SG43457A1 - Surface processing method and apparatus - Google Patents

Surface processing method and apparatus

Info

Publication number
SG43457A1
SG43457A1 SG1996011908A SG1996011908A SG43457A1 SG 43457 A1 SG43457 A1 SG 43457A1 SG 1996011908 A SG1996011908 A SG 1996011908A SG 1996011908 A SG1996011908 A SG 1996011908A SG 43457 A1 SG43457 A1 SG 43457A1
Authority
SG
Singapore
Prior art keywords
processing method
surface processing
processing
Prior art date
Application number
SG1996011908A
Inventor
Takuya Miyakawa
Tsutsui Shoji
Yoshiaki Mori
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of SG43457A1 publication Critical patent/SG43457A1/en

Links

SG1996011908A 1995-11-07 1996-12-24 Surface processing method and apparatus SG43457A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP32814595 1995-11-07
JP30254096A JP3796857B2 (en) 1995-11-07 1996-10-28 Surface treatment method and apparatus

Publications (1)

Publication Number Publication Date
SG43457A1 true SG43457A1 (en) 1997-10-17

Family

ID=26563154

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996011908A SG43457A1 (en) 1995-11-07 1996-12-24 Surface processing method and apparatus

Country Status (3)

Country Link
JP (1) JP3796857B2 (en)
SG (1) SG43457A1 (en)
TW (1) TW367536B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100473432B1 (en) * 1998-09-17 2005-03-08 가부시키가이샤 다무라 세이사쿠쇼 Bump forming method, soldering preprocessing method, soldering method, soldering preprocessing apparatus and soldering apparatus
JP2004006511A (en) * 2002-05-31 2004-01-08 Toppan Printing Co Ltd Plasma processing apparatus
KR101114803B1 (en) 2004-03-31 2012-03-13 칸토 덴카 코교 가부시키가이샤 Method for producing f2-containing gas, apparatus for producing f2-containing gas, method for modifying article surface, and apparatus for modifying article surface
JP5679139B2 (en) * 2008-03-06 2015-03-04 東洋炭素株式会社 Surface treatment equipment
JP6138441B2 (en) * 2011-09-21 2017-05-31 株式会社Ｎｂｃメッシュテック Airborne virus removal unit
JP2022163526A (en) * 2021-04-14 2022-10-26 東京エレクトロン株式会社 Substrate processing method

Also Published As

Publication number Publication date
JPH09205272A (en) 1997-08-05
TW367536B (en) 1999-08-21
JP3796857B2 (en) 2006-07-12

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