TW376446B - Six-degree-of-freedom measurement apparatus and method - Google Patents
Six-degree-of-freedom measurement apparatus and methodInfo
- Publication number
- TW376446B TW376446B TW087105413A TW87105413A TW376446B TW 376446 B TW376446 B TW 376446B TW 087105413 A TW087105413 A TW 087105413A TW 87105413 A TW87105413 A TW 87105413A TW 376446 B TW376446 B TW 376446B
- Authority
- TW
- Taiwan
- Prior art keywords
- errors
- roll
- error
- pitch
- degree
- Prior art date
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
A precision six-degree-of-freedom measurement apparatus which has the capability to measure simultaneously six motion errors of an X-Y stage, including two linear positioning errors, a vertical straightness error, a yaw error, a pitch error, and a roll error. The pitch and yaw measurements are adopted with a new apparatus, and the roll and vertical straightness measurement are based on a new measuring method. The apparatus uses an optical reflection device with one set of long right-angle reflector to eliminate the nonlinear effect of pitch rotation versus the distance measurement. The apparatus utilizes the optical reflection device and a pair of quadrant photo detectors to make the roll and vertical straightness measurement possible. This invention uses four laser sources to measure four distances to obtain positioning, horizontal straightness, yaw and pitch errors, and uses two quadrant photo detectors to detect vertical straightness and roll errors. This invention can break the bottleneck of conventional technique which can't precisely measure all six degree of errors at same time.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW087105413A TW376446B (en) | 1998-04-10 | 1998-04-10 | Six-degree-of-freedom measurement apparatus and method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW087105413A TW376446B (en) | 1998-04-10 | 1998-04-10 | Six-degree-of-freedom measurement apparatus and method |
Publications (1)
Publication Number | Publication Date |
---|---|
TW376446B true TW376446B (en) | 1999-12-11 |
Family
ID=57941991
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW087105413A TW376446B (en) | 1998-04-10 | 1998-04-10 | Six-degree-of-freedom measurement apparatus and method |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW376446B (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102506900A (en) * | 2011-11-17 | 2012-06-20 | 大连理工大学 | Coordinate direction correction method in vision measurement system, and device thereof |
TWI632344B (en) * | 2017-04-17 | 2018-08-11 | 國立虎尾科技大學 | An optical detecting apparatus for detecting a degree of freedom error of a shaft and a method thereof (2) |
CN108801146A (en) * | 2018-08-30 | 2018-11-13 | 天津大学 | A kind of lathe five degree of freedom error measuring means and error model method for building up |
CN111721199A (en) * | 2020-06-10 | 2020-09-29 | 合肥工业大学 | Precision measurement device and method for five-degree-of-freedom error motion of rotating shaft |
TWI739403B (en) * | 2020-04-22 | 2021-09-11 | 國立成功大學 | Measurement device and method for geometric errors of linear stage |
TWI785914B (en) * | 2021-12-02 | 2022-12-01 | 財團法人工業技術研究院 | Obtaining method and obtaining apparatus for geometric error of dual rotation axes |
-
1998
- 1998-04-10 TW TW087105413A patent/TW376446B/en active
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102506900A (en) * | 2011-11-17 | 2012-06-20 | 大连理工大学 | Coordinate direction correction method in vision measurement system, and device thereof |
TWI632344B (en) * | 2017-04-17 | 2018-08-11 | 國立虎尾科技大學 | An optical detecting apparatus for detecting a degree of freedom error of a shaft and a method thereof (2) |
CN108731595A (en) * | 2017-04-17 | 2018-11-02 | 虎尾科技大学 | Optical rotating shaft multi-degree-of-freedom error detection device and method |
CN108731595B (en) * | 2017-04-17 | 2020-04-21 | 虎尾科技大学 | Optical rotating shaft multi-degree-of-freedom error detection device and method |
CN108801146A (en) * | 2018-08-30 | 2018-11-13 | 天津大学 | A kind of lathe five degree of freedom error measuring means and error model method for building up |
TWI739403B (en) * | 2020-04-22 | 2021-09-11 | 國立成功大學 | Measurement device and method for geometric errors of linear stage |
CN111721199A (en) * | 2020-06-10 | 2020-09-29 | 合肥工业大学 | Precision measurement device and method for five-degree-of-freedom error motion of rotating shaft |
TWI785914B (en) * | 2021-12-02 | 2022-12-01 | 財團法人工業技術研究院 | Obtaining method and obtaining apparatus for geometric error of dual rotation axes |
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