TW346642B - Apparatus and method for cleaning or etching of flat substrates - Google Patents

Apparatus and method for cleaning or etching of flat substrates

Info

Publication number
TW346642B
TW346642B TW086108868A TW86108868A TW346642B TW 346642 B TW346642 B TW 346642B TW 086108868 A TW086108868 A TW 086108868A TW 86108868 A TW86108868 A TW 86108868A TW 346642 B TW346642 B TW 346642B
Authority
TW
Taiwan
Prior art keywords
cleaning
etching
flat substrates
tank
substrates
Prior art date
Application number
TW086108868A
Other languages
English (en)
Inventor
Marc Meuris
Paul Mertens
Marc Heyns
Original Assignee
Imec Inter Uni Micro Electr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec Inter Uni Micro Electr filed Critical Imec Inter Uni Micro Electr
Priority to TW086108868A priority Critical patent/TW346642B/zh
Application granted granted Critical
Publication of TW346642B publication Critical patent/TW346642B/zh

Links

Landscapes

  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
TW086108868A 1997-06-25 1997-06-25 Apparatus and method for cleaning or etching of flat substrates TW346642B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086108868A TW346642B (en) 1997-06-25 1997-06-25 Apparatus and method for cleaning or etching of flat substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086108868A TW346642B (en) 1997-06-25 1997-06-25 Apparatus and method for cleaning or etching of flat substrates

Publications (1)

Publication Number Publication Date
TW346642B true TW346642B (en) 1998-12-01

Family

ID=58263914

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086108868A TW346642B (en) 1997-06-25 1997-06-25 Apparatus and method for cleaning or etching of flat substrates

Country Status (1)

Country Link
TW (1) TW346642B (zh)

Similar Documents

Publication Publication Date Title
FR2705690B1 (fr) Installation pourvue d'un dispositif d'admission de gaz, pour le traitement de substrats dans un récipient sous vide, et procédé pour ce traitement.
EP0629014A3 (de) Verfahren und Vorrichtung zur Befeuchtung von Prozessgas für den Betrieb von Brennstoffzellensystemen.
AU6138199A (en) Fluid treatment elements, methods for cleaning fluid treatment elements and methods for treating fluids
DE50014896D1 (de) Brennstoffzellen-system und brennstoffzelle für derartiges system
GB9911235D0 (en) Method and apparatus for physicical refining a liquid containing dissolved gases and gas bubbles
GB0104737D0 (en) Purge fuel flow rate determination method
SE9801287D0 (sv) Incorporation of active substances in carrier matrixes
AU7080796A (en) Apparatus for treating liquids
ZA964858B (en) Nozzle for delivering liquid/gas mixture.
IL62701A (en) Installations and methods for the preparation of fuel gases by fermentation
DE69932101D1 (de) Verfahren und vorrichtung zur kontinuierlichen durchführung von gas-flüssigkeitsreaktionen
AU1889295A (en) Rectangular flotation plant
CA2351335A1 (en) Emissions reduction system and method therefor
NZ336014A (en) Method and device for bringing a gas and liquid into contact with one another
WO2001009282A3 (de) Vorrichtung zum züchten und/oder behandeln von zellen
CA2448177A1 (en) Process for dosing an additive into a fuel
BR9913119A (pt) Aparelho e método para medir nox e taxas de nitrificação/desnitrificação em processos bioquìmicos
CA2353991A1 (en) Apparatus and method for measuring nox and nitrification/denitrification rates in biochemical processes
TW346642B (en) Apparatus and method for cleaning or etching of flat substrates
EP1090674A4 (en) METHOD AND DEVICE FOR PURIFYING HARMFUL GAS
AU3548500A (en) Mixer for liquid or solid substances
PL331367A1 (en) Apparatus for enriching liquids with gases
MY135999A (en) Mittigation of coke deposits in refinery reactor units
NO912937L (no) Beholder for brenngass i flytende tilstand.
PL331368A1 (en) Apparatus for enriching liquids with gases

Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent