TW381805U - Shielding device for the source chamber of ion implantion machine - Google Patents

Shielding device for the source chamber of ion implantion machine

Info

Publication number
TW381805U
TW381805U TW86220117U TW86220117U TW381805U TW 381805 U TW381805 U TW 381805U TW 86220117 U TW86220117 U TW 86220117U TW 86220117 U TW86220117 U TW 86220117U TW 381805 U TW381805 U TW 381805U
Authority
TW
Taiwan
Prior art keywords
machine
shielding device
source chamber
ion implantion
implantion
Prior art date
Application number
TW86220117U
Other languages
Chinese (zh)
Inventor
Fu-Gang Tian
Hung-Jing Jang
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW86220117U priority Critical patent/TW381805U/en
Publication of TW381805U publication Critical patent/TW381805U/en

Links

TW86220117U 1996-10-16 1996-10-16 Shielding device for the source chamber of ion implantion machine TW381805U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW86220117U TW381805U (en) 1996-10-16 1996-10-16 Shielding device for the source chamber of ion implantion machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW86220117U TW381805U (en) 1996-10-16 1996-10-16 Shielding device for the source chamber of ion implantion machine

Publications (1)

Publication Number Publication Date
TW381805U true TW381805U (en) 2000-02-01

Family

ID=21629068

Family Applications (1)

Application Number Title Priority Date Filing Date
TW86220117U TW381805U (en) 1996-10-16 1996-10-16 Shielding device for the source chamber of ion implantion machine

Country Status (1)

Country Link
TW (1) TW381805U (en)

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MK4K Expiration of patent term of a granted utility model