TW394854B - Method for testing an optical lens module - Google Patents
Method for testing an optical lens module Download PDFInfo
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- TW394854B TW394854B TW87113432A TW87113432A TW394854B TW 394854 B TW394854 B TW 394854B TW 87113432 A TW87113432 A TW 87113432A TW 87113432 A TW87113432 A TW 87113432A TW 394854 B TW394854 B TW 394854B
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五、發明說明(1) 本發明係有關於一種檢測更為準確之光學透鏡組檢測 方法。 請參閱第1圖,第1圖係習知掃描器之元件配置示意 圖。稿件11放置於玻璃12上’光源13發出先線穿過玻^ 12 ’經稿件1 1、反射鏡丨4反射(實際上反射鏡不只一片, 而是由數片形成一個反射路徑),然後再經透鏡組丨5呈像 在電荷耦合裝置(CCD)16,最後由電荷耦合裝置16輸出相 對應之信號,藉此來還原稿件内容。其中光源丨3,反射鏡 14,透鏡組15,電荷耦合裝置(CCD)16均是設置於同一掃 描模組内,因此上述元件可同步移動以保持固定的物距/ 像距。 上述透鏡組15在工薇量產中,因為製造公差等問題, 可能使透鏡組中的各個透鏡中心線沒有對正,進而產生相 差等問題,因此需藉由檢測裝置來做品質管制,淘汰不良 的透鏡組。 中華民國第86220888號專利(申請中)即提供一種光 透鏡組檢測裝置,請參閱第2圖,其包括光源31、光柵 32、透鏡組承座34、電荷耦合裝置35、以及電腦36,而標 號15為待測透鏡組。此裝置之光源31可發出光線經光柵32 反射,然後經透鏡組1 5由電荷耦合裝置3 5接收,再由電腦 3 6計算透鏡組之品質參數(調變轉換函數Μτρ值以及放大 率)。作檢測時,先藉由上、下移動透鏡組15來準確對 焦,接著逐步旋轉透鏡組1 5以找出其中MTF最大值,然後 固定透鏡組1 5於相對應之角度(即為最佳角度),並計'算出5. Description of the invention (1) The present invention relates to an optical lens group detection method with more accurate detection. Please refer to Fig. 1. Fig. 1 is a schematic diagram showing the components of a conventional scanner. The manuscript 11 is placed on the glass 12 'The light source 13 emits a line through the glass ^ 12' The manuscript 1 1, the reflection mirror 4 (actually, there is more than one reflection mirror, but a reflection path is formed by several pieces), then The image is displayed on the charge-coupled device (CCD) 16 through the lens group 5 and finally the corresponding signal is output by the charge-coupled device 16 to return the original content. Among them, the light source 3, the mirror 14, the lens group 15, and the charge coupled device (CCD) 16 are all arranged in the same scanning module, so the above components can be moved synchronously to maintain a fixed object / image distance. In the mass production of the above-mentioned lens group 15, due to manufacturing tolerances and other problems, the center line of each lens in the lens group may not be aligned, which will cause problems such as phase differences. Therefore, it is necessary to use a testing device to perform quality control to eliminate defective products. Lens group. Patent No. 86220888 (in application) of the Republic of China provides an optical lens group detection device, please refer to FIG. 2, which includes a light source 31, a grating 32, a lens group holder 34, a charge-coupled device 35, and a computer 36. 15 is the lens group to be tested. The light source 31 of this device can emit light that is reflected by the grating 32, and then received by the charge-coupled device 35 through the lens group 15, and then the computer 36 calculates the quality parameters of the lens group (modulation conversion function Mτρ value and magnification). When testing, first move the lens group 15 up and down to focus accurately, then gradually rotate the lens group 15 to find the maximum MTF, and then fix the lens group 15 to the corresponding angle (that is, the optimal angle). ) And count 'calculate
五、發明說明(2) 率,判斷其是否在規格容許誤差範圍内,以透 鏡組的優劣。 户έ it述檢測方式係先將透鏡組1 5準確對焦後,再來找透 ^ ί _的取佳旋轉角度,而本發明之發明人發現到,在旋— ,戈紐吟’往往調變轉換函數MTF值的變異不大,換言 ^Ϊ訊或其他量測誤差將對判斷MTF最大值有舉足輕重 ,使量得的MTF最大值所對應的旋轉角度可能不是 具正最佳的角度,檢測結果因而不可靠。 a、$ ί鑑於上述產生誤差的原因,,本發明於是提供一種光 子透鏡組檢測方法,包括以下步驟: (a) 光線經由光柵、待測透鏡組而投射至影擷 置; (b) ,動上述透鏡組,在影像擷取裝置上大致成像; 、(C 疋轉上述透鏡組,並以一既定的評價函數來找出 透鏡組最佳的旋轉角,將該透鏡組旋轉至該最佳旋轉角 度; U )逐步移動透鏡組同時計算對應的調變轉換函數 值,並利,分級方式來找出調變轉換函數值中的最高等 級,而以最高等級所對應透鏡組的位置為透鏡組成像的最 佳位置; (e)計算透鏡組對應於上述最佳旋轉角及最佳位置的 品質參數,然後判斷其是否在規.格容許誤差範圍内,而決 定透鏡組的優劣。 本發明的作法改為先找出透鏡組的最佳旋轉角度(步V. Explanation of the invention (2) The rate is to judge whether it is within the tolerance of the specification, and the quality of the lens group. The detection method described above is to first focus the lens group 15 accurately, and then to find out the optimal rotation angle of ^ _, and the inventor of the present invention found that, in the spin, Goniuyin 'often changes The variation of the MTF value of the conversion function is not large. In other words, ^ Ϊ or other measurement errors will play a significant role in determining the maximum MTF value, so that the rotation angle corresponding to the measured MTF maximum value may not be a positive angle. So unreliable. a. In view of the above-mentioned reasons for the error, the present invention provides a method for detecting a photon lens group, including the following steps: (a) the light is projected to the shadow capture through the grating and the lens group to be measured; (b) The above lens group is roughly imaged on the image capturing device; (C) Turn the above lens group, and use a predetermined evaluation function to find the optimal rotation angle of the lens group, and rotate the lens group to the optimal rotation Angle; U) stepwise move the lens group while calculating the corresponding modulation conversion function value, and use a hierarchical method to find the highest level of the modulation conversion function value, and use the position of the lens group corresponding to the highest level as the lens composition image (E) Calculate the quality parameters of the lens group corresponding to the above-mentioned optimal rotation angle and best position, and then determine whether it is within the tolerance range of the rule. Determine the quality of the lens group. The method of the present invention is changed to find the optimal rotation angle of the lens group (step
麵 C:\ProgramFiles\Patent\0535-3766-E.ptd第 5 頁 五、發明說明(3) =透鏡組準確成像(步驟⑷),而在找出 c步m t度之前,本發明僅讓透鏡組大致成像 来m 在找出透鏡組的最佳旋轉角度之前並 ϊίΐίί ’因此在旋轉透鏡組時,調變轉換函娜值 ,異將會加A,使得雜訊或其他量測誤差的影響減小, 因而能得到可靠的檢測結果。 為使本發明之上述目的、特徵、和優點能更明顯易 * ,下文特舉較佳實施例並配合所附圖式做詳細說明。 圖式之簡單說明: 第1圖係習用掃瞄器之元件配置示意圖; 第2圖係反射式光學透鏡組檢測裝置之示意圖; 第3圖係穿透式光學透鏡組檢測裝置之示意圖; 第4A圖係依據本發明之較佳實施例中檢測3 〇 〇 dp i透 鏡組所用的檢測圖樣; 第4B圖係依據本發明之較佳實施例中檢測6 〇 〇 dp i透 鏡組所用的檢測圖樣; 第5圖係本發明之光學透鏡組檢測方法之流程圖; 表1顯示3 0 0 dpi透鏡組相對於45。 、100 lppi之光 柵的MTF分級標準; 表2顯示600 dpi透鏡組相對於8。/90。 、150 lppi 之光柵的MTF分級標準; 表3為30 0 dpi透鏡組之MTF分級標準之使用範例。 標號說明: 11稿件 12玻璃Surface C: \ ProgramFiles \ Patent \ 0535-3766-E.ptd page 5 5. Description of the invention (3) = accurate imaging of the lens group (step ⑷), and before finding the mt degree of step c, the present invention only allows the lens The group is roughly imaged. Before finding the optimal rotation angle of the lens group, ϊίΐίί '. Therefore, when the lens group is rotated, the conversion function is adjusted, and the difference will be increased by A, so that the effect of noise or other measurement errors is reduced. It is small, so reliable detection results can be obtained. In order to make the above-mentioned objects, features, and advantages of the present invention more obvious and easier, hereinafter, preferred embodiments are described in detail with reference to the accompanying drawings. Brief description of the drawings: Figure 1 is a schematic diagram of the component configuration of a conventional scanner; Figure 2 is a schematic diagram of a reflective optical lens group detection device; Figure 3 is a schematic diagram of a penetrating optical lens group detection device; Section 4A FIG. 4B is a detection pattern used to detect a 300 dp i lens group in a preferred embodiment of the present invention; FIG. 4B is a detection pattern used to detect a 600 dpi i lens group in a preferred embodiment of the present invention; FIG. 5 is a flowchart of the optical lens group detection method of the present invention; Table 1 shows that a 300 dpi lens group is relative to 45. MTF grading standard for 100 lppi grating; Table 2 shows 600 dpi lens group relative to 8. / 90. MTF classification standard of 150 lppi grating; Table 3 is an example of the MTF classification standard of 300 dpi lens group. Reference number: 11 manuscripts 12 glass
C:\Program Files\Patent\〇535-3766-E.ptd第 6 頁 五、發明說明(4) 13光源 15透鏡組 21光源 24 26 32 35 14反射鏡 1 6電荷耦合裝置 2 2光柵 透鏡組承座 電腦 光柵 25電荷耦合裝置 31光源 3 4透鏡組承座 電荷耦合裝置3 6電腦 41〜49區域 炫配合圖式說明本發明之較佳實施例。 本發明可採用第2圖或者第3圖所示之硬體設備,其中 待測透鏡組1 5被安裝在透鏡組承座24、34上來移動或旋 轉。第2圖所示為反射式檢測裝置,光源21與透鏡組丨5係 設置在光栅22的同一側,光源21發出光線經光柵22反射, 然後經透鏡組15由電荷耦合裝置25接收,再由電腦26計算 透鏡組之品質參數(調變轉換函數MTF值以及放大率);第3 圖所示為穿透式檢測裝置,其中光源31與透鏡組1 5分別設 置在光柵32的二侧,光源31發出光線穿過光柵32,然後經 透鏡組15由電荷耦合裝置35接收,再由電腦36計算透鏡組 之品質參數。 請參閱第4A及4B圖,其顯示本發明所採用之檢測圖樣 (即前述光栅22、32)之例子,其中,第4A圖為檢測300 dp i透鏡組所用的檢測圖樣,圖樣的左邊41、中間4 2、及 右邊43皆為45 °之傾斜條紋(以下分別用L45、C45、R45來C: \ Program Files \ Patent \ 〇535-3766-E.ptd page 6 V. Description of the invention (4) 13 light source 15 lens group 21 light source 24 26 32 35 14 reflector 1 6 charge-coupled device 2 2 grating lens group Bearing computer grating 25 Charge-coupled device 31 Light source 3 4 Lens group Charge-coupled device 36 6 Computers 41 to 49 The area is illustrated with drawings to illustrate a preferred embodiment of the present invention. The present invention can use the hardware equipment shown in Fig. 2 or Fig. 3, in which the lens group 15 to be tested is mounted on the lens group holders 24 and 34 to move or rotate. Figure 2 shows a reflective detection device. The light source 21 and the lens group 5 are arranged on the same side of the grating 22. The light emitted by the light source 21 is reflected by the grating 22, and then received by the charge coupling device 25 through the lens group 15. The computer 26 calculates the quality parameters (modulation conversion function MTF value and magnification) of the lens group; FIG. 3 shows a transmission detection device, in which the light source 31 and the lens group 15 are respectively disposed on two sides of the grating 32, and the light source The light emitted by 31 passes through the