TW376446B - Six-degree-of-freedom measurement apparatus and method - Google Patents

Six-degree-of-freedom measurement apparatus and method

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Publication number
TW376446B
TW376446B TW087105413A TW87105413A TW376446B TW 376446 B TW376446 B TW 376446B TW 087105413 A TW087105413 A TW 087105413A TW 87105413 A TW87105413 A TW 87105413A TW 376446 B TW376446 B TW 376446B
Authority
TW
Taiwan
Prior art keywords
errors
roll
error
pitch
degree
Prior art date
Application number
TW087105413A
Other languages
Chinese (zh)
Inventor
mu-rong Chen
Kuang-Chao Fan
Original Assignee
mu-rong Chen
Kuang-Chao Fan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by mu-rong Chen, Kuang-Chao Fan filed Critical mu-rong Chen
Priority to TW087105413A priority Critical patent/TW376446B/en
Application granted granted Critical
Publication of TW376446B publication Critical patent/TW376446B/en

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

A precision six-degree-of-freedom measurement apparatus which has the capability to measure simultaneously six motion errors of an X-Y stage, including two linear positioning errors, a vertical straightness error, a yaw error, a pitch error, and a roll error. The pitch and yaw measurements are adopted with a new apparatus, and the roll and vertical straightness measurement are based on a new measuring method. The apparatus uses an optical reflection device with one set of long right-angle reflector to eliminate the nonlinear effect of pitch rotation versus the distance measurement. The apparatus utilizes the optical reflection device and a pair of quadrant photo detectors to make the roll and vertical straightness measurement possible. This invention uses four laser sources to measure four distances to obtain positioning, horizontal straightness, yaw and pitch errors, and uses two quadrant photo detectors to detect vertical straightness and roll errors. This invention can break the bottleneck of conventional technique which can't precisely measure all six degree of errors at same time.
TW087105413A 1998-04-10 1998-04-10 Six-degree-of-freedom measurement apparatus and method TW376446B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW087105413A TW376446B (en) 1998-04-10 1998-04-10 Six-degree-of-freedom measurement apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW087105413A TW376446B (en) 1998-04-10 1998-04-10 Six-degree-of-freedom measurement apparatus and method

Publications (1)

Publication Number Publication Date
TW376446B true TW376446B (en) 1999-12-11

Family

ID=57941991

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087105413A TW376446B (en) 1998-04-10 1998-04-10 Six-degree-of-freedom measurement apparatus and method

Country Status (1)

Country Link
TW (1) TW376446B (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102506900A (en) * 2011-11-17 2012-06-20 大连理工大学 Coordinate direction correction method in vision measurement system, and device thereof
TWI632344B (en) * 2017-04-17 2018-08-11 國立虎尾科技大學 An optical detecting apparatus for detecting a degree of freedom error of a shaft and a method thereof (2)
CN108801146A (en) * 2018-08-30 2018-11-13 天津大学 A kind of lathe five degree of freedom error measuring means and error model method for building up
CN111721199A (en) * 2020-06-10 2020-09-29 合肥工业大学 Precision measurement device and method for five-degree-of-freedom error motion of rotating shaft
TWI739403B (en) * 2020-04-22 2021-09-11 國立成功大學 Measurement device and method for geometric errors of linear stage
TWI785914B (en) * 2021-12-02 2022-12-01 財團法人工業技術研究院 Obtaining method and obtaining apparatus for geometric error of dual rotation axes

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102506900A (en) * 2011-11-17 2012-06-20 大连理工大学 Coordinate direction correction method in vision measurement system, and device thereof
TWI632344B (en) * 2017-04-17 2018-08-11 國立虎尾科技大學 An optical detecting apparatus for detecting a degree of freedom error of a shaft and a method thereof (2)
CN108731595A (en) * 2017-04-17 2018-11-02 虎尾科技大学 Optical rotating shaft multi-degree-of-freedom error detection device and method
CN108731595B (en) * 2017-04-17 2020-04-21 虎尾科技大学 Optical rotating shaft multi-degree-of-freedom error detection device and method
CN108801146A (en) * 2018-08-30 2018-11-13 天津大学 A kind of lathe five degree of freedom error measuring means and error model method for building up
TWI739403B (en) * 2020-04-22 2021-09-11 國立成功大學 Measurement device and method for geometric errors of linear stage
CN111721199A (en) * 2020-06-10 2020-09-29 合肥工业大学 Precision measurement device and method for five-degree-of-freedom error motion of rotating shaft
TWI785914B (en) * 2021-12-02 2022-12-01 財團法人工業技術研究院 Obtaining method and obtaining apparatus for geometric error of dual rotation axes

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