TW369508B - Carrier and probe for this device - Google Patents

Carrier and probe for this device

Info

Publication number
TW369508B
TW369508B TW083111435A TW83111435A TW369508B TW 369508 B TW369508 B TW 369508B TW 083111435 A TW083111435 A TW 083111435A TW 83111435 A TW83111435 A TW 83111435A TW 369508 B TW369508 B TW 369508B
Authority
TW
Taiwan
Prior art keywords
test head
shaft
slide frame
carrier
brake shoe
Prior art date
Application number
TW083111435A
Other languages
Chinese (zh)
Inventor
Noboru Tozawa
Hisashi Nakajima
Kazuhito Yokomori
Original Assignee
Tokyo Electron Ltd
Tokyo Electron Yamanashi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP05318948A external-priority patent/JP3095318B2/en
Priority claimed from JP5318947A external-priority patent/JPH07147305A/en
Application filed by Tokyo Electron Ltd, Tokyo Electron Yamanashi Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of TW369508B publication Critical patent/TW369508B/en

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

This invention relates to a carrier device to move heavy load at least toward up and down directions, that is for using in lifting and lowering, in the same time comprising a falling prevention structure, and the probe assembled using the carrier device as the moving mechanism of test head. The purpose of this invention lies in providing: to move heavy load as per test head of prober, with high efficiency and safety, and having carrier for preventing falling, and assemblying prober having the kind of carrier. Description of the characteristics of this invention: probe of semiconductor chip, comprises: a main body that is electrically connected to the probe needle and with an interface section, a test head that can load/unload freely at the interface section, and manipulator used to move the test head. The manipulator also comprises positions (plural) X, Y, Z, θX, θY, θZ adjusting member for adjusting position of test head toward six axial directions. Z-location adjusting member, is formed from lifting/lowering device installed at foundation stage and driving slide frame, this vicinity connection is set up with fall prevention member. Fall prevention member comprises: ball thread nuts on slide frame, and shaft of the ball thread connected to nuts. Lower section of shaft is also set up with brake shoe. And opposing below the brake shoe also having a shaft seat installed on foundation stage. A ball having shooting force is at point contact with the center below the brake seat, and a gap is formed between brake shoe and brake seat. Breakdown of lift device is caused by the heavy load of test head exceeding the thrust load of the spring shooting force and loading onto the shaft such that the shaft descends with the slide frame for a distance equal to the gap height. Therefore, the brake shoe and brake seat will be in contact, shaft rotation relative to the nut shall be stopped, such that further descending of the slide frame will be stopped.
TW083111435A 1993-11-25 1994-12-08 Carrier and probe for this device TW369508B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP05318948A JP3095318B2 (en) 1993-11-25 1993-11-25 Test equipment for test object
JP5318947A JPH07147305A (en) 1993-11-25 1993-11-25 Test apparatus

Publications (1)

Publication Number Publication Date
TW369508B true TW369508B (en) 1999-09-11

Family

ID=57941398

Family Applications (1)

Application Number Title Priority Date Filing Date
TW083111435A TW369508B (en) 1993-11-25 1994-12-08 Carrier and probe for this device

Country Status (1)

Country Link
TW (1) TW369508B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI418444B (en) * 2012-03-09 2013-12-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI418444B (en) * 2012-03-09 2013-12-11

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