grating 32, and is then received by the charge coupled device 35 through the lens group 15, and the computer 36 calculates the quality parameters of the lens group. Please refer to FIGS. 4A and 4B, which show examples of the detection patterns (ie, the aforementioned gratings 22 and 32) used in the present invention. Among them, FIG. 4A is a detection pattern used to detect a 300 dp i lens group. The middle 4 2 and the right 43 are 45 ° oblique stripes (hereafter used L45, C45, R45 to
C:\Program Files\Patent\0535-3766-E.ptd第 7 頁C: \ Program Files \ Patent \ 0535-3766-E.ptd page 7
五、發明說明(5) 表示)’且圖樣的每吋寬度内含有1〇〇條線對(1〇〇 lppi ); 第4B圖為檢測6 〇 〇 dp i透鏡組所用的檢測圖樣,圖樣的每 0寸寬度内含有1 5 0條線對(1 5 0 1 p p i ),圖樣共分為六個區 域’其中’圖樣的左邊包含有區域44、45,區域44為90。 的垂直條紋(底下以L 9 0來表示),而區域4 5為8。傾斜條紋 (底下以L8來表示),圖樣的中間包含有區域46、47,區域 46為8的傾斜條紋(底下以C8來表示),而區域47為90。 垂直條紋(底下以C90來表示),圖樣的右邊包含有區域 48、49 ’區域48為8。的傾斜條紋(底下以R8來表示),而 區域4 9為90°垂直條紋(底下以R90來表示)。 第5圖係本發^明之光學透鏡組檢測方法之流程圖,藉 由此流程可決定此透鏡組是否為良品: 步驟1 0 0 ’程序開始。 步驟110,當調整程序開、始,將透鏡組15往上(或往 下)移動一距離’刻意使得透鏡組1 5遠離成像位置。 步驟1 2 G,將透鏡組丨5往下(往上)移回一小距離,並 由電腦26、36計算透鏡組15對應於圖樣(即光柵22、32)左 邊/中間/右邊之成像的調變轉換函數(MTF)值。 步驟1 3 0 ’電腦2 6、3 6判斷左邊/中間/右邊三者的mtf 數值是否皆達到第1級以上(請參閱表1、表2所示之分級 表),如果4!TF值皆已達到第i級以上,則進行步驟丨4〇,而 如果MTF值有任一未達第1級以上,則必須回到步驟1 再 繼續進行粗調。5. Description of the invention (indicated by (5)) 'and the pattern contains 100 line pairs (100 lppi) per inch of width; Figure 4B is the detection pattern used to detect the 600 dpi lens group. Each 0 inch width contains 150 line pairs (1 501 ppi), and the pattern is divided into six regions 'wherein' the left side of the pattern includes regions 44, 45, and region 44 is 90. The vertical stripes (represented by L 9 0 at the bottom), while the area 4 5 is 8. Oblique stripe (represented by L8 at the bottom), the middle of the pattern contains regions 46, 47, region 46 is an 8-stripe stripe (represented by C8 at the bottom), and region 47 is 90. Vertical stripes (represented by C90 at the bottom), the right side of the pattern contains area 48, 49 ', area 48 is 8. The diagonal stripe (represented by R8 at the bottom), while the area 4 9 is a 90 ° vertical stripe (represented by R90 at the bottom). FIG. 5 is a flowchart of the optical lens group detection method of the present invention, and from this process, it can be determined whether the lens group is a good product: Step 1 0 0 ′ The program starts. In step 110, when the adjustment procedure starts and starts, the lens group 15 is moved upward (or downward) a distance 'to intentionally move the lens group 15 away from the imaging position. Step 1 2 G, move the lens group 丨 5 down (up) back to a small distance, and calculate the lens group 15 corresponding to the left / middle / right image of the pattern (ie, the gratings 22 and 32) by the computers 26 and 36. Modulation transfer function (MTF) value. Step 1 3 0 'Computer 2 6 and 3 6 determine whether the mtf values of the left / middle / right three have reached level 1 or higher (refer to the grading table shown in Table 1 and Table 2). If the 4! TF values are all If it has reached the i-th level or higher, step 4o is performed, and if any of the MTF values does not reach the first level or higher, you must return to step 1 to continue the coarse adjustment.
