TW367575B - Wafer suppressing means for semiconductor wafer packaging container - Google Patents
Wafer suppressing means for semiconductor wafer packaging containerInfo
- Publication number
- TW367575B TW367575B TW086117472A TW86117472A TW367575B TW 367575 B TW367575 B TW 367575B TW 086117472 A TW086117472 A TW 086117472A TW 86117472 A TW86117472 A TW 86117472A TW 367575 B TW367575 B TW 367575B
- Authority
- TW
- Taiwan
- Prior art keywords
- semiconductor wafer
- flexible flake
- wafer
- flake
- packaging container
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67383—Closed carriers characterised by substrate supports
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP35384796A JPH10163310A (ja) | 1996-11-28 | 1996-11-28 | 半導体ウェハ包装容器のウェハ押さえ構造 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW367575B true TW367575B (en) | 1999-08-21 |
Family
ID=18433628
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086117472A TW367575B (en) | 1996-11-28 | 1997-11-21 | Wafer suppressing means for semiconductor wafer packaging container |
Country Status (3)
Country | Link |
---|---|
US (1) | US6168025B1 (zh) |
JP (1) | JPH10163310A (zh) |
TW (1) | TW367575B (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE20106909U1 (de) * | 2001-04-21 | 2002-08-29 | ACR Automation in Cleanroom GmbH, 78078 Niedereschach | Transportbox für optische Masken |
DE20106908U1 (de) * | 2001-04-21 | 2002-08-29 | ACR Automation in Cleanroom GmbH, 78078 Niedereschach | Transportkassette für Halbleitersubstrat-Masken |
US7017758B2 (en) * | 2003-07-09 | 2006-03-28 | Chartered Semiconductor Manufacturing Ltd. | Wafer protective cassette |
US7395933B2 (en) * | 2005-06-14 | 2008-07-08 | Intel Corporation | Carrier to hold semiconductor device using opposed rollers |
TW200933799A (en) * | 2008-01-21 | 2009-08-01 | Visera Technologies Co Ltd | Wafer cassette |
US7971722B2 (en) * | 2008-08-08 | 2011-07-05 | Gudeng Precision Industral Co, Ltd | Wafer container with restrainer |
CN102956527A (zh) * | 2012-11-19 | 2013-03-06 | 无锡九条龙汽车设备有限公司 | 一种用于半导体器件封装的复合式加热轨 |
TWM453240U (zh) * | 2013-01-10 | 2013-05-11 | Gudeng Prec Ind Co Ltd | 具有保護套的限制件 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3934733A (en) * | 1974-10-10 | 1976-01-27 | Worden Raymond D | Transfer device |
US4061228A (en) * | 1976-12-20 | 1977-12-06 | Fluoroware, Inc. | Shipping container for substrates |
US4248346A (en) * | 1979-01-29 | 1981-02-03 | Fluoroware, Inc. | Shipping container for semiconductor substrate wafers |
US4630732A (en) * | 1984-09-06 | 1986-12-23 | Robert Snyman | Storage device for storing disc-shaped articles |
AU5983986A (en) * | 1985-07-09 | 1987-01-15 | Basf Aktiengesellschaft | Container for discs |
US4817799A (en) * | 1986-10-06 | 1989-04-04 | Empak, Inc. | Disk package |
US4718552A (en) * | 1986-12-11 | 1988-01-12 | Fluoroware, Inc. | Disk shipper and transfer tray |
US4752007A (en) * | 1986-12-11 | 1988-06-21 | Fluoroware, Inc. | Disk shipper |
US5025924A (en) * | 1988-11-16 | 1991-06-25 | Toppan Printing Co., Ltd. | Container |
US5046615A (en) * | 1989-04-03 | 1991-09-10 | Fluoroware, Inc. | Disk shipper |
US5253755A (en) * | 1991-03-20 | 1993-10-19 | Fluoroware, Inc. | Cushioned cover for disk container |
-
1996
- 1996-11-28 JP JP35384796A patent/JPH10163310A/ja active Pending
-
1997
- 1997-11-21 TW TW086117472A patent/TW367575B/zh active
- 1997-11-28 US US08/980,363 patent/US6168025B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US6168025B1 (en) | 2001-01-02 |
JPH10163310A (ja) | 1998-06-19 |
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