液維氫 K 大佳電等 G 度Ha氫使溶纖靨加加為有基., 濃有園 K 水該金法於件具 ian 液物金,物視鹼無利條中 iag 溶化鹼份化,或,有度劑、Dr 水氧,量氧件,異成溫溶基 日 物氫又重氫條造而達的性務el 化鼷。一鼷應構圍為上水磺St 氧金物每金反细範 ,Μ在如獻 氫用合維鹼等微件時 Ρ一 除例文 靨所混纖述間的條用80,有 Μ 金,其該上時物當作 J 基尚 , 鹼時及對,理合適下钯性,維 的上物係者處聚佳溫 Μ 子外纖 時以化,再或等較高,離基的 理克氧量。 ,性等在果陰羧基 。 處00氫理佳件晶度 Μ 效稱的性 基解10靨處為條结澹般理所質子 後水 \ 金之上度、液一處處性離 成此耳鹼液 Κ 溫態溶,的此子陽 變於莫等溶份的形水定度,離含 轉毫L1水量時試物規速者陰 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 403674 A7 B7 五、發明説明(3 )403674 A7 __B7 V. Description of the invention (1) Lian Yebu. The use of ribs 18 The present invention is a vacuum exhaust material for semiconductor manufacturing processes. In particular, it is a bl · ·% air-conditioned process system printed by employees' cooperatives of the Central Bureau of Quarantine of the Ministry of Economic Affairs. »Quality Half-piece Collective Dust Catching Quick Grey Xunhe K 0 Smoke» Λ Material Filtering Gas Evacuation Empty Exhaust True germline smoke > Body gas. The production and arrangement of the harmful system is to remove the gas, and the empty space must be really in one place. ’There is a process-quality product in the form of a body. The dust guide is half-ash. It is boiled with fog or degreased, and the tree is replaced. The preparation equipment has a large release type, and the agent must be sucked. If the equipment is used at a slow speed, the trapping is set to be equal to the shortage. To this, the petrochemical equipment must be equipped with dust or fog. It ’s easy, the gas-receiving body is equipped with a gas plug, and the long-lived pipe is plugged and connected. The empty tube inside the connected analysis pump is really matched with the existing equipment. Under the action of the agent, the action is immediate, and the loss of the sweeping force is required to clear the pressure to increase the number of workers. During the analysis period, the preparation must be set up and the problem must be changed. The solution is necessary. The lack of control within the Mingli point of the state of affairs is matched with the decisive solution, the solution of the M dust, the gray material or the haze of the smoke, and the tobacco donor is lifted out of the kh. By the reduction of the system qi bh for easy maintenance, bh. The burden-bearing section of the catch load M is the one that has been used first. Those who use lessons to solve the problem before solving the problem can be analyzed. Keti 'hemuweiming's basic hair is sexually isolated. Hejia set is this sex and the son's degree Yangmi K's base 3 S sex C child g / quarter ο period 5 -fc ♦ species ο this ~ 1X ο ο Cheng 0. Dayou has a filter body, gas collection and collection, and is used by Weizheng. This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm)-Policy-Γ (Please read the back Please fill in this page again for your attention), ιτ 403674 A1 B7 V. Description of the invention (2) The body is shaped into a hollow cylinder, which can properly achieve the invention. The invention is detailed below. As long as the fluorene-containing ionic group has an ionic group in the range of 0.1 to 6.0 millimoles / g, there is no difference in manufacturing by any method, but K is suitable to use the following method. For the fiber containing dimensionality, the method described in Japanese Patent No. 11 45380 $ is better. That is, acrylic raw material minerals are fibers formed from AN-based polymers containing 50% by weight of acrylonitrile (hereinafter referred to as AN), and the form can be any type of short fibers, fiber bundles, and non-woven fabrics. The method for imparting anionic groups to the AN-based fibers is to use alkaline hydrolysis to convert the nitrile group (M is referred to as the CN group) (please read the precautions on the back before filling out this page). Printing ο, the reuse of materials should be 6.K'chemical 4 for the oxygen hard reaction. from. In the case of oxygen, liquid hydrogen hydrogen K Dajia Deng and other G degrees Ha hydrogen make the cellulosic solution to be added as a base. Concentrated K water This gold method is based on ian liquid gold, and the material is not profitable. Iag dissolves alkalinity, or, there are chemicals, Dr water oxygen, oxygen measuring parts, different temperature-soluble bases, and hydrogen and heavy hydrogen strips. One should be defined as the anti-fine gold per sulphur St oxygen gold compound. When using M and other widgets such as hydrogen donating hydrogen, P is divided by 80, and there are M gold, The topological substance is regarded as J Jishang, the basic time is right, and the palladium property is appropriate. The upper body of the dimension is treated with good temperature, and the outer fiber is more high, and the base is higher. Grams of oxygen. , Sex, etc. in the fruit yin carboxyl group. The crystallinity M of the good piece of hydrogen is known as the basic solution of the 10th place, and the 10th place is the proton after the water, the upper degree of gold, and the liquid are separated into the ear lye κ, which is soluble in the warm state. Ziyang becomes water-determined in the form of molybdenum. When the water content in milliliters of L1 water is contained, the test paper is calibrated in accordance with the Chinese National Standard (CNS) A4 (210X297 mm). 403674 A7 B7 V. Invention Instructions (3)
Grigoriu的「應用區分子化學」200 (1992) 27-36所載 方法為宜。即對含AN50重量S: Μ上的AN系纖維,利用含 氨基的藥劑加Μ處理,與CN基反應而賦予氨基。此處氨 基化處理的浴條件是,H20/CN基克分子量濃度比= 2/1, 胺/ CN基= 5/1,處理溫度=1081:,處理時間=2〜15小時。 藥劑有Η,Ν-二甲基-1,2-二氨基乙烷、Ν,Ν-二甲基-1, 3-二氨基丙烷、Ν,Ν-二乙基-1,3-二氨基丙烷等。此處 所稱陽離子性基,指在水性溶劑中具有電離陽離子性質 者,例如氨基、次级氨基、三级氨基、四级氨基等。 該漶材所用纖維的維子性基含量,一般為0.1〜6.0毫 莫耳/克,Ml.0〜5.5毫莫耳/克為宜。離子性基在0.1 毫莫耳/克K下時,未見效果。超出6.0毫莫耳/克時, 纖維的抗張強度減弱,過漶器等的加工性顯著惡化。 該滅材的密度為0.01〜0.50g/cra3 , W0.02〜0.40g/ <:«13為佳,而以0.03~0.108/〇姐3更好。又,密度在 0.01g/cm3以下時,相對於壓力變化,容易變形,無法 發揮捕集功能。而琴出O Ws/cai3時,通氣性惡化·即 使捕集量少,壓力損失會加^ •使濾器壽命極為縮短 (請先閲讀背面之注意事項再填寫本頁) Γ- *1Τ 經濟部中央標準局員工消費合作社印製 比其狀積形 高與性容殻 \ 狀型備外 徑筒成設材 直圓或故 « ,空性,指 時中定積 , 此此安容狀 。 。態器茼 佳宜形漶圓 為為的過空 狀10化的中 筒 ~ 變積的 圓:1力容明 空W1壓備發 中W於設本 為0,對位 , 型~2相單又 成5~,大。 以0.較加化 材1:相可型 濾為狀且小 該般形 ,Μ 一 他良可 本紙張尺度適用中國國家標準(CNS ) Α4規格(210Χ297公釐) 403674 A7 B7五、發明説明(4 )態為中空圓筒狀,例如百景裙狀,視情況包含中空圓維 台狀的形態在内。 該漶材的成型以任何方法為之均無差別,例如使用前 述含有陰離子性的纖維時,賦予10〜15重量S!水份後, 放入中空圓筒成型器中,吹入60C熱風加Μ乾燥。其他 方法有例如將熱融缩維混綿後加熱融接之方法,於不继 布或絲成型後捲成筒狀物之方法。 作用本發明可迅速捕集氣體、煙霧和灰塵吠物質的原因, 雖未充分瞭解,惟大概可假設如下。即,與該濾材接觸的氣體,由於灃# @低和雔$性基 --------- 的JF沮 規體舍推行煙霧化或灰I化,客易附著於缴維 Ο氣體、煙耪和灰塵狀物質的捕集效率,因離子性基的 型態而異,可知與捕集時的電氣作用有很大闢係。 (請先閱讀背面之注意事項再填寫本頁) 實 等 此 於 限 不 圍 範 明 發 本 惟 明 發 本 明 說 例 豳 實Μ。 茲例 施 經濟部中央標準局員工消費合作社印製 率 效 ί 禁 捕 ' 量 集 捕 ' 失 損 。 力出 壓求 、 法 量方 含述 基下 性按 子 , 離度 ,強 又拉 抗 量 恒 到 基燥 羧乾 克 \ 耳 莫 毫 克 5 ο 約 維 纖 試 供 秤 精 加 添 過至 器 , 濾、次 過三 璃洗 玻水 Μ 複 i , s 鐘。 分洗 30水 置 , 放水 ,換 升交 毫子 70雜 液升 溶毫 水50 納約 化加 氧 , 氫漶 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 40 抑 74 A7 B7 五、發明説明(5 ) 濾液加酚酞會使呈色消失為止,M0.1N鹽酸水溶液滴定 (Ym 1 ),按下式求出:The method described in Grigoriu's Applied Zone Molecular Chemistry 200 (1992) 27-36 is appropriate. That is, AN-based fibers containing an AN50 weight S: M are treated with an amino-containing agent plus M to react with the CN group to give an amino group. Here, the bath conditions for the amination treatment are: H20 / CN-based molecular weight concentration ratio = 2/1, amine / CN-based = 5/1, processing temperature = 1081 :, processing time = 2 to 15 hours. There are fluorene, N-dimethyl-1,2-diaminoethane, N, N-dimethyl-1,3-diaminopropane, N, N-diethyl-1,3-diaminopropane Wait. The cationic group herein refers to those having ionizing cationic properties in an aqueous solvent, such as amino, secondary amino, tertiary amino, and quaternary amino. The content of dimensional groups of the fibers used in this loquat is generally 0.1 to 6.0 millimoles / gram, and Ml. 0 to 5.5 millimoles / gram is suitable. No effect was observed when the ionic group was at 0.1 millimoles / gK. When it exceeds 6.0 millimolars / g, the tensile strength of the fiber is weakened, and the workability of the filter and the like is significantly deteriorated. The density of the sterilized material is 0.01 ~ 0.50g / cra3, W0.02 ~ 0.40g / <: «13 is preferable, and 0.03 ~ 0.108 / 〇 姐 3 is more preferable. When the density is 0.01 g / cm3 or less, it is easily deformed with respect to pressure changes, and the capture function cannot be performed. When O Ws / cai3 is released, the air permeability deteriorates. Even if the catch is small, the pressure loss will increase ^ • The filter life will be extremely shortened (please read the precautions on the back before filling this page) Γ- * 1Τ The center of the Ministry of Economy The Bureau of Consumer Standards of the Bureau of Standards prints a shape higher than the shape of the product, and the capacity of the container is shaped into a straight or circular shape. Therefore, the emptiness refers to the time and the fixed product. . State machine 茼 Jiayi shape 漶 Circle is a super-empty 10-degree middle tube ~ Various product circle: 1 force capacity open air W1 pressure preparation W set the book to 0, alignment, type ~ 2 phase single It's 5 ~ big again. Based on 0. Compared with chemical material 1: phase-type filter is as small and as small as possible, the size of the paper is applicable to China National Standard (CNS) A4 specification (210 × 297 mm) 403674 A7 B7 V. Description of the invention (4) The state is a hollow cylindrical shape, such as a hundred-view skirt shape, and includes a hollow circular frustum shape as appropriate. There is no difference in the molding method of this sacrificial wood. For example, when using the aforementioned anionic fiber, 10 ~ 15 weight S! Water is given, and then it is placed in a hollow cylinder molder and blown with 60C hot air and M. dry. Other methods include, for example, a method of heat-shrinking and shrinking and knitting cotton, and then heating and fusing, and a method of rolling into a tube after the cloth or silk is not formed. The reason why the present invention can rapidly capture gas, smoke, and dusty bark substances is not fully understood, but it can be assumed as follows. That is to say, the gas in contact with the filter material is easy to attach to the gas due to the fuming or ashing of the JF sturdy body of 沣 # @ 低 和 雔 性 基 --------- The trapping efficiency of ash, soot, and dust-like substances varies depending on the type of the ionic group, and it can be seen that it has a lot to do with the electrical effect during trapping. (Please read the notes on the back before filling out this page.) This is not limited to Fan Mingfa's copy of this book, but Mingfa's copy of this book's example 明 Example. In the case of the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs, the rate of printing is forbidden. Efforts should be made to find out the basic properties of the key, the degree of separation, the strength, and the tensile strength constant to the basic dry carboxy dry gram \ ermo mg 5 ο yowei fiber test for the scale to add a filter, filter, time After three glass washings, M i, S clock. Separately wash 30 sets of water, release water, change liters of miscellaneous liquids, 70 miscellaneous liquids, dissolve liters of water, 50 nanoliters of oxygen and hydrogen, and the size of this paper applies the Chinese National Standard (CNS) A4 (210X297 mm) 40 and 74 A7 B7 V. Description of the invention (5) Tilling (Ym 1) of M0.1N hydrochloric acid solution until the color disappears by adding phenolphthalein to the filtrate, the following formula is obtained:
(0. 1 X 70)-0 . 1Y 羧基(毫莫耳/克)=-(0. 1 X 70) -0. 1Y carboxyl (mole / g) =-
X ⑵三级氛基(毫莫耳/克) 乾煉到恒量,精秤供試纖維約0.5克 (Xg),添加0.1N 鹽酸水溶液70毫升,放置30分鐘,以玻璃過濾器過濾,加 約50毫升離子交換水,水洗。重複水洗三次,直至濾液 加酚酞會使呈色為止,M0.1N氬氧化納水溶液滴定(ΥπΙ) ,按下式求出: (O.ix 70)-0.1Υ 三级氨基(毫莫耳/克)=-X ⑵ tertiary atmosphere (millimoles / g) Dry to constant volume, finely weigh about 0.5 g (Xg) of test fiber, add 70 ml of 0.1N hydrochloric acid aqueous solution, leave it for 30 minutes, filter with glass filter, add about 50 ml of ion-exchanged water, washed with water. Repeat washing with water three times until the filtrate is colored with phenolphthalein. Titrate (ΥπΙ) with M0.1N sodium argon oxide aqueous solution, and find the following formula: (O.ix 70) -0.1Υ tertiary amino group (mmol / g ) =-
X (3) 壓力損失(c m H g ) 將注入水銀的U型流壓計,接在過漶器前後,求出過 濾器後的水銀柱高減漶材前的髙度之相差值。 (4) 捕集量(g ) 經濟部中央標準局員工消費合作社印製 (請先閱讀背面之注意事項再填寫本頁) 由使用前漶材重量(Xg)和使用後濾材重量(Yg)相差算 出:X (3) Pressure loss (c m H g) Connect a U-type flow pressure meter into which mercury is injected, before and after the filter, and determine the difference between the height of the mercury column after the filter and the degree before the filter. (4) Captured amount (g) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page) The difference between the weight of the wood material before use (Xg) and the weight of the filter material after use (Yg) Calculate:
捕集量(g) = Y-X (5) 捕集效率(ϋί) 由使用排氣管線每單位時間的已知氣體量,求出濾材 使用延長時間當中的總氣體量(Xg)相對之捕集量(Ys)。 -7- 本紙張尺度適用中國國家標準(CNS ) A4規格(21〇X297公釐) 403674 at B7 五、發明説明(6 )Captured amount (g) = YX (5) Captured efficiency (ϋί) Using the known gas amount per unit time of the exhaust line, find the total amount of gas (Xg) relative to the captured amount during the extended use of the filter material (Ys). -7- This paper size is in accordance with Chinese National Standard (CNS) A4 specification (21 × 297 mm) 403674 at B7 V. Description of invention (6)
Y 捕集效率(¾) = -X 100Y trapping efficiency (¾) = -X 100
X (6)抗拉強度(g / d ) 按照JIS L 1015 7.7抗拉強度7.7.1標準試驗法。 窨嫵例1 含陰離子性基的纖維,Μ下述方法製成。 含ΑΝ90重量%的AN系纖維,按表1條件進行鹼性水解 處理。所得纖維MpH2.5鹽酸水溶液進行酸性化處理後 ,經脫水、乾燥,得物性併記於表1的缩維1至5號。 再於氨氣中放置30分鐘,調整狩淨基和酸型羧基的 莫耳比為1:1 ,此纖維用來製作濾材。 am· ^^^^1 ^^—^1 ^^^^1 ^^^^1 flm n n^n nn« ^ l< .¾ 、-口 (請先閲讀背面之注意事項再填寫本頁) ' 經濟部中央標準局員工消費合作杜印製 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 403674 A? B7 五、發明説明(7 ) 表1 纖維 Ho. 水解處理(NaOH) 特 性值 濃度 附著量 溫度 時間 抗拉強度 菝基 (重量ϋ;) (重量X ) (V) (分) (g/d) (inmol/g) 1 37 90 108 1 3.6 0.02 2 37 90 108 2 3.5 0.1 3 37 90 108 20 1.8 2.2 4 37 90 115 30 0.3 5.6 5 37 90 120 30 測定不出 6.4 (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印裝 陰離子性基型瀘材按下述方法製成。 將含有陰離子性基的該織維,Μ梳理機開纖後,用嗔 霧器賦予1 0〜1 5重量S:水份,放人外徑1 8 0 m m ,内徑9 0 π m 的中空圓筒成型器中,壓縮到高度為130mm,就此吹入 6〇·〇熱風,加以乾烽而得成型體。 所得該滹材,安裝於半専體製造的CVD製程真空排氣 系統的真空泵後,進行氣體、煙霧和灰塵狀物質的捕集 實驗,到操作時的溥材前後損力損失圼30cmHg為止。所 用該漶材特性值和捕集結果,如表2所示。此處所稱CVD 為化學蒸著(Chemical Vapor Deposition)之簡稱。 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 經濟部中央標準局員工消費合作社印製 403674 五、發明説明(8 ) 本發明例 本發明例 本發明例 本發明例 本發明例 本發明例 鸢 σι η- ω ω 〇〇 4^- ω μ 纖維 No. 05 Ο Ο ro to to ΓΟ cn ΓΟ 〇 to to to σ> to ^ 羧基 (mraol/g) 薄 0.70 無法加工 '〇〇〇〇〇〇 Icn cn o o o o CJ1 〇 H-* 密度 (g/cm 3 ) 1:0.7 H-1 »-» ►-* ♦-» Η-* 1-J o o o o o o ·<! ~^0 -O 形狀 (直徑:高度) 1 P o o o o t*〇 H-* · * · · OO 00 O Ca5 CO OO 試驗前壓力損失 (cni-Hg) m 滟 IS H-k CO OO CO O〇 00 0〇 <D tso 4a». -^3 ro to 捕集量 (g) 1 〇〇 〇Q 〇5 ·-* Co ΓΟ N5 OO Η-» Cf5 0〇 0¾ 捕集效率 α) 1 m 3 π 嫌潘 谢2 I I 11 i I — 裝 訂 ^ (請先閲讀背面之注意事^再填寫本頁) 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 403674 A7 B7 五、發明説明(9 ) 捕集效率相對於羧基量0.02毫莫耳/克,為5.6毫莫 耳/克,大約6倍,可見含羧基的明顯效果。又,捕集 狀態是在薄材表面的氣體進口側、出口側,均有灰塵狀 物質積集。即使内部,在氣體進口側和出口側也有許多 附著物,可知氣體通過該濾材時,氣體容易煙霧化或灰 塵化。 窨搁例2 含陽離子性基的繼維,按以下方法製成。即含AN90重 量!C的Ο系纖維,按表3條件,利用水合胼進行交聯處 理後,水洗,ΜΝ,Ν -二甲基-1,3 -二氨基丙烷加以氨化 處理。再水洗、脫水、乾燥,得物性併記於表3的纖維 6至10號。 (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS ) Α4規格(210Χ 297公釐) 403674 A7 B7 五、發明説明(10 ) 經濟部中央標隼局員工消費合作杜印製 ^ cd 〇〇 -ν] ω 孅維 No. Η-Λ ^ Η-» Η-1 ·—» Ca? CO CO CO 濃度 (重量ϋ;) 交聯處理 (合阱) 102 102 102 102 102 溫度 (1C ) N? GO GO CO 〇 〇 Ol CJ1 tn Φ 35 CO CO CJ1 C71 CJI o o o o o 濃度 (重量;t;) M r at =f= ^ Ϊ I.; XJl rn CT" τη ja m m z: lirm 1 rrcs t—* CO 1 105 105 105 105 105 溫度 (V ) to ♦—4 〇 〇 o o o · . to — 9 m sn r=w φ m o o 一办办 ro co o co 抗拉強度 (g/d) 漭 05 0100 0 0 CO —0 CO i ^ ϊ. m -12- I, I 1 I _〆 . 訂 (請先閲讀背面之注項再填寫本頁) 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 4〇3674 λ7 B7 五、發明説明(11 ) 陽離子性基型濾材按下述方法製作。 含陽雔子性基的該纖維4重量份,與含陰離子性基的 表1 (纖維3號)該纖維1重量份,K梳理機開纖均勻化 後,用嗔霧器賦予10〜15重量!I;,按實施例1方法製成 成型體。 所得該濾材的捕集實驗,Μ實施例1同法進行,滹材 的特性值及捕集结果如表4所示。 —^1 ^^^1 nn Kt .......... I.......— - ! ^1.^1 I—- - - - - — HI—— 一aJ (請先閱讀背面之注意事項再填寫本頁) . - 經濟部中央標準局員工消費合作社印製 -13- 本紙張尺度適用中画國家標準(CNS ) A4洗格(210 X297公釐) 403674 A7 B7 五、發明説明(U ) 經濟部中央標隼局員工消費合作社印製 比較例 bmm 比較例 比較例 本發明例 本發明例 本發明例 本發明例 本發明例 本發明例 C55 ^ C5) 00 0D 00 CD 00 -si 纖維 No. 0.04 0.04 6.3 0.04 CO OO Ca> CJl CO ο ^ ^ ^ -*«4 ^ k 3级氨基 (咖ol/g) m 0.005 0.07 無法加工 0.07 i 0.07 0.07 0.07 0.01 0.50 _0.55 . ! 密度 (g/cm3 ) 1:0.7 1:0.7 厚度45咖平板狀 j 1:0.7 1:0.7 1:0.7 1:0.7 1:0.7 . 1:0.7 ' 1 形狀 (直徑:高度) Ο Ο 〇 to I CO 〇 o o o o fO I—» · · · · 〇0 -<1 O CO OO CO 試驗前壓力損失 (cm-Hg) 湘 CO 112 1 一会 ro ro co o -j σ> co co ro 〇〇 0〇 〇> o 捕集量 (g) 1 1 s 1 to CO N5 CD CD OO <C CO 03 CO CO Os9 捕集效率 (¾) m m 涝 涝 到 1 ^專 涟丨满涟 翮 黼 瞄 雔 许 Hf ist 試驗後的變形 1 _ -14- i / ,-β (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) A7 403674 B7 五、發明説明(13 ) 得捕集效率在三级氨基量為0.1毫萁耳/克時為83!K, 3.4毫莫耳/克Μ上時高達接近完全捕集的99S:结果。 .........I 1^1 - - - I -二 I 1 士欠 —1.1 - - I i^l I i H -3 、1· (請先閱讀背面之注意事項再填寫本頁) ,-- 又,捕集狀態是瀘材表面只在氣體進口側有灰塵狀物質 積集,内部則集中附著在氣體進口側。再者,氣體進口 側表面在厚度方向2公分Μ下看不出有附著物,可知陽 雛子性基型的逋材有特別優異的捕集能力。 啻餱例3 再Μ聚氛乙烯系纖維製作含陽雄子性基的纖維,進行; 捕集實驗。氨化條件是ΜΝ,Ν -二甲基-1,3 -二氨基丙烷 的503:水溶液,進行1021X24小時處理。所得缵維Μ IN氫氧化納水溶液浸泡30分鐘後,水洗、脫水、乾煉, 得含三级氨基2.1毫莫耳的纖維。 所得該纖維按實施例2同樣方法,製作密度0.07g/CBi: 的濾材,依實施例1同樣方法進行捕集實驗。 捕集效率94« ,包含捕集狀態,其傾向與實施例2相 同。 hh齩例1 經濟部中央標準局員工消費合作社印聚 不含離子性基的聚酯熱融纖維,Μ梳理機開雄,和實 施例1同樣裝入成型器,吹人not:熱風,得成型體。 所得濾材按實施例1同樣進行捕集實驗,其结果如表 5所示。 -15- 本紙張尺度適用中國國家標準(CNS ) A4規格(210 X 297公釐) 403674 五、發明説明( A7 B7 經濟部中央標準局員工消費合作杜印製 L0擗 mV m 試驗後的變形 無 無 無 變形而洩漏發生 捕集效率 (%) 。。呀 | 捕集量 (g) 112 1 試驗前壓力損失 (cm-Hg) 〇 LT5 CO CO • · CSJ · Ο Ο ο m 形狀 (直徑:高度) 1:0.7 1:0.7 1:0.7 厚度45mm平板狀 密度 (g/cm 3) 0.01 0.07 0.50 0.07 m 比較例(聚,顏纖維) (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) Μ 403674 Β7 五、發明説明(15 ) 密度0 . 0 7 g / c b 3 Μ下的捕集效率在1S; Μ下,未發揮漶 材功能。密度0.50g/cm3時,捕集效率也低到4¾,明顯 較含有雄子性基的濾材為劣。又,其捕集狀態是在《材 表面只有氣體進口側有灰塵狀物質積集,内部則全體大 約均匀附著,可知其捕集為物理性。 發明放果 如上所述,本發明濾材可用做半導體製法用真空排氣 系统的排氣漶材,不需除害設備,可縮短真空排氣系統; 配管長度。此外,排氣系统完全不必保養,可節省經費 ,提高操作性。又可遊免直接處理有害物質的危險作業 1! ml ! - 1^1 ...... I I -¾ 、vs (請先閱讀背面之注意事項再填寫本頁) ,~ “ 經濟部中央標準局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS ) A4規格(210 X 297公釐)X (6) Tensile strength (g / d) According to JIS L 1015 7.7 tensile strength 7.7.1 standard test method.窨 妩 Example 1 An anionic group-containing fiber was produced by the following method. An AN-based fiber containing 90% by weight of AN was subjected to alkaline hydrolysis treatment according to the conditions in Table 1. After the obtained fiber was subjected to acidification treatment with a pH 2.5 aqueous hydrochloric acid solution, it was dehydrated and dried to obtain physical properties, which are shown in Tables 1 to 5 of the reduced dimension. After being left in ammonia gas for 30 minutes, the Molar ratio of the carbaryl group and the acidic carboxyl group was adjusted to 1: 1, and this fiber was used to make a filter material. am · ^^^^ 1 ^^ — ^ 1 ^^^^ 1 ^^^^ 1 flm nn ^ n nn «^ l < .¾, -mouth (please read the precautions on the back before filling this page) '' The consumption standards of employees of the Central Bureau of Standards of the Ministry of Economic Affairs of Du printed paper are in accordance with Chinese National Standards (CNS) A4 (210X297 mm) 403674 A? B7 V. Description of Invention (7) Table 1 Fiber Ho. Hydrolytic Treatment (NaOH) Characteristics Value Concentration Adhesion Amount Temperature Time Tensile Strength (Base Weight); (Weight X) (V) (Minutes) (g / d) (inmol / g) 1 37 90 108 1 3.6 0.02 2 37 90 108 2 3.5 0.1 3 37 90 108 20 1.8 2.2 4 37 90 115 30 0.3 5.6 5 37 90 120 30 Cannot measure 6.4 (Please read the precautions on the back before filling out this page) The Central Consumers Bureau of the Ministry of Economy staff consumer cooperatives printed anionic base type The cast iron was prepared as follows. After opening the fiber containing the anionic group, the M card was opened with fiber, and then a weight of 10 to 15 was given by a mister. S: moisture, put in a hollow with an outer diameter of 180 mm and an inner diameter of 90 π m The cylindrical shaper was compressed to a height of 130 mm, and hot air was blown in at 60 °, and dried to obtain a molded body. The obtained cymbal was installed in a vacuum pump of a CVD process vacuum exhaust system manufactured by a semi-corporeal body, and then a gas, smoke and dust-like substance trapping experiment was performed until the cymbal loss during operation was 圼 30 cmHg. Table 2 shows the characteristic values and trapping results of the wood used. The CVD referred to here is an abbreviation for Chemical Vapor Deposition. This paper size applies to China National Standard (CNS) A4 (210X297 mm) Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 403674 V. Description of the invention (8) Examples of the present invention Examples of the present invention Examples of the present invention Examples of the present invention Example of the present invention Kite σι η- ω ω 〇〇4 ^-ω μ Fiber No. 05 Ο Ο ro to to ΓΟ cn ΓΟ 〇to to σ > to ^ Carboxyl (mraol / g) thin 0.70 cannot be processed '〇〇〇 〇〇〇Icn cn oooo CJ1 〇H- * Density (g / cm 3) 1: 0.7 H-1 »-» ►- * ♦-»Η- * 1-J oooooo · <! ~ ^ 0 -O shape (Diameter: height) 1 P oooot * 〇H- * · * · · OO 00 O Ca5 CO OO Pressure loss before test (cni-Hg) m 滟 IS Hk CO OO CO O〇00 0〇 < D tso 4a » .-^ 3 ro to capture amount (g) 1 〇〇〇Q 〇5 ·-* Co ΓΟ N5 OO Η- »Cf5 0〇0¾ capture efficiency α) 1 m 3 π Phan Xie 2 II 11 i I — Binding ^ (Please read the notes on the back ^ before filling out this page) This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 403674 A7 B7 V. Description of the invention (9) Collection efficiency For a carboxyl amount of 0.02 millimoles / g, which is about 5.6 millimoles / g, about 6 times, a significant effect of containing a carboxyl group can be seen. In the trapped state, dust-like substances were accumulated on the gas inlet side and the outlet side of the thin material surface. Even inside, there are many attachments on the gas inlet side and outlet side. It can be seen that when the gas passes through the filter medium, the gas is likely to be aerosolized or dusty.窨 Example 2 A secondary dimension containing a cationic group was prepared by the following method. Including AN90 weight! The O-series fibers of C were subjected to crosslinking treatment using hydrazone according to the conditions in Table 3, and then washed with water, and then treated with MN, N-dimethyl-1,3-diaminopropane. It was washed with water, dehydrated, and dried to obtain the physical properties of fibers No. 6 to No. 10 in Table 3. (Please read the notes on the back before filling out this page) The paper size printed by the Employees' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs applies the Chinese National Standard (CNS) Α4 specification (210 × 297 mm) 403674 A7 B7 V. Description of the invention (10 ) Consumption cooperation by employees of the Central Bureau of Standards of the Ministry of Economic Affairs ^ cd 〇〇-ν] ω 孅 Dimension No. Η-Λ ^ Η- »Η-1 · —» Ca? CO CO CO Concentration (weightϋ;) Delivery Coupling (combination) 102 102 102 102 102 Temperature (1C) N? GO GO CO 〇〇Ol CJ1 tn Φ 35 CO CO CJ1 C71 CJI ooooo Concentration (weight; t;) M r at = f = ^ Ϊ I. XJl rn CT " τη ja mmz: lirm 1 rrcs t— * CO 1 105 105 105 105 105 temperature (V) to ♦ —4 〇〇ooo ·. To — 9 m sn r = w φ moo o co tensile strength (g / d) 漭 05 0100 0 0 CO —0 CO i ^ ϊ. m -12- I, I 1 I _〆. Order (please read the note on the back before filling this page) This Paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 4〇3674 λ7 B7 V. Description of the invention (11) Cationic base type filter material is made as follows. 4 parts by weight of the fiber containing a cationic group and 1 part by weight of the fiber of Table 1 (fiber No. 3) containing an anionic group. After the fiber is uniformized by a K card machine, 10 to 15 weights are imparted with a mister. !! I ;, a molded body was prepared according to the method of Example 1. The trapping experiment of the obtained filter material was carried out in the same manner as in Example 1. The characteristic values and trapping results of the barnwood are shown in Table 4. — ^ 1 ^^^ 1 nn Kt .......... I .......—-! ^ 1. ^ 1 I—-----— HI—— 一 aJ (Please (Please read the notes on the back before filling this page).-Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs. 13- This paper applies the Chinese National Standard for Painting (CNS) A4 (210 X297 mm) 403674 A7 B7 5 Description of the invention (U) Printed comparative example bmm Comparative example Comparative example Comparative example Comparative example Comparative example Comparative example Comparative example Comparative example Comparative example Comparative example Comparative example Comparative method B55 Printed by the Central Bureau of Standards of the Ministry of Economy C55 ^ C5) 00 0D 00 CD 00 -si Fiber No. 0.04 0.04 6.3 0.04 CO OO Ca > CJl CO ο ^ ^ ^-* «4 ^ k Grade 3 amino (Caol / g) m 0.005 0.07 Cannot process 0.07 i 0.07 0.07 0.07 0.01 0.50 _0.55 . Density (g / cm3) 1: 0.7 1: 0.7 Thickness 45 coffee plate shape j 1: 0.7 1: 0.7 1: 0.7 1: 0.7 1: 0.7. 1: 0.7 '1 Shape (diameter: height) 〇 〇 〇 to I CO 〇oooo fO I— »· · · · 〇0-< 1 O CO OO CO Pressure loss before test (cm-Hg) Xiang CO 112 1 Ro ro co o -j σ > co co ro 〇 〇0〇〇 > o Capture (g) 1 1 s 1 to CO N5 CD C D OO < C CO 03 CO CO Os9 Capture efficiency (¾) mm Waterlogging to 1 ^ Special line 丨 Full line 翮 黼 Aiming to allow deformation after Hf ist test 1 _ -14- i /, -β (Please Please read the notes on the back before filling in this page) This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) A7 403674 B7 V. Description of the invention (13) The capture efficiency is 0.1 milliliter in the third level amino 83! K at Er / g, up to nearly 99S at full capture at 3.4 mmol / g M: result. ......... I 1 ^ 1---I-二 I 1 owe—1.1--I i ^ l I i H -3 、 1 · (Please read the notes on the back before filling in this Page), --- Also, the trapping state is that the dust surface has accumulated on the gas inlet side only on the gas inlet side, and the interior is concentrated on the gas inlet side. In addition, the gas inlet side surface was not observed to have attachments at 2 cm in the thickness direction, and it was found that the base material of the male-female type had particularly excellent trapping ability. Example 3 A masculine male group-containing fiber was prepared from M polyvinyl vinyl fibers, and a collection experiment was performed. Ammonia conditions were a 503: aqueous solution of MN, N-dimethyl-1,3-diaminopropane, and treated at 1021 × 24 hours. The obtained 缵 Μ IN sodium hydroxide aqueous solution was immersed for 30 minutes, and then washed with water, dehydrated and dried to obtain a fiber containing 2.1 millimoles of tertiary amino group. The obtained fiber was prepared in the same manner as in Example 2 to produce a filter material with a density of 0.07 g / CBi :, and a collection experiment was performed in the same manner as in Example 1. The collection efficiency 94 «includes the collection state, and its tendency is the same as that of the second embodiment. hh Example 1 The consumer cooperative of the Central Standards Bureau of the Ministry of Economic Affairs prints polyester hot-melt fibers that do not contain ionic groups. The M card is opened in male form. It is installed in the same molder as in Example 1. It is not hot air to be molded body. The obtained filter medium was subjected to a capture experiment in the same manner as in Example 1. The results are shown in Table 5. -15- This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 403674 V. Description of invention (A7 B7 Printed by the staff of the Central Bureau of Standards, Ministry of Economic Affairs, Du printed L0 擗 mV m Deformation after the test No No deformation without leakage and trapping efficiency (%) ... Yeah | trapping amount (g) 112 1 Pressure loss before test (cm-Hg) 〇LT5 CO CO • · CSJ · Ο Ο ο m shape (diameter: height ) 1: 0.7 1: 0.7 1: 0.7 Thickness 45mm Plate-like density (g / cm 3) 0.01 0.07 0.50 0.07 m Comparative example (poly, pigmented fiber) (Please read the precautions on the back before filling out this page) Paper dimensions Applicable to China National Standard (CNS) A4 specification (210X297mm) Μ 403674 B7 V. Description of the invention (15) The collection efficiency at density 0.07 g / cb 3 Μ is 1S; at Μ, it does not play the role of alder When the density is 0.50g / cm3, the collection efficiency is also as low as 4¾, which is obviously inferior to that of the filter material containing the male sex group. Moreover, the collection state is that "the surface of the material has only dust-like substances accumulated on the gas inlet side, and the interior Then, the entire body is approximately uniformly attached, and it is known that the trapping is physical. As mentioned above, the filter material of the present invention can be used as an exhaust material for a vacuum exhaust system for a semiconductor manufacturing method, without the need for a decontamination equipment, and the vacuum exhaust system can be shortened. In addition, the exhaust system does not need maintenance at all, which can save savings. Funding, improve operability. It can also avoid the hazardous work of directly processing hazardous substances 1! Ml!-1 ^ 1 ...... II -¾, vs (please read the precautions on the back before filling this page), ~ "The paper size printed by the Employees' Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs is compliant with the Chinese National Standard (CNS) A4 (210 X 297 mm)
Claims (1)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP05192094A JP3381806B2 (en) | 1994-03-23 | 1994-03-23 | Vacuum exhaust gas filter |
Publications (1)
Publication Number | Publication Date |
---|---|
TW403674B true TW403674B (en) | 2000-09-01 |
Family
ID=12900320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW084101561A TW403674B (en) | 1994-03-23 | 1995-02-21 | Vacuum discharged gas filter |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP3381806B2 (en) |
KR (1) | KR100331254B1 (en) |
TW (1) | TW403674B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4636640B2 (en) | 1999-11-26 | 2011-02-23 | 東洋紡績株式会社 | Filter unit and filter |
WO2003005428A1 (en) * | 2001-06-14 | 2003-01-16 | Tae-Gon Kim | Method and apparatus for removing a reaction by-product in the semiconductor and the liquid crystal display manufactured field |
JP4865176B2 (en) * | 2001-09-28 | 2012-02-01 | 大成技研株式会社 | CVD source material recovery apparatus and recovery method |
-
1994
- 1994-03-23 JP JP05192094A patent/JP3381806B2/en not_active Expired - Fee Related
-
1995
- 1995-02-20 KR KR1019950003204A patent/KR100331254B1/en not_active IP Right Cessation
- 1995-02-21 TW TW084101561A patent/TW403674B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPH07256022A (en) | 1995-10-09 |
JP3381806B2 (en) | 2003-03-04 |
KR950031175A (en) | 1995-12-18 |
KR100331254B1 (en) | 2002-08-08 |
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