TW376201U - Calibration equipment for the positioning of wafer by a track machine - Google Patents
Calibration equipment for the positioning of wafer by a track machineInfo
- Publication number
- TW376201U TW376201U TW087206774U TW87206774U TW376201U TW 376201 U TW376201 U TW 376201U TW 087206774 U TW087206774 U TW 087206774U TW 87206774 U TW87206774 U TW 87206774U TW 376201 U TW376201 U TW 376201U
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- positioning
- calibration equipment
- track machine
- track
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW087206774U TW376201U (en) | 1998-05-01 | 1998-05-01 | Calibration equipment for the positioning of wafer by a track machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW087206774U TW376201U (en) | 1998-05-01 | 1998-05-01 | Calibration equipment for the positioning of wafer by a track machine |
Publications (1)
Publication Number | Publication Date |
---|---|
TW376201U true TW376201U (en) | 1999-12-01 |
Family
ID=54651259
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW087206774U TW376201U (en) | 1998-05-01 | 1998-05-01 | Calibration equipment for the positioning of wafer by a track machine |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW376201U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11300880B2 (en) | 2019-12-09 | 2022-04-12 | Nanya Technology Corporation | Coating system and calibration method thereof |
-
1998
- 1998-05-01 TW TW087206774U patent/TW376201U/en unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11300880B2 (en) | 2019-12-09 | 2022-04-12 | Nanya Technology Corporation | Coating system and calibration method thereof |
TWI762874B (en) * | 2019-12-09 | 2022-05-01 | 南亞科技股份有限公司 | Coating system and calibration method thereof |
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