TW376201U - Calibration equipment for the positioning of wafer by a track machine - Google Patents

Calibration equipment for the positioning of wafer by a track machine

Info

Publication number
TW376201U
TW376201U TW087206774U TW87206774U TW376201U TW 376201 U TW376201 U TW 376201U TW 087206774 U TW087206774 U TW 087206774U TW 87206774 U TW87206774 U TW 87206774U TW 376201 U TW376201 U TW 376201U
Authority
TW
Taiwan
Prior art keywords
wafer
positioning
calibration equipment
track machine
track
Prior art date
Application number
TW087206774U
Other languages
Chinese (zh)
Inventor
meng-jun Li
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co Ltd filed Critical Taiwan Semiconductor Mfg Co Ltd
Priority to TW087206774U priority Critical patent/TW376201U/en
Publication of TW376201U publication Critical patent/TW376201U/en

Links

TW087206774U 1998-05-01 1998-05-01 Calibration equipment for the positioning of wafer by a track machine TW376201U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW087206774U TW376201U (en) 1998-05-01 1998-05-01 Calibration equipment for the positioning of wafer by a track machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW087206774U TW376201U (en) 1998-05-01 1998-05-01 Calibration equipment for the positioning of wafer by a track machine

Publications (1)

Publication Number Publication Date
TW376201U true TW376201U (en) 1999-12-01

Family

ID=54651259

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087206774U TW376201U (en) 1998-05-01 1998-05-01 Calibration equipment for the positioning of wafer by a track machine

Country Status (1)

Country Link
TW (1) TW376201U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11300880B2 (en) 2019-12-09 2022-04-12 Nanya Technology Corporation Coating system and calibration method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11300880B2 (en) 2019-12-09 2022-04-12 Nanya Technology Corporation Coating system and calibration method thereof
TWI762874B (en) * 2019-12-09 2022-05-01 南亞科技股份有限公司 Coating system and calibration method thereof

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