TW358037B - Method and apparatus for processing of waste gas - Google Patents

Method and apparatus for processing of waste gas

Info

Publication number
TW358037B
TW358037B TW087106643A TW87106643A TW358037B TW 358037 B TW358037 B TW 358037B TW 087106643 A TW087106643 A TW 087106643A TW 87106643 A TW87106643 A TW 87106643A TW 358037 B TW358037 B TW 358037B
Authority
TW
Taiwan
Prior art keywords
waste gas
cooler
receiving
boiling points
temperature
Prior art date
Application number
TW087106643A
Other languages
Chinese (zh)
Inventor
Rung-Sheng Shiue
Bing-Huang Yang
Da-Rung Fang
Jian-Jung Wang
Wei-Cheng Li
Tz-Da Jang
Chin-Shian Jung
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Desiccant Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co Ltd, Desiccant Technology Corp filed Critical Taiwan Semiconductor Mfg Co Ltd
Priority to TW087106643A priority Critical patent/TW358037B/en
Application granted granted Critical
Publication of TW358037B publication Critical patent/TW358037B/en

Links

Abstract

An apparatus for processing of waste gas, for use in waste gases having solvents, toxic substances and odorous substance of different boiling points, including: (a) a cooler, for cooling of temperature of the waste gas, and conversion of solvents having a higher boiling points into liquid state for removal; (b) a heat exchanger, for receiving the low-temperature waste gas processed by said cooler, and receiving of the waste gas from the pollution source, for heat exchange of said 2 waste gases; and (c) an adsorbent device, for receiving the waste gas processed by said cooler and through temperature surge in said heat exchanger, for removal of the solvent, toxicant and odorous substances of the lower boiling points from said waste gas.
TW087106643A 1998-04-29 1998-04-29 Method and apparatus for processing of waste gas TW358037B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW087106643A TW358037B (en) 1998-04-29 1998-04-29 Method and apparatus for processing of waste gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW087106643A TW358037B (en) 1998-04-29 1998-04-29 Method and apparatus for processing of waste gas

Publications (1)

Publication Number Publication Date
TW358037B true TW358037B (en) 1999-05-11

Family

ID=57940467

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087106643A TW358037B (en) 1998-04-29 1998-04-29 Method and apparatus for processing of waste gas

Country Status (1)

Country Link
TW (1) TW358037B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9109807B2 (en) 2011-12-21 2015-08-18 Industrial Technology Research Institute Device for desorption and dehumidification and system using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9109807B2 (en) 2011-12-21 2015-08-18 Industrial Technology Research Institute Device for desorption and dehumidification and system using the same

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