C:\ProgramFiles\Patent\0535-3766-E_ptd第 8 頁 五、發明說明(6)C: \ ProgramFiles \ Patent \ 0535-3766-E_ptd page 8 5. Description of the invention (6)
表1 : 300 dpi透鏡組相對於45° 、100 lppi之光柵的MTF 分級標準 級別 L45 C45 R45 0 0 0 0 1 20 20 20 2 35 35 35 3 50 50 50 4 55 55 55 5 57 57 57-^ 6 59 59 59 7 61 61 61 8 63 63 63 9 65 65 65 10 67 67 67 11 69 69 69 12 71 71 71 13 73 73 73 14 75 75 75 15 77 77 77 16 79 79 79 17 81 81 81 18 83 83 83 19 85 85 85 mmu\ C:\ProgramFiles\Pateirt\0535-3766-E.ptd第 9 頁 五、發明說明(7) 表2 : 6 0 0 dpi透鏡組相對於8 ° /90 ° 、150 lppi之光柵的 MTF分級標準 級別 L90 L8 C8 C90 R8 R90 0 0 0 0 0 0 0 1 20 20 20 20 20 20 2 35 35 35 35 35 35 3 50 50 50 50 50 50 4 55 55 55 55 55 55 5 57 57 57 57 57 57 6 59 59 59 59 59 59 7 61 61 61 61 61 61 8 63 63 63 63 63 63 9 65 65 65 65 65 65 10 67 67 67 67 67 67 11 69 69 69 69 69 69 12 71 71 71 71 71 71 13 73 73 73 73 73 73 14 75 75 75 75 75 75 15 77 77 77 77 77 77 16 79 79 79 79 79 79 17 81 81 81 81 81 81 18 83 83 83 83 83 83 19 85 85 85 85 85 85 C:\ProgramFiles\Patent\0535_3766_E.ptd第 10 頁Table 1: MTF classification standard level of a 300 dpi lens group with respect to a 45 °, 100 lppi grating L45 C45 R45 0 0 0 0 1 20 20 20 2 35 35 35 3 50 50 50 4 55 55 55 5 57 57 57- ^ 6 59 59 59 7 61 61 61 8 63 63 63 9 65 65 65 10 67 67 67 11 69 69 69 12 71 71 71 13 73 73 73 14 75 75 75 15 77 77 77 16 79 79 79 17 81 81 81 18 83 83 83 19 85 85 85 mmu \ C: \ ProgramFiles \ Pateirt \ 0535-3766-E.ptd page 9 5. Description of the invention (7) Table 2: 60 0 dpi lens group relative to 8 ° / 90 °, 150 MTF classification standard grade of lppi grating L90 L8 C8 C90 R8 R90 0 0 0 0 0 0 0 1 20 20 20 20 20 2 35 35 35 35 35 35 3 50 50 50 50 50 50 4 55 55 55 55 55 55 5 57 57 57 57 57 57 6 59 59 59 59 59 59 7 61 61 61 61 61 61 8 63 63 63 63 63 63 9 65 65 65 65 65 65 10 67 67 67 67 67 11 69 69 69 69 69 69 12 71 71 71 71 71 71 13 73 73 73 73 73 73 14 75 75 75 75 75 75 15 77 77 77 77 77 77 16 79 79 79 79 79 79 17 81 81 81 81 81 81 18 83 83 83 83 83 83 19 85 85 85 85 85 85 C: \ ProgramFiles \ Patent \ 0535_3766_E.ptd 10
五、發明說明(8) 步驟1 4 0 ’透鏡組1 5停止上下移動,開始旋轉,在〇。 -180。的範圍中’每次旋轉一小角度,並由電腦26、36 計算每個旋轉角所對應之MTF數值,再代入底下第(1 )、' (2)式所示的評價函數’來找出其中最佳角度(評價函數愈 小愈好’因此評價函數之最小值所對應的旋轉角即為最^ 角度),然後將透鏡組1 5旋轉至此最佳角度。 對30 0 dpi而言,評價函數為 [(MTFL45-MTFAVG)2 + (MTFC45-MTFAVG)2 + (MTFR45-MTFAVG)2] X 2........(1) 其中 mtfavg=(mtfL45+mtfC45+mtfR45)/3 對600 dpi而言,評價函數為 [(MTFL90-MTFAVG)2 + (MTFL8-MTFAVG)2 + (MTFC90-MTFAVG) 2+(MTFC8-MTFavg)2 + (MTFR90-MTFavg)2 + (MTFR8-MTFavg)2].......(2) 其中 mtfavg=(mtfL90+mtfL8+mtfC90+mtfC8+mtf_ + MTFR8)/6 步驟150,再次將透鏡組15向上(或向下)移動—距 離,以遠離成像位置。 步驟1 6 0,將透鏡組1 5往下(往上)逐步移動小距離,V. Description of the invention (8) Step 1 4 0 ′ The lens group 15 stops moving up and down and starts rotating at 0. -180. In the range of 'rotate a small angle each time, and the computer 26, 36 calculate the MTF value corresponding to each rotation angle, and then substitute the evaluation function shown in the following formula (1), (2) to find out Among them, the optimal angle (the smaller the evaluation function is, the better the rotation angle corresponding to the minimum value of the evaluation function is the maximum angle), and then the lens group 15 is rotated to this optimal angle. For 30 0 dpi, the evaluation function is [(MTFL45-MTFAVG) 2 + (MTFC45-MTFAVG) 2 + (MTFR45-MTFAVG) 2] X 2 ........ (1) where mtfavg = (mtfL45 + mtfC45 + mtfR45) / 3 For 600 dpi, the evaluation function is ((MTFL90-MTFAVG) 2 + (MTFL8-MTFAVG) 2 + (MTFC90-MTFAVG) 2+ (MTFC8-MTFavg) 2 + (MTFR90-MTFavg) 2 + (MTFR8-MTFavg) 2] ....... (2) where mtfavg = (mtfL90 + mtfL8 + mtfC90 + mtfC8 + mtf_ + MTFR8) / 6 Step 150, move the lens group 15 up (or down) again ) Move-distance away from the imaging position. Step 16 0, move the lens group 15 down (upward) gradually by a small distance,
C:\ProgramFiles\Patent\0535-3766-E. ptd第 11 頁 五、發明說明(9) Ϊ 2/月H36計算透鏡組15對應於圖樣(即光拇22、⑵ =1 之成像的MTF數值,再根據表1及表2所 不的MTF为級’找出其中MTF值之最高等級。 p 將此最高等級之MTF值與規格相比較,判斷 八疋否在規格容許誤差範圍内,而決定透鏡組 步驟180,程序完成。 为 現對於以上流程再作進一步的說明。 步驟110至步驟130為粗調階段,先將透鏡組15移開成 像位置(可朝向光柵22(32)、或者朝電荷耗合裝置25(35) 來移動,只要移開成像位置便可),然後往反方向逐步移 動小距離,當MTF值達到第丄級以上時即停止移動,此時可 視為完成粗調。 表1及表2所述之分級方法會因情況不同(如設計理 念、製造方式)而有所差異,最典型的方法是將MTF值從2〇 到85分為二十個等級,達到第1級以上即代表ΜΤρ值大於 20 ° 步驟140中,透鏡組15旋轉的範圍在〇。- 180。 ,因 對稱之特性,0。- 180。與180。_ 360。的結果是互相對 稱的,故只需旋轉1 8 0。,即可知道〇 — 3 6 0。的情況。 步驟140中,透鏡組15在〇。— 1 8〇。的範圍内旋轉’ 每次旋轉一小角度’此小角度如果為5。 ’貝,丨1 8 0。/ 5。 =36 ’透鏡組須旋轉36次,共得到36組評價函數值,其中 最小值所對應的角度即為最佳旋轉角。小角度如果劃分,的C: \ ProgramFiles \ Patent \ 0535-3766-E. Ptd page 11 V. Description of the invention (9) Ϊ 2 / month H36 Calculate the MTF value of the lens group 15 corresponding to the pattern (that is, the thumb 22 and = 1 = 1) Then, find out the highest level of MTF value according to the MTF not listed in Table 1 and Table 2. p Compare the MTF value of this highest level with the specification, and determine whether the eighteen are within the tolerance of the specification. Step 180 of the lens group is completed. The procedure is further explained for now. Steps 110 to 130 are the rough adjustment stages. First move the lens group 15 away from the imaging position (which can be towards the grating 22 (32) or toward the charge). Consumption device 25 (35) to move, just move away from the imaging position), and then gradually move a small distance in the opposite direction, and stop moving when the MTF value reaches level 以上 above, at this time it can be regarded as completing the rough adjustment. The grading methods described in Tables 1 and 2 will vary depending on the situation (such as design concepts and manufacturing methods). The most typical method is to divide the MTF value from 20 to 85 into 20 levels, reaching Level 1. The above means that the Τρ value is greater than 20 ° In step 140, the lens group 1 The range of 5 rotations is between 0.-180. Due to the characteristics of symmetry, 0.-180. and 180. _ 360. The results are symmetrical to each other, so you only need to rotate 1 8 0., you can know 0-3 6 In the case of 0. In step 140, the lens group 15 is rotated within the range of 0.-1 80. 'This is rotated by a small angle at a time' if this small angle is 5. 'Bei, 1 8 0. / 5. = 36 'The lens group must be rotated 36 times to obtain a total of 36 groups of evaluation function values, where the angle corresponding to the minimum value is the best rotation angle. If the small angle is divided, the
C:\ProgramFiles\Patent\0535-3766-E.ptd第 12 頁 五、發明說明(10) 愈細,則會得到愈多組評價函數楢,社 ^ 0 ^ w由数值結果量測的準確度也 將愈高,只是也會耗費較多的時間作 *刃平雒反乜 fe电L h告丨v 、曰々,^们时間作a十异及評估。因此小 角度如何劃为,視各別情形而定,並無絕 步驟160,現舉300 dpi透鏡組之一 將 組逐步移動小距離,共計移動至A、B、c、〇 個不同成像位置,其所對應之左邊/中間/ MTF分級(參閱表丨)之結果如表3所 邊MTF數值及 表3 :300 dpi透鏡組之MTF分級標準之使用範例 成像位置 A B C D R F 左邊 80 82 79 73 60 50 VJ Ας. 中間 65 75 79 80 81 78 HO 67 右邊 52 60 67 73 76 78 79 分級 3 6 10 13 6 3 2 其中位置D最小之MTF值為73,根據表1,位置])將被分到第 1 3級,位置E表小之MTF值為6 0,根據表1,位置ρ將被分到 第6級。由於在A、B、C、D、E、F、G七個不同成像位置 中,_.位置D的專級敢咼’因此位置])的品質參數(mtf值及放 大率)即為所求。在此例中,左邊/中間/右邊的MTF數值皆 視為同樣重要’但在某些情況下’可再乘上權值,以調整 左邊/中間/右邊三者的影響力。C: \ ProgramFiles \ Patent \ 0535-3766-E.ptd Page 12 V. Description of the invention (10) The finer it is, the more groups of evaluation functions will be obtained. 社 社 0 ^ w Accuracy measured by numerical results It will also be higher, but it will also take more time to do the same thing. Let ’s report the difference and evaluation. Therefore, how to divide the small angle is determined by each situation, and there is no step 160. Now one of the 300 dpi lens groups is moved gradually by a small distance, a total of A, B, c, and 0 different imaging positions. The corresponding left / middle / MTF classification results (see Table 丨) are shown in the MTF values in Table 3 and Table 3: Example of the use of MTF classification standards for 300 dpi lens groups. Imaging position ABCDRF Left 80 82 79 73 60 50 VJ Ας. Middle 65 75 79 80 81 78 HO 67 Right 52 60 67 73 76 78 79 Grade 3 6 10 13 6 3 2 Among them, the minimum MTF value of position D is 73, according to Table 1, position]) will be assigned to the first Level 3, the MTF value of the small position E table is 60. According to Table 1, the position ρ will be assigned to the 6th level. Because in the seven different imaging positions of A, B, C, D, E, F, and G, the special level of _. Position D dares to 'so position]] The quality parameters (mtf value and magnification) are required. . In this example, the left / middle / right MTF values are all considered to be equally important 'but in some cases' may be multiplied by weights to adjust the influence of the left / middle / right three.
C:\ProgramFiles\Patent\0535-3766-E.ptd第 13 頁C: \ ProgramFiles \ Patent \ 0535-3766-E.ptd page 13
由以上敘述可知,本發明係先找出透鏡組的最佳旋轉 X步驟1 4 0 ),然後才將透鏡組準確對焦(步驟1 6 0 ),而 在找出透鏡組的最佳旋轉角度之前,本發明僅讓透鏡組大 致f像(步驟1 30 ),換言之在找出透鏡組的最佳旋轉角度 之刚並未準確成像,因此在旋轉透鏡組時,調變轉換函數 MTF值的變異將會加大,使得雜訊或其他量測誤差的影響 減小’因而能得到可靠的檢測結果。 雖然本發明已以較佳實施 限定本發明’任何熟習此項技 神和範圍内,仍可作些許的更 護範圍當視後附之申請專利範 例揭露如上,然其並非用以 藝者,在不脫離本發明之精 動與潤飾,因此本發明之保 圍所界定者為準。 、It can be known from the above description that the present invention first finds the optimal rotation of the lens group X step 1 40), and then accurately focuses the lens group (step 16 0), and before finding the optimal rotation angle of the lens group The present invention only makes the lens group roughly f image (step 1 30). In other words, the image of the optimal rotation angle of the lens group is not accurately imaged. Therefore, when the lens group is rotated, the variation of the MTF value of the modulation conversion function will be It will increase, so that the influence of noise or other measurement errors is reduced ', so that reliable detection results can be obtained. Although the present invention has been limited to better implementation of the present invention by anyone who is familiar with this technology and scope, it can still be protected slightly. As the attached patent application example is disclosed above, it is not intended for artists. Without departing from the fine motion and retouching of the present invention, the definition of the protection scope of the present invention shall prevail. ,
C:\ProgramFiles\Patent\0535-3766-E.ptd第 14 頁C: \ ProgramFiles \ Patent \ 0535-3766-E.ptd page 14
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