TW351000B - Method of manufacturing damascene interconnection in multi-layer dielectric - Google Patents

Method of manufacturing damascene interconnection in multi-layer dielectric

Info

Publication number
TW351000B
TW351000B TW087101539A TW87101539A TW351000B TW 351000 B TW351000 B TW 351000B TW 087101539 A TW087101539 A TW 087101539A TW 87101539 A TW87101539 A TW 87101539A TW 351000 B TW351000 B TW 351000B
Authority
TW
Taiwan
Prior art keywords
dielectric
layer
conductor
resistron
graphic
Prior art date
Application number
TW087101539A
Other languages
English (en)
Inventor
Shiun-Ming Jang
Jen-Hua Yu
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co Ltd filed Critical Taiwan Semiconductor Mfg Co Ltd
Priority to TW087101539A priority Critical patent/TW351000B/zh
Application granted granted Critical
Publication of TW351000B publication Critical patent/TW351000B/zh

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
TW087101539A 1998-02-05 1998-02-05 Method of manufacturing damascene interconnection in multi-layer dielectric TW351000B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW087101539A TW351000B (en) 1998-02-05 1998-02-05 Method of manufacturing damascene interconnection in multi-layer dielectric

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW087101539A TW351000B (en) 1998-02-05 1998-02-05 Method of manufacturing damascene interconnection in multi-layer dielectric

Publications (1)

Publication Number Publication Date
TW351000B true TW351000B (en) 1999-01-21

Family

ID=57939966

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087101539A TW351000B (en) 1998-02-05 1998-02-05 Method of manufacturing damascene interconnection in multi-layer dielectric

Country Status (1)

Country Link
TW (1) TW351000B (zh)

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