TW325531B - The design method for phase-shifting mask to prevent phase-conflicted - Google Patents
The design method for phase-shifting mask to prevent phase-conflictedInfo
- Publication number
- TW325531B TW325531B TW086101368A TW86101368A TW325531B TW 325531 B TW325531 B TW 325531B TW 086101368 A TW086101368 A TW 086101368A TW 86101368 A TW86101368 A TW 86101368A TW 325531 B TW325531 B TW 325531B
- Authority
- TW
- Taiwan
- Prior art keywords
- transparent
- phase
- pattern
- conflicted
- mask substrate
- Prior art date
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
A design method for phase-shifting mask to prevent phase-conflicted,includes: A transparent mask substrate; Form some density parallel non-transparent patterns on transparent mask substrate, and both sides of each non-transparent parallel pattern have transparent area with equal interval; And add triangle non-transparent pattern on end of each non-transparent parallel line, and the bottom of triangle pattern has same width with parallel line, and its height is extended to outside; Form some phase-shifting patterns on transparent mask substrate, and alternately appear each phase-shifting pattern on both sides of non-transparent parallel line; Form some transparent pattern on transparent mask substrate, and alternately appear each transparent pattern on both sides of non-transparent parallel line.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086101368A TW325531B (en) | 1997-01-31 | 1997-01-31 | The design method for phase-shifting mask to prevent phase-conflicted |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086101368A TW325531B (en) | 1997-01-31 | 1997-01-31 | The design method for phase-shifting mask to prevent phase-conflicted |
Publications (1)
Publication Number | Publication Date |
---|---|
TW325531B true TW325531B (en) | 1998-01-21 |
Family
ID=58262169
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086101368A TW325531B (en) | 1997-01-31 | 1997-01-31 | The design method for phase-shifting mask to prevent phase-conflicted |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW325531B (en) |
-
1997
- 1997-01-31 TW TW086101368A patent/TW325531B/en not_active IP Right Cessation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |