TW352420B - Back alignment mark for half tone phase shift mask - Google Patents

Back alignment mark for half tone phase shift mask

Info

Publication number
TW352420B
TW352420B TW087110294A TW87110294A TW352420B TW 352420 B TW352420 B TW 352420B TW 087110294 A TW087110294 A TW 087110294A TW 87110294 A TW87110294 A TW 87110294A TW 352420 B TW352420 B TW 352420B
Authority
TW
Taiwan
Prior art keywords
alignment mark
shift mask
half tone
phase shift
back alignment
Prior art date
Application number
TW087110294A
Other languages
Chinese (zh)
Inventor
si-min Lin
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW087110294A priority Critical patent/TW352420B/en
Priority to US09/139,487 priority patent/US6048650A/en
Priority to JP25786098A priority patent/JP2000019714A/en
Application granted granted Critical
Publication of TW352420B publication Critical patent/TW352420B/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G03F1/32—Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G03F1/42—Alignment or registration features, e.g. alignment marks on the mask substrates
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

A back alignment mark for the half tone shift mask includes: a transparent base material with first and second surface; a first pattern layer appeared on the first surface, and at least part of the first pattern layer exposed to the alignment mark; a second pattern layer arranged on the second surface and at least part of the second pattern layer exposed to the hole patterns on the second surface.
TW087110294A 1998-06-25 1998-06-25 Back alignment mark for half tone phase shift mask TW352420B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW087110294A TW352420B (en) 1998-06-25 1998-06-25 Back alignment mark for half tone phase shift mask
US09/139,487 US6048650A (en) 1998-06-25 1998-08-25 Half tone phase shift mask comprising second pattern layer on backside of substrate
JP25786098A JP2000019714A (en) 1998-06-25 1998-09-11 Half-tone phase shift mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW087110294A TW352420B (en) 1998-06-25 1998-06-25 Back alignment mark for half tone phase shift mask

Publications (1)

Publication Number Publication Date
TW352420B true TW352420B (en) 1999-02-11

Family

ID=21630500

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087110294A TW352420B (en) 1998-06-25 1998-06-25 Back alignment mark for half tone phase shift mask

Country Status (3)

Country Link
US (1) US6048650A (en)
JP (1) JP2000019714A (en)
TW (1) TW352420B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI493643B (en) * 2011-10-31 2015-07-21 Intel Corp A getter reticle

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4053723B2 (en) * 2000-09-27 2008-02-27 株式会社東芝 Method for manufacturing exposure mask
JP2002107909A (en) * 2000-10-03 2002-04-10 Nec Corp Photomask and method for designing mask pattern of the same
JP2005134666A (en) * 2003-10-30 2005-05-26 Hoya Corp Photomask and method for forming video device
JP2007304369A (en) * 2006-05-12 2007-11-22 Elpida Memory Inc Photomask
JP5282031B2 (en) * 2006-05-15 2013-09-04 ドミトリィ ビー カーポティン Magnetic fine particles containing organic matter
US20080239263A1 (en) * 2007-03-29 2008-10-02 Asml Netherlands B.V. Lithographic system and device manufacturing method
US7754395B2 (en) * 2007-05-17 2010-07-13 Micron Technology, Inc. Methods of forming and using reticles
CN101661218B (en) * 2008-08-28 2012-06-13 富葵精密组件(深圳)有限公司 Method for preparing transparent light mask
KR102145884B1 (en) * 2012-12-24 2020-08-20 삼성디스플레이 주식회사 Reticle, exposing apparatus including the same, and exposing method
CN105093838B (en) * 2014-05-09 2018-09-07 中芯国际集成电路制造(上海)有限公司 A kind of method and structure preventing penumbra incidence photomask in exposure system
CN110148606B (en) * 2018-04-18 2021-03-02 友达光电股份有限公司 Display panel and method for manufacturing the same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5387484A (en) * 1992-07-07 1995-02-07 International Business Machines Corporation Two-sided mask for patterning of materials with electromagnetic radiation
US5929997A (en) * 1997-07-02 1999-07-27 Winbond Electronics Corp. Alignment-mark measurements on the backside of a wafer for synchronous wafer alignment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI493643B (en) * 2011-10-31 2015-07-21 Intel Corp A getter reticle

Also Published As

Publication number Publication date
US6048650A (en) 2000-04-11
JP2000019714A (en) 2000-01-21

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