TW365631B - Getter system for purifying the work atmosphere in the processes of physical vapor deposition - Google Patents

Getter system for purifying the work atmosphere in the processes of physical vapor deposition

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Publication number
TW365631B
TW365631B TW087118799A TW87118799A TW365631B TW 365631 B TW365631 B TW 365631B TW 087118799 A TW087118799 A TW 087118799A TW 87118799 A TW87118799 A TW 87118799A TW 365631 B TW365631 B TW 365631B
Authority
TW
Taiwan
Prior art keywords
purifying
processes
vapor deposition
physical vapor
getter
Prior art date
Application number
TW087118799A
Other languages
Chinese (zh)
Inventor
Andrea Conte
Francesco Mazza
Original Assignee
Getters Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Getters Spa filed Critical Getters Spa
Application granted granted Critical
Publication of TW365631B publication Critical patent/TW365631B/en

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Abstract

A system is disclosed formed of one or more getter devices in form of sintered bodies of getter powders or deposits of getter material onto a metal support, to be arranged in the work area of process chambers for the deposition of thin layers of metallic or ceramic materials from vapors or plasmas for purifying the gaseous atmosphere contained in that area.
TW087118799A 1997-12-23 1998-11-11 Getter system for purifying the work atmosphere in the processes of physical vapor deposition TW365631B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT9702862 1997-12-23

Publications (1)

Publication Number Publication Date
TW365631B true TW365631B (en) 1999-08-01

Family

ID=57941062

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087118799A TW365631B (en) 1997-12-23 1998-11-11 Getter system for purifying the work atmosphere in the processes of physical vapor deposition

Country Status (1)

Country Link
TW (1) TW365631B (en)

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