TW367536B - Surface treatment method the apparatus thereof for changing the surface properties of the object without damage by plasma - Google Patents
Surface treatment method the apparatus thereof for changing the surface properties of the object without damage by plasmaInfo
- Publication number
- TW367536B TW367536B TW085115628A TW85115628A TW367536B TW 367536 B TW367536 B TW 367536B TW 085115628 A TW085115628 A TW 085115628A TW 85115628 A TW85115628 A TW 85115628A TW 367536 B TW367536 B TW 367536B
- Authority
- TW
- Taiwan
- Prior art keywords
- surface treatment
- workpiece
- plasma
- damage
- employ
- Prior art date
Links
Abstract
A kind of surface treatment method which can change the surface properties of the object without damage by plasma and with large degree of freedom of the surface treatment space. In order to increase the wetness of the soft solder of workpiece, the gas material of halogen composite containing carbon fluoride is guided into the plasma generator of the surface treatment unit. At that time, it can also employ the pressure by gas carrier except the helium. The plasma generator can activate the material gas to decomposite by applying low frequency as 0 to 50 KHz of alternating voltage or direct voltage under normal atmosphere pressure and generate the reactive fluorine which is used to contact the surface of the workpiece. Then, because the process did not employ the short life-span fluoride as the main object, the position of workpiece can be freely configured so as to eliminate odor generation. The hydrogen halide can be effectively decomposited in an aquiferous atmosphere under decomposition of halide.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32814595 | 1995-11-07 | ||
| JP30254096A JP3796857B2 (en) | 1995-11-07 | 1996-10-28 | Surface treatment method and apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW367536B true TW367536B (en) | 1999-08-21 |
Family
ID=26563154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW085115628A TW367536B (en) | 1995-11-07 | 1996-12-18 | Surface treatment method the apparatus thereof for changing the surface properties of the object without damage by plasma |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP3796857B2 (en) |
| SG (1) | SG43457A1 (en) |
| TW (1) | TW367536B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100473432B1 (en) * | 1998-09-17 | 2005-03-08 | 가부시키가이샤 다무라 세이사쿠쇼 | Bump forming method, soldering preprocessing method, soldering method, soldering preprocessing apparatus and soldering apparatus |
| JP2004006511A (en) * | 2002-05-31 | 2004-01-08 | Toppan Printing Co Ltd | Plasma processing apparatus |
| KR101114803B1 (en) | 2004-03-31 | 2012-03-13 | 칸토 덴카 코교 가부시키가이샤 | Method for producing f2-containing gas, apparatus for producing f2-containing gas, method for modifying article surface, and apparatus for modifying article surface |
| JP5679139B2 (en) * | 2008-03-06 | 2015-03-04 | 東洋炭素株式会社 | Surface treatment equipment |
| JP6138441B2 (en) * | 2011-09-21 | 2017-05-31 | 株式会社Ｎｂｃメッシュテック | Airborne virus removal unit |
| JP2022163526A (en) * | 2021-04-14 | 2022-10-26 | 東京エレクトロン株式会社 | Substrate processing method |
-
1996
- 1996-10-28 JP JP30254096A patent/JP3796857B2/en not_active Expired - Lifetime
- 1996-12-18 TW TW085115628A patent/TW367536B/en not_active IP Right Cessation
- 1996-12-24 SG SG1996011908A patent/SG43457A1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JP3796857B2 (en) | 2006-07-12 |
| SG43457A1 (en) | 1997-10-17 |
| JPH09205272A (en) | 1997-08-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK4A | Expiration of patent term of an invention patent |