TW325531B - The design method for phase-shifting mask to prevent phase-conflicted - Google Patents

The design method for phase-shifting mask to prevent phase-conflicted

Info

Publication number
TW325531B
TW325531B TW086101368A TW86101368A TW325531B TW 325531 B TW325531 B TW 325531B TW 086101368 A TW086101368 A TW 086101368A TW 86101368 A TW86101368 A TW 86101368A TW 325531 B TW325531 B TW 325531B
Authority
TW
Taiwan
Prior art keywords
transparent
phase
pattern
conflicted
mask substrate
Prior art date
Application number
TW086101368A
Other languages
Chinese (zh)
Inventor
Chang-Ming Day
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW086101368A priority Critical patent/TW325531B/en
Application granted granted Critical
Publication of TW325531B publication Critical patent/TW325531B/en

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Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

A design method for phase-shifting mask to prevent phase-conflicted,includes: A transparent mask substrate; Form some density parallel non-transparent patterns on transparent mask substrate, and both sides of each non-transparent parallel pattern have transparent area with equal interval; And add triangle non-transparent pattern on end of each non-transparent parallel line, and the bottom of triangle pattern has same width with parallel line, and its height is extended to outside; Form some phase-shifting patterns on transparent mask substrate, and alternately appear each phase-shifting pattern on both sides of non-transparent parallel line; Form some transparent pattern on transparent mask substrate, and alternately appear each transparent pattern on both sides of non-transparent parallel line.
TW086101368A 1997-01-31 1997-01-31 The design method for phase-shifting mask to prevent phase-conflicted TW325531B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086101368A TW325531B (en) 1997-01-31 1997-01-31 The design method for phase-shifting mask to prevent phase-conflicted

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086101368A TW325531B (en) 1997-01-31 1997-01-31 The design method for phase-shifting mask to prevent phase-conflicted

Publications (1)

Publication Number Publication Date
TW325531B true TW325531B (en) 1998-01-21

Family

ID=58262169

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086101368A TW325531B (en) 1997-01-31 1997-01-31 The design method for phase-shifting mask to prevent phase-conflicted

Country Status (1)

Country Link
TW (1) TW325531B (en)

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees