TW354409B - Etching source of an active ion etching - Google Patents

Etching source of an active ion etching

Info

Publication number
TW354409B
TW354409B TW086112231A TW86112231A TW354409B TW 354409 B TW354409 B TW 354409B TW 086112231 A TW086112231 A TW 086112231A TW 86112231 A TW86112231 A TW 86112231A TW 354409 B TW354409 B TW 354409B
Authority
TW
Taiwan
Prior art keywords
etching
source
active ion
ion etching
active
Prior art date
Application number
TW086112231A
Other languages
Chinese (zh)
Inventor
Yi-Ren Jan
Li-Shiue Lai
Original Assignee
Nat Science Council
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Science Council filed Critical Nat Science Council
Priority to TW086112231A priority Critical patent/TW354409B/en
Application granted granted Critical
Publication of TW354409B publication Critical patent/TW354409B/en

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  • Drying Of Semiconductors (AREA)

Abstract

A etching source of an active ion etching comprising the mixing gas of CHF3 and BCl3.
TW086112231A 1997-08-26 1997-08-26 Etching source of an active ion etching TW354409B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086112231A TW354409B (en) 1997-08-26 1997-08-26 Etching source of an active ion etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086112231A TW354409B (en) 1997-08-26 1997-08-26 Etching source of an active ion etching

Publications (1)

Publication Number Publication Date
TW354409B true TW354409B (en) 1999-03-11

Family

ID=57940206

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086112231A TW354409B (en) 1997-08-26 1997-08-26 Etching source of an active ion etching

Country Status (1)

Country Link
TW (1) TW354409B (en)

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees