TW358985B - Method of formation of metal silicide - Google Patents

Method of formation of metal silicide

Info

Publication number
TW358985B
TW358985B TW085102541A TW85102541A TW358985B TW 358985 B TW358985 B TW 358985B TW 085102541 A TW085102541 A TW 085102541A TW 85102541 A TW85102541 A TW 85102541A TW 358985 B TW358985 B TW 358985B
Authority
TW
Taiwan
Prior art keywords
metal silicide
formation
silicon substrate
metal
metal coating
Prior art date
Application number
TW085102541A
Other languages
Chinese (zh)
Inventor
Zhi-Xun Zhu
Original Assignee
Nat Science Council
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Science Council filed Critical Nat Science Council
Priority to TW085102541A priority Critical patent/TW358985B/en
Application granted granted Critical
Publication of TW358985B publication Critical patent/TW358985B/en

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Abstract

A method of formation of metal silicide, including: provision of a silicon substrate; nitridation to the surface of the silicon substrate; metal coating on the nitridated silicon substrate; and heating of the silicon substrate with a metal coating, for forming of metal silicide.
TW085102541A 1996-03-02 1996-03-02 Method of formation of metal silicide TW358985B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW085102541A TW358985B (en) 1996-03-02 1996-03-02 Method of formation of metal silicide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW085102541A TW358985B (en) 1996-03-02 1996-03-02 Method of formation of metal silicide

Publications (1)

Publication Number Publication Date
TW358985B true TW358985B (en) 1999-05-21

Family

ID=57940565

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085102541A TW358985B (en) 1996-03-02 1996-03-02 Method of formation of metal silicide

Country Status (1)

Country Link
TW (1) TW358985B (en)

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