TW368687B - Method for improving water-resistant property of silicon nitride thin film doped with fluorine - Google Patents

Method for improving water-resistant property of silicon nitride thin film doped with fluorine

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Publication number
TW368687B
TW368687B TW086115583A TW86115583A TW368687B TW 368687 B TW368687 B TW 368687B TW 086115583 A TW086115583 A TW 086115583A TW 86115583 A TW86115583 A TW 86115583A TW 368687 B TW368687 B TW 368687B
Authority
TW
Taiwan
Prior art keywords
thin film
fluorine
silicon nitride
film doped
resistant property
Prior art date
Application number
TW086115583A
Other languages
Chinese (zh)
Inventor
Michael S K Chen
Ting-Chang Chang
yu-zhen Mei
Tzung-Shian Jou
Original Assignee
Air Products San Fu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Products San Fu Co Ltd filed Critical Air Products San Fu Co Ltd
Priority to TW086115583A priority Critical patent/TW368687B/en
Application granted granted Critical
Publication of TW368687B publication Critical patent/TW368687B/en

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Abstract

A kind of method for improving the water-resistant property of silicon nitride thin film doped with fluorine which is to apply the NH3 plasma post-treatment on the silicon oxide deposition thin film doped with fluorine under the circumstances enough for the nitrogenizing on the surface of thin film but generally sustaining the original structure so as to isolate the moisture and let the thin film sustain low dielectric constant for a long time.
TW086115583A 1997-10-22 1997-10-22 Method for improving water-resistant property of silicon nitride thin film doped with fluorine TW368687B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086115583A TW368687B (en) 1997-10-22 1997-10-22 Method for improving water-resistant property of silicon nitride thin film doped with fluorine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086115583A TW368687B (en) 1997-10-22 1997-10-22 Method for improving water-resistant property of silicon nitride thin film doped with fluorine

Publications (1)

Publication Number Publication Date
TW368687B true TW368687B (en) 1999-09-01

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ID=57941340

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086115583A TW368687B (en) 1997-10-22 1997-10-22 Method for improving water-resistant property of silicon nitride thin film doped with fluorine

Country Status (1)

Country Link
TW (1) TW368687B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6727173B2 (en) 1998-09-03 2004-04-27 Micron Technology, Inc. Semiconductor processing methods of forming an utilizing antireflective material layers, and methods of forming transistor gate stacks
US6828683B2 (en) 1998-12-23 2004-12-07 Micron Technology, Inc. Semiconductor devices, and semiconductor processing methods

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6727173B2 (en) 1998-09-03 2004-04-27 Micron Technology, Inc. Semiconductor processing methods of forming an utilizing antireflective material layers, and methods of forming transistor gate stacks
US6828683B2 (en) 1998-12-23 2004-12-07 Micron Technology, Inc. Semiconductor devices, and semiconductor processing methods

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees